WO2009020801A2

WO2009020801A2 - Mems device and interconnects for same

Info

Publication number: WO2009020801A2
Application number: PCT/US2008/071498
Authority: WO
Inventors: Teruo Sasagawa
Original assignee: Qualcomm Mems Technologies, Inc.
Priority date: 2007-08-07
Filing date: 2008-07-29
Publication date: 2009-02-12
Also published as: WO2009020801A3; TWI390643B; JP2010535641A; EP2022752A2; KR20100053606A; EP2022752A3; TW200915456A; CN101772467A; US20090040590A1; US7570415B2

Abstract

A microelectromechanical systems (MEMS) device includes a substrate (20), an array region (ARRAY), and a peripheral region (INTERCONNECT). The array region (ARRAY) includes a lower electrode (16A, 16B), a movable upper electrode (14), and a cavity (19) between the lower electrode (16A, 16B) and the upper electrode (14). The peripheral region (INTERCONNECT) includes a portion of a layer forming the upper electrode (14) in the array region (ARRAY) and an electrical interconnect (58). The electrical interconnect (58) includes a conductive material (50) electrically connected to at least one of the lower electrode (16A, 16B) and the upper electrode (14). The electrical interconnect (58) is formed of a layer separate from and below the layer forming the upper electrode (14) in the array region (ARRAY). The conductive material (50) is selected from the group consisting of nickel, chromium, copper, and silver.

Description

MEMS DEVICE AND INTERCONNECTS FOR SAME

BACKGROUND Field

[0001] The field of the invention relates to microelectromechanical systems (MEMS). More specifically, the field of the invention relates to fabricating electrical interconnects for MEMS.

Description of the Related Technology

[0002] Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that remove parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.

SUMMARY OF CERTAIN EMBODIMENTS

[0003] The system, method, and devices of the invention each have several aspects, no single one of which is solely responsible for its desirable attributes. Without limiting the scope of this invention, its more prominent features will now be discussed briefly. After considering this discussion, and particularly after reading the section entitled "Detailed Description of Certain Embodiments" one will understand how the features of this invention provide advantages over other display devices.

[0004] In certain embodiments, a peripheral routing region of a microelectromechanical systems (MEMS) device comprises an electrical interconnect, a partially reflective layer, and a transparent conductor. The electrical interconnect includes a conductive layer comprising a material selected from the group consisting of nickel, copper, chromium, and silver. At least a portion of the conductive layer is directly under, directly over, or between the partially reflective layer and the transparent conductor.

[0005] In certain embodiments, a microelectromechanical systems (MEMS) device comprises a substrate, an array region, and a peripheral region. The array region comprises a lower electrode, a movable upper electrode, and a cavity between the lower electrode and the upper electrode. The peripheral region comprises a portion of a layer forming the upper electrode in the array region and an electrical interconnect. The electrical interconnect comprises a conductive material electrically connected to at least one of the lower electrode and the upper electrode. The electrical interconnect is formed of a layer separate from and below the layer forming the upper electrode in the array region. The conductive material is selected from the group consisting of nickel, chromium, copper, and silver.

[0006] In certain embodiments, a method of making a microelectromechanical systems (MEMS) device is provided. The method comprises depositing a first electrode over a substrate, patterning the first electrode layer to form a lower electrode in an array region, depositing a conductive layer over the substrate, and patterning the conductive layer to form an electrical interconnect in a peripheral region. The conductive layer comprises a material selected from the group consisting of nickel, copper, chromium, and silver. The method further comprises depositing a sacrificial layer over the lower electrode in the array region and, after patterning the conductive layer, depositing a second electrode layer over the sacrificial layer to form an upper electrode in the array region and depositing the second electrode layer over the conductive layer in the peripheral region. The electrical interconnect is electrically connected to at least one of the lower electrode and the upper electrode. The method further comprises removing the sacrificial layer in the array region.

BRIEF DESCRIPTION OF THE DRAWINGS [0007] These and other aspects of the invention will be readily apparent from the following description and from the appended drawings (not to scale), which are meant to illustrate and not to limit the invention, and wherein:

[0008] FIG. 1 is an isometric view depicting a portion of one embodiment of an interferometric modulator display in which a movable reflective layer of a first interferometric modulator is in a relaxed position and a movable reflective layer of a second interferometric modulator is in an actuated position.

[0009] FIG. 2 is a system block diagram illustrating one embodiment of an electronic device incorporating a 3x3 interferometric modulator display.

[0010] FIG. 3 is a diagram of movable mirror position versus applied voltage for one exemplary embodiment of an interferometric modulator of FIG. 1.

[0011] FIG. 4 is an illustration of a set of row and column voltages that may be used to drive an interferometric modulator display.

[0012] FIGS. 5A and 5B illustrate one exemplary timing diagram for row and column signals that may be used to write a frame of display data to the 3x3 interferometric modulator display of FIG. 2.

[0013] FIGS. 6A and 6B are system block diagrams illustrating an embodiment of a visual display device comprising a plurality of interferometric modulators.

[0014] FIG. 7 A is a cross section of the device of FIG. 1.

[0015] FIG. 7B is a cross section of an alternative embodiment of an interferometric modulator.

[0016] FIG. 7C is a cross section of another alternative embodiment of an interferometric modulator.

[0017] FIG 7D is a cross section of yet another alternative embodiment of an interferometric modulator.

[0018] FIG. 7E is a cross section of an additional alternative embodiment of an interferometric modulator.

[0019] FIGS. 8A-8L are cross sections showing a process for making an embodiment of an interferometric modulator.

[0020] FIGS. 9A-9L are cross sections showing a process for making another embodiment of an interferometric modulator.

[0021] FIGS. 10A- 1OL are cross sections showing a process for making another embodiment of an interferometric modulator. DETAILED DESCRIPTION OF CERTAIN EMBODIMENTS [0022] The following detailed description is directed to certain specific embodiments of the invention. However, the invention can be embodied in a multitude of different ways. In this description, reference is made to the drawings wherein like parts are designated with like numerals throughout. As will be apparent from the following description, the embodiments may be implemented in any device that is configured to display an image, whether in motion (e.g., video) or stationary (e.g., still image), and whether textual or pictorial. More particularly, it is contemplated that the embodiments may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry). MEMS devices of similar structure to those described herein can also be used in non-display applications such as in electronic switching devices.

[0023] According to embodiments described herein, a microelectromechanical systems (MEMS) device and method for making the device are provided. The device includes an electrical interconnect layer connected to at least one of an electrode and a movable layer (e.g., aluminum used as a reflector in an interferometric modulator) within the device. In the periphery or routing region of the substrate, at least a portion of the electrical interconnect is formed directly under, over, or between a partially reflective layer and a transparent layer that form the lower electrode in the array region of the substrate of the device. The electrical interconnect preferably comprises nickel.

