WO2010004377A8 - Antireflective coating compositions - Google Patents

Antireflective coating compositions Download PDF

Info

Publication number
WO2010004377A8
WO2010004377A8 PCT/IB2009/005458 IB2009005458W WO2010004377A8 WO 2010004377 A8 WO2010004377 A8 WO 2010004377A8 IB 2009005458 W IB2009005458 W IB 2009005458W WO 2010004377 A8 WO2010004377 A8 WO 2010004377A8
Authority
WO
WIPO (PCT)
Prior art keywords
coating compositions
antireflective coating
disclosed
reflective coating
antireflective
Prior art date
Application number
PCT/IB2009/005458
Other languages
French (fr)
Other versions
WO2010004377A1 (en
Inventor
Huirong Yao
Zhong Xiang
Jianhui Shan
Salem Mullen
Hengpeng Wu
Original Assignee
Az Electronic Materials Usa Corp.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Az Electronic Materials Usa Corp. filed Critical Az Electronic Materials Usa Corp.
Priority to JP2011517253A priority Critical patent/JP5568791B2/en
Priority to KR1020107027320A priority patent/KR101429326B1/en
Priority to CN200980120772.6A priority patent/CN102056969B/en
Priority to EP09785890A priority patent/EP2300518B1/en
Publication of WO2010004377A1 publication Critical patent/WO2010004377A1/en
Publication of WO2010004377A8 publication Critical patent/WO2010004377A8/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D167/00—Coating compositions based on polyesters obtained by reactions forming a carboxylic ester link in the main chain; Coating compositions based on derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32—Epoxy compounds containing three or more epoxy groups
    • C08G59/3236—Heterocylic compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D163/00—Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
    • C08G63/68—Polyesters containing atoms other than carbon, hydrogen and oxygen
    • C08G63/685—Polyesters containing atoms other than carbon, hydrogen and oxygen containing nitrogen
    • C08G63/6854—Polyesters containing atoms other than carbon, hydrogen and oxygen containing nitrogen derived from polycarboxylic acids and polyhydroxy compounds

Abstract

Anti reflective coating compositions and related polymers are disclosed.
PCT/IB2009/005458 2008-07-08 2009-04-29 Antireflective coating compositions WO2010004377A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011517253A JP5568791B2 (en) 2008-07-08 2009-04-29 Anti-reflective coating composition
KR1020107027320A KR101429326B1 (en) 2008-07-08 2009-04-29 Antireflective coating compositions
CN200980120772.6A CN102056969B (en) 2008-07-08 2009-04-29 Antireflective coating compositions
EP09785890A EP2300518B1 (en) 2008-07-08 2009-04-29 Antireflective coating compositions

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/133,562 US8221965B2 (en) 2008-07-08 2008-07-08 Antireflective coating compositions
US12/133,562 2008-07-08

Publications (2)

Publication Number Publication Date
WO2010004377A1 WO2010004377A1 (en) 2010-01-14
WO2010004377A8 true WO2010004377A8 (en) 2011-03-31

Family

ID=40886504

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2009/005458 WO2010004377A1 (en) 2008-07-08 2009-04-29 Antireflective coating compositions

Country Status (8)

Country Link
US (1) US8221965B2 (en)
EP (1) EP2300518B1 (en)
JP (1) JP5568791B2 (en)
KR (1) KR101429326B1 (en)
CN (1) CN102056969B (en)
MY (1) MY155242A (en)
TW (1) TWI512063B (en)
WO (1) WO2010004377A1 (en)

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Also Published As

Publication number Publication date
JP5568791B2 (en) 2014-08-13
US20100009293A1 (en) 2010-01-14
KR20110042262A (en) 2011-04-26
TW201002793A (en) 2010-01-16
TWI512063B (en) 2015-12-11
KR101429326B1 (en) 2014-08-12
CN102056969B (en) 2014-09-24
JP2011527460A (en) 2011-10-27
MY155242A (en) 2015-09-30
EP2300518A1 (en) 2011-03-30
EP2300518B1 (en) 2012-08-15
CN102056969A (en) 2011-05-11
WO2010004377A1 (en) 2010-01-14
US8221965B2 (en) 2012-07-17

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