WO2008118766A3 - Beam stabilized fiber laser - Google Patents

Beam stabilized fiber laser Download PDF

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Publication number
WO2008118766A3
WO2008118766A3 PCT/US2008/057770 US2008057770W WO2008118766A3 WO 2008118766 A3 WO2008118766 A3 WO 2008118766A3 US 2008057770 W US2008057770 W US 2008057770W WO 2008118766 A3 WO2008118766 A3 WO 2008118766A3
Authority
WO
WIPO (PCT)
Prior art keywords
fiber laser
stabilized fiber
application system
beam stabilized
active
Prior art date
Application number
PCT/US2008/057770
Other languages
French (fr)
Other versions
WO2008118766A2 (en
Inventor
Gyu C. Cho
Oleg Bouevitch
Original Assignee
Imra America, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imra America, Inc. filed Critical Imra America, Inc.
Priority to JP2010501117A priority Critical patent/JP2010522998A/en
Priority to EP08744160.6A priority patent/EP2130272B1/en
Publication of WO2008118766A2 publication Critical patent/WO2008118766A2/en
Publication of WO2008118766A3 publication Critical patent/WO2008118766A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA

Abstract

A laser head generating ultrashort pulses is integrated with an active beam steering device in the head. Direct linkage with an application system by means of an adequate interface protocol enables the active device to be controlled directly by the application system.
PCT/US2008/057770 2007-03-27 2008-03-21 Beam stabilized fiber laser WO2008118766A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010501117A JP2010522998A (en) 2007-03-27 2008-03-21 Beam stabilized fiber laser
EP08744160.6A EP2130272B1 (en) 2007-03-27 2008-03-21 Beam stabilized fiber laser

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/727,500 US7885311B2 (en) 2007-03-27 2007-03-27 Beam stabilized fiber laser
US11/727,500 2007-03-27

Publications (2)

Publication Number Publication Date
WO2008118766A2 WO2008118766A2 (en) 2008-10-02
WO2008118766A3 true WO2008118766A3 (en) 2010-01-14

Family

ID=39789242

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/057770 WO2008118766A2 (en) 2007-03-27 2008-03-21 Beam stabilized fiber laser

Country Status (4)

Country Link
US (2) US7885311B2 (en)
EP (1) EP2130272B1 (en)
JP (1) JP2010522998A (en)
WO (1) WO2008118766A2 (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7361171B2 (en) 2003-05-20 2008-04-22 Raydiance, Inc. Man-portable optical ablation system
US8921733B2 (en) 2003-08-11 2014-12-30 Raydiance, Inc. Methods and systems for trimming circuits
US9022037B2 (en) 2003-08-11 2015-05-05 Raydiance, Inc. Laser ablation method and apparatus having a feedback loop and control unit
US7486705B2 (en) * 2004-03-31 2009-02-03 Imra America, Inc. Femtosecond laser processing system with process parameters, controls and feedback
US8135050B1 (en) 2005-07-19 2012-03-13 Raydiance, Inc. Automated polarization correction
US7444049B1 (en) 2006-01-23 2008-10-28 Raydiance, Inc. Pulse stretcher and compressor including a multi-pass Bragg grating
US8232687B2 (en) 2006-04-26 2012-07-31 Raydiance, Inc. Intelligent laser interlock system
US8189971B1 (en) 2006-01-23 2012-05-29 Raydiance, Inc. Dispersion compensation in a chirped pulse amplification system
US9130344B2 (en) 2006-01-23 2015-09-08 Raydiance, Inc. Automated laser tuning
US7822347B1 (en) 2006-03-28 2010-10-26 Raydiance, Inc. Active tuning of temporal dispersion in an ultrashort pulse laser system
US7903326B2 (en) 2007-11-30 2011-03-08 Radiance, Inc. Static phase mask for high-order spectral phase control in a hybrid chirped pulse amplifier system
US8498538B2 (en) 2008-11-14 2013-07-30 Raydiance, Inc. Compact monolithic dispersion compensator
WO2012037468A1 (en) 2010-09-16 2012-03-22 Raydiance, Inc. Singulation of layered materials using selectively variable laser output
US8554037B2 (en) 2010-09-30 2013-10-08 Raydiance, Inc. Hybrid waveguide device in powerful laser systems
GB2485985B (en) 2010-11-30 2015-07-22 Powerphotonic Ltd Laser pulse generation method and apparatus
JP2014507682A (en) 2011-01-27 2014-03-27 イムラ アメリカ インコーポレイテッド Method and system for fiber transmission of high peak power optical pulses
JP5816440B2 (en) * 2011-02-23 2015-11-18 ギガフォトン株式会社 Optical device, laser device, and extreme ultraviolet light generator
EP2719097B3 (en) * 2011-06-13 2023-06-07 Wi-Charge Ltd. Spatially distributed laser resonator
US10239160B2 (en) 2011-09-21 2019-03-26 Coherent, Inc. Systems and processes that singulate materials
US9008144B2 (en) * 2012-01-20 2015-04-14 Henry Yang Pang Low noise optically pumped laser structures utilizing dispersion elements
US8879589B2 (en) 2012-03-20 2014-11-04 Jds Uniphase Corporation Stabilizing beam pointing of a frequency-converted laser system
CN112204830A (en) * 2018-05-24 2021-01-08 松下知识产权经营株式会社 Replaceable laser resonator module with angle adjustment
CN111384655B (en) * 2020-03-25 2023-03-14 龙天洋 Self-feedback high-stability laser pulse compressor
TWI732636B (en) * 2020-07-29 2021-07-01 國立成功大學 Laser stabilizing system and laser source module

