WO2011024539A1

WO2011024539A1 - Expansion device using carbon nanotube and method for manufacturing same

Info

Publication number: WO2011024539A1
Application number: PCT/JP2010/060042
Authority: WO
Inventors: 健郎山田; 賢治畠; 裕平早水
Original assignee: 独立行政法人産業技術総合研究所
Priority date: 2009-08-25
Filing date: 2010-06-14
Publication date: 2011-03-03
Also published as: JP5397896B2; JP2011047702A

Abstract

Conventional expansion devices according to prior art capable of detecting expansion and contraction can repeatedly detect expansion and contraction of only about 5% since the devices have not employed so to speak sufficiently expandable members such as metals and semiconductors. Disclosed is an expansion device capable of repeatedly detecting expansion and contraction remarkably larger than that detected by the conventional devices. Specifically disclosed is an expansion device which comprises an oriented CNT film structure having a plurality of CNTs oriented in a predetermined direction and disposed on an expandable base. The oriented CNT film structure includes crack bands formed by cracks generated by expansion.

Description

Stretcher using carbon nanotubes and method of manufacturing the same

TECHNICAL FIELD The present invention relates to an expansion device configured from an oriented carbon nanotube film structure (hereinafter, referred to as an oriented CNT film structure) disposed on an expandable base material, and a method for producing the same.

Stretching devices that detect stretching, such as existing strain gauges, are mainly made of metal or semiconductor. These expansion and contraction devices detect expansion and contraction from the change in resistance when metal and semiconductor expand and contract (strain), and measure the amount of expansion and contraction. Compared with elastic materials such as rubber, semiconductors and metals have an extremely small amount of deformation that can be essentially expanded and contracted, and in elastic deformation that can measure strain repeatedly, the amount of expansion or contraction (strain amount) that can be measured is about 5% It is. If the material is plastically deformed, it is possible to measure an elongation of about 30%, but since the material deforms irreversibly due to the plastic deformation, the expansion and contraction can be measured only once. The technical problem that this large expansion and contraction can not be measured repeatedly has limited the applicable range of the expansion and contraction device which detects expansion and contraction. For example, human skin stretches up to about 20%. In the telescopic device according to the prior art, the telescopic device which is stuck on human skin or clothes and repeatedly detects a large human movement can not be realized.

The expansion and contraction apparatus capable of detecting expansion and contraction according to the prior art does not use a sufficiently expandable member such as metal or semiconductor, so that the expansion and contraction that can be repeatedly detected is limited to about 5%. In view of such problems of the prior art, the present invention provides an expansion device capable of repeatedly detecting expansion and contraction much larger than that of the prior art.

In this specification, the term "elastic" means that the material does not break even if it receives expansion and contraction, and the property of stretching and shrinking means that the material is more elastic than the elastic material. Indicates a low degree.

According to one embodiment of the present invention, an oriented CNT film structure comprising a plurality of CNTs arranged on a stretchable substrate and oriented in a predetermined direction is provided, and the oriented CNT film structure is fractured by elongation. An elastic device is provided which is formed by forming a crack band.

The cracked zone may have a crosslinked structure of at least one CNT.

The at least one CNT constituting the cross-linked structure may be disposed to be inclined with respect to the expansion and contraction direction.

The cracked bands may be arranged in a mesh after reaching a predetermined elongation.

The oriented CNT film structure may be densified.

The plurality of CNTs may be pasted and arranged on the stretchable base material without warping.

The oriented CNT film structure may have a Hermann's orientation coefficient of 0 or more, preferably 0.3 or more and 1 or less.

The oriented CNT film structure may have a weight density of 0.1 to 1.5 g / cm ³ and / or have a thickness of 10 nm to 100 μm.

Further, according to one embodiment of the present invention, an aligned CNT film structure including a plurality of CNTs arranged on a stretchable base material and oriented in a predetermined direction, and the aligned CNT film structure are fractured by elongation. And forming a fissure zone, and a member for supplying an expansion and contraction force for supplying an expansion and contraction force to the oriented CNT film structure.

The elastic force supply member may be a fixture for attaching to the elastic drive device.

The expansion and contraction device may include a detection device that detects expansion and contraction.

Further, according to one embodiment of the present invention, the oriented CNT film structure is provided with an oriented CNT film structure provided on a stretchable base material and including a plurality of CNTs oriented in a predetermined direction, and the stretched CNT film structure An expansion and contraction drive device is provided that includes an expansion and contraction device in which a crack is generated to form a crack band, and a drive device that drives the expansion and contraction device.

According to the method of the present invention, a stretching apparatus comprising an oriented CNT film structure, which detects a structural change in the oriented CNT film structure (the degree of stretching of the CNT), it is remarkable compared to the conventional method. It is possible to provide an expansion device capable of repeatedly detecting large expansion and contraction exceeding 200%. In addition, it can be applied to human skin using this stretch device to realize a stretch device that detects human movement, etc., and it can be fully expected to be used in new industries.

It is a schematic diagram of the expansion-contraction apparatus of this invention which concerns on one Embodiment. It is a schematic diagram of the expansion-contraction drive device of this invention which concerns on one Embodiment. It is a schematic diagram of the shape of the board | substrate of this invention which concerns on one Embodiment. FIG. 5 is a schematic view illustrating a process of making the CNT microfilm structure of the present invention according to one embodiment. It is a figure which shows the crack band generation | occurrence | production model of this invention which concerns on one Embodiment. It is a schematic diagram of the expansion-contraction apparatus of this invention which concerns on one Embodiment. It is an atomic-microscope photograph of the crack zone and bridge | crosslinking body which arose in the oriented CNT film structure of this invention which concerns on one Embodiment. It is an atomic-microscope photograph of the crack zone and bridge | crosslinking body which arose in the oriented CNT film structure of this invention which concerns on one Embodiment. It is an atomic-microscope photograph of the crack zone and bridge | crosslinking body which arose in the oriented CNT film structure of this invention which concerns on one Embodiment. It is a figure which shows the operation | movement mechanism of an expansion-contraction apparatus. It is a figure which shows a mode that a crack body is formed in the oriented CNT film | membrane structure. It is a figure which shows the operation | movement mechanism of an expansion-contraction apparatus. FIG. 6 illustrates the operating characteristics of the telescopic device with sensing device of the present invention according to one embodiment. It is a figure which shows the oriented CNT film arrangement | positioning process of this invention which concerns on one Embodiment. It is a figure which shows the CNT mounting method of this invention which concerns on one Embodiment. It is a figure which shows the CNT mounting method of this invention which concerns on one Embodiment. FIG. 2 is a view showing the shape of the base material of Example 1; FIG. 7 is a view showing an example of a manufacturing process of the expansion and contraction device of Example 1. FIG. 5 is a schematic view showing a method of manufacturing a base material of Example 1; FIG. 2 is a schematic view showing the shape of a molded substrate of Example 1; FIG. 2 is a schematic view showing the shape of a molded substrate of Example 1; FIG. 2 is a schematic view showing the shape of a molded substrate of Example 1; FIG. 2 is a schematic view showing the shape of a molded substrate of Example 1; FIG. 5 is a schematic view showing a CNT mounting method of Example 1. FIG. 7 is a schematic view of a stretching apparatus using the CNT microfilm structure of Example 2. FIG. 10 is a schematic view of an extension and contraction device including a detection device provided in a rigid area according to a third embodiment. FIG. 14 is a diagram showing a process of manufacturing a detection device of Example 3. FIG. 14 is a schematic view of an expansion and contraction device including the detection device having elasticity according to a fourth embodiment. FIG. 14 is a diagram showing a process of manufacturing a detection device of Example 4. FIG. 18 is a schematic view of a telescopic device provided with a rigid telescopic force supply unit according to a fifth embodiment. FIG. 18 is a schematic view of an expansion and contraction apparatus including an expansion and contraction power supply portion having elasticity according to a sixth embodiment. The expansion-contraction apparatus with the member for expansion-contraction force supply of Example 7. The expansion-contraction apparatus with the member for expansion-contraction force supply of Example 7. The example of a motion detection by the expansion-contraction apparatus with the member for expansion-contraction force supply of Example 7. FIG. The expansion-contraction apparatus with the member for expansion-contraction force supply of Example 8. The example of a detection of the vibration by the expansion-contraction apparatus with the member for expansion-contraction force supply of Example 8. FIG. The expansion-contraction apparatus with the member for expansion-contraction force supply of Example 9. FIG. The telescopic drive apparatus of Example 10. FIG. 21 is a view showing the method of manufacturing the extension and contraction drive device of the tenth embodiment. The driving apparatus of Embodiment 10. FIG. 21 is a view showing a manufacturing process of a member for supplying and receiving an expansion and contraction force of Example 10. FIG. 21 is a view showing the manufacturing process of the stretchable detection device of the tenth embodiment.

DESCRIPTION OF SYMBOLS 1 Stretching device 2 Base material 3 Oriented CNT film structure 4 Stretching force supply member 5 Detection device 6 Orientation direction of CNT 7 Crack band 8 CNT crosslinked body 9 Drive device 10 Stretching drive device 11 Hard substrate 12 Rigidity area 13 Stretching area 14 Conductive paste 15 Conductive film 16 Stretchable electrode 17 Wiring 18 Adhesion layer 19 Sealing material 20 Oriented CNT film structure 21 Base material 22 Electronic circuit 23 Intermediate layer 24 Gap 50 CNT micro film structure 51 Oriented CNT film structure 52 Resist film 53 Resist mask 60 Stretching device of Example 2 70 Stretching device of Example 3 75 Sensing device 80 Stretching device of Example 4 85 Sensing device 90 Stretching device of Example 5 94 Stretching force supply member 95 Adhesive 96 Glass 96 Substrate 100 Stretching device 104 of Example 6 Stretching force supply member 105 Adhesive 106 Rubber sheet 110 Stretching device 114 of the seventh embodiment Stretching force supply member 120 Stretching device 124 of the eighth embodiment Stretching force member 130 Stretching device of the ninth embodiment Stretching force member 137 Detection device 140 Stretching device of the tenth embodiment 141 Stretching Device 142 Drive Device 143 Base Material 144 Stretching Force Supply Member 145 Fixed Part 146 Rotating Part 147 Detection Device 148 Transfer Base Material 149 Gripping Mechanism 150 Adhesive

Hereinafter, a stretching device using a carbon nanotube according to the present invention and a method of manufacturing the same will be described with reference to the drawings. However, the stretchable device using the carbon nanotube of the present invention and the method of manufacturing the same are not construed as being limited to the description of the embodiments and examples described below. Note that in the drawings referred to in this embodiment mode and examples, the same portions or portions having similar functions are denoted by the same reference numerals, and the description thereof will not be repeated.

(Embodiment 1)
Hereinafter, an example of the telescopic device according to the present invention and the telescopic drive device will be described in detail with reference to the attached FIG. FIG. 1 is a schematic view of the telescopic device of the present invention according to the first embodiment.

The telescopic device herein refers to a telescopic device. In particular, the expansion / contraction apparatus 1 of the present invention is characterized in that it comprises an oriented CNT film structure 3 disposed on an expandable base material 2 and including a plurality of carbon nanotubes (CNTs) oriented in a predetermined direction. The stretching device 1 may be provided with a stretching force supply member 4 which is a member for supplying a stretching force to the oriented CNT film structure 3. In addition, for example, a detection device 5 may be provided that detects expansion and contraction by measuring a structural change of the aligned CNT film structure 3.

Furthermore, the present invention also provides an expansion / contraction drive device 10 provided with the above-mentioned expansion / contraction device 1 and further comprising a drive device for driving the expansion / contraction device 1 (FIG. 2). The expansion / contraction device 1 provided with such an oriented CNT film structure 3 and the expansion / contraction drive device 10 not only can detect large expansion and contraction but also can be used repeatedly, and show performance far superior to that of the conventional expansion and contraction device.

(Stretchable base material)
The base material in the present invention is stretchable in at least one direction and only needs to be able to arrange the oriented CNT film structure 3, and does not depend on the shape, the material, and the mounting method. The material may be stretchable as long as it can be, for example, resin, rubber, an elastic body, and the like. In particular, materials with very high stretchability, such as polydimethylsiloxane (PDMS), are preferred because large stretch can be detected. In the case of detecting the resistance change of the aligned CNT film structure 3 due to expansion and contraction, it is preferable that the substrate 2 itself does not have electrical conductivity.

The shape of the substrate is particularly preferably a three-dimensional shape such as a plate-like rectangular solid that does not cause stress concentration due to expansion and contraction, but is not limited thereto. For example, the shape of the substrate made of the oriented CNT film structure 20 and the base 21 may be a flat surface (FIG. 3A), a curved surface (FIG. 3B) or a flexible one (FIG. 3C). There is no limitation on the thickness of the substrate. Further, the entire surface of the substrate 21 does not have to be covered with the oriented CNT film structure 20. For example, the oriented CNT film structure 20 is patterned (FIG. 3 (d)), the substrate surface is partially exposed (FIG. 3 (e)), and the electronic circuit 22 is formed (FIG. 3 (d)). Fig. 3 (f) can be considered. In addition, the oriented CNT film structure 20 does not have to be mounted in direct contact with the substrate 21, and an intermediate layer 23 may be provided between the substrate and the substrate for the purpose of improving adhesiveness (FIG. g)). In order to reduce the contact area between the aligned CNT film structure 20 and the base material 21, a gap 24 may be provided as an intermediate layer (FIG. 3 (h)).

(Oriented CNT film)
The term "CNT film" as used herein refers to an aggregate of a plurality of CNTs grown from a growth substrate, which is obtained by exfoliating the aligned CNT aggregate from the growth substrate. When a plurality of CNTs are oriented in a certain direction in at least a part of the CNT film, a stretch device excellent in stretchability can be obtained. In the present specification, the above-mentioned CNT film is defined as an oriented CNT film. The shape and form of the oriented CNT film may be arranged on the above-described expandable and expandable base material, as long as the densification step can be carried out, and may be, for example, a thin plate, a sheet, a foil or a ribbon.

When the density of the oriented CNT film is in the range of 0.01 g / cm ³ or more and 0.1 g / cm ³ or less, when the oriented CNT film is removed from the growth substrate, it does not break apart, and will be described later. The density is so low that it can be densified, which is preferable.

The oriented CNT film can be produced by a known chemical vapor synthesis method. This is obtained by forming a catalyst layer on a growth substrate and subjecting the catalyst to chemical vapor deposition (CVD) of a plurality of CNTs. An oriented CNT film is obtained by growing a plurality of CNTs oriented in a certain direction from a catalyst patterned on a growth substrate using the method described in Japanese Patent Application No. 2009-001586 and Japanese Patent Application No. 2006-527894. Be The properties of the oriented CNT film produced by the method described in Japanese Patent Application No. 2009-001586 and Japanese Patent Application No. 2006-527894 depend on the details of the manufacturing conditions, but a single-layer CNT content of 99% (two layers) as a typical value CNT, ratio of the number of single-walled CNTs to multi-walled CNTs, and the synthesized aligned single-walled CNTs are observed with a transmission electron microscope to obtain from images), density: 0.03 g / cm ³ , G / D ratio: 2 .5 to 40, BET-specific surface area: 1150 m ² / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98%, Hermann's orientation coefficient 0.3 to 0.7 It is.

