WO2008007219A2 - Intensity distribution of incident light flux - Google Patents
Intensity distribution of incident light flux Download PDFInfo
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- WO2008007219A2 WO2008007219A2 PCT/IB2007/002537 IB2007002537W WO2008007219A2 WO 2008007219 A2 WO2008007219 A2 WO 2008007219A2 IB 2007002537 W IB2007002537 W IB 2007002537W WO 2008007219 A2 WO2008007219 A2 WO 2008007219A2
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- Prior art keywords
- light
- projection device
- light source
- intensity
- sub
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3141—Constructional details thereof
- H04N9/315—Modulator illumination systems
- H04N9/3155—Modulator illumination systems for controlling the light source
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3141—Constructional details thereof
- H04N9/315—Modulator illumination systems
- H04N9/3152—Modulator illumination systems for shaping the light beam
Definitions
- This invention relates to image display system. More particularly, this invention relates to display system with light source for projecting controllable intensity distribution of incident light flux for controlling gray scales of image display.
- Electromechanical micromirror devices have drawn considerable interest because of their application as spatial light modulators (SLMs).
- SLMs spatial light modulators
- a spatial light modulator requires an array of a relatively large number of micromirror devices. In general, the number of devices required ranges from 60,000 to several million for each SLM.
- FIG. 1A for a digital video system 1 disclosed in a relevant US Patent 5,214,420 that includes a display screen 2.
- a light source 10 is used to generate light energy for ultimate illumination of display screen 2.
- Light 9 generated is further concentrated and directed toward lens 12 by mirror 11.
- Lens 12, 13 and 14 form a beam columnator to operative to columnate light 9 into a column of light 8.
- a spatial light modulator 15 is controlled by a computer
- the SLM 15 has a surface 16 that includes an array of switchable reflective elements, e.g., micromirror devices 32, such as elements 17, 27, 37, and 47 as reflective elements attached to a hinge 30 that shown in Fig. 1 B.
- switchable reflective elements e.g., micromirror devices 32, such as elements 17, 27, 37, and 47 as reflective elements attached to a hinge 30 that shown in Fig. 1 B.
- the on-and-off states of micromirror control scheme as that implemented in the Patent 5,214,420 and by most of the conventional display system imposes a limitation on the quality of the display.
- the gray scale of conventional system PWM between ON and OFF states
- LSB least significant bit, or the least pulse width
- the least brightness, which determines gray scale, is the light reflected during the least pulse width.
- the limited gray scales lead to degradations of image display.
- FIG. 1C an exemplary circuit diagram of a prior art control circuit for a micromirror according to Patent 5,285,407.
- the control circuit includes memory cell 32.
- Various transistors are referred to as "M* *1 where * designates a transistor number and each transistor is an insulated gate field effect transistor.
- Transistors M5, and M7 are p-channel transistors; transistors, M6, M8, and M9 are n-channel transistors.
- the capacitances, C1 and C2 represent the capacitive loads presented to memory cell 32.
- Memory cell 32 includes an access switch transistor M9 and a latch 32a, which is the basis of the static random access switch memory (SRAM) design.
- SRAM static random access switch memory
- All access transistors M9 in a row receive a DATA signal from a different bit-line 31a.
- the particular memory cell 32 to be written is accessed by turning on the appropriate row select transistor M9, using the ROW signal functioning as a wordline.
- Latch 32a is formed from two cross-coupled inverters, M5/M6 and M7/M8, which permit two stable states, state 1 is Node A high and Node B low and state 2 is Node A low and Node B high.
- the dual states switching as illustrated by the control circuit controls the micromirrors to position either at an ON of an OFF angular orientation as that shown in Fig. 1A.
- the brightness i.e., the gray scales of display for a digitally control image system is determined by the length of time the micromirror stays at an ON position.
- the length of time a micromirror is controlled at an ON position is in turned controlled by a multiple bit word.
- Fig. 1 D shows the "binary time intervals" when control by a four-bit word.
- the time durations have relative values of 1 , 2, 4, 8 that in turn define the relative brightness for each of the four bits where 1 is for the least significant bit and 8 is for the most significant bit.
- the minimum controllable differences between gray scales for showing different brightness is a brightness represented by a "least significant bit” that maintaining the micromirror at an ON position.
- the light intensity is determined by the length of time the micromirror is at the fully on position.
- the speed of the micromirror In order to increase the number of gray scales of display, the speed of the micromirror must be increased such that the digital control signals can be increased to a higher number of bits.
- a strong hinge is necessary for the micromirror to sustain a required number of operational cycles for a designated lifetime of operation.
- a higher voltage In order to drive the micromirrors supported on a further strengthened hinge, a higher voltage is required . The higher voltage may exceed twenty volts and may even be as high as thirty volts.
- micromirrors manufacture by applying the CMOS technologies probably would not be suitable for operation at such higher range of voltages and therefore the DMOS micromirror devices may be required.
- CMOS micromirror devices may be required.
- a more complicate manufacturing process and larger device areas are necessary when DMOS micromirror is implemented.
- Conventional modes of micromirror control are therefore facing a technical challenge that the gray scale accuracy has to be sacrificed for the benefits of smaller and more cost effective micromirror display due to the operational voltage limitations.
- Patents related to light intensity control include US Patents 5,589,852, 6,232,963, 6.592,227, 6,648,476, and 6,819,064.
- Patents 5,442,414,6,036,318 discloses special polarized light sources for preventing light loss.
- these patents and patent application do not provide an effective solution to overcome the limitations caused by insufficient gray scales in the digitally controlled image display systems.
- the present invention relates to control of a light source to project an incident light with a predefined distribution of light intensity in the incident light flux.
- the purpose of controlling the intensity distribution of the incident light is to apply such distribution in coordination with the spatial light modulators (SLMs) that has intermediate state control for providing more flexibly controllable gray scales of display.
- SLMs spatial light modulators
- the control and generation of display of additional gray scales are achieved without requiring a higher speed of micromirror oscillation thus maintaining a low operational voltage.
- the present invention provides a projection device with new and improved display with increased gray scale by controlling the input light source to provide controllable intensity distribution or controllable variation of projection shapes of the incident light flux.
- the non-uniformity or the unsymmetrical light intensity and shapes of the incident light cross sections are on the pupil of the incident light optics and not on a face of the SLM. If the incident light is not uniform on a SLM, the projected image on a screen is not an uniform image.
