WO2008130537A3 - Micromechanical device with gold alloy contacts and method of manufacture - Google Patents
Micromechanical device with gold alloy contacts and method of manufacture Download PDFInfo
- Publication number
- WO2008130537A3 WO2008130537A3 PCT/US2008/004844 US2008004844W WO2008130537A3 WO 2008130537 A3 WO2008130537 A3 WO 2008130537A3 US 2008004844 W US2008004844 W US 2008004844W WO 2008130537 A3 WO2008130537 A3 WO 2008130537A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gold alloy
- switch
- gold
- manufacture
- contact
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/02—Contacts characterised by the material thereof
- H01H1/021—Composite material
- H01H1/023—Composite material having a noble metal as the basic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/02—Contacts characterised by the material thereof
- H01H1/04—Co-operating contacts of different material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0052—Special contact materials used for MEMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
- H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
Abstract
A MEMS switch device is made using a gold alloy as the switch contact material. The increased mechanical hardness of the alloy compared to the pure gold prevents the contacts of the switch from welding together. A scrubbing action which occurs when the switch closes may allow the contact surfaces to come to rest where their surfaces are complementary, thus resulting in higher contact area and low contact resistance, despite the higher sheet resistance of the gold alloy material relative to the pure gold material.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/785,119 US20080250785A1 (en) | 2007-04-16 | 2007-04-16 | Micromechanical device with gold alloy contacts and method of manufacture |
US11/785,119 | 2007-04-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008130537A2 WO2008130537A2 (en) | 2008-10-30 |
WO2008130537A3 true WO2008130537A3 (en) | 2009-12-30 |
Family
ID=39852475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2008/004844 WO2008130537A2 (en) | 2007-04-16 | 2008-04-15 | Micromechanical device with gold alloy contacts and method of manufacture |
Country Status (2)
Country | Link |
---|---|
US (1) | US20080250785A1 (en) |
WO (1) | WO2008130537A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120174572A1 (en) * | 2011-01-10 | 2012-07-12 | Donato Clausi | Method for mechanical and electrical integration of sma wires to microsystems |
ES2555828B1 (en) * | 2014-07-04 | 2016-10-24 | Bsh Electrodomésticos España, S.A. | Disposition of gas burners, cooking point, and kitchen |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020011758A1 (en) * | 1999-02-26 | 2002-01-31 | Vivek Agrawal | MEMS microactuators located in interior regions of frames having openings therein and methods of operating same |
US20050236935A1 (en) * | 2004-04-22 | 2005-10-27 | Ngk Insulators, Ltd. | Microswitch and method for manufacturing the same |
US7086918B2 (en) * | 2002-12-11 | 2006-08-08 | Applied Materials, Inc. | Low temperature process for passivation applications |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7235750B1 (en) * | 2005-01-31 | 2007-06-26 | United States Of America As Represented By The Secretary Of The Air Force | Radio frequency MEMS switch contact metal selection |
US20080197964A1 (en) * | 2007-02-21 | 2008-08-21 | Simpler Networks Inc. | Mems actuators and switches |
-
2007
- 2007-04-16 US US11/785,119 patent/US20080250785A1/en not_active Abandoned
-
2008
- 2008-04-15 WO PCT/US2008/004844 patent/WO2008130537A2/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020011758A1 (en) * | 1999-02-26 | 2002-01-31 | Vivek Agrawal | MEMS microactuators located in interior regions of frames having openings therein and methods of operating same |
US7086918B2 (en) * | 2002-12-11 | 2006-08-08 | Applied Materials, Inc. | Low temperature process for passivation applications |
US20050236935A1 (en) * | 2004-04-22 | 2005-10-27 | Ngk Insulators, Ltd. | Microswitch and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
US20080250785A1 (en) | 2008-10-16 |
WO2008130537A2 (en) | 2008-10-30 |
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