WO2007142737A8 - Process and structure for fabrication of mems device having isolated edge posts - Google Patents

Process and structure for fabrication of mems device having isolated edge posts

Info

Publication number
WO2007142737A8
WO2007142737A8 PCT/US2007/008907 US2007008907W WO2007142737A8 WO 2007142737 A8 WO2007142737 A8 WO 2007142737A8 US 2007008907 W US2007008907 W US 2007008907W WO 2007142737 A8 WO2007142737 A8 WO 2007142737A8
Authority
WO
WIPO (PCT)
Prior art keywords
support structures
fabrication
edge
mems device
isolated edge
Prior art date
Application number
PCT/US2007/008907
Other languages
French (fr)
Other versions
WO2007142737A1 (en
Inventor
David Heald
Original Assignee
Qualcomm Mems Technologies Inc
David Heald
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc, David Heald filed Critical Qualcomm Mems Technologies Inc
Priority to EP07755243A priority Critical patent/EP2021859A1/en
Publication of WO2007142737A1 publication Critical patent/WO2007142737A1/en
Publication of WO2007142737A8 publication Critical patent/WO2007142737A8/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Abstract

A method of fabricating an array of MEMS devices includes the formation of support structures (96) located at the edge of upper strip electrodes (92). A support structure is etched to form a pair of individual support structures (106) located at the edges of a pair of adjacent electrodes (92). The electrodes themselves may be used as a hard mask during the etching of these support structures. A resultant array of MEMS devices includes support structures having a face (107) located at the edge of an overlying electrode and coincident with the edge of the overlying electrode.
PCT/US2007/008907 2006-06-01 2007-04-09 Process and structure for fabrication of mems device having isolated edge posts WO2007142737A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07755243A EP2021859A1 (en) 2006-06-01 2007-04-09 Process and structure for fabrication of mems device having isolated egde posts

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/445,607 US7321457B2 (en) 2006-06-01 2006-06-01 Process and structure for fabrication of MEMS device having isolated edge posts
US11/445,607 2006-06-01

Publications (2)

Publication Number Publication Date
WO2007142737A1 WO2007142737A1 (en) 2007-12-13
WO2007142737A8 true WO2007142737A8 (en) 2008-02-28

Family

ID=38477061

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/008907 WO2007142737A1 (en) 2006-06-01 2007-04-09 Process and structure for fabrication of mems device having isolated edge posts

Country Status (3)

Country Link
US (2) US7321457B2 (en)
EP (1) EP2021859A1 (en)
WO (1) WO2007142737A1 (en)

Families Citing this family (86)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7297471B1 (en) * 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) * 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7471442B2 (en) * 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7835061B2 (en) * 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7527998B2 (en) * 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7629197B2 (en) * 2006-10-18 2009-12-08 Qualcomm Mems Technologies, Inc. Spatial light modulator
US7545552B2 (en) * 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8115987B2 (en) * 2007-02-01 2012-02-14 Qualcomm Mems Technologies, Inc. Modulating the intensity of light from an interferometric reflector
US7916378B2 (en) 2007-03-08 2011-03-29 Qualcomm Mems Technologies, Inc. Method and apparatus for providing a light absorbing mask in an interferometric modulator display
US7733552B2 (en) * 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7742220B2 (en) 2007-03-28 2010-06-22 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing conducting layers separated by stops
US7715085B2 (en) 2007-05-09 2010-05-11 Qualcomm Mems Technologies, Inc. Electromechanical system having a dielectric movable membrane and a mirror
US7643202B2 (en) * 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US7719752B2 (en) * 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7625825B2 (en) * 2007-06-14 2009-12-01 Qualcomm Mems Technologies, Inc. Method of patterning mechanical layer for MEMS structures
US7643199B2 (en) 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7782517B2 (en) * 2007-06-21 2010-08-24 Qualcomm Mems Technologies, Inc. Infrared and dual mode displays
US7569488B2 (en) * 2007-06-22 2009-08-04 Qualcomm Mems Technologies, Inc. Methods of making a MEMS device by monitoring a process parameter
US7630121B2 (en) 2007-07-02 2009-12-08 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8068268B2 (en) * 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
KR20100066452A (en) 2007-07-31 2010-06-17 퀄컴 엠이엠스 테크놀로지스, 인크. Devices for enhancing colour shift of interferometric modulators
US8072402B2 (en) * 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
US7773286B2 (en) * 2007-09-14 2010-08-10 Qualcomm Mems Technologies, Inc. Periodic dimple array
US7847999B2 (en) * 2007-09-14 2010-12-07 Qualcomm Mems Technologies, Inc. Interferometric modulator display devices
JP5478493B2 (en) * 2007-09-17 2014-04-23 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Translucent / semi-transmissive light emitting interference device
US20090078316A1 (en) * 2007-09-24 2009-03-26 Qualcomm Incorporated Interferometric photovoltaic cell
WO2009052326A2 (en) * 2007-10-19 2009-04-23 Qualcomm Mems Technologies, Inc. Display with integrated photovoltaics
US8058549B2 (en) * 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
CN101836137A (en) * 2007-10-23 2010-09-15 高通Mems科技公司 Adjustably transmissive mems-based devices
US20090293955A1 (en) * 2007-11-07 2009-12-03 Qualcomm Incorporated Photovoltaics with interferometric masks
US8941631B2 (en) * 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7715079B2 (en) * 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
KR20100109924A (en) * 2007-12-21 2010-10-11 퀄컴 엠이엠스 테크놀로지스, 인크. Multijunction photovoltaic cells
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7944604B2 (en) * 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7612933B2 (en) * 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
US8872287B2 (en) * 2008-03-27 2014-10-28 United Microelectronics Corp. Integrated structure for MEMS device and semiconductor device and method of fabricating the same
US7898723B2 (en) * 2008-04-02 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical systems display element with photovoltaic structure
US7969638B2 (en) * 2008-04-10 2011-06-28 Qualcomm Mems Technologies, Inc. Device having thin black mask and method of fabricating the same
US7851239B2 (en) * 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US7746539B2 (en) * 2008-06-25 2010-06-29 Qualcomm Mems Technologies, