WO2010004721A1 - 導電性高分子を用いた流体搬送装置 - Google Patents
導電性高分子を用いた流体搬送装置 Download PDFInfo
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- WO2010004721A1 WO2010004721A1 PCT/JP2009/003128 JP2009003128W WO2010004721A1 WO 2010004721 A1 WO2010004721 A1 WO 2010004721A1 JP 2009003128 W JP2009003128 W JP 2009003128W WO 2010004721 A1 WO2010004721 A1 WO 2010004721A1
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- pressure
- diaphragm
- fluid
- pump
- chamber
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
- F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2251/00—Material properties
- F05C2251/08—Shape memory
Definitions
- the present invention uses a conductive polymer that sucks and discharges fluids, particularly used in a fuel supply device such as methanol in a fuel cell or a water-cooled circulation device for cooling an electronic device including a CPU.
- a fuel supply device such as methanol in a fuel cell or a water-cooled circulation device for cooling an electronic device including a CPU.
- the present invention relates to a fluid transfer device.
- Pumps which are devices that transport fluids such as water, reduce the transport of cooling fluid for heating elements such as CPUs, transport of blood to blood testing chips, small doses of pharmaceuticals to the human body, chemical experiments or chemical operations Development is progressing in order to supply fuel such as Lab on a chip (lab on chip) for sizing and integration, or methanol in a fuel cell. In these applications, miniaturization, weight reduction, voltage reduction, and noise reduction are required.
- a pump using a conductive polymer film has been proposed (for example, Patent Document 1).
- an actuator using a conductive polymer film is characterized by being lightweight and capable of silent operation at a low voltage.
- FIG. 22A to 22C show the structure of the diaphragm pump proposed in Patent Document 1.
- FIG. 22A to 22C show the structure of the diaphragm pump proposed in Patent Document 1.
- the pump in FIG. 22A includes diaphragms 403 and 404 made of a conductive polymer film, respectively, inside the housing 402.
- Diaphragm 403 is defined as a first diaphragm
- diaphragm 404 is defined as a second diaphragm.
- the housing 402 has a cylindrical shape and has an internal space.
- the first and second diaphragms 403 and 404 are disc-shaped conductive polymer films, respectively, and their peripheral portions are fixed to the housing 402 by fixing portions 430 and 431, respectively.
- the first and second diaphragms 403 and 404 are connected to each other by a connecting member 406 at each central portion.
- the first and second diaphragms 403 and 404 are installed in a state where tension is applied in the film surface direction, and each has a conical shape.
- a ring-shaped space 409 surrounded by the first and second diaphragms 403 and 404 and the housing 402 is defined as an electrolyte chamber.
- the electrolytic solution chamber 409 is filled with an electrolytic solution.
- the first and second diaphragms 403 and 404 are connected to a power source 410c via lead wires 410a and 410b, respectively.
- the conductive polymer films of the first and second diaphragms 403 and 404 perform expansion and contraction.
- first pump chamber the first space portion 407 surrounded by the housing 402 and the first diaphragm 403
- second space portion 408 surrounded by the housing 402 and the second diaphragm 404 is called a second pump chamber.
- the liquid outside the first pump chamber 407 is sucked into the first pump chamber 407 from the first suction port 411 a provided with the first suction valve 412, and the second discharge valve 424 is provided.
- the liquid inside the second pump chamber 408 is discharged from the discharge port 413b to the outside of the second pump chamber 408.
- the liquid outside the second pump chamber 408 is discharged from the second suction port 411b provided with the second suction valve 423 to the second pump.
- the liquid inside the first pump chamber 407 is discharged to the outside of the first pump chamber 407 from the first discharge port 413 a provided with the first discharge valve 422 by sucking into the chamber 408.
- the volume of the first pump chamber 407 and the second pump chamber 408 is repeatedly increased and decreased, and the suction and discharge of the liquid to the respective pump chambers are repeated accordingly.
- the first and second diaphragms 403 and 404 are slack, the electrolytic expansion / contraction force of the conductive polymer film escapes without being transferred to the fluid inside the pump chamber, so that the operation efficiency of the pump is lowered. Therefore, the first diaphragm 403 and the second diaphragm 404 need to be in a state in which the first diaphragm 403 and the second diaphragm 404 are not loosened. In the pump of FIG. By making it smaller than the pressure of the fluid inside the pump chamber and the fluid inside the second pump chamber, the first diaphragm 403 and the second diaphragm 404 can be in a state of being stretched loosely.
- the pump of FIG. 22B has substantially the same configuration as the pump of FIG. 22A, except that the connecting member 406 is not provided.
- the first and second diaphragms 403 and 404 exert a force through the electrolyte filled in the space 409.
- the same operation as in FIG. 22A is performed.
- the pump of FIG. 22B by making the pressure of the electrolyte inside the electrolyte chamber 409 larger or smaller than the pressure of the fluid inside the first pump chamber and the fluid inside the second pump chamber, The first diaphragm 403 and the second diaphragm 404 can be in a state of being stretched without slack.
- the pump of FIG. 22C includes only one diaphragm 403 made of a conductive polymer film inside the housing 402.
- the housing 402 has a cylindrical shape and has an internal space.
- the diaphragm 403 is a disk-shaped conductive polymer film, and the periphery thereof is fixed to the housing 402 at a fixing portion 430. Further, the diaphragm 403 and the housing 402 are connected by a spring member 451.
- the diaphragm 403 is installed in a state where tension is applied in the film surface direction, and has a conical shape. In FIG.
- a space 409 located below the diaphragm 403 and surrounded by the diaphragm 403 and the housing 402 is defined as an electrolyte chamber.
- the electrolytic solution chamber 409 is filled with an electrolytic solution.
- An electrode 450 is disposed on the bottom surface of the housing 402 facing the diaphragm 403. Diaphragm 403 and electrode 450 are connected to power supply 410c via lead wires 410a and 410b, respectively.
- a space portion 407 surrounded by the diaphragm 403 and the housing 402 is defined as a pump chamber.
- the diaphragm 403 In the state shown in FIG. 22C, the diaphragm 403 is expanded. In this state, liquid outside the pump chamber 407 is sucked into the pump chamber 407 from the suction port 411 provided with the suction valve 412. Conversely, when the diaphragm 403 contracts, the liquid inside the pump chamber 407 is discharged from the discharge port 413 provided with the discharge valve 422 to the outside of the pump chamber 407. By continuously switching these states, the volume of the pump chamber 407 is repeatedly increased and decreased, and the suction and discharge of the liquid are repeated accordingly. This fulfills the function of a pump.
- the pump using the conductive polymer film represented by the pump of Patent Document 1 has a problem that the operating efficiency of the pump is lowered due to a large change in the tension of the diaphragm during the operation of the pump.
- the change in the tension of the diaphragm has the following two changes.
- the first change is a change in diaphragm tension caused by periodic electrolytic expansion and contraction of the conductive polymer film during the pump operation.
- the second change is a change in tension that occurs when the conductive polymer film expands and contracts for reasons other than periodic electrolytic expansion and contraction.
- this will be described in order.
- the amount of expansion and contraction of the conductive polymer film is approximately proportional to the amount of electric charge entering and exiting the conductive polymer film.
- the first diaphragm 403 expands and the second diaphragm 404 contracts, but the expansion amount of the first diaphragm 403 and the contraction amount of the second diaphragm 404 are approximately equal to each other from the above contents. That is, the amount of change in the area of the first diaphragm 403 and the amount of change in the area of the second diaphragm 404 have the opposite signs and the absolute values are substantially equal.
- the total area of the first diaphragm 403 and the second diaphragm 404 is kept substantially constant. Conversely, the same relationship holds when a certain amount of charge flows out of the first diaphragm 403 and flows into the second diaphragm 404. From the above, when the pump of FIG. 22B operates, the total area of the first diaphragm 403 and the second diaphragm 404 is kept substantially constant.
- the relationship between the area of the first diaphragm 403 and the volume of the first pump chamber is generally non-linear under the assumption that the first diaphragm 403 is in a relaxed state during the operation of the pump of FIG. 22B. It becomes the relationship. That is, a graph representing the relationship between the area of the first diaphragm 403 and the volume of the first pump chamber 407 generally has an upward convex shape or a downward convex shape.
- FIG. 25A shows an example in which the shape of the graph representing the relationship between the area of the first diaphragm 403 and the volume of the first pump chamber 407 is convex upward. Conversely, FIG.
- 25B shows an example in which the shape of the graph representing the relationship between the area of the first diaphragm 403 and the volume of the first pump chamber 407 is convex downward.
- the area of the first diaphragm 403 is S 1
- the volume of the first pump chamber 407 at that time is W 1
- the area of the second diaphragm 404 is S 2
- the second pump chamber 408 at that time is the volume and W 2
- FIG. 25C When the relationship of FIG. 25C is established, assuming that the first diaphragm 403 and the second diaphragm 404 are not loosely stretched during the operation of the pump, the area of the first diaphragm 403 and the first pump chamber 407 and The relationship between the second pump chamber 408 and the volume (W 1 + W 2 ) of the total portion thereof is shown in FIG. 25C. 25B, assuming that the first diaphragm 403 and the second diaphragm 404 are not loosened during the operation of the pump, the area of the first diaphragm 403 and the first pump chamber The relationship between 407 and the second pump chamber 408 and the volume (W 1 + W 2 ) of their total portion is shown in FIG. 25D.
- the maximum value is obtained when the area of the first diaphragm 403 is S 0
- the minimum value is obtained when the area of the first diaphragm 403 is S 0 .
- the total value of the volume of the first pump chamber 407 and the volume of the second pump chamber 408 does not become a constant value but changes as the area of the first diaphragm 403 and the second diaphragm 404 changes. .
- the total value (W 1 + W 2 ) of the volume of the first pump chamber 407 and the volume of the second pump chamber 408 decreases or increases.
- the total volume (W 1 + W 2) by subtracting the value ⁇ W t of the volume of the electrolyte chamber 409 from W t first pump chamber 407 and the second pump chamber 408 ⁇ (W 1 + W 2 ) ⁇ .
- the volume of the electrolyte chamber 409 increases or decreases.
- the electrolytic solution filled in the electrolytic solution chamber 409 is an incompressible fluid, and thus the pressure of the electrolytic solution decreases rapidly. Due to this pressure change, the balance between the fluid pressure in the first pump chamber and the electrolyte pressure changes abruptly, and the first diaphragm 403 has a strong force in the direction from the first pump chamber 407 toward the electrolyte chamber 409. Pressed.
- the second diaphragm 404 is pushed with a strong force in the direction from the second pump chamber 408 toward the electrolyte chamber 409. For this reason, the tension of the first diaphragm 403 and the second diaphragm 404 becomes very large, and the operation of the first diaphragm 403 and the second diaphragm 404 is hindered. As a result, the discharge amount and the suction amount of the pump become very small values, and the operation efficiency of the pump is reduced.
- FIG. 24B shows a state where the conductive polymer membrane diaphragms 403 and 404 are loosened (loose) in the pump shown in FIG. 22B.
- the tension in the state in which the diaphragms 403 and 404 are loose is smaller than the tension in the state in which the diaphragms 403 and 404 are not loosened. That is, in the pump of FIG. 22B, the pressure of the electrolytic solution changes rapidly according to the volume change of the electrolytic solution chamber 409. As a result, the diaphragms 403 and 404 are loosened, or the tension is so great that the operation is hindered. The same applies to the pump of FIG. 22A. In the operation, a volume change of the electrolyte chamber 409 occurs, and the pressure of the electrolyte solution abruptly changes accordingly.
- the volume of the electrolyte chamber 409 decreases.
- the electrolytic solution filled in the electrolytic solution chamber 409 is an incompressible fluid, the pressure of the electrolytic solution increases rapidly.
- the diaphragm 403 is pushed with a strong force in the direction from the electrolyte chamber 409 to the pump chamber 407, and the tension of the diaphragm 403 becomes a very large value. This hinders the operation of the diaphragm 403.
- the volume of the electrolyte chamber 409 increases.
- the electrolyte filled in the electrolyte chamber 409 is an incompressible fluid, the pressure of the electrolyte rapidly decreases.
- the diaphragm 403 is pushed with a strong force in the direction from the pump chamber 407 to the electrolyte chamber 409, and the tension of the diaphragm 403 becomes a very large value. This hinders the operation of the diaphragm 403.
- 24A to 24C show a state in which the diaphragm of the conductive polymer film is loosened (loose) in the pump shown in FIGS. 22A to 22C.
- the diaphragm of the conductive polymer film expands and contracts, the force escapes and the force is not efficiently transmitted to the liquid in the pump chamber, so the suction and discharge efficiency of the liquid is significantly reduced.
- the fluid discharge amount and the suction amount become very small values, and the efficiency of the pump is remarkably lowered.
- FIG. 23 shows a state in which a conductive polymer film having a rectangular shape is set in an electrolytic solution, and a certain tension in the long side direction is applied and an AC voltage is applied to perform electrostretching. It is the figure which showed typically the change of the distortion of a conductive polymer film.
- L 0 indicates the length of the long side of the conductive polymer film before voltage application
- ⁇ L indicates the value obtained by subtracting L 0 from the length of the long side of the conductive polymer film at each time.
- the vertical axis of FIG. 23 indicates a value representing the [Delta] L / L 0 as a percentage (%).
- the conductive polymer film may stretch with changes in temperature. For example, when the temperature rises, the conductive polymer film may be stretched due to thermal expansion. Further, when the conductive polymer film has the property of heat shrinkage, the conductive polymer film extends when the temperature is lowered. Considering the case where the conductive polymer film stretches due to these causes, the elastic modulus of the conductive polymer film is large, and the stretch of the conductive polymer film due to these causes cannot be absorbed by elasticity. A state where the molecular film is loose occurs.
- the conductive polymer film may shrink as the temperature changes.
- the conductive polymer film may thermally shrink when the temperature rises.
- the conductive polymer film has a thermal expansion property
- the conductive polymer film shrinks when the temperature decreases.
- the conductive polymer film absorbs the electrolytic solution, the thickness increases and a force extending in the thickness direction is generated, and the conductive polymer film may shrink in the surface direction of the diaphragm surface due to deformation caused by this force.
- the elastic modulus of the conductive polymer film is large, and the shrinkage of the conductive polymer film due to these causes cannot be absorbed by elasticity.
- the tension of the molecular film becomes so great that the pump operation is hindered.
- the object of the present invention is to have a function of a pump that sucks and discharges fluid using a conductive polymer film, so that the pressure applied to the diaphragm composed of the conductive polymer film is within an appropriate range.
- An object of the present invention is to provide a fluid transfer device using a conductive polymer that can improve the efficiency of suction and discharge of fluid by maintaining the fluid.
- a fluid conveyance device using a conductive polymer that sucks and discharges fluid A pump chamber filled with the fluid; A housing part in which the pump chamber is formed and constituting a part of the wall surface of the pump chamber; A diaphragm that is supported in the housing part and is formed of a conductive polymer film that is partly or wholly subjected to electrolytic expansion and contraction, and that forms a wall surface of the pump chamber together with the housing part; An opening disposed in the housing and for discharging and sucking the fluid in the pump chamber; An electrolytic solution chamber surrounded by the casing and the diaphragm and containing an electrolytic solution therein, and a part of the electrolytic solution is in contact with the diaphragm; A power source for applying a voltage to the conductive polymer film; A wiring portion for electrically connecting the conductive polymer film and the power source; Provided is a fluid conveyance
- the pressure acting on the diaphragm is maintained within an appropriate range by maintaining the pressure of the electrolytic solution within a predetermined range. (Pressure maintenance function). Since this state is always maintained during operation of the fluid conveyance device, the work when the conductive polymer film expands and contracts is efficiently used for the discharge and suction of the fluid in the pump chamber. That is, assuming that the ratio of electrical energy applied from the power source used for the discharge and suction work of the fluid in the pump chamber is called work efficiency, the work efficiency of the fluid transfer device is improved by the pressure maintaining function. Improved compared to the pump.
- 1 is a perspective view of a fluid conveyance device using a conductive polymer according to a first embodiment of the present invention
- It is a block diagram of the fluid conveyance apparatus concerning 1st Embodiment of this invention
- It is a block diagram of the fluid conveyance apparatus concerning 1st Embodiment of this invention
- It is sectional drawing of the fluid conveyance apparatus concerning 1st Embodiment of this invention, It is the figure which showed the example of the magnitude
- In the fluid conveyance device concerning a 1st embodiment of the present invention it is an operation figure showing operation of a pump when applying a periodic sine wave voltage with a power supply
- In the fluid conveyance device concerning a 1st embodiment of the present invention it is an operation figure showing operation of a pump when applying a periodic sine wave voltage with a
- the pressure of the electrolyte is set to the same value as the pressure of the fluid in the pump chamber.
- FIG. 10 is a fluid conveyance device according to still another embodiment of the present invention
- the pump of FIG. 10 in the fluid conveyance device according to the first modification of the first embodiment of the present invention is used to pump the electrolyte pressure.
- FIG. 13 is a fluid conveyance device according to still another embodiment of the present invention, and in the pump of FIG.
- the electrolyte pressure is the same value as the fluid pressure in the pump chamber.
- FIG. 18 is a fluid conveyance device according to still another embodiment of the present invention, and in the pump of FIG. 18 in the fluid conveyance device according to the fourth embodiment of the present invention, the electrolyte pressure is the same value as the fluid pressure in the pump chamber.
- a fluid conveyance device using a conductive polymer that sucks and discharges fluid A pump chamber filled with the fluid; A housing part in which the pump chamber is formed and constituting a part of the wall surface of the pump chamber; A diaphragm that is supported in the housing part and is formed of a conductive polymer film that is partly or wholly subjected to electrolytic expansion and contraction, and that forms a wall surface of the pump chamber together with the housing part; An opening disposed in the housing and for discharging and sucking the fluid in the pump chamber; An electrolytic solution chamber surrounded by the casing and the diaphragm and containing an electrolytic solution therein, and a part of the electrolytic solution is in contact with the diaphragm; A power source for applying a voltage to the conductive polymer film; A wiring portion for electrically connecting the conductive polymer film and the power source; Provided is a fluid conveyance device using a conductive polymer, comprising a pressure maintaining unit
- the pressure maintaining part includes an elastic part, and acts on the diaphragm by deforming an interface between the electrolytic solution and a part other than the electrolytic solution by an elastic force of the elastic part.
- a fluid conveyance device using a conductive polymer that maintains a pressure within a predetermined range.
- the elastic part of the pressure maintaining part is a stretchable elastic body formed on a part of the wall surface of the electrolyte chamber, and between the elastic body and the housing part. And the elastic body acts from the inside of the electrolyte chamber to the outside by causing the elastic force of the elastic body or the elastic force of the spring portion to act as the elastic force of the elastic portion.
- the pressure of the electrolytic solution is kept at a value smaller than the pressure of the fluid in the pump chamber, and the diaphragm generated by the difference between the pressure of the electrolytic solution and the pressure of the fluid in the pump chamber.
- the elastic part of the pressure maintaining part is constituted by an elastic body that can be expanded and contracted formed on a part of the wall surface of the electrolyte chamber, and the elastic force of the elastic body is obtained.
- the elastic part By causing the elastic part to act as the elastic force, the elastic body generates a force to deform from the inside of the electrolyte chamber to the outside, Due to the generated force, the pressure of the electrolytic solution is kept at a value smaller than the pressure of the fluid in the pump chamber, and the diaphragm generated by the difference between the pressure of the electrolytic solution and the pressure of the fluid in the pump chamber.
- the elastic part of the pressure maintaining part is constituted by a spring part, and the elastic force of the spring part is caused to act as the elastic force of the elastic part. Generates a force to deform the interface with parts other than the electrolyte, Due to the generated force, the pressure of the electrolytic solution is kept at a value smaller than the pressure of the fluid in the pump chamber, and the diaphragm generated by the difference between the pressure of the electrolytic solution and the pressure of the fluid in the pump chamber.
- the fluid conveyance device using the conductive polymer according to the second aspect, wherein the diaphragm is maintained in a shape that is convex from the pump chamber toward the electrolyte chamber by tension. provide.
- the elastic part of the pressure maintaining part is a stretchable elastic body formed on a part of the wall surface of the electrolyte chamber, and between the elastic body and the housing part. And the elastic body is made to act as the elastic force of the elastic part by the elastic force of the elastic body or the elastic force of the spring part.
- the pressure of the electrolytic solution is maintained at a value larger than the pressure of the fluid in the pump chamber, and the diaphragm generated by the difference between the pressure of the electrolytic solution and the pressure of the fluid in the pump chamber.
- the elastic part of the pressure maintaining part is constituted by an elastic body that can be expanded and contracted formed on a part of the wall surface of the electrolyte chamber, and the elastic force of the elastic body is obtained.
- the elastic portion By causing the elastic portion to act as the elastic force, the elastic body generates a force that tends to deform inward from the outside of the electrolyte chamber, Due to the generated force, the pressure of the electrolytic solution is maintained at a value larger than the pressure of the fluid in the pump chamber, and the diaphragm generated by the difference between the pressure of the electrolytic solution and the pressure of the fluid in the pump chamber.
- the elastic part of the pressure maintaining part is configured by a spring part, and the elastic force of the spring part acts as the elastic force of the elastic part. Generates a force to deform the interface with parts other than the electrolyte, Due to the generated force, the pressure of the electrolytic solution is maintained at a value larger than the pressure of the fluid in the pump chamber, and the diaphragm generated by the difference between the pressure of the electrolytic solution and the pressure of the fluid in the pump chamber.
- the elastic part of the pressure maintaining part is located in the electrolyte solution of the electrolyte chamber, and is constituted by a bubble part containing gas inside,
- the volume of the bubble part is 10% or more of the discharge amount of the fluid conveyance device when the diaphragm expands and contracts once.
- the conductive polymer according to the second aspect is used.
- a fluid transfer device is provided.
- the volume of the bubble portion is 20% or less of the volume of the electrolyte chamber.
- FIG. 1 is a perspective view of a fluid conveyance device using a conductive polymer according to the first embodiment of the present invention.
- the fluid conveyance device of FIG. 1 includes a housing part 102, an elastic film part 130 as an example of an elastic part, and fluid pipe parts 200, 201, 202, and 203.
- the housing unit 102 has a substantially cylindrical shape. Two fluid pipe parts 200 and 201 and two fluid pipe parts 202 and 203 are connected to the upper and lower circular planes 210 of the casing part 102, respectively. A circular elastic membrane portion 130 is provided at the opening edge of the side wall 102 s of the housing portion 102 outside the through hole 102 h.
- the upper circular plane of the casing 102 is defined as an upper circular plane 210.
- the straight lines 100A-100B are straight lines including one diameter of the upper circular plane 210.
- the straight line 100C-100D is a straight line including one diameter of the upper circular plane 210, and is orthogonal to the straight lines 100A-100B.
- a plane including the straight lines 100A to 100B and perpendicular to the upper circular plane 210 is defined as a plane 220 (see FIG. 2).
- a plane including the straight line 100C-100D and perpendicular to the upper circular plane 210 is defined as a plane 221 (see FIG. 2).
- FIG. 3 is a cross-sectional view of the fluid conveyance device according to the first embodiment cut along a plane 220.
- 3 includes a housing 102, a first diaphragm 103, a second diaphragm 104, a first pump chamber 107, a second pump chamber 108, an electrolyte chamber 109, and wiring portions 110a and 110b.
- Power supply 110c first and second suction ports 111a and 111b, first and second discharge ports 113a and 113b, first and second suction valves 121 and 123, and first and second discharge valves 122.
- 124 a spring part 131 as an example of an elastic part, an elastic film part 130, and fluid pipe parts 200, 201, 202, 203.
- the spring part 131 and the elastic film part 130 function as a pressure maintaining part (in particular, an example of an elastic part of the pressure maintaining part) as described below.
- the first diaphragm 103 is a disc-shaped conductive polymer film, and its peripheral part is fixed to the peripheral part of the upper wall of the housing part 102.
- the second diaphragm 104 is a disk-shaped conductive polymer film, and its peripheral part is fixed to the peripheral part of the lower wall part of the casing part 102.
- the housing portion 102 itself is made of an insulator, or the first diaphragm 103 and / or the second diaphragm 104 is both.
- the casing 102 are fixed via an insulator.
- the first diaphragm 103 and the second diaphragm 104 are simply referred to as diaphragms for the sake of simplicity.
- the shape or operation of each part will be described in detail.
- FIG. 4 is a cross-sectional view of the fluid conveyance device according to the first embodiment cut along a plane 221.
- FIG. 4 the shape of the spring portion 131 is shown in a simplified manner.
- a helical coil spring structure having a straight line parallel to the straight lines 100A-100B as an axis will be described later. Can be considered.
- the first pump chamber 107 is configured by being surrounded by the upper wall of the housing 102 and the first diaphragm 103, and is filled with a fluid to be transported.
- a fluid pipe part 200 is connected to the upper wall of the housing part 102 constituting a part of the first pump chamber 107, and a fluid pipe part 201 is connected to a first suction port 111a having a first suction valve 121.
- Two openings with the first discharge port 113a having the first discharge valve 122 are formed.
- the second pump chamber 108 is configured by being surrounded by the lower wall of the housing 102 and the second diaphragm 104, and is filled with a fluid to be transported.
- the fluid in the first pump chamber 107 and the fluid in the second pump chamber 108 may be the same or different.
- a fluid pipe part 203 is connected to the lower wall of the casing part 102 constituting a part of the second pump chamber 108, and a second suction port 111 b having a second suction valve 123 and a fluid pipe part 202 are connected. Two openings with the second discharge port 113b having the second discharge valve 124 are formed.
- a ring-shaped space 109 surrounded by the first and second diaphragms 103 and 104 and the casing 102 is defined as an electrolyte chamber.
- the spring portion 131 is disposed in the electrolyte chamber 109.
- the fluid is sucked and discharged through these openings formed in the first and second pump chambers 107 and 108, so that the pump operates as a fluid conveyance device.
- the first diaphragm 103 is expanded and the second diaphragm 104 is contracted.
- a fluid for example, a liquid outside the first pump chamber 107 is sucked into the first pump chamber 107 from the first suction port 111a having the opened first suction valve 121, and the second pump chamber 107 is opened.
- the fluid inside the second pump chamber 108 is discharged from the second discharge port 113 b provided with the discharge valve 124 to the outside of the second pump chamber 108.
- the first discharge port 113 a provided with the first discharge valve 122 is closed by the first discharge valve 122, and the second suction port 111 b provided with the second suction valve 123 is also closed by the second suction valve 123.
- the first diaphragm 103 contracts and the second diaphragm 104 expands, the fluid outside the second pump chamber 108 from the second suction port 111b provided with the opened second suction valve 123, for example, The liquid is sucked into the second pump chamber 108 and the fluid in the first pump chamber 107 is discharged to the outside of the first pump chamber 107 from the first discharge port 113a provided with the opened first discharge valve 122.
- the second discharge port 113 b provided with the second discharge valve 124 is closed by the second discharge valve 124, and the first suction port 111 a provided with the first suction valve 121 is also closed by the first suction valve 121. ing.
- the volume of the first pump chamber 107 and the second pump chamber 108 is repeatedly increased and decreased, and the suction of fluid into the respective pump chambers 107 and 108 is accordingly performed. The discharge is repeated. As a result, the function of a pump as a fluid conveyance device can be achieved.
- the housing portion 102 has a space inside, and has a shape in which a through hole is formed at a specific location such as an opening portion with respect to a cylindrical shape having a diameter of 1 cm to 4 cm and a height of 1 cm to 4 cm, for example.
- the housing 102 has a cylindrical inner space having a diameter of 0.8 to 3.8 cm and a height of 0.8 to 3.8 cm. In this case, it is preferable that the thickness of the housing part 102 be about 0.2 cm. From the viewpoint that the tensions of the first and second diaphragms 103 and 104 are uniform, the shapes of the upper surface and the bottom surface of the casing 102 are smaller than the circular shapes of the disks of the first and second diaphragms 103 and 104, respectively.
- the height of the housing unit 102 be designed so that the distance between the two diaphragms 103 and 104 falls within the range described below. If the two diaphragms 103 and 104 are in contact with each other when the two diaphragms 103 and 104 are operating, it is conceivable that the two diaphragms 103 and 104 are electrically short-circuited and thus do not operate normally. Further, the operations of the first and second diaphragms 103 and 104 are limited, and the suction and discharge efficiency of the pump is lowered.
- the distance between the closest portions of the two diaphragms 103 and 104 is set so that the two diaphragms 103 and 104 do not contact each other. It is desirable that it is a certain value or more.
- the distance between the closest portions of the two diaphragms 103 and 104 is too large, the influence of the voltage drop in the electrolyte existing in the electrolyte chamber 109 between the two diaphragms 103 and 104 is affected. Increases power consumption.
- the distance between the closest portions of the two diaphragms 103 and 104 is too large, it is difficult to reduce the size of the fluid conveyance device.
- the distance between the two diaphragms 103 and 104 that are closest to each other is a certain value or less. Considering the above points, it is desirable to design the distance between the closest portions of the two diaphragms 103 and 104 and the height of the casing 102.
- FIG. 5 is a diagram showing a specific example of the size of each part of the fluid conveyance device of the first embodiment.
- the internal space of the housing portion 102 is divided into three spaces by two diaphragms 103 and 104, and forms a first pump chamber 107, an electrolyte chamber 109, and a second pump chamber 108, respectively.
- Part or all of the diaphragms 103 and 104 are formed of a polymer actuator material, and are, for example, a disk shape having a thickness of 5 ⁇ m to 30 ⁇ m and a diameter of about 1 cm to 4.5 cm.
- the diaphragms 103 and 104 are used in a bent state as shown in FIGS.
- the size of the diaphragms 103 and 104 is the housing part. It is larger than the bottom surface of the internal space 102.
- the diameters of the first suction port 111a, the second suction port 111b, the first discharge port 113a, and the second discharge port 113b are 3 mm
- the height of the housing portion 102 is 10 mm
- the distance from the outer surface of the side wall 102s of the portion 102 to the inner surface of the side wall 102 facing the side wall 102 of the housing portion 102 (in other words, the distance of the inner space of the housing portion 102 along the diameter direction of the bottom surface of the inner space of the housing portion 102)
- the total distance with the thickness of the side wall 102s of the casing 102 is 30 mm.
- the polymer actuator material constituting the first and second diaphragms 103 and 104 is a material of a conductive polymer film that performs electrolytic expansion and contraction.
- Specific examples include polypyrrole and polypyrrole derivatives, polyaniline and polyaniline derivatives, polythiophene. And polythiophene derivatives, and (co) polymers composed of one or more types selected from these.
- polymer actuator materials include polypyrrole, polythiophene, poly N-methylpyrrole, poly-3-methylthiophene, poly-3-methoxythiophene, poly (3,4-ethylenedioxythiophene), and one kind selected from these Or the (co) polymer which consists of two types is preferable.
- the conductive polymer film made of these materials is, for example, hexafluorophosphate ion (PF 6- ), p-phenol sulfonate ion (PPS), dodecylbenzene sulfonate ion (DBS), or It is preferable to use it in a state doped with negative ions (anions) such as polystyrene sulfonate ions (PSS). In such a doped state, the conductive polymer film has conductivity and generates a function as a polymer actuator.
- These conductive polymer films can be produced by synthesizing by chemical polymerization or electrolytic polymerization and, if necessary, by performing a molding process.
- the thickness of the diaphragms 103 and 104 made of a polymer actuator material will be described.
- the diaphragm made of a polymer actuator material is thick, it is possible to obtain a large force in work due to electrolytic expansion and contraction of the polymer actuator.
- the diaphragm made of the polymer actuator material is thin, ions enter and exit the polymer actuator material quickly, so that the pump can be operated at high speed. Considering these points, it is desirable to design the thickness of the diaphragm composed of the polymer actuator material.
- the thickness of each of the diaphragms 103 and 104 is preferably in the range of 0.1 to 1000 ⁇ m, and more preferably 1 ⁇ m to 100 ⁇ m. Further, when the area of the diaphragm composed of the polymer actuator material is increased, the work amount due to the electrolytic expansion and contraction of the polymer actuator can be increased. In addition, when the area of the diaphragm made of the polymer actuator material is reduced, the volume of the required casing can be reduced, so that the fluid conveyance device can be reduced in size. Considering these points, it is desirable to design the area of the diaphragm made of the polymer actuator material. From the above viewpoint, as an example, the area of each of the diaphragms 103 and 104 is preferably 0.01 cm 2 to 1000 cm 2 , and particularly preferably 0.1 cm 2 to 100 cm 2 .
- the electrolytic solution chamber 109 is filled with an electrolytic solution.
- the electrolytic solution refers to a liquid electrolyte.
- an electroconductive solution prepared by dissolving an ionic substance in a polar solvent such as water, or a liquid made of ions (ionic liquid). ) Etc. are considered.
- an electrolyte such as NaPF 6 , TBAPF 6 , HCl, or NaCl dissolved in water or an organic solvent such as propylene carbonate, or an ionic liquid such as BMIPF 6 can be used. It is.
- the diaphragms 103 and 104 are connected to one ends of the wiring portions 110a and 110b, respectively.
- the other ends of the wiring portions 110a and 110b are connected to the power source 110c.
- the first pump chamber 107 and the second pump chamber 108 contain fluid that is sucked and discharged by a pump as a fluid transfer device.
- water is considered as the fluid that the pump performs suction and discharge.
- the casing 102 is made of a material that is resistant to the electrolytic solution, and is made of, for example, a material containing a polycarbonate resin or an acrylic resin, or a material obtained by subjecting these materials to a surface hardening treatment.
- the first suction port 111a and the second suction port 111b have a first suction valve 121 and a second suction valve 123, and fluid is sucked from the outside of the pump chambers 107 and 108 toward the pump chambers 107 and 108, respectively. It has a structure that flows only in The first discharge port 113a and the second discharge port 113b have a first discharge valve 122 and a second discharge valve 124, and fluid is discharged from the pump chambers 107 and 108 to the outside of the pump chambers 107 and 108, respectively. It has a structure that flows only in The shape of each suction port and each discharge port is designed in consideration of the pressure or flow rate required for sucking and discharging the fluid, the viscosity of the fluid, and the like.
- the voltage of the power supply 110c changes, for example, with a sine wave or a square wave of ⁇ 1.5V.
- a periodically changing voltage is applied between the diaphragms 103 and 104.
- the conductive polymer film constituting the diaphragm 103 or 104 is oxidized.
- positive ions (cations) escape from the conductive polymer film of the one diaphragm 103 or 104, or negative ions (anions) flow into the conductive polymer film of the one diaphragm 103 or 104.
- An intrusive change occurs.
- 6A, 6B, 6C, and 6D are diagrams illustrating the operation of the pump when a periodic sine wave voltage is applied by the power source 110c. Now, let V be the amplitude of the sine wave voltage. 6A to 6D show an example in which deformation of the conductive polymer films of the diaphragms 103 and 104 is mainly caused by the entry and exit of negative ions. 6A to 6D, the size of the negative ions 99 is enlarged with respect to the diaphragms 103 and 104 for easy understanding.
- the voltages of the first diaphragm 103 and the second diaphragm 104 are both zero. That is, the first diaphragm 103 and the second diaphragm 104 are equipotential.
- a positive voltage (+ V) is applied from the power source 110c to the first diaphragm 103, and a negative voltage ( ⁇ V) is applied from the power source 110c to the second diaphragm 104.
- the voltages of the first diaphragm 103 and the second diaphragm 104 are both zero. That is, the first diaphragm 103 and the second diaphragm 104 are equipotential.
- a negative voltage ( ⁇ V) is applied from the power source 110c to the first diaphragm 103, and a positive voltage (+ V) is applied from the power source 110c to the second diaphragm 104.
- the first diaphragm 103 and the second diaphragm 104 are equipotential, and the negative ions 99 contained in the electrolytic solution in the electrolytic solution chamber 109 are distributed almost uniformly in the electrolytic solution.
- the potential of the first diaphragm 103 is increasing, the conductive polymer film constituting the first diaphragm 103 is oxidized. That is, for example, when the potential V (t) of the first diaphragm 103 at time t is expressed as V ⁇ sin ( ⁇ t) and the state of FIG. 6A is reached at time 0, the first diaphragm 103 in the state of FIG.
- the second diaphragm 104 since the potential of the second diaphragm 104 is decreasing at the same time as the potential of the first diaphragm 103 is increasing, the reduction of the conductive polymer film constituting the second diaphragm 104 proceeds. In response to this, negative ions (anions) 99 escape from the conductive polymer film constituting the second diaphragm 104 to the electrolytic solution. As a result, the second diaphragm 104 contracts. As the volume of the second pump chamber 108 decreases as the second diaphragm 104 contracts, the second discharge valve 124 opens, and the fluid in the second pump chamber 108 flows through the second discharge port 113b to the second pump chamber 108. It flows out to the outside.
- the structure of the fluid conveyance device works as a capacitance when viewed from the power source 110c.
- a current flows in the direction of accumulating positive charges in the first diaphragm 103 from the outside in the capacitance.
- a positive voltage (+ V) is applied from the power supply 110c to the first diaphragm 103
- a negative voltage ( ⁇ V) is applied from the power supply 110c to the second diaphragm 104.
- the conductive polymer film constituting the first diaphragm 103 is oxidized, and negative ions (anions) 99 contained in the electrolytic solution are attracted to the first diaphragm 103 accordingly.
- a part of the negative ions (anions) 99 enters the inside of the conductive polymer film constituting the first diaphragm 103.
- the first diaphragm 103 is extended.
- V (t) of the first diaphragm 103 at time t is expressed as V ⁇ sin ( ⁇ t), and the state shown in FIG. 6A is reached at time 0, and at time ⁇ / (2 ⁇ ).
- V ⁇ sin ( ⁇ t) the potential of the first diaphragm 103 at time t
- V ⁇ sin ( ⁇ t) the potential of the first diaphragm 103 at time t
- the potential of the first diaphragm 103 is the maximum value V, and accordingly, the first diaphragm 103 is in the most expanded state.
- the derivative of V (t) is 0 at time ⁇ / (2 ⁇ ), there is no change in potential in the state of FIG.
- the velocity of the first diaphragm 103 is 0, and the pump returns to the pump.
- the flow rate of fluid discharge and suction is zero.
- the viscosity of the ionic liquid or fluid is ignored, and the diaphragm 103 is expanded and contracted in synchronization with the voltage change, and the fluid flow is synchronized with the deformation speed of the diaphragm 103.
- the conductive polymer film constituting the second diaphragm 104 has been reduced, and accordingly, negative ions (anions) 99 escape from the conductive polymer film constituting the second diaphragm 104 to the electrolytic solution. Yes. As a result, the second diaphragm 104 is contracted.
- FIG. 6B the position of the second diaphragm 104 in FIG. 6A is indicated by a dotted line for comparison.
- the change in potential is almost zero, so the change in the shape of the first and second diaphragms 103 and 104 or the distribution of the negative ions 99 is also almost zero.
- the fluid in and out of the pump chamber 108 is almost zero.
- the first diaphragm 103 is in the most expanded state
- the second diaphragm 104 is in the most contracted state.
- the expansion amount of the first diaphragm 103 takes a positive value in the state of FIG.
- the expansion amount of the second diaphragm 104 takes a negative value, and the value is the minimum value in the cycle. Further, the current flowing from the power source 110c is almost zero. In this state, the fluid flow is almost zero.
- the first diaphragm 103 and the second diaphragm 104 are equipotential, and the negative ions 99 contained in the electrolytic solution are distributed almost uniformly in the electrolytic solution.
- the potential of the second diaphragm 104 is increasing, oxidation of the conductive polymer film constituting the second diaphragm 104 proceeds.
- negative ions (anions) 99 contained in the electrolytic solution are attracted to the second diaphragm 104, and part of the ions enter the second diaphragm 104.
- the second diaphragm 104 expands.
- the volume of the second diaphragm 104 increases, so that the second suction valve 123 opens and fluid flows from the second suction port 111b into the second pump chamber 108 from the outside of the second pump chamber 108. Flow into. Further, since the potential of the first diaphragm 103 is decreasing, the conductive polymer film constituting the first diaphragm 103 is reduced. In response to this, negative ions (anions) 99 escape from the conductive polymer film constituting the first diaphragm 103 to the electrolytic solution. As a result, the first diaphragm 103 contracts.
- the first discharge valve 122 opens, and fluid flows from the first pump chamber 107 through the first discharge port 113a to the outside of the first pump chamber 107.
- the structure of the fluid transfer device works as a capacitance when viewed from the power source 110c.
- a current flows in the direction of accumulating positive charges in the first diaphragm 104 from the outside in the capacitance.
- the positions of the first and second diaphragms 103 and 104 in the state of FIG. 6C are substantially the same as the positions of the first and second diaphragms 103 and 104 in FIG. 6A.
- a positive voltage (+ V) is applied from the power source 110c to the second diaphragm 104
- a negative voltage ( ⁇ V) is applied from the power source 110c to the first diaphragm 103.
- the conductive polymer film constituting the second diaphragm 104 is oxidized, and accordingly negative ions (anions) 99 contained in the electrolytic solution are attracted to the second diaphragm 104.
- a part of the negative ions (anions) 99 enters the inside of the conductive polymer film constituting the second diaphragm 104.
- the second diaphragm 104 is extended. 6D, the positions of the first and second diaphragms 103 and 104 in FIG.
- the extension amount of the first diaphragm 103 takes a negative value, and the value is the minimum value in the cycle.
- the expansion amount of the second diaphragm 104 takes a positive value, and the value is the maximum value in the cycle. Further, the current flowing from the power source 110c is almost zero. In this state, the fluid flow is almost zero.
- the electric potential of the first and second diaphragms 103 and 104, the amount of charge accumulated in the structure of the fluid conveyance device, and the expansion amount of the first and second diaphragms 103 and 104 are in phase.
- the viscosity of the fluid, the resistance of the wiring part and the power source, the resistance of the contact part between the conductive polymer film and the wiring part, or the high conductivity The potentials of the first and second diaphragms 103 and 104 are affected by the internal resistance of the molecular film, the charge transfer resistance, the impedance indicating ion diffusion into the conductive polymer film, or the solution resistance.
- a phase difference may occur between the amount of charge accumulated in the structure of the fluid conveyance device and the amount of expansion of the first and second diaphragms 103 and 104.
- the electrolytic solution chamber 109 is filled with the electrolytic solution, and the electrolytic solution is generally an incompressible fluid. Therefore, the volume of the electrolytic solution chamber 109 is kept substantially constant during the pump operation. Be drunk. Therefore, when one diaphragm 103 or 104 contracts and the convex bulge becomes small, the other diaphragm 104 or 103 has a large convex bulge in order to keep the volume of the electrolyte chamber 109 substantially constant. Receive power to become. That is, the two first and second diaphragms 103 and 104 exchange energy in the form of work between each other via the electrolytic solution.
- the elastic film part 130 is fixed in a form that closes a circular through hole 102h formed in the side wall 102s of the housing part 102, and is made of a material having elasticity (elastic material) such as rubber or synthetic resin (plastic). Configured.
- elastic material such as rubber or synthetic resin (plastic).
- silicone rubber can be considered as an elastic material constituting the elastic film part 130.
- the spring portion 131 has, for example, a shape in which an elastic metal or synthetic resin material is spirally wound, and has a function as a coil spring. Further, the spring-shaped axis of the spring portion 131 is arranged so as to be placed on a straight line parallel to the straight lines 100A-100B shown in FIG.
- the spring part 131 is fixed in such a manner that both ends thereof are in contact with the elastic film part 130 and the side wall 102s of the casing part 102 facing the elastic film part 130 in a state of being contracted from the steady state.
- the elastic film part 130 receives a force from the spring part 131 to the outside of the housing part 102 and is deformed into a convex shape outward. That is, in FIG.
- the elastic film portion 130 receives a rightward force from the spring portion 131 and is deformed into a convex shape to the right.
- the shape of the elastic film part 130 shows a shape close to a part of a spherical surface.
- other shapes such as a shape close to a cone are shown. Sometimes it becomes.
- the fluid transfer device In the initial state of the fluid transfer device, the fluid transfer device is configured so that the pressure of the electrolyte filled in the electrolyte chamber 109 is in the following range. That is, assuming the pressure applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation, the fluid conveyance device is configured so that the pressure of the electrolyte in the initial state is smaller than that pressure.
- the first and second diaphragms 103 and 104 protrude in the direction of the electrolyte chamber 109 as shown in FIG. It is kept in shape.
- the housing A small through hole 102g is formed in the side wall 102s of the portion 102, and a part of the electrolytic solution is extracted from the small through hole 102g using an instrument such as a syringe, and then the small through hole 102g is sealed with a rubber plug or the like.
- the pressure of the electrolytic solution is set to a predetermined pressure (that is, the initial pressure of the electrolytic solution is higher than the pressure applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation).
- a method of reducing the size when assembling each part of the fluid conveyance device and filling the inside with an electrolyte solution, a gap is left in a part between the housing part 102 and the elastic film part 130, and this state The elastic film part 130 is pushed in to extract a part of the electrolyte solution, and then the gap part is sealed, and the elastic film part 130 and the spring part 131 are removed by removing the pushing force of the elastic film part 130.
- the pressure of the electrolytic solution is reduced by the force of returning to the original shape by the elastic force, and the pressure of the electrolytic solution is set to a predetermined pressure (that is, applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation).
- a predetermined pressure that is, applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation.
- a method is conceivable in which the pressure of the electrolyte in the initial state is smaller than the pressure.
- the pressure of the electrolyte can be kept smaller than the pressure of the fluid inside the first and second pump chambers 107 and 108 even when the pump is operated.
- a force is applied from the first and second pump chambers 107 and 108 to the electrolyte chamber 109 in the first and second diaphragms 103 and 104 during the operation of the pump. It is possible to maintain the state in which the diaphragms 103 and 104 are not slackened.
- the electrolytic expansion / contraction force of the conductive polymer film is efficiently transmitted to the fluid inside the first and second pump chambers 107 and 108, so that the efficiency of fluid discharge and suction can be kept high. .
- the elastic membrane portion 130 and the spring portion 131 have a function of properly maintaining the tension of the first and second diaphragms 103 and 104. This can improve the operational efficiency of the pump.
- the pump of the prior art has a problem that the diaphragm tension is largely changed by the following two mechanisms, and this causes a reduction in the operation efficiency of the pump.
- the first mechanism for changing the diaphragm tension is due to the periodic electrolytic expansion and contraction of the conductive polymer film performed during the pump operation.
- the second mechanism for changing the diaphragm tension is due to reasons other than the periodic electrolytic expansion and contraction of the conductive polymer film.
- the tension of the first and second diaphragms 103 and 104 when the tension of the first and second diaphragms 103 and 104 changes due to the periodic electrolytic expansion and contraction of the conductive polymer film performed during the pump operation, or for other reasons When the tension of the first and second diaphragms 103 and 104 changes, the tension of the diaphragms 103 and 104 can be kept appropriate.
- the internal space of the housing part 102 is a cylindrical space formed inside the housing part 102.
- a portion of the internal space of the housing portion 102 excluding the portion of the first pump chamber 107 and the portion of the second pump chamber 108 is defined as an electrolyte chamber housing inner portion 190. That is, the electrolyte chamber housing inner portion 190 is a space portion sandwiched between the first and second diaphragms 103 and 104 in the internal space of the housing portion 102. Further, the space portion indicated by reference numeral 191 in FIG.
- the volume of the electrolyte chamber 109 is defined as the sum of the volume of the electrolyte chamber housing inner portion 190, the volume of the opening space portion 191, and the volume of the elastic membrane inner space portion 192.
- the force is applied even if the conductive polymer films of the first and second diaphragms 103 and 104 expand and contract. Since the force is not efficiently transferred to the fluid such as the liquid in the pump chambers 107 and 108, the suction and discharge efficiency of the fluid is significantly reduced. That is, in order to increase the operation efficiency of the pump, it is necessary that the first and second diaphragms 103 and 104 are always kept in a relaxed state during operation.
- the first embodiment is similar to that already described with reference to FIGS. 25C and 25D.
- the volume of the electrolyte chamber casing inner portion 190 is a value obtained by subtracting the total volume of the first pump chamber and the second pump chamber from W t . Accordingly, the volume of the electrolyte chamber housing inner portion 190 also changes in accordance with the change in the total volume of the first pump chamber 107 and the second pump chamber 108. In accordance with this, the shape of the elastic membrane part 130 changes so that the volume of the electrolyte chamber 109 is kept substantially constant.
- the volume of the inner part 190 of the electrolytic solution chamber increases, the pressure of the electrolytic solution decreases accordingly. Therefore, the elastic force of the elastic film part 130 in the elastic film part 130, the elastic force of the spring part 131, and the electrolytic solution And the pressure in the external atmosphere of the housing portion 102 change. As a result, the convex bulge of the elastic film portion 130 is reduced, and the volume of the elastic film inner space portion 192 is reduced. As a result, the volume of the electrolyte chamber 109 is kept substantially constant.
- the volume of the electrolyte chamber housing inner portion 190 decreases, the pressure of the electrolyte increases accordingly, so that the elastic force of the elastic film part 130 and the elastic force of the spring part 131 in the elastic film part 130. And the balance between the electrolyte pressure and the external atmosphere pressure changes. As a result, the convex bulge of the elastic film part 130 is increased, and the volume of the elastic film inner space portion 192 is increased. As a result, the volume of the electrolyte chamber 109 is kept substantially constant. As a result, the volume of the electrolytic solution chamber 109 filled in the electrolytic solution chamber 109 is also substantially constant, and the pressure of the electrolytic solution is kept substantially constant.
- the pressure of the electrolytic solution when the pressure of the electrolytic solution is set to an appropriate value smaller than the pressure of the fluid inside the first and second pump chambers 107 and 108 in the initial state, By the operation of the elastic film part 130 and the spring part 131, the pressure of the electrolytic solution can be kept within a certain range.
- the pressure of the electrolytic solution when “the pressure of the electrolytic solution is set to an appropriate value smaller than the pressure of the fluid inside the first and second pump chambers 107 and 108 in the initial state”, the pressure of the fluid in the initial state is 0.
- the pressure of the electrolytic solution in the initial state may be set within a range of about 0.091 MPa to 0.101 MPa (0.9 atm to 0.999 atm). desirable. Among these, it is particularly desirable to set the pressure within the range of about 0.100 MPa to 0.101 MPa (0.99 atm to 0.999 atm). This is because when the initial pressure of the electrolytic solution is smaller than the above range, the pressure difference between the fluid and the electrolytic solution is so large that the movement of the diaphragm is inhibited.
- the appropriate pressure of the electrolytic solution during the operation of the pump is, for example, about 0.051 MPa to 0.101 MPa (0.5 atm to 0.005). 999 atm). This is because when the pressure of the electrolytic solution during operation of the pump is smaller than the above range, the pressure difference between the fluid and the electrolytic solution is too large, which causes a problem that the movement of the diaphragm is hindered.
- the pressure of the electrolytic solution is larger than the above range, the pressure difference between the fluid and the electrolytic solution becomes too small, which may cause a problem that the diaphragm is loosened and the efficiency of the pump operation is lowered.
- the pressure of the electrolytic solution is always kept within a certain range by the operation of the elastic film portion 130 and the spring portion 131, so that the pressure of the electrolytic solution is always kept at the first and second pump chambers 107 and 108. It is possible to keep the pressure lower than the fluid pressure inside.
- a certain range of force in the direction from the first and second pump chambers 107 and 108 to the electrolyte chamber 109 is applied to the first and second diaphragms 103 and 104, so that the first and second diaphragms are applied by this force.
- 103 and 104 are kept in a relaxed state, and the tensions of the first and second diaphragms 103 and 104 are kept at appropriate values.
- an appropriate value of the tension of the diaphragms 103 and 104 is, for example, in the range of 0.101 MPa to 10.1 MPa (about 1 atm to about 100 atm).
- the first and second diaphragms 103 and 104 are kept in a state where a tensile stress (tension) is applied within a certain range.
- the pressure acting on the first and second diaphragms 103 and 104 is maintained within a predetermined range (a constant range) by the electrolyte solution and the fluid in the first and second pump chambers 107 and 108.
- the first and second diaphragms 103 and 104 are affected by the difference between the pressure of the electrolyte in the electrolyte chamber 109 and the pressure of the fluid in the first and second pump chambers 107 and 108.
- the pressure range is preferably, for example, 0.0101 MPa to 0.000101 MPa (0.1 atm to 0.001 atm). This is because when the pressure applied to the diaphragms 103 and 104 is larger than the above range due to the difference between the electrolyte pressure and the fluid pressure, the movement of the diaphragms 103 and 104 is hindered. Further, if the pressure applied to the diaphragms 103 and 104 is smaller than the above range due to the difference between the electrolyte pressure and the fluid pressure, there is a possibility that the diaphragms 103 and 104 are loosened and the efficiency of the pump operation is lowered. Because there is.
- the state in which the pressure acting on the diaphragms 103 and 104 is maintained within a predetermined range (a constant range) is always maintained during the pump operation, so that each of the first and second diaphragms 103 and 104 is electrically conductive.
- the work when the conductive polymer film expands and contracts is efficiently used for the discharge and suction of fluid in the first and second pump chambers 107 and 108. That is, it is possible to increase the work efficiency in the operation of the pump.
- the work efficiency of the pump is defined as the ratio of the work that the pump performs for sucking and discharging the fluid in the electric energy applied to the pump.
- a diaphragm type pump using a conductive polymer film when a periodic voltage is applied to the conductive polymer film, (I) distortion is accumulated in a certain direction, or (Ii) the conductive polymer film causes deformation such as expansion by sucking the electrolyte, or (Iii) An irreversible or reversible shape change represented by creep occurs in the conductive polymer film, or (Iv) Deformation or displacement of the fixing portion of the conductive polymer film occurs. For this reason, the area, shape or arrangement of the diaphragm may change.
- the tension applied to the diaphragm is absorbed in order to absorb the change in tension such that the desired tension is not applied to the diaphragm by the deformation of the elastic film portion 130 and the spring portion 131. It can be kept within a certain range.
- FIG. 8 and 9 show that the pressure applied to the first and second diaphragms 103 and 104 is maintained within a predetermined range when the tension applied to the first and second diaphragms 103 and 104 is changed in the first embodiment. Indicates the state to be performed.
- FIG. 8 shows how the pressure on the first and second diaphragms 103 and 104 is maintained within a predetermined range when the first and second diaphragms 103 and 104 are stretched due to a change in tension due to the above-described reason. Show.
- dotted lines indicate the positions of the first and second diaphragms 103 and 104 in the state of FIG. In FIG.
- the first and second diaphragms 103 and 104 are deformed in a direction extending compared to FIG. 3, but this temporarily reduces the volume of the electrolyte chamber 109 and the pressure of the electrolyte solution. Will increase. For this reason, the balance between the elastic force of the elastic film portion 130, the elastic force of the spring portion 131, the pressure of the electrolytic solution, and the pressure of the external atmosphere in the elastic film portion 130 is lost. As a result, due to the elasticity of the elastic film part 130 and the spring part 131, the spring part 131 is extended, and the convex bulge of the elastic film part 130 is deformed so as to increase outward of the housing part 102.
- FIG. 9 shows that the pressure applied to the first and second diaphragms 103 and 104 is within a predetermined range when the first and second diaphragms 103 and 104 contract for reasons other than periodic electrolytic expansion and contraction. It shows how to maintain.
- dotted lines indicate the positions of the first and second diaphragms 103 and 104 in the state of FIG. In this case, due to the elasticity of the elastic film part 130 and the spring part 131, the spring part 131 contracts and deforms so that the convex bulge of the elastic film part 130 becomes small. For this reason, the pressure of the electrolytic solution is kept almost at the initial value.
- the pressure of the electrolyte when the pressure of the electrolyte is set to an appropriate value smaller than the pressure of the fluid in the pump chamber in the initial state, the first and first Even when the first and second diaphragms 103 and 104 expand and contract for reasons other than the periodic electrolytic expansion and contraction of the two diaphragms 103 and 104, the pressure of the electrolytic solution is also caused by the operation of the elastic film part 130 and the spring part 131. It can be kept within a certain range. As a result, it is possible to always keep the pressure of the electrolyte at an appropriate value smaller than the pressure of the fluid inside the first and second pump chambers 107 and 108.
- first and second diaphragms 103 and 104 are kept in a relaxed state, and the tensions of the first and second diaphragms 103 and 104 are kept at appropriate values.
- the first and second diaphragms 103 and 104 are always deformed into a convex shape when viewed in the direction of the electrolyte chamber 109, and the first and second diaphragms 103 and 104 are A state in which a stress in the tensile direction (tension) is applied with a magnitude within a certain range is maintained, and the first and second fluids in the first and second pump chambers 107 and 108 are kept in a first state by the electrolyte in the electrolyte chamber 109.
- the pressure acting on the second diaphragms 103 and 104 is maintained within a predetermined range.
- the work when the first and second diaphragms 103 and 104 are expanded and contracted is the discharge and suction of the fluid in the first and second pump chambers 107 and 108. It is used efficiently. That is, it is possible to increase the work efficiency in the operation of the pump.
- the work efficiency of the pump is defined as the ratio of the work that the pump performs for sucking and discharging the fluid in the electric energy applied to the pump.
- the stress (tension) in the pulling direction of the first and second diaphragms 103 and 104 is always kept within an appropriate range during the pump operation.
- the pressure acting on the first and second diaphragms 103 and 104 by the electrolyte in the electrolyte chamber 109 and the fluid in the first and second pump chambers 107 and 108 is maintained within a predetermined range.
- the work performed when the first and second diaphragms 103 and 104 are expanded and contracted is efficiently used for discharging and sucking the fluid in the first and second pump chambers 107 and 108.
- the first and second pump chambers 107 and 108 are each provided with It is also possible to provide one opening portion without each of them and to repeat the suction and discharge from each opening portion. In this case, in each pump chamber, one opening serves as a discharge port and a suction port.
- each diaphragm 103, 104 an example in which the diaphragm is made of a polymer actuator material has been shown.
- a highly conductive material can be formed on all or a portion of the surface of the polymer actuator material to reduce the effects of voltage drops in the polymer actuator material.
- the other material is formed of a material having low rigidity or processed into a shape that is easily deformed so as not to hinder the operation of the polymer actuator material.
- each diaphragm 103, 104 can be formed of a material other than the polymer actuator material.
- a part of each of the diaphragms 103 and 104 is formed of an elastic film, there is an effect that the tension applied to the polymer actuator material is made more uniform and the pump can be operated smoothly.
- the flow rate is in the range of about 10 to 100 ml / min and the maximum pressure for discharging the fluid is in the range of about 1 to 10 kPa.
- the shape or size of the fluid conveyance device can be generally designed according to the required flow rate and pressure, not limited to the above-described form.
- the first and second diaphragms 103 and 104 have a structure having no fixed point, and the first and second pump chambers 107 and 108, the electrolyte chamber 109, The first and second diaphragms 103 and 104 are held in a convex shape with an appropriate tension without the first and second diaphragms 103 and 104 slackening due to the pressure difference between the first and second diaphragms 103 and 104.
- the tension is concentrated on a plurality of line segments connecting the fixed point of the diaphragm and the peripheral portion and the surrounding portions.
- the tension of the first and second diaphragms 103 and 104 is maintained at an appropriate value in the fluid conveyance device of the first embodiment as compared with the structure shown in FIG. 22B of the conventional example. Therefore, the efficiency of fluid discharge and suction can be improved.
- the elastic membrane portion 130 and the spring portion 131 function to maintain the pressure on the first and second diaphragms 103 and 104 within an appropriate range (pressure maintenance). Function).
- a portion having a function of maintaining the pressure applied to the first and second diaphragms 103 and 104 within a predetermined range is referred to as a pressure maintaining unit. That is, in the first embodiment, the elastic film portion 130 and the spring portion 131 constitute a pressure maintaining portion.
- first and second diaphragms 103 and 104 When the first and second diaphragms 103 and 104 are extended to reduce the stress (tension) in the pulling direction of the first and second diaphragms 103 and 104 and the first and second diaphragms 103 and 104 are loosened (slack) (In other words, when the pressure of the fluid in the first and second pump chambers 107 and 108 decreases outside the predetermined range), the elastic film portion 130 and the spring portion 131 suck out the electrolyte in the housing portion 102.
- the stress (tension) of the first and second diaphragms 103 and 104 is maintained in a certain range (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 is a predetermined value). Maintained in range). Further, when the first and second diaphragms 103 and 104 contract and the stress in the pulling direction of the first and second diaphragms 103 and 104 increases (in other words, the first and second pump chambers 107 and 108). In the direction in which the elastic membrane portion 130 and the spring portion 131 push the electrolyte in the electrolyte chamber 109 of the casing portion 102 outwardly of the casing portion 102.
- the stress (tension) of the first and second diaphragms 103 and 104 is kept within a certain range (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 is kept within a predetermined range. Maintained). That is, in response to a change in stress (tension) due to deformation of the first and second diaphragms 103 and 104, the elastic film portion 130 which is a part of the wall surface of the electrolyte chamber 109 is deformed, whereby the first and first diaphragms are deformed. The stress (tension) of the two diaphragms 103 and 104 is maintained within a certain range (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 is maintained within a predetermined range).
- the fluid conveyance device of the first embodiment has a structure in which there is no fixed point in the central portion of the first and second diaphragms 103, 104, and the first and second pump chambers 107, 108, the electrolyte chamber 109,
- the first and second diaphragms 103 and 104 are held in a convex shape with an appropriate tension without loosening due to the pressure difference between the first and second diaphragms 103 and 104, and the stress (tension) of the first and second diaphragms 103 and 104 is maintained.
- a substantially uniform value is maintained over the entire surface (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 is maintained within a predetermined range). Since this state is always maintained during the pump operation, the work when the conductive polymer film expands and contracts is efficiently used for the discharge and suction of the fluid in the pump chambers 107 and 108.
- the ratio of the electrical energy applied from the power supply 110c used for the work of fluid discharge and suction in the pump chambers 107 and 108 is called work efficiency Then, the work efficiency of the pump is improved as compared with the conventional pump by the pressure maintaining function.
- the pressure maintaining unit which is a part having a function of maintaining the pressure on the first and second diaphragms 103 and 104 within a predetermined range, has an appropriate value for the volume of the electrolyte chamber 109 in the electrolyte chamber. And maintain the electrolyte pressure at an appropriate value.
- the stress (tension) of the first and second diaphragms 103 and 104 can be maintained at an appropriate value (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 is predetermined).
- At least a part of the wall surface of the electrolyte chamber 109 is formed by an elastic body (for example, an elastic film portion) 130, and the elastic body 130 is formed according to the pressure in the electrolyte chamber. If the structure is deformed, the pressure inside the electrolyte chamber 109 and the stress (tension) of the first and second diaphragms 103 and 104 can be automatically adjusted (in other words, the pressure inside the electrolyte chamber 109). And the pressure of the fluid in the first and second pump chambers 107 and 108 can be maintained within a predetermined range).
- the two first and second diaphragms 103 and 104 perform. Since work can be used for discharging and sucking fluid, it is possible to increase the amount of work for discharging and sucking.
- FIG. 10 shows a first modification of the first embodiment of the present invention.
- the circular elastic membrane portion 130 is fixed to the opening edge portion outside the through hole 102h of the side wall 102s of the housing portion 102.
- the circular elastic membrane portion 130 is circular.
- the elastic membrane portion 130A is fixed to the opening edge inside the through hole 102h of the side wall 102s of the housing portion 102, and the elastic membrane portion 130A is convex toward the inside of the electrolyte chamber 109 ( In other words, it has a concave shape with respect to the outside of the housing portion 102), and the elastic membrane portion 130A functions as a pressure maintaining portion.
- the pressure inside the electrolyte chamber 109 is kept lower than the external pressure of the housing portion 102 and the fluid pressure of the first and second pump chambers 107 and 108. Since the convex bulge of the elastic membrane portion 130A changes due to elasticity in accordance with the pressure change in the electrolyte chamber 109, the volume and pressure of the electrolyte chamber 109 can be maintained in an appropriate range, and as a result The stress (tension) of the first and second diaphragms 103 and 104 can be maintained at an appropriate value (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 is kept within a predetermined range. Can be maintained).
- the volume of the electrolytic solution chamber 109 is reduced and the pressure of the electrolytic solution is increased, so that the convex bulge of the elastic film portion 130A is reduced.
- the volume and pressure of the electrolyte chamber 109 are maintained within a substantially constant range.
- the stress of the first and second diaphragms 103 and 104 is maintained within an appropriate range (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 can be maintained within a predetermined range. is there).
- FIGS. 1 to 10 Although omitted in FIGS. 1 to 10 for the sake of simplicity, for example, it is possible to provide an appropriate mechanism component so that the spring portion 131 does not buckle. That is, in FIG. 1 to FIG. 10, in order to explain an essential part of the invention, such mechanical parts are not shown, but in other embodiments, each part has a smooth mechanical operation. For example, it is possible to install an appropriate mechanical component such as a guide. Below, the example which has a guide is demonstrated as a 2nd modification of 1st Embodiment.
- FIG. 11A, FIG. 11B, and FIG. 12 show a second modification of the first embodiment.
- a connecting portion 133 of a rod-shaped member is inserted between the spring portion 131 and the elastic membrane portion 130.
- the connection part 133 connects the spring part 131 and the elastic film part 130, and transmits force between them.
- a cylindrical guide portion 132 is formed around the spring portion 131 and has a function of preventing buckling of the coil spring constituting the spring portion 131.
- the distal end portion 133 a of the connecting portion 133 is configured in a piston shape, and the distal end portion 133 a is fixed to one end of the spring portion 131 and can move smoothly in the guide portion 132.
- the space surrounded by the guide part 132 and the tip part 133a of the connecting part 133 may be sealed, or the electrolyte may enter without being sealed.
- FIG. 11A shows a state where the spring portion 131 is extended
- FIG. 11B shows a state where the spring portion 131 is contracted.
- the inside of the sealed space It is also possible to perform the function of the spring portion 131 by the elasticity of the gas 131G.
- the gas 131G sealed in the cylindrical guide part 132 functions as another example of the elastic part. An example in the case of using this gas 131G is shown in FIG.
- the elasticity of the gas 131G is used as the spring part 131 instead of the coil spring.
- FIG. 19 shows an example in which another spring is used as the spring part 131 instead of the coil spring as a third modification of the first embodiment.
- a leaf spring in which one end (for example, the lower end) is fixed to, for example, the lower side of the inner peripheral surface of the through hole 102h of the side wall 102s of the housing portion 102.
- a contact portion 134 a is fixed to the other end (for example, the upper end) of the leaf spring 134 so that the contact portion 134 a is always in contact with the elastic film portion 130 by the elastic force of the leaf spring 134.
- the pressure maintaining unit can be made compact.
- the spring part 131 or the guide part 132, the connecting part 133, and the leaf spring 134 are insulated. It is desirable to be made of a plastic material.
- the spring part 131, the guide part 132, the connecting part 133, and the leaf spring 134 are made of a material having resistance to the electrolytic solution used.
- FIG. 13 is a cross-sectional view of a fluid conveyance device using a conductive polymer according to a second embodiment of the present invention.
- 13 includes a housing 102, a first diaphragm 103, a second diaphragm 104, a first pump chamber 107, a second pump chamber 108, an electrolyte chamber 109, and wiring portions 110a and 110b.
- the spring part 131 and the elastic film part 130 are provided.
- the spring part 131 and the elastic film part 130 function as a pressure maintaining part as described below.
- the first diaphragm 103 and the second diaphragm 104 are simply referred to as diaphragms for the sake of simplicity.
- the first pump chamber 107 has two openings, a first suction port 111a and a first discharge port 113a.
- the second pump chamber 108 has two openings, a second suction port 111b and a second discharge port 113b.
- the pump is operated by sucking and discharging the fluid through the openings 111a, 113a, 111b, and 113b formed in the first and second pump chambers 107 and 108, respectively.
- the configuration and operation of each part are substantially the same as those in the first embodiment.
- the first and second diaphragms 103 and 104 are kept concave when viewed from the electrolyte chamber 109 toward the first and second pump chambers 107 and 108, respectively.
- the first and second diaphragms 103 and 104 are kept in a state of swelling in a convex direction when viewed from the electrolyte chamber 109 toward the first and second pump chambers 107 and 108, respectively. Be drunk.
- the spring portion 131 is fixed in a contracted state from the steady state, but in the second embodiment, the spring portion 131 is fixed in a state extended from the steady state.
- the elastic film portion 130 receives a rightward force from the spring portion 131 and is deformed into a convex shape to the right.
- the elastic film portion 130 receives a leftward force from the spring portion 131 and is deformed into a convex shape to the left.
- the fluid transfer device is configured such that the pressure of the electrolyte is smaller than the pressure applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation.
- the fluid conveyance device is configured such that the pressure of the electrolytic solution is larger than the pressure applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation.
- the pressure of the electrolyte filled in the electrolyte chamber 109 is larger than the pressure applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation.
- a small through hole 102g is formed in the side wall 102s of the housing portion 102, and the through hole 102g is formed.
- a method of setting the pressure of the electrolyte to a predetermined pressure by injecting the electrolyte into the electrolyte chamber 109 using an instrument such as a syringe and then sealing the through hole 102g with the sealing member 102f is considered. It is done.
- a force is applied to the elastic membrane portion 130 in the direction of drawing outward, and in this state, the electrolyte chamber The inside of 109 is filled with an electrolytic solution, then the electrolytic solution chamber 109 is sealed, and the elastic membrane portion 130 and the spring portion 131 are restored to their original shape by their elasticity except for the force to pull out the elastic membrane portion 130 to the outside.
- the pressure of the electrolytic solution is increased by the force to try and the pressure of the electrolytic solution is set inside the electrolytic solution chamber 109 more than a predetermined pressure, that is, the pressure applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation.
- a predetermined pressure that is, the pressure applied to the first pump chamber 107 and the second pump chamber 108 during the pump operation.
- the conductive polymer films constituting the first and second diaphragms 103 and 104 are respectively In order to perform electrolytic expansion and contraction, fluid is sucked from the first and second suction ports 111a and 111b, respectively, and fluid is discharged from the first and second discharge ports 113a and 113b, respectively, so that the pump operates.
- the volume of the electrolyte chamber 109 is kept substantially constant during the pump operation. For this reason, one diaphragm 103 or 104 contracts, and the convex bulge of one diaphragm 103 or 104 when viewed from the electrolyte chamber 109 toward the first and second pump chambers 107 and 108 is reduced.
- the other diaphragm 104 or 103 has a convex bulge. Receive power to grow. That is, the two first and second diaphragms 103 and 104 exchange energy in the form of work between each other via the electrolytic solution.
- the elastic membrane portion 130 and the spring portion 131 are formed by the first and second diaphragms 103 and 104 when the first and second diaphragms 103 and 104 expand and contract. There is a function to keep the tension of the proper.
- the internal space of the housing part 102 is a cylindrical space formed inside the housing part 102.
- the volume of the space portion slightly changes during the process.
- the shape of the elastic membrane part 130 changes so that the volume of the electrolyte chamber 109 is kept substantially constant.
- the volume of the space portion sandwiched between the first and second diaphragms 103 and 104 in the internal space of the housing portion 102 decreases, the convex bulge of the elastic membrane portion 130 becomes smaller, and the electrolyte chamber The volume of 109 is kept almost constant.
- the volume of the electrolyte chamber 109 filled with the electrolyte is also substantially constant, and the pressure of the electrolyte is kept substantially constant. From this, during the operation of the pump, the first and second diaphragms 103 and 104 are always deformed into a convex shape when viewed in the direction of the first pump chamber 107 and the second pump chamber 108, respectively.
- the stress in the pulling direction (tension) is applied to the two diaphragms 103 and 104 with a magnitude within a certain range. Since this state is always maintained during the pump operation, the work when the conductive polymer film expands and contracts is efficiently used for the discharge and suction of the fluid in the first and second pump chambers 107 and 108. .
- the electrolyte chamber 109 is a space portion surrounded by the first and second diaphragms 130 and 104, the wall surface of the casing portion 102, and the elastic membrane portion 130.
- the electrolytic solution can be regarded as an almost incompressible fluid, the pressure of the electrolytic solution changes greatly when the volume of the electrolytic solution chamber 109 changes, and the tensions of the first and second diaphragms 103 and 104 are maintained at appropriate values. I can't.
- the elastic membrane part 130 and the spring part 131 are deformed by their elasticity so that the volume inside the electrolyte chamber 109 is kept constant. As a result, the volume of the electrolyte chamber 109 existing inside the electrolyte chamber 109 is kept substantially constant, and the pressure of the electrolyte is also kept within a certain range.
- the tension of the first and second diaphragms 103 and 104 can be maintained at an appropriate value, and the work efficiency in the operation of the pump can be increased.
- the work efficiency of the pump is defined as the ratio of the work that the pump performs for sucking and discharging the fluid in the electric energy applied to the pump.
- strain is accumulated in a certain direction when a periodic voltage is applied to the conductive polymer film.
- a deformation such as expansion is caused by the conductive polymer film sucking the electrolyte, or an irreversible or reversible shape change represented by creep occurs in the conductive polymer film.
- the area, shape, or arrangement of the first and second diaphragms 103 and 104 may change due to deformation or displacement of the fixing portion of the conductive polymer film.
- the tension applied to the conductive polymer film is kept within a certain range.
- FIG. 14 is a diagram showing an example of how pressure is maintained on the first and second diaphragms 103 and 104 when a change in tension applied to the first and second diaphragms 103 and 104 occurs in the second embodiment. It is. Specifically, FIG. 14 shows the shape change of the first and second diaphragms 103 and 104, the elastic film part 130, and the spring part 131 when the first and second diaphragms 103 and 104 are extended for the above reasons. The state of maintaining the pressure on the first and second diaphragms 103 and 104 is shown. In FIG. 14, the first and second diaphragms 103 and 104 are deformed in the extending direction as compared with FIG.
- the spring part 131 is extended by the elasticity of the elastic film part 130 and the spring part 131, and is viewed from the outside of the housing part 102.
- the elastic membrane portion 130 is deformed so that the convex bulge of the elastic membrane portion 130 with respect to the electrolyte chamber 109 becomes small.
- the pressure of the electrolytic solution is maintained at a substantially initial value, and the first and second diaphragms 103 and 104 are deformed into a convex shape when viewed in the direction of the first pump chamber 107 and the second pump chamber 108.
- the stress in the pulling direction (tension) is kept in a state where the magnitude is within an appropriate range.
- the work when the conductive polymer film expands and contracts is the first and second pumps. It is efficiently used for discharging and sucking fluid in the chambers 107 and 108.
- the elastic membrane portion 130 and the spring portion 131 function to maintain the pressure on the first and second diaphragms 103 and 104 within an appropriate range.
- Pressure maintenance function a portion having a function of maintaining the pressure applied to the first and second diaphragms 103 and 104 within a predetermined range. That is, in the second embodiment, the elastic film part 130 and the spring part 131 constitute a pressure maintaining part.
- the direction of the first and second diaphragms 103 and 104 is deformed in a direction in which the spring portion 131 contracts. Therefore, the stress (tension) of the first and second diaphragms 103 and 104 is maintained within a certain range (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 is reduced). Maintained within a predetermined range).
- the elastic film portion 130 which is a part of the wall surface of the electrolyte chamber 109 is deformed, whereby the first and first diaphragms are deformed.
- the stress (tension) of the two diaphragms 103 and 104 is maintained within a certain range (in other words, the pressure inside the electrolyte chamber 109 and the pressure of the fluid inside the first and second pump chambers 107 and 108 are within a predetermined range, respectively. Maintained).
- first and second diaphragms 103 and 104 have no fixed point in the central portion, and the first and second diaphragms 103 and 108 and the electrolyte chamber 109 are caused by the pressure difference between the first and second pump chambers 107 and 108.
- the diaphragms 103 and 104 are kept in a convex shape with an appropriate tension without being loosened, and the stress (tension) of the first and second diaphragms 103 and 104 is maintained at a substantially uniform value over the entire surface. (In other words, the pressure of the fluid in the first and second pump chambers 107 and 108 can be maintained within a predetermined range).
- the work when the first and second diaphragms 103 and 104 of the conductive polymer film expand and contract is caused by the work of the first and second pump chambers 107 and 108.
- the work efficiency of the pump is improved compared to the conventional pump.
- FIG. 15 is a cross-sectional view of a fluid conveyance device using a conductive polymer according to a third embodiment of the present invention.
- the housing portion 102, the first diaphragm 103, the pump chamber 107, the electrolyte chamber 109, the wiring portions 110a and 110b, the suction port 111a, the discharge port 113a, and the suction valve 121 are provided.
- the discharge valve 122, a spring part 131 as an example of an elastic part, an elastic film part 130, a second elastic film part 170, and a counter electrode part 180 are provided.
- the spring part 131 and the second elastic film part 170 function as a pressure maintaining part as described below.
- the second elastic film part 170 is fixed to an opening edge part on the outer side of the through hole 102i formed on the bottom surface on the lower side of the housing part 102 so as to seal the inside of the housing part 102.
- Both ends of the coil spring constituting the spring part 131 are connected to the central part of the upper wall 102u of the casing part 102 and the first diaphragm 103, respectively, and the spring part 131 is installed in a contracted state from the steady state.
- Part or all of the first diaphragm 103 is made of a conductive polymer film, and the electrolyte chamber 109 is filled with the electrolyte.
- the conductive polymer film constituting the first diaphragm 103 performs electrolytic expansion and contraction.
- the counter electrode portion 180 is formed of, for example, platinum mesh or the like, and has a structure in which the electrolytic solution can move to both sides thereof.
- the surface area of platinum is increased by forming platinum in a mesh shape, and the capacity of the electric double layer capacitor formed at the interface between platinum and the electrolyte is increased.
- the potential difference between the platinum and the electrolytic solution is reduced, and the diaphragm can be efficiently expanded and contracted with a small power supply voltage.
- the first diaphragm 103 is expanded by electrolytic expansion and contraction, and in the state of FIG. 16, the first diaphragm 103 is contracted by electrolytic expansion and contraction.
- the volume of the pump chamber 107 is increased or decreased, so that fluid is sucked and discharged.
- fluid is sucked from the suction port 111a, and in the state of FIG. 16, fluid is discharged from the discharge port 113a. Since the electrolytic solution filled in the electrolytic solution chamber 107 can be regarded as an almost incompressible fluid, the volume thereof is kept substantially constant. From this, according to the vertical movement of the first diaphragm 103 in FIG.
- the second elastic film portion 170 also moves up and down, and the volume of the electrolyte chamber 109 is kept substantially constant.
- the convex bulge of the second elastic film portion 170 is large when viewed from the electrolyte chamber 109 toward the outside of the casing portion 102.
- the convex bulge of the second elastic film portion 170 is reduced.
- the configuration, operation, or effect of the pressure maintaining unit configured by the second elastic film unit 170 and the spring unit 131 is substantially the same as the elastic film unit 130 and the spring unit 131 of the second embodiment. That is, as the volume of the pump chamber 107 changes, the volume of the electrolyte chamber 109 also changes. In response to this, the shape of the second elastic membrane portion 170 changes so that the volume of the electrolyte chamber 109 is kept substantially constant. Now, as shown in FIG. 17, when the volume of the electrolytic solution chamber 109 increases, the pressure of the electrolytic solution decreases accordingly.
- the elastic force of the second elastic film part 170 and the spring part in the second elastic film part 170 changes.
- the convex bulge of the second elastic film portion 170 increases as viewed from the electrolyte chamber 109 toward the outside of the housing portion 102.
- the volume of the electrolyte chamber 109 is kept substantially constant.
- the pressure of the electrolytic solution increases accordingly, so that the elastic force of the second elastic film unit 170 in the second elastic film unit 170 is increased.
- the convex bulge of the second elastic film portion 170 is reduced as viewed from the electrolyte chamber 109 toward the outside of the housing portion 102.
- the volume of the electrolyte chamber 109 is kept substantially constant.
- the volume of the electrolyte chamber 109 filled in the electrolyte chamber 109 is also substantially constant, and the pressure of the electrolyte is kept substantially constant.
- FIGS. 15 and 16 The fluid suction and discharge operations are shown in FIGS. 15 and 16.
- the elastic film portion 170 performs the pressure maintaining function as described above.
- FIG. 17 shows a state in which the diaphragm 103 is extended for the above reason.