- the present invention provides a projection device by projecting a non-uniform incident light or variety of shapes of incident light cross section at the pupil along an optical path.
- the gray scale for display is now controllable to project finer scale of brightness differences between adjacent pixels with an additional controllable state to provide a fraction of brightness of the fully-on state for display.
- the annoying artifacts shown on a display caused by adjacent pixels having huge gray scale gaps can be significantly reduced.
- the present invention provides a method of controlling the shapes and the intensity distribution of the incident light by providing a specially configured light source. Furthermore, the method includes a step of coordinating the shapes and intensity distribution of the incident light with an array of micromirror devices.
- the micromirrors are enabled to oscillate in a reverse direction or stop before the micromirror completes a full oscillation cycle. Aided by such control flexibility and the fractional brightness for image display during an intermediate oscillation state, additional flexibilities are now provided to fine tune the gray scale for each image pixel especially for the high brightness display area where a gray scale difference are proportionally amplified due to the high intensity of light projections.
- Figs. 1A and 1 B are functional block diagram and a top view of a portion of a micromirror array implemented as a spatial light modulator for a digital video display system of a conventional display system disclosed in a prior art patent.
- Fig. 1C is a circuit diagram for showing a prior art circuit for controlling a micromirror to position at an ON and OFF states of a spatial light modulator.
- Fig. 1 D is diagram for showing the binary time intervals for a four bit gray scale.
- Fig. 2 includes diagrams for showing different shapes and intensity distributions of incident light that coordinate with the deflecting mirror of a SLM to generate image light intensity distributions when the deflecting mirror is moved to different angular positions.
- Fig. 3 includes additional diagrams for showing different shapes and intensity distributions of incident light that coordinate with the deflecting mirror of a SLM to generate image light intensity distributions when the deflecting mirror is moved to different angular positions.
- Fig. 4 shows a projecting device where the scattering or the diverging characteristics of the optical device as that located at the image of illumination or around the illumination is non-uniform.
- Figs. 5A and 5B show a projection device where the illumination projection is from a fly-eye lens that includes multiple micro-lenses and each micro-lens can be controlled or configured with different optical characteristics.
- Figs. 6A, 6B, and 6C explain specific configuration examples of illumination optics means.
- Figs. 7A, 7B, 7C, 7D, and 7E explain a configuration example for changing the optical position of a light source.
- Figs. 8A and 8B show a projecting device with control of the light intensity distribution of the incident light by an array of light emitting elements with each light emitting element controlled to turn on or off for controlling the light intensity distributions.
- Figs. 9A to 9C shows a projection device that employs one or several light sources to generate controllable light intensity distributions that can be non-uniform distributions at the iris of the projection optics.
- Figs. 10A, 10B, and 10C explain a configuration example of a light source when a plurality of illumination light fluxes are obtained from a plurality of sub-light sources.
- Fig. 11 shows another light source implemented with a controllable time modulated light collector.
- Figs. 12 A and 12B for a projection device that employs a rotational light attenuator to control the light intensity distribution.
- Figs. 13A and 13B show a rotational polarizing lens with different polarization along vertical and horizontal axes to control the incident light intensity.
- the first embodiment is a projection device using a deflecting type of spatial light modulator placed in the light path from an illumination and the light path has a non-uniform light distribution at pupil, iris or stop to achieve the optimization of gray-scale so that the incident light variance is optimum to realize a gray-scale improvement.
- display system (1) schematically shows the configuration of the projection device according to this embodiment.
- This projection device comprises a light source 41 , illumination optics means 42, such as a condenser lens, etc., for collecting and directing light from the light source 41 , a mirror 43 for reflecting the light from the illumination optics means 42 to a deflecting type spatial light modulator (hereinafter referred to simply as "SLM"), a control unit 45 for controlling the deflection angle holding operation and the oscillation operation of each deflecting mirror (44a, etc.) of the SLM 44 based on an input signal so that a desired light amount is directed toward a pupil 46a of a projection optics 46, the SLM 44 for performing the deflection angle holding operation or the oscillation operation of each deflecting mirror under the control of the control unit
- illumination optics means 42 such as a condenser lens, etc.
- the deflecting mirror is referred to also as a mirror element.
- the light source 41 and/or the illumination optics means 42 are configured so that the intensity distribution or the average light amount of illumination light becomes non-uniform within a range of an incident NA (Numerical Aperture) to each deflecting mirror (44a, etc.) of the SLM 44, and/or the cross section of illumination light flux takes a shape other than the shape of the cross section of a solid circle centering on the optical axis of the illumination light, within that range.
- NA Numerical Aperture
- display system (1) shows the light source 41 projects a light to the mirror 43 for reflecting the light to the SLM 44 controlled by the control unit 45 to deflect the incident light to the iris 46a of the projection optics 46.
- FIGs. 2 and 3 display configurations (2) to (5) schematically show a partial configuration of the projection device according to this embodiment.
- the mirror status representing the angular positions of a deflecting mirror, e.g., 44a in (2) to (5) differs from that in projection configuration (1).
- the mirror status in (1 ) of Figs. 2 and 3 represents the status of the deflecting mirror 44a when the optical axis of light reflected on the deflecting mirror 44a matches that of the projection optics 46.
- the mirror status in (2) of Fig. 2 represents the status of the deflecting mirror 44a when the optical axis of light reflected on the deflecting mirror 44a inclines by an angle ⁇ i from the optical axis of the projection optics 46 toward the right side of Fig. 2 in parallel to the paper plane of this figure.
- the mirror status in (3) of Figs. 2 and 3 represents the status of the deflecting mirror 44a when the optical axis of light reflected on the deflecting mirror 44a inclines by an angle Qz ( ⁇ i ⁇ ⁇ 2) from the optical axis of the projection optics 46 toward the right side of Figs. 2 and 3 in parallel to the paper planes of the figures.
- FIG. 2 and 3 represents the status of the deflecting mirror 44a when the optical axis of light reflected on the deflecting mirror 44a inclines by an angle ⁇ 3 ( ⁇ 2 ⁇ ⁇ 3) from the optical axis of the projection optics 46 toward the right side of Figs. 2 and 3 in parallel to the paper planes of the figures.
- the mirror status in (5) of Fig. 3 represents the status of the deflecting mirror 44a when the optical axis of light reflected on the deflecting mirror 44a inclines by an angle G 1 from the optical axis of the projection optics 46 toward the depth side of Fig. 3 vertically to the paper plane of this figure.