(Aligned CNT film structure)
The oriented CNT film structure refers to a structure of CNTs which can be disposed on a stretchable base material and which is filled with a plurality of CNTs at a high density. Such an oriented CNT film structure can be obtained by removing the oriented CNT film from the growth substrate, arranging it on another stretchable substrate, and performing a densification treatment. A film-like oriented CNT film structure whose position and orientation are controlled, arranged on a substrate without curling and uniform in thickness is preferable because control of structural change during expansion and contraction is easy.

(Arrangement of oriented CNT film structure)
It is important to control the properties that the oriented CNT film structure is disposed on the substrate with its position and orientation controlled and without curling. Here, the state in which the position of the aligned CNT film structure is controlled refers to a state in which the aligned CNT film structure is disposed in a desired region on the base material. Furthermore, “a state in which the orientation of the aligned CNT film structure is controlled” refers to a state in which the alignment directions of the aligned CNT film structure are aligned within an acceptable range. Furthermore, “a state in which the oriented CNT film structure does not warp” refers to a state in which the aligned CNT film structure is in a desired region on the substrate and each CNT of the oriented CNT film is within the vertical tolerance.

In the oriented CNT film structure, one region may be formed on the base material, or a plurality of regions may be formed, and furthermore, the regions may be formed to be separated from each other.

(Weight density of oriented CNT film structure)
It is the ratio of volume to weight in the oriented CNT film structure, and is given by the following equation when the thickness is uniform.
Weight density = weight of CNT assembly / (area of CNT assembly × thickness of CNT assembly)

The plurality of CNTs constituting the aligned CNT film structure are such that adjacent CNTs are strongly coupled to each other by the van der Waals force, and the weight density of the CNTs in the aligned CNT film structure is generally 0.1 to It is 1.5 g / cm ³ , more preferably 0.2 to 1.5 g / cm ³ . As described above, when the weight density of CNTs in the aligned CNT film structure is equal to or more than the above lower limit, the CNTs are uniformly filled without gaps, and the aligned CNT film structure exhibits a rigid appearance as a solid, Sometimes the required structural changes described below will be obtained. On the contrary, when the weight density of the CNTs does not reach the above value, a significant gap is generated between the CNTs constituting the oriented CNT film structure. Therefore, the oriented CNT film structure is not a rigid solid, and the required structural change described later can not be obtained during expansion and contraction. In addition, even if it is intended to apply a solution such as a resist, the solution will penetrate into the gaps between the CNTs, making it difficult to apply known patterning techniques and etching techniques, and an oriented CNT film having a desired shape and characteristics. Manufacturing of the structure becomes difficult. Here, the weight density of the CNTs in the oriented CNT film structure is generally preferably as large as possible, but the upper limit value thereof is about 1.5 g / cm ³ because of the limitation in production.

(Alignment of oriented CNT film structure)
Furthermore, when a plurality of CNTs are oriented in a certain direction in at least a partial region of the oriented CNT film structure, a crack band described later is suitably generated in the oriented CNT film structure at the time of expansion and contraction, and more than before. It is possible to manufacture an excellent expansion and contraction device that can repeatedly detect an extremely large expansion and contraction.

The degree of orientation of the aligned CNT film structure can be evaluated by Herman's orientation factor. In the expansion device of the present invention, the Hermann's orientation coefficient is preferably 0 or more, more preferably 0.3 or more and 1 or less. When the Hermann's orientation coefficient of at least one orientation region is in the range of 0 or more and 1 or less, a crack band is suitably generated in the oriented CNT film structure during expansion and contraction. When the Hermann's orientation coefficient of at least one orientation region is in the range of 0.3 or more and 1 or less, and the orientation direction is at an angle close to 90 degrees with respect to the direction of expansion and contraction, concentration of strain on CNTs It is possible to obtain an oriented CNT film structure which is not broken even when it is relaxed and subjected to large expansion and contraction.

(Thickness of oriented CNT film structure)
The thickness of the oriented CNT film structure can be arbitrarily set to a desired value according to the needs of the stretching apparatus. When the thickness of the oriented CNT film structure is 10 nm or more, the integrity as a film can be maintained, and the disposing step and the densification step can be performed. On the other hand, it was difficult to produce an aligned CNT film structure having continuity and uniformity if the thickness is 10 nm or less. The upper limit of the film thickness is not particularly limited, but when it is used for such a stretching device, about 100 μm is preferable in order to have both stretchability and flexibility.

The stretchable region of the aligned CNT film structure is preferably as uniform as possible. When the thickness of the oriented CNT film structure is uniform, the crack band is easily generated uniformly in the expansion and contraction region at the time of expansion and contraction, and is easily developed into a network-like crack band. In this way, it is possible to obtain an aligned CNT film structure which does not break even when subjected to large expansion and contraction.

(CNTs that make up an oriented CNT film structure)
The CNTs constituting the CNT layer may be single-walled CNTs or multi-walled CNTs. Which type of CNT is to be used can be determined according to the required properties of the oriented CNT film structure. For example, when high conductivity, flexibility, etc. are required, single-walled CNTs can be used. It can be used, and multilayer CNT can be used when rigidity, metallic properties and the like are important.

(Patterned oriented CNT film structure)
Next, the CNT microfilm structure will be described. Here, the "CNT micro film structure" refers to an oriented CNT film structure patterned and processed. The patterning is suitable for disposing the aligned CNT film structure in a desired region on the substrate, which makes it possible to manufacture an expansion device exhibiting desired performance with good controllability. If the oriented CNT film structure has the density and thickness as described above, a resist is applied on the oriented CNT film structure, an arbitrary pattern is drawn on the resist by lithography, and the oriented CNT film structure is formed using the resist as a mask It becomes easy to etch unnecessary parts and form circuits or devices of any shape. That is, according to this, application of known patterning technology and etching technology becomes possible, and it becomes possible to strictly control the shape and manufacture an oriented CNT film structure having desired characteristics.

In the method of producing the CNT microfilm structure, first, as shown in FIG. 4A, a resist film 52 is applied to the oriented CNT film structure 51. As the resist film 52, any resist such as an electron beam resist, a photoresist, etc. can be used as long as it can form a shape, and even if it has a low etching selectivity with respect to CNT, it can be selected It is sufficient to form a resist sufficiently thicker than the oriented CNT film structure 51 to a ratio or more.

Next, drawing (for example, electron beam drawing or photolithography) according to the properties of the resist film 52 is performed on the resist film 52 applied on the aligned CNT film structure 51 to construct the CNT microfilm structure 51. A resist film 52A having a desired shape desired to be drawn is drawn (FIG. 4 (b)).

Next, the drawn resist is developed to form a resist mask 53 on the oriented CNT film structure 51 (FIG. 4C). Then, the aligned CNT film structure 51 is etched, and the resist mask 53 is used to process the aligned CNT film structure 51 into a desired shape (FIG. 4 (d)). After processing the aligned CNT film structure 51, the resist mask 53 is removed to obtain a CNT micro film structure 50 having a desired shape (FIG. 4 (e)).

In the present invention, when the oriented CNT film structure is patterned, it is necessary to consider the following.
(1) Even in the case of a highly densified oriented CNT film, it may not be possible to uniformly apply, for example, a silica-based resist HSQ (hydrogen silsesquioxane) (FOX 16: manufactured by Dow Corning), which can obtain an etching selectivity. Also, it may be difficult to obtain repeatability of the HSQ resist.
(2) It is desirable that a microfilm structure composed of oriented CNT films different in orientation can be built in one substrate.

On the other hand, as a result of examinations of the present inventors, before applying HSQ, diluted polymethyl methacrylate (PMMA) or a resist (ZEP520A / made by Nippon Zeon Co., Ltd.) is applied and solidified to form an oriented CNT film structure. By forming a film on top and applying HSQ thereon, the inflow of HSQ to the lower side of the oriented CNT film can be prevented, and HSQ can be applied uniformly.

In addition, by applying HSQ twice or three times, sufficiently permeating the aligned CNT film structure and its lower side, and supplying sufficient HSQ to form a mask on the upper side of the arranged aligned CNT film structure. You may form a mask. Furthermore, it is also effective to use HSQ in an inert gas glove box and expose it to the air only in the amount necessary for resist application. Further, it is preferable to carry out the arrangement and the densification step (transfer) described later.

Next, when the etching of the oriented CNT film structure is described, when the oriented CNT film structure is processed by reactive ion etching (RIE) with O ₂ , for example, an unburnable fluff residue may remain ( It is assumed that C and some element passivity to O ₂ plasma). For this purpose, it is effective to perform processing using RIE using O ₂ and Ar, RIE using O ₂ and CHF ₃ , or a combination of these three RIE conditions.

(Crack zone of oriented CNT film structure)
The object deforms when it is distorted by the stretching force. The oriented CNT film structure 3 which has not been stretched at first has no cracks or cracks. (FIG. 5 (a)). When the oriented CNT film structure is stretched, as shown in the schematic view of FIG. 5 (b), the stretched first pass is a plurality of fissures between densely packed CNTs in the region in which the CNTs are oriented. Will occur. As the amount of elongation increases, each cleft rapidly becomes band-shaped and longitudinally elongated along the orientation direction of the CNTs. As the amount of stretching further increases, the clefts start to fuse one after another (FIG. 5 (c)). Because the CNTs are fibrous materials, as shown in FIG. 5 (d), the CNTs at the cleft boundaries remain in the form of cross-linking of the fused cleft when the clefts fuse. Such clefts, including cross-linking CNTs, are referred to herein as cracked bands. In addition, crosslinked CNTs refer to CNTs that bridge crack bands.

In a general object, once a tear occurs, strain concentrates on the tear, and as the extension increases, the tear rapidly develops and becomes large, and eventually the object breaks. In the oriented CNT film structure according to the present invention, when the fractures become larger as the elongation increases, the fissures fuse together, develop into crack bands including crosslinked CNTs, and CNTs that bridge the crack bands appear. By controlling the generation of cuts and the structure and growth of crack bands, it is possible to produce an oriented CNT film structure that maintains a continuous structure and does not break even under extremely large elongation.

An oriented CNT film structure that can be present as a continuous structure while absorbing elongation by generating a crack band having a CNT cross-linked structure without breaking even under a large elongation is realized for the first time in the present invention It is a material that exhibits an innovative stretch function.

As shown in FIG. 6, the density of the CNTs in the crack or crack 7 is extremely low compared to the density of the CNTs in the aligned CNT structure 8. In addition, in the portion where the tear did not occur, the CNTs are densely packed. Thus, even under tension, the areas of high density where the structure is almost unchanged change the adhesion with the substrate. Therefore, the oriented CNT film structure does not peel off from the substrate at the time of expansion and contraction. On the other hand, the crack band provided with the CNT cross-linked structure 8 (CNT cross-linked body), which has a low density of CNTs, absorbs stretching deformation. Specifically, the large elongation is absorbed by increasing the crack band comprising the CNT cross-linked structure 8 where the density of the CNTs is low. By separating the aligned CNT film structure into such a high density region and a low density region, it is possible to obtain an aligned CNT film structure which is not broken, broken or peeled even if it is repeatedly subjected to large expansion and contraction.

Although the mechanism by which the crack band having the CNT cross-linked structure is generated is not clear at present, the following factors are presumed to be important. First, the fact that CNT is a one-dimensional fibrous substance is important in that when the fissures are fused, the interface becomes fibrous and crosslinks the crack band. In addition, it is important that CNTs are properly intertwined and physically adsorbed strongly by van der Waals' force. The interaction between the CNTs causes a break and largely develops to prevent the tearing of the aligned CNT film structure. As described above, the cracked zone having the CNT cross-linked structure can be realized only by controlling the complicated relation of various structural and characteristic factors.

When the oriented CNT film structure is disposed on a stretchable base material and stretched, there is a problem that the oriented CNT film structure is easily broken. Then, in order to solve this subject, this inventor repeated the earnest device described below. First, as the oriented CNT film structure, one in which a plurality of CNTs are oriented in a predetermined direction in at least a partial region of the oriented CNT film structure was used. As a result, many cracks are generated in the aligned CNT film structure without strain concentration and fracture of the aligned CNT film structure when subjected to tension, and their fusion leads to a crack band. There has occurred.

Next, the orientation direction 6 (the orientation direction of the CNTs) of at least one orientation region of the oriented CNT film structure 3 is at an angle close to 90 degrees (see FIG. 6) or 90 degrees with respect to the direction of expansion and contraction As described above, the densification step and arrangement step were devised to control the position and orientation of the aligned CNT film structure. As a result, when being subjected to expansion and contraction, a crack is more likely to occur, and at the same time, distortion is prevented from concentrating on the CNT itself. Furthermore, by arranging the aligned CNT film structure 3 on the base material 2 in a state without warping, peeling of the aligned CNT film structure 3 from the base material 2 was prevented at the time of expansion and contraction.

In addition, the thickness of the film of the aligned CNT film structure was 10 nm or more and 100 μm or less. If the film is too thin, production of the aligned CNT film structure becomes extremely difficult, and if the film thickness is 100 μm or more, the aligned CNT film structure becomes solid and loses flexibility, and breakage easily occurs. If the thickness of the film of the oriented CNT film structure is 10 nm or more and 100 μm or less, the arrangement step, the densification step, etc. described in detail below can be carried out, it is hard to break, crack band is suitably generated, orientation A CNT film structure could be obtained.

Furthermore, when the density of the aligned CNT film structure is in the range of 0.01 g / cm ³ or more and 0.1 g / cm ³ or less, the CNTs are uniformly filled without gaps and the aligned CNT film structure is solid. It had a rigid appearance, and a crack band occurred during expansion and contraction.

When only one crack and crack band are generated when subjected to expansion and contraction, absorption of strain due to expansion and contraction becomes difficult, and when it is subjected to large expansion and contraction, strain is concentrated in the crack band and an oriented CNT film structure Will break. Therefore, the substrate and the oriented CNT film structure are uniformly stretched by making the thickness of the stretchable portion of the stretchable substrate as uniform as possible and making the shape and thickness of the oriented CNT film structure as uniform as possible. It was made to do. In this way, when the oriented CNT film structure is subjected to elongation, many crack bands are generated in the form of a network, and even when subjected to large expansion and contraction, the oriented CNT film structure which is not broken and which can be repeatedly expanded and contracted is obtained. I could do it (Figure 7).

Furthermore, when the CNT cross-linked structure is inclined with respect to the crack band (crack), it is possible to obtain a repeatedly large stretchable oriented CNT film structure (FIG. 8, FIG. 9). This is because when the cross-linked CNTs are inclined, the inclined CNTs generated at the extension reversibly return to the original structure at the time of contraction. This is similar to the structural change when the highly foamed polyethylene net is stretched, packing the fruit. If the cross-linked CNTs are arranged perpendicular to the cracked zone, they do not return to their original shape during expansion and contraction, and it is not possible to obtain an expansion device that can be repeatedly expanded and contracted with high reproducibility.

(Operation mechanism of telescopic device)
The operation mechanism of the expansion and contraction device 1 manufactured by the method of Example 1 to be described later will be described with reference to FIG. The stretch device manufactured by the method of Example 1 was stretched in the direction of 90 degrees with respect to the direction 6 of the orientation of the CNTs of the oriented CNT film structure 3 as shown in FIG. FIG. 10 is a photograph of the oriented CNT film structure of the stretching device undergoing various stretching. The CNTs in the oriented CNT film structure are oriented in the vertical direction of the figure. The size of the figure is 60 μm per side, and the numerical value at the upper left of each figure indicates the expansion rate.

