WO2008156372A2 - Method for recovering elemental silicon from cutting remains - Google Patents
Method for recovering elemental silicon from cutting remains Download PDFInfo
- Publication number
- WO2008156372A2 WO2008156372A2 PCT/NO2008/000221 NO2008000221W WO2008156372A2 WO 2008156372 A2 WO2008156372 A2 WO 2008156372A2 NO 2008000221 W NO2008000221 W NO 2008000221W WO 2008156372 A2 WO2008156372 A2 WO 2008156372A2
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- WO
- WIPO (PCT)
- Prior art keywords
- silicon
- anode
- cutting
- cutting remains
- cathode
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B7/00—Working up raw materials other than ores, e.g. scrap, to produce non-ferrous metals and compounds thereof; Methods of a general interest or applied to the winning of more than two metals
- C22B7/006—Wet processes
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B61/00—Obtaining metals not elsewhere provided for in this subclass
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/33—Silicon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
- C25C3/00—Electrolytic production, recovery or refining of metals by electrolysis of melts
- C25C3/34—Electrolytic production, recovery or refining of metals by electrolysis of melts of metals not provided for in groups C25C3/02 - C25C3/32
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Definitions
- This invention relates to a method for recovering elemental silicon cutting remains containing silicon particles.
- the invention may be employed for salvaging high- purity silicon suitable as a feedstock for production of photovoltaic cells from residues from production of photovoltaic wafers.
- Photovoltaic (PV) technology is emerging as a major source of clean electrical energy.
- the most common base material for photovoltaic cells is silicon, in the vast majority of cases produced either as a multicrystalline ingot by a directional solidification technique, or as a single crystal by the Czochralski process.
- a large ingot is first cut into smaller blocks.
- the amount of material removed in block cutting may be up to several per cent of the amount later processed into solar cells.
- the block cutting process can be carried out with conventional equipment, such as diamond band saws.
- the ingot cutting remains will be in the form of a relatively coarse, wet powder contaminated by a small amount of metal and abrasive particles from the cutting process. This material is presently discarded.
- the block cutting can be done using a multiple wire saw.
- a steel wire running over guide spindles is placed under tension and pushed onto the silicon block while an abrasive slurry comprising abrasive particles (about 10 - 20 ⁇ m in diameter) in a cutting fluid, is fed to the cutting zone between the wire web and the block.
- the abrasive material is most commonly silicon carbide, and the cutting fluid is normally either polyethylene glycol or oil. This process can be referred to as free abrasive wire cutting. The material removed from the cutting remains is presently discarded.
- the cutting of wafers is done by multiple wire cutting.
- the wafer may be 160 - 240 ⁇ m thick, and the width of the kerf may be 180 — 220 ⁇ m.
- an amount of silicon comparable to the amount processed into solar cells is transported away by the abrasive slurry.
- the used slurry will contain polyethylene glycol or other cutting liquid, silicon carbide or other abrasive material, silicon, and metal from the steel wire.
- the cutting liquid and the coarse portion of the abrasive particles are usually reclaimed by various recycling processes, such as the process disclosed in US 6,113,473 or the one disclosed in US 6,231,628.
- the slurry residue containing abrasive fines, silicon, metal from the cutting wire and residual cutting liquid is discarded or sold as a low grade material.
- the steel wire is diamond impregnated, and the liquid fed to the cutting zone is acting only as a coolant. This process can be referred to as fixed abrasive wire cutting.
- the cutting remains then consists of silicon particles and a small amount of metal and abrasive suspended in the cooling liquid. This residual material is presently discarded or sold as a low grade material.
- Monocrystalline silicon is squared and cut to wafers.
- the cutting is usually done with free abrasive multiple wire saws, although fixed abrasive wire cutting or other cutting techniques may be used.
- the cutting remains are presently discarded or sold as a low grade material.
