WO2008021144A3 - Mems comb drive actuators and method of manufacture - Google Patents
Mems comb drive actuators and method of manufacture Download PDFInfo
- Publication number
- WO2008021144A3 WO2008021144A3 PCT/US2007/017649 US2007017649W WO2008021144A3 WO 2008021144 A3 WO2008021144 A3 WO 2008021144A3 US 2007017649 W US2007017649 W US 2007017649W WO 2008021144 A3 WO2008021144 A3 WO 2008021144A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- channels
- fingers
- actuator
- movable
- support layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
- H03H9/02275—Comb electrodes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
- H03H9/02362—Folded-flexure
Abstract
A micro electromechanical actuator 130 as described herein comprises a support layer 101 and at least one movable comb 110 moun resiliently on the support layer. Each movable comb 110 has a plurality of substantially parallel movable fingers. These parallel fing pass through channels 104 that are fixed with respect to the support layer. An AC and/or DC electrical potential difference can be applied between the channels 104 and the movable fingers 110. Electrostatic forces resulting from this potential difference are capab of moving the fixed fingers through a range of motion. Over at least a portion of this range of motion, some of the movable fingers extend beyond the fixed channels. In designing such a MEMS actuator, the lengths of the fingers and/or channels can be selected by taking into consideration the degreeto which different fingers extend beyond the channels in different portions of the range of motio This allows tailoring the driving force on the actuator as a function not only of the driving voltage, but also as a function of the displacement of the actuator.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US83625806P | 2006-08-08 | 2006-08-08 | |
US60/836,258 | 2006-08-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008021144A2 WO2008021144A2 (en) | 2008-02-21 |
WO2008021144A3 true WO2008021144A3 (en) | 2008-10-16 |
Family
ID=39082585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2007/017649 WO2008021144A2 (en) | 2006-08-08 | 2007-08-08 | Mems comb drive actuators and method of manufacture |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2008021144A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108226235A (en) * | 2016-12-21 | 2018-06-29 | 中国矿业大学 | A kind of capacitive MEMS gas sensor |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI360516B (en) | 2008-05-09 | 2012-03-21 | Pixart Imaging Inc | In-plane sensor and method for making same |
CN101590995B (en) * | 2008-05-27 | 2012-09-05 | 原相科技股份有限公司 | Same plane sensor |
CN102616728B (en) * | 2008-10-29 | 2015-07-01 | 原相科技股份有限公司 | Micro-electromechanical system element, out-of-plane sensor and manufacture method of micro-electromechanical system element |
US20120146452A1 (en) * | 2010-12-10 | 2012-06-14 | Miradia, Inc. | Microelectromechanical system device and semi-manufacture and manufacturing method thereof |
TWI621582B (en) * | 2015-08-14 | 2018-04-21 | 先進微系統科技股份有限公司 | Comb-shaped actuator |
DE102017217009B3 (en) | 2017-09-26 | 2018-07-19 | Robert Bosch Gmbh | MEMS device and corresponding operating method |
US11287441B2 (en) | 2019-11-07 | 2022-03-29 | Honeywell International Inc. | Resonator including one or more mechanical beams with added mass |
DE102020210119A1 (en) | 2020-08-11 | 2022-02-17 | Robert Bosch Gesellschaft mit beschränkter Haftung | Drive structure, micromechanical system, method for producing a micromechanical system, method for operating a micromechanical system |
US20220252636A1 (en) * | 2021-02-05 | 2022-08-11 | Kionix, Inc. | Accelerometer apparatuses and systems |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5491604A (en) * | 1992-12-11 | 1996-02-13 | The Regents Of The University Of California | Q-controlled microresonators and tunable electronic filters using such resonators |
US5537083A (en) * | 1992-12-11 | 1996-07-16 | Regents Of The University Of California | Microelectromechanical signal processors |
US5780948A (en) * | 1995-10-28 | 1998-07-14 | Samsung Electronics Co., Ltd. | Vibratory structure, method for controlling natural frequency thereof and sensor and actuator adopting the vibratory structure |
US6307298B1 (en) * | 2000-03-20 | 2001-10-23 | Motorola, Inc. | Actuator and method of manufacture |
-
2007
- 2007-08-08 WO PCT/US2007/017649 patent/WO2008021144A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5491604A (en) * | 1992-12-11 | 1996-02-13 | The Regents Of The University Of California | Q-controlled microresonators and tunable electronic filters using such resonators |
US5537083A (en) * | 1992-12-11 | 1996-07-16 | Regents Of The University Of California | Microelectromechanical signal processors |
US5780948A (en) * | 1995-10-28 | 1998-07-14 | Samsung Electronics Co., Ltd. | Vibratory structure, method for controlling natural frequency thereof and sensor and actuator adopting the vibratory structure |
US6307298B1 (en) * | 2000-03-20 | 2001-10-23 | Motorola, Inc. | Actuator and method of manufacture |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108226235A (en) * | 2016-12-21 | 2018-06-29 | 中国矿业大学 | A kind of capacitive MEMS gas sensor |
CN108226235B (en) * | 2016-12-21 | 2020-12-15 | 中国矿业大学 | Capacitive MEMS gas sensor |
Also Published As
Publication number | Publication date |
---|---|
WO2008021144A2 (en) | 2008-02-21 |
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