WO2008149941A1 - 分光モジュール - Google Patents

分光モジュール Download PDF

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Publication number
WO2008149941A1
WO2008149941A1 PCT/JP2008/060379 JP2008060379W WO2008149941A1 WO 2008149941 A1 WO2008149941 A1 WO 2008149941A1 JP 2008060379 W JP2008060379 W JP 2008060379W WO 2008149941 A1 WO2008149941 A1 WO 2008149941A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
section
body section
spectroscopic
detecting element
Prior art date
Application number
PCT/JP2008/060379
Other languages
English (en)
French (fr)
Inventor
Tomofumi Suzuki
Katsumi Shibayama
Takafumi Yokino
Masashi Ito
Helmut Teichmann
Dietmar Hiller
Ulrich Starker
Original Assignee
Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007152966A external-priority patent/JP4891840B2/ja
Priority claimed from JP2007153019A external-priority patent/JP4891841B2/ja
Priority claimed from JP2007153014A external-priority patent/JP4887221B2/ja
Priority claimed from JP2007238317A external-priority patent/JP4887251B2/ja
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Priority to EP08765192.3A priority Critical patent/EP2075555A4/en
Priority to US12/377,314 priority patent/US8049887B2/en
Priority to CN2008800005084A priority patent/CN101542250B/zh
Publication of WO2008149941A1 publication Critical patent/WO2008149941A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment

Abstract

　分光モジュール１は、光Ｌ１，Ｌ２を透過させる本体部２と、本体部２の前面２ａから本体部２に入射した光Ｌ１を分光して前面２ａ側に反射する分光部３と、分光部３によって分光されて反射された光Ｌ２を検出する光検出部４１を有し、本体部２の前面２ａに形成された配線９にフェースダウンボンディングによって電気的に接続された光検出素子４と、光検出素子４の本体部２側に充填され、光Ｌ１，Ｌ２を透過させるアンダーフィル材１２と、を備えている。光検出素子４は、分光部３に進行する光Ｌ１が通過する光通過孔４２を有しており、光検出素子４における本体部２側の後面４ａには、光通過孔４２の光出射開口４２ｂを囲むように矩形環状の凸部４３が形成されている。
PCT/JP2008/060379 2007-06-08 2008-06-05 分光モジュール WO2008149941A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08765192.3A EP2075555A4 (en) 2007-06-08 2008-06-05 SPECTROSCOPIC MODULE
US12/377,314 US8049887B2 (en) 2007-06-08 2008-06-05 Spectroscopic module
CN2008800005084A CN101542250B (zh) 2007-06-08 2008-06-05 分光模块

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
JP2007-152966 2007-06-08
JP2007153029 2007-06-08
JP2007-153039 2007-06-08
JP2007152966A JP4891840B2 (ja) 2007-06-08 2007-06-08 分光モジュール
JP2007153039 2007-06-08
JP2007-153019 2007-06-08
JP2007153019A JP4891841B2 (ja) 2007-06-08 2007-06-08 分光モジュール
JP2007-153014 2007-06-08
JP2007-153029 2007-06-08
JP2007153014A JP4887221B2 (ja) 2007-06-08 2007-06-08 分光モジュール
JP2007238317A JP4887251B2 (ja) 2007-09-13 2007-09-13 分光モジュール
JP2007-238317 2007-09-13

Publications (1)

Publication Number Publication Date
WO2008149941A1 true WO2008149941A1 (ja) 2008-12-11

Family

ID=40093751

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060379 WO2008149941A1 (ja) 2007-06-08 2008-06-05 分光モジュール

Country Status (5)

Country Link
US (1) US8049887B2 (ja)
EP (1) EP2075555A4 (ja)
KR (1) KR20100017082A (ja)
TW (1) TW200916739A (ja)
WO (1) WO2008149941A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4887221B2 (ja) * 2007-06-08 2012-02-29 浜松ホトニクス株式会社 分光モジュール
KR20100017083A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
WO2008149939A1 (ja) 2007-06-08 2008-12-11 Hamamatsu Photonics K.K. 分光器
JP4891841B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
US8045155B2 (en) * 2007-06-08 2011-10-25 Hamamatsu Photonics K.K. Spectroscopic module
JP4891840B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
JP5205238B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP5415060B2 (ja) 2008-05-15 2014-02-12 浜松ホトニクス株式会社 分光モジュール
TWI453380B (zh) * 2011-11-18 2014-09-21 Wang Sheng Method of manufacturing spectrometer
GB2508376A (en) 2012-11-29 2014-06-04 Ibm Optical spectrometer comprising an adjustably strained photodiode
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
EP3372966B1 (en) * 2017-03-10 2021-09-01 Hitachi High-Tech Analytical Science Limited A portable analyzer using optical emission spectoscopy

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JP2005308495A (ja) * 2004-04-20 2005-11-04 Hamamatsu Photonics Kk 分光器及びそれを用いた測定装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63229765A (ja) * 1987-03-18 1988-09-26 Fujitsu Ltd 赤外線検知器
JPH04294223A (ja) 1990-12-04 1992-10-19 Carl Zeiss:Fa ダイオード列型分光分析器
JPH06129908A (ja) * 1992-10-15 1994-05-13 Hamamatsu Photonics Kk 分光イメージングセンサ
JPH06229829A (ja) * 1993-02-04 1994-08-19 Olympus Optical Co Ltd 受光素子アレイ
JP2003139611A (ja) * 2001-11-06 2003-05-14 Olympus Optical Co Ltd 分光光度計
JP2003243444A (ja) 2002-02-20 2003-08-29 Nippon Telegr & Teleph Corp <Ntt> 基板実装構造及び半導体装置
JP2004191246A (ja) * 2002-12-12 2004-07-08 Matsushita Electric Ind Co Ltd 凹凸検出センサ
JP2004354176A (ja) 2003-05-28 2004-12-16 Hamamatsu Photonics Kk 光検出器及びそれを用いた分光器
JP2005308495A (ja) * 2004-04-20 2005-11-04 Hamamatsu Photonics Kk 分光器及びそれを用いた測定装置

Also Published As

Publication number Publication date
US8049887B2 (en) 2011-11-01
KR20100017082A (ko) 2010-02-16
TW200916739A (en) 2009-04-16
EP2075555A1 (en) 2009-07-01
US20100238439A1 (en) 2010-09-23
EP2075555A4 (en) 2014-01-01

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