- Silicon feed stock for photovoltaics is a high cost material, and a process that can salvage the silicon content of the residual material as a useful feedstock for photovoltaic applications, from either or all of the above sources, is in great demand.
- US Patent 6,780,665 discloses a method of producing thin film solar cells from silicon recovered from cutting remains.
- the silicon is separated from wire saw slurry by conventional separation techniques such as centrifugation, decanting or filtration, followed by froth flotation or electrostatic precipitation. No examples were given, and it is unlikely that the required purity of silicon was obtained.
- WO 02/099166 discloses a process wherein solar grade silicon is obtained by electrolysis of silica in an electrolyte of CaO and CaCl 2 at about 800 0 C.
- One problem with this process is that elements such as boron and phosphorous deposit at a similar potential to silicon. Very pure and costly silica sources therefore have to be used.
- Electrolytic refining in order to upgrade metallurgical silicon to electronic grade was disclosed in US 3,254,010.
- current is passed through a molten salt electrolyte containing a fluoride, from a cathode to an anode consisting of impure silicon or germanium, or an alloy of these elements with nobler metals.
- the deposited silicon is at least 99.9 % pure.
- the electrolyte is a fluoride from the class consisting of alkali metal fluorides and alkaline earth metal fluorides, with up to about 10 % of an oxide of the metal being refined. It was stated that silicon of 99.99 % purity was produced, but no chemical analysis was reported.
- the main objective of the invention is to provide a method for recovering elemental silicon from cutting remains comprising particulate elemental silicon.
- a further objective of the invention is to provide a method for recovering photovoltaic quality silicon content for use as a feedstock for photovoltaic applications from cutting remains from cutting processes in solar wafer production.
- the invention is based on the realisation that the usual metal contaminants in cutting remains are nobler than silicon, such that it becomes possible to obtain an element specific transportation of silicon from the cutting remains by use of an electrochemically induced oxidation of elementary silicon in the cutting remains, transportation of the oxidised silicon in an electrolyte, and reduction of the oxidised silicon to elementary silicon in the form of a metallic phase at a site in a distance of the cutting remains.
- the invention relates to a method for recovering elemental silicon from cutting remains, which comprises:
- the electrolytic process according to the first aspect will be effective in removing elements more noble than silicon, as they will not be oxidized at the anode. These elements thus remain as solids in the anode.
- the electrolytic refining process may optionally be followed by a directional solidification step.
- Common metal impurities are >1000 times more soluble in the melt than the solid, and a directional solidification effectively concentrates such impurities in the part of the material that solidifies last. This part of the material can then be discarded.
- cutting remains we mean any solid fraction of the residual materials from cutting or sawing of elemental silicon and which contains solid particles of elemental silicon/saw dust.
- This solid fraction will typically be residual material from squaring, block cutting or wafer cutting, or from a mixture of materials from these sources, but may also be a solid fraction from other sawing/- cutting processes of elemental silicon. Any liquid remains, such as cutting fluid etc. are thus expected to be separated as far as practically possible from the solid fraction of the residual material.
- the solid fraction of the residual materials, i.e. the cutting remains will typically comprise particulate silicon contaminated by abrasive particles from the cutting process and a small amount of metal from the saw.
- the cutting remains may advantageously be densified to increase the electric conductivity when being formed to the anode.
- Densification techniques known from the fields of ceramic and powder metallurgical technologies may be employed, including slip casting, uniaxial and isostatic pressing, injection moulding, tape casting, etc.
- processing aids may range from small additions of deflocculants in the case of slip casting, to substantial additions of waxes and binders in the case of injection moulding.
- processing aids that promote sintering may be added to the cutting remains prior to green body formation.
- anode forming process is manufacturing the anodes by mixing cutting remains with a suitable binder, drying the mixture and dry pressing the anode precursor powder.
- a suitable binder Polyvinyl alcohol, other water soluble polymers, or latex are suitable binder materials.