In the oriented CNT film structure 3 which has not been subjected to expansion and contraction, no crack band is present, and a uniform structure is shown (FIG. 10 (upper elongation 0%)). When such an oriented CNT film structure is stretched, buckling occurs in the CNT orientation direction 6 of the oriented CNT film structure, and the clefts as described above in the CNT alignment direction of the oriented CNT film structure 3 And the fissures fuse together to form a cracked zone 7 (FIG. 10 (upper stage elongation 27%)). As shown in FIG. 11, the cracked band includes a plurality of cross-linked CNTs inclined with respect to the cracked band, so that the aligned CNT film structure does not break even when it is stretched.

When the elongation is further increased, the buckling in the CNT orientation direction 6 of the oriented CNT film structure 3 further increases, and the density and number of the crack bands 7 of the oriented CNT film structure 3 increase (FIG. 10 from the upper left) right). The crack band 7 was uniformly generated in the entire oriented region of the aligned CNT film structure 3 and became a network crack band (FIG. 10 (upper stage elongation 100%)). For these reasons, the aligned CNT film structure 3 did not break even when it was stretched.

When the oriented CNT film structure 3 is subjected to elongation for the first time, the width of the crack band 7 (FIG. 12 (a)) and the high density region of the oriented CNT film structure 3 not including the crack band (crack) 7 The change to extension of the width (FIG. 12 (a)) was measured and plotted in the left view of FIG. 12 (b). As the elongation increases, the width of the high density region of the oriented CNT film structure 3 sharply decreases, and the width of the crack band 7 increases gradually, but the amount of increase decreases the width of the high density region Not as much as the amount. Therefore, as observed in FIG. 10, the number and density of cracked bands 7 increase with elongation.

Next, when the oriented CNT film structure 3 expanded to an elongation rate of 100% is contracted little by little, the crack band 7 gradually becomes smaller in size, but basically, the density and the number Did not decrease so much (from the lower right figure to the lower left figure in FIG. 10). When it returned to the original state of expansion and contraction zero, although the crack zone 7 disappears, the trace remained.

Next, in the case of elongation, unlike the initial case, the crack band 7 is generated from this trace, and as the elongation is increased, the crack band 7 becomes large as shown from the lower left figure to the lower right figure in FIG. However, basically, the density and number did not increase so much.

When the oriented CNT film structure is stretched after the second time, the width of the crack band 7 (see FIG. 12A) and the high density of the oriented CNT film structure 3 not including the crack band (crack) 7 The change with the extension of the width of the region (see FIG. 12 (a)) was measured and plotted on the right of FIG. 12 (b). As the elongation increases, the width of the high density region of the oriented CNT film structure 3 hardly changes. Conversely, the width of the cracked zone 7 increases in proportion to the elongation. As the width of the crack band 7 increases, it can be seen that the crack band 7 absorbs elongation.

By the above operation mechanism, the crack band is generated, grown and contracted reversibly in the second expansion and contraction. By this principle, the telescopic device according to the invention can be used repeatedly with large telescopic.

(Detection device)
The detection device in the present specification is a device that detects the expansion and contraction of the expansion and contraction device. The detection device may be appropriately selected as long as it can detect the expansion and contraction of the expansion and contraction device, regardless of the structure, the shape, and the material, and may be disposed in non-contact with the expansion and contraction device.

For example, a device may be used that detects expansion and contraction by attaching two electrodes to the aligned CNT film structure and detecting a change in resistance of the aligned CNT film structure whose structure has changed due to expansion and contraction. In addition, it may be an optical device which detects the structural change of the aligned CNT film structure by the change of the transmittance.

When the detection device is disposed on the expandable base material of the expansion and contraction device, the base material expands and contracts, so the detection device is deformed to change the detection value, or the detection device itself is destroyed, or the detection device Has a problem that it peels from the substrate. In order to solve these problems, the following two solutions have been provided by the present invention.

(Solution 1)
A rigid area where expansion and contraction were suppressed was provided, and a detection device was installed in that area. In this way, when the expansion and contraction device expands and contracts, the detection device is not affected by the expansion and contraction, and the above problem can be solved. Specifically, a detection device including two electrodes was attached to the oriented CNT film structure, and a stretching device was manufactured to detect a change in resistance of the oriented CNT film structure due to stretching. A glass which is a hard substrate was bonded with an adhesive to the surface of the stretchable substrate on which the oriented CNT film structure is disposed and the opposite surface. In this way, a rigid area was formed that does not expand and contract. Such rigid zones were formed in two separate areas. Next, a conductive paste and a conductive film were bonded onto the oriented CNT film structure on the rigid area on the opposite side to form an electrode. When the detection device having such a configuration is used, the detection device does not deform due to expansion and contraction, so that the above problem can be solved.

(Solution 2)
By constructing the detection device using an electrode having stretchability, a stretchable detection device could be obtained. In such a stretchable detection device, when the stretch device expands and contracts, the detection device itself also stretches, so the above problem can be solved without being affected by the stretch. Specifically, a detector composed of two electrodes was attached to the aligned CNT film structure, and a detector for detecting a change in resistance of the aligned CNT film structure due to expansion and contraction was manufactured. After forming the substrate, a thin film of titanium / gold / titanium film formed by sputtering was formed on a partial region of the stretchable substrate to form an adhesion layer. The adhesion layer is necessary to strongly attach the stretchable electrode described later to the stretchable base, and without it, the stretchable electrode was easily peeled off from the base. Next, a metal wire (lead wire) was disposed on the adhesion layer, and an aligned CNT film structure was formed thereon. Next, conductive CNT rubber paste, which is a material having stretchability and conductivity, was applied onto the adhesion layer so as to cover the metal wiring, to form a stretchable electrode. The conductive rubber paste was manufactured using the method described in Non-patent document (Nature Materials, 8 (6), 494-499 (2009)). Finally, the stretchable electrode was covered with PDMS encapsulant. This PDMS sealing material has an effect of reducing the stress generated in the detection device at the time of expansion and contraction.

The detection device manufactured by the above method was able to accurately and repeatedly, repeatedly and repeatedly detect the resistance change due to the structural change of the aligned CNT film structure generated when the expansion and contraction device expands and contracts.

(Operation characteristics of telescopic device with detection device)
The operating characteristics of the telescopic device with a detecting device manufactured by the method of Example 3 to be described later will be described using FIG. The stretch device produced by the method of Example 3 was stretched in the direction of 90 degrees with respect to the direction 6 of the orientation of the CNTs of the oriented CNT film structure 3 as shown in FIG.

(Expansion and contraction limit)
This expansion and contraction device was attached to an expansion and contraction driving device that generates expansion and contraction force between two surfaces, and the resistance change rate of the expansion and contraction device with respect to expansion and contraction was measured by a detection device. Specifically, the resistance change of the aligned CNT film structure due to the generation of the crack band in the aligned CNT film structure and the change of the structure due to the growth along with the elongation is detected. As shown by the aligned CNT in FIG. 13 (a), the measurable resistance change rate is shown for the extension of 250% or more. This is because the stretch device can measure the stretch without breaking in the oriented CNT film structure even when stretched to about 250%.

Similarly, as a comparative example, a strain gauge, which is an existing expansion / contraction measurement element, is attached to an expansion / contraction driving device that generates expansion / contraction force between two surfaces, and resistance change rate against expansion / contraction (resistance change from initial resistance value / initial resistance The value X100) was measured. As a result, as shown by the strain gauge in the right small graph of FIG. 13A, a linear resistance change rate was shown for strain amounts up to about 5%. Above 5%, the rate of change in resistance rises sharply, suggesting that the strain gauge is broken.

The present results show that the expansion and contraction device according to the present invention can detect much larger expansion and contraction compared to the prior art.

(Stretch property)
13 (b), when the telescopic device with the detecting device manufactured by the method of the third embodiment is attached to a telescopic drive device that generates telescopic force between two surfaces, and a cycle of cyclic expansion and contraction is performed, The rate of change in resistance of the expansion device was measured. As a result, in this expansion and contraction device, the appearance of the resistance change was different in the first expansion process and the expansion process thereafter. This is because, as described above, the appearance of the structural change of the aligned CNT film structure caused by the elongation differs between the initial elongation process and the subsequent stretching process. In the first extension process, the resistance increases substantially linearly with extension. On the other hand, after the initial expansion, although the resistance monotonously increases with the expansion, the degree of change in resistance differs between the area with a small expansion rate and the area with a large expansion rate. The monotonous increase in resistance with respect to expansion means that the amount of expansion and contraction of large expansion and contraction can be quantitatively evaluated using this expansion and contraction device.

(Repetitive characteristics)
In FIG. 13 (c), the telescopic device with a detecting device manufactured by the method of the third embodiment is attached to a telescopic drive device that generates telescopic force between two surfaces, and the second telescoping is repeated up to 500 times. Rate of resistance change at the time of Even after repeated large expansion and contraction, the resistance change associated with the expansion and contraction is very reproducible, and the aligned CNT film structure is not broken. Thereby, it is understood that the expansion and contraction device according to the present invention can repeatedly detect large expansion and contraction.

(Member for elastic force supply)
The member for supplying the stretching force in the present specification is a member for supplying the stretching force to the oriented CNT film structure. The expansion / contraction force supply member 4 can also be used as a fixture for attaching to the drive device 9, in which case the expansion / contraction force generated by the drive device 9 is efficiently supplied to the expansion / contraction device 1. The member for supplying the expansion and contraction force can be appropriately selected regardless of the structure, the shape, and the material as long as the expansion and contraction force can be supplied to the oriented CNT film structure of the expansion and contraction device.

A member harder than the stretchable substrate bonded to the stretchable substrate may be used as the stretch force supply member. The member for supplying the expansion and contraction force may be made of, for example, a rigid material such as a plate-like or rod-like metal or glass, or may be bonded to the expandable base using an adhesive or the like. A member for providing a stretching force having such rigidity can be pinched and pulled, so that a uniform and controlled stretching force can be provided to a desired area of the stretching device.

In addition, the member for supplying the expansion and contraction force may be an expandable member different from the base on which the oriented CNT film structure is disposed. As another member which can be expanded and contracted, a bandage, a net tights, etc. can be illustrated, for example. In such a case, an adhesive may be used to adhere a bandage or net tights to the back of the stretchable substrate. The oriented CNT film structure is disposed on the surface of the stretchable substrate. Use of a stretchable adhesive, such as a PDMS adhesive, is preferable because it can prevent peeling between the plaster / net tights and the stretchable substrate.

An expansion device using a bandage as a member for supplying expansion force can be attached to any object such as a human body, and can detect deformation, displacement, and movement of the object. In addition, a person using an expansion device using net tights as an expansion force supply member can wear it as clothes. When these extension devices are attached to or worn on a human body, a robot or the like, the movement or movement of a human or robot, speech or the like can be detected.

(Extension drive)
The telescopic drive device is a device provided with a telescopic device and a drive device for driving the telescopic device. The drive device can be appropriately selected regardless of the structure, the shape, and the material, as long as it can expand and contract the expansion device by applying expansion and contraction force to the expansion and contraction device. For example, when an expansion device is connected between two objects displaced by an appropriate driving force, the distance between the two objects can be measured by measuring the amount of expansion and contraction of the expansion device with a detection device. In an apparatus of such a configuration, two objects are driving devices. As a drive device, a machine provided with movable parts, such as a robot and a machining apparatus provided with an arm and a joint, can be exemplified. Also, the entire device including the telescopic device is defined as a telescopic drive device. If necessary, in order to efficiently supply expansion and contraction force to the expansion and contraction device, an expansion and contraction force supply member may be used.

(Stretching device manufacturing method)
Details of a method of manufacturing an expansion and contraction device according to an embodiment of the present invention will be specifically described below with reference to FIG. First, the stretchable base material 2 is manufactured in advance using a known method (base material manufacturing process). The substrate may be any stretchable substrate on which the oriented CNT film can be placed. In addition, an oriented CNT film is produced in advance (oriented CNT film production step). Generally, the growth substrate used to produce the oriented CNT film is made of a non-stretchable material because it is exposed to high temperatures. Therefore, the oriented CNT film manufactured on the substrate for growth is removed from the substrate for growth, and it is disposed by pasting it on a substrate capable of stretching (oriented CNT film placement step) to perform a densification treatment Thus, the aligned CNT film structure 3 is manufactured (densification step). At this time, it is important to control the characteristics that the oriented CNT film structure 3 is disposed on the substrate 2 in a state where its position and orientation are controlled and is not warped. Furthermore, as needed, the detection apparatus 5 for detecting expansion-contraction is manufactured (detection apparatus manufacturing process). Moreover, the member 4 for elastic force supply for giving expansion-contraction to the oriented CNT film | membrane structure 3 through the base material 2 is manufactured (member for manufacturing elastic member supply process). Furthermore, the expansion-contraction drive device 10 which is provided with the expansion-contraction device 1 manufactured in this way and is equipped with the drive device 9 which drives the expansion-contraction device 1 may be manufactured (extension-contraction drive device manufacturing process).

(Oriented CNT film placement process)
In the oriented CNT film disposing step, the oriented CNT film synthesized on the growth substrate is removed from the growth substrate, and the oriented CNT film is pasted and disposed on another stretchable substrate. It is. The oriented CNT film removing step may be any method as long as the oriented CNT film can be removed from the growth substrate to the extent that the desired shape and properties are not significantly impaired. Specifically, an oriented CNT film formed on a growth substrate is held by tweezers and directly removed, or a synthetic resin membrane is attached to the tip of the tweezers, and the oriented CNT film is attached to the membrane. The method of picking and removing can be realized by the practitioner appropriately selecting according to the situation (FIG. 14).

In the removal step, there has been a problem that it is difficult to take out the CNTs from the densely-oriented aligned CNT film group. In addition, there is a problem that it is difficult to separate the taken out oriented CNT films one by one. In order to solve these problems, using a stereomicroscope and a membrane filter, while observing under a stereomicroscope, an oriented CNT film was applied with a membrane filter, and CNTs were taken out from the oriented CNT films. In addition, although the number of CNTs taken out with the membrane filter may be one or more, it may be possible to take out one by one with the membrane filter by this method. Furthermore, when the thickness of a stereomicroscope and tweezers and the oriented CNT film to be synthesized is 2 μm or more, it becomes possible to take out one oriented CNT film with tweezers.

Next, the taken out oriented CNT film is pasted and arranged on the stretchable base material 2, and the oriented CNT film is exposed to a liquid, but the operator can select this process as appropriate depending on the situation. There are several ways to achieve this.

First, the oriented CNT film removed in the removing step is moved onto the stretchable substrate 2 on which the liquid has been dropped in advance and released from the tweezers. Then, the aligned CNT film is aligned at an arbitrary position in the liquid with tweezers with a membrane.

Second, after moving the oriented CNT film on the stretchable substrate 2 and releasing it from the tweezers, a liquid is dropped so that the oriented CNT film on the stretchable substrate 2 is immersed, and a membrane is attached This is a method of aligning the aligned CNT film in the liquid with tweezers (FIG. 15).

