WO2009041816A3 - A method of patterning a hard disk medium - Google Patents

A method of patterning a hard disk medium Download PDF

Info

Publication number
WO2009041816A3
WO2009041816A3 PCT/NL2008/050620 NL2008050620W WO2009041816A3 WO 2009041816 A3 WO2009041816 A3 WO 2009041816A3 NL 2008050620 W NL2008050620 W NL 2008050620W WO 2009041816 A3 WO2009041816 A3 WO 2009041816A3
Authority
WO
WIPO (PCT)
Prior art keywords
hard disk
patterning
disk medium
top layer
center point
Prior art date
Application number
PCT/NL2008/050620
Other languages
French (fr)
Other versions
WO2009041816A2 (en
Inventor
Jager Pieter Willem Herman De
Diederik Jan Maas
Jacob Frederik Friso Klinkhamer
Antonius Gerardus Theo Bastein
Sjoerd Oostrom
Original Assignee
Tno
Jager Pieter Willem Herman De
Diederik Jan Maas
Klinkhamer Jacob Frederik Fris
Antonius Gerardus Theo Bastein
Sjoerd Oostrom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tno, Jager Pieter Willem Herman De, Diederik Jan Maas, Klinkhamer Jacob Frederik Fris, Antonius Gerardus Theo Bastein, Sjoerd Oostrom filed Critical Tno
Publication of WO2009041816A2 publication Critical patent/WO2009041816A2/en
Publication of WO2009041816A3 publication Critical patent/WO2009041816A3/en

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855Coating only part of a support with a magnetic layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/743Patterned record carriers, wherein the magnetic recording layer is patterned into magnetic isolated data islands, e.g. discrete tracks
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82Disk carriers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/86Re-recording, i.e. transcribing information from one magnetisable record carrier on to one or more similar or dissimilar record carriers
    • G11B5/865Re-recording, i.e. transcribing information from one magnetisable record carrier on to one or more similar or dissimilar record carriers by contact "printing"

Abstract

The invention relates to a method of patterning a hard disk medium, comprising the step of applying a lithographic process to a resistive top layer of the hard disk medium, wherein the resistive top layer is exposed to a beam having multiple electron or optical beamlets. Preferably, foci of the multiple beamlets are arranged at different radial distances from a center point of the hard disk, more preferably substantially on a line extending from the center point of the hard disk to an edge of the hard disk.
PCT/NL2008/050620 2007-09-25 2008-09-25 A method of patterning a hard disk medium WO2009041816A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US97492707P 2007-09-25 2007-09-25
US60/974,927 2007-09-25

Publications (2)

Publication Number Publication Date
WO2009041816A2 WO2009041816A2 (en) 2009-04-02
WO2009041816A3 true WO2009041816A3 (en) 2009-05-22

Family

ID=39941818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2008/050620 WO2009041816A2 (en) 2007-09-25 2008-09-25 A method of patterning a hard disk medium

Country Status (1)

Country Link
WO (1) WO2009041816A2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5587223A (en) * 1992-10-19 1996-12-24 Board Of Trustees Leland Stanford, Jr. University High density magnetic information storage medium
US6133986A (en) * 1996-02-28 2000-10-17 Johnson; Kenneth C. Microlens scanner for microlithography and wide-field confocal microscopy
WO2004021083A1 (en) * 2002-08-27 2004-03-11 Obducat Ab Device for transferring a pattern to an object
US20050064297A1 (en) * 2003-09-22 2005-03-24 Koichi Wago Rotary apertured interferometric lithography (RAIL)
EP1801655A2 (en) * 2005-12-20 2007-06-27 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5587223A (en) * 1992-10-19 1996-12-24 Board Of Trustees Leland Stanford, Jr. University High density magnetic information storage medium
US6133986A (en) * 1996-02-28 2000-10-17 Johnson; Kenneth C. Microlens scanner for microlithography and wide-field confocal microscopy
WO2004021083A1 (en) * 2002-08-27 2004-03-11 Obducat Ab Device for transferring a pattern to an object
US20050064297A1 (en) * 2003-09-22 2005-03-24 Koichi Wago Rotary apertured interferometric lithography (RAIL)
EP1801655A2 (en) * 2005-12-20 2007-06-27 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CHANG, MANKOS, LEE, MURAY: "Multiple electron-beam lithography", MICROELECTRONIC ENGINEERING, vol. 57-58, September 2001 (2001-09-01), pages 117 - 135, XP002503925 *

Also Published As

Publication number Publication date
WO2009041816A2 (en) 2009-04-02

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