[0024] One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in Figure 1. In these devices, the pixels are in either a bright or dark state. In the bright ("on" or "open") state, the display element reflects a large portion of incident visible light to a user. When in the dark ("off or "closed") state, the display element reflects little incident visible light to the user. Depending on the embodiment, the light reflectance properties of the "on" and "off states may be reversed. MEMS pixels can be configured to reflect predominantly at selected colors, allowing for a color display in addition to black and white. [0025] Figure 1 is an isometric view depicting two adjacent pixels in a series of pixels of a visual display, wherein each pixel comprises a MEMS interferometric modulator. In some embodiments, an interferometric modulator display comprises a row/column array of these interferometric modulators. Each interferometric modulator includes a pair of reflective layers positioned at a variable and controllable distance from each other to form a resonant optical gap with at least one variable dimension. In one embodiment, one of the reflective layers may be moved between two positions. In the first position, referred to herein as the relaxed position, the movable reflective layer is positioned at a relatively large distance from a fixed partially reflective layer. In the second position, referred to herein as the actuated position, the movable reflective layer is positioned more closely adjacent to the partially reflective layer. Incident light that reflects from the two layers interferes constructively or destructively depending on the position of the movable reflective layer, producing either an overall reflective or non-reflective state for each pixel.

[0026] The depicted portion of the pixel array in Figure 1 includes two adjacent interferometric modulators 12a and 12b. In the interferometric modulator 12a on the left, a movable reflective layer 14a is illustrated in a relaxed position at a predetermined distance from an optical stack 16a, which includes a partially reflective layer. In the interferometric modulator 12b on the right, the movable reflective layer 14b is illustrated in an actuated position adjacent to the optical stack 16b.

[0027] The optical stacks 16a and 16b (collectively referred to as optical stack 16), as referenced herein, typically comprise several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent, and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.

[0028] In some embodiments, the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable reflective layers 14a, 14b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16a, 16b) deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the movable reflective layers 14a, 14b are separated from the optical stacks 16a, 16b by a defined gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device.

[0029] With no applied voltage, the gap 19 remains between the movable reflective layer 14a and optical stack 16a, with the movable reflective layer 14a in a mechanically relaxed state, as illustrated by the pixel 12a in Figure 1. However, when a potential difference is applied to a selected row and column, the capacitor formed at the intersection of the row and column electrodes at the corresponding pixel becomes charged, and electrostatic forces pull the electrodes together. If the voltage is high enough, the movable reflective layer 14 is deformed and is forced against the optical stack 16. A dielectric layer (not illustrated in this Figure) within the optical stack 16 may prevent shorting and control the separation distance between layers 14 and 16, as illustrated by pixel 12b on the right in Figure 1. The behavior is the same regardless of the polarity of the applied potential difference. In this way, row/column actuation that can control the reflective vs. non-reflective pixel states is analogous in many ways to that used in conventional LCD and other display technologies.

[0030] Figures 2 through 5B illustrate one exemplary process and system for using an array of interferometric modulators in a display application.

[0031] Figure 2 is a system block diagram illustrating one embodiment of an electronic device that may incorporate aspects of the invention. In the exemplary embodiment, the electronic device includes a processor 21 which may be any general purpose single- or multi-chip microprocessor such as an ARM, Pentium^®, Pentium II^®, Pentium III^®, Pentium IV^®, Pentium^® Pro, an 8051, a MIPS^®, a Power PC^®, an ALPHA^®, or any special purpose microprocessor such as a digital signal processor, microcontroller, or a programmable gate array. As is conventional in the art, the processor 21 may be configured to execute one or more software modules. In addition to executing an operating system, the processor may be configured to execute one or more software applications, including a web browser, a telephone application, an email program, or any other software application.

[0032] In one embodiment, the processor 21 is also configured to communicate with an array driver 22. In one embodiment, the array driver 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a display array or panel 30. The cross section of the array illustrated in Figure 1 is shown by the lines 1-1 in Figure 2. For MEMS interferometric modulators, the row/column actuation protocol may take advantage of a hysteresis property of these devices illustrated in Figure 3. It may require, for example, a 10 volt potential difference to cause a movable layer to deform from the relaxed state to the actuated state. However, when the voltage is reduced from that value, the movable layer maintains its state as the voltage drops back below 10 volts. In the exemplary embodiment of Figure 3, the movable layer does not relax completely until the voltage drops below 2 volts. Thus, there exists a window of applied voltage, about 3 to 7 V in the example illustrated in Figure 3, within which the device is stable in either the relaxed or actuated state. This is referred to herein as the "hysteresis window" or "stability window." For a display array having the hysteresis characteristics of Figure 3, the row/column actuation protocol can be designed such that during row strobing, pixels in the strobed row that are to be actuated are exposed to a voltage difference of about 10 volts, and pixels that are to be relaxed are exposed to a voltage difference of close to zero volts. After the strobe, the pixels are exposed to a steady state voltage difference of about 5 volts such that they remain in whatever state the row strobe put them in. After being written, each pixel sees a potential difference within the "stability window" of 3-7 volts in this example. This feature makes the pixel design illustrated in Figure 1 stable under the same applied voltage conditions in either an actuated or relaxed pre-existing state. Since each pixel of the interferometric modulator, whether in the actuated or relaxed state, is essentially a capacitor formed by the fixed and moving reflective layers, this stable state can be held at a voltage within the hysteresis window with almost no power dissipation. Essentially no current flows into the pixel if the applied potential is fixed.

[0033] In typical applications, a display frame may be created by asserting the set of column electrodes in accordance with the desired set of actuated pixels in the first row. A row pulse is then applied to the row 1 electrode, actuating the pixels corresponding to the asserted column lines. The asserted set of column electrodes is then changed to correspond to the desired set of actuated pixels in the second row. A pulse is then applied to the row 2 electrode, actuating the appropriate pixels in row 2 in accordance with the asserted column electrodes. The row 1 pixels are unaffected by the row 2 pulse, and remain in the state they were set to during the row 1 pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame. Generally, the frames are refreshed and/or updated with new display data by continually repeating this process at some desired number of frames per second. A wide variety of protocols for driving row and column electrodes of pixel arrays to produce display frames are also well known and may be used in conjunction with the present invention. [0034] Figures 4, 5A, and 5B illustrate one possible actuation protocol for creating a display frame on the 3x3 array of Figure 2. Figure 4 illustrates a possible set of column and row voltage levels that may be used for pixels exhibiting the hysteresis curves of Figure 3. In the Figure 4 embodiment, actuating a pixel involves setting the appropriate column to -V_b,_as, and the appropriate row to +ΔV, which may correspond to -5 volts and +5 volts, respectively Relaxing the pixel is accomplished by setting the appropriate column to +V_b,_as, and the appropriate row to the same +ΔV, producing a zero volt potential difference across the pixel. In those rows where the row voltage is held at zero volts, the pixels are stable in whatever state they were originally in, regardless of whether the column is at +V_b,_as, or -Vb,as- As is also illustrated in Figure 4, it will be appreciated that voltages of opposite polarity than those described above can be used, e.g., actuating a pixel can involve setting the appropriate column to +Vb,as, and the appropriate row to -ΔV. In this embodiment, releasing the pixel is accomplished by setting the appropriate column to -V_bi_as, and the appropriate row to the same -ΔV, producing a zero volt potential difference across the pixel.

[0035] Figure 5B is a timing diagram showing a series of row and column signals applied to the 3x3 array of Figure 2 which will result in the display arrangement illustrated in Figure 5A, where actuated pixels are non-reflective. Prior to writing the frame illustrated in Figure 5A, the pixels can be in any state, and in this example, all the rows are at 0 volts, and all the columns are at +5 volts. With these applied voltages, all pixels are stable in their existing actuated or relaxed states.