Here, although an example in which one oriented CNT film is pasted and disposed on a stretchable substrate is shown, a plurality of oriented CNT films may be pasted and disposed at least partially. Good. In addition, the oriented CNT film may be exposed to liquid as a place other than the stretchable base (FIG. 16).

Here, as a liquid which exposes the oriented CNT film, it is preferable to use one which has affinity for CNT and which has no component remaining after evaporation. As such a liquid, for example, water, alcohols (isopropyl alcohol, ethanol, methanol), acetones (acetone), hexane, toluene, cyclohexane, DMF (dimethylformamide) and the like can be used. Further, the time for exposure to the liquid may be a time sufficient for the whole to be uniformly wet without bubbles remaining inside the oriented CNT film.

(Densification process)
In the next densification treatment (step), the oriented CNT film in a state of being exposed to the liquid and placed on the surface of the expandable substrate 2 is densified, and is adhered to the surface of the expandable substrate 2 The aligned CNT film structure 3 is formed. This step is typically performed by drying the liquid-oriented oriented CNT film. Methods of drying the oriented CNT film include, for example, natural drying in air at room temperature, natural drying in a nitrogen atmosphere at room temperature, vacuum drying, natural drying in the presence of an inert gas such as argon, and such atmosphere conditions. And the like can be used.

When the oriented CNT film is immersed in a liquid, the CNTs come in close contact with each other to shrink the entire volume a little, and when the liquid evaporates, the adhesion is further enhanced and the volume is considerably shrunk, resulting in high density An oriented CNT film structure 3 is formed. At this time, due to the contact resistance with the stretchable base material 2, there is almost no area shrinkage of the plane parallel to the stretchable base material 2, and it is high so as to shrink exclusively in the thickness direction of the aligned CNT film structure 3 Control the densification process.

The orientation of the oriented CNT film structure 3 thus obtained is not impaired even by densification as compared to the oriented CNT film.

Further, from the base material 2, partial lifting, tearing and tearing of the aligned CNT film structure 3 and wrinkles causing the base material 2, density increase of the carbon nanotube film in directions other than the radiation direction of the base material 2, It is preferable that a treatment for suppressing curling, which causes folding of the aligned CNT film structure 3 when resist is applied to the aligned CNT film structure 3, be applied.

(The principle of the densification process)
In the densification treatment (densification step), the oriented CNT film is immersed in a liquid having an affinity to CNTs, and the evaporation of the liquid immersed between the CNTs in the CNT aggregate and the surface tension of the liquid accordingly It is a method of inducing aggregation of CNTs in a CNT assembly to improve the number density of the CNT assembly. When densification treatment of the oriented CNT film causes the liquid to soak or adhere to the CNT aggregate to dry, densification proceeds. This phenomenon is considered to occur when the adjacent CNTs stick to each other due to surface tension when the liquid attached to the individual CNTs evaporates. Further, when the CNT aggregate is formed into a film and the orientation direction is made parallel to the surface of the substrate and subjected to a densification treatment, the shrinkage direction of the oriented CNT film is defined in one dimension on the direction perpendicular to the substrate . This is not only that the migration of individual CNTs along the surface of the substrate is limited by the adhesion between the oriented CNT film and the substrate, but the evaporation of the liquid made from the side of the oriented CNT film is exclusively high By generating surface tension in the longitudinal direction. As a result, the oriented CNT film is uniformly densified only in the thickness direction, and therefore, the bulk-like CNT aggregate vertically grown from the growth substrate shrinks into an island when densifying treatment is performed. Problem does not occur.

The above densification step is a method in which the oriented CNT film is exposed to liquid and then dried, but the mechanism by which the oriented CNT film shrinks in the densification step is the liquid that has entered between the CNTs as described above It is presumed that the surface tension of the CNTs attracts each other, and the stuck state of the CNTs is maintained even after the liquid is evaporated. Therefore, the densification step may be any method as long as it generates surface tension between CNTs, and for example, a method using high temperature steam can be applied.

(Issue of high density process)
In the densification step, when bubbles are generated in a carbon nanotube film or tweezers handling carbon nanotubes dipped in a solution during densification, or a membrane handling a carbon nanotube film, wrinkles may occur when densifying. There was a problem. In addition, there is a problem that it is difficult to align the oriented CNT film in a desired direction when densifying. Furthermore, there is a problem that the solvent may remain in the densified oriented CNT film when densifying and drying. Furthermore, when arranging and densifying oriented CNT films, not only shrinkage in the normal direction of the substrate due to surface tension of the liquid on the substrate surface, but some oriented CNT films are warped at the substrate surface and high There was a problem that it might be densified.

(Problem solution method of high density process)
In order to solve these problems, the thickness of the oriented CNT film was reduced to 100 μm or less, and the intensity of the illumination of the microscope used for observation was changed from the maximum to the minimum before the drying. This is presumed to be that the dried state of the oriented CNT film is controlled by adjusting the illuminance of the stereomicroscope, and curling can be suppressed.

In addition, immersing oriented CNT film or tweezers handling oriented CNT film, membrane handling oriented CNT film in a solution placed on a substrate used for densification, and observing with a stereomicroscope, bubbles are generated It can be avoided. Furthermore, hold the membrane filter at the tip of the tweezers, dip it in the solution on the substrate as well as the oriented CNT film, operate the tweezers, that is, the membrane filter while observing the orientation direction of the oriented CNT film with a microscope, By moving the CNT film, it can be arranged at a desired position and a desired orientation.

In addition, the oriented CNT film gripped with tweezers is transferred to the needle tip of the manipulator with a needle, and with the manipulator with a needle as well, the manipulator is controlled at a desired position and in a desired orientation. While placing, pressing with a manipulator, then, the solution used for densification can be dropped and densification can be performed. The tip whose position can be controlled may be a needle-like or rod-like tip having a height such as tungsten, or a flexible tip such as a resin. Furthermore, an endable jig such as tweezers may be used as the tip.

At that time, in order to prevent curling more effectively, it is preferable to use methanol as a solution for densification, in particular.

In this way, even when there is a CNT microstructure already on the base, it is possible to easily arrange the oriented CNT film of the second and subsequent layers without sweeping the aligned CNT film of the CNT microstructure. it can. The manipulator can be removed after drying. Such a method is effective when dealing with an oriented CNT film having a thickness of 4 μm or less.

A plurality of oriented CNT films may be stacked and densified to form a CNT layer of a desired thickness. In the former case, there is an advantage that an oriented CNT film structure having a target density can be obtained by one oriented CNT film, and in the latter case, a plurality of oriented CNT films are laminated in the same orientation direction. In addition, it is possible to laminate with different orientation directions, and it is advantageous to obtain variously laminated oriented CNT film structures.

Example 1: Telescopic Device
Hereinafter, the expansion device according to the present invention and the method for producing the same will be described in more detail by way of specific examples, but the present invention is not limited to these examples. The telescopic device according to the invention will be described with reference to FIG.

The stretching device 1 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction.

Specifically, the manufactured stretch device 1 has a uniform thickness of 1 mm, and a thickness of 600 nm and a size of 1 mm (length: height of oriented CNT film) on a plate-like PDMS stretchable base material 2 shown in FIG. Orientation) × 30 mm (width) oriented CNT film structure 3 is disposed.

The CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface. The oriented CNT film structure 3 had a density of 0.5 g / cm ³ and a BET specific surface area of 1150 m ² / g. G / D ratio: 2.5 to 40, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98% as typical values of CNTs constituting the oriented CNT film structure 3 Met. In addition, these values were made the same as the characteristics of the oriented CNT film used for manufacture.

Such an oriented CNT film structure 3 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 μm, and width 18 mm. The oriented CNT film was disposed by providing an overlapping portion of about 1 mm, and was densified to obtain an oriented CNT film structure 3.

The oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the ratio of the number of single-walled CNTs to multi-walled CNTs, and the aligned single-walled CNT aggregate is observed with a transmission electron microscope. Determined from the image), density: 0.03 g / cm ³ , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m ² / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99 .9%, absolute purity 98%, Hermann's orientation coefficient 0.7.

The stretch device 1 including the oriented CNT film structure 3 on the stretchable base material 2 obtained in this way is not broken even by a large stretch of 250%, and can be repeatedly used 500 times or more, and the conventional stretch device Show a performance that greatly surpasses.

(Stretching device manufacturing method)
Among the methods for manufacturing the expansion and contraction device of the present invention, an example of a particularly preferable process will be specifically described below with reference to FIG.

In this manufacturing method, first, the stretchable base material 2 is manufactured in advance using a known method (base material manufacturing process). The substrate 2 may be any stretchable substrate on which the oriented CNT film can be disposed. In addition, an oriented CNT film is produced in advance (oriented CNT film production step). The oriented CNT film is preferably grown from a catalyst placed on a growth substrate, but any method that can produce an oriented CNT film of a desired shape and shape can be used appropriately. Generally, the growth substrate used to produce the oriented CNT film is made of a non-stretchable material because it is exposed to high temperatures. Therefore, the oriented CNT film manufactured on the substrate for growth is removed from the substrate for growth, and it is disposed by pasting it on the stretchable substrate 2 (oriented CNT film placement step), and densification treatment By doing this, the aligned CNT film structure 3 is manufactured (densification step). The oriented CNT film disposing step and the densification step may be performed sequentially or simultaneously. In addition, as long as the adhesiveness with the stretchable base material 2 can be secured, the densification step may be performed before the oriented CNT film placement step. At this time, it is important to control the characteristics that the oriented CNT film structure 3 is disposed on the substrate 2 in a state where its position and orientation are controlled and is not warped. Furthermore, as needed, the detection apparatus 5 for detecting expansion-contraction is manufactured (detection apparatus manufacturing process). Specifically, for example, two electrodes are manufactured in the oriented CNT film structure 3, and when it is expanded and contracted, a change in resistance value is detected based on a structural change of the oriented CNT film structure 3. Furthermore, as necessary, a stretchable force supplying member 4 for supplying a stretchable force (distortion) to the stretchable base material 2 and the oriented CNT film structure 3 may be manufactured. As an expansion / contraction force supplying member, for example, it is possible to fix the both ends of the elastic base with a rigid base such as a glass plate which does not have rigid elasticity. In this way, since no expansion or contraction occurs at the contact portion between the elastic base and the member for supplying expansion and contraction, stable performance can be exhibited and an expansion and contraction device that can be repeatedly expanded and contracted can be manufactured. By such a process, it is possible to provide a telescopic device whose performance is significantly improved as compared with the prior art.

The manufacturing process and procedure for obtaining the expansion and contraction device of the present invention are not limited to the above-mentioned example, and some steps may be omitted or the order may be changed as needed.

For example, the detection device manufacturing process and the elastic force supplying member manufacturing process may be performed in an appropriate order or at the same time, and may be performed after or before the substrate manufacturing process, and then the oriented CNT film arranging process may be performed. You may go later.

(Base material manufacturing process)
As a material of the substrate, Silpot 184 (manufactured by Toray Dow Corning Co., Ltd.), which is polydimethylsiloxane (PDMS) having no electrical conductivity and exhibiting excellent extensibility, was selected. Moreover, as a shape, in order to implement | achieve uniform expansion-contraction, it shape | molded in the plate shape which has uniform thickness. The base material was manufactured by the defoaming step, the plate-shaped molding step, the peeling step, and the molding step described below.

The defoaming step was carried out according to the following procedure. The precursor of the substrate (PDMS) was prepared by stirring in vacuo. The used silt pot 184 was divided into an unreacted liquid and a catalyst liquid, and 30 g of the unreacted liquid and 3 g of the catalyst liquid were placed in a Teflon (registered trademark) container. Using a vacuum stirrer (vacuum mixer Awatori Neritaro ARV-200, manufactured by Shinky Co., Ltd.), defoaming stirring was carried out in a vacuum together with a Teflon (registered trademark) container containing both solutions of a sill pot.

By stirring in vacuum, as compared with stirring in the air, the precursor solidified (gelled), and it was possible to suppress the mixing of bubbles into the base material when it became the base material. When bubbles are mixed in the substrate, stress is concentrated on the bubbles when the substrate is expanded and contracted, and the substrate is torn. Therefore, the base material which shows large extensibility can not be obtained.

The plate-like forming process was performed according to the following procedure. The defoamed and prepared precursor was dropped onto a glass plate having a side of 30 cm and a thickness of 4.8 mm, which is a flat plate with minimal distortion (upper left in FIG. 19). When dripping a precursor, it dripped from the container directly on the glass plate. Moreover, when dripping, it does not carry out with a spatula etc. in order to cause mixing of the bubble in a base material. When the plate is distorted, distortion of the plate appears on the main surface of the substrate formed by the contact surface of the substrate and the plate, so that uniform distortion is generated on the main surface of the substrate when the substrate is stretched It becomes difficult.

Spacing materials (spacers) were placed at the four corners of the dropped surface of the plate onto which the precursor was dropped (lower glass plate). As a spacing material, four silicon rubber plates with a thickness of 1 mm are prepared in the shape of 28 to 30 cm long and 0.8 to 1 cm wide strips, with the long sides of the strips extending along the sides. Placed in (Figure 19 upper right)

Next, in order to press and stretch the dropped precursor, a glass plate having a side of 30 cm and a thickness of 4.8 mm or more, which is the same plate as the plate onto which the precursor was dropped, is placed on the spacing material. Then, the precursor was crushed to be smoothed (FIG. 19, lower left). Thus, the substrate was formed into a plate having a thickness of 1 mm and having a uniform thickness. By arranging the oriented CNT film structure on such a substrate, uniform stretching can be given to the oriented CNT film structure.

The spacing material may be placed on the four sides in this manner, or may be placed at four corners with different shapes. Moreover, the thickness of the base material obtained can be changed from 0.5 mm to about 10 mm by changing the thickness of the spacing material. Furthermore, the same effect as this glass plate can be obtained by using a plate having the same smoothness as the sufficient weight. It is also possible to create a substrate having a thickness of 0.5 mm or less by adding weight to a glass plate placed on top.

While the precursor is crushed, it is left for several hours to several days until the precursor solidifies (gels). Although it depends on the type of PDMS, in the case of PDMS used in this example, it is placed at room temperature for about one or two days.

If it is shorter than this range, solidification becomes insufficient, and the substrate can not maintain its shape or it becomes difficult to generate uniform strain. If it is longer than this range, the substrate will stick to the glass substrate, making it difficult to carry out the following peeling step.

The peeling process was performed in the following procedures. After completion of the plate-like forming step, the glass plate (upper glass plate) or lower glass plate obtained by crushing the base material is peeled off from the base material (bottom in FIG. 19) in order to use the base material. Next, the remaining lower or upper glass plate is peeled off, and the substrate having a uniform film thickness is taken out (FIG. 19, lower right). Immediately after peeling, the surface and both surfaces of the substrate formed of the glass substrate are covered with aluminum foil. By this, the contamination of the base material can be prevented, and a clean elastic surface can be maintained.

The molding process was performed according to the following procedure. The substrate having a uniform film thickness is processed into a dog-bone type shown in FIG. 20 in which stress concentration does not occur due to the shape of the substrate, or a plate-like rectangular solid shown in FIG. 21, FIG. 22 and FIG. Processing is performed with the aluminum foil attached in the peeling step. The forming process may use a known technique, and may be performed by scissors, mechanical processing, or laser cutting.

