WO2009074411A1 - Magnetic memory with a thermally assisted writing procedure - Google Patents
Magnetic memory with a thermally assisted writing procedure Download PDFInfo
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- WO2009074411A1 WO2009074411A1 PCT/EP2008/065198 EP2008065198W WO2009074411A1 WO 2009074411 A1 WO2009074411 A1 WO 2009074411A1 EP 2008065198 W EP2008065198 W EP 2008065198W WO 2009074411 A1 WO2009074411 A1 WO 2009074411A1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
Definitions
- the present invention relates to the field of magnetic memories, especially non-volatile random-access magnetic memories used to store and read data in electronic systems. More particularly, it relates to Magnetic Random Access Memories, referred to as MRAM, based on magnetic tunnel junctions and an improvement of the junction and writing process used in a tunnel junction based MRAM using a thermally assisted write scheme.
- MRAM Magnetic Random Access Memories
- Magnetic memories MRAM have been the object of a renewed interest with the discovery of magnetic tunnel junctions (MTJ) having a strong magnetoresistance at ambient temperature.
- MTJ magnetic tunnel junctions
- These magnetic random access memories present many advantages such as speed (a few nanoseconds of duration of writing and reading), non volatility, and insensitivity to ionizing radiations. Consequently, they are increasingly replacing memory that uses more conventional technology based on the charge state of a capacitor (DRAM, SRAM, FLASH).
- the memory cell consists of an element having a junction consisting of a stack of several alternatively magnetic and non-magnetic metallic layers. Examples of conventional MTJ based MRAM devices are described in US-A-5640343.
- junctions of MTJ based MRAM are made of two magnetic layers of different coercivity separated by an insulating thin layer where the first layer, the reference layer, is characterized by a fixed magnetization and the second layer, the storage layer, is characterized by a magnetization which direction can be changed.
- the resistance of the junction is high.
- the respective magnetizations are parallel, the resistance becomes low.
- the reference layer and the storage layer are made of 3d metals such as Fe, Co or Ni or their alloys. Eventually, boron can be added in the layer composition in order obtain an amorphous morphology and a flat interface.
- the insulating layer typically consists of alumina (AI 2 O 3 ) or magnesium oxide (MgO).
- the reference layer can itself consist of several layers as described, for instance, in US-A-5583725 in order to form a synthetic antiferromagnetic layer.
- a double tunnel junction as described in the paper by Y. Saito et al., Journal of Magnetism and Magnetic Materials Vol.223 (2001), p. 293, can also be used.
- the storage layer is sandwiched between two thin insulating layers with two reference layers located on each opposite sides of the thin insulating layers.
- Fig. 1 shows a memory cell 1 of a conventional MTJ based MRAM where a junction 2, comprising a storage layer 21, an insulating layer 22 and a reference layer 23, is placed between a selection CMOS transistor 3 and a word current line 4.
- a bit current line 5 is placed orthogonal with the word current line 4.
- Electrical currents are typically short current pulses from 2 to 5 nanoseconds having a magnitude on the order of 10 mA.
- An additional control current line 6 is intended to control the opening or the closing of the transistor 3 in order to address each memory cell individually.
- the transistor 3 is in the blocked mode (OFF) and no current flows through the junction 2.
- the intensity of the current pulses and their synchronization are adjusted so that only the magnetization of the storage layer 21 located at the crossing of the two current lines can switch, under the combined effect of the word and bit magnetic fields 41 and 51.
- the transistor 3 is in the saturated mode (ON) and a junction current will flows through the junction 2 allowing the measurement of the junction resistance of the memory cell 1.
- the state of the memory cell 1 is determined by comparing the measured resistance with the resistance of a reference memory cell. For example, a low junction resistance will be measured when the magnetization of the storage layer 21 is parallel to the magnetization of the reference layer 23 corresponding to a value of "0". Conversely, a magnetization of the storage layer 21, antiparallel to the magnetization of the reference layer 23, will yield a high junction resistance corresponding to a value of "1 ".
- the type of writing mechanism described above has several disadvantages.
- the reversal of the magnetization of the storage layer 21 is produced under the effect of external fields and since the reversal fields are statistically distributed, it is possible to accidentally reverse certain neighboring junctions simply by the effect of the magnetic field produced along a lower or upper word or bit current line 4, 5.
- the number of addressing errors may be high.
- the reduction in the memory cells size will lead to an increase in the value of the individual reversal field and require a higher current to write memory cells, increasing the circuit consumption. Consequently, the writing mode using two current lines limits the integration density.
- thermally assisted writing process described in US2005002228 and represented in figure 2.
- the particularity of the junction 2 of such thermally assisted MRAM is that both the reference layer 23 and the storage layer 21 are exchange biased. More precisely, the reference and storage layers 23, 21 are pinned by interaction with an adjacent antiferromagnetic reference layer 24 and antiferromagnetic storage layer 21 b respectively, where the blocking temperature T B s of the antiferromagnetic storage layer 21 b is smaller than the blocking temperature T BR of the antiferromagnetic reference layer 24.
- a junction current pulse 31 having a magnitude comprised between 10 5 A/cm 2 and 10 7 A/cm 2 and lasting several nanoseconds is sent through a connecting current line 7 and the junction 2 (with transistor ON), rising the temperature of the junction to about 120 to 200°C, lying between T B s and T BR where the magnetic coupling between the ferromagnetic storage layer 21 and antiferromagnetic storage layer 21 b disappears.
- the junction 2 is then cooled while a moderate word magnetic field 41 is applied by flowing a current in the word current line 4, allowing for the reversal of the magnetization of the storage layer 21.
- the reading process is performed by making a measurement current flow through the junction (with the transistor ON) in order to measure the junction resistance and deduces the orientation of the magnetization of the storage layer from said resistance value.
- the measurement current is lower than the one used during the writing process resulting in less heating of the junction.
- the thermally assisted MTJ based MRAM structure described above is characterized by a considerably improved thermal stability of the storage layer 21 due to the pinning of the antiferromagnetic storage layer 21 b.
- An improved writing selectivity is also achieved due to the selective heating of the memory cell to be written in comparison with the neighboring memory cells remaining at ambient temperature.
- the thermally assisted MTJ based MRAM structure also allows for a better stability in a zero magnetic field (retention) by using materials with high magnetic anisotropy at ambient temperature; a higher integration density without affecting its stability limit; and reduced power consumption during the writing process since the power required to heat the memory cell 1 is less than the one needed to generate magnetization in the conventional MTJ based MRAM structure.
- the current to be supplied in order to generate a magnetic field that is suitable for switching the storage layer magnetization i.e., in the order of 30-50 Oe, is in the mA range. This current is still too large for low power consumption applications and will also increase continuously as the cell size is reduced.
- the aim of the present invention is to provide a thermally assisted MTJ based MRAM structure with a low power consumption.
- this aim is achieved by means of the independent claim 1, process of independent claim 24 and the magnetic memory device of independent claim 31.
- junction of the present invention comprises: (i) a writing layer;
- a storage layer exchange coupled by a low blocking temperature antiferromagnetic layer (iii) a storage layer exchange coupled by a low blocking temperature antiferromagnetic layer; (iii) a reference layer exchange coupled by a high blocking temperature antiferromagnetic layer; where the writing layer is made of a ferrimagnetic 3d-4f amorphous alloy, preferably an alloy containing Co or Fe with Gd, Sm, or Tb such as, for example, GdCo, SmCo or TbFeCo.
- the storage layer comprises a ferromagnetic storage layer exchange-coupled by an antiferromagnetic storage layer, characterized by a low blocking temperature.
- the reference layer comprises a non-ferromagnetic reference layer inserted between a first and second ferromagnetic reference layers, and a pinning antiferromagnetic layer characterized by a high blocking temperature.
- the writing process is performed by combining the heating of the junction using a junction current pulse, with the magnetostatic field generated by the net magnetization of the writing layer in order to reverse the magnetization of the storage layer.
- heating the junction allows the decrease in the reversal field of the ferromagnetic storage layer.
- the thermally-assisted MTJ based MRAM of the invention avoids the use of the word and bit current lines and consequently, has significantly lower power consumption and can be more easily scaled down in comparison with conventional and thermally-assisted MTJ based MRAM of the prior art.
- the proposed writing process is independent of switching fields range as it is the case when word and bit current lines are used, addressing errors are reduced and more reliable data writing is obtained.
- the use of the magnetostatic field generated by the magnetization of the writing layer in the writing process of the invention yields better power consumption performances due to lower current density involved and a better thermal stability of the junction due to exchange-coupling of the storage layer with the antiferromagnetic storage layer.
- Fig. 1 shows a schematic view of a magnetic tunnel junction memory cell according to the prior art.
- Fig. 2 represents a memory cell and the corresponding junction of a thermally assisted MRAM according to the prior art.
- Fig. 3 illustrates schematically a memory cell according to the present invention.
- Fig. 4 illustrates schematically a junction according to the present invention.
- Fig. 5 shows the thermal dependence of the saturation magnetization and of the coercive field Hw for the ferrimagnetic writing layer according to the present invention.
- Fig. 6 shows the thermal dependence of the saturation magnetization M s and of the reversal field H R for an exchange- coupled ferromagnetic storage layer.
- Fig. 7 Shows a complete writing procedure cycle of the thermally assisted MTJ based MRAM of the present invention
- a memory cell 1 of the present invention is represented in Fig. 3 where a junction 2 is placed between a selection CMOS transistor 3 and a connecting current line 7 for passing a junction current pulse 31 flowing through the junction 2 when the transistor 3 is ON.
- a control current line 6 is used to control the opening and the closing of the transistor 3 in order to address each memory cell individually.
- the junction contains a storage layer 21 preferably comprising a ferromagnetic storage layer 21a and an antiferromagnetic storage layer 21 b.
- the ferromagnetic storage layer 21a has a thickness of the order of 1 to 10nm and is made of a material having a planar magnetization, typically selected from the group Permalloy (Ni 8 oFe 2 o), Co 90 Fei 0 or other alloys containing Fe, Co or Ni.
- the ferromagnetic storage layer 21a is exchange- coupled by the antiferromagnetic storage layer 21 b made of a manganese- based alloy, for example, of IrMn or FeMn.
- the antiferromagnetic storage layer 21 b has a blocking temperature T B s sufficiently high to ensure that at standby temperature, i.e., in the absence of heating, magnetization of the ferromagnetic storage layer 21a is sufficiently pinned to be able to preserve its magnetization over a period of several years but not so high as to make it necessary to heat the junction excessively during every the writing process that could yield to material degradation and high power consumption.
- T B s in the range of, for example, 120 to 220°C is suitable.
- the junction 2 also contains a reference layer 23 preferably comprising a first ferromagnetic reference layer 23a and a second ferromagnetic reference layer 23c, both formed of a Fe, Co or Ni based alloy.
- the two ferromagnetic reference layers 23a, 23c are antiferromagnetically coupled by inserting between them a non- ferromagnetic reference layer 23b made, for example, of ruthenium.
- the antiferromagnetic reference layer 24 orients the magnetic moment of the first ferromagnetic reference layer 23a, and a pinning field is generated that fixes the magnetic moment of the second ferromagnetic reference layer 23c.
- the reference layer structure described above is well known in the state of the art under the name of synthetic antiferromagnet pinned layer.
- An insulating layer 22 playing the role of a tunnel barrier and preferably made of a material selected from the group comprising AI 2 O 3 and MgO is inserted between the storage layer 21 and the reference layer 23.
- the tunneling resistance of a junction depends exponentially on the insulating layer thickness and is measured by the resistance-area product (RA) of the junction.
- the RA must sufficiently small in order to flow a current through the junction which is sufficiently high to raise the temperature of the antiferromagnetic storage layer 21 b above its blocking temperature T B s.
- the RA value In order to force a current density in the range of 10 5 A/cm 2 to 10 7 A/cm 2 , typically required to raise the temperature of the junction up to 100 0 C, the RA value should be of the order of 1 to 500 ⁇ . ⁇ m 2 .
- a writing layer 8 is inserted to the junction 2, on top of the storage layer 21 and can be separated from it by a non-magnetic spacer layer 9.
- the writing layer 8 is preferentially made of a ferrimagnetic 3d-4f amorphous alloy by choosing the adequate elements and relative compositions between a 3d transition metal and a 4f rare-earth material.
- ferrimagnetic layers used in MRAM devices are described in documents US-B 1-6385082, US-A1 -2005040433 and US-B2- 7129555 for purposes different that the ones of the present invention.
- the net magnetization of the writing layer 8 can be decomposed in a first contribution originating from the sub-lattice of 3d transition metals atoms and a second contribution originating from the sub-lattice of 4f rare-earth atoms.
- the net magnetization corresponds to the vectorial sum of the two sub-lattice magnetization contributions.
- Fig. 5 shows the thermal dependence of the absolute values of saturation magnetization M 3 d for the 3d contribution and M 4 f for the 4f contribution as well as the net magnetization MJO T of the writing layer 8.
- the corresponding coercive field Hw is also shown.
- both magnetization contributions M 4 f and M 3 d are equal and the total saturation magnetization M T o ⁇ is null, corresponding to both 3d and 4f sub-lattices being oriented antiparallel.
- Fig. 5 shows, the net magnetization direction is dominated by the 4f contribution at temperatures below TCO MP , and, conversely, is dominated by the 3d metal contribution at temperatures above TCO MP - AS the temperature is increased at or above the Curie temperature T C w ⁇ f the writing layer 8, thermal fluctuations are such that the net magnetization becomes zero and the material is purely paramagnetic.
- the thermal dependence of the saturation magnetization M s and of the reversal field H R of the exchange-coupled ferromagnetic storage layer 21 a is represented in Fig. 6.
- the exchange coupling of the ferromagnetic storage layer 21 a with the antiferromagnetic storage layer 21 b disappears resulting in a smaller reversal field H R .
- the corresponding magnetization of the ferromagnetic storage layer 21 a and the antiferromagnetic storage layer 21 b is shown schematically on the figure.
- the writing process is achieved by combining the heating of the junction 2 using a current pulse having a magnitude of the order of 10 5 A/cm 2 to 10 7 A/cm 2 and lasting less than 100 ns, and reversing the magnetization of the storage layer 21 through the magnetostatic interaction occurring between the net magnetization M JOT of the writing layer 8 and the ferromagnetic storage layer 21 a.
- the reversal of the exchange coupling direction of the antiferromagnetic storage layer 21 b is facilitated at a junction temperature above T B s where the exchange coupling of the ferromagnetic storage layer 21 a with the antiferromagnetic storage layer 21 b disappears and the reversal field H R of the is ferromagnetic storage layer 21a become smaller as discussed above.
- the reversal of the magnetization of the antiferromagnetic storage layer 21 b can be further facilitated by placing the writing layer 8 in the vicinity of the ferromagnetic storage layer 21 a in order to increase the magnetostatic interaction.
- the thickness and composition of the writing layer 8 are optimized in order to obtain a writing layer 8 having a high stability in temperature and generating a large magnetostatic field when cycled in temperature.
- the writing layer 8 is 10 to 100 nm in thickness and is composed of an alloy containing Co or Fe with Gd, Sm, or Tb such as, for example, GdCo, SmCo or TbFeCo.
- a complete writing process cycle of the thermally assisted MTJ based MRAM of the present invention is represented schematically in Fig. 7. More particularly, the figure shows the thermal dependence of the saturation magnetization Ms and of the coercive field Hw and reversal field H R of the writing layer 8 and storage layer 21 respectively.
- the corresponding magnetization states of the writing layer 8 and storage layer 21 are also illustrated schematically on the right hand side of Fig. 7, where the curved arrows represent the magnetostatic interaction field occurring between the writing layer 8 and the ferromagnetic storage layer 21a.
- TCO MP of the writing layer 8 is higher than the blocking temperature T B s of the antiferromagnetic storage layer 21 b.
- Step 1 initial step - In the initial state, no current flows through the junction and the junction is at standby temperature Ti. At this temperature well below T B s, the net magnetization of the writing layer 8 is dominated by the orientation of the 4f contribution and is oriented antiparallel with respect to the magnetization of the antiferromagnetic storage layer 21 b due to magnetostatic interactions.
- Step 2 reversal of the writing layer 3d magnetization -
- a junction current pulse 31 is sent through the junction 2 in order to heat the junction 2 to a temperature T 2 lying above T B s of the antiferromagnetic storage layer 21 b and TCO MP of the writing layer 8, but below the Curie temperature of the two respective layers.
- T 2 the net magnetization of the writing layer 8 corresponds to the sole 3d contribution that has its magnetization direction reversed by 180° compared to its direction the initial step in order to become antiparallel with the magnetization of the ferromagnetic layer 21a.
- Step 3 reversal of the writing layer 4f magnetization -
- T 3 temperature
- TCO MP temperature
- T B temperature
- the 4f contribution of the writing layer magnetization reappears in a reversed direction compared to the initial step in order to be antiparallel with the 3d contribution.
- T 3 the 3d and 4f magnetization contributions are rotated by 180° in respect to their orientations in the initial step.
- Step 4 reversal of the ferromagnetic storage layer magnetization
- Step 5 final step - By further decreasing the temperature to T 5 , below T B s, the magnetization of the ferromagnetic layer 21a becomes frozen in the antiparallel reversed direction of step 4.
- the magnetization of the ferromagnetic storage layer 21a and the net magnetization of the writing layer 8 are rotated by 180° in respect to their respective orientations in the initial step.
- the direction of the ferromagnetic storage layer 21a magnetization will be reversed for each complete writing cycle (from the initial step to final step), independent of the initial magnetization direction of the ferromagnetic storage layer 21a. Consequently, a "read before write” step is required prior to each writing cycle in order to sense the initial state of the memory cell and deduce its logic state.
- At least one thermal barrier layer (not shown) made typically of BiTe or GeSbTe and having a very low thermal conductivity can be added at the top and at the bottom of the junction 2.
- the purpose of these additional layers is to increase the heating efficiency of the current flowing through the junction while limiting the diffusion of the heat towards the electrode (not shown) ensuring the electrical connection between the junction 2 and the connecting current line 7.
- the thermal barrier itself is electrically connected to the electrode directly or via a conductive layer, for example made of TiN or TiWN.