- (2), (3), (4), and (5) show the deflected light from the SLM 44 as the deflecting mirror 44a of the SLM 44 are moving to different deflecting angles. Additionally, (1 ) represents a fully ON position where the entire incident light is projected onto the iris 46a of the projection optics 46 for image display while
- (2), (3), and (5) represent intermediate states and (4) represents a fully OFF position.
- (A-1 ) to (A-4) represent a reflection light flux from the deflecting mirror 44a, and the pupil 46a in the mirror statuses respectively in (1 ) to (4), and represent the cross section of the reflection light flux with a thick line.
- (A-1) and (A-2) also represent the intensity distribution of light on the cross section of the reflection light flux, and shade a range included in the pupil 46a.
- the examples shown in (A-1 ) to (A-4) are those implemented when light such that the cross section of the reflection light flux matches the pupil 46a in the position of the pupil 46a in the mirror status of (1), and a distribution 47, which is a normal distribution as the intensity distribution of light in that position, is obtained as shown in (A-1 ) is incident to the deflecting mirror 44a.
- the intensity distribution 47 is also a distribution that is non-uniform in a direction nearly parallel to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status.
- (A-ML) represents the light intensity in the pupil 46a when the mirror status is changed from (1) to (4).
- FIG. 2 Referring to (B-1) to (B-4) shown in Figs. 2 for an incident light of a non-circular oval shape.
- (B-ML) shown in Fig. 2 clearly shows that the light intensity now has a different distribution than that shown in (A-ML). Therefore, by changing the shape of the incident light, light intensity distribution as the deflecting mirror 44a is moved to different angular positions can be adjusted.
- (B-1) to (B-4) represent a reflection light flux from the deflecting mirror 44a, and the pupil 46a in the mirror statuses respectively in (1) to (4), and represent the cross section of the reflection light flux with a thick line.
- (B-1) and (B-2) also represent the intensity distribution of light on the cross section of the reflection light flux, and shade a range included in the pupil 46a.
- the examples shown in (B-1) to (B-4) are those implemented when light such that the cross section of the reflection light flux has an elliptical shape including the pupil 46a in the position of the pupil 46a in the mirror status of (1), its longer axis direction is in parallel to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status, and a distribution 48, which is a normal distribution as the intensity distribution of light in the position of the pupil 46a, is obtained as shown in (B-1) is incident to the deflecting mirror 44a.
- the intensity distribution 48 is also a distribution that is non-uniform in a direction nearly parallel to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status.
- (B-ML) represents the light intensity within the pupil 46a when the mirror status is changed from (1 ) to (4) in this example.
- the inclination of light intensity which varies with a change in the mirror status, can be made gentle, and the range of the deflection angle of the deflecting mirror, in which micro output light can be obtained, can be widened.
- the degree of change in the light intensity when the deflection angle of the mirror fluctuates, for example, due to variations in the manufacturing of a component (such as a hinge, etc.) that configures the deflecting mirror can be reduced. Accordingly, precision required for the deflecting mirror control can be reduced.
- the incident light intensity has a non-symmetrical distribution and the projection light intensity as shown in (C-ML) in Fig. 2 has different variations when the deflecting mirror 44a is moved through the intermediate states between the fully ON and fully OFF position.
- This incident light intensity distribution allows additional oscillation control period because of the lower image light intensity in the intermediate states.
- the incident light intensity distribution thus enables additional intermediate state gray scales control flexibility for greater number of gray scales.
- (C-1) to (C-4) represent a reflection light flux from the deflecting mirror 44a, and the pupil 46a in the mirror statuses respectively in (1) to (4), and represent the cross section of the reflection light flux with a thick line.
- (C-1) and (C-2) also represent the intensity distribution of light on the cross section of the reflection light flux, and shade a range included in the pupil 46a.
- the examples shown in (C-1) to (C-4) are those implemented when light such that the cross section of the reflection light flux matches the pupil 46a in the position of the pupil 46a in the mirror status of (1), and a distribution 49, which inclines toward the optical axis direction of the reflection light in the mirror status of (4), is obtained as the intensity distribution of light in that position as shown in (C-1) is incident to the deflecting mirror 44a.
- the intensity distribution 49 is also a distribution that is non-uniform in a direction nearly parallel to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status.
- (C-ML) represents the light intensity in the pupil 46a when the mirror status is changed from (1) to (4).
- the intensity distribution of light is inclined like the distribution 49, whereby an intermediate light amount can be obtained only by slightly inclining the deflecting mirror 44a from the mirror status of (1) toward the mirror status of (4). Besides, a high intensity point of the intensity distribution of light further moves away from the pupil 46a as shown in (C-4) in the mirror status of (4), thereby enabling the contrast at the time of the fully OFF position to be improved.
- (D-1 ) to (D-4) shown in Figs. 2 shows the incident light has an intensity distribution of an irregular double-eye shape and the light intensity variations as shown in (D-ML) in Fig. 2 has a different variation as the deflecting mirror 44a of the SLM 44 is oscillating from the fully ON to the fully OFF position.
- (D-1) to (D-4) represent a reflection light flux from the deflecting mirror 44a, and the pupil 46a in the mirror statuses respectively in (1) to (4), and represent the cross section of the reflection light flux with a thick line.
- (D-1 ) and (D-2) also represent the intensity distribution of light on the cross section of the reflection light flux, and shade a range included in the pupil 46a.
- the examples shown in (D-1) to (D-4) are those implemented when light such that the cross section of the reflection light flux takes a shape where two ellipses are arranged in series in the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status, in the position of the pupil 46a in the mirror status of (1 ), and a distribution 50 where high intensity mountains are arranged in series in the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status, is obtained as the intensity distribution of light in the position of the pupil 46a in accordance with the shape of the cross section of the reflection light flux as shown in (D-1) is incident to the deflecting mirror 44a.
- the longer axis direction of the cross section of the reflection light flux is vertical to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status.
- the intensity distribution 50 is also a distribution that is non-uniform in the direction nearly parallel to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status.
- (D-ML) represents the light intensity in the pupil 46a when the mirror status is changed from (1 ) to (4) in this example.
- the intensity distribution of light is implemented as the distribution 50 as described above, whereby an inflection point is provided in the change of the light intensity, and the change of the light intensity becomes gentle in the vicinity of the inflection point. As a result, a stable intermediate light amount can be obtained.