- the mixture may be dried with conventional drying equipment. Spray drying is particularly advantageous.
- a pressure in the range from 75 MPa to 250 MPa is suitable for densification of the anodes.
- the pressure may be applied with a conventional hydraulic press, or by an isostatic press.
- anode forming process is slip casting.
- the cutting remains are mixed with water, to form a pourable slip with high solids loading.
- a deflocculant such as for instance 2-amino-2-methylpropanol, may be added in order to promote higher solids loading of the slip.
- the anode is formed by casting the slip in moulds made from a suitable material, such as plaster.
- the green body Once the green body has been formed by an appropriate technique, and dried if necessary, it is normally subjected to a heating cycle in air to remove the organic processing aids which were added to assist forming. This burn-out is generally performed by heating the green body carefully to a temperature in the range 300 - 400 °C.
- the green body is consolidated (sintered) by heating in a non- oxidizing (i.e. vacuum or a noble gas) atmosphere to form the anode.
- a non- oxidizing (i.e. vacuum or a noble gas) atmosphere to form the anode.
- the choice of consolidation temperature depends on the type of sintering aids added and the required degree of open porosity in the anode. Generally, temperatures higher than about 800 °C are necessary. With anodes manufactured from cutting remains with no sintering aids added, sintering temperatures in the range 1300 - 1450 °C and soak times at the sintering temperature of 0.5 to 24 hours have been found suitable. Another way of obtaining increased density and electric conductivity of the anode is adding a metal more noble than silicon to the cutting remains.
- Suitable metals comprise Cr, Fe, Co, Ni, and Cu.
- the anodes may be sintered at a temperature close to the eutectic temperature of the system Si-M.
- a temperature within 100 0 C of the eutectic temperature of the system has been found particularly suitable. For instance, if copper is used the optimal sintering temperature will be around 800 °C.
- the concentration of silicon in the cutting remains may advantageously be increased in order to obtain anodes with increased silicon content, leading to increased productivity and reduced energy consumption of the process.
- the increased concentration of silicon may be obtained by removing a fraction of the abrasive particles in the cutting remains. For example by conventional separation processes for removal of abrasive particles in the cutting remains, such as those presently employed commercially for recycling of abrasive particles and cutting fluid, by optimizing said processes for a combination of high yield and high concentration of silicon in the residual material. Other known separation techniques, such as froth flotation, may be employed.
- Anodes may alternatively be fabricated by a casting process wherein the cutting remains, having been subjected to additional processing steps to increase the volume fraction of silicon above about 70 %, is heated in an inert atmosphere directly to a temperature which is sufficient to cause melting of the metallic components of the processed material.
- the melting is either carried out directly in a mould suitable for producing anode blanks, or it is performed in a crucible and the melt is subsequently transferred to a casting mould.
- the temperature is then decreased, causing the melt to solidify. After solidification the cast shape is subjected to a controlled cooling cycle to minimize the level of thermal stresses.
- Sintered or cast anodes may optionally be machined to their final shape by grinding or milling.
- the cathode may be manufactured from any material that is electrically conductive, resistant against the chemical environment of the cell, easily separated from the deposited silicon, and which has a low diffusion rate in silicon.
- the cathode may advantageously be made of solar grade silicon, but other suited materials comprise high purity carbonaceous material, such as carbon, graphite or vitreous carbon, or transition or noble metals.
- the electrolyte must be able to dissolve oxidized silicon as well as possessing high ionic conductivity.
- the metal constituents of the electrolyte must be significantly less noble than silicon in order to avoid reduction at the cathode, as well as even in low concentrations dissolved in silicon not negatively affecting the properties of silicon relevant to solar efficiency. Suitable candidates for such electrolytes would be alkali metal halides, alkaline earth metal halides or mixtures of such.
- the halides should preferably be chloride, fluoride or mixtures.
