WO2008054346A3 - Improved spectral metrology for high repetition rate gas discharge laser - Google Patents

Improved spectral metrology for high repetition rate gas discharge laser Download PDF

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Publication number
WO2008054346A3
WO2008054346A3 PCT/US2006/024464 US2006024464W WO2008054346A3 WO 2008054346 A3 WO2008054346 A3 WO 2008054346A3 US 2006024464 W US2006024464 W US 2006024464W WO 2008054346 A3 WO2008054346 A3 WO 2008054346A3
Authority
WO
WIPO (PCT)
Prior art keywords
bandwidth
laser
gas discharge
repetition rate
parameter
Prior art date
Application number
PCT/US2006/024464
Other languages
French (fr)
Other versions
WO2008054346A2 (en
Inventor
Robert J Rafac
Original Assignee
Cymer Inc
Robert J Rafac
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc, Robert J Rafac filed Critical Cymer Inc
Priority to KR1020127016577A priority Critical patent/KR101280917B1/en
Priority to EP06851603A priority patent/EP1946054A4/en
Priority to JP2008542299A priority patent/JP5270363B2/en
Priority to KR1020087001729A priority patent/KR101364005B1/en
Publication of WO2008054346A2 publication Critical patent/WO2008054346A2/en
Publication of WO2008054346A3 publication Critical patent/WO2008054346A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters

Abstract

A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.
PCT/US2006/024464 2005-06-27 2006-06-23 Improved spectral metrology for high repetition rate gas discharge laser WO2008054346A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020127016577A KR101280917B1 (en) 2005-06-27 2006-06-23 Improved spectral metrology for high repetition rate gas discharge laser
EP06851603A EP1946054A4 (en) 2005-06-27 2006-06-23 Improved spectral metrology for high repetition rate gas discharge laser
JP2008542299A JP5270363B2 (en) 2005-06-27 2006-06-23 Improved spectral measurements for high repetition rate gas discharge lasers.
KR1020087001729A KR101364005B1 (en) 2005-06-27 2006-06-23 Improved spectral metrology for high repetition rate gas discharge laser

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/169,202 2005-06-27
US11/169,202 US7317536B2 (en) 2005-06-27 2005-06-27 Spectral bandwidth metrology for high repetition rate gas discharge lasers

Publications (2)

Publication Number Publication Date
WO2008054346A2 WO2008054346A2 (en) 2008-05-08
WO2008054346A3 true WO2008054346A3 (en) 2008-10-09

Family

ID=37661374

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/024464 WO2008054346A2 (en) 2005-06-27 2006-06-23 Improved spectral metrology for high repetition rate gas discharge laser

Country Status (5)

Country Link
US (1) US7317536B2 (en)
EP (1) EP1946054A4 (en)
JP (2) JP5270363B2 (en)
KR (2) KR101364005B1 (en)
WO (1) WO2008054346A2 (en)

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US7822084B2 (en) * 2006-02-17 2010-10-26 Cymer, Inc. Method and apparatus for stabilizing and tuning the bandwidth of laser light
US7852889B2 (en) 2006-02-17 2010-12-14 Cymer, Inc. Active spectral control of DUV light source
US7659529B2 (en) * 2007-04-13 2010-02-09 Cymer, Inc. Method and apparatus for vibration reduction in laser system line narrowing unit wavelength selection optical element
US8520186B2 (en) * 2009-08-25 2013-08-27 Cymer, Llc Active spectral control of optical source
US8837536B2 (en) 2010-04-07 2014-09-16 Cymer, Llc Method and apparatus for controlling light bandwidth
US8599381B2 (en) 2011-01-19 2013-12-03 Massachusetts Institute Of Technology Gas detector for atmospheric species detection
US9207119B2 (en) 2012-04-27 2015-12-08 Cymer, Llc Active spectral control during spectrum synthesis
US9715180B2 (en) 2013-06-11 2017-07-25 Cymer, Llc Wafer-based light source parameter control
US9065248B2 (en) * 2013-11-20 2015-06-23 Cymer, Llc Systems and methods to more accurately estimate a fluorine concentration in a source laser
CN104316185B (en) * 2014-10-29 2017-12-19 中国科学院光电研究院 Method and apparatus that are a kind of while monitoring laser spectrum and spectral power distribution
US10288483B2 (en) 2017-04-09 2019-05-14 Cymer, Llc Recovering spectral shape from spatial output
JP6983633B2 (en) * 2017-11-24 2021-12-17 浜松ホトニクス株式会社 Wafer inspection method and wafer
CN111316512B (en) 2017-12-05 2022-10-21 极光先进雷射株式会社 Excimer laser apparatus and method for manufacturing electronic device
CN111175424B (en) * 2020-02-24 2022-04-08 大连依利特分析仪器有限公司 Diode array detector based on multi-stage signal calibration and calibration method

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Also Published As

Publication number Publication date
KR20120089350A (en) 2012-08-09
JP2009505116A (en) 2009-02-05
EP1946054A2 (en) 2008-07-23
KR101280917B1 (en) 2013-07-02
JP5270363B2 (en) 2013-08-21
WO2008054346A2 (en) 2008-05-08
US7317536B2 (en) 2008-01-08
EP1946054A4 (en) 2011-11-16
JP2012198235A (en) 2012-10-18
KR101364005B1 (en) 2014-02-17
US20070013913A1 (en) 2007-01-18
JP5553860B2 (en) 2014-07-16
KR20080081890A (en) 2008-09-10

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