WO2009100162A3 - Systems and methods for treating flammable effluent gases from manufacturing processes - Google Patents

Systems and methods for treating flammable effluent gases from manufacturing processes Download PDF

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Publication number
WO2009100162A3
WO2009100162A3 PCT/US2009/033124 US2009033124W WO2009100162A3 WO 2009100162 A3 WO2009100162 A3 WO 2009100162A3 US 2009033124 W US2009033124 W US 2009033124W WO 2009100162 A3 WO2009100162 A3 WO 2009100162A3
Authority
WO
WIPO (PCT)
Prior art keywords
methods
systems
manufacturing processes
abatement unit
gas
Prior art date
Application number
PCT/US2009/033124
Other languages
French (fr)
Other versions
WO2009100162A2 (en
Inventor
Daniel O. Clark
Mehran Moalem
Robbert M. Vermeulen
Phil Chandler
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Priority to CN200980104223XA priority Critical patent/CN101939079B/en
Publication of WO2009100162A2 publication Critical patent/WO2009100162A2/en
Publication of WO2009100162A3 publication Critical patent/WO2009100162A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B01D53/40—Acidic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/108—Hydrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Abstract

A system for treating flammable effluent gas is provided. The system includes an exhaust conduit to carry the flammable effluent gas to an abatement unit, a control system coupled to the abatement unit to determine an operating parameter of the abatement unit, a bypass valve coupled to the exhaust conduit which is an operative responsive to the monitoring system, and a source of second gas to be mixed with the effluent gas diverted from the abatement unit when the bypass valve is operating in a bypass mode to provide a mixed gas having a flammability lower than the effluent gas. Methods of the invention as well as numerous other aspects are provided.
PCT/US2009/033124 2008-02-05 2009-02-04 Systems and methods for treating flammable effluent gases from manufacturing processes WO2009100162A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200980104223XA CN101939079B (en) 2008-02-05 2009-02-04 Systems and methods for treating flammable effluent gases from manufacturing processes

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US2643208P 2008-02-05 2008-02-05
US2613108P 2008-02-05 2008-02-05
US61/026,432 2008-02-05
US61/026,131 2008-02-05
US12084408P 2008-12-08 2008-12-08
US61/120,844 2008-12-08

Publications (2)

Publication Number Publication Date
WO2009100162A2 WO2009100162A2 (en) 2009-08-13
WO2009100162A3 true WO2009100162A3 (en) 2009-11-05

Family

ID=40952674

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/033124 WO2009100162A2 (en) 2008-02-05 2009-02-04 Systems and methods for treating flammable effluent gases from manufacturing processes

Country Status (5)

Country Link
US (1) US9387428B2 (en)
KR (1) KR101581673B1 (en)
CN (1) CN101939079B (en)
TW (1) TWI499450B (en)
WO (1) WO2009100162A2 (en)

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Also Published As

Publication number Publication date
US9387428B2 (en) 2016-07-12
CN101939079B (en) 2013-06-12
CN101939079A (en) 2011-01-05
WO2009100162A2 (en) 2009-08-13
KR101581673B1 (en) 2015-12-31
TWI499450B (en) 2015-09-11
KR20100138906A (en) 2010-12-31
US20090216061A1 (en) 2009-08-27
TW200940159A (en) 2009-10-01

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