WO2008022048A3 - Microfluidic valve having free-floating member and method of fabrication - Google Patents

Microfluidic valve having free-floating member and method of fabrication Download PDF

Info

Publication number
WO2008022048A3
WO2008022048A3 PCT/US2007/075746 US2007075746W WO2008022048A3 WO 2008022048 A3 WO2008022048 A3 WO 2008022048A3 US 2007075746 W US2007075746 W US 2007075746W WO 2008022048 A3 WO2008022048 A3 WO 2008022048A3
Authority
WO
WIPO (PCT)
Prior art keywords
floating member
valve seat
valve
fluid
valves
Prior art date
Application number
PCT/US2007/075746
Other languages
French (fr)
Other versions
WO2008022048A2 (en
Inventor
Yu-Chong Tai
Po-Jui Chen
Damien C Rodger
Mark S Humayun
Original Assignee
California Inst Of Techn
Yu-Chong Tai
Po-Jui Chen
Damien C Rodger
Mark S Humayun
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Inst Of Techn, Yu-Chong Tai, Po-Jui Chen, Damien C Rodger, Mark S Humayun filed Critical California Inst Of Techn
Priority to JP2009524019A priority Critical patent/JP4977758B2/en
Priority to MX2009001504A priority patent/MX2009001504A/en
Priority to ES07800089.0T priority patent/ES2533901T3/en
Priority to EP20070800089 priority patent/EP2049283B1/en
Publication of WO2008022048A2 publication Critical patent/WO2008022048A2/en
Publication of WO2008022048A3 publication Critical patent/WO2008022048A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/14—Check valves with flexible valve members
    • F16K15/144—Check valves with flexible valve members the closure elements being fixed along all or a part of their periphery
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y10T137/0497—Fluid actuated or retarded
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7866—Plural seating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7904—Reciprocating valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7904—Reciprocating valves
    • Y10T137/7908—Weight biased
    • Y10T137/7909—Valve body is the weight
    • Y10T137/7913—Guided head
    • Y10T137/7914—Cage
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49409—Valve seat forming

Abstract

Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.
PCT/US2007/075746 2006-08-10 2007-08-10 Microfluidic valve having free-floating member and method of fabrication WO2008022048A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009524019A JP4977758B2 (en) 2006-08-10 2007-08-10 Microfluidic valve having free floating member and method of manufacturing the same
MX2009001504A MX2009001504A (en) 2006-08-10 2007-08-10 Microfluidic valve having free-floating member and method of fabrication.
ES07800089.0T ES2533901T3 (en) 2006-08-10 2007-08-10 Microfluidic valves with floating element and manufacturing procedure
EP20070800089 EP2049283B1 (en) 2006-08-10 2007-08-10 Microfluidic valve having free-floating member and method of fabrication

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US83688306P 2006-08-10 2006-08-10
US60/836,883 2006-08-10

Publications (2)

Publication Number Publication Date
WO2008022048A2 WO2008022048A2 (en) 2008-02-21
WO2008022048A3 true WO2008022048A3 (en) 2008-11-20

Family

ID=39083009

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/075746 WO2008022048A2 (en) 2006-08-10 2007-08-10 Microfluidic valve having free-floating member and method of fabrication

Country Status (6)