- a magnetic memory device (not represented) can be formed by assembling a matrix comprising a plurality of memory cells 1 of the invention, where each junction 2 of each memory cell 1 is connected on the side of the writing layer 8 to a connecting current line 7 and on the opposite side to the control current line 6 placed perpendicular with the connecting current line 7.
- a current pulse is sent in one or several control lines 6 in order to put at least one of the transistors 3 of the corresponding control lines 6 in mode ON, and a junction current pulse 31 is sent to each connecting lines 7 corresponding to the memory cells to be written, i.e., the memory cells placed at the intersection of the active connecting current lines 7 and active control lines 6.
Abstract
The present invention concerns a magnetic memory of MRAM type with a thermally-assisted writing procedure in which every memory cell (1) comprises a magnetic tunnel junction (2) comprising a magnetic storage layer (21) in which the data will be written; a reference layer (23), the magnetization of which is always substantially in the same direction at any time of operation; and an insulating layer (22) inserted between the reference layer (23) and the storage layer (21); characterized by a writing layer (8) added on top of the storage layer (21). The writing process is performed by combining the heating of the junction (2) using a junction current pulse (31) with a magnetostatic field generated by the net magnetization of the writing layer (8) in order to reverse the magnetization of the storage layer (21).
Description
Magnetic memory with a thermally assisted writing procedure
Field of the invention
The present invention relates to the field of magnetic memories, especially non-volatile random-access magnetic memories used to store and read data in electronic systems. More particularly, it relates to Magnetic Random Access Memories, referred to as MRAM, based on magnetic tunnel junctions and an improvement of the junction and writing process used in a tunnel junction based MRAM using a thermally assisted write scheme.
Description of related art
Magnetic memories MRAM have been the object of a renewed interest with the discovery of magnetic tunnel junctions (MTJ) having a strong magnetoresistance at ambient temperature. These magnetic random access memories present many advantages such as speed (a few nanoseconds of duration of writing and reading), non volatility, and insensitivity to ionizing radiations. Consequently, they are increasingly replacing memory that uses more conventional technology based on the charge state of a capacitor (DRAM, SRAM, FLASH).
In conventional MTJ based MRAM, the memory cell consists of an element having a junction consisting of a stack of several alternatively magnetic and non-magnetic metallic layers. Examples of conventional MTJ based MRAM devices are described in US-A-5640343. In their simplest forms, junctions of MTJ based MRAM are made of two magnetic layers of different coercivity separated by an insulating thin layer where the first layer, the reference layer, is characterized by a fixed magnetization and the second layer, the storage layer, is characterized by a magnetization which direction can be changed. When the respective magnetizations of the reference layers and the storage layer are antiparallel, the resistance of the junction is high. On the other hand, when the respective magnetizations are parallel, the resistance becomes low.
Preferentially, the reference layer and the storage layer are made of 3d metals such as Fe, Co or Ni or their alloys. Eventually, boron can be added in the layer composition in order obtain an amorphous morphology and a flat interface. The insulating layer typically consists of alumina (AI2O3) or magnesium oxide (MgO). Preferentially, the reference layer can itself consist of several layers as described, for instance, in US-A-5583725 in order to form a synthetic antiferromagnetic layer. A double tunnel junction as described in the paper by Y. Saito et al., Journal of Magnetism and Magnetic Materials Vol.223 (2001), p. 293, can also be used. In this case, the storage layer is sandwiched between two thin insulating layers with two reference layers located on each opposite sides of the thin insulating layers.
Fig. 1 shows a memory cell 1 of a conventional MTJ based MRAM where a junction 2, comprising a storage layer 21, an insulating layer 22 and a reference layer 23, is placed between a selection CMOS transistor 3 and a word current line 4. A bit current line 5 is placed orthogonal with the word current line 4. When electrical currents flow in the word and bit current lines 4, 5, the word and bit magnetic fields 41 and 51 are respectively produced. Electrical currents are typically short current pulses from 2 to 5 nanoseconds having a magnitude on the order of 10 mA. An additional control current line 6 is intended to control the opening or the closing of the transistor 3 in order to address each memory cell individually.
During the writing process, the transistor 3 is in the blocked mode (OFF) and no current flows through the junction 2. The intensity of the current pulses and their synchronization are adjusted so that only the magnetization of the storage layer 21 located at the crossing of the two current lines can switch, under the combined effect of the word and bit magnetic fields 41 and 51.
During the reading process, the transistor 3 is in the saturated mode (ON) and a junction current will flows through the junction 2 allowing the measurement of the junction resistance of the memory cell 1. The state of the memory cell 1 is determined by comparing the measured resistance with the resistance of a reference memory cell. For example, a
low junction resistance will be measured when the magnetization of the storage layer 21 is parallel to the magnetization of the reference layer 23 corresponding to a value of "0". Conversely, a magnetization of the storage layer 21, antiparallel to the magnetization of the reference layer 23, will yield a high junction resistance corresponding to a value of "1 ".
The basic structure of this type of conventional MTJ based MRAM is described in details in US-A-4949039 and US-A-5159513 while US-A- 5343422 is concerned with the implementation of a random-access memory (RAM) based on a MTJ based MRAM structure.
The type of writing mechanism described above has several disadvantages. In particular since the reversal of the magnetization of the storage layer 21 is produced under the effect of external fields and since the reversal fields are statistically distributed, it is possible to accidentally reverse certain neighboring junctions simply by the effect of the magnetic field produced along a lower or upper word or bit current line 4, 5. For high density memories with memory cells having submicronic dimensions, the number of addressing errors may be high. The reduction in the memory cells size will lead to an increase in the value of the individual reversal field and require a higher current to write memory cells, increasing the circuit consumption. Consequently, the writing mode using two current lines limits the integration density.
An improvement with respect to the above MTJ based MRAM structure is the thermally assisted writing process described in US2005002228 and represented in figure 2. The particularity of the junction 2 of such thermally assisted MRAM is that both the reference layer 23 and the storage layer 21 are exchange biased. More precisely, the reference and storage layers 23, 21 are pinned by interaction with an adjacent antiferromagnetic reference layer 24 and antiferromagnetic storage layer 21 b respectively, where the blocking temperature TBs of the antiferromagnetic storage layer 21 b is smaller than the blocking temperature TBR of the antiferromagnetic reference layer 24.