(Oriented CNT film manufacturing process)
The oriented CNT film can be produced by a known chemical vapor synthesis method. It produces a catalyst on a substrate and causes the catalyst to chemical vapor deposition (CVD) multiple CNTs. In the oriented CNT film, a plurality of CNTs oriented in a predetermined direction were grown from the catalyst patterned on the substrate using the method described in Japanese Patent Application No. 2009-001586 and the like.

The oriented CNT film used in this example has a shape of height 1 mm, thickness 6 μm, and width 18 mm.

The properties of the oriented CNT film, which is an oriented aggregate of single-walled CNT obtained by this production method, depend on the details of the production conditions, but under the production conditions described in Example 1 of Japanese Patent Application No. 2009-001586, the typical value is The single-walled CNT content is 99% (bilayer CNT, the ratio of the number of single-walled CNT to multi-walled CNT, and the synthesized aligned CNT aggregate is observed with a transmission electron microscope and determined from an image), density: 0 .03 g / cm ³ , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m ² / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98% Hermann's orientation coefficient is 0.3 to 0.7.

The oriented CNT film produced under such conditions maintained its integrity even after peeling from the substrate.

(Oriented CNT film placement process)
Next, the oriented CNT film synthesized on the growth substrate was removed from the growth substrate, and the oriented CNT film was pasted and arranged on another stretchable substrate 2.

At the time of removal, it was difficult to take out the CNTs from the densely-oriented aligned CNT film group. In addition, it was difficult to separate the taken out oriented CNT films one by one. Furthermore, in the following densification step, it was difficult to align the oriented CNT film to a desired position in a desired direction.

In order to solve these problems, an oriented CNT film manufactured in advance by the above method is set so as to be within the field of view of a stereomicroscope for every synthesized substrate, and the oriented CNT film is a group for synthesis while observing with a microscope Removed from the material. Removal of the oriented CNT film from the synthesis substrate was performed directly with tweezers while observing with a microscope.

Next, in order to use the taken-out oriented CNT film as an oriented CNT film structure in a stretching apparatus, it was necessary to control the orientation direction of the taken-out oriented CNT film, to place it on the substrate 2 and expose it to liquid . Therefore, the oriented CNT film taken out in the taking-out step is moved onto the stretchable substrate 2 on which the liquid has been dropped in advance and released from the tweezers, and then the oriented CNT film is put in the liquid with the tweezers with a membrane. The method of aligning to an arbitrary position was used (FIG. 18). At this time, the amount of liquid to be dropped is about 1 to 5 drops with a Pasteur pipette. Moreover, one side of the aluminum foil covering the base material used in the manufacturing process of the stretchable base material 2 was removed, and it was set as the arrangement surface of CNT. Further, in the densification step described later, when bubbles are generated in the oriented CNT film exposed to the solution, or the tweezers or membrane exposed to the solution, the oriented CNT film structure 3 may be wrinkled. Therefore, the solution is placed on the base material 2 used for densification, and the oriented CNT film, the tweezers handling the oriented CNT film, and the membrane handling the oriented CNT film are sufficiently immersed in the solution and observed with a stereomicroscope. , I did not cause bubbles. Isopropyl alcohol was used as a liquid for exposing the oriented CNT film. Thus, the position and orientation direction of the oriented CNT film were controlled and disposed on the substrate 2.

In addition, an angle between the central axis of the base shown in FIG. 17 which is the expansion and contraction direction of the base 2 and the direction in which the CNTs of the oriented CNT film are oriented is 90 degrees. The oriented CNT film was placed along the central axis. As a result, cracked bodies, CNT cross-linked bodies and the like were uniformly generated, and even if the base material was greatly elongated, the aligned CNT film structure did not break.

In addition, a large oriented CNT film structure may be produced by using the step of stacking and arranging oriented CNT films described below. In this way, expansion and contraction in a large area can be detected.

(Oriented CNT film densification process)
The oriented CNT film was exposed to a liquid and dried to densify it to obtain an oriented CNT film structure. The arrangement of the oriented CNT film and the densification may be performed simultaneously. At this time, when the solution is dried from the periphery of the oriented CNT film, only a part of the oriented CNT film may be densified to be in close contact with the substrate as an oriented CNT film structure. In that case, it becomes difficult to arrange the oriented CNT film at an arbitrary position or to obtain a desired orientation direction. Therefore, the solution was dried and the placement of the oriented CNT film was completed before the densification step was completed.

When the solution spontaneously evaporates in air at room temperature and the oriented CNT film is immobilized, the oriented CNT film surface is observed, the solution is naturally dried until the surface of the oriented CNT film is visible, and the oriented CNT film is densified. The

As a solution, isopropyl alcohol or methanol was used. Isopropyl alcohol and methanol easily penetrated between the CNTs in the oriented CNT film, and the entire oriented CNT film was uniformly densified.

In addition, when the oriented CNT film is densified, a part of the oriented CNT film may be warped on the substrate surface. In this case, illumination is applied when the oriented CNT film is dried, and when the oriented CNT film is viewed, the illumination is weakened to control evaporation of the solution, thereby speeding up the densification process. Control the backlash.

As another procedure for arranging and densifying the oriented CNT film, the solution was dropped to the previously arranged oriented CNT film to perform densification.

(Stacking process of oriented CNT film)
In order to obtain a large oriented CNT film structure, the above-described oriented CNT film disposing step and the oriented CNT film densifying step are repeated, and a plurality of oriented CNT film structures are joined together with slight overlap in the same orientation direction. Placed.

By connecting them with a slight overlap in the same orientation direction, it was possible to obtain a large expansion and contraction device having a uniform structure as a whole.

The overlapping arrangement was performed according to the following procedure. First, about 1 to 5 drops of isopropyl alcohol were dropped by a Pasteur pipette in advance so as to cover the overlapping region of the aligned CNT film structure 3 disposed on the substrate 2 by the above method.

Then, another oriented CNT film is immersed in the dropped isopropyl alcohol, and the oriented CNT film is aligned with the orientation of the orientation so as to overlap by overlapping of about 1 to 5 mm, and densification is achieved. went. This operation was repeated 1 to 2 times to produce an oriented CNT film structure having a length of 30 to 40 mm in the direction in which the CNTs were arranged.

A further advantage of the oriented CNT film lay-up process is that the oriented CNT film structure may be ruptured and the stretcher that has broken can also repair the fracture.

Thus, a stretched device having a large oriented CNT film structure having a structure in which the entire aligned CNT film structure is continuous and continuous, and in which the aligned CNT film structures do not lose their function. I got

(Density of oriented CNT film structure)
If the compression rate of the oriented CNT film in the densification step is defined as <compression rate = original thickness × thickness after densification>, the weight density of the oriented CNT film structure is <CNT density = compression rate It becomes ×× 0.03 g / cm ³ >. By controlling the original thickness of the oriented CNT film, the weight density could be controlled from 0.11 g / cm ³ to 0.54 g / cm ³ .

Even in the oriented CNT film structure having a weight density of 0.11 g / cm ³ obtained in this manner, the arrangement and sufficient densification are sufficiently possible on the base material, and the stretching device is the same as the above-mentioned embodiments. Production of was possible.

The upper limit of the weight density of the aligned CNT film structure that can be controlled in the present invention is not limited to 0.54 g / cm ³ used in this example. Although not specified herein, in principle, it is possible to achieve a wider range of weight density by controlling the diameter of the CNTs. Assuming that all CNTs have equal diameters and that the densification step will close-pack all CNTs, the CNT density after densification may increase as the diameter size of the CNTs decreases. It can be easily calculated. The average diameter of the CNTs in the oriented CNT film structure used in each of the above-described examples is about 2.8 nm, but the weight density when the CNTs are closely packed in this case is about 0.78 g / cm ³ . is there. In this regard, already, Non-patent literature (Ya-Qiong Xu, et al, Vertical Array Growth of Small Diameter Single-Walled Carbon Nanotubes, J. Am. Chem. Soc., 128 (20), 6560-6561, 2006) It has been found that it is possible to make the diameter of the CNTs smaller (about 1.0 nm) by using the technique reported in the above. From this, it is thought that it is possible to increase the weight density up to about 1.5 g / cm ³ by reducing the diameter of the CNT, and a stretching device using the oriented CNT film structure of the above density It is considered to be easy to manufacture because the manufacturing method is identical.

(Thickness of oriented CNT film structure)
By controlling the original thickness and height of the oriented CNT film, it was possible to control the thickness of the oriented CNT film structure from 100 nm to 100 μm. Since the compression rate in the densification treatment is about 10, it suffices to roughly synthesize an oriented CNT film having a thickness 10 times that of the oriented CNT film structure. The thickness of the oriented CNT film is controlled by patterning the catalyst using known semiconductor microfabrication techniques. Therefore, the thickness can be controlled by the accuracy and resolution of known semiconductor microfabrication techniques. When the thickness of the aligned CNT film structure is 100 nm, the catalyst may be patterned to a thickness of about 500 nm to 1 μm of the approximately aligned CNT film structure. In addition, by controlling the height, it is also possible to obtain a thick oriented CNT film structure. The stretchable device could be suitably manufactured from the aligned CNT film structure having a thickness of 100 nm to 100 μm obtained in this manner.

(Evaluation of degree of orientation of oriented CNT film structure)
In order to evaluate the degree of orientation of the CNTs constituting the oriented CNT film structure, it is preferable to use a scanning electron microscope (SEM) image or the like. The aligned CNT film structure may contain a partially isotropic structure to the extent that the function is not impaired.

The FFT (Fast Fourier Transform) image was calculated based on the SEM image of the observed aligned CNT film structure. Although these FFT images differ in degree depending on the magnification and location of the SEM image, each exhibited anisotropy. This indicates that the CNTs of the oriented CNT film structure are oriented.

The transformation intensity from the reference direction (φ = 0) to φ = π / 2 was determined in the radial direction from the reference direction (φ = 0) while maintaining an equal distance from the origin of the FFT image to obtain an intensity profile. The Hermann's orientation factor F was calculated using this intensity profile, and a value of 0.7 was obtained, indicating that the CNTs in the oriented CNT film structure were oriented.

Example 2 Stretching Device Using CNT Micro-Film Structure
Hereinafter, the stretching device using the CNT microfilm structure according to the present invention will be described in more detail by way of specific examples, but the present invention is not limited to these examples. . The telescopic device according to the invention will be described with reference to FIG.

The stretching device 60 includes a CNT microfilm structure 50 disposed on the stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction.

Specifically, the manufactured expansion device 60 has a uniform thickness of 1 mm, and on the plate-like PDMS elastic base 2 shown in the shape diagram 17, a thickness of 600 nm, a size of 0.8 mm (length: oriented CNT The film is constructed by arranging a CNT microfilm structure 50 of film height) × 250 mm (width).

The CNTs constituting the CNT microfilm structure 50 were uniformly oriented with an orientation with a Hermann coefficient of 0.7 throughout the entire surface. The CNT micromembrane structure 50 had a density of 0.5 g / cm ³ and a BET specific surface area of 1150 m ² / g. As a typical value, G / D ratio: 2.5 to 40, average outer diameter: 2.5 nm, half-width 2 nm, carbon purity 99.9%, absolute purity 98% as a typical value of CNT constituting the micro-membrane structure 3 Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production.

Such a CNT micro membrane structure 50 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 μm, and width 18 mm. The aligned CNT film was arranged by providing an overlapping portion of about 1 mm, densified, and then patterned into a desired shape to obtain a CNT microfilm structure 50.

The oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the number ratio of single-walled CNT to multi-walled CNT), and the synthesized aligned single-walled CNT aggregate is observed with a transmission electron microscope Density: 0.03 g / cm ³ , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m ² / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99. 9% absolute purity 98% Herman's orientation coefficient 0.7.

The stretch device 60 provided with the CNT microfilm structure 50 on the stretchable substrate 2 thus obtained is not broken even by a large stretch of 250%, and can be repeatedly used 500 times or more, and the conventional stretch Demonstrates the ability to overwhelm the device.

When the method for producing the CNT microfilm structure 50 is described, after the stretch apparatus is manufactured by the method of Example 1, the oriented CNT film structure is patterned by lithography to obtain an oriented CNT film structure having a desired shape. You can get it. Since the height and length of the oriented CNT film constituting the oriented CNT film structure depend on the synthesis conditions and the like, it is difficult to synthesize an oriented CNT film of a desired height (length) strictly. By etching the unnecessary part of the oriented CNT film structure by the method of this embodiment, it is possible to easily obtain an oriented CNT film structure having a desired shape with the precision of the microfabrication technology, and to obtain desired characteristics. There is a remarkable effect in manufacturing the telescopic device which it has.

In order to sufficiently dry the aligned CNT film structure, drying is performed at 180 ° C. for 10 minutes in vacuum before applying the resist. A solution obtained by diluting resist PMMA 495 five times by weight with a dilution solution was coated, spin coated at 4700 rpm for 1 minute, and baked at 180 ° C. for 1 minute to form a sub-resist layer. This suppressed penetration of the second main resist layer into the densified aligned CNT film structure. The auxiliary resist layer may be any material as long as it has a function of suppressing penetration of the second main resist layer into the aligned CNT film structure and can be etched equally to the aligned CNT film structure, for example, ZEP-520A or AZP-1357 may be used. The dilution liquid may be anything as long as it can dilute the resist used as the sub resist layer, and the dilution amount is not limited as long as the second main resist can be drawn, the dilution amount, the coating method, and the baking conditions.

As the second main resist, FOX 16 was further applied, and spin coating was performed at 4500 rpm for 1 minute to form a 360 nm resist layer.

Next, a predetermined pattern is drawn on the resist layer with an electron beam drawing apparatus (CABL 8000 / Crestech), which is developed with an aqueous solution of tetramethylammonium hydroxide (2.38% ZTMA-100) to obtain a mask of FOX16. It formed.

By reactive ion etching apparatus which (RIE-200L / Samco), _firstly, the supply O 2 (10sccm, 80W, 10Pa , 7min) and, then, _{O 2} and Ar (10sccm, 80W, 10Pa, 3min) and Then, the exposed portion from the mask of the first sub resist layer and the aligned CNT film structure, that is, the unnecessary portion was removed. By introducing Ar here, CNT fluff was removed cleanly and sharp edges were obtained.

Finally, the second main resist layer is removed using buffered hydrofluoric acid (110-BHF (4.7% HF, 36.2% NH ₄ F, 59.1% H ₂ O) / Morita Chemical Industries) And after rinsing with pure water, the first sub-resist layer is removed with a stripping solution (PG / microchem), and the desired shape is obtained by washing with IPA (isopropyl alcohol) and naturally drying. A telescopic device 60 provided with the CNT microstructure 50 was obtained.

(Example 3: Telescopic device provided with detection device provided in rigid area)
Hereinafter, the telescopic device including the detection device according to the present invention will be described in more detail by way of specific examples, but the present invention is not limited to these examples. A telescopic device 70 provided with a detection device according to the invention will be described with reference to FIG.