- the control unit 45 enables multiple state control of defecting states of illumination light by the SLM 44 and the examples realize greater number of gray scales projection by leading desired light intensity into optical path utilizing the change of the incident light to optical path in deflection process optimized as described previously.
- the intensity distribution is shifted toward OFF position so that less movement of the deflecting mirror 44a of the SLM 44 is required to achieve intermediate intensity.
- the peak of the light distribution is further from the iris 46a position and this will improve the contrast at OFF position.
- the peak of intensity is shifted toward deflecting direction of the light axis. This will cause the change of curvature and this change enables easier intermediate state creation.
- FIG. 3 for the projection of incident light for the projection device where the incident light has shapes and intensity distributions shown in (E-1 ) and (F-1) in Figs. 3 when the deflecting mirror 44a of the SLM 44 is at the fully ON position.
- E-ML and (F-ML) shown in Figs. 3 shows the display light intensity as the deflecting mirror 44a is moved from the fully ON position to the fully OFF position.
- the image light intensity as shown in (E-ML) and (F-ML) can be controlled to generate greater number of gray scales.
- the incident light intensity distribution is implemented with assumption that the deflecting mirror 44a of the SLM 44 has an intermediate state located out of the moving plane of the light axis.
- (F-ML) illustrates that a control flexibility is provided to achieve stable output light.
- (E-1), (E-5), (E-3), (E-4), and (F-1 ), (F-5), (F-3), (F-4) respectively represent a reflection light flux from the deflecting mirror 44a, and the pupil 46a in the mirror statuses of (1 ), (5), (3), and (4) respectively, and represent the cross section of the reflection light flux with a thick line. Additionally, (E-1), (E-5) and (F-1 ), (F-5) also represent the intensity distribution of light on the cross section of the reflection light flux, and shade a range included in the pupil 46a.
- a distribution 51 which is a normal distribution as the intensity distribution of light in that position, is obtained as shown in (E-1 ) is incident to the deflecting mirror 44a.
- the intensity distribution 51 is also a distribution that is non-uniform in a direction nearly vertical to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status (a change among (1 ), (3), and (4)).
- (E-ML) represents the light intensity in the pupil 46a when the mirror status is changed to (5), (1), (3), and (4) in this example.
- the examples shown in (F-1), (F-5), (F-3), and (F-4) are those implemented when light such that the cross section of the reflection light flux takes a shape where two ellipses are arranged vertically to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status (a change among (1 ), (3), and (4)), and a distribution 52 where high intensity mountains are arranged vertically to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status (a change among (1), (3), and (4)), is obtained as the intensity distribution of light in that position in accordance with the shape of the cross section of the reflection light flux as shown in (F-1) is incident to the deflecting mirror 44a.
- the longer axis direction of the shape of the cross section of the reflection light flux is parallel to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status (a change among (1), (3), and (4)).
- the intensity distribution 52 is also a distribution that is non-uniform in a direction nearly vertical to the moving direction of the optical axis of the reflection light, which varies with a change in the mirror status (a change among (1), (3), and (4)).
- (F-ML) represents the light intensity in the pupil 46a when the mirror status is changed to (5), (1), (3), and (4).
- stable output light can be obtained from the projection optics 46.
- the examples shown in Fig. 3 are those implemented when the optical axis of the reflection light in the mirror status for obtaining an intermediate light amount is provided outside the moving plane of the optical axis of the reflection light, which varies with a change in the mirror status shown in the examples of Fig. 2.
- a configuration of the light source 41 and/or the illumination optics means 42 which is intended to obtain the above described reflection light such that the intensity distribution of the cross section of light flux is non-uniform in the position of the pupil 46a of the projection optics 46, and/or the reflection light such that the cross section of the light flux takes a shape other than the shape of the cross section of a solid circle centering on the optical axis, is described in detail.
- This configuration is also a configuration for making the intensity distribution or the average light amount of illumination light non-uniform within the range of an incident NA to each deflecting mirror (44a, etc.) of the SLM 44, or a configuration for giving the cross section of illumination light flux a shape other than the shape of the cross section of a solid circle centering on the optical axis of the illumination light within that range.
- Fig. 4 for illustrating the projecting device where the scattering or the diverging characteristics of the optical device as that located at the image of illumination or around the illumination is non-uniform
- "at the image of illumination” also includes a plane on which a light source image is formed
- “around the illumination” also includes the vicinity of the light source 41.
- Fig. 4 schematically shows the light source 41, and the optical element 61 included in the illumination optics means 42.
- the optical element 61 which is provided on the plane where the light source image is formed or in the vicinity of the light source 41, is an optical element having, a non-uniform diverging or scattering characteristic, and is, for example, a filter partially having a different transmittance, or the like.
- a non-uniform intensity distribution can be given to the illumination light by the illumination optics means 42 including such an optical element 61.
- Figs. 5A and 5B show the projection device where the illumination projection is from a fly-eye lens that include multiple micro-lenses and each micro-lens can be controlled or configured with different optical characteristics, e.g. reflectivity, deflecting angles, or degrees of light transmission, fill factor, etc.
- Figs. 5A and 5B schematically show a fly-eye lens that is included in the illumination optics means 42, and composed of a plurality of micro-lenses including micro-lenses having different optical characteristics.
- Fig. 5A shows a fly-eye lens 62 composed of a plurality of micro-lenses including micro-lenses having a different transmittance
- FIG. 5B shows a fly-eye lens 63 composed of a plurality of micro-lenses including micro-lenses having a different aperture ratio. Also with the illumination optics means 42 including such a fly-eye lens, a non-uniform intensity distribution can be given to the illumination light.
- Figs. 6A, 6B, and 6C schematically show a projection device according to this embodiment.
- Figs. 6A to 6C depict that light passes through the SLM 44, for the sake of convenience. Actually, however, light reflects on the SLM 44 as shown in Figs. 2 and 3.
- a condenser lens 64 is provided between the SLM 44 and the projection optics (projection lens) 46. This lens is omitted in Figs. 2 and 3.
- the illumination optics means 42 comprises a condenser lens 65, fly-eye lenses 66 and 67, and an illumination lens 68. According to this configuration example, the intensity distribution of the cross section of light flux in the position of the pupil 46a of the projection optics
- the illumination optics means 42 comprises a condenser lens 65, a filter 70, fly-eye lenses 66 and 67, and an illumination lens 68.