Country Link
US (2) US7600533B2 (en)
EP (2) EP2884141A1 (en)
JP (1) JP4977758B2 (en)
ES (1) ES2533901T3 (en)
MX (1) MX2009001504A (en)
WO (1) WO2008022048A2 (en)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000064389A1 (en) 1999-04-26 2000-11-02 Lynch Mary G Trabeculotomy device and method for treating glaucoma
US6638239B1 (en) 2000-04-14 2003-10-28 Glaukos Corporation Apparatus and method for treating glaucoma
US7867186B2 (en) 2002-04-08 2011-01-11 Glaukos Corporation Devices and methods for treatment of ocular disorders
US7431710B2 (en) 2002-04-08 2008-10-07 Glaukos Corporation Ocular implants with anchors and methods thereof
JP4264704B2 (en) 2001-04-07 2009-05-20 グローコス コーポレーション Glaucoma stent and glaucoma treatment method
US7331984B2 (en) 2001-08-28 2008-02-19 Glaukos Corporation Glaucoma stent for treating glaucoma and methods of use
US7055229B2 (en) * 2003-12-31 2006-06-06 Intel Corporation Support system for semiconductor wafers and methods thereof
AP2536A (en) * 2006-07-07 2012-12-19 Statoilhydro Asa Method for flow control and autonomous valve of flow control device
MX2009001504A (en) * 2006-08-10 2009-08-31 California Inst Of Techn Microfluidic valve having free-floating member and method of fabrication.
US8506515B2 (en) 2006-11-10 2013-08-13 Glaukos Corporation Uveoscleral shunt and methods for implanting same
JP5542691B2 (en) * 2007-12-20 2014-07-09 ユニバーシティ オブ サザン カリフォルニア Devices and methods for delivering therapeutic agents
NO20080081L (en) * 2008-01-04 2009-07-06 Statoilhydro Asa Method for autonomously adjusting a fluid flow through a valve or flow control device in injectors in oil production
NO20080082L (en) * 2008-01-04 2009-07-06 Statoilhydro Asa Improved flow control method and autonomous valve or flow control device
US10022558B1 (en) 2008-01-07 2018-07-17 Salutaris Medical Devices, Inc. Methods and devices for minimally-invasive delivery of radiation to the eye
US9873001B2 (en) 2008-01-07 2018-01-23 Salutaris Medical Devices, Inc. Methods and devices for minimally-invasive delivery of radiation to the eye
US8608632B1 (en) 2009-07-03 2013-12-17 Salutaris Medical Devices, Inc. Methods and devices for minimally-invasive extraocular delivery of radiation and/or pharmaceutics to the posterior portion of the eye
US9056201B1 (en) 2008-01-07 2015-06-16 Salutaris Medical Devices, Inc. Methods and devices for minimally-invasive delivery of radiation to the eye
US8602959B1 (en) 2010-05-21 2013-12-10 Robert Park Methods and devices for delivery of radiation to the posterior portion of the eye
KR101634983B1 (en) * 2008-01-07 2016-07-01 살루타리스 메디컬 디바이스즈, 인코퍼레이티드 Methods and devices for minimally-invasive extraocular delivery of radiation to the posterior portion of the eye
NO337784B1 (en) * 2008-03-12 2016-06-20 Statoil Petroleum As System and method for controlling the fluid flow in branch wells
WO2010042613A2 (en) * 2008-10-10 2010-04-15 Knowles Electronics, Llc Acoustic valve mechanisms
USD691269S1 (en) 2009-01-07 2013-10-08 Salutaris Medical Devices, Inc. Fixed-shape cannula for posterior delivery of radiation to an eye
USD691270S1 (en) 2009-01-07 2013-10-08 Salutaris Medical Devices, Inc. Fixed-shape cannula for posterior delivery of radiation to an eye
USD691267S1 (en) 2009-01-07 2013-10-08 Salutaris Medical Devices, Inc. Fixed-shape cannula for posterior delivery of radiation to eye
USD691268S1 (en) 2009-01-07 2013-10-08 Salutaris Medical Devices, Inc. Fixed-shape cannula for posterior delivery of radiation to eye
US8328543B2 (en) * 2009-04-03 2012-12-11 Bitzer Kuehlmaschinenbau Gmbh Contoured check valve disc and scroll compressor incorporating same
US8763633B2 (en) 2009-06-03 2014-07-01 The Technology Partnership Plc Valve
KR101569836B1 (en) * 2009-10-28 2015-11-17 삼성전자주식회사 Microfluidic device initialization method microfluidic device initialization apparatus and microfluidic device package
EP2496304A4 (en) * 2009-11-02 2013-04-17 Salutaris Medical Devices Inc Methods and devices for delivering appropriate minimally-invasive extraocular radiation
US8447054B2 (en) * 2009-11-11 2013-05-21 Analog Devices, Inc. Microphone with variable low frequency cutoff
EP2616727B1 (en) 2010-09-15 2016-04-13 MiniPumps, LLC Molded and packaged elastomeric check valve
DE112010005887T5 (en) * 2010-09-17 2013-09-12 Agency For Science, Technology And Research Microfluidic device for modifying a fluid flow and microfluidic system with the microfluidic device
KR101219443B1 (en) 2010-12-02 2013-01-11 광주과학기술원 Micro Check Valve and Method of Manufacturing the Same