[0036] In the Figure 5A frame, pixels (1,1), (1,2), (2,2), (3,2) and (3,3) are actuated. To accomplish this, during a "line time" for row 1 , columns 1 and 2 are set to -5 volts, and column 3 is set to +5 volts. This does not change the state of any pixels, because all the pixels remain in the 3-7 volt stability window. Row 1 is then strobed with a pulse that goes from 0, up to 5 volts, and back to zero. This actuates the (1,1) and (1,2) pixels and relaxes the (1,3) pixel. No other pixels in the array are affected. To set row 2 as desired, column 2 is set to -5 volts, and columns 1 and 3 are set to +5 volts. The same strobe applied to row 2 will then actuate pixel (2,2) and relax pixels (2,1) and (2,3). Again, no other pixels of the array are affected. Row 3 is similarly set by setting columns 2 and 3 to -5 volts, and column 1 to +5 volts. The row 3 strobe sets the row 3 pixels as shown in Figure 5A. After writing the frame, the row potentials are zero, and the column potentials can remain at either +5 or -5 volts, and the display is then stable in the arrangement of Figure 5A. It will be appreciated that the same procedure can be employed for arrays of dozens or hundreds of rows and columns. It will also be appreciated that the timing, sequence, and levels of voltages used to perform row and column actuation can be varied widely within the general principles outlined above, and the above example is exemplary only, and any actuation voltage method can be used with the systems and methods described herein.

[0037] Figures 6A and 6B are system block diagrams illustrating an embodiment of a display device 40. The display device 40 can be, for example, a cellular or mobile telephone. However, the same components of display device 40 or slight variations thereof are also illustrative of various types of display devices such as televisions and portable media players.

[0038] The display device 40 includes a housing 41, a display 30, an antenna 43, a speaker 45, an input device 48, and a microphone 46. The housing 41 is generally formed from any of a variety of manufacturing processes as are well known to those of skill in the art, including injection molding and vacuum forming. In addition, the housing 41 may be made from any of a variety of materials, including, but not limited to, plastic, metal, glass, rubber, and ceramic, or a combination thereof. In one embodiment, the housing 41 includes removable portions (not shown) that may be interchanged with other removable portions of different color, or containing different logos, pictures, or symbols.

[0039] The display 30 of the exemplary display device 40 may be any of a variety of displays, including a bi-stable display, as described herein. In other embodiments, the display 30 includes a flat-panel display, such as plasma, EL, OLED, STN LCD, or TFT LCD as described above, or a non-flat-panel display, such as a CRT or other tube device, as is well known to those of skill in the art. However, for purposes of describing the present embodiment, the display 30 includes an interferometric modulator display, as described herein.

[0040] The components of one embodiment of exemplary display device 40 are schematically illustrated in Figure 6B. The illustrated exemplary display device 40 includes a housing 41 and can include additional components at least partially enclosed therein. For example, in one embodiment, the exemplary display device 40 includes a network interface 27 that includes an antenna 43, which is coupled to a transceiver 47. The transceiver 47 is connected to a processor 21, which is connected to conditioning hardware 52. The conditioning hardware 52 may be configured to condition a signal (e.g., filter a signal). The conditioning hardware 52 is connected to a speaker 45 and a microphone 46. The processor 21 is also connected to an input device 48 and a driver controller 29. The driver controller 29 is coupled to a frame buffer 28 and to an array driver 22, which in turn is coupled to a display array 30. A power supply 50 provides power to all components as required by the particular exemplary display device 40 design.

[0041] The network interface 27 includes the antenna 43 and the transceiver 47 so that the exemplary display device 40 can communicate with one or more devices over a network. In one embodiment, the network interface 27 may also have some processing capabilities to relieve requirements of the processor 21. The antenna 43 is any antenna known to those of skill in the art for transmitting and receiving signals. In one embodiment, the antenna transmits and receives RF signals according to the IEEE 802.11 standard, including IEEE 802.11 (a), (b), or (g). In another embodiment, the antenna transmits and receives RF signals according to the BLUETOOTH standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS, or other known signals that are used to communicate within a wireless cell phone network. The transceiver 47 pre- processes the signals received from the antenna 43 so that they may be received by and further manipulated by the processor 21. The transceiver 47 also processes signals received from the processor 21 so that they may be transmitted from the exemplary display device 40 via the antenna 43.

[0042] In an alternative embodiment, the transceiver 47 can be replaced by a receiver. In yet another alternative embodiment, the network interface 27 can be replaced by an image source, which can store or generate image data to be sent to the processor 21. For example, the image source can be a digital video disc (DVD) or a hard-disc drive that contains image data, or a software module that generates image data.

[0043] The processor 21 generally controls the overall operation of the exemplary display device 40. The processor 21 receives data, such as compressed image data from the network interface 27 or an image source, and processes the data into raw image data or into a format that is readily processed into raw image data. The processor 21 then sends the processed data to the driver controller 29 or to the frame buffer 28 for storage. Raw data typically refers to the information that identifies the image characteristics at each location within an image. For example, such image characteristics can include color, saturation, and gray-scale level.

[0044] In one embodiment, the processor 21 includes a microcontroller, CPU, or logic unit to control operation of the exemplary display device 40. The conditioning hardware 52 generally includes amplifiers and filters for transmitting signals to the speaker 45, and for receiving signals from the microphone 46. The conditioning hardware 52 may be discrete components within the exemplary display device 40, or may be incorporated within the processor 21 or other components.

[0045] The driver controller 29 takes the raw image data generated by the processor 21 either directly from the processor 21 or from the frame buffer 28 and reformats the raw image data appropriately for high speed transmission to the array driver 22. Specifically, the driver controller 29 reformats the raw image data into a data flow having a raster-like format, such that it has a time order suitable for scanning across the display array 30. Then the driver controller 29 sends the formatted information to the array driver 22. Although a driver controller 29, such as a LCD controller, is often associated with the system processor 21 as a stand-alone Integrated Circuit (IC), such controllers may be implemented in many ways. They may be embedded in the processor 21 as hardware, embedded in the processor 21 as software, or fully integrated in hardware with the array driver 22.

[0046] Typically, the array driver 22 receives the formatted information from the driver controller 29 and reformats the video data into a parallel set of waveforms that are applied many times per second to the hundreds and sometimes thousands of leads coming from the display's x-y matrix of pixels.

[0047] In one embodiment, the driver controller 29, array driver 22, and display array 30 are appropriate for any of the types of displays described herein. For example, in one embodiment, the driver controller 29 is a conventional display controller or a bi-stable display controller (e.g., an interferometric modulator controller). In another embodiment, the array driver 22 is a conventional driver or a bi-stable display driver (e.g., an interferometric modulator display). In one embodiment, the driver controller 29 is integrated with the array driver 22. Such an embodiment is common in highly integrated systems such as cellular phones, watches, and other small area displays. In yet another embodiment, the display array 30 is a typical display array or a bi-stable display array (e.g., a display including an array of interferometric modulators).

[0048] The input device 48 allows a user to control the operation of the exemplary display device 40. In one embodiment, the input device 48 includes a keypad, such as a QWERTY keyboard or a telephone keypad, a button, a switch, a touch-sensitive screen, or a pressure- or heat-sensitive membrane. In one embodiment, the microphone 46 is an input device for the exemplary display device 40. When the microphone 46 is used to input data to the device, voice commands may be provided by a user for controlling operations of the exemplary display device 40. [0049] The power supply 50 can include a variety of energy storage devices as are well known in the art. For example, in one embodiment, the power supply 50 is a rechargeable battery, such as a nickel-cadmium battery or a lithium ion battery. In another embodiment, the power supply 50 is a renewable energy source, a capacitor, or a solar cell including a plastic solar cell, and solar-cell paint. In another embodiment, the power supply 50 is configured to receive power from a wall outlet.