- the volume of the electrolytic solution chamber 109 is kept substantially constant, and the pressure of the electrolytic solution is also kept in an appropriate range. Since the first diaphragm 103 always receives the downward force of FIG. 17 from the spring portion 131, it always maintains an appropriate stress (tension) without slackening.
- the first diaphragm 103 is moved only slightly, and the pressure of the electrolyte solution changes greatly, so that the movement of the first diaphragm 103 is hindered, The first diaphragm 103 can hardly move.
- the stress (tension) of the first diaphragm 103 is maintained at an appropriate value (in other words, the pressure of the fluid in the pump chamber 107 is maintained within a predetermined range). ), Efficient operation is possible.
- the structure with one pump chamber 107 is characterized in that the structure is simple and the manufacture or maintenance is easy.
- FIG. 18 shows a configuration of a fluid conveyance device using a conductive polymer according to the fourth embodiment of the present invention.
- the electrolytic solution chamber 109 is mainly filled with only the electrolytic solution.
- a part of the electrolytic solution chamber 109 may be filled with gas.
- electrolyte solution and bubbles are mixed in the electrolyte solution chamber 109.
- the bubbles constitute a bubble portion 212 made of a gas such as air that does not chemically react with the electrolytic solution.
- the pressure on the first and second diaphragms 103 and 104 can be maintained within a predetermined range. This will be described below.
- the pressure of the electrolyte inside the electrolyte chamber 109 is set to be smaller than the pressure of the fluid in the first and second pump chambers 107 and 108. Due to this pressure difference, the first and second diaphragms 103 and 104 are kept in a state in which stress (tension) is applied to the first and second diaphragms 103 and 104.
- the pressure of the electrolyte solution and the bubble portion 212 is smaller than that when the pressure is set at the atmospheric pressure. 212 is inflated. However, since the electrolytic solution is almost an incompressible fluid, the degree of expansion of the bubble portion 212 is extremely small. From this state, for example, when the first and second diaphragms 103 and 104 are extended, the volume of the electrolyte chamber 109 is decreased, so that the pressure of the electrolyte and the bubble portion 212 are increased.
- the electrolytic solution When only the electrolytic solution is contained in the electrolytic solution chamber 109, the electrolytic solution is an almost incompressible fluid, and therefore the pressure of the electrolytic solution increases rapidly, so that the first and second pump chambers 107 and 108 The pressure difference between the internal fluid and the electrolytic solution inside the electrolytic chamber 109 becomes very small, the stress (tension) of the first and second diaphragms 103 and 104 is reduced, and the first and second diaphragms 103, 104 becomes slack, and the operation of the pump is hindered.
- the elastic modulus of the bubble part 212 of the electrolyte chamber 109 since the elastic modulus of the bubble part 212 of the electrolyte chamber 109 is small, the change in pressure is small even if the volume changes.
- the bubble part 212 has a function of absorbing the pressure change in the electrolyte chamber 109 due to the volume change of the electrolyte chamber 109, and the pressure inside the electrolyte chamber 109 and the bubble part 212 is appropriate. Kept at the value. For this reason, the pressure difference between the fluid inside the first and second pump chambers 107 and 108 and the electrolyte inside the electrolyte chamber 109 is also kept within a certain range, so that the first and second diaphragms are maintained.
- the stress (tension) of 103, 104 is maintained at an appropriate value (in other words, the pressure of the fluid in the first and second pump chambers 107, 108 is maintained within a predetermined range).
- the bubble part 212 has a pressure maintaining function of the first and second diaphragms 103 and 104. Therefore, compared to the case where the pressure maintaining function of the first and second diaphragms 103 and 104 is not provided, even when the first and second diaphragms 103 and 104 are deformed, the pressure on the diaphragm is within an appropriate range. It is maintained and the operational efficiency of the pump is improved.
- the pressure with respect to the 1st and 2nd diaphragms 103 and 104 can be automatically maintained within a predetermined appropriate range with a simple structure.
- the volume of gas to be mixed into the electrolyte chamber 109 is desirably at least 10% of the discharge amount or the intake amount V 0 which pump. This can be understood, for example, in the following example.
- FIG. 19 shows an example in which the second diaphragm 404 is a part of a spherical surface having a radius R0 .
- the above assumption is obtained by approximating the shape of the second diaphragm 404 with the shape of a spherical crown when the second diaphragm 404 is in a relaxed state.
- V p of the second pump chamber 408 is given by the following (relational expression 1).
- V p ⁇ ⁇ h / 6 ⁇ (3 ⁇ r 2 + h 2 ) (Relational Expression 1)
- the area S d of the second diaphragm 404 is given by the following (Relational Expression 2).
- S d ⁇ ⁇ (r 2 + h 2 ) (Relational Expression 2)
- V i 2/3 ⁇ ⁇ ⁇ r 3 .
- Si ⁇ ⁇ r 2 is set.
- ⁇ is the circumference ratio.
- the size of the periodic electrolytic expansion / contraction of the area of the second diaphragm 404 of the conductive polymer film in the pump is 10% or less of the area of the second diaphragm 404 in the initial state.
- S i the area of the second diaphragm 404 in the initial state so is given by S i, in general, the area of the second diaphragm 404 during pump operation varies within the following ranges.
- S i ⁇ area of the second diaphragm 404) ⁇ S i ⁇ 1.1
- the area of the second diaphragm 404 is (S i ⁇ 1.1)
- the volume of the second pump chamber 408 is given by V p ⁇ 0.2 ⁇ V i from (Relational Expression 1). From the above consideration, in the pump as shown in FIG. 22B, when the conductive polymer film constituting the second diaphragm 404 performs periodic electrolytic expansion / contraction, the second pump is used when performing one electrolytic expansion / contraction. It can be seen that the volume of the fluid discharged from the chamber 408 and the volume V 0 of the fluid sucked into the second pump chamber 408 are values of (0.2 ⁇ V i ) or less.
- the second diaphragm 404 is extended and the center of the periodic change gradually changes. There is. For this reason, for example, deformation due to viscoelasticity of the conductive polymer film can be considered.
- the volume of the second pump chamber 408 is given by V p ⁇ 0.02 ⁇ V i from (Relational Expression 1). Therefore, for reasons such as deformation due to the viscoelasticity of the conductive polymer film, considering the case where the area of the second diaphragm 404 is changed from the initial state S i to 0.001 ⁇ S i, of the second pump chamber 408
- the volume V p varies from approximately 0 to 0.02 ⁇ V i . That is, the volume V p of the second pump chamber 408 increases by 0.02 ⁇ V i .
- the volume of the electrolyte chamber 409 decreases by 0.02 ⁇ V i . . From the above consideration, when the area of the second diaphragm 404 increases due to deformation due to viscoelasticity of the conductive polymer film, the volume of the electrolyte chamber 409 decreases. It becomes a value of 02 ⁇ V i or more. Since the electrolytic solution is an incompressible fluid, when only the electrolytic solution is contained in the electrolytic solution chamber 409, the volume of the electrolytic solution chamber 409 is kept constant.
- the gas in the bubble part 212 can change in volume.
- the volume change of the electrolyte chamber 109 can be absorbed by the volume change of the gas in the bubble portion 212, and for example, the second diaphragm 104 can be prevented from being loosened.
- the volume of the electrolyte chamber decreases, but when the pump is operated for a long time, The amount of decrease in the volume of the electrolyte chamber is a value of (0.02 ⁇ V i ) or more. Therefore, in order to absorb this volume change by the volume change of the gas mixed in the electrolyte chamber, the volume of the gas in the initial state needs to be (0.02 ⁇ V i ) or more.
- the pump chamber is used for one electrolytic expansion / contraction.
- the volume of fluid discharged from the pump and the volume of fluid sucked into the pump chamber are values of (0.2 ⁇ V i ) or less.
- the volume change of the electrolyte chamber 109 is mixed into the electrolyte chamber 109.
- V 0 be the discharge amount and suction amount of the pump when the first or second diaphragm 103 or 104 expands and contracts once.
- the volume of the gas mixed in the electrolyte chamber 109 is desirably 10% or more of V 0 .
- the volume change of the electrolyte chamber 109 is mixed into the electrolyte chamber 109.
- the pump in the case where the first or second diaphragm 103 or 104 expands and contracts once is prevented.
- the volume of the gas mixed into the electrolytic solution chamber 109 is larger than 20% of the volume of the electrolytic solution chamber 109, the gas is brought into contact with the first and second diaphragms 103 and 104, and the first and second diaphragms are generated. There arises a problem that ions are prevented from entering and exiting 103,104. Therefore, the volume of the gas mixed into the electrolytic solution chamber 109 is desirably 20% or less of the volume of the electrolytic solution chamber 109.
- the volume of gas mixed into the electrolyte chamber 109 refers to the volume of gas in a state where the fluid conveyance device is used.
- FIG. 20 is a cross-sectional view of a fluid conveyance device using a conductive polymer according to a fifth embodiment of the present invention, and a part of the first and second diaphragms 103 and 104 is constituted by an elastic film 204, respectively.
- An example is shown below. That is, in FIG. 20, the peripheral portions of the diaphragms 103 and 104 are formed by the diaphragm elastic film 204.
- a part of the first and second diaphragms 103 and 104 is constituted by the elastic film 204, respectively, and a part of the first and second diaphragms 103 and 104 is the first and second diaphragms 103, 104, respectively.
- the elastic films 204 that constitute parts of the first and second diaphragms 103 and 104 are added to the conductive polymer films that constitute the first and second diaphragms 103 and 104, respectively.
- the stress (tension) can be made more uniform in the plane of the first and second diaphragms 103 and 104.
- the elastic film 204 has a convex shape that swells in the direction of the first or second pump chamber 107 or 108 or the electrolyte solution chamber 109.
- the volume of the electrolytic solution chamber 109 can be kept substantially constant, and the pressure of the electrolytic solution is maintained in an appropriate range.
- the pressure on the two diaphragms 103 and 104 can be maintained within an appropriate range (in other words, the pressure of the fluid in the first and second pump chambers 107 and 108 can be maintained within a predetermined range).
- the two diaphragms 103 and 104 are arranged as close as possible without contacting each other. For this reason, it is desirable to reduce the area of the through hole 102h. Accordingly, it is desirable that the area of the elastic film 204 is smaller than the areas of the diaphragms 103 and 104.
- the area change of the diaphragms 103 and 104 occurs due to the expansion and contraction of the conductive polymer film, it is desirable that the area change of the elastic film is larger than the area change of the diaphragms 103 and 104. . Therefore, it is desirable that the Young's modulus of the diaphragms 103 and 104 is smaller than the Young's modulus of the conductive polymer film. In general, since the value of Young's modulus of the conductive polymer film is about 1 GPa or more, the Young's modulus of the elastic film is preferably less than 1 GPa.
- FIG. 21 is a cross-sectional view of a fluid transfer device using a conductive polymer according to a sixth embodiment of the present invention.
- the fluid transfer device according to the third embodiment of FIG. Similar to the first diaphragm 103 and the spring portion 131, the diaphragm 103 and the spring portion 131 are disposed, and an electrolyte reservoir 206 is formed on the side of the electrolyte chamber 109. That is, the side wall 102 s of the casing portion 102 constituting the electrolytic solution chamber 109 is provided with a conduit portion 207 that penetrates a part of the side wall 102 s, and the electrolytic solution chamber 109 inside the housing portion 102 is provided by the conduit portion 207.
- the upper part of the electrolytic solution reservoir 206 is released to atmospheric pressure, and thus the volume and pressure of the electrolytic solution chamber 109 are kept substantially constant.
- the pressure that the diaphragm 103 receives from the electrolyte is also substantially constant, and the pressure on the diaphragm 103 can be kept substantially constant.
- the upper surface of the electrolytic solution reservoir 206 can be configured with a deaeration membrane or the like that allows gas to permeate but does not allow liquid to permeate, thereby preventing the electrolytic solution from leaking to the outside. In the configuration of FIG.
- the electrolyte level moves up and down inside the electrolyte reservoir 206, and the weight of the electrolyte is transmitted.
- the pressure applied to the diaphragm changes slightly. Is often smaller than the pressure change caused by the change in volume of the electrolyte chamber 109 when the electrolyte chamber 109 is sealed.
- a plurality of small fluid transfer devices are prepared and arranged in parallel with the same structure as described above, and the inflow side and the outflow side are arranged. It is also possible to obtain a large conveyance flow rate by connecting the two to each other. In this case, the first and second diaphragms 103 and 104 or the convex bulges of the diaphragm 103 in each fluid conveyance device are reduced, and thus the overall size can be reduced.
- the first partition wall portion 193 and the second partition wall portion 194 are formed of a metal such as platinum and have a flat plate shape having a plurality of openings 193a. And the 1st partition part 193 and the 2nd partition part 194 are arrange
- the first diaphragm 103d is disposed in each of the plurality of openings 193a of the first partition wall 193, and the second diaphragm 104d is disposed in each of the plurality of openings 194a of the second partition 194.
- the first pump chamber 107 and the electrolyte chamber 109 are separated by the first partition wall 193 and the plurality of first diaphragms 103.
- the second pump chamber 107 and the electrolyte chamber 109 are separated by the second partition wall 194 and the plurality of second diaphragms 104. Since the plurality of first diaphragms 103d are connected to each other by the first metal partition walls 193, they are kept at the same potential.
- the plurality of second diaphragms 104d are connected by the second metal partition walls 194, they are kept at the same potential. Further, the first diaphragm 103d and the second diaphragm 104d are not electrically connected. In this structure, by changing the potential between the first diaphragm 103d and the second diaphragm 104d, the plurality of first diaphragms 103d and the plurality of second diaphragms 104d each expand and contract in the same manner as in the above embodiment. It is possible to perform the operation.
- the structure of the fluid conveyance device in the direction of overlapping the diaphragm. That is, it is possible to arrange the structures of the fluid conveyance devices in an arbitrary positional relationship.
- a part of the wall surface of the electrolyte chamber 109 is formed of an elastic body (for example, the elastic film portion 130 in FIG. 3), and the elastic force of the elastic body or Due to the elastic force of a spring connected to the elastic body (for example, the spring portion 131 in FIG.
- the elastic body forming a part of the wall surface of the electrolytic solution chamber 109 tends to deform from the inside of the electrolytic solution chamber 109 to the outside. Generate power. By this force, the pressure of the electrolytic solution is kept smaller than the fluid pressure inside the pump chamber.
- FIG. 28 shows the elastic membrane part 130 and the spring part 131 when the pressure of the electrolytic solution is the same as the pressure of the fluid in the pump chambers 107 and 108 in the pump of FIG. 3 in the fluid conveyance device according to the first embodiment. Show the state. However, the positions of the elastic film part 130 and the spring part 131 in FIG. 3 are indicated by dotted lines.
- the elastic film portion 130 is in the position shown in FIG. A force (restoring force) is generated to cause the elastic film portion 130 to return to the state shown in FIG.
- the pressure of the electrolytic solution is kept at a value smaller than the pressure of the fluid in the pump chambers 107 and 108, and the pressure of the electrolytic solution and the fluid in the pump chambers 107 and 108 are maintained. It is possible to keep the diaphragms 103 and 104 in such a shape that the diaphragms 103 and 104 are convex in the direction from the pump chambers 107 and 108 to the electrolyte chamber 109 with appropriate tension depending on the difference from the pressure. When the diaphragms 103 and 104 expand and contract and the volume of the electrolytic solution chamber 109 increases or decreases, the pressure of the electrolytic solution decreases or increases accordingly.
- the volume and pressure of the electrolyte chamber 109 are always maintained at substantially the same values as in the initial state.
- the electrolyte pressure is always kept smaller than the fluid pressure in the pump chambers 107 and 108, and the difference between the electrolyte pressure and the fluid pressure in the pump chambers 107 and 108 is caused. It is possible to keep the diaphragms 103 and 104 in a shape such that the diaphragms 103 and 104 are convex in the direction from the pump chambers 107 and 108 to the electrolyte chamber 109 with appropriate tension.
- FIG. 29 shows the pressure of the electrolyte in the pump chambers 107 and 108 in the pump of FIG. 10 in the first modification of the first embodiment of the present invention.
- the state of the elastic film part 130A when it is made the same value as this pressure is shown.
- the position of the elastic film portion 130A in FIG. 10 is indicated by a dotted line.
- a force (restoring force) that causes the elastic film portion 130 ⁇ / b> A to return to the state of FIG. 29 is generated by the elastic force of the elastic film portion 130 ⁇ / b> A.
