WO2010076806A1 - High resolution optical spectrograph - Google Patents

High resolution optical spectrograph Download PDF

Info

Publication number
WO2010076806A1
WO2010076806A1 PCT/IN2009/000108 IN2009000108W WO2010076806A1 WO 2010076806 A1 WO2010076806 A1 WO 2010076806A1 IN 2009000108 W IN2009000108 W IN 2009000108W WO 2010076806 A1 WO2010076806 A1 WO 2010076806A1
Authority
WO
WIPO (PCT)
Prior art keywords
spectrograph
advanced
high resolution
optical
spectrometer
Prior art date
Application number
PCT/IN2009/000108
Other languages
French (fr)
Inventor
T. Satish
Original Assignee
Metal Power Analytical (India) P. Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metal Power Analytical (India) P. Ltd filed Critical Metal Power Analytical (India) P. Ltd
Publication of WO2010076806A1 publication Critical patent/WO2010076806A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0286Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804Plane gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/30Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32Investigating bands of a spectrum in sequence by a single detector

Definitions

  • the present invention relates to a spectrometer useful for the analytical instrumentation, where the compressed model with high resolution and larger wavelength range is required.
  • a hand-held, self-contained, battery-powered test instrument for analyzing composition of a sample includes an exciter for exciting at least a portion of the sample, a compact cross- dispersed spectrometer for receiving an optical signal from the excited portion of the sample and a processor for processing spectral data about the optical signal from the spectrometer.
  • the exciter may include a spark generator and a counter electrode, a laser or other device for generating the optical signal from the sample
  • the spectrometer has a wavelength range broad enough to enable the test instrument to detect and determine relative quantities of carbon, phosphorous, sulfur, manganese, silicon, iron and other elements necessary to identify common alloys.
  • the spectrometer includes a structural member made of a light-weight material having a small coefficient of thermal expansion (CTE). The spectrometer is dimensionally stable over a range of expected ambient temperatures, without controlling the temperature of the spectrometer
  • a method and apparatus of atomic emission spectrometry includes confining a solution within an emission chamber for on-line analysis or individual sample analysis.
  • the atomic emission is totally enclosed within a liquid solution pocket.
  • a fiber optic probe is connected directly to the excited internal portion within the liquid and to a suitable analyzer which analyzes the atomic spectral lines to determine the atomic elements within the liquid solution.
  • the system can be used for individual element analysis or a multiple element analysis by use of an array spectrometer, with a simultaneous display of the complete atomic spectrum of multiple elements in a liquid solution, all in less than a period of one second.
  • the liquid sample flows through the emission chamber with the electrical discharge created as time spaced discharges which are subsequently integrated by the analyzer to produce individual element related signals.
  • the invention relates to a sample machining device, in particular for preparing samples for OES and/or XRF and/or combustion analyses, having at least one sample holder, and to provide a development which is advantageous in use proposes that the machining device includes a cylindrical milling cutter, the cylindrical milling cutter and the sample holder being movable relative to one another in such a manner that a sample which can be held in the sample holder can be divided by means of the cylindrical milling cutter to produce a free piece and a remainder piece of the sample which can still be held in the sample holder, and that at least one additional tool, in particular a drilling or separate milling tool, is provided in order to produce chips from the remainder piece of the sample.
  • the invention relates to a sample analysis device in which, according to the invention, the abovementioned sample machining device and means for carrying out OES analysis and/or XRF analysis and/or combustion analysis are provided.
  • a method and apparatus of atomic emission spectrometry includes confining a solution (8) within an emission chamber (5) for on-line analysis or individual sample analysis.
  • the atomic emission is totally enclosed within a liquid solution pocket.
  • a fiber optic probe (12) is connected directly to the excited internal portion within the liquid and to a suitable analyzer (13, 15-21) which analyzes the atomic spectral lines to determine the atomic elements within the liquid solution.
  • the system can be used for individual element analysis or a multiple element analysis by use of an array spectrometer (13), with a simultaneous display of the complete atomic spectrum of multiple elements in a liquid solution, all in less than a period of one second.
  • the liquid sample flows through the emission chamber (5) with the electrical discharge (10) created as time spaced discharges which are subsequently integrated by the analyzer (13, 15-21) to produce individual element related signals.