- the composition may advantageously be a mixture of an alkali metal fluoride selected from the group LiF, NaF and KF in a concentration of 10 - 90 mol% and an alkaline earth metal fluoride selected from the group CaF 2 , SrF 2 and BaF 2 , in a concentration of 10 - 90 mol%. Mixtures of several alkali metal fluorides and/or several alkaline earth metal fluorides may also be used. Addition of BaF 2 , SrF 2 , or a combination of these has been found particularly effective in reducing volatilization. Optionally, K 2 SiF 6 can be added in amounts up to 20 mol%. The applicants have found that avoiding oxide in the electrolyte is important in order to limit the electrical resistance of the cell, probably due to formation of electrically insulating layers on one or both electrode surfaces.
- the total cell reaction for electrolytic silicon refining is:
- Si (S) Si(S) (1)
- the reversible cell voltage is thus 0 V.
- the cell voltage required for operating the process is that required to overcome resistance in circuitry, electrolyte and the electrodes, including overpotential at the cathode and anode.
- the optimum cell voltage is thus a function of the exact features of the cell design, amongst other factors, the anode-cathode distance and the composition of electrodes and electrolyte.
- overpotential we mean the potential difference between the working electrode, i.e. the anode or the cathode, and a reference electrode placed in the immediate vicinity of the working electrode.
- the most prevalent impurity element in the cutting remains is iron, but small amounts of other transition metals, such as chromium, nickel and copper, will normally also be present .
- Iron has 1.02 V higher standard reduction potential than silicon. It is estimated that the ratio of the thermodynamic activity of iron(III)fluoride to iron at the anode remains lower than 10 "9 up to an anodic overpotential of about 350 mV.
- the other transition metals have standard reduction potentials in a similar range, and dissolution of these metals into the electrolyte can thus be avoided by operating the electrolytic refining process in such a way that the anodic overpotential is lower than about 300 mV.
- a category of impurities that may be found in the anode are elements which are less noble than silicon, such as alkaline earth metals and alkali metals. These will dissolve into the electrolyte, but will not readily be reduced at the cathode. For instance, it is estimated that the ratio of the thermodynamic activity of calcium fluoride to calcium at the cathode will exceed 10 9 up to a cathodic overpotential of more than 550 mV, so co-deposition can therefore be avoided by operating the refining process with cathodic overpotential less than about 500 mV. Less noble elements will, however, accumulate in the electrolyte as fluorides, and may in some cases build up to unacceptable levels. If a deleterious impurity is accumulating to an unacceptable level, the electrolyte may be partly or wholly replaced with fresh electrolyte.
- Elements with a reduction potential that is similar to silicon cannot be refined by electrolytic techniques.
- Particularly relevant examples of this category of impurities are boron and phosphorous.
- These elements additionally have the disadvantage of a relatively small difference between solid and liquid solubility in silicon.
- concentration of these. elements is too great to obtain high quality solar grade silicon by electro-refining including subsequent directional solidification.
- Use of cutting remains from cutting of high purity silicon as a raw material overcomes this shortcoming, because of the inherent purity of the silicon in the cutting remains.
- the morphology is a function of cathodic current density, but is also influenced by other process parameters such as electrolyte composition and temperature. Using higher cathodic current density than about 0.05 - 0.20 A/cm 2 , a granular product is usually obtained. The granular product may be separated from residual electrolyte by known techniques, such as washing with aqueous AlCb-solution. Both deposit morphologies are within the scope of the invention.
- the electrolytic cell is operated at a temperature above the liquidus temperature of the electrolyte used. In order to minimize the volatilization of silicon species, it is advantageous to operate the cell at temperatures ⁇ 50 °C above the liquidus temperature. Depending on the electrolyte chosen, the cell temperature may be in the range 500 - 1200 °C.
- the vessel containing the molten electrolyte may be made from a range of known materials that are resistant to the chemical environment of the process. Suitable materials include silicon oxide, silicon nitride, silicon carbide, carbon, graphite and composites thereof.