During the thermally-assisted writing process, a junction current pulse 31 having a magnitude comprised between 105 A/cm2 and 107 A/cm2 and lasting several nanoseconds is sent through a connecting current line 7 and the junction 2 (with transistor ON), rising the temperature of the junction to about 120 to 200°C, lying between TBs and TBR where the magnetic coupling between the ferromagnetic storage layer 21 and antiferromagnetic storage layer 21 b disappears. The junction 2 is then cooled while a moderate word magnetic field 41 is applied by flowing a current in the word current line 4, allowing for the reversal of the magnetization of the storage layer 21.
The reading process is performed by making a measurement current flow through the junction (with the transistor ON) in order to measure the junction resistance and deduces the orientation of the magnetization of the storage layer from said resistance value. The measurement current is lower than the one used during the writing process resulting in less heating of the junction.
In contrast with the conventional MTJ based MRAM, the thermally assisted MTJ based MRAM structure described above is characterized by a considerably improved thermal stability of the storage layer 21 due to the pinning of the antiferromagnetic storage layer 21 b. An improved writing selectivity is also achieved due to the selective heating of the memory cell to be written in comparison with the neighboring memory cells remaining at ambient temperature. The thermally assisted MTJ based MRAM structure also allows for a better stability in a zero magnetic field (retention) by using materials with high magnetic anisotropy at ambient temperature; a higher integration density without affecting its stability limit; and reduced power consumption during the writing process since the power required to heat the memory cell 1 is less than the one needed to generate magnetization in the conventional MTJ based MRAM structure.
However, with the thermally assisted MTJ based MRAM described above, the current to be supplied in order to generate a magnetic field that is suitable for switching the storage layer magnetization, i.e., in the order
of 30-50 Oe, is in the mA range. This current is still too large for low power consumption applications and will also increase continuously as the cell size is reduced.
Alternative thermally assisted MTJ based MRAM structures avoiding the use of current word and bit lines by using a spin polarized current for the switching of the magnetization of the storage layer have been proposed in US-A-20050104101, US-B2-6603677 and US-B2-6532164. The solutions proposed however are still not suitable for low-power applications and cannot guarantee the stability of the information for long time while preserving a reasonable low aspect ratio of the memory cell.
Brief summary of the invention
The aim of the present invention is to provide a thermally assisted MTJ based MRAM structure with a low power consumption.
According to the invention, this aim is achieved by means of the independent claim 1, process of independent claim 24 and the magnetic memory device of independent claim 31.
This aim is also achieved by a junction comprising a writing layer placed in the vicinity of the storage layer. More particularly, the junction of the present invention comprises: (i) a writing layer;
(ii) a storage layer exchange coupled by a low blocking temperature antiferromagnetic layer; (iii) a reference layer exchange coupled by a high blocking temperature antiferromagnetic layer; where the writing layer is made of a ferrimagnetic 3d-4f amorphous alloy, preferably an alloy containing Co or Fe with Gd, Sm, or Tb such as, for example, GdCo, SmCo or TbFeCo.
In a preferred embodiment of the invention, the storage layer comprises a ferromagnetic storage layer exchange-coupled by an
antiferromagnetic storage layer, characterized by a low blocking temperature. The reference layer comprises a non-ferromagnetic reference layer inserted between a first and second ferromagnetic reference layers, and a pinning antiferromagnetic layer characterized by a high blocking temperature.
According to the invention, the writing process is performed by combining the heating of the junction using a junction current pulse, with the magnetostatic field generated by the net magnetization of the writing layer in order to reverse the magnetization of the storage layer. Here, heating the junction allows the decrease in the reversal field of the ferromagnetic storage layer.
The thermally-assisted MTJ based MRAM of the invention avoids the use of the word and bit current lines and consequently, has significantly lower power consumption and can be more easily scaled down in comparison with conventional and thermally-assisted MTJ based MRAM of the prior art. In addition, since the proposed writing process is independent of switching fields range as it is the case when word and bit current lines are used, addressing errors are reduced and more reliable data writing is obtained.
In contrast with the writing process using a spin polarized current in thermally-assisted MTJ based MRAM, the use of the magnetostatic field generated by the magnetization of the writing layer in the writing process of the invention yields better power consumption performances due to lower current density involved and a better thermal stability of the junction due to exchange-coupling of the storage layer with the antiferromagnetic storage layer.
Brief Description of the Drawings
The invention will be better understood with the aid of the description of an embodiment given by way of example and illustrated by the figures, in which:
Fig. 1 shows a schematic view of a magnetic tunnel junction memory cell according to the prior art.
Fig. 2 represents a memory cell and the corresponding junction of a thermally assisted MRAM according to the prior art. Fig. 3 illustrates schematically a memory cell according to the present invention.
Fig. 4 illustrates schematically a junction according to the present invention.
Fig. 5 shows the thermal dependence of the saturation magnetization and of the coercive field Hw for the ferrimagnetic writing layer according to the present invention.
Fig. 6 shows the thermal dependence of the saturation magnetization Ms and of the reversal field HR for an exchange- coupled ferromagnetic storage layer. Fig. 7 Shows a complete writing procedure cycle of the thermally assisted MTJ based MRAM of the present invention
Detailed Description of possible embodiments of the Invention
A memory cell 1 of the present invention is represented in Fig. 3 where a junction 2 is placed between a selection CMOS transistor 3 and a connecting current line 7 for passing a junction current pulse 31 flowing through the junction 2 when the transistor 3 is ON. A control current line 6 is used to control the opening and the closing of the transistor 3 in order to address each memory cell individually.
A close view on the junction 2 of the present invention is given in Fig. 4. The junction contains a storage layer 21 preferably comprising a ferromagnetic storage layer 21a and an antiferromagnetic storage layer 21 b. The ferromagnetic storage layer 21a has a thickness of the order of 1 to 10nm and is made of a material having a planar magnetization, typically
selected from the group Permalloy (Ni8oFe2o), Co90Fei0or other alloys containing Fe, Co or Ni. The ferromagnetic storage layer 21a is exchange- coupled by the antiferromagnetic storage layer 21 b made of a manganese- based alloy, for example, of IrMn or FeMn. The antiferromagnetic storage layer 21 b has a blocking temperature TBs sufficiently high to ensure that at standby temperature, i.e., in the absence of heating, magnetization of the ferromagnetic storage layer 21a is sufficiently pinned to be able to preserve its magnetization over a period of several years but not so high as to make it necessary to heat the junction excessively during every the writing process that could yield to material degradation and high power consumption. Here, a TBs in the range of, for example, 120 to 220°C is suitable.