[0050] In some embodiments, control programmability resides, as described above, in a driver controller which can be located in several places in the electronic display system. In some embodiments, control programmability resides in the array driver 22. Those of skill in the art will recognize that the above-described optimizations may be implemented in any number of hardware and/or software components and in various configurations.

[0051] The details of the structure of interferometric modulators that operate in accordance with the principles set forth above may vary widely. For example, Figures 7A-7E illustrate five different embodiments of the movable reflective layer 14 and its supporting structures. Figure 7A is a cross section of the embodiment of Figure 1, where a strip of metal material 14 is deposited on orthogonally extending supports 18. The supports 18 can comprise isolated posts or continuous walls. For example, the supports 18 can include linear rails that support crossing strips of mechanical or movable material, and/or isolated posts. In one example, rails provide primary support and posts within each cavity serve to stiffen the mechanical layer.

[0052] In Figure 7B, the moveable reflective layer 14 is attached to supports at the corners only, on tethers 32. In Figure 7C, the moveable reflective layer 14 is suspended from a deformable mechanical layer 34, which may comprise a flexible metal. The deformable mechanical layer 34 connects, directly or indirectly, to the substrate 20 around the perimeter of the deformable mechanical layer 34. These connections are herein referred to as support structures or supports 18. The embodiment illustrated in Figure 7D has supports 18 that include post plugs 42 upon which the deformable layer 34 rests. The movable reflective layer 14 remains suspended over the gap, as in Figures 7A-7C, but the mechanical layer 34 does not form the support posts by filling holes between the mechanical layer 34 and the optical stack 16. Rather, supports 18 are separately deposited under the mechanical layer 34. The embodiment illustrated in Figure 7E is based on the embodiment shown in Figure 7D, but may also be adapted to work with any of the embodiments illustrated in Figures 7A-7C, as well as additional embodiments not shown. In the embodiment shown in Figure 7E, an extra layer of metal or other conductive material has been used to form a bus structure 44. This allows signal routing along the back of the interferometric modulators, eliminating a number of electrodes that may otherwise have had to be formed on the substrate 20.

[0053] In embodiments such as those shown in Figure 7A-7E, the interferometric modulators function as direct-view devices, in which images are viewed from the front side of the transparent substrate 20, the side opposite to that upon which the modulator is arranged. In these embodiments, the reflective layer 14 optically shields the portions of the interferometric modulator on the side of the reflective layer opposite the substrate 20, including the deformable layer 34. This allows the shielded areas to be configured and operated upon without negatively affecting the image quality. Such shielding allows the bus structure 44 in Figure 7E, which provides the ability to separate the optical properties of the modulator from the electromechanical properties of the modulator, such as addressing and the movements that result from that addressing. This separable modulator architecture allows the structural design and materials used for the electromechanical aspects and the optical aspects of the modulator to be selected and to function independently of each other. Moreover, the embodiments shown in Figures 7C-7E have additional benefits deriving from the decoupling of the optical properties of the reflective layer 14 from its mechanical properties, which are carried out by the deformable mechanical layer 34. This allows the structural design and materials used for the reflective layer 14 to be optimized with respect to the optical properties, and the structural design and materials used for the deformable layer 34 to be optimized with respect to desired mechanical properties.

[0054] Layers, materials, and/or other structural elements may be described herein as being "over," "above," "between," etc. in relation to other structural elements. As used herein, these terms can mean directly or indirectly on, over, above, between, etc., as a variety of intermediate layers, material, and/or other structural elements can be interposed between structural elements described herein. Similarly, structural elements described herein, such as substrates or layers, can comprise a single component (e.g., a monolayer) or a multi- component structure (e.g., a laminate comprising multiple layers of the recited material, with or without layers of additional materials). Use of the term "one or more" with respect to an object or element does not, in any way, indicate the absence of a potential plural arrangement of objects or elements for which the term is not used. The term "microelectromechanical device," as used herein, refers generally to any such device at any stage of manufacture.

[0055] Methods disclosed herein employ depositions of conductive layers for use in the MEMS array to simultaneously form peripheral electrical interconnect or routing layers. In some options for forming a microelectromechanical system (e.g., an interferometric modulator), depositions that form the upper electrode (e.g., the reflective layer 14) and/or the lower electrode (e.g., layers of the optical stack 16), can also be used to provide electrical interconnect and routing in the periphery of the display, where the interconnect electrically connects circuitry outside the array (e.g., driver chip(s) at a contact pad) to an electrode (row or column) within the array.

[0056] A first exemplary process will be described with reference to Figures 8A- 8L. It will be understood that Figures 8A-8L are cross-sectional views of the row or lower electrodes of the device. While the peripheral interconnects are formed by multiple layers, including layers that form MEMS electrodes in the array regions, one of those layers is formed exclusively in the peripheral region and does not serve as part of the array electrodes. According to this embodiment, the peripheral routing/interconnect includes a conductive layer comprising nickel (Ni), chromium (Cr), copper (Cu), or silver (Ag) and at least a portion of the conductive layer is directly under, over, or between a transparent layer and a partially reflective layer within the MEMS device.

[0057] With reference to Figures 8A-8L, an optical stack 16 is formed over the transparent substrate 20 in one embodiment. According to this embodiment, the transparent substrate 20 is covered with ITO 16A, which is a transparent conductive material for forming the lower electrodes of the device. In alternative embodiments, the transparent substrate can be covered with indium zinc oxide (IZO) or zinc oxide (ZnO) instead of ITO. The ITO 16A of the optical stack 16 may be deposited by standard deposition techniques, such as physical vapor deposition (PVD), including sputtering and evaporation. A relatively thin, partially reflective absorber layer 16B of, e.g., MoCr, Cr, Ta, TaN_x, or W, is preferably deposited over the ITO 16A. The skilled artisan will appreciate that the absorber layer 16B may comprise any material capable of being optically partially reflective.

[0058] As shown in Figure 8B, one or more layers of a conductive material 50, comprising, e.g., Ni, Cu, Ag, or their alloys, is deposited over the absorber layer 16B to contact the ITO of the optical stack 16. This material 50 is used to create at least a portion of the electrical interconnect structures. As will be described in more detail below, the interconnect or routing can electrically connect circuitry on a contact pad outside the array with either the lower or row electrodes (e.g., conductive layers of the optical stack 16 in the array region) or the patterned electrode/movable layer still to be formed, or both. As shown in Figure 8B, a layer of conductive material 50 is preferably deposited over the absorber layer 16B. [0059] The conductive material 50 is then etched and patterned, such that it remains only in the interconnect or peripheral region in a desired pattern for the interconnect routing, as illustrated in Figure 8C. For example, the conductive material 50 is patterned for connecting the row electrodes (to be patterned, as discussed with respect to Figure 8D) to row drivers. The conductive material 50 can additionally or instead be patterned for routing the upper, column electrodes to be formed, to column drivers. For example, a conductive material 50 comprising Ni is etched, preferably with a diluted HNO₃ solution (<15%). In another embodiment where the conductive material 50 comprises Cu, various etching solutions can be used, including (NH₄)₂S₂Og + deionized water, diluted HNO₃ (<15%), NH₄OH + H₂O₂, and a potassium iodine solution (KI +I₂+ H₂O). In an embodiment where the conductive material 50 comprises Ag, etching solutions, such as NH₄OH + H₂O₂ and a potassium iodine solution (KI + I₂ + H₂O), can be used.

