WO2009019690A3 - Method and system for optical measurements - Google Patents

Method and system for optical measurements Download PDF

Info

Publication number
WO2009019690A3
WO2009019690A3 PCT/IL2008/001073 IL2008001073W WO2009019690A3 WO 2009019690 A3 WO2009019690 A3 WO 2009019690A3 IL 2008001073 W IL2008001073 W IL 2008001073W WO 2009019690 A3 WO2009019690 A3 WO 2009019690A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
analyzed
multiple wavelengths
light beam
optical measurements
Prior art date
Application number
PCT/IL2008/001073
Other languages
French (fr)
Other versions
WO2009019690A2 (en
Inventor
Boaz Brill
Rafael Golber
Vladimir Muzikovsky
Original Assignee
Nova Measuring Instruments Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nova Measuring Instruments Ltd. filed Critical Nova Measuring Instruments Ltd.
Publication of WO2009019690A2 publication Critical patent/WO2009019690A2/en
Publication of WO2009019690A3 publication Critical patent/WO2009019690A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/447—Polarisation spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band

Abstract

An optical measurement Method and System for spectroscopy are disclosed for evaluating the parameters of a sample. The device generally includes a broadband source for generating a light beam. Reflected light beam are simultaneously analyzed as a function of the position within the beam to provide information at multiple wavelengths and/or angular distribution. A Furier filter, comprising dispersion element and a two-dimensional photodetector array are used so that the beam may be simultaneously or consicuently analyzed at multiple angles of returned from the sample (diffracted) light at multiple wavelengths.
PCT/IL2008/001073 2007-08-05 2008-08-05 Method and system for optical measurements WO2009019690A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL185043A IL185043A0 (en) 2007-08-05 2007-08-05 Optical method and system
IL185043 2007-08-05

Publications (2)

Publication Number Publication Date
WO2009019690A2 WO2009019690A2 (en) 2009-02-12
WO2009019690A3 true WO2009019690A3 (en) 2010-03-04

Family

ID=40341855

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2008/001073 WO2009019690A2 (en) 2007-08-05 2008-08-05 Method and system for optical measurements

Country Status (2)

Country Link
IL (1) IL185043A0 (en)
WO (1) WO2009019690A2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6806971B2 (en) * 2001-08-08 2004-10-19 Nova Measuring Instruments Ltd. Method and apparatus for process control in semiconductor manufacture
US20060126067A1 (en) * 2003-01-22 2006-06-15 Gabriel Sirat Crystal grating apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6806971B2 (en) * 2001-08-08 2004-10-19 Nova Measuring Instruments Ltd. Method and apparatus for process control in semiconductor manufacture
US20060126067A1 (en) * 2003-01-22 2006-06-15 Gabriel Sirat Crystal grating apparatus

Also Published As

Publication number Publication date
IL185043A0 (en) 2008-01-06
WO2009019690A2 (en) 2009-02-12

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