The junction 2 also contains a reference layer 23 preferably comprising a first ferromagnetic reference layer 23a and a second ferromagnetic reference layer 23c, both formed of a Fe, Co or Ni based alloy. The two ferromagnetic reference layers 23a, 23c are antiferromagnetically coupled by inserting between them a non- ferromagnetic reference layer 23b made, for example, of ruthenium. An antiferromagnetic reference layer 24, preferably formed of a Mn based alloy such as PtMn or NiMn and characterized by a blocking temperature TBR higher than TBs, is provided below the second ferromagnetic reference layer 23c. The antiferromagnetic reference layer 24 orients the magnetic moment of the first ferromagnetic reference layer 23a, and a pinning field is generated that fixes the magnetic moment of the second ferromagnetic reference layer 23c. The reference layer structure described above is well known in the state of the art under the name of synthetic antiferromagnet pinned layer.
An insulating layer 22 playing the role of a tunnel barrier and preferably made of a material selected from the group comprising AI2O3 and MgO is inserted between the storage layer 21 and the reference layer 23. The tunneling resistance of a junction depends exponentially on the insulating layer thickness and is measured by the resistance-area product (RA) of the junction. The RA must sufficiently small in order to flow a
current through the junction which is sufficiently high to raise the temperature of the antiferromagnetic storage layer 21 b above its blocking temperature TBs. In order to force a current density in the range of 105A/cm2 to 107A/cm2, typically required to raise the temperature of the junction up to 1000C, the RA value should be of the order of 1 to 500 Ω.μm2.
According to the present invention, a writing layer 8 is inserted to the junction 2, on top of the storage layer 21 and can be separated from it by a non-magnetic spacer layer 9. The writing layer 8 is preferentially made of a ferrimagnetic 3d-4f amorphous alloy by choosing the adequate elements and relative compositions between a 3d transition metal and a 4f rare-earth material. Such ferrimagnetic layers used in MRAM devices are described in documents US-B 1-6385082, US-A1 -2005040433 and US-B2- 7129555 for purposes different that the ones of the present invention.
The net magnetization of the writing layer 8 can be decomposed in a first contribution originating from the sub-lattice of 3d transition metals atoms and a second contribution originating from the sub-lattice of 4f rare-earth atoms. The net magnetization corresponds to the vectorial sum of the two sub-lattice magnetization contributions. Fig. 5 shows the thermal dependence of the absolute values of saturation magnetization M3d for the 3d contribution and M4f for the 4f contribution as well as the net magnetization MJOT of the writing layer 8. The corresponding coercive field Hw is also shown. When the writing layer (8) is at the compensation temperature TCOMP, both magnetization contributions M4f and M3d are equal and the total saturation magnetization MToτ is null, corresponding to both 3d and 4f sub-lattices being oriented antiparallel. This corresponds to a coercive field Hw increasing theoretically to infinite. As Fig. 5 shows, the net magnetization direction is dominated by the 4f contribution at temperatures below TCOMP, and, conversely, is dominated by the 3d metal contribution at temperatures above TCOMP- AS the temperature is increased at or above the Curie temperature TCwθf the writing layer 8, thermal fluctuations are such that the net magnetization becomes zero and the material is purely paramagnetic.
The thermal dependence of the saturation magnetization Ms and of the reversal field HR of the exchange-coupled ferromagnetic storage layer 21 a is represented in Fig. 6. At temperatures equal or greater than the blocking temperature TBs of the antiferromagnetic storage layer 21 b, the exchange coupling of the ferromagnetic storage layer 21 a with the antiferromagnetic storage layer 21 b disappears resulting in a smaller reversal field HR. The corresponding magnetization of the ferromagnetic storage layer 21 a and the antiferromagnetic storage layer 21 b is shown schematically on the figure.
According to the present invention, the writing process is achieved by combining the heating of the junction 2 using a current pulse having a magnitude of the order of 105A/cm2 to 107A/cm2 and lasting less than 100 ns, and reversing the magnetization of the storage layer 21 through the magnetostatic interaction occurring between the net magnetization MJOT of the writing layer 8 and the ferromagnetic storage layer 21 a. The reversal of the exchange coupling direction of the antiferromagnetic storage layer 21 b is facilitated at a junction temperature above TBs where the exchange coupling of the ferromagnetic storage layer 21 a with the antiferromagnetic storage layer 21 b disappears and the reversal field HR of the is ferromagnetic storage layer 21a become smaller as discussed above. The reversal of the magnetization of the antiferromagnetic storage layer 21 b can be further facilitated by placing the writing layer 8 in the vicinity of the ferromagnetic storage layer 21 a in order to increase the magnetostatic interaction.
In one embodiment of the invention, the thickness and composition of the writing layer 8 are optimized in order to obtain a writing layer 8 having a high stability in temperature and generating a large magnetostatic field when cycled in temperature. Here, for example, the writing layer 8 is 10 to 100 nm in thickness and is composed of an alloy containing Co or Fe with Gd, Sm, or Tb such as, for example, GdCo, SmCo or TbFeCo.
A complete writing process cycle of the thermally assisted MTJ based MRAM of the present invention is represented schematically in Fig. 7. More particularly, the figure shows the thermal dependence of the saturation magnetization Ms and of the coercive field Hw and reversal field HR of the writing layer 8 and storage layer 21 respectively. The corresponding magnetization states of the writing layer 8 and storage layer 21 are also illustrated schematically on the right hand side of Fig. 7, where the curved arrows represent the magnetostatic interaction field occurring between the writing layer 8 and the ferromagnetic storage layer 21a.
The different writing process steps are described below. The different steps are identified in the figure by the circled numeral. In the present example, TCOMP of the writing layer 8 is higher than the blocking temperature TBs of the antiferromagnetic storage layer 21 b.