- the filter 70 is a filter the shaded portion of which has a lower transmittance than the other portions.
- the filter 70 is also one example of the optical element 61 shown in Fig. 4. According to this configuration example, the intensity distribution of the cross section of the light flux in the position of the pupil 46a of the projection optics 46 in the mirror status of (1) shown in Figs. 2 and 3 becomes a distribution 71 , and a light amount in the central portion can be reduced in comparison with the distribution 69 shown in Fig. 6A.
- the illumination optics means 42 comprises a condenser lens 65, a filter 70, fly-eye lenses 66 and 67, and an illumination lens 68.
- the filter 70 is a filter the shaded portion of which has a lower transmittance than the other portions.
- the filter 70 is also one example of the optical element 61 shown in Fig.
- the illumination optics means 42 comprises the fly-eye lenses 66' and 67' having optical characteristics that are different from the fly-eye lenses 66 and 67 shown in Fig. 6A as their replacement.
- the optical characteristics of the plurality of micro-lenses that configure the fly-eye lens shown in Fig. 6A are the same, but the plurality of micro-lenses that configure the fly-eye lens shown in Fig. 6C include micro-lenses having a different optical characteristic (the number of apertures in the example of Fig. 6C).
- the fly-eye lenses 66' and 67' are also one example of the fly-eye lens 63 shown in Fig.
- the intensity distribution of the cross section of the light flux in the position of the pupil 46a of the projection optics 46 in the mirror status of (1) shown in Figs. 2 and 3 becomes a distribution 72, and its inclination can be made gentle in comparison with the distribution 69 shown in Fig. 6A.
- the cross section of the light flux is non-symmetrical around the axis of the light path in the part of the light path from the illumination through the SLM 44 or from the SLM 44 through a screen for displaying an image.
- the cross section of light flux has a shape other than the shape of the cross section of a solid circle centering on the optical axis in at least a portion of the illumination light path extending from the light source 41 to the SLM 44, or the projection light path extending from the SLM 44 to the image display plane not shown.
- Such the projection device may also be applied to project an incident light where the light intensity distribution is non-uniform and the illumination area is non-uniform for producing best images under different circumstances.
- An example where the intensity distribution of the cross section of light flux is non-uniform and a radiation field is asymmetric is described, for example, with reference to (D-1) to (D-4) of Fig. 2.
- the projection device according to this embodiment can be also configured to change the optical position of the light source 41.
- Figs. 7A, 7B, 7C, and 7E are diagrams explaining a configuration example for changing the optical position of the light source 41.
- This configuration example is an example where the optical position of the light source 41 is changed by using a parallel fiat plate 73 (73a, 73b) that is insertable/removable in/from the light path as shown in Fig. 7A.
- the parallel flat plate 73 is configured as one piece by arranging, side by side, a parallel flat plate part 73a that is vertical to the light path, and a parallel fiat plate part 73b that inclines by a predetermined angle from the parallel flat plate part 73a.
- Figs. 7A, 7B, and 7C show the state where the parallel flat plate part 73b is inserted in the light path and the parallel flat plate part 73a is removed from the light path
- Figs. 7D and 7E show the state where the parallel flat plate part 73a is inserted in the light path and the parallel flat plate part 73b is removed from the light path
- Figs. 7B and 7D are top views
- Figs. 7C and 7E are side views.
- a condenser lens 74 is provided between the light source 41 and the parallel flat plate 73 in Figs. 7A, 7B, 7C, and 7D. However, this lens is omitted in Fig. 7A.
- the light path can be shifted as shown in Figs. 7E to 7C by changing the parallel flat plate part inserted in the light path from 73a to 73b, and consequently, the optical position of the light source 41 can be changed.
- the intensity distribution of the light flux incident to the SLM 44 can be also controlled by changing the optical position of the light source 41 in this way.
- the light source includes an array of light emitting elements wherein each light emitting efement is controlled to turn on or off for controlling the light intensity distributions.
- Figs. 8A and 8B show another configuration example for changing the optical position of the light source 41.
- the light source 41 has a configuration where light emitting elements, which are a plurality of sub-light sources, are arranged in the form of an array, and the optical position of the light source 41 is changed by selecting a light emitting element made to emit light, and a light emitting element made not to emit light.
- the light emitting element is, for example, a laser light source, an LED (Light Emitting Diode) light source, etc.
- the light source 41 shown in Fig. 8A represents a state where light emitting elements in two rows on the left side of a light emission plane emit light, and the remaining elements do not emit light.
- the light source 41 shown in Fig. 8B represents a state where light emitting elements in two rows on the right side of the light emission plane emit light, and the remaining elements do not emit light.
- Light emitting elements made to emit light, and light emitting elements made not to emit light are selected in this way, whereby the optical position of the light source 41 can be changed.
- the intensity distribution of light flux incident to the SLM 44 can be also controlled by changing the optical position of the light source 41 in this way.
- the relationships between the mirror status and the light intensity can be also adjusted by making the intensity distribution of illumination light uniform within the range of an incident NA to each deflecting mirror of the SLM 44, and by giving the cross section of illumination light flux a shape other than the shape of the cross section of a solid circle centering on the optical axis of the illumination light.
- the relationships can be adjusted only by making the shape of a radiation field different.
- An example where the shape of the radiation field is made different is as described with reference to (B-1 ) to (B-4), and (D-1) to (D-4), which are shown in Fig. 2, and (F-1) to (F-4), which are shown in Fig. 3.
- the projection device according to this embodiment can be also configured to make a plurality of illumination light fluxes exist.
- Figs. 9A to 9C for the projection device that employs one or several light sources to generate controllable light intensity distributions that can be non-uniform distributions at the iris 46a of the projection optics 46.
- Figs. 9A to 9C show configuration examples for making a plurality of illumination light fluxes exist.
- Figs. 9A to 9C depict that light passes through the SLM 44, for the sake of convenience. Actually, however, light reflects on the SLM 44 as shown in Figs. 2 and 3.
- a condenser lens 64 is provided between the SLM 44 and the projection optics (projection lens) 46.
- this lens is omitted.
- the light source 41 comprises two sub-light sources 76 (76a, 76b), and the illumination optics means 42 comprises two first condenser lenses 77 (77a, 77b), two second condenser lenses 78 (78a, 78b), two relay lenses 79 (79a, 79b), and an illumination lens 68.
