WO2009006118A3 - Microelectromechanical device with optical function separated from mechanical and electrical function - Google Patents
Microelectromechanical device with optical function separated from mechanical and electrical function Download PDFInfo
- Publication number
- WO2009006118A3 WO2009006118A3 PCT/US2008/068061 US2008068061W WO2009006118A3 WO 2009006118 A3 WO2009006118 A3 WO 2009006118A3 US 2008068061 W US2008068061 W US 2008068061W WO 2009006118 A3 WO2009006118 A3 WO 2009006118A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- function
- mechanical
- microelectromechanical device
- separated
- movable element
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0083—Optical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002691674A CA2691674A1 (en) | 2007-07-02 | 2008-06-24 | Microelectromechanical device with optical function separated from mechanical and electrical function |
JP2010515042A JP5065487B2 (en) | 2007-07-02 | 2008-06-24 | Microelectromechanical devices with optical functions separated from mechanical and electrical functions |
BRPI0813296-8A2A BRPI0813296A2 (en) | 2007-07-02 | 2008-06-24 | MICROELETOMECHANICAL DEVICES (MEMS) AND METHOD OF MANUFACTURING AND LIGHT MODULATION |
RU2009145292/28A RU2475789C2 (en) | 2007-07-02 | 2008-06-24 | Microelectromechanical device wherein optical function is separated from mechanical and electrical function |
CN2008800228932A CN101688975B (en) | 2007-07-02 | 2008-06-24 | Microelectromechanical device with optical function separated from mechanical and electrical function |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/772,751 | 2007-07-02 | ||
US11/772,751 US7630121B2 (en) | 2007-07-02 | 2007-07-02 | Electromechanical device with optical function separated from mechanical and electrical function |
EP08153252A EP2012168A3 (en) | 2007-07-02 | 2008-03-25 | Microelectromechanical device with optical function separated from mechanical and electrical function |
EP08153252.5 | 2008-03-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009006118A2 WO2009006118A2 (en) | 2009-01-08 |
WO2009006118A3 true WO2009006118A3 (en) | 2009-05-14 |
Family
ID=39800548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2008/068061 WO2009006118A2 (en) | 2007-07-02 | 2008-06-24 | Microelectromechanical device with optical function separated from mechanical and electrical function |
Country Status (10)
Country | Link |
---|---|
US (3) | US7630121B2 (en) |
EP (3) | EP2012168A3 (en) |
JP (3) | JP5065487B2 (en) |
KR (1) | KR20100038406A (en) |
CN (3) | CN101688975B (en) |
BR (1) | BRPI0813296A2 (en) |
CA (1) | CA2691674A1 (en) |
RU (1) | RU2475789C2 (en) |
TW (2) | TWI402536B (en) |
WO (1) | WO2009006118A2 (en) |
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2008
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- 2008-07-01 TW TW100121914A patent/TW201135281A/en unknown
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CN102393562A (en) | 2012-03-28 |
US20110170168A1 (en) | 2011-07-14 |
TWI402536B (en) | 2013-07-21 |
EP2442169A3 (en) | 2012-08-29 |
JP2012212158A (en) | 2012-11-01 |
JP2010532498A (en) | 2010-10-07 |
JP2012212159A (en) | 2012-11-01 |
CN101688975A (en) | 2010-03-31 |
EP2012168A3 (en) | 2009-04-22 |
EP2012168A2 (en) | 2009-01-07 |
US20090009845A1 (en) | 2009-01-08 |
CN102393563A (en) | 2012-03-28 |
EP2442168A3 (en) | 2012-08-29 |
RU2009145292A (en) | 2011-08-10 |
US7920319B2 (en) | 2011-04-05 |
BRPI0813296A2 (en) | 2014-12-30 |
US7630121B2 (en) | 2009-12-08 |
CA2691674A1 (en) | 2009-01-08 |
EP2442169A2 (en) | 2012-04-18 |
US8368997B2 (en) | 2013-02-05 |
KR20100038406A (en) | 2010-04-14 |
RU2475789C2 (en) | 2013-02-20 |
JP5065487B2 (en) | 2012-10-31 |
US20100085625A1 (en) | 2010-04-08 |
TW200909853A (en) | 2009-03-01 |
WO2009006118A2 (en) | 2009-01-08 |
TW201135281A (en) | 2011-10-16 |
EP2442168A2 (en) | 2012-04-18 |
CN101688975B (en) | 2012-02-01 |
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