[0060] The conductive material 50 has a thickness preferably in the range of about 2OθA - 5μm, depending on the resistivity of the conductive material 50 and the required routing conductance. For conductive material 50 comprising Ni, the thickness of the conductive material 50 is preferably in the range of about 5OθA - 2000A, and more preferably is about 1000 A. As will described below, this conductive material 50 can also function as a barrier layer in the interconnect region. Although the conductive material 50 is illustrated as being deposited over the entire structure, as shown in Figure 8B, it will be understood that, in alternative embodiments, the conductive material 50 may be selectively deposited only in the interconnect region. Thus, it will be understood that the conductive material 50 is deposited at least in the interconnect region. A lift off process can also be used to deposit the conductive material 50 in the interconnect region. According to such a lift off process, a layer of photoresist is coated over areas where the conductive material 50 is to be removed. A layer of the conductive material 50 is then deposited and then selectively removed in areas where the conductive material 50 is over the photoresist, using a photoresist stripper or other stripping chemicals, such as acetone.

[0061] The conductive material 50 is preferably formed from nickel because nickel provides good electrical contact between the reflective layer (e.g., aluminum mirror) in the movable upper electrode layer and the ITO (lower electrode) of the optical stack 16. The skilled artisan will appreciate that, in other embodiments, the conductive material 50 may be formed of other conductive materials that are resistant to fluorine-based etchants (e.g., XeF₂) and provide good electrical contact between the reflective layer of the movable layer and the ITO of the optical stack 16, such as, for example, copper (Cu), chromium (Cr), silver (Ag), and their alloys.

[0062] In this embodiment, the transparent conductor 16A and the absorber layer 16B are then etched and patterned into rows to form the lower electrodes of the optical stack 16, as illustrated in Figure 8D. According to a preferred embodiment, the absorber layer 16B is etched first, preferably using a chrome etch, such as CR- 14 (Ceric Ammonium Nitrate Ce(NH₄)₂(NO₃)₆ 22%, Acetic Acid 9%, Water 69%) to etch Cr or using a PAN (Phosphoric acid, Acetic acid, Nitric acid) etch to etch MoCr. According to this embodiment, the conductors of the optical stack 16 are masked together, and after the MoCr or Cr layer 16B is etched , the ITO of the transparent conductor 16a is etched, preferably using an etchant, such as HCl, HBr, HCl + HNO₃, and FeCl₃/HCl/DI.

[0063] In other embodiments, the conductive material 50 is patterned to form the electrical interconnect structure after the transparent conductor 16A and absorber layer 16B are patterned to form the electrodes of the optical stack 16.

[0064] As described above, the optical stack 16 also includes a dielectric layer 16c (e.g., silicon dioxide (SiO₂)) to provide electrical isolation during operation between the row electrodes and subsequently deposited column electrodes. The dielectric layer 16C can be deposited after patterning the row electrodes. As shown in Figure 8E, the dielectric layer 16C may be covered with a protective cap layer 16D, such an aluminum oxide (Al₂O₃), to protect it from the release etch performed later in the fabrication sequence. The cap layer 16D can also protect the dielectric layer 16C from a dry etch of the subsequently deposited sacrificial layer 82 (described below), using fluorine-based etchants, such as a sulfur hexafluoride oxygen (SF₆ZO₂) plasma etch. In some arrangements, a further etch stop layer (not shown) is formed over the cap layer 16D to protect it during subsequent patterning steps to define multiple thicknesses of sacrificial material to define multiple cavity sizes and corresponding colors. For example, a thin layer of SiO₂ of about 1 OOA can be deposited over the cap layer 16D to protect the cap layer 16D from a wet etch (using PAN) of the sacrificial layer 82. Desirably, all three of the dielectric 16C, protective cap 16D, and etch stop (not shown) over the conductors 50, 16B, 16 A are dielectric, and in the case of the optical MEMS, transparent.

[0065] As shown in Figure 8F, a sacrificial layer (or layers) 82, preferably comprising a material that can be selectively etched by fluorine-based etchants, and particularly molybdenum (Mo), is deposited (and later partially removed in the release etch) over the structure. The skilled artisan will understand that the sacrificial layer 82 may alternatively be selectively deposited only in the image (or "array" or "display") region. The sacrificial layer 82 preferably comprises material(s) selectively etchable, relative to the upper layers of the optical stack 16 (e.g., the dielectric layer 16C, the cap layer 16D, or the overlying etch stop, depending upon the embodiment) and other adjacent materials of the MEMS device. In certain embodiments, this sacrificial layer 82 may comprise, for example, tungsten (W), titanium (Ti), or amorphous silicon.

[0066] As illustrated in Figure 8G, according to this embodiment, the sacrificial layer 82 is patterned such that it remains only in the image (or "array" or "display") area. It will be understood that the sacrificial material 82 is preferably deposited (and later selectively removed) over the optical stack 16 to define a resonant optical cavity 19 (Figure 8L) between the optical stack 16 and a movable layer that will be deposited, as described in more detail below. It will be understood that the sacrificial layer 82 may be selectively deposited or etched in different locations to produce cavities of different heights. For example, the sacrificial layer may comprise multiple layers that are deposited and subsequently patterned to have multiple thicknesses to produce interferometric modulators for reflecting multiple different colors, such as red, green, and blue for an RGB display system. The skilled artisan will appreciate that the sacrificial material 82 is also patterned and etched in order to form vias 84 for support structures (the deposition of which will be described below) in the display or image area of the device, as shown in Figure 8G. Preferably, a dry etch is performed to pattern the sacrificial layer 82.

[0067] After patterning and etching the sacrificial material 82, a support layer 62, preferably formed of an insulating material, such as silicon dioxide (SiO₂), is deposited over the entire structure, as shown in Figure 8H. The support layer 62 preferably comprises an inorganic material (e.g., oxide, particularly SiO₂).

[0068] As illustrated in Figure 81, this support layer 62 is then patterned to form support structures 18 for the device in the image or display area. In the interconnect region, the support layer 62, together with the dielectric layers of the optical stack 16, serves as an insulator for electrically separating and passivating interconnect structures. The support layer 62 is patterned to form contact openings to the conductive material 50 in the interconnect region, as shown on the left side of Figure 81. As shown in Figure 81, portions of the cap layer 16D and the dielectric layer 16C of the optical stack 16 are also etched to form the contact openings to the conductive material 50 in the interconnect region. The skilled artisan will appreciate that these contacts may be formed either prior to or after a release etch, which will be described below. [0069] As shown in Figure 8 J, the movable layer 14 is deposited over the entire structure to form the movable upper electrodes of the device in the array region. As noted above, the illustrated movable layer 14 is formed of nickel over aluminum, which is reflective. In other embodiments, the movable layer can be a reflector suspended from a separately patterned deformable layer.

