WO2011078650A3 - Method for fabricating nanofluidic channels - Google Patents

Method for fabricating nanofluidic channels Download PDF

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Publication number
WO2011078650A3
WO2011078650A3 PCT/MY2010/000316 MY2010000316W WO2011078650A3 WO 2011078650 A3 WO2011078650 A3 WO 2011078650A3 MY 2010000316 W MY2010000316 W MY 2010000316W WO 2011078650 A3 WO2011078650 A3 WO 2011078650A3
Authority
WO
WIPO (PCT)
Prior art keywords
nanofluidic
channels
resolution
fabricating
provides
Prior art date
Application number
PCT/MY2010/000316
Other languages
French (fr)
Other versions
WO2011078650A2 (en
Inventor
Chia Sheng Daniel Bien
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Publication of WO2011078650A2 publication Critical patent/WO2011078650A2/en
Publication of WO2011078650A3 publication Critical patent/WO2011078650A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02—Adapting objects or devices to another
    • B01L2200/025—Align devices or objects to ensure defined positions relative to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
    • B01L2200/0663—Stretching or orienting elongated molecules or particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0896—Nanoscaled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054

Abstract

The present invention provides the method for fabricating nanofluidic channels (23) with a combination of the formation of silicon (22B) or oxide nanowires (22) on a handle substrate (20), layered with or without an insulating material together with wafer planarization techniques. The process provides a simple and practical solution for low cost fabrication of nanofluidic channel with well controlled dimensions where the resolution of the channels is dependent on the resolution of the nanowires instead of on the lithographic tool or type of resist used. This method is compatible with standard CMOS process allowing easy integration on the same platform with other nanofluidic devices and systems fabricated using similar methods.
PCT/MY2010/000316 2009-12-22 2010-12-13 Method for fabricating nanofluidic channels WO2011078650A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI20097035 2009-12-22
MYPI20097035A MY168162A (en) 2009-12-22 2009-12-22 Method for fabricating nanofluidic channels

Publications (2)

Publication Number Publication Date
WO2011078650A2 WO2011078650A2 (en) 2011-06-30
WO2011078650A3 true WO2011078650A3 (en) 2011-12-22

Family

ID=44196366

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/MY2010/000316 WO2011078650A2 (en) 2009-12-22 2010-12-13 Method for fabricating nanofluidic channels

Country Status (2)

Country Link
MY (1) MY168162A (en)
WO (1) WO2011078650A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9643179B1 (en) 2016-06-24 2017-05-09 International Business Machines Corporation Techniques for fabricating horizontally aligned nanochannels for microfluidics and biosensors
DE102020202262A1 (en) * 2020-02-21 2021-08-26 Robert Bosch Gesellschaft mit beschränkter Haftung Process for the production of a nanoscale channel structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7077725B2 (en) * 1999-11-29 2006-07-18 Applied Materials, Inc. Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus
US7189635B2 (en) * 2004-09-17 2007-03-13 Hewlett-Packard Development Company, L.P. Reduction of a feature dimension in a nano-scale device
US20090263912A1 (en) * 2004-05-13 2009-10-22 The Regents Of The University Of California Nanowires and nanoribbons as subwavelength optical waveguides and their use as components in photonic circuits and devices

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7077725B2 (en) * 1999-11-29 2006-07-18 Applied Materials, Inc. Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus
US20090263912A1 (en) * 2004-05-13 2009-10-22 The Regents Of The University Of California Nanowires and nanoribbons as subwavelength optical waveguides and their use as components in photonic circuits and devices
US7189635B2 (en) * 2004-09-17 2007-03-13 Hewlett-Packard Development Company, L.P. Reduction of a feature dimension in a nano-scale device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CHOI, YANG-KYU. ET AL.: "Sub-Lithographic Patterning Technology for Nanowire Model Catalysts and D NA Label-Free Hybridization Detection", PROCEEDINGS OF SPIE, vol. 5220, 2003, BELLINGHAM, WA, pages 17 *

Also Published As

Publication number Publication date
WO2011078650A2 (en) 2011-06-30
MY168162A (en) 2018-10-11

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