Step 1, initial step - In the initial state, no current flows through the junction and the junction is at standby temperature Ti. At this temperature well below TBs, the net magnetization of the writing layer 8 is dominated by the orientation of the 4f contribution and is oriented antiparallel with respect to the magnetization of the antiferromagnetic storage layer 21 b due to magnetostatic interactions.
Step 2, reversal of the writing layer 3d magnetization - A junction current pulse 31 is sent through the junction 2 in order to heat the junction 2 to a temperature T2 lying above TBs of the antiferromagnetic storage layer 21 b and TCOMP of the writing layer 8, but below the Curie temperature of the two respective layers. At T2, the net magnetization of the writing layer 8 corresponds to the sole 3d contribution that has its magnetization direction reversed by 180° compared to its direction the initial step in order to become antiparallel with the magnetization of the ferromagnetic layer 21a.
Step 3, reversal of the writing layer 4f magnetization - When the junction 2 temperature is decreased at a temperature T3, lower than TCOMP of the writing layer 8 but higher than TBs, the 4f contribution of the writing
layer magnetization reappears in a reversed direction compared to the initial step in order to be antiparallel with the 3d contribution. At T3, the 3d and 4f magnetization contributions are rotated by 180° in respect to their orientations in the initial step.
Step 4, reversal of the ferromagnetic storage layer magnetization
- As the temperature is decreased to T4, slightly above TBs, the 4f magnetization contribution of the writing layer 8 becomes large enough to induce magnetostatic interactions, able to reverse the magnetization of the ferromagnetic storage layer 21a in a direction antiparallel in respect to the net magnetization of the writing layer 8.
Step 5, final step - By further decreasing the temperature to T5, below TBs, the magnetization of the ferromagnetic layer 21a becomes frozen in the antiparallel reversed direction of step 4. In this final step, the magnetization of the ferromagnetic storage layer 21a and the net magnetization of the writing layer 8 are rotated by 180° in respect to their respective orientations in the initial step.
As can be seen from the writing process steps described above, the direction of the ferromagnetic storage layer 21a magnetization will be reversed for each complete writing cycle (from the initial step to final step), independent of the initial magnetization direction of the ferromagnetic storage layer 21a. Consequently, a "read before write" step is required prior to each writing cycle in order to sense the initial state of the memory cell and deduce its logic state.
It is understood that the present invention is not limited to the exemplary embodiments described above and other examples of implementations are also possible within the scope of the patent claims.
For example, in another embodiment of the invention, at least one thermal barrier layer (not shown) made typically of BiTe or GeSbTe and having a very low thermal conductivity can be added at the top and at the bottom of the junction 2. The purpose of these additional layers is to
increase the heating efficiency of the current flowing through the junction while limiting the diffusion of the heat towards the electrode (not shown) ensuring the electrical connection between the junction 2 and the connecting current line 7. Here, the thermal barrier itself is electrically connected to the electrode directly or via a conductive layer, for example made of TiN or TiWN.
A magnetic memory device (not represented) can be formed by assembling a matrix comprising a plurality of memory cells 1 of the invention, where each junction 2 of each memory cell 1 is connected on the side of the writing layer 8 to a connecting current line 7 and on the opposite side to the control current line 6 placed perpendicular with the connecting current line 7. When one of the memory cells 1 is to be written, a current pulse is sent in one or several control lines 6 in order to put at least one of the transistors 3 of the corresponding control lines 6 in mode ON, and a junction current pulse 31 is sent to each connecting lines 7 corresponding to the memory cells to be written, i.e., the memory cells placed at the intersection of the active connecting current lines 7 and active control lines 6.
Reference Numbers
1 Memory cell
2 Junction
21 Storage layer
21 a ferromagnetic storage layer
21 b antiferromagnetic storage layer
22 Insulating layer
23 Reference layer
23a First ferromagnetic reference layer
23b Non-ferromagnetic reference layer
23c Second ferromagnetic reference layer
24 Antiferromagnetic reference layer
3 Transistor
31 Junction current pulse
4 Word current line
41 Word magnetic field
5 Bit current line
51 Bit magnetic field
6 Control current line
7 Connecting current line
8 Writing layer
9 Non-magnetic spacer layer
Reference Symbols
HR Reversal field of the ferromagnetic storage layer
Hw Coercive field of the writing layer M3d Magnetization contribution of the 3d sub-lattice
M4f Magnetization contribution of the 4f sub-lattice
Ms Saturation magnetization
MTOT Net magnetization
TBS Blocking temperature of the antiferromagnetic storage layer TBR Blocking temperature of the antiferromagnetic reference layer
TcoMP Compensation temperature
Tcs Curie temperature of the antiferromagnetic storage layer
Tew Curie temperature of the writing layer
Ti Temperature at step 1 (standby temperature) T2 Temperature at step 2
T3 Temperature at step 3
T4 Temperature at step 4
T5 Temperature at step 5
Claims
1. A magnetic memory of MRAM type with a thermally-assisted writing procedure in which every memory cells comprises a magnetic tunnel junctions (MTJ), each junction comprising:
(i) a magnetic storage layer (21) in which the data will be written; (ii) a reference layer (23), the magnetization of which is always substantially in the same direction at any time of process;
(iii) an insulating layer (22) inserted between the reference layer (23) and the storage layer (21), characterized by;
(iv) a writing layer (8) made of a ferrimagnetic 3d-4f amorphous alloy, inserted in the vicinity of the storage layer (21) and comprising a first magnetization contribution originating from the sub-lattice of 3d transition metals atoms and a second magnetization contribution originating from the sub-lattice of 4f rare-earth atoms.
2. A magnetic memory according to claim 1, where the writing layer (8) is located on top of the storage layer (21 ).
3. A magnetic memory according to claims 1 or 2, where the magnetization of the writing layer (8) is dominated by the 4f contribution at temperatures of the writing layer (8) below a compensation temperature TCOMP, and dominated by the 3d metal contribution at temperatures above TCOMP-
4. A magnetic memory according to any of the claims 1 to 3, where the writing layer (8) is made of an alloy containing Co or Fe with Gd, Sm, or Tb.