US8544487B1 (en) * 2011-06-28 2013-10-01 Sylvia Clinkscales Accessorized cane device
US20130032235A1 (en) * 2011-08-02 2013-02-07 Teledyne Dalsa Semiconductor, Inc. Integrated microfluidic check valve and device including such a check valve
US8975193B2 (en) 2011-08-02 2015-03-10 Teledyne Dalsa Semiconductor, Inc. Method of making a microfluidic device
CN104094023B (en) 2012-01-31 2016-08-17 加特可株式会社 The application valve body structure of automatic transmission
US9554940B2 (en) 2012-03-26 2017-01-31 Glaukos Corporation System and method for delivering multiple ocular implants
US9528633B2 (en) * 2012-12-17 2016-12-27 Novartis Ag MEMS check valve
AU2014205179B2 (en) 2013-01-11 2018-08-09 Minipumps, Llc Diaphragm check valves and methods of manufacture thereof
US20140264655A1 (en) * 2013-03-13 2014-09-18 Invensense, Inc. Surface roughening to reduce adhesion in an integrated mems device
US10517759B2 (en) 2013-03-15 2019-12-31 Glaukos Corporation Glaucoma stent and methods thereof for glaucoma treatment
US9592151B2 (en) 2013-03-15 2017-03-14 Glaukos Corporation Systems and methods for delivering an ocular implant to the suprachoroidal space within an eye
ITMI20140037U1 (en) * 2014-01-27 2015-07-27 Masterpack S P A LABELS - SELF-ADHESIVE VALVE
WO2015184173A1 (en) 2014-05-29 2015-12-03 Dose Medical Corporation Implants with controlled drug delivery features and methods of using same
US10031348B2 (en) * 2014-10-15 2018-07-24 California Institute Of Technology Contact lens with metered liquid system
JPWO2016063711A1 (en) * 2014-10-23 2017-07-27 株式会社村田製作所 Valve, fluid control device
CN104819315B (en) * 2015-05-11 2017-07-04 歌尔股份有限公司 A kind of air valve and loudspeaker
EP3314183B1 (en) 2015-07-22 2020-09-02 The University of North Carolina at Chapel Hill Fluidic devices with freeze-thaw valves with ice-nucleating agents and related methods of operation and analysis
US11925578B2 (en) 2015-09-02 2024-03-12 Glaukos Corporation Drug delivery implants with bi-directional delivery capacity
CN108431151B (en) 2015-10-23 2021-01-12 加州理工学院 Reliable deposition of thin parylene
USD815285S1 (en) 2016-05-11 2018-04-10 Salutaris Medical Devices, Inc. Brachytherapy device
USD814637S1 (en) 2016-05-11 2018-04-03 Salutaris Medical Devices, Inc. Brachytherapy device
USD814638S1 (en) 2016-05-11 2018-04-03 Salutaris Medical Devices, Inc. Brachytherapy device
CN109477478B (en) * 2016-07-29 2020-08-07 株式会社村田制作所 Valve and gas control device
USD808528S1 (en) 2016-08-31 2018-01-23 Salutaris Medical Devices, Inc. Holder for a brachytherapy device
USD808529S1 (en) 2016-08-31 2018-01-23 Salutaris Medical Devices, Inc. Holder for a brachytherapy device
US10549985B2 (en) * 2016-11-25 2020-02-04 Infineon Technologies Ag Semiconductor package with a through port for sensor applications
US11255465B2 (en) * 2016-11-30 2022-02-22 Agilent Technologies, Inc. Microfluidic check valve and related devices and systems
EP3652471B1 (en) * 2017-07-11 2021-06-09 Microfab Service GmbH Micro check valve and system with multiple micro check valves and method for the production thereof
US11116625B2 (en) 2017-09-28 2021-09-14 Glaukos Corporation Apparatus and method for controlling placement of intraocular implants
WO2019099442A1 (en) * 2017-11-14 2019-05-23 Encite, Llc Microelectromechanical systems fabricated with roll to roll processing
US10648302B2 (en) * 2017-11-15 2020-05-12 Baker Hughes, A Ge Company, Llc Adjustable flow control device
TWI667016B (en) * 2017-11-20 2019-08-01 研能科技股份有限公司 Blood sugar detecting and controlling system
DE102018221726A1 (en) 2017-12-29 2019-07-04 Knowles Electronics, Llc Audio device with acoustic valve
DE202018107151U1 (en) 2018-01-08 2019-01-15 Knowles Electronics, Llc Audio device with valve state management
US10932069B2 (en) 2018-04-12 2021-02-23 Knowles Electronics, Llc Acoustic valve for hearing device
US11523939B2 (en) 2018-05-22 2022-12-13 California Institute Of Technology Miniature fixed and adjustable flow restrictor for the body
WO2019241212A1 (en) 2018-06-11 2019-12-19 California Institute Of Technology Eye treatment device having a ring like shape
WO2020014375A1 (en) * 2018-07-10 2020-01-16 Trustees Of Boston University Sub-pascal unidirectional flow valves
USD949342S1 (en) * 2018-10-22 2022-04-19 New World Medical, Inc. Ocular implant
US10917731B2 (en) 2018-12-31 2021-02-09 Knowles Electronics, Llc Acoustic valve for hearing device
US11102576B2 (en) 2018-12-31 2021-08-24 Knowles Electronicis, LLC Audio device with audio signal processing based on acoustic valve state