- two illumination light fluxes such as an illumination light flux that passes through the first condenser lens 77a, the second condenser
- the two illumination light fluxes are obtained from the two sub-light sources.
- the illumination optics means 42 comprises a first condenser lens 80, a light path separation element 81 , two mirrors 82 (82a, 82b), two second condenser lenses 78 (78a, 78b), two relay lenses 79 (79a, 79b), and an illumination lens 68.
- light that is incident to the light path separation element 81 from the light source 41 after passing through the first condenser lens 80 is separated into two directions.
- Two illumination light fluxes such as an illumination light flux in one direction, which passes through the second condenser lens 78a, the relay lens 79a, and the illumination lens 68 after reflecting on the mirror 82a and is incident to the SLM 44, and an illumination light flux in the other direction, which passes through the second condenser lens 78b, the relay lens 79b, and the illumination lens 68 after reflecting on the mirror 82b and is incident to the SLM 44, exist.
- two illumination light fluxes can be obtained by separating a light flux from a single light source into two in this configuration example.
- the illumination optics means 42 comprises a first condenser lens 80, a light path separation element 83, two second condenser lenses 78 (78a, 78b), two relay lenses 79 (79a, 79b), and an illumination lens 68.
- first condenser lens 80 the first condenser lens 80
- second condenser lenses 78 the second condenser lenses 78
- relay lenses 79 79a, 79b
- Two illumination light fluxes such as an illumination light flux in one direction, which passes through the second condenser lens 78a, the relay lens 79a, and the illumination lens 68 and is incident to the SLM 44, and an illumination light flux in the other direction, which passes through the second condenser lens 78b, the relay lens 79b, and the illumination lens 68 and is incident to the SLM 44, exist.
- two illumination light fluxes can be obtained by separating a light flux from a single light source into two also in this configuration example.
- Figs. 9A to 9C refer to the configuration examples where the two illumination light fluxes exist.
- a configuration where three or more illumination light fluxes exist can be also implemented.
- each of a plurality of existing illumination light fluxes can be also made to differ in one or more of a frequency, an intensity distribution, and the shape of the cross section of light flux.
- the SLM 44 includes a plurality of deflecting mirrors controllable to oscillate between ON-OFF position with intermediate states to coordinate with the incident light intensity distributions for generating multiple controllable gray scales to optimize the visual effects of the image display.
- Figs. 1OA, 1OB, and 1OC explain a configuration example of the light source 41 when a plurality of illumination light fluxes are obtained from a plurality of sub-light sources.
- the plurality of illumination light fluxes can be also obtained by applying, as the light source 41 , a light source having a configuration where a plurality of sub-light sources are arranged in the form of an array, and by selecting sub-light sources made to emit light, and sub-light sources made not to emit light as shown in Figs. 1OA to 1OC.
- the sub-light source is, for example, a laser light source, an LED light source, etc. Additionally, in this case, the intensity distribution of incident light flux can be also made non-uniform by changing the light emission amount of each of the sub-light sources.
- the sub-light sources may be those emitting light of different frequencies, or those emitting light of the same frequency. In this case, if illumination lights emitted by adjacent sub-light sources are arranged to emit different primary colors, differences in the optical layout of each color can be reduced, and this is preferable. Additionally, the pattern of the light emission or the non-light emission of the sub-light sources is. configured to be arbitrarily changeable. A light-up pattern can be determined so that sub-light sources emitting light are arranged, for example, symmetrically or asymmetrically with the optical axis.
- a selection of such a light emission pattern is configured to be arbitrarily switchable during a display control period, more detailed gray scale reproduction can be made.
- an individual gray scale reproduction characteristic can be obtained by changing the light emission pattern of a light source unit for each color.
- a light emission intensity may be changed in addition to a change made to the light emission pattern.
- the light source unit may be a configuration where the output planes of optical transmission means such as an optical fiber, etc., which transmits illumination light from the light source, are arranged in the form of a matrix. At this time, the number of light sources and that of the output planes of the optical transmission means do not need to always match.
- the optical transmission means may further comprise optical synthesis or separation means.
- the area of the light emission plane of the light source unit is configured to be equal to or smaller than 5 mm 2 in order to efficiently achieve the object of the present invention without unnecessarily increasing the area of the light source, and without decreasing the intensity of projection light to the light modulator.
- the optical length from each laser to the SLM can be different from each other or the timing of each laser pulse is staggered in order to reduce speckle noise.
- the first embodiment of the present invention is the projection device using the deflecting type spatial light modulator for directing the illumination light from the light source toward the projection light path, and implemented to have an illumination configuration where the intensity distribution in the position of the optical pupil of the projection light path of illumination light becomes non-uniform, and/or an illumination configuration where the cross section of light flux in the position of the optical pupil of the projection light path of illumination light takes a shape other than the shape of the cross section of a solid circle centering on the optical axis, in order that a change in a light amount incident to the projection light path in the deflection process of the illumination light, which is performed by the deflecting type spatial light modulator, becomes preferable for intermediate gray scale reproduction.
- a finer intermediate gray scale light amount or a stable intermediate gray scale can be obtained by preferably adjusting the change curve of the amount of output light, which varies with a change in the angle of the deflecting mirror of the deflecting type spatial light modulator. Additionally, a predetermined light amount is made incident to the projection light path by using a change in the light amount incident to the projection light path in an optimized deflection process, whereby high gray scale projection can be implemented.
- a projection device comprises a light source, illumination optics means for collecting and directing light from the light source, a deflecting type spatial light modulator (hereinafter referred to simply as SLM), a projection light path for projecting the light modulated by the SLM, and control means for controlling the deflection angle holding operation and the oscillation operation of each deflecting mirror (mirror element) of the SLM based on an input signal so that a desired light amount is directed toward the optical pupil of the projection light path.
- the light source and/or the illumination optics means are configured so that the intensity distribution of illumination light in the position of the optical pupil of the projection light path becomes non-uniform.
- the control means can control the deflecting mirror to hold a particular deflection angle in a first control period, and can control the deflecting mirror to oscillate in a second control period.
- this projection device can increase or decrease the intensity of light incident to the SLM in at least one of the first and the second control periods, or in one or more sub-control periods when at least one of the first and the second control periods is further divided into two or more sub-control periods.
- Fig. 11 shows the second embodiment of this invention where the light source implemented with a light collector is employed.