[0070] In the array region, the movable layer 14 is deposited and patterned into column electrodes that cross over, e.g., are orthogonal to, the row electrodes of the optical stack 16 to create the row/column array described above. The movable layer 14 is patterned and etched, as shown in Figure 8K. The skilled artisan will appreciate that holes (not shown) are preferably etched in portions of the movable layer 14 that are over areas of the sacrificial layer 82 to be removed by the release etch (in the image or display area). In the interconnect region, the movable layer 14 is used to form contact pads 58 to the conductive material 50. As shown in Figure 8K, the conductive material 50 forms a layer of the routing providing electrical contact between the lower electrodes (transparent conductor 16A and optional absorber layer 16B) and contact pads 58 that serve to connect row drivers to be mounted. In the illustrated embodiment, the contact pads include an aluminum layer that serves as an upper electrode and reflector in the array. The aluminum of the movable layer 14 also connects routing regions to contact regions of the interconnect. The conductive material 50 is thus selected from metals that make good electrical contact to aluminum, such as nickel, Cr, Cu, or Ag.

[0071] The exposed areas of the sacrificial layer 82 are removed in a release etch, after the movable layer 14 is formed, to create the optical cavities 19 between the fixed lower electrodes of the optical stack 16 and the upper electrodes of the movable layer 14 in the display or image area, as shown in Figure 8L. Standard release techniques may be used to remove the sacrificial layer 82. The particular release technique will depend on the material to be removed. For example, a fluorine-based etchant, such as xenon difluoride (XeF₂), may be used to remove a molybdenum (illustrated), tungsten, or silicon sacrificial layer. The skilled artisan will appreciate that the release etchants are chosen to be selective such that the support structure material 62 and the movable layer 14 will not be removed by the release etch.

[0072] The conductive material 50 is provided as an electrical interconnect as well as serving as a barrier layer between the movable layer 14 and the electrodes of the optical stack 16 outside the display or array area. After the release etch, a backplate is preferably sealed to the transparent substrate 20 using a seal to protect the display area of the interferometric modulator. The backplate protects the MEMS device from harmful elements in the environment. Similarly, the seal preferably provides a sufficient barrier for preventing water vapor and other contaminants from entering the package and damaging the MEMS device. The skilled artisan will understand that transparent substrate 20 may be any transparent substance capable of having thin film, MEMS devices built upon it. Such transparent substances include, but are not limited to, glass, plastic, and transparent polymers. Images are displayed through the transparent substrate 20.

[0073] According to a second embodiment illustrated in Figures 9A-9L, the conductive material 50 forming the interconnect/routing may be deposited on the substrate 20 before the transparent conductor 16A (e.g., ITO) and the partially reflective absorber layer 16B (e.g., MoCr or Cr) of the optical stack 16 are deposited. As shown in Figure 9A, a layer of conductive material 50, preferably nickel, is deposited directly over the transparent substrate 20. The skilled artisan will appreciate that, in other embodiments, the conductive material 50 may comprise other conductive materials that are resistant to fluorine-based etchants (e.g., XeF₂) and provide good electrical contact between the reflective layer of the movable layer and the ITO of the optical stack 16, such as, for example, copper (Cu), chromium (Cr), silver (Ag), and their alloys.

[0074] The layer of conductive material 50 is then etched and patterned, as shown in Figure 9B, where peripheral routing and contact pads of the MEMS device are desired. A conductive material 50 formed of nickel, for example, is preferably etched with a diluted HNO₃ solution (preferably <15%). The transparent conductor 16A and absorber 16B layers of the optical stack 16 are then deposited over the structure, as shown in Figure 9C. The transparent conductor 16 A and absorber 16B layers of the optical stack 16 are then etched and patterned into rows to form the lower, fixed electrodes of the optical stack 16 in the array or image region, as illustrated in Figure 9D. According to a preferred embodiment, the absorber layer 16B is etched (dry or wet etch) first, preferably using a chrome etch, such as CR- 14 (Ceric Ammonium Nitrate Ce(NH₄)₂(NO₃)₆ 22%, Acetic Acid 9%, Water 69%) to etch Cr or using a PAN (Phosphoric Acid, Acetic Acid, Nitric Acid) etch to etch MoCr. According to this embodiment, after the absorber layer 16B is etched and patterned, the ITO of the transparent conductor layer 16a is etched and patterned, preferably using an etchant, such as HC1:D1 or HBnDl. The skilled artisan will appreciate that HCl and HBr can etch the ITO 16A selectively against the conductive material 50 and that a separate masking step is not necessary. Although the transparent conductor 16A and absorber 16B layers are deposited over the entire structure in the illustrated embodiment, it will be understood that they may be selectively deposited only in the array or image area of the device and subsequently patterned to form the lower electrodes of the device. As shown in Figure 9D, the patterns for the lower or row electrodes (layers 16A, 16B) and the conductive material 50 overlap such that the conductive material 50 can carry signals between row drivers to be mounted in the interconnect region and the row electrodes.

[0075] As shown in Figure 9E, the transparent dielectric layer 16C (e.g., silicon dioxide (SiO₂)) and optional aluminum oxide (Al₂O₃) cap layer 16D of the optical stack 16 are then deposited over the structure to provide electrical isolation during operation between the stationary row electrodes and subsequently formed moving column electrodes. The dielectric layer 16C can be deposited before or after patterning the row electrodes. It will be appreciated that, in some arrangements, a further etch stop layer (not shown) is formed over the cap layer 16D to protect it during subsequent patterning steps to define multiple thicknesses of sacrificial material to define multiple cavity sizes and corresponding colors.

[0076] As shown in Figure 9F, a sacrificial layer (or layers) 82, preferably comprising a material that can be selectively etched by fluorine-based etchants, and particularly molybdenum (Mo), is deposited (and later removed in the release etch) over the structure. It will be understood that, in alternative embodiments, the sacrificial layer 82 may be selectively deposited only in the image area. The sacrificial layer 82 preferably comprises a material that is selectively etchable, relative to the upper layer(s) of the optical stack 16 and other adjacent materials of the MEMS device. In certain embodiments, this sacrificial layer 82 may comprise, for example, tungsten (W), titanium (Ti), or amorphous silicon.

[0077] As illustrated in Figure 9G, according to this embodiment, the sacrificial layer 82 is patterned such that it remains only in the image (or "array" or "display") area. It will be understood that the sacrificial layer 82 may be selectively deposited or etched in different locations to define cavities of different heights. For example, the sacrificial layer may comprise multiple layers that are deposited and subsequently patterned to have multiple thicknesses to produce interferometric modulators for reflecting multiple different colors, such as red, green, and blue for an RGB display system. The skilled artisan will appreciate that the sacrificial material 82 is patterned and etched in order to form vias 84 for support structures (the deposition of which will be described below) in the display or image area of the device, as shown in Figure 9G. Preferably, a dry etch is performed to pattern the sacrificial layer 82.

[0078] After patterning and etching the sacrificial material 82, a support layer 62, preferably formed of an insulating material such as silicon dioxide (SiO₂), is deposited over the entire structure, as shown in Figure 9H. The support layer 62 preferably comprises an inorganic material (e.g., oxide, particularly SiO₂).

[0079] As illustrated in Figure 91, this support layer 62 is then patterned to form support structures 18 for the device in the image or display area. In the interconnect region, the support layer 62, together with the dielectric layers of the optical stack 16, serves as an insulator for electrically separating and passivating interconnect structures. The support layer 62 is patterned to form contact openings to the conductive material 50, as shown in on the left side of Figure 91. As shown in Figure 91, portions of the Al₂O₃ cap layer 16D and the dielectric layer 16C of the optical stack 16 are also etched to form the contact openings to the routing/interconnect 50. The skilled artisan will appreciate that these contacts may be formed either prior to or after a release etch, which will be described below.