  • a Recording of a spectrum of an unknown sample with a number of preset excitation parameters, b. Comparison of the spectrum with stored spectra of a number of control samples, c. Determination of the control sample with the best concordance of spectra, d. Setting of the excitation parameters, which are stored for the best and closest control sample determined in . step c e. Recording of the spectrum of the unknown sample with the excitation parameters set in step d, f. Calculation of the intensity ratios of the analysis lines stored for the control sample and the internal standards of the spectrum recorded in step e.
  • the object of the present invention provides a high resolution spectrometer with simply available low cost components. This objective is achieved by the following way for the wavelength ranges of 190-280nm& 280- 410 nm ranges.
  • This invention is based on high resolution optical spectrograph which is functional in optical absorbance and emission spectroscopy. It has some supplementary features which are make it more advanced as proportional to other apparatus.
  • the spectrograph consist a Czerny-turner optical configuration, two collimating mirrors, single linear array CCD detector.
  • Spectrometer useful for the analytical instrumentation, where the compact model with high resolution and larger wavelength range is required. Detailed description and scope of invention:
  • spectrometer is an optical instrument used to measure properties of light over a specific portion of the electromagnetic spectrum, typically used in spectroscopic analysis to identify materials.
  • the variable measured is most often the light's intensity but could also, for instance, be the polarization state.
  • the independent variable is usually the wavelength of the light, normally expressed as some fraction of a meter, but sometimes expressed as some unit directly proportional to the photon energy, such as wave number or electron volts, which has a reciprocal relationship to wavelength.
  • a spectrometer is used in spectroscopy for producing spectral lines and measuring their wavelengths and intensities.
  • Spectrometer is a term that is applied to instruments that operate over a very wide range of wavelengths, from gamma rays and X- rays into the far infrared. If the region of interest is restricted to near the visible spectrum, the study is called spectrophotometer.
  • high resolution optical spectrograph consist of a Czerny-turner optical configuration with time shared dual input beams (shutter controlled) from a single entrance slit with separate incidence angles.
  • the two beams fall on two collimating mirrors separately.
  • Plane diffraction grating receives dual incident beams on the same area of the grating, which their angle of incidence has selected by as per required spectral range.
  • De collimating mirror receives the diffracted rays and focuses the wavelength spectrum on a single linear array CCD detector. Detector reads two wavelength ranges in two time intervals with synchronized shutter.
  • the main advantage of the invention is provides a high resolution spectrometer with simply Available low cost components,
  • Time shared two input beams increases the wavelength range with a single linear array detector with out any optical components motion, which affects the repeatability,
  • Two collimating mirrors independently reduces the coma aberration in order to get high spectral resolution.
  • Fiber optic cables 1, 2 (part NO: 231210-0600 from Romack Inc) solarization resistance all silica fiber 600 micron core diameter 230mm length each receives light from the spark chamber of the hand held spark emission spectrophotometer.
  • Slit 3 which is 10 to 15 micron width and lmm height allows the two beams from the fibers with angular separation of 12.787 degree.
  • Stepper motor 4 bottom of the slit mechanism
  • (Part NO: 20SH33 from arc motion) three segmented chopper wheel allows the beams alternately with 50 m sec time interval.
  • Collimating Mirror 5 (first surface concave mirror with radius of curvature -200 mm UV reflection coated , 10 mm width, 10 mm height ) receives the beam 1 with off axis angle of 7 degree.
  • Collimating mirror 6 (first surface concave mirror with radius of curvature -200 mm UV reflection coated , 9 mm width, 10 mm height ) receives the beam 2 with off axis angle of 5.89 degree.
  • Plane diffraction Grating 7 (part NO: 33055FL03-400 from Newport) with 2400 grooves/mm, blazed at 250nm , 12.7 mm square receives the light from the two collimating mirrors alternately.
  • De collimating mirror 8 (first surface concave minor with radius of curvature -200 mm UV reflection coated , 30 mm width, 10 mm height ) receives the diffracted light with 12 degree off axis angle for the center wavelength of the two wavelength regions and focuses the spectrum on a flat area of the detector plane.
  • Detector 9 is a charge coupled device (UV phosphorus coated linear array CCD of part NO: TCD 1304AP from TOSHIBA 29 mm active length " OR" ILX 553B from SONY 36 mm active length) receives two separate time interval spectrum , which is synchronized by the stepper motor chopper wheel.
  • Beam-1 scan-1 wavelength range 190-280 nm
  • Average reciprocal linear dispersion for two scans is 4 nm/mm.

