WO2010037002A3 - Methods of thermoreflectance thermography - Google Patents

Methods of thermoreflectance thermography Download PDF

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Publication number
WO2010037002A3
WO2010037002A3 PCT/US2009/058565 US2009058565W WO2010037002A3 WO 2010037002 A3 WO2010037002 A3 WO 2010037002A3 US 2009058565 W US2009058565 W US 2009058565W WO 2010037002 A3 WO2010037002 A3 WO 2010037002A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
radiation
thermoreflectance
reflected
thermography
Prior art date
Application number
PCT/US2009/058565
Other languages
French (fr)
Other versions
WO2010037002A2 (en
Inventor
Janice A. Hudgings
Joseph Summers
Original Assignee
Mount Holyoke College
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mount Holyoke College filed Critical Mount Holyoke College
Publication of WO2010037002A2 publication Critical patent/WO2010037002A2/en
Publication of WO2010037002A3 publication Critical patent/WO2010037002A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0808—Convex mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0831—Masks; Aperture plates; Spatial light modulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/084—Adjustable or slidable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Radiation Pyrometers (AREA)

Abstract

An embodiment of a method of performing thermoreflectance measurements with an imaging system comprises: reflecting radiation from a number of points in a sample in response to an illuminating radiation while a temperature modulation is applied to the sample; acquiring digital images of the reflected radiation after the reflected radiation passes through an aperture; and deriving a map of relative reflectivity of the sample based on the digital images. At least a portion of the illuminating radiation can pass through at least a portion of the sample and is reflected at a change refractive index interface.
PCT/US2009/058565 2008-09-29 2009-09-28 Methods of thermoreflectance thermography WO2010037002A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/240,981 2008-09-29
US12/240,981 US8362431B2 (en) 2005-03-15 2008-09-29 Methods of thermoreflectance thermography

Publications (2)

Publication Number Publication Date
WO2010037002A2 WO2010037002A2 (en) 2010-04-01
WO2010037002A3 true WO2010037002A3 (en) 2010-07-22

Family

ID=42060426

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/058565 WO2010037002A2 (en) 2008-09-29 2009-09-28 Methods of thermoreflectance thermography

Country Status (2)

Country Link
US (1) US8362431B2 (en)
WO (1) WO2010037002A2 (en)

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US7733100B2 (en) * 2005-08-26 2010-06-08 Dcg Systems, Inc. System and method for modulation mapping
CA2669999C (en) 2006-11-20 2015-10-27 Ludwig-Maximilians-Universitat Munchen Fast thermo-optical particle characterisation
EP1936345B1 (en) * 2006-12-22 2012-06-20 Sony Deutschland Gmbh Temperature and temperature distribution sensing with high resolution in microscopic electronic devices and biological objects
WO2008137848A2 (en) * 2007-05-04 2008-11-13 Masschusetts Institute Of Technology (Mit) Optical characterization of photonic integrated circuits
KR101350976B1 (en) 2010-12-22 2014-01-14 한국기초과학지원연구원 Appratus For Measuring Temperature Distribution
JP5562919B2 (en) * 2011-09-30 2014-07-30 オリンパス株式会社 Super-resolution observation device
US9721853B2 (en) * 2013-03-13 2017-08-01 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for forming a semiconductor device
US9927350B2 (en) * 2013-10-17 2018-03-27 Trustees Of Boston University Thermal property microscopy with frequency domain thermoreflectance and uses thereof
KR101555153B1 (en) * 2014-09-03 2015-10-06 한국기초과학지원연구원 Appratus and method for measuring temperature distributuin
ITUB20154591A1 (en) * 2015-10-12 2017-04-12 Crestoptics S R L CONFOCAL MICROSCOPY AND RELATIVE PROCEDURE OF ACQUISITION AND PROCESSING OF IMAGES
US10928317B2 (en) 2016-06-22 2021-02-23 University Of Virginia Patent Foundation Fiber-optic based thermal reflectance material property measurement system and related methods
IT201700081124A1 (en) * 2017-07-21 2019-01-21 Andrea Martinelli INSTRUMENT FOR SPECTROSCOPIC ANALYSIS IN TEMPERATURE MODULATION
US11654635B2 (en) 2019-04-18 2023-05-23 The Research Foundation For Suny Enhanced non-destructive testing in directed energy material processing
CN110231642B (en) * 2019-06-27 2022-10-25 南华大学 Method and device for constructing radiation field map and robot
CN113176293B (en) * 2021-03-29 2023-03-21 北京工业大学 Structure and method for measuring heterojunction interface thermal conductivity by adopting lattice contact mode
CN113624358B (en) * 2021-07-14 2023-09-26 中国电子科技集团公司第十三研究所 Three-dimensional displacement compensation method and control device for photothermal reflection microscopic thermal imaging
WO2023060091A1 (en) * 2021-10-04 2023-04-13 Ultima Genomics, Inc. Enhanced resolution imaging

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JP2000310743A (en) * 1998-05-22 2000-11-07 Olympus Optical Co Ltd Optical scanner and optical scan type confocal optical device using same
JP2006308513A (en) * 2005-05-02 2006-11-09 Nec Electronics Corp Inspection device and method

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Publication number Priority date Publication date Assignee Title
JPH102855A (en) * 1996-06-17 1998-01-06 Rikagaku Kenkyusho Layer thickness and refractive index measuring method for layered structure and measuring apparatus therefor
JP2000310743A (en) * 1998-05-22 2000-11-07 Olympus Optical Co Ltd Optical scanner and optical scan type confocal optical device using same
US6054868A (en) * 1998-06-10 2000-04-25 Boxer Cross Incorporated Apparatus and method for measuring a property of a layer in a multilayered structure
JP2006308513A (en) * 2005-05-02 2006-11-09 Nec Electronics Corp Inspection device and method

Also Published As

Publication number Publication date
US20090084959A1 (en) 2009-04-02
US8362431B2 (en) 2013-01-29
WO2010037002A2 (en) 2010-04-01

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