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5270791A (en) * 1990-05-18 1993-12-14 Photonetics, S.A. Fibre optic measuring device, rate gyro, stabilization system and magnetic field or current sensor
US5483508A (en) * 1992-12-22 1996-01-09 Sharp Kabushiki Kaisha Optical recording and reproducing apparatus using a hologram to detect and judge a plurality of pit patterns
US5659560A (en) * 1994-05-12 1997-08-19 Canon Kabushiki Kaisha Apparatus and method for driving oscillation polarization selective light source, and optical communication system using the same
US5696782A (en) * 1995-05-19 1997-12-09 Imra America, Inc. High power fiber chirped pulse amplification systems based on cladding pumped rare-earth doped fibers
US5969851A (en) * 1995-02-21 1999-10-19 Clark-Mxr, Inc. Apparatus for controlling the position and direction of a laser beam
US20050260677A1 (en) * 2001-02-02 2005-11-24 Saaski Elric W Enhanced waveguide and method

Family Cites Families (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US666498A (en) * 1900-01-18 1901-01-22 Paul J Dachtera Eyeglass-guard.
US4306771A (en) 1980-05-27 1981-12-22 International Business Machines Corporation Optical pulse shaping device and method
JPH0338611A (en) * 1989-07-05 1991-02-19 Think Lab Kk Method for correcting passage of gas laser beam
JP3078133B2 (en) * 1992-11-02 2000-08-21 住友電気工業株式会社 Method for inspecting alignment state of optical waveguide and optical waveguide
JPH06142218A (en) * 1992-11-05 1994-05-24 Toshiba Corp Articulated light guide device
US5656186A (en) 1994-04-08 1997-08-12 The Regents Of The University Of Michigan Method for controlling configuration of laser induced breakdown and ablation
JP2682475B2 (en) 1994-11-17 1997-11-26 日本電気株式会社 Beam scanning type laser marking method and apparatus
US5756924A (en) 1995-09-28 1998-05-26 The Regents Of The University Of California Multiple laser pulse ignition method and apparatus
US5761111A (en) 1996-03-15 1998-06-02 President And Fellows Of Harvard College Method and apparatus providing 2-D/3-D optical information storage and retrieval in transparent materials
GB9621049D0 (en) 1996-10-09 1996-11-27 Secr Defence Dielectric composites
US6160568A (en) * 1997-05-27 2000-12-12 Sdl, Inc. Laser marking system and method of energy control
US5911891A (en) 1997-09-11 1999-06-15 Lsp Technologies, Inc. Laser shock peening with tailored multiple laser beams
US5875950A (en) * 1997-10-15 1999-03-02 Credo Tool Company Nail driving apparatus
EP0937533A1 (en) 1998-02-19 1999-08-25 M J Technologies Limited Laser breakthrough detection
US6324195B1 (en) 1999-01-13 2001-11-27 Kaneka Corporation Laser processing of a thin film
EP1072350A1 (en) 1999-07-12 2001-01-31 MDC Max Dätwyler AG Bleienbach Method and device for distributing the intensity in a laser beam
US6281471B1 (en) 1999-12-28 2001-08-28 Gsi Lumonics, Inc. Energy-efficient, laser-based method and system for processing target material
US8217304B2 (en) 2001-03-29 2012-07-10 Gsi Group Corporation Methods and systems for thermal-based laser processing a multi-material device
US7723642B2 (en) 1999-12-28 2010-05-25 Gsi Group Corporation Laser-based system for memory link processing with picosecond lasers
US7671295B2 (en) 2000-01-10 2010-03-02 Electro Scientific Industries, Inc. Processing a memory link with a set of at least two laser pulses
US6541731B2 (en) 2000-01-25 2003-04-01 Aculight Corporation Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates
JP2001326190A (en) 2000-05-17 2001-11-22 Nec Corp Method and apparatus for processing thin film