[0080] As shown in Figure 9J, the movable layer 14 is deposited over the entire structure to form the movable electrodes of the interferometric modulator in the array region. As noted above, the illustrated movable layer 14 is formed of nickel over aluminum. In other embodiments, the movable layer can be a reflector suspended from a separately patterned deformable layer.

[0081] In the array region, the movable layer 14 is deposited and patterned into column electrodes that cross over, e.g., are orthogonal to, the row electrodes of the optical stack 16 to create the row/column array described above. The movable layer 14 is patterned and etched, preferably first etching the nickel layer using HNO₃IDI followed by etching of the aluminum reflective layer using H₃PO₄ or TMAH, as shown in Figure 9K. The skilled artisan will appreciate that holes (not shown) are preferably etched in portions of the movable layer 14 that are over areas of the sacrificial layer 82 to be removed by the release etch (in the image or display area). It will be understood that the movable layer 14 is used to form contact pads 58 to the conductive material 50 in the interconnect region. In this embodiment, the movable layer 14 directly contacts the conductive material 50 and is therefore electrically connected to the conductive material 50. the conductive material 50 forms a layer of the routing providing electrical contact between the lower electrodes (transparent conductor 16 A and optional absorber layer 16B) and contact pads 58 that serve to connect row drivers to be mounted.

[0082] The exposed areas of the sacrificial layer 82 are removed in a release etch, after the movable layer 14 is formed, to create the optical cavities 19 between the fixed electrodes of the optical stack 16 and the upper electrodes of the movable layer 14 in the display or image area, as shown in Figure 9L. Standard release techniques may be used to remove the sacrificial layer 82. The particular release technique will depend on the material to be removed. For example, a fluorine-based etchant, such as xenon difluoride (XeF₂), may be used to remove a molybdenum (illustrated), tungsten, or silicon sacrificial layer. The skilled artisan will appreciate that the release etchants are chosen to be selective such that the support structure material 62 and the movable layer 14 will not be removed by the release etch.

[0083] The conductive material 50 is provided as an electrical interconnect as well as serving as a barrier layer in the interconnect region between the movable layer 14 that forms upper electrodes in the array region and the layers of the optical stack 16 that form the lower electrodes in the array region. After the release etch, a backplate is preferably sealed to the transparent substrate 20 using a seal to protect the display area.

[0084] According to a third embodiment illustrated in Figures 10A- 1OL, the conductive material 50 forming a layer of the interconnect/routing may be deposited over the transparent conductor 16A (e.g., ITO) and before the partially reflective absorber layer 16B (e.g., MoCr or Cr) of the optical stack 16 is deposited. As shown in Figure 1OA, a layer of conductive material 50, preferably nickel, is deposited over the transparent conductor layer 16A, which is deposited over a transparent substrate 20. The skilled artisan will appreciate that, in other embodiments, the conductive material 50 may comprise other conductive materials, which are resistant to fluorine-based etchants (e.g., XeF₂) and provide good electrical contact between the reflective layer of the movable layer and the ITO of the optical stack 16, such as, for example, copper (Cu), chromium (Cr), silver (Ag), and their alloys.

[0085] The layer of conductive material 50 is then etched and patterned selectively to the layer 16 A, as shown in Figure 1OB, to form the peripheral interconnect/routing of the MEMS device. A conductive material 50 formed of nickel, for example, is preferably etched with a diluted HNO₃ solution (preferably <15%). An absorber layer 16B of MoCr or Cr of the optical stack 16 is preferably deposited over the entire structure, as shown in Figure 1OC.

[0086] According to an embodiment, the absorber layer 16B is etched (dry or wet) first such that it remains over the patterned conductive material 50 and a portion over the transparent conductor 16A, as shown in Figure 1OD. A MoCr layer, for example, is preferably etched using a PAN etch. A Cr layer can be etched using a chrome etch, such as CR- 14 (Ceric Ammonium Nitrate Ce(NH₄)₂(NO₃)₆ 22%, Acetic Acid 9%, Water 69%). After the absorber layer 16B is etched, the transparent conductor layer 16A is then etched and patterned into rows to form the electrodes of the optical stack 16 in the array or image region, as illustrated in Figure 10D. According to this embodiment, after the absorber layer 16B is etched and patterned, the transparent conductor layer 16A is etched and patterned, preferably using an etchant, such as HCl, HBr, HCl +HNO₃, or FeCl₃/HCl/Dl. Although the transparent conductor layer 16A is etched after the absorber layer 16B in the illustrated embodiment, it will be understood that they may be simultaneously etched and patterned to form the lower electrodes of the device.

[0087] As shown in Figure 1OE, the transparent dielectric layer 16C (e.g., silicon dioxide (SiO₂)) and optional aluminum oxide (Al₂O₃) cap layer 16D are then deposited over the structure to provide electrical isolation during operation between the row electrodes and subsequently deposited column electrodes. The dielectric layer 16C can be deposited before or after patterning the row electrodes. It will be appreciated that, in some arrangements, a further etch stop layer is formed over the cap layer 16D to protect it during subsequent patterning steps to define multiple thicknesses of sacrificial material to define multiple cavity sizes and corresponding colors.

[0088] As shown in Figure 1OF, a sacrificial layer (or layers) 82, preferably comprising a material that can be selectively etched by fluorine-based etchants, and particularly molybdenum (Mo), is deposited (and later removed in the release etch) over the structure. It will be understood that, in alternative embodiments, the sacrificial layer 82 may be selectively deposited only in the image area. The sacrificial layer 82 preferably comprises material(s) selectively etchable relative to the upper layer(s) of the optical stack 16 and other adjacent materials of the MEMS device. In certain embodiments, this sacrificial layer 82 may comprise, for example, tungsten (W), titanium (Ti), or amorphous silicon.

[0089] As illustrated in Figure 1 OG, according to this embodiment, the sacrificial layer 82 is patterned such that it remains only in the image (or "array" or "display") area. It will be understood that the sacrificial layer 82 may be selectively deposited or etched in different locations to produce cavities of different heights. For example, the sacrificial layer may comprise multiple layers that are deposited and subsequently patterned to form a sacrificial layer 82 having multiple thicknesses to produce interferometric modulators for reflecting multiple different colors, such as red, green, and blue for an RGB display system. The skilled artisan will appreciate that the sacrificial material 82 is also patterned and etched in order to form vias 84 for support structures (the deposition of which will be described below) in the display or image area of the device, as shown in Figure 1OG. Preferably, a dry etch is performed to pattern the sacrificial layer 82. [0090] After patterning and etching the sacrificial material 82, a support layer 62, preferably formed of an insulating material, is deposited over the entire structure, as shown in Figure 1OH. The support layer 62 preferably comprises an inorganic material (e.g., oxide, particularly SiO₂).

[0091] As illustrated in Figure 101, this support layer 62 is then patterned to form support structures 18 for the device in the image or display area. In the interconnect region, the support layer 62, together with the dielectric layers of the optical stack 16, serves as an insulator for electrically separating and passivating interconnect structures. The support layer 62 is patterned to form contact openings to the conductive material 50, as shown in on the left side of Figure 101. As shown in Figure 101, portions of the cap layer 16D and the dielectric layer 16C are also etched to form the contact openings to the absorber layer 16B and conductive material 50. The skilled artisan will appreciate that these contacts may be formed either prior to or after a release etch, which will be described below.