Abstract

This invention is based on high resolution optical spectrograph which is functional in optical absorbance and emission spectroscopy. It has some supplementary features which are make it more advanced as proportional to other apparatus. The spectrograph consist a Czerny-turner optical configuration, two collimating mirrors, single linear array CCD detector. Spectrometer useful for the analytical instrumentation, where the compact model with high resolution and larger wavelength range is required.

Description

HIGH RESOLUTION OPTICAL SPECTROGRAPH
Field of the invention:
The present invention relates to a spectrometer useful for the analytical instrumentation, where the compressed model with high resolution and larger wavelength range is required.
Prior Art:
In the existing system as given in United States Patent Application 20080212074 / Patent Application WO/2008/103937 Wherein A hand-held, self-contained, battery-powered test instrument for analyzing composition of a sample includes an exciter for exciting at least a portion of the sample, a compact cross- dispersed spectrometer for receiving an optical signal from the excited portion of the sample and a processor for processing spectral data about the optical signal from the spectrometer. The exciter may include a spark generator and a counter electrode, a laser or other device for generating the optical signal from the sample
portion. The spectrometer has a wavelength range broad enough to enable the test instrument to detect and determine relative quantities of carbon, phosphorous, sulfur, manganese, silicon, iron and other elements necessary to identify common alloys. The spectrometer includes a structural member made of a light-weight material having a small coefficient of thermal expansion (CTE). The spectrometer is dimensionally stable over a range of expected ambient temperatures, without controlling the temperature of the spectrometer
In the existing system as given in United States Patent 5278629 wherein a method and apparatus of atomic emission spectrometry includes confining a solution within an emission chamber for on-line analysis or individual sample analysis. An electrical discharge created within the liquid to directly excite an internal portion of the liquid within the liquid solution. The atomic emission is totally enclosed within a liquid solution pocket. A fiber optic probe is connected directly to the excited internal portion within the liquid and to a suitable analyzer which analyzes the atomic spectral lines to determine the atomic elements within the liquid solution. The system can be used for individual element analysis or a multiple element analysis by use of an array spectrometer, with a simultaneous display of the complete atomic spectrum of multiple elements in a liquid solution, all in less than a period of one second. In an on-line system, the liquid sample flows through the emission chamber with the electrical discharge created as time spaced discharges which are subsequently integrated by the analyzer to produce individual element related signals.
In the existing system as given in United States Patent 7305897 wherein The invention relates to a sample machining device, in particular for preparing samples for OES and/or XRF and/or combustion analyses, having at least one sample holder, and to provide a development which is advantageous in use proposes that the machining device includes a cylindrical milling cutter, the cylindrical milling cutter and the sample holder being movable relative to one another in such a manner that a sample which can be held in the sample holder can be divided by means of the cylindrical milling cutter to produce a free piece and a remainder piece of the sample which can still be held in the sample holder, and that at least one additional tool, in particular a drilling or separate milling tool, is provided in order to produce chips from the remainder piece of the sample. Moreover, the invention relates to a sample analysis device in which, according to the invention, the abovementioned sample machining device and means for carrying out OES analysis and/or XRF analysis and/or combustion analysis are provided.
In the existing system as given in WO/1993/001486 wherein a method and apparatus of atomic emission spectrometry includes confining a solution (8) within an emission chamber (5) for on-line analysis or individual sample analysis. An electrical discharge (10) created within the liquid to directly excite an internal portion of the liquid within the liquid solution (8). The atomic emission is totally enclosed within a liquid solution pocket. A fiber optic probe (12) is connected directly to the excited internal portion within the liquid and to a suitable analyzer (13, 15-21) which analyzes the atomic spectral lines to determine the atomic elements within the liquid solution. The system can be used for individual element analysis or a multiple element analysis by use of an array spectrometer (13), with a simultaneous display of the complete atomic spectrum of multiple elements in a liquid solution, all in less than a period of one second. In an on-line system, the liquid sample flows through the emission chamber (5) with the electrical discharge (10) created as time spaced discharges which are subsequently integrated by the analyzer (13, 15-21) to produce individual element related signals.
In the existing system as given in United States Patent Application 20080198377 wherein the invention relates to a method for the spectral analysis of metal samples with the following steps:
a. Recording of a spectrum of an unknown sample with a number of preset excitation parameters, b. Comparison of the spectrum with stored spectra of a number of control samples, c. Determination of the control sample with the best concordance of spectra, d. Setting of the excitation parameters, which are stored for the best and closest control sample determined in . step c e. Recording of the spectrum of the unknown sample with the excitation parameters set in step d, f. Calculation of the intensity ratios of the analysis lines stored for the control sample and the internal standards of the spectrum recorded in step e.
Object of the invention:
The object of the present invention provides a high resolution spectrometer with simply available low cost components. This objective is achieved by the following way for the wavelength ranges of 190-280nm& 280- 410 nm ranges.