- the pressure of the electrolytic solution is kept smaller than the pressure of the fluid in the pump chambers 107 and 108, and the pressure of the electrolytic solution and the pressure of the fluid in the pump chambers 107 and 108 are kept. Therefore, the diaphragms 103 and 104 can be kept in a shape that is convex in the direction from the pump chambers 107 and 108 to the electrolyte chamber 109 with appropriate tension. When the diaphragms 103 and 104 expand and contract and the volume of the electrolytic solution chamber 109 increases or decreases, the pressure of the electrolytic solution decreases or increases accordingly. In response to this, the elastic membrane portion 130A moves to the electrolytic solution chamber.
- the volume and pressure of the electrolyte chamber 109 are always maintained at substantially the same values as in the initial state.
- the pressure of the electrolytic solution is always kept smaller than the pressure of the fluid in the pump chambers 107 and 108, and the difference between the pressure of the electrolytic solution and the pressure of the fluid in the pump chambers 107 and 108 is caused. It is possible to keep the diaphragms 103 and 104 in such a shape that the diaphragms 103 and 104 are convex in the direction from the pump chambers 107 and 108 to the electrolyte chamber 109 with appropriate tension.
- the position of the elastic membrane portion is set to the same value as the pressure of the fluid in the pump chambers 107 and 108. Compared to the position of the elastic film portion, it is sufficient that the position is shifted in the direction from the outside to the inside of the electrolyte chamber 109.
- the elastic membrane portion is convex in the direction from the outside to the inside of the electrolyte chamber 109, the elastic membrane portion is convex in the direction from the inside to the outside of the electrolyte chamber 109. It may be either. Moreover, it does not matter whether the spring part is connected to the elastic film part or not.
- a part of the wall surface of the electrolyte chamber 109 is formed of an elastic body (for example, the elastic film part 130), and the elastic force or elastic body of the elastic body is used.
- an elastic body forming a part of the wall surface of the electrolytic solution chamber 109 Due to the elastic force of the spring to be connected (for example, the spring portion 131), an elastic body forming a part of the wall surface of the electrolytic solution chamber 109 generates a force to deform from the outside of the electrolytic solution chamber 109 to the inside.
- FIG. 30 shows a state of the elastic membrane portion 130 when the pressure of the electrolytic solution is set to the same value as the pressure of the fluid in the pump chambers 107 and 108 in the pump of FIG. However, the position of the elastic film part 130 in FIG. 13 is indicated by a dotted line.
- a force (restoring force) that causes the elastic film portion 130 to return to the state of FIG. 30 is generated by the elastic force of the elastic film portion 130. Since this force is always generated during the operation of the pump, the pressure of the electrolytic solution is maintained at a value larger than the pressure of the fluid in the pump chambers 107 and 108, and the pressure of the electrolytic solution and the fluid in the pump chambers 107 and 108 are maintained.
- the diaphragms 103 and 104 Due to the difference from the pressure, it is possible to keep the diaphragms 103 and 104 in a shape such that the diaphragms 103 and 104 are convex in the direction from the electrolyte chamber to the pump chambers 107 and 108 with appropriate tension.
- the pressure of the electrolytic solution decreases or increases accordingly. It is deformed inward or outward as viewed from the chamber 109. As a result, the volume and pressure of the electrolyte chamber 109 are always maintained at substantially the same values as in the initial state.
- the pressure of the electrolytic solution is always maintained at a value larger than the pressure of the fluid in the pump chambers 107 and 108, and the pressure of the electrolytic solution and the pressure of the fluid in the pump chambers 107 and 108 are Due to the difference, it is possible to keep the diaphragms 103 and 104 in a shape in which the diaphragms 103 and 104 are convex in the direction from the electrolyte chamber 109 to the pump chambers 107 and 108 with appropriate tension.
- the initial stage In the state, the position of the elastic membrane part 130 when the pressure of the electrolytic solution is set larger than the pressure of the fluid in the pump chambers 107 and 108 is set to the same value as the pressure of the fluid in the pump chambers 107 and 108. Compared with the position of the elastic film portion 130 at the time, it is sufficient that the position is shifted in the direction from the inner side to the outer side of the electrolyte chamber 109.
- the elastic membrane portion 130 is convex in the direction from the outside to the inside of the electrolyte chamber 109, the elastic membrane portion 130 is convex in the direction from the inside to the outside of the electrolyte chamber 109.
- It may be any shape.
- the spring portion 131 may or may not be connected to the elastic membrane portion 130.
- FIG. 31 shows the size of the bubble 212 when the pressure of the electrolytic solution is the same as the pressure of the fluid in the pump chambers 107 and 108 in the pump of FIG. However, the size of the bubble 212 in FIG. 18 is indicated by a dotted line.
- the bubble portion 212 has the size shown in FIG. A force (restoring force) that causes the size of the portion 212 to return to the state of FIG. 31 is generated.
- the pressure of the electrolytic solution is kept at a value smaller than the pressure of the fluid in the pump chambers 107 and 108, and the pressure of the electrolytic solution and the fluid in the pump chambers 107 and 108 are maintained. Due to the difference from the pressure, it is possible to keep the diaphragms 103 and 104 in a shape such that the diaphragms 103 and 104 are convex in the direction from the pump chambers 107 and 108 to the electrolyte chamber 109 with appropriate tension. When the diaphragms 103 and 104 expand and contract and the volume of the electrolyte chamber 109 increases or decreases, the pressure of the electrolyte decreases or increases accordingly. Increase or decrease.
- the volume and pressure of the electrolytic solution are always maintained at substantially the same values as in the initial state.
- the pressure of the electrolytic solution is always kept smaller than the pressure of the fluid in the pump chambers 107 and 108, and the difference between the pressure of the electrolytic solution and the pressure of the fluid in the pump chambers 107 and 108 is caused. It is possible to keep the diaphragms 103 and 104 in such a shape that the diaphragms 103 and 104 are convex in the direction from the pump chambers 107 and 108 to the electrolyte chamber 109 with appropriate tension.
- FIG. 28 to FIG. 31 for easy understanding, the position change of the elastic film 130 or the size change of the bubble part 212 due to the pressure change of the electrolytic solution is greatly shown. Actually, since the electrolytic solution is an incompressible fluid, a change in the position of the elastic film 130 or a change in the size of the bubble portion 212 due to a change in the pressure of the electrolytic solution is very small.
- the elastic part examples include an elastic body, a spring part, and a bubble part.
- the elastic body is a member whose surface is moved or deformed by the elastic force of the elastic body itself, and examples thereof include an elastic film or a bulk elastic member.
- FIG. 32 is a configuration diagram showing an example of using a bulky elastic member, which is a fluid conveyance device according to still another embodiment of the present invention.
- a recess 102v is formed in one side wall 102s of the housing 102, and a bulk elastic member 160 is fitted in the recess 102v.
- the bulk elastic member 160 is a member whose surface 160a is moved or deformed by its own elastic force, and the surface 160a of the bulk elastic member 160 is moved forward and backward by the elastic force of the bulk elastic member 160 itself in the recess 102v.
- the pressure acting on the diaphragms 103 and 104 can be maintained within a predetermined range by deforming the interface between the electrolytic solution and a portion other than the electrolytic solution. That is, a force for deforming the electrolyte chamber 109 from the inside to the outside is generated by causing the elastic force of the bulk elastic member 160 to act as the elastic force of the elastic portion, and the electrolyte solution is generated by the generated force. Is maintained at a value smaller than the pressure of the fluid in the pump chambers 107 and 108, and the diaphragms 103 and 104 generated by the difference between the pressure of the electrolyte and the pressure of the fluid in the pump chambers 107 and 108 are maintained.
- the diaphragms 103 and 104 are maintained in a shape that is convex in the direction from the pump chambers 107 and 108 to the electrolyte chamber 109 due to the tension.
- an elastic force of the bulk elastic member 160 is applied as the elastic force of the elastic portion to generate a force to deform from the outside of the electrolyte chamber 109 to the inside, and the generated force causes the electrolysis.
- the pressure of the liquid is maintained at a value larger than the pressure of the fluid in the pump chambers 107 and 108, and the diaphragm 103, which is generated by the difference between the pressure of the electrolyte and the pressure of the fluid in the pump chambers 107 and 108,
- the diaphragms 103 and 104 are maintained in a shape that is convex in the direction from the electrolyte chamber 109 to the pump chambers 107 and 108 due to the tension of 104.
- reference numeral 102x denotes a recess formed at the bottom of the recess 102v, and the bulk elastic member 160 itself is inserted into the recess 102v so that the surface of the bulk elastic member 160 moves or deforms.
- the elastic deformation is performed as indicated by the dotted line, a space into which a part of the bulk elastic member 160 enters is secured by the recess 102x.
- FIG. 33 is a configuration diagram showing an example in which only the spring portion is used as the elastic portion in the fluid conveyance device according to still another embodiment of the present invention.
- a concave portion 102w is formed in one side wall 102s of the housing portion 102, and a movable wall member 161 that can move and a spring portion 162 that applies elastic force to the movable wall member 161 are disposed in the concave portion 102w.
- a concave portion 102w is formed in one side wall 102s of the housing portion 102, and a movable wall member 161 that can move and a spring portion 162 that applies elastic force to the movable wall member 161 are disposed in the concave portion 102w.
- the movable wall member 161 moves forward and backward by the elastic force of the spring portion 162 in the recess 102w, and the pressure acting on the diaphragms 103 and 104 is within a predetermined range by deforming the interface between the electrolytic solution and a portion other than the electrolytic solution. Can be maintained. That is, the elastic force of the spring portion 162 is applied as the elastic force of the elastic portion to generate a force for deforming from the inner side to the outer side of the electrolytic solution chamber 109, and the pressure of the electrolytic solution is generated by the generated force.
- the diaphragms 103 and 104 are maintained in a shape that is convex in the direction from the pump chambers 107 and 108 to the electrolyte chamber 109.