The stretching device 70 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction. A hard substrate 11 made of glass is adhered to two places on the back side where the oriented CNT film structure 3 of the substrate is disposed. The hard substrate 11 also serves as an elastic force supply member which is a member for supplying the elastic force to the oriented CNT film structure 3. Since the hard substrate 11 does not expand or contract, a rigid area 12 which does not expand or contract is formed on the base material 2. The detection device is disposed on the rigid area 12 on the surface on which the oriented CNT film structure 3 is disposed, and comprises a conductive paste 14 and a conductive film 15. Such a detection device 70 is electrically connected to the oriented CNT film structure 3 and separated from each other by two to be attached to the rigid area 12, thereby detecting a change in resistance of the oriented CNT film structure 3 due to expansion and contraction. , The expansion and contraction device 70 which detects expansion and contraction was obtained.

Specifically, the manufactured stretch device 70 has a uniform thickness of 1 mm, and a thickness of 600 nm and a size of 1 mm (length: height of an oriented CNT film) on a plate-like PDMS stretchable base shown in shape FIG. ) × 30 mm (width) oriented CNT film structure is disposed.

The CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface. The oriented CNT film structure 3 had a density of 0.5 g / cm ³ and a BET specific surface area of 1150 m ² / g. As a typical value, CNTs constituting the oriented CNT film structure 3 have a G / D ratio of 2.5 to 40, an average outer diameter of 2.5 nm, a half width of 2 nm, a carbon purity of 99.9% and an absolute purity of 98. %Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production. Such an oriented CNT film structure 3 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 μm, and width 18 mm. The oriented CNT film was disposed by providing an overlapping portion of about 1 mm and densified to obtain an oriented CNT film structure.

The detection device is configured of a silver paste, an aluminum foil, and a lead wire provided on the base shown in FIG. 20 with a rigid region that does not expand or contract and in the rigid region electrically connected to the aligned CNT film structure. A detection device is provided.

A method of producing an extension device with a detection device will be described. After producing the extension device including the oriented CNT film structure or the CNT micro film structure by the method of Example 1 or Example 2, the detection device Manufactured.

When the detection device is disposed on the expandable base material of the expansion and contraction device, the base material expands and contracts, so the detection device is deformed to change the detection value, the detection device itself is destroyed, or the detection device There was a problem of peeling from the substrate. In order to solve these problems, the sensing device had to be in stable contact with the oriented CNT film structure of the stretching device. The stable contact with the oriented CNT film structure refers to a state in which the change in resistance of the detection device is sufficiently smaller than the change in resistance of the expansion device at the time of expansion or contraction of the expansion device. It refers to the condition that does not cause dissociation at the junction of the device. In order to solve such a subject, the elastic device was provided with the rigid area which does not expand-contract, and the detection apparatus was manufactured on it.

A step of providing a non-stretchable rigid area on the stretchable device manufactured by the method of Examples 1 and 2 and manufacturing the detection device thereon will be described in detail with reference to FIG. A rigid area in which expansion and contraction were suppressed was provided on the rigid area 12 of the expansion and contraction device 70, and the detection device 75 was installed in the area. The rigid area 12 was formed in the area shown in FIG. 20 so that expansion and contraction did not occur in the elastic force supply member described in the fifth embodiment. This solves the problem that the detection device 75 is deformed to change the detection value, the detection device 75 itself is destroyed, or the detection device 75 is peeled off from the base material 2.

In order to manufacture the sensing device 75 in close contact with the oriented CNT film structure 3 disposed and electrically connected to the oriented CNT film structure 3, the conductive paste 14 is made of the oriented CNT film structure 3. It apply | coated to the rigid area 12 arrange | positioned, and was set as the electrode. Silver paste was used as the conductive paste 14 because of good conductivity and ease of electrode formation. In this example, a silver paste was applied to the rigid region on the base of FIG. 20 from above the oriented CNT film structure disposed, to form a silver paste layer having a thickness of about 0.5 mm. The silver paste was applied onto the oriented CNT film structure 3 in the rigid area 12 with a spatula, and spread evenly with a spatula to form a uniform thickness. Before the silver paste was solidified, aluminum foil was placed on the aluminum foil to construct a contact in order to have good conductivity and to facilitate connection with another measuring instrument such as a resistance meter. The aluminum foil and the resistance meter were connected using lead wires.

The telescopic device 70 provided with the detection device 75 having the rigid area 12 obtained in this way can not only detect as much as 250% expansion and contraction, but can be repeatedly used 500 times or more, and can It shows the performance that greatly hesitates.

(Example 4: Telescopic device provided with a sensing device having telescopicity)
Another embodiment of a telescopic device with a detector according to the invention and a method of manufacturing the same will be described in detail. A telescopic device 80 with a detector according to the invention will be described with reference to FIG.

The stretching device 80 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction. The expansion and contraction device 80 includes a detection device 85 that detects expansion and contraction by measuring the structural change of the aligned CNT film structure 3. The detection device 85 is composed of the oriented CNT film structure 3 and the adhesion layer 18 for improving the adhesion of the stretchable electrode to the base, the stretchable electrode 16, and the sealing material 19, and has stretchability.

Such a detection device 80 is electrically connected to the oriented CNT film structure 3 and separated by two and attached, and the expansion and contraction is detected by detecting the resistance change of the oriented CNT film structure 3 due to the expansion and contraction. The telescopic device 80 was obtained. Such an expansion and contraction device 80 including the stretchable detection device 85 greatly expands the application range to which the device can be applied because the entire expansion and contraction device has elasticity, which is very important in industrial application. Specifically, the substrate 2 has a thickness of 1 mm (length: 600 nm, size: 1 mm) on the plate-like PDMS stretchable substrate 2 shown in shape 21 with a uniform thickness of 1 mm according to the method of Example 1. Height of oriented CNT film) × 30 mm (width) manufactured. The oriented CNT film structure 3 was disposed at the position shown in FIG. 28 on the substrate 2 by the method of Example 1. The CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface. The oriented CNT film structure 3 had a density of 0.5 g / cm ³ and a BET specific surface area of 1150 m ² / g. As a typical value, CNTs constituting an oriented CNT film structure have a G / D ratio of 2.5 to 40, an average outer diameter of 2.5 nm, a half width of 2 nm, a carbon purity of 99.9% and an absolute purity of 98%. Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production.

The oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the ratio of the number of single-walled CNT to multi-walled CNT), and the aligned single-walled CNT aggregate was observed with a transmission electron microscope Determined from the image), density: 0.03 g / cm ³ , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m ² / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99 .9%, absolute purity 98%, Hermann's orientation coefficient 0.7.

The method of producing the stretchable device 80 provided with the stretchable detection device 85 will be described in part of the detection device 85 after manufacturing on the stretchable base material 2 provided with the shape of FIG. After providing an adhesion layer 18 and then arranging the oriented CNT film structure 3 or the CNT microfilm structure 50 on the substrate 2 by the method of Example 1 or Example 2, the detection device 85 is manufactured. did.

When the detection device is disposed on the expandable base material of the expansion and contraction device, the base material expands and contracts, so the detection device is deformed to change the detection value, the detection device itself is destroyed, or the detection device There was a problem of peeling from the substrate. In order to solve these problems, the sensing device had to be in stable contact with the oriented CNT film structure of the stretching device. The stable contact with the oriented CNT film structure refers to a state in which the change in resistance of the detection device is sufficiently smaller than the change in resistance of the expansion device at the time of expansion or contraction of the expansion device. It refers to the condition that does not cause dissociation at the junction of the device. In order to solve such a subject, the extensible detection device 85 was manufactured.

The steps of manufacturing the stretchable detection device 85 will be described in detail with reference to FIG. The stretchable detection device 85 is configured using the stretchable electrode 16. The stretchable electrode 16 has stretchability and conductivity, and further, the change in resistance of the stretchable electrode itself against expansion and contraction, and the change in contact resistance with the object to be installed are compared to the change in resistance of the aligned CNT film structure 3. Point to small things. In the stretchable detection device 85 using such stretchable electrodes 16, when the stretch device 80 stretches, the detection device itself stretches, so that the above problem can be solved without being affected by the stretch.

Specifically, after manufacturing the base material molded in FIG. 21, before placing the oriented CNT film structure 3, the sputtering method is performed on the adhesion area of 7 to 10 mm from both ends of the central axis of the base shown in FIG. Then, titanium 3 nm, gold 100 nm, titanium 3 nm, and so on were continuously formed to produce an adhesion layer 18. “Continuous film formation” refers to performing the next film formation without opening to the atmosphere after one film formation is completed in the sputtering method. As a sputtering apparatus used in the present sputtering method, CFS-4EP-LL / manufactured by Shibaura Mechatronics Inc. was used. In addition, before forming the adhesion layer, one of the aluminum foil covering the substrate is removed in advance to form a film formation surface. The adhesion layer 18 is necessary for strongly adhering the stretchable electrode 16 described later to the stretchable base material 2. Without this, the stretchable electrode 16 was easily peeled from the base material 2.

Next, the aligned CNT film structure 3 is manufactured along the central axis, on one surface from the adhesion region to the other adhesion region 18 and on the surface with the adhesion layer 18 by the method of Example 1 or Example 2. did. After manufacturing the oriented CNT film structure, the conductive CNT rubber paste, which becomes the stretchable electrode 16 so as to cover the oriented CNT film structure 3 on both adhesion layers, is about 1 mm thick from the outer periphery of the adhesion layer 18 Use a spatula to drip, spread and spread the paste so that it is in the range of about 1 mm. Thereafter, the metal wiring (lead wire) 17 was inserted into the coated conductive CNT rubber paste, and the conductive CNT rubber paste was again dropped so as to be about 1 mm, and was spread and applied. The applied conductive paste was solidified to produce a stretchable electrode 16. The conductive CNT rubber paste used here was manufactured by using the method described in Non-patent document (Nature Materials, 8 (6), 494-499 (2009)) and setting the amount of CNT to rubber to 4.8%.

Then, a PDMS adhesive agent of a one-component silicone sealant SH 780 (manufactured by Toray Dow Corning Co., Ltd.) is used as the sealing material 19 and a boundary line between the stretchable electrode 16 and the substrate 2 and an aligned CNT film structure 3 A sealing material 19 covers the non-portion and the boundary between the stretchable electrode 16 and the metal wiring 17. At this time, the sealing material 19 is made to have a thickness of about 1 mm, and the entire area of the adhesion layer 18 is coated except for the portion where the oriented CNT film structure 3 is not covered by the stretchable electrode 16. Since the sealing material 19 used here has one day of drying, the sealing was completed in one day after sealing. Moreover, the space | interval of the glass substrate in two area | regions formed in this rigid area was 4 mm, and determined the expansion-contraction area. The sealing material 19 has an effect of reducing stress generated in the stretchable electrode 16 at the time of expansion and contraction of the stretch device 80 and suppressing peeling of the stretchable electrode 16 from the base material 2.

The expansion and contraction device 80 provided with the detection device 85 having elasticity and elasticity thus obtained can not only detect an expansion and contraction as large as 250%, but can be repeatedly used 500 times or more, making the conventional expansion and contraction device large It shows the outrageous performance.

(Example 5: Telescopic device provided with a rigid telescopic power supply portion)
The telescopic device having the rigid telescopic power supply part according to the present invention and the method of manufacturing the same will be described in detail. A telescopic device comprising a rigid telescopic power supply according to the invention will be described with reference to FIG.

The stretching device 90 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction. In two places on the back side where the aligned CNT film structure 3 of the base material 2 is disposed, members for expansion / contraction force supply 94 composed of a hard substrate are firmly adhered to the base material 2 with an adhesive 95. The stretching force supply member 94 can be easily fixed and pulled, and is used to supply the stretching force to the oriented CNT film structure 3.

The telescopic device 90 does not function by itself, and is used by being attached to a telescopic drive device that generates telescopic movement. By using the expansion / contraction force supply member 94, the expansion / contraction device 90 can be installed in the expansion / contraction drive device, and the expansion / contraction force can be supplied to the expansion / contraction device 90. Therefore, in the two or more separated rigid areas on the base material 2, the member for hard expansion / contraction force supply 94 is provided, and the expansion / contraction force is supplied from the expansion / contraction drive device.

The use of such a member 94 for supplying an expansion and contraction force makes it possible to adjust the area that expands and contracts only to the desired area, and has a significant effect in controlling the expansion and contraction given to the aligned CNT film structure 3. Specifically, the manufactured stretch device 90 has a uniform thickness of 1 mm, and a thickness of 600 nm and a size of 1 mm (length: height of an oriented CNT film) on a plate-like PDMS stretchable base shown in shape FIG. ) × 30 mm (width) oriented CNT film structure is disposed.

The CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface. The oriented CNT film structure 3 had a density of 0.5 g / cm ³ and a BET specific surface area of 1150 m ² / g. G / D ratio: 2.5 to 40, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98% as typical values of CNTs constituting the oriented CNT film structure 3 Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production.

The method for producing the expansion device 90 including the rigid expansion power supply portion 94 will be described. The method includes the oriented CNT film structure 3 or the CNT microfilm structure 50 according to the method of the first embodiment or the second embodiment. After the telescopic device 90 was manufactured, a rigid telescopic power supply portion 94 was manufactured. However, after the substrate 2 is manufactured, a rigid stretch power supply portion 94 is manufactured, and then the oriented CNT film structure 3 or the CNT microfilm structure 50 is manufactured by the method of Example 1 or Example 2. May be manufactured.

A method of manufacturing the hard stretch force supply member 94 in two or more spaced rigid regions 12 on the substrate 2 will be described in detail with reference to FIG. In order to transmit the expansion and contraction force from the expansion and contraction drive device to the expansion and contraction device 90, the expansion and contraction device 90 is sandwiched between the two separated rigid areas 12 for suppressing expansion and contraction and the rigid areas 12 to supply the expansion force. Divide into stretchable areas 13. An adhesive 95 is used to fix a hard substrate on the back surface of the oriented CNT film structure-arranged surface of each rigid area 12 of the expansion device. Thereby, the rigid area 12 which suppressed expansion-contraction to the expansion-contraction apparatus was manufactured.

In the present example, one of the aluminum foil covering the base material 2 is used, using the shape described in FIG. 17 of the base material manufactured in Example 1. On the entire surface of each of the two rigid areas 12 of the substrate 2 from which the aluminum foil has been removed, 0.1 to 0 of PDMS adhesive 95 (one-component silicone sealant SH780 / made by Toray Dow Corning Co., Ltd.) It applied with a thickness of about .5 mm. Next, a glass substrate 96 having a length of about 30 to 40 mm and a width of 26 mm and a thickness of about 1 to 1.2 mm is applied to the entire surface of the adhesive 95 on the rigid area 12 and the sides of the glass substrate 96 and the base 2. The two rigid zones 12 were manufactured by bonding so that the central axes were parallel. When this adhesive 95 was used, adhesion took place one day after contact, since adhesion took one day. The distance between the glass substrates 96 in the two regions formed in the rigid region 12 was 4 mm, and the stretchable region 13 was determined. These components including the glass substrate 96 and the PDMS adhesive 95 are used as a member 94 for supplying and retracting force. By forming the expansion / contraction force supply member 94 in this manner, it is possible to adjust the expansion / contraction area to a desired position. In addition, when the thickness of the glass substrate 96 is 1 mm or less, when the stretching force is supplied, a crack or the like occurs in the stretching force supply member 94, and the extension force can not be supplied.

The telescopic device 90 provided with the rigid telescopic power supply part 94 obtained in this manner is not broken even by a large elongation of 250%, and can be repeatedly used 500 times or more, and the performance over the conventional telescopic device Indicates

Example 6: A telescopic device provided with a telescopic power supply part having telescopic properties
Another embodiment of the telescopic device with telescopic power supply part according to the present invention and its manufacturing method will be described in detail. A telescopic device with a telescopic power supply according to the invention will now be described with reference to FIG.

