WO2008056190A3 - Ordered array of nanostructures and method of fabrication - Google Patents

Ordered array of nanostructures and method of fabrication Download PDF

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Publication number
WO2008056190A3
WO2008056190A3 PCT/GB2007/050681 GB2007050681W WO2008056190A3 WO 2008056190 A3 WO2008056190 A3 WO 2008056190A3 GB 2007050681 W GB2007050681 W GB 2007050681W WO 2008056190 A3 WO2008056190 A3 WO 2008056190A3
Authority
WO
WIPO (PCT)
Prior art keywords
nanostructures
ordered array
fabrication
array
forming
Prior art date
Application number
PCT/GB2007/050681
Other languages
French (fr)
Other versions
WO2008056190A2 (en
Inventor
David Cockayne
Yizhong Huang
Original Assignee
Isis Innovation
David Cockayne
Yizhong Huang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Isis Innovation, David Cockayne, Yizhong Huang filed Critical Isis Innovation
Publication of WO2008056190A2 publication Critical patent/WO2008056190A2/en
Publication of WO2008056190A3 publication Critical patent/WO2008056190A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00111—Tips, pillars, i.e. raised structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/055—Microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0361—Tips, pillars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/05—Arrays
    • B81B2207/056—Arrays of static structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling

Abstract

The present invention relates to nanostructured materials. In particular, but not exclusively, the invention relates to an ordered array of needle-like nanostructures, and a method of forming such an ordered array. Embodiments of the invention provide a method of fabricating an ordered array of nanostructures comprising the steps of: forming a first layer comprising a first material on a substrate comprising a second material; patterning the first layer to form a patterned structure comprising an array of pillars; and subsequently irradiating the patterned structure with ions.
PCT/GB2007/050681 2006-11-10 2007-11-12 Ordered array of nanostructures and method of fabrication WO2008056190A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0622447.1 2006-11-10
GB0622447A GB0622447D0 (en) 2006-11-10 2006-11-10 Ordered nanostructures and method of fabrication

Publications (2)

Publication Number Publication Date
WO2008056190A2 WO2008056190A2 (en) 2008-05-15
WO2008056190A3 true WO2008056190A3 (en) 2008-10-23

Family

ID=37594698

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2007/050681 WO2008056190A2 (en) 2006-11-10 2007-11-12 Ordered array of nanostructures and method of fabrication

Country Status (2)

Country Link
GB (1) GB0622447D0 (en)
WO (1) WO2008056190A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010123463A1 (en) * 2009-04-23 2010-10-28 National University Of Singapore An apparatus that includes nano-sized projections and a method for manufacture thereof
FR3011539B1 (en) 2013-10-07 2017-03-31 Centre Nat Rech Scient MICROSTRUCTURE SUBSTRATE.

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002064193A2 (en) * 2000-12-14 2002-08-22 Georgia Tech Research Corporation Microneedle devices and production thereof
WO2003024507A2 (en) * 2001-09-19 2003-03-27 Biovalve Technologies, Inc. Microneedles, microneedle arrays, and systems and methods relating to same
US7132054B1 (en) * 2004-09-08 2006-11-07 Sandia Corporation Method to fabricate hollow microneedle arrays

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002064193A2 (en) * 2000-12-14 2002-08-22 Georgia Tech Research Corporation Microneedle devices and production thereof
WO2003024507A2 (en) * 2001-09-19 2003-03-27 Biovalve Technologies, Inc. Microneedles, microneedle arrays, and systems and methods relating to same
US7132054B1 (en) * 2004-09-08 2006-11-07 Sandia Corporation Method to fabricate hollow microneedle arrays

Also Published As

Publication number Publication date
WO2008056190A2 (en) 2008-05-15
GB0622447D0 (en) 2006-12-20

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