WO2008149928A1 - 分光モジュール - Google Patents

分光モジュール Download PDF

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Publication number
WO2008149928A1
WO2008149928A1 PCT/JP2008/060361 JP2008060361W WO2008149928A1 WO 2008149928 A1 WO2008149928 A1 WO 2008149928A1 JP 2008060361 W JP2008060361 W JP 2008060361W WO 2008149928 A1 WO2008149928 A1 WO 2008149928A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
passing hole
spectroscopic module
stray
spectroscopic
Prior art date
Application number
PCT/JP2008/060361
Other languages
English (en)
French (fr)
Inventor
Katsumi Shibayama
Takafumi Yokino
Tomofumi Suzuki
Helmut Teichmann
Dietmar Hiller
Ulrich Starker
Original Assignee
Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Priority to EP08765174.1A priority Critical patent/EP2154498B1/en
Priority to US12/377,325 priority patent/US8068224B2/en
Priority to CN2008800005046A priority patent/CN101542247B/zh
Publication of WO2008149928A1 publication Critical patent/WO2008149928A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector

Abstract

　分光モジュール１では、分光部３に進行する光Ｌ１が通過する光通過孔６ａ、及び光検出素子４の光検出部４ａに進行する光Ｌ２が通過する光通過孔６ｂを有する光吸収層６がパターニングによって一体成形される。そのため、光通過孔６ａと光通過孔６ｂとの相対的な位置関係にずれが生じるのを防止することができる。しかも、光吸収層６によって、迷光の発生が抑制され、また、迷光が吸収されるため、光検出素子４の光検出部４ａに迷光が入射するのを抑制することができる。従って、分光モジュール１によれば、信頼性を向上させることが可能となる。
PCT/JP2008/060361 2007-06-08 2008-06-05 分光モジュール WO2008149928A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08765174.1A EP2154498B1 (en) 2007-06-08 2008-06-05 Spectroscopic module
US12/377,325 US8068224B2 (en) 2007-06-08 2008-06-05 Spectroscopic module
CN2008800005046A CN101542247B (zh) 2007-06-08 2008-06-05 分光模块

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007153014A JP4887221B2 (ja) 2007-06-08 2007-06-08 分光モジュール
JP2007-153014 2007-06-08

Publications (1)

Publication Number Publication Date
WO2008149928A1 true WO2008149928A1 (ja) 2008-12-11

Family

ID=40093739

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060361 WO2008149928A1 (ja) 2007-06-08 2008-06-05 分光モジュール

Country Status (7)

Country Link
US (1) US8068224B2 (ja)
EP (1) EP2154498B1 (ja)
JP (1) JP4887221B2 (ja)
KR (1) KR101642514B1 (ja)
CN (3) CN101542247B (ja)
TW (1) TWI445931B (ja)
WO (1) WO2008149928A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009139321A1 (ja) * 2008-05-15 2009-11-19 浜松ホトニクス株式会社 分光モジュール
CN104541138A (zh) * 2012-08-06 2015-04-22 浜松光子学株式会社 分光器
WO2020008851A1 (ja) * 2018-07-06 2020-01-09 浜松ホトニクス株式会社 分光モジュール、及び分光モジュールの製造方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100017086A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
KR20100017083A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
JP4891840B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
US8049887B2 (en) 2007-06-08 2011-11-01 Hamamatsu Photonics K.K. Spectroscopic module
JP4891841B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
KR101491889B1 (ko) * 2007-06-08 2015-02-11 하마마츠 포토닉스 가부시키가이샤 분광기
JP4887221B2 (ja) 2007-06-08 2012-02-29 浜松ホトニクス株式会社 分光モジュール
JP5207938B2 (ja) * 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP2010261767A (ja) 2009-05-01 2010-11-18 Canon Inc 分光装置及びそれを有する画像形成装置
JP5825880B2 (ja) * 2011-06-27 2015-12-02 浜松ホトニクス株式会社 分光モジュール
JP5910989B2 (ja) * 2012-03-09 2016-04-27 株式会社リコー 分光計測装置、画像評価装置及び画像形成装置
JP5113947B2 (ja) * 2012-04-18 2013-01-09 浜松ホトニクス株式会社 分光モジュール
GB2508376A (en) 2012-11-29 2014-06-04 Ibm Optical spectrometer comprising an adjustably strained photodiode
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
CN107179584B (zh) * 2016-03-10 2019-06-14 源杰科技股份有限公司 光学连接器
EP3372966B1 (en) * 2017-03-10 2021-09-01 Hitachi High-Tech Analytical Science Limited A portable analyzer using optical emission spectoscopy