- the residue in the anode compartment after the refining process may typically contain silicon carbide, silicon oxide and metals more noble than silicon.
- Figure 2 shows a SEM micrograph of the cathode from test 2, with element analysis.
- Figure 3 shows a photograph of obtained silicon in test 2.
- Figure 4 is an x-ray diffractogram of the obtained silicon shown in figure 2.
- Example of manufacturing of anode from cutting remains Used wire cutting slurry was treated by a commercial process to remove and recycle the coarse fraction of silicon carbide and the majority of the polyethylene glycol. Approximately 365 g of the dried residue from this process was added to 300 ml of 1 % aqueous solution of the dispersant Dolapix A88 (2-amino-2-methylpropanol) and dispersed using an Ultra-Turrax disperser. The resulting slip, about 55 % solids by weight, was rolled overnight on ajar roller mill with a few milling balls. The slip was cast onto plaster moulds to a depth of 15-20 mm. After drying the anodes were sintered at 1415 °C for 2 hours. The resulting anodes were machined to the desired size. The geometric density was 1.55 g/cm 3 .
- Electro-refining tests were carried out in order to demonstrate the possibility of producing pure elemental silicon. During these tests, silicon was dissolved electrochemically at the anodes, and electrodeposited at the cathode. The electrolyte was a molten salt in which silicon ions were dissolved before the beginning of the electrolysis.
- the molten salt was contained in a vitreous carbon crucible, placed in a graphite liner protecting the inside wall of a cylindrical vessel made of refractory steel.
- the cell was closed by a stainless steel lid cooled by circulating water.
- the atmosphere was U-grade (less than 5 ppm O 2 ) inert argon.
- Two anodes made of solar-grade silicon with a surface area of about 5 cm 2 were placed around the cathode.
- Two Si electro-refining tests were conducted in two different molten salts. The specific conditions applied in each tests are listed in Table 1.
- the runs consisted in applying a constant current between the anodes and the cathode. At the end of the run, the cathode was removed from the cell in order to recover the deposited silicon. The cell voltage was found constant during the runs and close to 100 mV.
- the deposit partly consisted of a coherent layer on the cathode substrate and partly of silicon in granular form.
- the deposit was washed in an aqueous AlCl 3 solution for 24 hours at room temperature, in order to dissolve the adhering salt.
- the solution was finally filtered and dried.
- a SEM micrograph of the cathode from test 2 is shown in figure 2.
- a coherent deposit of silicon can be seen.
- An EDS-analysis of the deposited silicon shows only silicon and carbon, which is an artefact due to contamination by e.g. oil residues in the vacuum chamber of the microscope.
- the powder is shown in figure 3.
- An X-Ray diffractogram obtained from test 1 is shown in figure 4: No impurity was found in the silicon apart from oxide formed after separation from the electrolytes.
- the current efficiency of the process was calculated according to the ratio between the mass of silicon recovered after washing and the theoretical mass that should be obtained for a given charge passed (calculated according to Faraday's law). Table 2 shows that in test 1 and test 2, the current efficiency is about 70%.