In existing optical configurations the spectral resolution and range of wavelength some features are limited by the abnormalities of optical system, size of the instrument, accessibility of components and cost of the components. In some emission spectrophotometer applications time belated spectrum capturing for dissimilar spectral ranges is required in such cases time sharing disclosure avoids the supplementary rate of the instrumentation. As the increase in wavelength range in Czerny-Turner configuration with single input beam limits the resolution of the system due to large amount of coma.
Statement of invention:
This invention is based on high resolution optical spectrograph which is functional in optical absorbance and emission spectroscopy. It has some supplementary features which are make it more advanced as proportional to other apparatus. The spectrograph consist a Czerny-turner optical configuration, two collimating mirrors, single linear array CCD detector. Spectrometer useful for the analytical instrumentation, where the compact model with high resolution and larger wavelength range is required. Detailed description and scope of invention:
This invention is based on high resolution optical spectrograph. This is helpful in analytical instruments like optical absorbance and emission spectroscopy, spectrometer is an optical instrument used to measure properties of light over a specific portion of the electromagnetic spectrum, typically used in spectroscopic analysis to identify materials. The variable measured is most often the light's intensity but could also, for instance, be the polarization state. The independent variable is usually the wavelength of the light, normally expressed as some fraction of a meter, but sometimes expressed as some unit directly proportional to the photon energy, such as wave number or electron volts, which has a reciprocal relationship to wavelength. A spectrometer is used in spectroscopy for producing spectral lines and measuring their wavelengths and intensities. Spectrometer is a term that is applied to instruments that operate over a very wide range of wavelengths, from gamma rays and X- rays into the far infrared. If the region of interest is restricted to near the visible spectrum, the study is called spectrophotometer.
In existing optical configurations the spectral resolution and range of wavelength some features are limited by the abnormalities of optical system, size of the instrument, accessibility of components and cost of the components. In some emission spectrophotometer applications time belated spectrum capturing for dissimilar spectral ranges is required in such cases time sharing disclosure avoids the supplementary rate of the instrumentation. As the increase in wavelength range in Czerny-Turner configuration with single input beam limits the resolution of the system due to large amount of coma.
In this invention high resolution optical spectrograph consist of a Czerny-turner optical configuration with time shared dual input beams (shutter controlled) from a single entrance slit with separate incidence angles. The two beams fall on two collimating mirrors separately. Plane diffraction grating receives dual incident beams on the same area of the grating, which their angle of incidence has selected by as per required spectral range. De collimating mirror receives the diffracted rays and focuses the wavelength spectrum on a single linear array CCD detector. Detector reads two wavelength ranges in two time intervals with synchronized shutter. The main advantage of the invention is provides a high resolution spectrometer with simply Available low cost components, The wavelength ranges of 190-280nm& 280-410 nm ranges, Time shared two input beams increases the wavelength range with a single linear array detector with out any optical components motion, which affects the repeatability, Two collimating mirrors independently reduces the coma aberration in order to get high spectral resolution.
Details Description of Drawing;
> Fiber optic cables 1, 2 (part NO: 231210-0600 from Romack Inc) solarization resistance all silica fiber 600 micron core diameter 230mm length each receives light from the spark chamber of the hand held spark emission spectrophotometer.
> Slit 3 which is 10 to 15 micron width and lmm height allows the two beams from the fibers with angular separation of 12.787 degree.
> Stepper motor 4 (bottom of the slit mechanism) with (Part NO: 20SH33 from arc motion) three segmented chopper wheel allows the beams alternately with 50 m sec time interval.
> Collimating Mirror 5 (first surface concave mirror with radius of curvature -200 mm UV reflection coated , 10 mm width, 10 mm height ) receives the beam 1 with off axis angle of 7 degree.
> Collimating mirror 6 (first surface concave mirror with radius of curvature -200 mm UV reflection coated , 9 mm width, 10 mm height ) receives the beam 2 with off axis angle of 5.89 degree.
> Plane diffraction Grating 7 (part NO: 33055FL03-400 from Newport) with 2400 grooves/mm, blazed at 250nm , 12.7 mm square receives the light from the two collimating mirrors alternately.
> De collimating mirror 8 (first surface concave minor with radius of curvature -200 mm UV reflection coated , 30 mm width, 10 mm height ) receives the diffracted light with 12 degree off axis angle for the center wavelength of the two wavelength regions and focuses the spectrum on a flat area of the detector plane.
> Detector 9 is a charge coupled device (UV phosphorus coated linear array CCD of part NO: TCD 1304AP from TOSHIBA 29 mm active length " OR" ILX 553B from SONY 36 mm active length) receives two separate time interval spectrum , which is synchronized by the stepper motor chopper wheel.
> Theoretical line spread (along the dispersion direction) of the optical system. Beam-1 (scan-1 wavelength range 190-280 nm):
Figure imgf000008_0001
Beam-2(scan-2 wavelength range 280-410 nm):
Figure imgf000008_0002
Average reciprocal linear dispersion for two scans is 4 nm/mm.
With 8 micron pitch linear array detector gives optical spectrum readability 32 pm and average resolution < 100 pm is well suited for hand held optical emission spectrophotometer instrumentation.
Dimensions of the optical spectrometer 120 mm X 100mm X 35 mm (length X width X height).

