WO2008156812A3 - External beam delivery system for laser dark-field illumination in a catadioptric optical system - Google Patents

External beam delivery system for laser dark-field illumination in a catadioptric optical system Download PDF

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Publication number
WO2008156812A3
WO2008156812A3 PCT/US2008/007652 US2008007652W WO2008156812A3 WO 2008156812 A3 WO2008156812 A3 WO 2008156812A3 US 2008007652 W US2008007652 W US 2008007652W WO 2008156812 A3 WO2008156812 A3 WO 2008156812A3
Authority
WO
WIPO (PCT)
Prior art keywords
beam delivery
field illumination
external beam
catadioptric optical
optical system
Prior art date
Application number
PCT/US2008/007652
Other languages
French (fr)
Other versions
WO2008156812A2 (en
Inventor
J Joseph Armstrong
Original Assignee
Kla Tencor Tech Corp
J Joseph Armstrong
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Tech Corp, J Joseph Armstrong filed Critical Kla Tencor Tech Corp
Publication of WO2008156812A2 publication Critical patent/WO2008156812A2/en
Publication of WO2008156812A3 publication Critical patent/WO2008156812A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only

Abstract

A catadioptric objective configured to inspect a specimen is provided. The catadioptric objective includes a Mangin element having one surface at a first axial location and an extension element positioned together with the Mangin element. The extension element provides a second surface at a second axial location. Certain light energy reflected from the specimen passes to the second surface of the extension element, the Mangin element, and through a plurality of lenses. An aspheric surface may be provided, and light energy may be provided to the specimen using diverting elements such as prisms or reflective surfaces.
PCT/US2008/007652 2007-06-19 2008-06-18 External beam delivery system for laser dark-field illumination in a catadioptric optical system WO2008156812A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US93645107P 2007-06-19 2007-06-19
US60/936,451 2007-06-19
US11/977,998 US8665536B2 (en) 2007-06-19 2007-10-25 External beam delivery system for laser dark-field illumination in a catadioptric optical system
US11/977,998 2007-10-25

Publications (2)

Publication Number Publication Date
WO2008156812A2 WO2008156812A2 (en) 2008-12-24
WO2008156812A3 true WO2008156812A3 (en) 2009-03-05

Family

ID=40156865

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/007652 WO2008156812A2 (en) 2007-06-19 2008-06-18 External beam delivery system for laser dark-field illumination in a catadioptric optical system

Country Status (2)

Country Link
US (2) US8665536B2 (en)
WO (1) WO2008156812A2 (en)

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US8873596B2 (en) 2011-07-22 2014-10-28 Kla-Tencor Corporation Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
KR101411428B1 (en) * 2012-07-12 2014-06-24 한국과학기술원 Condensing type portable fluorescence detection system
US9478402B2 (en) 2013-04-01 2016-10-25 Kla-Tencor Corporation Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor
US9410901B2 (en) 2014-03-17 2016-08-09 Kla-Tencor Corporation Image sensor, an inspection system and a method of inspecting an article
US9419407B2 (en) 2014-09-25 2016-08-16 Kla-Tencor Corporation Laser assembly and inspection system using monolithic bandwidth narrowing apparatus
US9748729B2 (en) 2014-10-03 2017-08-29 Kla-Tencor Corporation 183NM laser and inspection system
US10309907B2 (en) * 2015-03-04 2019-06-04 Kla-Tencor Corporation All reflective wafer defect inspection and review systems and methods
US10748730B2 (en) 2015-05-21 2020-08-18 Kla-Tencor Corporation Photocathode including field emitter array on a silicon substrate with boron layer
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system
US10943760B2 (en) 2018-10-12 2021-03-09 Kla Corporation Electron gun and electron microscope

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Also Published As

Publication number Publication date
WO2008156812A2 (en) 2008-12-24
US8665536B2 (en) 2014-03-04
US20140133158A1 (en) 2014-05-15
US20100149662A1 (en) 2010-06-17
US9377610B2 (en) 2016-06-28

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