- the elastic force of the spring portion 162 is caused to act as the elastic force of the elastic portion, thereby generating a force to deform from the outside of the electrolyte chamber 109 to the inside, and by the generated force, the electrolyte solution
- the pressure is maintained at a value larger than the pressure of the fluid in the pump chambers 107 and 108, and the diaphragms 103 and 104 of the diaphragms 103 and 104 caused by the difference between the pressure of the electrolyte and the pressure of the fluid in the pump chambers 107 and 108 are maintained.
- the diaphragms 103 and 104 are maintained in a shape that is convex in the direction from the electrolyte chamber 109 to the pump chambers 107 and 108 by tension. As a result, even in the example of FIG. 33, the same operational effects as those of the other embodiments can be obtained.
- the fluid conveyance device of the present invention can be used for a fuel supply device such as methanol in a fuel cell, or a water-cooled circulation device for cooling an electronic device including a CPU. It can be suitably used as a fluid transfer device that performs with high efficiency.
Abstract
Description
本発明の第1態様によれば、流体を吸入及び吐出する、導電性高分子を用いた流体搬送装置であって、
前記流体が内部に満たされるポンプ室と、
前記ポンプ室が内部に形成されかつ前記ポンプ室の壁面の一部を構成する筺体部と、
前記筺体部内に支持されて一部分もしくは全部分が電解伸縮を行う導電性高分子膜で形成されて、前記筺体部と共に前記ポンプ室の壁面を構成するダイヤフラムと、
前記筺体部に配置されかつ前記ポンプ室において前記流体の吐出及び吸入を行うための開口部と、
前記筺体部と前記ダイヤフラムとで囲まれかつ内部に電解液を含み、その電解液の一部が前記ダイヤフラムと接する電解液室と、
前記導電性高分子膜に電圧を印加するための電源と、
前記導電性高分子膜と前記電源とを電気的に接続する配線部と、
前記電解液室内の電解液と前記ポンプ室内の前記流体とにより前記ダイヤフラムに作用する圧力を所定範囲内に維持する圧力維持部とを備える、導電性高分子を用いた流体搬送装置を提供する。
以下、図面を参照して本発明における実施形態を詳細に説明する前に、本発明の種々の態様について説明する。
前記流体が内部に満たされるポンプ室と、
前記ポンプ室が内部に形成されかつ前記ポンプ室の壁面の一部を構成する筺体部と、
前記筺体部内に支持されて一部分もしくは全部分が電解伸縮を行う導電性高分子膜で形成されて、前記筺体部と共に前記ポンプ室の壁面を構成するダイヤフラムと、
前記筺体部に配置されかつ前記ポンプ室において前記流体の吐出及び吸入を行うための開口部と、
前記筺体部と前記ダイヤフラムとで囲まれかつ内部に電解液を含み、その電解液の一部が前記ダイヤフラムと接する電解液室と、
前記導電性高分子膜に電圧を印加するための電源と、
前記導電性高分子膜と前記電源とを電気的に接続する配線部と、
前記電解液室内の電解液と前記ポンプ室内の前記流体とにより前記ダイヤフラムに作用する圧力を所定範囲内に維持する圧力維持部とを備える、導電性高分子を用いた流体搬送装置を提供する。
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも小さな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記ポンプ室から前記電解液室の方向に凸であるような形状に前記ダイヤフラムが保たれることを特徴とする第2態様に記載の、導電性高分子を用いた流体搬送装置を提供する。
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも小さな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記ポンプ室から前記電解液室の方向に凸であるような形状に前記ダイヤフラムが保たれることを特徴とする第2の態様に記載の、導電性高分子を用いた流体搬送装置を提供する。
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも小さな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記ポンプ室から前記電解液室の方向に凸であるような形状に前記ダイヤフラムが保たれることを特徴とする第2の態様に記載の、導電性高分子を用いた流体搬送装置を提供する。
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも大きな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記電解液室から前記ポンプ室の方向に凸であるような形状に前記ダイヤフラムが保たれることを特徴とする第2態様に記載の、導電性高分子を用いた流体搬送装置を提供する。
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも大きな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記電解液室から前記ポンプ室の方向に凸であるような形状に前記ダイヤフラムが保たれることを特徴とする第2の態様に記載の、導電性高分子を用いた流体搬送装置を提供する。
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも大きな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記電解液室から前記ポンプ室の方向に凸であるような形状に前記ダイヤフラムが保たれることを特徴とする第2の態様に記載の、導電性高分子を用いた流体搬送装置を提供する。
この気泡部の体積は、前記ダイヤフラムが1回伸縮する場合の流体搬送装置の吐出量の10%以上の大きさであることを特徴とする第2態様に記載の、導電性高分子を用いた流体搬送装置を提供する。
図1は、本発明の第1実施形態にかかる、導電性高分子を用いた流体搬送装置の斜視図である。
図1の流体搬送装置は、筺体部102と、弾性部の一例としての弾性膜部130と、流体管部200、201、202,203との各部分を備えている。
図3の流体搬送装置は、筺体部102と、第1ダイヤフラム103と、第2ダイヤフラム104と、第1ポンプ室107と、第2ポンプ室108と、電解液室109と、配線部110aと110bと、電源110cと、第1及び第2吸入口111aと111bと、第1及び第2吐出口113aと113bと、第1及び第2吸入弁121と123と、第1及び第2吐出弁122と124と、弾性部の一例としてのバネ部131と、弾性膜部130と、流体管部200、201、202、203とを備えるように構成されている。バネ部131と弾性膜部130とは、以下で説明するように圧力維持部(特に、圧力維持部の弾性部の一例)として働く。
また、ポリマーアクチュエータ材料で構成される前記ダイヤフラムの面積を大きくした場合、ポリマーアクチュエータの電解伸縮による仕事量を大きくすることが可能である。また、ポリマーアクチュエータ材料で構成される前記ダイヤフラムの面積を小さくした場合、必要な筺体の体積を小さくすることができるため、流体搬送装置を小型にすることが可能である。これらの点を考慮して、ポリマーアクチュエータ材料で構成される前記ダイヤフラムの面積を設計することが望ましい。前記観点から、一例として、前記ダイヤフラム103及び104のそれぞれの面積は0.01cm2~1000cm2であることが望ましく、その中でも特に0.1cm2~100cm2であることが望ましい。
図6Aの状態からの第1及び第2ダイヤフラムの伸張量を考えた場合、図6Dの状態においては、第1ダイヤフラム103の伸張量は負の値をとり、その値は周期内での最小値となっており、第2ダイヤフラム104の伸張量は正の値をとり、その値は周期内での最大値となっている。また、電源110cから流れる電流はほぼ0となる。この状態においては、流体の流れもほぼ0になっている。
弾性膜部130は、筺体部102の側壁102sに形成された円形の貫通穴102hを塞ぐ形態で固定されており、ゴム又は合成樹脂(プラスチック)などの弾性を有する材料(弾性材料)で円形膜状に構成されている。弾性膜部130を構成する弾性材料としては、例えばシリコーンゴムなどが考えられる。
(i)一定方向に歪みが蓄積されること、又は、
(ii)導電性高分子膜が電解液を吸うことによって膨張などの変形を生じること、又は、
(iii)導電性高分子膜においてクリープに代表される非可逆的もしくは可逆的な形状変化が生じること、又は、
(iv)導電性高分子膜の固定部の変形又はズレなどが発生する。このために、ダイヤフラムの面積又は形状又は配置が変化することがある。この場合、従来例に示したポンプにおいては、前記のように、ポンプを製造するときに導電性高分子膜を張力がかかる状態で設置した場合でも、ダイヤフラムに所望の張力(引っ張り方向の応力)が加えられない状況が生じる。
図13は、本発明の第2実施形態にかかる、導電性高分子を用いた流体搬送装置の断面図である。
図13の流体搬送装置は、筺体部102と、第1ダイヤフラム103と、第2ダイヤフラム104と、第1ポンプ室107と、第2ポンプ室108と、電解液室109と、配線部110aと110bと、第1及び第2吸入口111aと111bと、第1及び第2吐出口113aと113bと、第1及び第2吸入弁121と123と、第1及び第2吐出弁122と124と、バネ部131と、弾性膜部130とを備えるように構成されている。バネ部131と弾性膜部130とは、以下で説明するように圧力維持部として働く。また、第1ダイヤフラム103と第2ダイヤフラム104については、以下では簡単のため、単にダイヤフラムと呼ぶ。
図15は、本発明の第3実施形態にかかる、導電性高分子を用いた流体搬送装置の断面図である。
この第3実施形態は、筺体部102と、第1ダイヤフラム103と、ポンプ室107と、電解液室109と、配線部110aと110bと、吸入口111aと、吐出口113aと、吸入弁121と、吐出弁122と、弾性部の一例としてのバネ部131と、弾性膜部130と、第2弾性膜部170と、対向電極部180とを備えて構成されている。バネ部131と第2弾性膜部170とは以下で説明するように圧力維持部として働く。
図18は、本発明の第4実施形態にかかる、導電性高分子を用いた流体搬送装置の構成を示す。
前記の説明では、主に、電解液室109は電解液のみで満たされている場合について説明したが、電解液室109の一部に気体を満たしてもよい。この場合、気体の弾性を用いて第1及び第2ダイヤフラム103,104に対する圧力を所定の範囲内に維持することも可能である。図18においては、電解液室109の内部には、電解液と気泡が混入されている。気泡は、電解液とは化学的に反応しない空気などの気体からなる気泡部212を構成する。図18における気泡の弾性は、図3における弾性膜部130及びバネ部131と同様の機能を果たし、第1及び第2ダイヤフラム103,104に対する圧力を所定の範囲内に維持可能である。このことを以下で説明する。図18においては、電解液室109の内部の電解液の圧力は、第1及び第2ポンプ室107,108の流体の圧力よりも小さく設定されている。この圧力差によって、第1及び第2ダイヤフラム103及び104は、応力(張力)が第1及び第2ダイヤフラム103及び104に加わった状態に保たれる。例えば、第1及び第2ポンプ室107,108の流体の圧力が大気圧に等しい場合には、電解液及び気泡部212は大気圧に置かれた場合に比べて圧力が小さいために、気泡部212は膨張している。ただし、電解液はほぼ非圧縮性流体であるために、気泡部212の膨張の度合いは極めて小さい。この状態から、例えば、第1及び第2ダイヤフラム103,104が伸びた場合には、電解液室109の体積が減少するために、電解液及び気泡部212の圧力がそれぞれ増加する。電解液室109に電解液のみが入っている場合には、電解液はほぼ非圧縮性流体であるので電解液の圧力が急激に増加するために、第1及び第2ポンプ室107,108の内部の流体と電解液室109の内部の電解液の圧力差が非常に小さくなって、第1及び第2ダイヤフラム103,104の応力(張力)が減少して、第1及び第2ダイヤフラム103,104が弛んだ状態になり、ポンプの動作が妨げられる。これに対して、図18の構成においては、電解液室109の気泡部212の弾性率が小さいためにその体積が変化しても圧力の変化が小さい。すなわち、気泡部212が、電解液室109の体積変化による電解液室109の内部の圧力変化を吸収する働きを有し、電解液室109の内部の電解液及び気泡部212の圧力が適切な値に保たれる。このために、第1及び第2ポンプ室107,108の内部の流体と電解液室109の内部の電解液の圧力差も、また、一定範囲内で保たれるので、第1及び第2ダイヤフラム103,104の応力(張力)が適切な値に保たれる(言い換えれば、第1及び第2ポンプ室107,108内の流体の圧力が所定範囲内に保たれる)。すなわち、気泡部212が、第1及び第2ダイヤフラム103,104の圧力維持機能を有する。このことから、第1及び第2ダイヤフラム103,104の圧力維持機能が無い場合に比べて、第1及び第2ダイヤフラム103,104の変形などが生じた場合でも、ダイヤフラムに対する圧力が適切な範囲に維持されて、ポンプの動作効率が向上する。気泡部212を用いた場合、簡易な構造で第1及び第2ダイヤフラム103,104に対する圧力を所定の適切な範囲内に自動的に維持可能である。
Vp=π×h/6×(3×r2+h2)・・・(関係式1)
また、第2ダイヤフラム404の面積Sdは以下の(関係式2)で与えられる。
Sd=π×(r2+h2)・・・(関係式2)
今、Vi=2/3×π×r3とおく。また、Si=π×r2とおく。ここで、πは円周率である。一般的に、ポンプにおける導電性高分子膜の第2ダイヤフラム404の面積の周期的な電解伸縮の大きさは、初期状態の第2ダイヤフラム404の面積の10%以下である。前記仮定の下では、初期状態の第2ダイヤフラム404の面積はSiで与えられるので、一般的に、ポンプ動作時に第2ダイヤフラム404の面積は以下の範囲内で変化する。
Si≦(第2ダイヤフラム404の面積)≦Si×1.1
第2ダイヤフラム404の面積が(Si×1.1)である場合に、前記(関係式2)からh≒0.32×rの関係がある。このとき、第2ポンプ室408の体積は、前記(関係式1)から、Vp≒0.2×Viで与えられる。以上の考察から、図22Bに示すようなポンプにおいて、第2ダイヤフラム404を構成する導電性高分子膜が周期的な電解伸縮を行う場合には、1回の電解伸縮を行うときに第2ポンプ室408から吐出される流体の体積及び第2ポンプ室408に吸入される流体の体積V0は(0.2×Vi)以下の値であることがわかる。
図20は、本発明の第5実施形態にかかる、導電性高分子を用いた流体搬送装置の断面図であって、第1及び第2ダイヤフラム103,104の一部を弾性膜204でそれぞれ構成した場合の例を示す。すなわち、図20において、ダイヤフラム103及び104の周辺部分がダイヤフラム弾性膜204で形成されている。
図21は、本発明の第6実施形態にかかる、導電性高分子を用いた流体搬送装置の断面図であって、図21の構成においては、図15の第3実施形態にかかる流体搬送装置の第1ダイヤフラム103とバネ部131と同様にダイヤフラム103とバネ部131が配置されるとともに、電解液室109の側部に電解液溜め部206が形成されている。すなわち、電解液室109を構成する筐体部102の側壁102sに、側壁102sの一部を貫通した導管部207が設けられており、その導管部207で筺体部102の内部の電解液室109と電解液溜め部206の内部が接続されて、電解液が行き来できる構造になっている。電解液溜め部206の上部は大気圧に解放されており、このことから、電解液室109の体積と圧力はほぼ一定に保たれる。結果として、ダイヤフラム103が電解液から受ける圧力もほぼ一定であり、ダイヤフラム103に対する圧力をほぼ一定に保つことが可能である。電解液溜め部206の上面を、気体は透過して液体は透過しない脱気膜などで構成することができて、このことにより、電解液が外部に漏れるのを防止することも可能である。なお、図21の構成において、電解液の液面が電解液溜め部206の内部で上下に移動することによって、電解液の重さが伝わる結果、ダイヤフラムに加わる圧力は少し変化するが、この変化の大きさは、電解液室109を密閉した場合に電解液室109の体積が変化することによる圧力変化に比べて小さいことが多い。
前記第1~第6実施形態のいずれか1つ又は複数の実施形態の流体搬送装置を複数台用意して並列に並べて、流入側と流出側とをそれぞれ互いに接続することにより、大きな搬送流量を得ることも可能である。
前記のように、ダイヤフラム103,104が適切な張力を持ってポンプ室107,108から電解液室109の方向に凸であるような形状にダイヤフラム103,104を保つためには、電解液の圧力をポンプ室内部の流体圧力よりも小さく保つことが必要である。このために、本発明のさらに他の実施形態においては、電解液室109の壁面の一部を弾性体(例えば、図3の弾性膜部130)で形成して、その弾性体の弾性力若しくは弾性体に接続するバネ(例えば、図3のバネ部131)の弾性力によって、電解液室109の壁面の一部を形成する弾性体が電解液室109の内側から外側方向に変形しようとする力を発生させる。この力によって電解液の圧力は、ポンプ室内部の流体圧力よりも小さく保たれる。
Claims (10)
- 流体を吸入及び吐出する、導電性高分子を用いた流体搬送装置であって、
前記流体が内部に満たされるポンプ室と、
前記ポンプ室が内部に形成されかつ前記ポンプ室の壁面の一部を構成する筺体部と、
前記筺体部内に支持されて一部分もしくは全部分が電解伸縮を行う導電性高分子膜で形成されて、前記筺体部と共に前記ポンプ室の壁面を構成するダイヤフラムと、
前記筺体部に配置されかつ前記ポンプ室において前記流体の吐出及び吸入を行うための開口部と、
前記筺体部と前記ダイヤフラムとで囲まれかつ内部に電解液を含み、その電解液の一部が前記ダイヤフラムと接する電解液室と、
前記導電性高分子膜に電圧を印加するための電源と、
前記導電性高分子膜と前記電源とを電気的に接続する配線部と、
前記電解液室内の電解液と前記ポンプ室内の前記流体とにより前記ダイヤフラムに作用する圧力を所定範囲内に維持する圧力維持部とを備える、導電性高分子を用いた流体搬送装置。 - 前記圧力維持部は、弾性部を備え、前記弾性部の弾性力によって前記電解液と前記電解液以外の部分との界面を変形することによって前記ダイヤフラムに作用する圧力を前記所定範囲内に維持する請求項1に記載の、導電性高分子を用いた流体搬送装置。
- 前記圧力維持部の前記弾性部は、前記電解液室の壁面の一部に形成された伸縮可能な弾性体と、前記弾性体と前記筺体部との間を接続するバネ部とで構成して、前記弾性体の弾性力若しくは前記バネ部の弾性力を前記弾性部の前記弾性力として作用させることによって、前記弾性体が前記電解液室の内側から外側方向に変形しようとする力を発生して、
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも小さな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記ポンプ室から前記電解液室の方向に凸であるような形状に前記ダイヤフラムが保たれる請求項2に記載の、導電性高分子を用いた流体搬送装置。 - 前記圧力維持部の前記弾性部は、前記電解液室の壁面の一部に形成された伸縮可能な弾性体で構成して、前記弾性体の弾性力を前記弾性部の前記弾性力として作用させることによって、前記弾性体が前記電解液室の内側から外側方向に変形しようとする力を発生し、
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも小さな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記ポンプ室から前記電解液室の方向に凸であるような形状に前記ダイヤフラムが保たれる請求項2に記載の、導電性高分子を用いた流体搬送装置。 - 前記圧力維持部の前記弾性部はバネ部で構成して、前記バネ部の弾性力を前記弾性部の前記弾性力として作用させることによって前記電解液と前記電解液以外の部分との界面を変形しようとする力を発生し、
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも小さな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記ポンプ室から前記電解液室の方向に凸であるような形状に前記ダイヤフラムが保たれる請求項2に記載の、導電性高分子を用いた流体搬送装置。 - 前記圧力維持部の前記弾性部は、前記電解液室の壁面の一部に形成された伸縮可能な弾性体と、前記弾性体と前記筺体部との間を接続するバネ部とで構成して、前記弾性体の弾性力若しくは前記バネ部の弾性力を前記弾性部の前記弾性力として作用させることによって、前記弾性体が前記電解液室の外側から内側方向に変形しようとする力を発生し、
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも大きな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記電解液室から前記ポンプ室の方向に凸であるような形状に前記ダイヤフラムが保たれる請求項2に記載の、導電性高分子を用いた流体搬送装置。 - 前記圧力維持部の前記弾性部は、前記電解液室の壁面の一部に形成された伸縮可能な弾性体で構成して、前記弾性体の弾性力を前記弾性部の前記弾性力として作用させることによって、前記弾性体が前記電解液室の外側から内側方向に変形しようとする力を発生し、
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも大きな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記電解液室から前記ポンプ室の方向に凸であるような形状に前記ダイヤフラムが保たれる請求項2に記載の、導電性高分子を用いた流体搬送装置。 - 前記圧力維持部の前記弾性部はバネ部で構成して、前記バネ部の弾性力を前記弾性部の前記弾性力として作用させることによって前記電解液と前記電解液以外の部分との界面を変形しようとする力を発生し、
前記発生した力によって前記電解液の圧力が前記ポンプ室の前記流体の圧力よりも大きな値に保たれ、前記電解液の圧力と前記ポンプ室の前記流体の圧力との差によって生じた前記ダイヤフラムの張力により前記電解液室から前記ポンプ室の方向に凸であるような形状に前記ダイヤフラムが保たれる請求項2に記載の、導電性高分子を用いた流体搬送装置。 - 前記圧力維持部の前記弾性部は、前記電解液室の前記電解液内に位置し、かつ、内部に気体を含む気泡部で構成し、
この気泡部の体積は、前記ダイヤフラムが1回伸縮する場合の流体搬送装置の吐出量の10%以上の大きさである請求項2に記載の、導電性高分子を用いた流体搬送装置。 - 前記気泡部の体積は、前記電解液室の体積の20%以下である請求項9に記載の、導電性高分子を用いた流体搬送装置。
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JP6586686B2 (ja) * | 2014-07-30 | 2019-10-09 | 国立大学法人福井大学 | 高分子アクチュエーターの制御方法、高分子アクチュエーター及びこの高分子アクチュエーターを利用した微少流体送出装置 |
DE102016014832A1 (de) * | 2016-12-14 | 2018-06-14 | Drägerwerk AG & Co. KGaA | Kammerpumpe und Verfahren zum Betrieb einer Kammerpumpe |
KR101933062B1 (ko) | 2017-09-19 | 2019-03-15 | 서강대학교산학협력단 | 이송대상유체의 압력을 측정하는 펌프, 이를 이용하는 유체운송 시스템과 그 시스템의 동작 방법 |
CN108708841B (zh) * | 2018-05-07 | 2020-01-03 | 广东工业大学 | 一种充气泵及其充气方法 |
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JP2024015457A (ja) * | 2020-12-08 | 2024-02-02 | ソニーグループ株式会社 | 流体制御装置、及び電子機器 |
CN117398550B (zh) * | 2023-12-14 | 2024-03-22 | 清华大学 | 一种无针注射器 |
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- 2009-07-06 JP JP2009543296A patent/JP4482617B2/ja not_active Expired - Fee Related
- 2009-07-06 CN CN2009801069497A patent/CN101960144A/zh active Pending
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Also Published As
Publication number | Publication date |
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JP2010138911A (ja) | 2010-06-24 |
CN101960144A (zh) | 2011-01-26 |
US20100260623A1 (en) | 2010-10-14 |
JP4898928B2 (ja) | 2012-03-21 |
JP4482617B2 (ja) | 2010-06-16 |
US8062007B2 (en) | 2011-11-22 |
JPWO2010004721A1 (ja) | 2011-12-22 |
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