WO2008008162A3 - Support structure for free-standing mems device and methods for forming the same - Google Patents

Support structure for free-standing mems device and methods for forming the same Download PDF

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Publication number
WO2008008162A3
WO2008008162A3 PCT/US2007/014511 US2007014511W WO2008008162A3 WO 2008008162 A3 WO2008008162 A3 WO 2008008162A3 US 2007014511 W US2007014511 W US 2007014511W WO 2008008162 A3 WO2008008162 A3 WO 2008008162A3
Authority
WO
WIPO (PCT)
Prior art keywords
free
methods
forming
same
support structure
Prior art date
Application number
PCT/US2007/014511
Other languages
French (fr)
Other versions
WO2008008162A2 (en
Inventor
Lior Kogut
Ming-Hau Tung
Brian Arbuckle
Original Assignee
Qualcomm Mems Technologies Inc
Lior Kogut
Ming-Hau Tung
Brian Arbuckle
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc, Lior Kogut, Ming-Hau Tung, Brian Arbuckle filed Critical Qualcomm Mems Technologies Inc
Publication of WO2008008162A2 publication Critical patent/WO2008008162A2/en
Publication of WO2008008162A3 publication Critical patent/WO2008008162A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Abstract

A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.
PCT/US2007/014511 2006-06-28 2007-06-21 Support structure for free-standing mems device and methods for forming the same WO2008008162A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/476,317 2006-06-28
US11/476,317 US7835061B2 (en) 2006-06-28 2006-06-28 Support structures for free-standing electromechanical devices

Publications (2)

Publication Number Publication Date
WO2008008162A2 WO2008008162A2 (en) 2008-01-17
WO2008008162A3 true WO2008008162A3 (en) 2008-04-03

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/014511 WO2008008162A2 (en) 2006-06-28 2007-06-21 Support structure for free-standing mems device and methods for forming the same

Country Status (2)

Country Link
US (1) US7835061B2 (en)
WO (1) WO2008008162A2 (en)

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