WO2009129351A3 - Stiffness sensor - Google Patents

Stiffness sensor Download PDF

Info

Publication number
WO2009129351A3
WO2009129351A3 PCT/US2009/040728 US2009040728W WO2009129351A3 WO 2009129351 A3 WO2009129351 A3 WO 2009129351A3 US 2009040728 W US2009040728 W US 2009040728W WO 2009129351 A3 WO2009129351 A3 WO 2009129351A3
Authority
WO
WIPO (PCT)
Prior art keywords
charged membrane
stiffness
capacitance
plate
charged
Prior art date
Application number
PCT/US2009/040728
Other languages
French (fr)
Other versions
WO2009129351A2 (en
Inventor
Shyam Sivaramakrishnan
Rajesh Rajamani
Original Assignee
Regents Of The University Of Minnesota
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Regents Of The University Of Minnesota filed Critical Regents Of The University Of Minnesota
Publication of WO2009129351A2 publication Critical patent/WO2009129351A2/en
Publication of WO2009129351A3 publication Critical patent/WO2009129351A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/20—Investigating strength properties of solid materials by application of mechanical stress by applying steady bending forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/0617—Electrical or magnetic indicating, recording or sensing means
    • G01N2203/0629—Electrical or magnetic indicating, recording or sensing means using thin films, paintings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/4833—Physical analysis of biological material of solid biological material, e.g. tissue samples, cell cultures

Abstract

In general, this disclosure is directed to a stiffness sensor that uses capacitance measurements to determine a stiffness of a film applied to a pre-charged membrane. A capacitance is measured between the pre-charged membrane and a back-plate. When applied to the pre-charged membrane, the film may alter the stiffness of the pre-charged membrane. A change in the stiffness of the pre-charged membrane may cause a movement or deflection of the pre-charged membrane, which in turn may cause a change in the capacitance between the pre-charged membrane and the back-plate. In one example, the disclosure is directed to an apparatus that includes a pre-charged membrane, a metallic plate, and a film applied to the pre-charged membrane. The apparatus further includes a capacitance measurement block configured to measure a capacitance between the pre-charged membrane and the metallic plate, and to determine the stiffness of the pre-charged membrane based on the measured capacitance.
PCT/US2009/040728 2008-04-15 2009-04-15 Stiffness sensor WO2009129351A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4526808P 2008-04-15 2008-04-15
US61/045,268 2008-04-15

Publications (2)

Publication Number Publication Date
WO2009129351A2 WO2009129351A2 (en) 2009-10-22
WO2009129351A3 true WO2009129351A3 (en) 2010-01-14

Family

ID=41199720

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/040728 WO2009129351A2 (en) 2008-04-15 2009-04-15 Stiffness sensor

Country Status (1)

Country Link
WO (1) WO2009129351A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9197967B2 (en) * 2011-03-04 2015-11-24 Epcos Ag Microphone and method to position a membrane between two backplates
RU174317U1 (en) * 2016-12-19 2017-10-11 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" SORPTION ELECTRIC GAS ANALYZER

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0545237A (en) * 1991-08-09 1993-02-23 Nippon Tairan Kk Film stress sensor and stress measuring device
US20020124656A1 (en) * 1998-03-10 2002-09-12 Mcintosh Robert B. Electret transducer
US20050196877A1 (en) * 2004-03-02 2005-09-08 The Charles Stark Draper Laboratory, Inc. Stress-based electrostatic monitoring of chemical reactions and binding
US7086288B2 (en) * 2002-11-27 2006-08-08 Northwestern University Thin membrane transducer
US7163659B2 (en) * 2002-12-03 2007-01-16 Hewlett-Packard Development Company, L.P. Free-standing nanowire sensor and method for detecting an analyte in a fluid

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0545237A (en) * 1991-08-09 1993-02-23 Nippon Tairan Kk Film stress sensor and stress measuring device
US20020124656A1 (en) * 1998-03-10 2002-09-12 Mcintosh Robert B. Electret transducer
US7086288B2 (en) * 2002-11-27 2006-08-08 Northwestern University Thin membrane transducer
US7163659B2 (en) * 2002-12-03 2007-01-16 Hewlett-Packard Development Company, L.P. Free-standing nanowire sensor and method for detecting an analyte in a fluid
US20050196877A1 (en) * 2004-03-02 2005-09-08 The Charles Stark Draper Laboratory, Inc. Stress-based electrostatic monitoring of chemical reactions and binding

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
S. SATYANARAYANA: "Parylene micro membrane capacitive sensor array for chemical and biological sensing", SENSORS AND ACTUATORS. B, CHEMICAL, vol. 115, 31 December 2006 (2006-12-31), pages 494 - 502 *

Also Published As

Publication number Publication date
WO2009129351A2 (en) 2009-10-22

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