Claims

IAVe Claims;
(1) A useful high resolution optical spectrograph which is useful for the analytical instrumentation, where the compact model with high resolution and larger wavelength range is required.
(2) The spectrograph comprises of a Czerny-turner optical configuration, two collimatiπg mirrors, and single linear array CCD detector.
(3) An advanced spectrograph claimed as claim 1 wherein it is capable in optical absorbance and emission spectroscopy.
(4) An advanced spectrograph claimed as claim 1 wherein Spectrometer useful for the analytical instrumentation, where the compact model with high resolution and larger wavelength range is required.
(5) An advanced spectrograph claimed as claim 1 wherein high resolution optical spectrograph consist a Czemy-turner optical configuration with time shared dual input beams (shutter controlled) from a single entrance slit with separate incidence angles.
(6) An advanced spectrograph claimed as claim 1 wherein the two beams fall on two collimating mirrors separately.
(7) An advanced spectrograph claimed as claim 1 wherein Plane diffraction grating receives dual incident beams on the same area of the grating, which their angle of incidence has selected by as per required spectral range.
(8) An advanced spectrograph claimed as claim 1 wherein De collimating mirror receives the diffracted rays and focuses the wavelength spectrum on a single linear array CCD detector.
(9) An advanced spectrograph claimed as claim 1 wherein Detector reads two wavelength ranges in two time intervals with synchronized shutter.
(10) An advanced spectrograph claimed as claim 1 wherein it provides a high resolution spectrometer with simply available low cost components.
(11) An advanced spectrograph claimed as claim 1 wherein the wavelength ranges is 190-280nm& 280-410 nm ranges,
(12) An advanced spectrograph claimed as claim 1 wherein Time shared two input beams increases the wavelength range with a single linear array detector with out any optical components motion which affects the repeatability
(13) An advanced spectrograph claimed as claim 1 wherein two collimating mirrors independently reduces the coma aberration in oider to get high spectral resolution.
PCT/IN2009/000108 2009-01-01 2009-02-17 High resolution optical spectrograph WO2010076806A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IN2MU2009 2009-01-01
IN2/MUM/2009 2009-01-01