The stretching apparatus 100 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction. On the back side on which the aligned CNT film structure 3 of the base material is disposed, an expansion / contraction force supplying member 104 made of a stretchable rubber sheet or the like is adhered to the base material 2 with an adhesive.

The expansion and contraction device 100 does not function by itself and is attached to an expansion and contraction drive device that generates expansion and contraction. The use of the expandable and contractible force supply member 104 makes it easy to install the extendable device 100 on the extendable drive device, and the expandable force generated by the extendable drive device can be efficiently supplied to the extendable device 100.

Use of such a member 104 for supplying expansion and contraction has a remarkable effect in manufacturing various expansion and contraction devices such as a data glove and a bandage type device described later. Specifically, the stretch device manufactured has a uniform thickness of 1 mm, a thickness of 600 nm and a size of 1 mm (length: height of the oriented CNT film) on the plate-like PDMS stretchable base material 2 shown in FIG. An oriented CNT film structure 3 of × 30 mm (width) is disposed.

The CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface. The oriented CNT film structure 3 had a density of 0.5 g / cm ³ and a BET specific surface area of 1150 m ² / g. The CNTs constituting the oriented CNT film structure typically have a G / D ratio of 2.5 to 40, an average outer diameter of 2.5 nm, a half width of 2 nm, a carbon purity of 99.9% and an absolute purity of 98%. there were. These values were assumed to be the same as the properties of the oriented CNT film used for the production.

The method of producing the expansion device 100 having the expansion / contraction force supplying part 104 having elasticity is described in the method of Example 1 or Example 2, and the expansion and contraction including the oriented CNT film structure 3 or the CNT microfilm structure 50. After the device 100 was manufactured, the stretchable force supplying portion 104 having elasticity was manufactured. However, after the base material 2 is manufactured, the stretch power supply portion 104 having elasticity is manufactured, and thereafter, the oriented CNT film structure 3 or the CNT microfilm structure 50 is manufactured by the method of Example 1 or Example 2. May be manufactured.

The expansion device 100 including the expansion / contraction force supplying portion 104 having elasticity is described in detail with reference to FIG. The expansion and contraction force of the expansion and contraction drive device is supplied to the expansion and contraction device 100 through the expansion and contraction force supplying member 104. Therefore, a stretchable member 104 is prepared, and a stretchable rubber sheet 106 is used to stretch a portion or the entire surface of the rear surface of the oriented CNT film structure 3 of the stretch device 100. It adheres with the PDMS adhesive 105 which has both adhesion and adhesiveness. The rubber sheet 106 and the adhesive 105 were used in combination as the stretching force supply member 104. Specifically, after the stretchable device 100 having the oriented CNT film structure 3 or the CNT microfilm structure 50 manufactured by the method of Example 1 or 2 on the base material shown in FIG. Apply PDMS adhesive 105 (one-component silicone sealant SH 780 / Toray Dow Corning Co., Ltd.) to a thickness of about 0.1 to 0.5 mm on the entire surface of the back side of the base material 2 on which the structure 3 is disposed. . Then, a rubber sheet 106 larger than the base shown in FIG. 21 is prepared, and the base 2 is placed on the rubber sheet 106 such that the surface of the adhesive 105 is in contact with the rubber sheet 106. Thereafter, the entire base material 2 is pressed with a fingertip so as to sufficiently adhere, and the PDMS adhesive 105 is dried every other day. When the adhesive 105 does not have stretchability, when the member 104 for extending and contracting force expands and contracts, a crack occurs in the adhesive surface, and it becomes difficult to uniformly transmit the member 104 and the extension and contraction to the expanding and contracting device 100 uniformly. .

The stretch device 100 having the stretchability thus obtained is not broken even at a high elongation of 250%, can be repeatedly used 500 times or more, and exhibits performance far superior to that of the conventional stretch device.

(Example 7: Telescopic device with member for telescopic force supply)
A telescopic device with a telescopic power supply part according to the present invention and a method of manufacturing the same will be described in detail, in which another embodiment of Example 6 in which a glove is used as a telescopic power supply member. A data glove stretching apparatus according to the present invention will be described with reference to FIGS.

A stretchable nitrile rubber glove (clean nol / nitrile glove / made by As One Corp.) was used as the stretch power supply member 114. According to the method of Example 4, the second joint counted from the tip of the finger other than the thumb and the second joint at the tip of the finger other than the thumb and the joint closest to the tip of the thumb in total: A telescopic device 110 including the manufactured elastic sensing device 85 was placed on the glove by the method of Example 6. Thus, as shown in FIG. 34, it is possible to obtain a telescopic device 110 capable of accurately and precisely detecting the motion of human hands.

Using this device 110, the expansion / contraction device for observing the movement of the human hand or the movement of the robot's hand that moves in the same manner as the movement of the human hand can be manufactured by the expansion / contraction force supply member 114. .

(Example 8: Telescopic device with telescopic force supply member)
An extension device with an extension power supply part according to the present invention and a method of manufacturing the same will be described in detail in another embodiment of Example 6 in which a bandage is used as a member for extension power supply. The plaster expansion and contraction apparatus according to the present invention will be described with reference to FIG.

The elastic force supplying member 124 is manufactured by the method of Example 4 on a surface not having the adhesive strength of the adhesive plaster using a bandage (made by Bandaid / Johnson End Johnson Co., Ltd.) having an adhesive strength and an expansion force. The stretchable detection device 85 was bonded by the method of Example 6 so that the adhesive surface was in contact and the substrate 2 was contained in the bandage. The shape of the used base material 2 is shown in FIG.

The existing strain measuring element has to be firmly attached to the object to be measured, which is not easy to use. In addition, they were not well suited to observing large changes in the body, such as human breathing changes. In the stretch apparatus 120 according to the present embodiment, since the bandage has adhesiveness and stretchability, it can be stuck to any object with good adhesion, and the stretch can be detected.

For example, when it is attached to the skin of a human chest or throat, it is possible to detect vibration of human respiration, vibration of voice and the like with a simple method not shown in FIG.

(Example 9: Telescopic device with member for telescopic power supply)
An extension / contraction device with an extension / contraction force supplying portion according to the present invention and a method of manufacturing the same will be described in detail in another embodiment of Example 6 in which a stocking is used as an extension / contraction force supplying member. A stocking device according to the invention will be described with reference to FIG.

It has been difficult to repeatedly detect large mutations in human joints and the like with existing strain measurement devices. Also, even if there is an element that can repeatedly detect a large mutation, a detection element is detected for an object that can not be attached or fixed to the driving object at a site where a large mutation occurs, such as human joints. It was also difficult to keep it where you want. For these reasons, it was not possible to directly observe joint movement. Therefore, it has been necessary to closely contact the expansion / contraction power supply member with the expansion / contraction drive device or an object that generates expansion / contraction, and to hold the expansion / contraction position of the expansion / contraction device. In addition, the member for supplying the expansion and contraction force in close contact with the drive needs to be stretchable with respect to the drive of the drive. Therefore, a stocking was used as a member 134 for providing the stretching force having both the adhesion and the stretchability.

The stretching device 130 was installed in this stocking using a PDMS adhesive having both elasticity and adhesiveness. As a result, in a large joint area such as a human knee, the position of the extension device 130 can be installed without shifting from the joint, and a large drive such as a drive of a knee joint and its movement are observed directly. . In the prior art, when observing the motion of these joints, observation was performed by motion capture or a large link mechanism. Also, even with these devices, it was difficult to observe the movement of the stretchable surface. However, with the expansion and contraction apparatus, it has become possible to measure the movement of the desired part directly and only by mounting.

A commercially available stocking having stretchability was used as the stretching force supply member 134. The stretching device 130 provided with the stretchable sensing device 137 manufactured by the method of Example 4 was bonded to the stocking by the method of Example 6 at the joint of the knee of the stocking. When the person wears and moves this stocking device, as shown in FIG. 37, the movement of the human could be detected accurately and precisely.

Specifically, tape is applied at two places on the axis to be stretched so as to straddle the joint and mark the flat part of the knee joint of the stocking (Ray Alice) used as the stretching force supplying member 134. This tape uses an adhesive that does not break the fibers of the stocking 134 during peeling. Next, the extension device 130 is manufactured by the method of Example 1 or Example 2 using the base material of FIG.

A PDMS adhesive (one component silicone sealant SH780 / made by Toray Dow Corning Co., Ltd.) is applied to the back of the substrate 2 in a thickness of about 0.1 to 0.5 mm. After applying the adhesive, the tape attached to the prepared stocking 134 is peeled off, and the base material 2 is placed so that the stretchable axis indicated by these tapes and the central axis of the base material 2 are aligned. In addition, the center of the central axis of the base material 2 is positioned between the two tapes used as a mark on the stocking 134. Thereafter, the base 2 and the stocking 134 hold the whole base 2 with a fingertip so that the base 2 is sufficiently adhered, and the PDMS adhesive is dried every other day to manufacture the stretch device 130.

The above problem can be solved by using not only a stocking but also tights that can be in close contact with the lower body, tights that can be in close contact with the upper body, a bodysuit that is in close contact with the body, and swimwear You get

(Example 10: Telescopic drive: twisting device)
The telescopic drive device capable of detecting the twist according to the present invention and the method of manufacturing the same will be described in more detail by way of specific examples given below, but the present invention is limited to these examples. is not.

The telescopic drive device according to the present invention will be described with reference to FIG. The telescopic drive device 140 includes a telescopic device 141 and a drive device 142. The stretching device 141 includes an oriented CNT film structure 3 including a stretchable rod-like stretchable base material 143 and a plurality of CNTs oriented in a predetermined direction and wound therearound. In addition, the stretching device 141 is provided at both ends of the rod-like base material 143 with a stretching force supply member 144 which is a member for supplying stretching force to the aligned CNT film structure 3. In addition, the stretch device 141 is electrically connected to both ends of the rod-like base material 143 and the aligned CNT film structure 3, and detects the change in the resistance of the aligned CNT film structure 3 to detect the stretch. A device 147 is provided.

The driving device 142 includes an expansion force supply member 144 provided at both ends of the rod-like base material 143, a component 145 for fixing the expansion force supply member 144 at one end, and an expansion and contraction at the other end The power supply member 144 is provided with a rotating part 146 that rotates a desired angle in a plane perpendicular to the rod-like substrate 143. By rotating the rotating part 146, the stretching force supply member 144 at the other end can be rotated by a desired angle, and a desired twist can be supplied to the base material 143 and the oriented CNT film structure 3. The base material 143 subjected to the twist and the oriented CNT film structure 3 are supplied with a stretching force to stretch.

The CNTs constituting the oriented CNT film structure 3 used in the extension and contraction drive device 140 were uniformly oriented with an orientation degree of Herman coefficient of 0.7 over the entire surface. The oriented CNT film structure 3 had a density of 0.5 g / cm ³ and a BET specific surface area of 1150 m ² / g. G / D ratio: 2.5 to 40, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98% as typical values of CNTs constituting the oriented CNT film structure 3 Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production.

The oriented CNT film used in the extension drive device 140 has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the ratio of the number of single-walled CNT to multi-walled CNT, The density is 0.03 g / cm ³ , the G / D ratio is 2.5 to 40, the BET specific surface area is 1150 m ² / g, the average outer diameter is 2.5 nm. The half width is 2 nm, the carbon purity is 99.9%, the absolute purity is 98%, and the Herman's orientation coefficient is 0.7. Details of the method of manufacturing an extension and contraction drive device according to the present invention will be specifically described below with reference to FIG.

The aligned CNT film structure 3 or the CNT microfilm structure 50 was disposed on the planar transfer substrate 148 by the method of the first embodiment. The obtained aligned CNT film structure 3 or CNT micro film structure 50 was transferred in advance to a rod-like stretchable base 143 manufactured using a known method. Subsequently, an elastic force supply member for applying expansion and contraction to the aligned CNT film structure 3 was manufactured through the base material 143 (elastic force supply member manufacturing process), and then a detection device 147 for detecting expansion and contraction was manufactured ( Detector manufacturing process). The drive device 142 which drives the expansion-contraction device 141 was manufactured (the expansion-contraction drive device manufacturing process).

The manufacturing process and procedure for obtaining the telescopic drive device 140 of the present invention are not limited to the above-described example, and some steps may be omitted or the order may be changed as needed.

For example, the detection device manufacturing process, the member manufacturing process for expansion / contraction force supply, and the drive apparatus manufacturing process may be performed in an appropriate order or at the same time, or may be performed after or before the substrate manufacturing process. A CNT film disposing step may be performed.

Next, a specific manufacturing method of the extension drive device capable of detecting the twist will be described. It consists of a base material manufacturing process, an oriented CNT film structure manufacturing process, a member manufacturing process of elastic force supply, and a detector manufacturing process.

(Base material manufacturing process)
The base material 143 in the present invention may be any one having twistability in at least one direction and on which the oriented CNT film structure 3 can be disposed. The material should be twistable. They are used, preferably in a shape and material that achieves a uniform twist. Therefore, as a shape that achieves uniform twist, it is formed into a rod shape having a uniform diameter, and as a material that achieves large elongation, a silipot 184 (made by Toray Dow Corning Co., Ltd.) that is polydimethylsiloxane (PDMS) is adopted. did. Furthermore, in the case of detecting the resistance change of the aligned CNT film structure 3 due to expansion and contraction, it is preferable that the base material 143 itself does not have electrical conductivity, and PDMS is also preferable in that respect. The base material manufacturing process which has these shapes and materials passes through the defoaming process shown in Example 1, and consists of a rod forming process shown below.

(Rod forming process)
The prepared precursor is exposed to one end of a tube with an inner diameter of 3 mm made of Teflon (registered trademark) for substrate processing. The other end of the tube is connected to a vacuum pump and vacuum is applied to draw the precursor into the tube. When fully retracted, disconnect the vacuum pump and plug in using the M3 screw. Thereafter, the tube end inserted into the precursor is removed from the precursor and similarly stoppered using an M3 screw. After sealing both ends, it is left for one day until the precursor solidifies. After the precursor has solidified, the stopper is removed and a tube is cut from one end to expose a portion of the substrate so as not to damage the substrate. After exposing a part of the substrate, the exposed part is gripped with tweezers or the like, and the substrate is pulled out from the tube and taken out. The taken-out base material was cut into a rod-like base material 2 with a length of about 5 to 8 cm using scissors. In this manufacturing process, when silicone rubber is used for the tube for base material processing, it reacts with PDMS which is a component of a base material, and it becomes difficult to take out a rod-like base material from a tube. In addition, an axis giving rotational symmetry to the substrate is taken as a central axis of the substrate.

(Step of manufacturing oriented CNT film structure)
The oriented CNT film structure production process is the process for producing the oriented CNT film produced in the oriented CNT film production process of Example 1, and the oriented CNT film arrangement process shown below and the oriented CNT film high density process are shown in FIG. The same process as in Example 1 was performed on the substrate 148, and the process of stacking and arranging oriented CNT films was performed. The transfer substrate 148 is a substrate capable of producing the oriented CNT film structure 3 without warping and capable of transferring the produced oriented CNT film structure 3 to the base material 2. The characteristics of the oriented CNT film structure 3 similar to Example 1 were obtained by these steps. Furthermore, the aligned CNT film structure 3 was manufactured on the rod-like base material 143 by the aligned CNT film structure transfer step.