JP3522654B2 (en) 2000-06-09 2004-04-26 住友重機械工業株式会社 Laser processing apparatus and processing method
US6399914B1 (en) 2000-07-10 2002-06-04 Igor Troitski Method and laser system for production of high quality laser-induced damage images by using material processing made before and during image creation
US7015422B2 (en) 2000-12-21 2006-03-21 Mattson Technology, Inc. System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
US6528762B2 (en) 2001-02-12 2003-03-04 W. A. Whitney Co. Laser beam position control apparatus for a CNC laser equipped machine tool
US6806440B2 (en) 2001-03-12 2004-10-19 Electro Scientific Industries, Inc. Quasi-CW diode pumped, solid-state UV laser system and method employing same
US6570704B2 (en) 2001-03-14 2003-05-27 Northrop Grumman Corporation High average power chirped pulse fiber amplifier array
DE10125206B4 (en) 2001-05-14 2005-03-10 Forschungsverbund Berlin Ev Process for direct microstructuring of materials
AU2002311597A1 (en) * 2001-06-13 2002-12-23 Orbotech Ltd. Multi-beam micro-machining system and method
US20030002591A1 (en) * 2001-07-02 2003-01-02 Gilat Satellite Networks, Ltd. Method, device and system for managing communication transmissions
US6633386B2 (en) 2001-07-23 2003-10-14 The University Of Rochester Optical pulse measurement using shearing interferometry, especially suitable for characterizing ultrashort pulses
US6664498B2 (en) 2001-12-04 2003-12-16 General Atomics Method and apparatus for increasing the material removal rate in laser machining
US7194016B2 (en) 2002-03-22 2007-03-20 The Research Foundation Of The University Of Central Florida Laser-to-fiber coupling
US6875950B2 (en) 2002-03-22 2005-04-05 Gsi Lumonics Corporation Automated laser trimming of resistors
US6760356B2 (en) 2002-04-08 2004-07-06 The Regents Of The University Of California Application of Yb:YAG short pulse laser system
US7005601B2 (en) 2002-04-18 2006-02-28 Applied Materials, Inc. Thermal flux processing by scanning
US6977775B2 (en) 2002-05-17 2005-12-20 Sharp Kabushiki Kaisha Method and apparatus for crystallizing semiconductor with laser beams
US7119351B2 (en) 2002-05-17 2006-10-10 Gsi Group Corporation Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system
US6809291B1 (en) 2002-08-30 2004-10-26 Southeastern Universities Research Assn., Inc. Process for laser machining and surface treatment
US7160762B2 (en) 2002-11-08 2007-01-09 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus
US20040236228A1 (en) 2003-05-20 2004-11-25 Richard Stoltz Camera containing tool
US7361171B2 (en) 2003-05-20 2008-04-22 Raydiance, Inc. Man-portable optical ablation system
WO2004105100A2 (en) 2003-05-20 2004-12-02 Raydiance, Inc. Trains of ablation pulses from multiple optical amplifiers
US20040231682A1 (en) 2003-05-20 2004-11-25 Richard Stoltz Scanned small spot ablation with a high-rep-rate
WO2004114473A2 (en) 2003-05-20 2004-12-29 Raydiance, Inc. Controlling pulse energy of an optically-pumped amplifier by repetition rate
WO2004107510A2 (en) 2003-06-03 2004-12-09 Kilolambda Technologies Ltd. Laser pulse generator
GB0313887D0 (en) 2003-06-16 2003-07-23 Gsi Lumonics Ltd Monitoring and controlling of laser operation
US20050167405A1 (en) 2003-08-11 2005-08-04 Richard Stoltz Optical ablation using material composition analysis
US9022037B2 (en) 2003-08-11 2015-05-05 Raydiance, Inc. Laser ablation method and apparatus having a feedback loop and control unit
US20050065502A1 (en) 2003-08-11 2005-03-24 Richard Stoltz Enabling or blocking the emission of an ablation beam based on color of target
