WO2008140728A3 - Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism - Google Patents

Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism Download PDF

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Publication number
WO2008140728A3
WO2008140728A3 PCT/US2008/005884 US2008005884W WO2008140728A3 WO 2008140728 A3 WO2008140728 A3 WO 2008140728A3 US 2008005884 W US2008005884 W US 2008005884W WO 2008140728 A3 WO2008140728 A3 WO 2008140728A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate transport
transport apparatus
mechanical switch
switch mechanism
movable arms
Prior art date
Application number
PCT/US2008/005884
Other languages
French (fr)
Other versions
WO2008140728A2 (en
Inventor
Christopher Hofmeister
Alexander Krupyshev
Ulysses Gilchrist
Martin Hosek
Original Assignee
Brooks Automation, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation, Inc. filed Critical Brooks Automation, Inc.
Priority to KR1020207001085A priority Critical patent/KR102216638B1/en
Priority to KR1020177031089A priority patent/KR102121016B1/en
Priority to JP2010507454A priority patent/JP2010527149A/en
Priority to KR1020147029326A priority patent/KR101629734B1/en
Priority to KR1020167014985A priority patent/KR20160068991A/en
Priority claimed from US12/117,415 external-priority patent/US8752449B2/en
Publication of WO2008140728A2 publication Critical patent/WO2008140728A2/en
Publication of WO2008140728A3 publication Critical patent/WO2008140728A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Abstract

A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
PCT/US2008/005884 2007-05-08 2008-05-08 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism WO2008140728A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020207001085A KR102216638B1 (en) 2007-05-08 2008-05-08 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
KR1020177031089A KR102121016B1 (en) 2007-05-08 2008-05-08 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
JP2010507454A JP2010527149A (en) 2007-05-08 2008-05-08 Substrate transfer apparatus having a plurality of movable arms using a mechanical switch mechanism
KR1020147029326A KR101629734B1 (en) 2007-05-08 2008-05-08 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
KR1020167014985A KR20160068991A (en) 2007-05-08 2008-05-08 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US91678107P 2007-05-08 2007-05-08
US60/916,781 2007-05-08
US12/117,415 2008-05-08
US12/117,415 US8752449B2 (en) 2007-05-08 2008-05-08 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism

Publications (2)

Publication Number Publication Date
WO2008140728A2 WO2008140728A2 (en) 2008-11-20
WO2008140728A3 true WO2008140728A3 (en) 2009-12-30

Family

ID=40002839

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/005884 WO2008140728A2 (en) 2007-05-08 2008-05-08 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism

Country Status (1)

Country Link
WO (1) WO2008140728A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8267636B2 (en) 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
US9117870B2 (en) 2008-03-27 2015-08-25 Lam Research Corporation High throughput cleaner chamber
US8784033B2 (en) * 2009-01-11 2014-07-22 Applied Materials, Inc. Robot systems, apparatus and methods for transporting substrates
US8562272B2 (en) 2010-02-16 2013-10-22 Lam Research Corporation Substrate load and unload mechanisms for high throughput
US8893642B2 (en) 2010-03-24 2014-11-25 Lam Research Corporation Airflow management for low particulate count in a process tool
US8282698B2 (en) 2010-03-24 2012-10-09 Lam Research Corporation Reduction of particle contamination produced by moving mechanisms in a process tool
WO2014008009A1 (en) * 2012-07-05 2014-01-09 Applied Materials, Inc Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems
US20180308728A1 (en) * 2017-02-07 2018-10-25 Brooks Automation, Inc. Method and apparatus for substrate transport
TWI743512B (en) 2018-07-06 2021-10-21 日商川崎重工業股份有限公司 Substrate conveying robot and its control method
US11569111B2 (en) * 2019-12-02 2023-01-31 Brooks Automation Us, Llc Substrate processing apparatus
CN110883767B (en) * 2019-12-04 2021-04-20 江苏电子信息职业学院 Mechanical arm assembly for automatic production

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6339969B1 (en) * 1999-06-04 2002-01-22 Septimiu E. Salcudean Three-degree-of-freedom parallel planar manipulator
US20020114690A1 (en) * 2001-02-17 2002-08-22 Tooru Ishigame Transfer system
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
US6525803B2 (en) * 1999-12-21 2003-02-25 Asml Netherlands B.V. Balanced positioning system for use in lithographic apparatus
US20050262959A1 (en) * 2002-11-06 2005-12-01 Mcgill University Four-degree-of-freedom parallel manipulator for producing schonflies motions
US20060182536A1 (en) * 2004-12-22 2006-08-17 Mike Rice Cartesian robot cluster tool architecture
US20060263177A1 (en) * 2003-11-10 2006-11-23 Meulen Peter V D Linear semiconductor processing facilities
US20060269384A1 (en) * 2005-05-24 2006-11-30 Jubin Kiaie Dynamic carosel robotic workcell

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
US6339969B1 (en) * 1999-06-04 2002-01-22 Septimiu E. Salcudean Three-degree-of-freedom parallel planar manipulator
US6525803B2 (en) * 1999-12-21 2003-02-25 Asml Netherlands B.V. Balanced positioning system for use in lithographic apparatus
US20060203216A1 (en) * 1999-12-21 2006-09-14 Asml Netherlands B.V. Balanced positioning system for use in lithographic apparatus
US20020114690A1 (en) * 2001-02-17 2002-08-22 Tooru Ishigame Transfer system
US20050262959A1 (en) * 2002-11-06 2005-12-01 Mcgill University Four-degree-of-freedom parallel manipulator for producing schonflies motions
US20060263177A1 (en) * 2003-11-10 2006-11-23 Meulen Peter V D Linear semiconductor processing facilities
US20060182536A1 (en) * 2004-12-22 2006-08-17 Mike Rice Cartesian robot cluster tool architecture
US20060269384A1 (en) * 2005-05-24 2006-11-30 Jubin Kiaie Dynamic carosel robotic workcell

Also Published As

Publication number Publication date
WO2008140728A2 (en) 2008-11-20

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