[0092] As shown in Figure 10J, the movable layer 14 is deposited over the entire structure to form the movable electrodes 14 of the interferometric modulator in the array region. As noted above, the illustrated movable layer 14 is formed of nickel over aluminum. In other embodiments, the movable layer can be a reflector suspended from a separately patterned deformable layer.

[0093] In the array region, the movable layer 14 is deposited and patterned into column electrodes that cross over, e.g., are orthogonal to, the row electrodes of the optical stack 16 to create the row/column array described above. The movable layer 14 is patterned and etched, preferably first etching the nickel layer using HNO₃ :DI followed by etching of the aluminum reflective layer using H₃PO₄ or TMAH, as shown in Figure 1 OK. The skilled artisan will appreciate that holes (not shown) are preferably etched in portions of the movable layer 14 that are over areas of the sacrificial layer 82 to be removed by the release etch (in the image or display area). It will be understood that the movable layer 14 is used to form contact pads 58 to the conductive material 50 in the interconnect region. The conductive material 50 is thus electrically connected (through the absorber layer 16B) to the movable layer 14. The conductive material 50 forms a layer of the routing providing electrical contact between the lower electrodes (transparent conductor 16A and optional absorber layer 16B) and contact pads 58 that serve to connect row drivers to be mounted.

[0094] The exposed areas of the sacrificial layer 82 are removed in a release etch, after the movable layer 14 is formed, to create the optical cavities 19 between the fixed electrodes of the optical stack 16 and the upper electrodes formed by the movable layer 14 in the display or image area, as shown in Figure 9L. Standard release techniques may be used to remove the sacrificial layer 82. The particular release technique will depend on the material to be removed. For example, a fluorine-based etchant, such as xenon difluoride (XeF₂), may be used to remove a molybdenum (illustrated), tungsten, or silicon sacrificial layer. The skilled artisan will appreciate that the release etchants are chosen to be selective such that the support structure material 62 and the movable layer 14 will not be removed by the release etch. After the release etch, a backplate is preferably sealed to the transparent substrate 20 using a seal to protect the display area.

[0095] Although the embodiments described above are illustrated with respect to routing for lower electrodes of the device, it will be understood that similar embodiments may be made by those skilled in the art with routing for upper electrodes, either simultaneously with or instead of routing for lower electrodes.

[0096] While the above detailed description has shown, described, and pointed out novel features of the invention as applied to various embodiments, it will be understood that various omissions, substitutions, and changes in the form and details of the device or process illustrated may be made by those skilled in the art without departing from the spirit of the invention. As will be recognized, the present invention may be embodied within a form that does not provide all of the features and benefits set forth herein, as some features may be used or practiced separately from others.

Claims

WHAT IS CLAIMED IS:

1. A microelectromechanical systems (MEMS) device comprising: a substrate; an array region over the substrate, the array region comprising: a lower electrode; a movable upper electrode; and a cavity between the lower electrode and the upper electrode; and a peripheral region over the substrate, the peripheral region comprising: a portion of a layer forming the upper electrode in the array region; and an electrical interconnect comprising a conductive material electrically connected to at least one of the lower electrode and the upper electrode, wherein the conductive material is formed of a layer separate from and below the layer forming the upper electrode in the array region, the conductive material selected from the group consisting of nickel, chromium, copper, and silver.

2. The MEMS device of Claim 1, wherein the lower electrode comprises a transparent conductive layer.

3. The MEMS device of Claim 2, wherein the transparent conductive layer comprises indium tin oxide.

4. The MEMS device of Claim 2, wherein the lower electrode further comprises a partially reflective layer and wherein at least a portion of the conductive material is directly over the transparent conductive layer and the partially reflective layer.

5. The MEMS device of Claim 2, wherein the lower electrode further comprises a partially reflective layer and wherein at least a portion of the conductive material is directly under the transparent conductive layer and the partially reflective layer.

6. The MEMS device of Claim 2, wherein the lower electrode further comprises a partially reflective layer and wherein at least a portion of the conductive material is between the transparent conductive layer and the partially reflective layer.

7. The MEMS device of any of Claims 4-6, wherein the partially reflective layer comprises chromium or molybdenum chromium.

8. The MEMS device of any of Claims 1 and 4-6, wherein the upper electrode comprises an aluminum layer.

9. The MEMS device of Claim 8, wherein the upper electrode further comprises a nickel layer over the aluminum layer.

10. The MEMS device of Claim 8, wherein the conductive material comprises nickel.

11. The MEMS device of Claim 8, wherein the substrate comprises a transparent substrate.

12. The MEMS device of Claim 8, wherein the array region comprises an interferometric modulator.

13. The MEMS device of Claim 1 , further comprising : a display; a processor in electrical communication with said display, said processor being configured to process image data; and a memory device in electrical communication with said processor.

14. The MEMS device of Claim 13, further comprising a driver circuit configured to send at least one signal to said display.

15. The MEMS device of Claim 14, further comprising a controller configured to send at least a portion of said image data to said driver circuit.

16. The MEMS device of Claim 14, wherein the driver circuit is electrically connected to the electrical interconnect.

17. The MEMS device of Claim 13, further comprising an image source module configured to send said image data to said processor.

18. The MEMS device of Claim 13, further comprising an input device configured to receive input data and to communicate said input data to said processor.

19. A method of making a microelectromechanical systems (MEMS) device, the method comprising: depositing a first electrode layer over a substrate; patterning the first electrode layer to form a lower electrode in an array region; depositing a conductive layer over the substrate, wherein the conductive layer comprises a material selected from the group consisting of nickel, copper, chromium, and silver; patterning the conductive layer to form an electrical interconnect in a peripheral region; depositing a sacrificial layer over the lower electrode in the array region; after patterning the conductive layer, depositing a second electrode layer over the sacrificial layer to form an upper electrode in the array region and depositing the second electrode layer over the conductive layer in the peripheral region, the electrical interconnect electrically connected to at least one of the lower electrode and the upper electrode; and removing the sacrificial layer in the array region.

20. The method of Claim 19, wherein patterning the first electrode layer is conducted before patterning the conductive layer.

21. The method of Claim 20, wherein patterning the first electrode layer is conducted before depositing the conductive layer.

22. The method of Claim 21, further comprising depositing a dielectric layer over the conductive layer and the lower electrode.

23. The method of Claim 19, wherein patterning the conductive layer is conducted before patterning the first electrode layer.

24. The method of Claim 19 or 23, wherein patterning the conductive layer is conducted before depositing the first electrode layer.

25. The method of Claim 19, wherein depositing the second electrode layer comprises depositing a layer of nickel.

26. The method of any of Claims 19-23 and 25, wherein the second electrode layer comprises aluminum and wherein the conductive layer comprises nickel.

27. The method of Claim 26, further comprising connecting a driver to the electrical interconnect.

28. The method of Claim 26, wherein the substrate comprises a transparent substrate.

29. The method of Claim 26, wherein depositing the lower electrode layer comprises depositing a transparent conductive layer.

30. The method of Claim 29, wherein the transparent conductive layer comprises indium tin oxide.

31. The method of Claim 29, wherein depositing the lower electrode layer further comprises depositing a partially reflective layer.

32. The method of Claim 31, wherein the partially reflective layer comprises chromium or molybdenum chromium.

33. The method of Claim 26, further comprising, after patterning the conductive layer, depositing a dielectric layer over the conductive layer and the lower electrode.

34. The method of Claim 26, wherein the device comprises an interferometric modulator in the array region.