US20050177143A1 (en) 2003-08-11 2005-08-11 Jeff Bullington Remotely-controlled ablation of surfaces
US7115514B2 (en) 2003-10-02 2006-10-03 Raydiance, Inc. Semiconductor manufacturing using optical ablation
US7143769B2 (en) 2003-08-11 2006-12-05 Richard Stoltz Controlling pulse energy of an optical amplifier by controlling pump diode current
US7367969B2 (en) 2003-08-11 2008-05-06 Raydiance, Inc. Ablative material removal with a preset removal rate or volume or depth
WO2005018062A2 (en) 2003-08-11 2005-02-24 Raydiance, Inc. Optical pulse stretching and compressing
US20050035097A1 (en) 2003-08-11 2005-02-17 Richard Stoltz Altering the emission of an ablation beam for safety or control
US20050038487A1 (en) 2003-08-11 2005-02-17 Richard Stoltz Controlling pulse energy of an optical amplifier by controlling pump diode current
DE112004001527T5 (en) 2003-08-19 2006-07-06 Electro Scientific Industries, Inc., Portland Methods and laser systems for connection processing using laser pulses with specially tailored power profiles
US20050077275A1 (en) 2003-10-14 2005-04-14 Richard Stoltz Composite cutting with optical ablation technique
US20050205778A1 (en) 2003-10-17 2005-09-22 Gsi Lumonics Corporation Laser trim motion, calibration, imaging, and fixturing techniques
CN100544877C (en) 2003-10-17 2009-09-30 通明国际科技公司 Flexible scan field
US7491909B2 (en) 2004-03-31 2009-02-17 Imra America, Inc. Pulsed laser processing with controlled thermal and physical alterations
US7486705B2 (en) 2004-03-31 2009-02-03 Imra America, Inc. Femtosecond laser processing system with process parameters, controls and feedback
US8049135B2 (en) 2004-06-18 2011-11-01 Electro Scientific Industries, Inc. Systems and methods for alignment of laser beam(s) for semiconductor link processing
US7349452B2 (en) 2004-12-13 2008-03-25 Raydiance, Inc. Bragg fibers in systems for the generation of high peak power light
JP4825809B2 (en) 2004-12-20 2011-11-30 イムラ アメリカ インコーポレイテッド Pulsed laser source with adjustable grating compressor
US7321114B2 (en) 2005-03-10 2008-01-22 Hitachi Via Mechanics, Ltd. Apparatus and method for beam drift compensation
US7436866B2 (en) 2005-11-30 2008-10-14 Raydiance, Inc. Combination optical isolator and pulse compressor
US20070106416A1 (en) 2006-06-05 2007-05-10 Griffiths Joseph J Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5270791A (en) * 1990-05-18 1993-12-14 Photonetics, S.A. Fibre optic measuring device, rate gyro, stabilization system and magnetic field or current sensor
US5483508A (en) * 1992-12-22 1996-01-09 Sharp Kabushiki Kaisha Optical recording and reproducing apparatus using a hologram to detect and judge a plurality of pit patterns
US5659560A (en) * 1994-05-12 1997-08-19 Canon Kabushiki Kaisha Apparatus and method for driving oscillation polarization selective light source, and optical communication system using the same
US5969851A (en) * 1995-02-21 1999-10-19 Clark-Mxr, Inc. Apparatus for controlling the position and direction of a laser beam
US5696782A (en) * 1995-05-19 1997-12-09 Imra America, Inc. High power fiber chirped pulse amplification systems based on cladding pumped rare-earth doped fibers
US20050260677A1 (en) * 2001-02-02 2005-11-24 Saaski Elric W Enhanced waveguide and method

Also Published As

Publication number Publication date
US20080240184A1 (en) 2008-10-02
EP2130272A2 (en) 2009-12-09
EP2130272A4 (en) 2013-12-25
US8073036B2 (en) 2011-12-06
EP2130272B1 (en) 2018-11-14
US7885311B2 (en) 2011-02-08
US20110103408A1 (en) 2011-05-05
JP2010522998A (en) 2010-07-08
WO2008118766A2 (en) 2008-10-02

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