Publications (1)

Publication Number Publication Date
WO2010076806A1 true WO2010076806A1 (en) 2010-07-08

Family

ID=42309891

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IN2009/000108 WO2010076806A1 (en) 2009-01-01 2009-02-17 High resolution optical spectrograph

Country Status (1)

Country Link
WO (1) WO2010076806A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010048526A1 (en) * 2000-05-07 2001-12-06 Ophir Optronics Ltd. Compact spectrometer
US6507398B1 (en) * 1999-11-05 2003-01-14 Shimadzu Corporation Czerny-turner spectroscope
US7084972B2 (en) * 2003-07-18 2006-08-01 Chemimage Corporation Method and apparatus for compact dispersive imaging spectrometer
US7268871B2 (en) * 2004-08-12 2007-09-11 Datacolor Holding Ag Measuring head for planar measurement of a sample
US20090091754A1 (en) * 2007-10-05 2009-04-09 Jingyun Zhang Compact Spectrometer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6507398B1 (en) * 1999-11-05 2003-01-14 Shimadzu Corporation Czerny-turner spectroscope
US20010048526A1 (en) * 2000-05-07 2001-12-06 Ophir Optronics Ltd. Compact spectrometer
US7084972B2 (en) * 2003-07-18 2006-08-01 Chemimage Corporation Method and apparatus for compact dispersive imaging spectrometer
US7268871B2 (en) * 2004-08-12 2007-09-11 Datacolor Holding Ag Measuring head for planar measurement of a sample
US20090091754A1 (en) * 2007-10-05 2009-04-09 Jingyun Zhang Compact Spectrometer

Similar Documents

Publication Publication Date Title
US9194743B2 (en) Raman spectroscopy using diffractive MEMS
TW300280B (en)
Dubessy et al. Instrumentation in Raman spectroscopy: elementary theory and practice
US7505128B2 (en) Compact, hand-held raman spectrometer microsystem on a chip
US20140247447A1 (en) Systems and Methods for Spatial Heterodyne Raman Spectroscopy
JP6145090B2 (en) Method and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy
CN105784682A (en) Detection device and detection method by laser induced breakdown spectroscopy
Maiwald et al. A portable shifted excitation Raman difference spectroscopy system: device and field demonstration
EP1436575B1 (en) Double grating three dimensional spectrograph
JP2007132934A (en) Spectroscopy system
JP2008046132A (en) Spectroscopy system
CN112119296B (en) Hybrid laser-induced breakdown spectroscopy system
US20050018187A1 (en) Double grating three dimensional spectrograph with multi-directional diffraction
JP5261862B2 (en) Method and apparatus for measuring stray light of diffraction grating
JP2002031572A (en) Specroscope and optical spectrum analyzer equipped therewith
CN114402182A (en) Multi-chromatic dispersion spectrometer
RU2081403C1 (en) Instrument transducer for portable analyzer of optical emission
Kirchner et al. All-reflective UV-VIS-NIR transmission and fluorescence spectrometer for μm-sized samples
WO2010076806A1 (en) High resolution optical spectrograph
Ghazaryan et al. Silica Raman scattering probe for absolute calibration of Thomson scattering spectrometers
JP3126718B2 (en) Multi-channel fluorescence spectrometer
JPH11190695A (en) Semiconductor stress measuring raman spectrophotometer
JP7356498B2 (en) Equipment for analyzing the material composition of samples via plasma spectral analysis
Shukla et al. Design and Development of 0.5 m Scanning Monochromator and its Application to 15N Analysis
JPH04270943A (en) Spectrum analyzer

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09836179

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 09836179

Country of ref document: EP

Kind code of ref document: A1