- the light intensity projected from the light source is controlled by controlling the light collecting characteristics by applying a time modulation between different periods. These time periods are shown as time period 1 and period 2 with two sub-periods shown as time period 2-1 and time period 2-2.
- time modulating the light collector By time modulating the light collector, a light intensity distribution can be projected from the light source thus achieve the purpose of generating additional gray scales by controlling the incident light intensity distributions.
- Fig. 11 shows an example of operations per frame time of the projection device according to this embodiment.
- mirror status represents the status of one deflecting mirror in the SLM.
- a time period 1 represents a first control period
- a time period 2 represents a second control period
- time periods 2-1 and 2-2 represent two control periods when the second control period is divided into two sub-control periods.
- light source intensity is controlled to be high in the time period 1. Additionally, the deflection angle of the deflecting mirror is controlled so that the mirror status becomes ON status in a predetermined time period within the time period 1 , and the deflection angle of the deflecting mirror is controlled so that the mirror status becomes OFF status in the rest of the time period 1.
- the light source intensity is controlled to be high in the time period 2-1 , and controlled to be between high and low in the time period 2-2.
- the deflecting mirror is oscillation-controlled so that the mirror status becomes an oscillation status in the time period 2.
- the deflecting mirror may be oscillation-controlled to reduce the oscillation amplitude of the deflecting mirror in the time period 2-1 or 2-2.
- the deflecting mirror is oscillation-controlled in the time period 2 within 1 frame time, and not only the light source intensity but also the oscillation amplitude of the deflecting mirror is decreased in the time period 2-2, into which the time period 2 is arbitrarily divided, whereby finer intermediate gray scale representation can be made.
- control is easy if a time period during which the light source intensity is increased or decreased is set to an integral multiple of the natural period of the deflecting mirror.
- the intensity of the light source may be modulated, for example, in a time period required until output light stops its incidence to the pupil of the projection lens within a time period from when the output light actually starts its incidence to the pupil of the projection lens until when the mirror element makes a transition to the OFF status via the ON status after starting to oscillate from the OFF status.
- the natural period of the deflecting mirror is T
- similar effect can be obtained also by modulating the intensity of the light source during a time period from when 1/4 of T almost elapses until when 3/4 of T almost elapses after the time period 2-2 starts, namely, after the mirror element starts to oscillate.
- a control may be performed to turn the illumination light off in a time period from when the mirror element starts to oscillate until when 1/4 of T elapses, and in a time period from when 3/4 of T elapses until when T elapses.
- the control for turning the illumination light off in synchronization with the oscillation period is also applicable to the time period 2-1.
- the light source is turned off in a time period during which the reflection light from the mirror element is not practically incident to the pupil of the projection lens, and the modulation of the intensity of the light source light is controlled in a time period during which the reflection light from the mirror element is incident to the pupil of the projection lens, in synchronization with the operational periods of the mirror element as described above, whereby unnecessary reflection light can be prevented from being incident to the pupil of the projection lens, and the contrast of a projection image can be prevented from being degraded.
- the degree of decrease of the light source light in the time period 2-2 is set to 1/n (n is an integer) of the intensity of the light source in the time period during which the light source light is not modulated, namely, the time period 1 and the time period 2-1.
- the degree of decrease of light source light may be arbitrarily set based on the light amount desired to be obtained with the oscillation control of the mirror element.
- the degree of modulation of the light source light is implemented as two stages.
- the degree of modulation may be implemented as a plurality of modulation intensities including the above described OFF status. With such a configuration, finer gray scale reproduction can be made.
- the time period 2 during which the mirror element is oscillation-controlled is divided to make the light source modulation in the embodiment.
- a time period during which ON/OFF of the mirror element is controlled may be divided to make the light source modulation.
- the time period during which the light source modulation is made is equalized to a minimum time unit in which the mirror is turned on, a time period during which the light source modulation is made is provided separately from the time period of the ON/OFF control, during which the light source light is not modulated, and the mirror element is turned on/off in the provided time period, so that gray scales can be increased.
- the degree of modulation of the light source light may be arbitrarily set depending on a required light intensity as described above.
- a light source that is superior in responsiveness such as a laser light source, etc.
- the modulation of the intensity of the light source can be implemented also by changing the light emission pattern and the number of light emissions of the light source array shown in Fig. 10 in addition to the method for modulating the intensity or the light emission time of a single light source.
- a so-called color sequential display method for configuring a color image by sequentially displaying images of different colors within one frame 1 frame time shown in Fig. 11 is executed by being replaced with sub-frames of respective colors.
- a time period during which only one of the three primary colors is displayed is divided into first and second control periods, and the modulation of the intensity of the light source is made.
- whether or not to modulate the intensity of the light source, or the degree of modulation of the intensity may be made different for each of the colors.
- the intensity of the light source may be modulated only in a time period during which the green color having high human visual sensitivity is displayed.
- whether or not to modulate the intensity of the light source, or the degree of modulation of the intensity may be arbitrarily set in each sub-sequence in order to reduce a problem called a color break.
- the emitted lights can be used as complementary illumination light, with which the above described intensity modulation may be combined and controlled.
- the light source and/or the illumination optics means are configured to make the intensity distribution of illumination light in the position of the optical pupil of the projection light path non-uniform.
- the light source and/or the illumination optics means can be also configured, for example, to make the intensity distribution uniform. Also with such a configuration, intermediate gray scale representation finer than conventional techniques can be made.
- the means for increasing or decreasing the intensity of light incident to the SLM a variety of methods can be considered in addition to the method for increasing/decreasing the intensity of the light source itself as described above.
- the rotational light intensity attenuator has different transmission indexes along different angular sections of a rotational wheel for flexibly control of the light intensity projected onto the SLM for image display.
- the means for increasing or decreasing the intensity of light incident to the SLM is the rotational light intensity attenuator 93 provided in the light path.
- the rotational light intensity attenuator 93 is configured so that it makes one rotation in 1 frame time, and a portion of high transmittance (for example, a portion of transmittance of 100 percent) 93a is inserted in the light path in the time periods 1 and 2-1 shown in Fig. 11 , and a portion of low transmittance (for example, a light attenuation element portion of transmittance of 50 percent) is inserted in the light path in the time period 2-2.
- the portion of high transmittance 93a or the portion of low transmittance 93b is inserted/removed in/from the light path in synchronization with each control period, whereby the intensity of light incident to the SLM can be controlled in a similar manner as in the case shown in Fig. 11.