Abstract
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Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880020803A CN101743342A (en) | 2007-06-18 | 2008-06-18 | Method for recovering elemental silicon from cutting remains |
JP2010513142A JP2010530637A (en) | 2007-06-18 | 2008-06-18 | Method to regenerate elemental silicon from cutting residue |
DE200811001644 DE112008001644T5 (en) | 2007-06-18 | 2008-06-18 | Process for recovering elemental silicon from cutting residues |
NO20100039A NO345359B1 (en) | 2007-06-18 | 2010-01-12 | Method for recovering elemental silicon from cutting residues |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US94471607P | 2007-06-18 | 2007-06-18 | |
US60/944,716 | 2007-06-18 |
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WO2008156372A2 true WO2008156372A2 (en) | 2008-12-24 |
WO2008156372A3 WO2008156372A3 (en) | 2009-02-19 |
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PCT/NO2008/000221 WO2008156372A2 (en) | 2007-06-18 | 2008-06-18 | Method for recovering elemental silicon from cutting remains |
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JP (1) | JP2010530637A (en) |
CN (1) | CN101743342A (en) |
DE (1) | DE112008001644T5 (en) |
WO (1) | WO2008156372A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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RU2491374C1 (en) * | 2012-06-13 | 2013-08-27 | Федеральное государственное бюджетное учреждение науки Институт высокотемпературной электрохимии Уральского отделения Российской Академии наук | Electrochemical method of obtaining continuous layers of silicon |
Families Citing this family (4)
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DE102013112004B4 (en) | 2013-10-31 | 2018-08-16 | variata Dorit Lang GmbH & Co. KG | Recycling of photovoltaic modules and / or solar modules |
CN105384175A (en) * | 2015-12-25 | 2016-03-09 | 苏州格瑞动力电源科技有限公司 | Purification method of industrial waste silicon |
CN108823637A (en) * | 2018-07-30 | 2018-11-16 | 孟静 | The device of purifying polycrystalline silicon |
CN108842183A (en) * | 2018-09-10 | 2018-11-20 | 孟静 | The preparation method of polysilicon chip |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2480796A1 (en) * | 1980-04-21 | 1981-10-23 | Extramet Sarl | High purity silicon deposit formation - by electrolytic deposition from alkali (ne earth) metal halide melt contg. dissolved silicon |
US4448651A (en) * | 1982-06-10 | 1984-05-15 | The United States Of America As Represented By The United States Department Of Energy | Process for producing silicon |
US20030041895A1 (en) * | 2001-08-28 | 2003-03-06 | Billiet Romain Louis | Photovoltaic cells from silicon kerf |
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NL290208A (en) | 1962-03-14 | |||
US6113473A (en) | 1997-04-25 | 2000-09-05 | G.T. Equipment Technologies Inc. | Method and apparatus for improved wire saw slurry |
US6231628B1 (en) | 1998-01-07 | 2001-05-15 | Memc Electronic Materials, Inc. | Method for the separation, regeneration and reuse of an exhausted glycol-based slurry |
NO317073B1 (en) * | 2001-06-05 | 2004-08-02 | Sintef | Electrolyte and process for the manufacture or refining of silicon |
JP2007016293A (en) * | 2005-07-08 | 2007-01-25 | Kyoto Univ | Method for producing metal by suspension electrolysis |
-
2008
- 2008-06-18 JP JP2010513142A patent/JP2010530637A/en active Pending
- 2008-06-18 DE DE200811001644 patent/DE112008001644T5/en active Pending
- 2008-06-18 CN CN200880020803A patent/CN101743342A/en active Pending
- 2008-06-18 WO PCT/NO2008/000221 patent/WO2008156372A2/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2480796A1 (en) * | 1980-04-21 | 1981-10-23 | Extramet Sarl | High purity silicon deposit formation - by electrolytic deposition from alkali (ne earth) metal halide melt contg. dissolved silicon |
US4448651A (en) * | 1982-06-10 | 1984-05-15 | The United States Of America As Represented By The United States Department Of Energy | Process for producing silicon |
US20030041895A1 (en) * | 2001-08-28 | 2003-03-06 | Billiet Romain Louis | Photovoltaic cells from silicon kerf |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2491374C1 (en) * | 2012-06-13 | 2013-08-27 | Федеральное государственное бюджетное учреждение науки Институт высокотемпературной электрохимии Уральского отделения Российской Академии наук | Electrochemical method of obtaining continuous layers of silicon |
Also Published As
Publication number | Publication date |
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JP2010530637A (en) | 2010-09-09 |
WO2008156372A3 (en) | 2009-02-19 |
DE112008001644T5 (en) | 2010-09-09 |
CN101743342A (en) | 2010-06-16 |
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