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5531543A (en) * 1992-07-08 1996-07-02 Johnsen; Asle Device for ensuring free water passage to roof rainwater outlets in connection with ice formation
US6237619B1 (en) * 1996-10-03 2001-05-29 Westonbridge International Limited Micro-machined device for fluids and method of manufacture
US6240962B1 (en) * 1998-11-16 2001-06-05 California Institute Of Technology Parylene micro check valve and fabrication method thereof
US6554591B1 (en) * 2001-11-26 2003-04-29 Motorola, Inc. Micropump including ball check valve utilizing ceramic technology and method of fabrication

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4457757A (en) 1981-07-20 1984-07-03 Molteno Anthony C B Device for draining aqueous humour
US4554918A (en) 1982-07-28 1985-11-26 White Thomas C Ocular pressure relief device
US4531543A (en) * 1983-06-20 1985-07-30 Ingersoll-Rand Company Uni-directional flow, fluid valve
NZ215409A (en) 1986-03-07 1989-02-24 Anthony Christopher Be Molteno Implant for drainage of aqueous humour in glaucoma
US4867200A (en) * 1988-06-30 1989-09-19 Markley George L Unidirectional fluid flow check valve assembly
US5071408A (en) 1988-10-07 1991-12-10 Ahmed Abdul Mateen Medical valve
US5785674A (en) 1988-10-07 1998-07-28 Mateen; Ahmed Abdul Device and method for treating glaucoma
US5476445A (en) 1990-05-31 1995-12-19 Iovision, Inc. Glaucoma implant with a temporary flow restricting seal
US5454796A (en) 1991-04-09 1995-10-03 Hood Laboratories Device and method for controlling intraocular fluid pressure
US5490220A (en) 1992-03-18 1996-02-06 Knowles Electronics, Inc. Solid state condenser and microphone devices
AU6250998A (en) 1997-01-24 1998-08-18 California Institute Of Technology Mems valve
EP0903179A1 (en) * 1997-09-18 1999-03-24 Metrohm Ag Microvalve
US6345502B1 (en) 1997-11-12 2002-02-12 California Institute Of Technology Micromachined parylene membrane valve and pump
AU7716800A (en) 1999-09-24 2001-04-24 California Institute Of Technology A normally closed in-channel micro check valve
US6334761B1 (en) 2000-03-02 2002-01-01 California Institute Of Technology Check-valved silicon diaphragm pump and method of fabricating the same
KR100422364B1 (en) * 2001-11-19 2004-03-11 삼성광주전자 주식회사 Exhaust valve of sealed type compressor
US6739576B2 (en) * 2001-12-20 2004-05-25 Nanostream, Inc. Microfluidic flow control device with floating element
EP1534982A4 (en) * 2002-07-26 2006-02-08 Applera Corp One-directional microball valve for a microfluidic device
US7025740B2 (en) 2003-04-22 2006-04-11 Ahmed A Mateen Device for treating glaucoma & method of manufacture
JP2006214837A (en) * 2005-02-02 2006-08-17 Sekisui Chem Co Ltd Microvalve
US20060247664A1 (en) 2005-03-08 2006-11-02 California Institute Of Technology Micromachined tissue anchors for securing implants without sutures
MX2009001504A (en) * 2006-08-10 2009-08-31 California Inst Of Techn Microfluidic valve having free-floating member and method of fabrication.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5531543A (en) * 1992-07-08 1996-07-02 Johnsen; Asle Device for ensuring free water passage to roof rainwater outlets in connection with ice formation
US6237619B1 (en) * 1996-10-03 2001-05-29 Westonbridge International Limited Micro-machined device for fluids and method of manufacture
US6240962B1 (en) * 1998-11-16 2001-06-05 California Institute Of Technology Parylene micro check valve and fabrication method thereof
US6554591B1 (en) * 2001-11-26 2003-04-29 Motorola, Inc. Micropump including ball check valve utilizing ceramic technology and method of fabrication