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63229765A (ja) * 1987-03-18 1988-09-26 Fujitsu Ltd 赤外線検知器
JPH06229829A (ja) * 1993-02-04 1994-08-19 Olympus Optical Co Ltd 受光素子アレイ
JP3119917B2 (ja) 1990-12-04 2000-12-25 カール−ツアイス−スチフツング ダイオード列型分光分析器
JP2003139611A (ja) * 2001-11-06 2003-05-14 Olympus Optical Co Ltd 分光光度計
JP2003337206A (ja) * 2001-05-09 2003-11-28 Nippon Sheet Glass Co Ltd 樹脂正立レンズアレイおよびその製造方法
JP2004191246A (ja) * 2002-12-12 2004-07-08 Matsushita Electric Ind Co Ltd 凹凸検出センサ
JP2004354176A (ja) * 2003-05-28 2004-12-16 Hamamatsu Photonics Kk 光検出器及びそれを用いた分光器
JP2005308495A (ja) * 2004-04-20 2005-11-04 Hamamatsu Photonics Kk 分光器及びそれを用いた測定装置

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143685A (en) * 1978-04-29 1979-11-09 Ritsuo Hasumi Compact spectroscope for digital light wavemeter
JPS626126A (ja) * 1985-07-03 1987-01-13 Shimadzu Corp 光スペクトル分析用センサ
DE3611246A1 (de) * 1986-04-04 1987-10-15 Kernforschungsz Karlsruhe Verfahren zum herstellen eines passiven optischen bauelements mit einem oder mehreren echelette-gittern und nach diesem verfahren hergestelltes bauelement
JPH03119917A (ja) 1989-09-30 1991-05-22 Iseki & Co Ltd 草刈機の刈草装置
US5026160A (en) * 1989-10-04 1991-06-25 The United States Of America As Represented By The Secretary Of The Navy Monolithic optical programmable spectrograph (MOPS)
JP3375147B2 (ja) 1992-05-26 2003-02-10 浜松ホトニクス株式会社 半導体光検出装置
JP2713838B2 (ja) 1992-10-15 1998-02-16 浜松ホトニクス株式会社 分光イメージングセンサ
JPH08145794A (ja) 1994-11-17 1996-06-07 Shimadzu Corp 分光器
US6224912B1 (en) 1996-04-03 2001-05-01 The Rogo Institute Cancer-cell proliferation-suppressing material produced by cancer cells restricted by entrapment
US5995221A (en) * 1997-02-28 1999-11-30 Instruments S.A., Inc. Modified concentric spectrograph
US6303934B1 (en) 1997-04-10 2001-10-16 James T. Daly Monolithic infrared spectrometer apparatus and methods
DE19717015A1 (de) * 1997-04-23 1998-10-29 Inst Mikrotechnik Mainz Gmbh Miniaturisiertes optisches Bauelement sowie Verfahren zu seiner Herstellung
EP0942267B1 (de) * 1998-03-11 2006-08-30 Gretag-Macbeth AG Spektrometer
US6181418B1 (en) * 1998-03-12 2001-01-30 Gretag Macbeth Llc Concentric spectrometer
EP1144965B1 (en) * 1999-01-08 2004-11-24 Ibsen Photonics A/S Spectrometer
DE59913150D1 (de) 1999-04-01 2006-04-27 Gretag Macbeth Ag Regensdorf Spektrometer
US6657723B2 (en) * 2000-12-13 2003-12-02 International Business Machines Corporation Multimode planar spectrographs for wavelength demultiplexing and methods of fabrication
US7002697B2 (en) 2001-08-02 2006-02-21 Aegis Semiconductor, Inc. Tunable optical instruments
JP3912111B2 (ja) 2002-01-09 2007-05-09 富士通株式会社 波長多重双方向光伝送モジュール
JP3818441B2 (ja) 2002-02-20 2006-09-06 日本電信電話株式会社 基板実装構造及び半導体装置
JP2003318478A (ja) 2002-04-26 2003-11-07 Sumitomo Electric Ind Ltd 光通信装置
DE10304312A1 (de) * 2003-02-04 2004-08-12 Carl Zeiss Jena Gmbh Kompakt-Spektrometer
JP2004309146A (ja) * 2003-04-02 2004-11-04 Olympus Corp 分光光度計
JP4473665B2 (ja) * 2004-07-16 2010-06-02 浜松ホトニクス株式会社 分光器
CN1800941B (zh) 2005-01-06 2010-05-12 群康科技(深圳)有限公司 背光模组
US7697137B2 (en) * 2006-04-28 2010-04-13 Corning Incorporated Monolithic Offner spectrometer
JP4891840B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
KR20100017086A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
KR101491889B1 (ko) * 2007-06-08 2015-02-11 하마마츠 포토닉스 가부시키가이샤 분광기
JP4887221B2 (ja) 2007-06-08 2012-02-29 浜松ホトニクス株式会社 分光モジュール
KR20100017083A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
JP4891841B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
US8049887B2 (en) * 2007-06-08 2011-11-01 Hamamatsu Photonics K.K. Spectroscopic module