5. A magnetic memory according to any of the claims 1 to 4, where the writing layer (8) is composed of GdCo, SmCo or TbFeCo.
6. A magnetic memory according to any of the claims 1 to 5, where the writing layer (8) has a thickness of 10 to 100 ns.
7. A magnetic memory according to any of the claims 1 to 6, where a non-magnetic spacer layer (9) is inserted between the writing layer (8) and the storage layer (21).
8. A magnetic memory according to any of the claims 1 to 7, where the storage layer (21) comprises a ferromagnetic storage layer (21a) and an antiferromagnetic storage layer (21 b).
9. A magnetic memory according to claim 8, where the ferromagnetic storage layer (21 a) is made of a ferromagnetic material selected from the group comprising Permalloy (Ni8oFe2o), Co90Fei0 or other magnetic alloys containing Fe, Co or Ni.
10. A magnetic memory according to claims 8 or 9, where the ferromagnetic storage layer (21 a) has a thickness of the order 1 to 10nm.
1 1. A magnetic memory according to any of the claims 1 to 10, where the antiferromagnetic storage layer (21 b) is made of a manganese- based alloy.
12. A magnetic memory according to claim 1 1, where the antiferromagnetic storage layer (21 b) is made of IrMn or FeMn.
13. A magnetic memory according to the claims 1 1 or 12, where the antiferromagnetic storage layer (21 b) has a moderate blocking temperature (TBS) from 120 to 2200C.
14. A magnetic memory according to any of the claims 1 to 13, where the reference layer (23) comprises a first ferromagnetic reference layer (23a) and a second ferromagnetic reference layer (23c) antiferromagnetically coupled by inserting between them a non- ferromagnetic reference layer (23b).
15. A magnetic memory according to claim 14, where the ferromagnetic reference layers (23a, 23c) are made of a Fe, Co or Ni based alloy.
16. A magnetic memory according to the claims 14 or 15, where one of the ferromagnetic reference layer (23a) or (23c) is pinned by an antiferromagnetic reference layer (24).
17. A magnetic memory according to any of the claims 1 to 16, where the antiferromagnetic reference layer (24) is made of manganese- based alloy.
18. A magnetic memory according to claim 17, where the antiferromagnetic reference layer (24) is made of PtMn or NiMn.
19. A magnetic memory according to the claims 17 to 18, where the antiferromagnetic reference layer (24) has blocking temperature TBR higher than TBS.
20. A magnetic memory according to any of the claims 1 to 19, where the compensation temperature TCOMP of the writing layer (8) is higher than the blocking temperature TBs of the antiferromagnetic storage layer (21 b) and lower than the blocking temperature TBR of the reference layer (23).
21. A magnetic memory according to any of the claims 1 to 20, where the insulating layer (22) is made of a material selected from the group comprising AI2O3 or MgO.
22. A magnetic memory according to any of the claims 1 to 21, where a thermal barrier layer is added at the top and at the bottom of the junction (2).
23. A magnetic memory according to claim 22, where the thermal barrier is made of BiTe or GeSbTe.
24. A writing process of the thermally assisted magnetic memory comprising:
(a) a initial step where the net magnetization of the writing layer (8) is oriented antiparallel in respect to the magnetization of the ferromagnetic storage layer (21 a) due to magnetostatic interactions between the two layers;
(b) a second step where the magnetization of the 3d contribution of the writing layer (8) is reversed by 180° compared to its orientation in the initial step; (c) a third step where the magnetization of the 4f contribution of the writing layer (8) is reversed by 180° compared to its direction in the initial state;
(d) a fourth step where the magnetization of the ferromagnetic storage layer (21 a) is reversed by 180° compared to its direction in the initial state due to magnetostatic interactions between the ferromagnetic storage layer (21 a) and the writing layer (8);
(e) a final step where the magnetization of the ferromagnetic storage layer (21 a) and the net magnetization of the writing layer (8) reversed by 180° in respect to their respective orientations in the initial step.
25. A writing process according to claim 24, where within the initial step, the junction (2) is at standby temperature Ti.
26. A writing process according to claim 24 or 25, where within the second step, the junction (2) is heated to a temperature T2, above TBs of the antiferromagnetic storage layer (21 b) and TCOMP of the writing layer (8), but below the Curie temperature of the two respective layers.
27. A writing method according to any of the claims 24 to 26, where within the third step, the junction temperature is decreased to T3, lower than TCOMP of the writing layer (8) but higher than TBs-
28. A writing method according to any of the claims 24 to 27, where, within the fourth step, the junction temperature is decreased to T4, slightly above TBs, where the magnetization contribution of the writing layer (8) becomes large enough to induce magnetostatic interactions, able to reverse the magnetization of the ferromagnetic layer (21a).
29. A writing method according to any of the claims 24 to 28, where within the final step, the junction temperature is decreased to T5, below TBS and the magnetization of the ferromagnetic layer (21a) becomes frozen.
30. A writing method according to any of the claims 24 to 29, where the junction (2) is heated by passing a junction current pulse (31) in the junction (2).
31. A magnetic memory device comprising a matrix containing a plurality of memory cells (1) defined in any of the claims 1 to 23.
32. The magnetic memory device of claim 31, where each junction (2) of each memory cell (1) is connected on the side of the writing layer (8) to a connecting current line (7) and on the opposite side to a control current line (6) placed perpendicular with the connecting current line (7).
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EP08858835A EP2232495B1 (en) | 2007-12-13 | 2008-11-10 | Magnetic memory with a thermally assisted writing procedure |
JP2010537349A JP5586473B2 (en) | 2007-12-13 | 2008-11-10 | Magnetic memory device and method with thermal assisted writing procedure |
US12/813,549 US8102701B2 (en) | 2007-12-13 | 2010-06-11 | Magnetic memory with a thermally assisted writing procedure |
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Also Published As
Publication number | Publication date |
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TW200937415A (en) | 2009-09-01 |
JP2011507243A (en) | 2011-03-03 |
EP2232495B1 (en) | 2013-01-23 |
US8102701B2 (en) | 2012-01-24 |
JP5586473B2 (en) | 2014-09-10 |
EP2232495A1 (en) | 2010-09-29 |
US20100246254A1 (en) | 2010-09-30 |
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