Also Published As

Publication number Publication date
US8141573B2 (en) 2012-03-27
JP2010500518A (en) 2010-01-07
EP2049283B1 (en) 2015-02-18
US20080035875A1 (en) 2008-02-14
MX2009001504A (en) 2009-08-31
WO2008022048A2 (en) 2008-02-21
EP2884141A1 (en) 2015-06-17
US20100025613A1 (en) 2010-02-04
JP4977758B2 (en) 2012-07-18
US7600533B2 (en) 2009-10-13
EP2049283A2 (en) 2009-04-22
ES2533901T3 (en) 2015-04-15
EP2049283A4 (en) 2013-02-20

Similar Documents

Publication Publication Date Title
WO2008022048A3 (en) Microfluidic valve having free-floating member and method of fabrication
RU2012136065A (en) MICROMECHANICAL PASSIVE FLOW REGULATOR
WO2008124046A8 (en) Micromachined electrowetting microfluidic valve
WO2009139898A8 (en) Valves and other flow control in fluidic systems including microfluidic systems
WO2010013238A3 (en) Microfluidic system and method for manufacturing the same
WO2007103153A3 (en) Methods and devices for improved aeration from vertically-orientated submerged membranes
WO2008043046A3 (en) Microfluidic check valves
WO2010033634A3 (en) Flow regulating stopcocks and related methods
WO2007024914A3 (en) Device and method for microfluidic control of a first fluid in contact with a second fluid, wherein the first and second fluids are immiscible
WO2001090614A3 (en) Surface tension valves for microfluidic applications
EP1953432A3 (en) Fluid control valve
WO2010005641A3 (en) Pressure relief valves
BRPI0507799A (en) method for the production of oil and / or gas in an oil and / or gas reservoir and actuator device
WO2007064404A8 (en) Microfluidic membrane pump and valve
WO2007044690A3 (en) Devices and methods for cell manipulation
WO2004076811A3 (en) Drilling fluid component
GB2479112A (en) Micro-valve and micro-fluidic device using such
WO2007002646A3 (en) Check valve
WO2011095512A3 (en) Flow control device and flow control method
WO2008136192A1 (en) Damper and vehicle seat with the damper
WO2007021907A3 (en) Resonant sensor systems and methods with reduced gas interference
EP1953436A3 (en) Valve seal
DE502007005456D1 (en) Plate valves for traction device clamping systems
EP2487392A3 (en) Differential pressure sealing device for ball valves
WO2012036937A3 (en) A 3-stage temperature control valve

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07800089

Country of ref document: EP

Kind code of ref document: A2

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
WWE Wipo information: entry into national phase

Ref document number: 2009524019

Country of ref document: JP

Ref document number: MX/A/2009/001504

Country of ref document: MX

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2007800089

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: RU