- the rotational light intensity attenuator can be also configured so that a portion of high transmittance 94a is inserted in the light path in the time period 1 , and a portion of low transmittance 94b is inserted in the light path in the time period 2 as in the rotational light intensity attenuator 94 shown in Fig. 12B.
- a condenser lens 92 is provided between the light source 91 and the rotational light intensity attenuator 93 or 94.
- the condenser lens 92 and the rotational light intensity attenuator 93 or 94 are a portion of the illumination optics means.
- Figs. 13A and 13B is another example where the illumination optics means includes a rotational polarizing lens with different polarization along vertical and horizontal axes of the lens such that by rotating the lens, variations of different light transmissions are achieved to control the incident light intensity.
- Fig. 13A means for increasing or decreasing the intensity of light incident to the SLM is rotational polarizing lenses 95 and 96 provided in the light path.
- the rotational polarizing lens 95 is fixed, whereas the rotational polarizing lens
- the light source 91 is a light source that emits incoherent light. With such a configuration, transmission light can be selected by rotating the rotational polarizing lens 96 in synchronization with each control period, and light of a desired intensity can be made incident to the SLM.
- the illumination optics means can be configured by providing only the rotational polarizing lens 96 in the light path as shown in Fig. 13B.
- a light source 97 is a laser light source that emits light the polarization direction of which is the horizontal direction.
- the rotational polarizing lenses 95 and 96, or the rotational polarizing lens 96 is a portion of the illumination optics means.
- the light source can be also implemented to have a configuration where a plurality of sub-light sources are arranged in the form of an array.
- the sub-light source is, for example, a laser light source, an LED light source, etc.
- the intensity of light emission of each of the sub-light sources is changed in synchronization with each control period, whereby light of a desired intensity can be made incident to the SLM.
- the second embodiment according to the present invention is configured to obtain more micro-output light by providing the control period (the second control period during which the above described oscillation-control is performed) for making intermediate gray scale reproduction with the use of a change in the amount of light incident to the projection light path in the deflection process of illumination light, and by further modulating the amount of illumination light.
- the control period the second control period during which the above described oscillation-control is performed
- a finer intermediate gray scale light amount, or a more stable intermediate gray scale can be obtained.
- a desired light amount can be made incident to the projection light path by using a change in the amount of light incident to the projection light path in the deflection process of optimized illumination light, whereby projection with high gray scales can be implemented.
- the change curve of the amount of output light which varies with a change in the angle of the deflecting mirror of the SLM, is preferably adjusted by making the intensity distribution in the position of the optical pupil of the projection light path of illumination light non-uniform, whereby a finer intermediate gray scale light amount or a stable intermediate gray scale can be obtained.
- the projection device can be also implemented to have an illumination configuration where the cross section of light flux in the position of the optical pupil of the projection light path of illumination light takes a shape other than the shape of the cross section of a solid circle centering on the optical axis, in a similar manner as in the first embodiment. Also with such a configuration, a finer intermediate gray scale light amount or a stable intermediate gray scale can be obtained by preferably adjusting the change curve of the amount of output light, which varies with a change in the angle of the deflecting mirror of the SLM. Additionally, if the projection device is configured as described above, it can be further configured to make the intensity distribution in the position of the optical pupil of the projection light path of illumination light uniform.
- a light source that emits incoherent light such as a high-pressure mercury lamp, a halogen lamp, a xenon lamp, an LED, etc., or a light source that emits coherent light, such as a laser light source, etc. is applicable as the light source.
- the projection device according to the first embodiment can be also combined with a portion of the projection device according to the second embodiment, or the projection device according to the second embodiment can be combined also with a portion of the projection device according to the first embodiment.
- the change curve of the amount of output light is preferably adjusted by making the intensity distribution in the position of the optical pupil of the projection light path of illumination light non-uniform, and/or by giving the cross section of light flux in the position of the optical pupil of the projection light path of illumination light a shape other than the shape of the cross section of a solid circle centering on the optical axis, whereby a finer intermediate gray scale light amount or a stable intermediate gray scale can be obtained
- the amount of illumination light is further modulated by providing a control period (a control period during which the oscillation-control of a mirror is performed) during which intermediate gray scale reproduction is made with the use of a change in the amount of light incident to the projection light path in the deflection process of illumination light, whereby a finer intermediate gray scale light amount or a stable intermediate gray scale can be obtained.
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- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Projection Apparatus (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
Abstract
Description
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Priority Applications (2)
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JP2009502260A JP2009531731A (en) | 2006-03-26 | 2007-03-26 | Intensity distribution of incident beam |
GB0819462A GB2450664A (en) | 2006-03-26 | 2008-10-23 | Intensity distribution of incident light flux |
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US78625606P | 2006-03-26 | 2006-03-26 | |
US60/786,256 | 2006-03-26 |
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PCT/IB2007/002537 WO2008007219A2 (en) | 2006-03-26 | 2007-03-26 | Intensity distribution of incident light flux |
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CN (1) | CN101473643A (en) |
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CN104320187A (en) * | 2014-09-15 | 2015-01-28 | 北京理工大学 | Communication emission system packaged based on micro-lens array for homogenizing illumination of LED (Light Emitting Diode) |
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CN103307997B (en) * | 2012-03-09 | 2016-12-14 | 上海微电子装备有限公司 | A kind of angular resolution scatterometry device and measuring method thereof |
JP6155684B2 (en) * | 2013-02-15 | 2017-07-05 | セイコーエプソン株式会社 | Lighting device and projector |
JP2014164175A (en) * | 2013-02-26 | 2014-09-08 | Seiko Epson Corp | Illumination device and projector |
CN106842776B (en) * | 2017-04-04 | 2022-05-13 | 吴卫军 | Diameter-variable light beam tube |
CN111736162B (en) * | 2020-08-04 | 2020-11-10 | 中国人民解放军国防科技大学 | Laser illumination echo detection device and method for complex target |
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- 2007-03-26 JP JP2009502260A patent/JP2009531731A/en not_active Withdrawn
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CN101473643A (en) | 2009-07-01 |
GB2450664A (en) | 2008-12-31 |
WO2008007219A3 (en) | 2008-09-04 |
GB0819462D0 (en) | 2008-12-03 |
JP2009531731A (en) | 2009-09-03 |
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