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63229765A (ja) * 1987-03-18 1988-09-26 Fujitsu Ltd 赤外線検知器
JP3119917B2 (ja) 1990-12-04 2000-12-25 カール−ツアイス−スチフツング ダイオード列型分光分析器
JPH06229829A (ja) * 1993-02-04 1994-08-19 Olympus Optical Co Ltd 受光素子アレイ
JP2003337206A (ja) * 2001-05-09 2003-11-28 Nippon Sheet Glass Co Ltd 樹脂正立レンズアレイおよびその製造方法
JP2003139611A (ja) * 2001-11-06 2003-05-14 Olympus Optical Co Ltd 分光光度計
JP2004191246A (ja) * 2002-12-12 2004-07-08 Matsushita Electric Ind Co Ltd 凹凸検出センサ
JP2004354176A (ja) * 2003-05-28 2004-12-16 Hamamatsu Photonics Kk 光検出器及びそれを用いた分光器
JP2005308495A (ja) * 2004-04-20 2005-11-04 Hamamatsu Photonics Kk 分光器及びそれを用いた測定装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009139321A1 (ja) * 2008-05-15 2009-11-19 浜松ホトニクス株式会社 分光モジュール
JP2009276244A (ja) * 2008-05-15 2009-11-26 Hamamatsu Photonics Kk 分光モジュール
CN104541138A (zh) * 2012-08-06 2015-04-22 浜松光子学株式会社 分光器
US9625314B2 (en) 2012-08-06 2017-04-18 Hamamatsu Photonics K.K. Spectrometer
WO2020008851A1 (ja) * 2018-07-06 2020-01-09 浜松ホトニクス株式会社 分光モジュール、及び分光モジュールの製造方法
JPWO2020008851A1 (ja) * 2018-07-06 2021-08-02 浜松ホトニクス株式会社 分光モジュール、及び分光モジュールの製造方法
US11493386B2 (en) 2018-07-06 2022-11-08 Hamamatsu Photonics K.K. Spectral module and method for manufacturing spectral module

Also Published As

Publication number Publication date
EP2154498A1 (en) 2010-02-17
US20100201980A1 (en) 2010-08-12
CN101542249A (zh) 2009-09-23
JP4887221B2 (ja) 2012-02-29
TWI445931B (zh) 2014-07-21
CN101542252A (zh) 2009-09-23
CN101542247A (zh) 2009-09-23
JP2008304385A (ja) 2008-12-18
EP2154498A4 (en) 2013-12-25
KR20100017085A (ko) 2010-02-16
TW200916741A (en) 2009-04-16
US8068224B2 (en) 2011-11-29
EP2154498B1 (en) 2018-08-08
KR101642514B1 (ko) 2016-07-25
CN101542247B (zh) 2013-08-21
CN101542249B (zh) 2012-07-25

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