WO2008057960A3 - Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems - Google Patents

Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems Download PDF

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Publication number
WO2008057960A3
WO2008057960A3 PCT/US2007/083368 US2007083368W WO2008057960A3 WO 2008057960 A3 WO2008057960 A3 WO 2008057960A3 US 2007083368 W US2007083368 W US 2007083368W WO 2008057960 A3 WO2008057960 A3 WO 2008057960A3
Authority
WO
WIPO (PCT)
Prior art keywords
lubricant
stiction
devices
reduces
volume
Prior art date
Application number
PCT/US2007/083368
Other languages
French (fr)
Other versions
WO2008057960A2 (en
Inventor
Dongmin Chen
Fulin Xiong
Iii William Spencer Worley
Original Assignee
Miradia Inc
Dongmin Chen
Fulin Xiong
Iii William Spencer Worley
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/556,154 external-priority patent/US7463404B2/en
Priority claimed from US11/556,155 external-priority patent/US7616370B2/en
Priority claimed from US11/556,145 external-priority patent/US7723812B2/en
Application filed by Miradia Inc, Dongmin Chen, Fulin Xiong, Iii William Spencer Worley filed Critical Miradia Inc
Priority to CN2007800491340A priority Critical patent/CN101573792B/en
Publication of WO2008057960A2 publication Critical patent/WO2008057960A2/en
Publication of WO2008057960A3 publication Critical patent/WO2008057960A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0005—Anti-stiction coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0075—For improving wear resistance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/112—Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts

Abstract

Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. Embodiments of the present invention also generally include a device, and a method of forming a device, that has one or more surfaces or regions that have a volume of lubricant disposed thereon that acts as a ready supply of 'fresh' lubricant to prevent stiction occurring between interacting components found within the device. In one aspect, components within the volume of lubricant form a gas or vapor phase that reduces the chances of stiction-related failure in the formed device. In one example, aspects of this invention may be especially useful for fabricating and using micromechanical devices, such as MEMS devices, NEMS devices, or other similar thermal or fluidic devices.
PCT/US2007/083368 2006-11-02 2007-11-01 Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems WO2008057960A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2007800491340A CN101573792B (en) 2006-11-02 2007-11-01 Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US11/556,154 US7463404B2 (en) 2005-11-23 2006-11-02 Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US11/556,155 US7616370B2 (en) 2005-11-23 2006-11-02 Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US11/556,145 US7723812B2 (en) 2005-11-23 2006-11-02 Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US11/556,155 2006-11-02
US11/556,154 2006-11-02
US11/556,145 2006-11-02

Publications (2)

Publication Number Publication Date
WO2008057960A2 WO2008057960A2 (en) 2008-05-15
WO2008057960A3 true WO2008057960A3 (en) 2008-10-16

Family

ID=39365246

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/083368 WO2008057960A2 (en) 2006-11-02 2007-11-01 Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems

Country Status (2)

Country Link
CN (1) CN101573792B (en)
WO (1) WO2008057960A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102040186B (en) * 2010-11-09 2012-11-21 北京自动化控制设备研究所 High vacuum ceramic LCC packaging method
US20140009379A1 (en) * 2012-07-06 2014-01-09 Qualcomm Mems Technologies, Inc. Cavity liners for electromechanical systems devices
US20170003499A1 (en) * 2015-07-02 2017-01-05 Pixtronix, Inc. Silane modified fluid for mems stiction reduction
CN108153078A (en) * 2016-12-05 2018-06-12 达意科技股份有限公司 Electrophoresis type display panel
CN108892098B (en) * 2018-06-20 2020-09-29 青岛科技大学 Deflection-controllable MEMS micro reflector structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050037135A1 (en) * 2003-08-15 2005-02-17 Xiaoyang Zhu Methods for forming composite coatings on MEMS devices
US20050170547A1 (en) * 2000-12-07 2005-08-04 Patel Satyadev R. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US20060038269A1 (en) * 2004-03-26 2006-02-23 Jim Dunphy Method and apparatus for lubricating microelectromechanical devices in packages

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6746886B2 (en) * 2001-03-19 2004-06-08 Texas Instruments Incorporated MEMS device with controlled gas space chemistry

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050170547A1 (en) * 2000-12-07 2005-08-04 Patel Satyadev R. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US20050037135A1 (en) * 2003-08-15 2005-02-17 Xiaoyang Zhu Methods for forming composite coatings on MEMS devices
US20060038269A1 (en) * 2004-03-26 2006-02-23 Jim Dunphy Method and apparatus for lubricating microelectromechanical devices in packages

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
GELLMAN: "Vapor lubricant transport in MEMS devices", TRIBOLOGY LETT., vol. 17, no. 3, 2004 *

Also Published As

Publication number Publication date
WO2008057960A2 (en) 2008-05-15
CN101573792B (en) 2012-11-21
CN101573792A (en) 2009-11-04

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