(Oriented CNT film placement process)
The oriented CNT film disposing step is a step of removing the oriented CNT film synthesized on the growth substrate from the growth substrate, and adhering and placing the oriented CNT film on another transfer substrate 148. . The transfer substrate 148 is a substrate of a material that can be produced on the base material 143 without curling and can transfer the produced aligned CNT film structure 3 to the base material 143. anything is fine. In this example, a Teflon (registered trademark) plate of 20 cm long, 20 cm wide, and 1 mm thick was used as the transfer substrate 148.

In the removal step, there has been a problem that it is difficult to take out the CNTs from the densely-oriented aligned CNT film group. In addition, there is a problem that it is difficult to separate the taken out oriented CNT films one by one. Furthermore, in the following densification step, it was difficult to align the oriented CNT film at a desired position in a desired direction. In order to solve these problems, an oriented CNT film manufactured in advance by the above method is set so as to be within the field of view of a stereomicroscope for every synthesized substrate, and the oriented CNT film is a group for synthesis while observing with a microscope Removed from the material. The removal of the oriented CNT film from the synthesis substrate was directly removed with tweezers while observing with a microscope.

Next, in order to use the taken-out oriented CNT film as the oriented CNT film structure 3 in the expansion device 141, it is necessary to control the orientation direction of the taken-out oriented CNT film, place it on the substrate 143, and expose it to liquid. there were. Therefore, the oriented CNT film taken out in the taking-out step is moved onto the stretchable substrate 143 on which the liquid has been dropped in advance and released from the tweezers, and then the oriented CNT film is put in the liquid with the tweezers with a membrane. The method of aligning to an arbitrary position was used (FIG. 24). At this time, if bubbles are generated in the oriented CNT film exposed to the solution or in the tweezers or membrane handling the CNTs in the densification step described later, wrinkles may occur when the aligned CNT film structure is formed, which is a problem. The Therefore, the oriented CNT film, the tweezers handling the oriented CNT film, and the membrane handling the oriented CNT film are sufficiently immersed in a solution placed on a substrate used for densification, and observed with a stereomicroscope to generate bubbles. I did not. Isopropyl alcohol was used as a liquid for exposing the oriented CNT film. By this method, it was possible to control the oriented CNT film taken out in the taking-out step, to arrange at an arbitrary position, and to align the orientation direction.

Moreover, in order to detect expansion and contraction in a large area, a large oriented CNT film may be manufactured in advance in the above-mentioned oriented CNT film manufacturing process, or the overlapping arrangement process of the oriented CNT film shown below may be used. In this embodiment, using the oriented CNT film manufactured in Embodiment 1, in the stacking and arranging step shown in Embodiment 1, the alignment direction of the CNTs is made along the diagonal of the transfer substrate 148 so that the size is about 10 cm. Then, 5 to 10-fold orientation of the aligned CNT film was performed to prepare an oriented CNT film structure.

(Oriented CNT film densification process)
By exposing the liquid to the liquid on the transfer substrate 148 for arranging the aligned CNT film structure 3 in the above-described aligned CNT film arranging step, the dried aligned CNT film to which the liquid is attached allows high density of the aligned CNT film Process is conducted. The oriented CNT film disposing step described above is performed in this densifying step before the solution is dried from the periphery of the oriented CNT film exposed to the solution, and the orientation direction is aligned at an arbitrary position. When the solution is dried from the periphery of the oriented CNT film, a part of the oriented CNT film may be densified to be in close contact with the transfer substrate as an oriented CNT film structure, in which case, It becomes difficult to arrange the oriented CNT film at an arbitrary position or to align the orientation direction.

When the solution spontaneously evaporates in air at room temperature and the oriented CNT film can not move, observe the oriented CNT film surface, and allow the solution to air dry until the surface of the CNT is visible to densify the oriented CNT film . In this example, isopropyl alcohol was used as the solution, which facilitates the penetration between CNTs in the oriented CNT film and also facilitates the evaporation for densification. In addition, when the oriented CNT film is densified, a part of the oriented CNT film may be warped and densified on the substrate surface. In this case, the solution may be changed to another solution such as methanol, or the solution may be illuminated when the oriented CNT film is dried to weaken the illumination when the surface of the CNT is viewed when the oriented CNT film is dried. Drying and evaporation were controlled to prevent curling on the surface of the substrate. In this example, isopropyl alcohol or methanol was used as the solution, which facilitates the penetration between CNTs in the oriented CNT film and also facilitates the evaporation for densification.

As described above, the arrangement and densification of the oriented CNT film may be performed simultaneously, or the solution is subsequently dropped onto the previously arranged oriented CNT film, and this is accompanied by the penetration and evaporation of the solution in the oriented CNT film. Only densification may be performed.

(Directed CNT film structure transfer process)
The end of the oriented CNT film structure produced in the oriented CNT film disposing step and the oriented CNT film densifying step on the transfer substrate is brought into contact with the end of the rod-like substrate. From there, as shown in FIG. 39, the rod-like base material 143 is slowly rolled parallel to the side of the transfer substrate 148 to visually check that the oriented CNT film structure 3 is wound on the rod-like base material 143. The oriented CNT film structure 3 is wound and transferred. The rod-like base material 143 is rotated until the oriented CNT film structure 3 is wound and reached to the first end of the rod-like base material 143 where the oriented CNT film structure 3 is in contact and the other end. The membrane structure 3 is transferred. The telescopic device 141 is manufactured in this manner.

(Drive device manufacturing process)
The driving device 142 applies a uniform twist to the expansion and contraction device 141, so that the central axis of the base material 143 is along the vertical direction as shown in FIG. 40 so that the expansion and contraction device 141 is not affected by gravity. Manufacture 142. Further, in order to grip both ends of the central axis of the base material 143 of the expansion and contraction device 141 described below, the swage lock 149 which is a gripping mechanism can be fixed on the upper side and the lower side of the drive device 142 as shown in the left view of FIG. Let's do it. In order to supply the twist, the lower side of the driving device 142 has a twisting rotation mechanism that rotates a desired angle in a plane perpendicular to the rod-like substrate 143. A well-known thing, such as an optical rotation stage, may be used. The swage lock is made of stainless steel which is a conductive metal.

By rotating the rotating part 146, the stretching force supply member 144 at the other end can be rotated by a desired angle, and a desired twist can be supplied to the base material 143 and the oriented CNT film structure 3. The base material 143 and the oriented CNT film structure 3 subjected to the twisting are supplied with a stretching force to stretch.

(Strength force supply member manufacturing process)
In order to supply a twist to the telescopic device, which is a telescopic force to the rod-like surface, the telescopic device 141 needs to be configured to be attached to the drive device 142. Therefore, it has been necessary to install the telescopic device 141 on the drive device 142 through the telescopic force supply member 144 so that the twist can be supplied. In order to be able to supply a twist from the drive unit 142 to the expansion and contraction unit 141, a member for providing a hard expansion and contraction force 144 is provided in two or more separated rigid regions on the base material 143, and There is a way to supply. Therefore, its manufacturing method will be described in detail below with reference to FIGS.

A region of about 10 mm from two end surfaces of the expansion and contraction device 141 is a rigid region, and is gripped by a pipe gripping tool 149 that fixes a metal pipe or a flexible tube. After holding by the holding tool 149, the rod-like base material 143 is fixed to the holding tool 149 with the PDMS adhesive 150 having elasticity and adhesiveness. Specifically, a female swage lock (manufactured by Nippon Swagelok Co., Ltd.) is used as the pipe gripping tool 149, and a PDMS adhesive 150 (one component silicone sealant SH780 / manufactured by Toray Dow Corning Co., Ltd.) is contained in the female swage lock. It is about 2 mm from the tube and inserted into the hole. Next, the telescopic device 141 prepared above is inserted into the swage lock 149 hole containing the PDMS adhesive 150. The telescoping device 141 inserted into the swage lock 149 together with the adhesive 150 is closed so that the pipe is normally fixed by the swage lock 149 and the PDMS adhesive 150 is dried every other day. At this time, the central axis of the rod-like base material 143 is dried along the vertical direction.

After drying, the swage lock 149 is set on the top of the drive unit 142, and the expansion and contraction unit 141 is suspended vertically. Next, the swage lock 149 is fixed to the lower side of the drive unit 142, and the PDMS adhesive 150 is inserted into the hole in the swage lock 149 as described above. The drive unit 142 is operated to insert the lower side of the telescopic unit 141 into the hole of the swage lock 149 prepared on the lower side of the drive unit. After insertion, the PDMS adhesive 150 is allowed to dry, closing normally with a swage lock 149 to secure the pipe for one day. After drying, it becomes an expansion and contraction drive device 140.

Here, in the case where only the holding tool is used and the adhesive is not used, the stretching device is detached from the holding tool, that is, the driving apparatus due to the twist. Furthermore, when a stretchable PDMS (Silpot 184 / made by Toray Dow Corning Co., Ltd.) is used instead of the PDMS adhesive, the stretch device is also detached from the holding tool, that is, the drive device.

(Detector manufacturing process)
In this embodiment, as a detection device, two electrodes are attached to an oriented CNT film structure, and a resistance change of the oriented CNT film structure whose structure is changed due to the generation of a crack band having a CNT crosslinked structure due to twisting is detected. Show an apparatus for detecting expansion and contraction. When the detection device is disposed on the twistable substrate of the expansion and contraction device, the substrate is twisted, so the detection device is deformed to change the detection value, the detection device itself is destroyed, or the detection device is based There was a problem of peeling from the material. In order to solve these problems, the sensing device had to be in stable contact with the oriented CNT film structure of the stretching device. The stable contact with the oriented CNT film structure means a state in which the change in resistance of the detection device is sufficiently smaller than the change in resistance of the expansion device at the time of expansion or contraction of the expansion device. Point at which no dissociation occurs at the junction of In order to solve such a subject, since the process which manufactures an extensible detection device was carried out, it explains in full detail below.

The problem that the detection device is deformed and the detection value changes, the detection device itself is destroyed, or the detection device peels off from the base material is solved by manufacturing the stretchable detection device capable of expanding and contracting. The steps of manufacturing the stretchable sensing device in the stretchable device will be described in detail with reference to FIGS.

The stretchable sensing device 147 is configured using stretchable electrodes. The stretchable electrode 16 has stretchability, twistability and conductivity, and further, the change in resistance of the stretchable electrode itself against stretching and twisting and the change in contact resistance with the object to be installed can be obtained by the oriented CNT film structure 3 It refers to something smaller than the change in resistance. The stretchable detection device 147 using such a stretchable electrode 16 is not affected by the twist because the detection device itself is also twisted when the stretch device 141 is twisted, and the above problem can be solved.

Specifically, in FIG. 42 of the expansion and contraction drive device 140 described above, the conductive CNT rubber paste 14 to be the expansion and contraction electrode 16 is about 1 mm thick from the aligned CNT film structure 3 disposed in the expansion and contraction device The exposed part of the swage lock 149 of the drive unit 142 (the part not covered with the PDMS adhesive 150) is extended and coated with a spatula, as shown in the left frame of FIG. The conductive CNT rubber paste was manufactured using the method described in Non-patent document (Nature Materials, 8 (6), 494-499 (2009)) and the amount of CNT to rubber was 4.8%. After drying the paste of conductive CNT rubber, a wire (lead wire) 17 having a margin of about 30 cm in length was fixed to the fixed upper and lower swage locks 149.

As a result, when twisting the drive unit 142, the electric wire 17 is wound around the drive unit 142, thereby avoiding the stress applied to the electric wire 17. Finally, the two electric wires 17 fixed to the swage lock 149 were connected to a detection device 147 for detecting a change in resistance of the aligned CNT film structure 3 due to a twist, to manufacture a detection device 147. If a solidifying conductive paste 14 such as silver paste is used instead of the conductive CNT rubber paste, the electrode is broken due to the twist. Therefore, a conductive CNT rubber paste, which has stretchability, twistability, conductivity, and a small change in resistance to twist, was used as a detection device.

The resistance value change rate (dR / R) when twisting the telescopic drive device 140 thus manufactured, which detects a twist, at a desired angle, is shown in the right view of FIG. The resistance increased monotonically with respect to the twist, and a twist of 360 degrees could be detected. This result means that a large twist can be quantitatively detected using the extension drive device 140.

Comparative Example 1: An Example Using an Unoriented Oriented CNT Film Structure
CNTs were produced by known chemical vapor synthesis. It produces a catalyst on a substrate and causes the catalyst to chemical vapor deposition (CVD) multiple CNTs. The CNTs may be produced by growing a plurality of CNTs oriented in a certain direction from a catalyst deposited on a substrate using the method described in Japanese Patent Application No. 2009-001586, Japanese Patent Application No. 2006-527894, etc. .

The CNT thus produced was dispersed in ethanol, and the CNT was filtered from the dispersion using filter paper. What was filtered from the dispersion was peeled off from the filter paper to prepare an unoriented oriented CNT film structure.

When an oriented CNT film structure which is not oriented is used, it is considered that a crack between CNTs occurs as in the case of being oriented due to the expansion and contraction. However, these cracks do not form a crack band containing a cross-linked CNT, and become a fracture without a cross-linked CNT, as the extension and contraction increase. Even when the amount of expansion and contraction is small, even if the crack band including the cross-linked CNTs is formed, the cross-linked CNTs break as the expansion and contraction increases and they become fractured bodies, not crack bands. Therefore, the resistance value is irregularly increased by the amount of expansion and contraction.

Claims

The oriented CNT film structure comprises a plurality of CNTs disposed on a stretchable substrate and oriented in a predetermined direction, and the oriented CNT film structure causes a crack by elongation to form a crack band. Telescopic device.
The stretch apparatus according to claim 1, wherein the crack band comprises a cross-linked structure of at least one CNT.
The stretch apparatus according to claim 2, wherein at least one CNT constituting the cross-linked structure is disposed to be inclined with respect to the stretch direction.
The stretch apparatus according to claim 1, wherein the cracked bands are arranged in a mesh after reaching a predetermined elongation.
The stretchable device according to claim 1, wherein the oriented CNT film structure is subjected to a densification treatment.
The stretch apparatus according to claim 1, wherein the plurality of CNTs are disposed by being stuck on the stretchable base material without warping.
The stretch apparatus according to claim 1, wherein the oriented CNT film structure has a Hermann's orientation coefficient of 0 or more, preferably 0.3 or more and 1 or less.
The stretch apparatus according to claim 1, wherein the oriented CNT film structure has a weight density of 0.1 to 1.5 g / cm 3 and / or a thickness of 10 nm to 100 μm.
An oriented CNT film structure comprising a plurality of CNTs arranged on a stretchable substrate and oriented in a predetermined direction, and the oriented CNT film structure are formed by forming a crack band by elongation. An elastic force supply member for supplying an elastic force to the oriented CNT film structure.
10. The telescopic device according to claim 9, wherein the telescopic force supply member is a mount for attaching to the telescopic drive device.
The expansion and contraction apparatus according to claim 9, further comprising a detection device that detects expansion and contraction.
A telescopic drive device comprising: the telescopic device according to claim 1; and a drive device for driving the telescopic device.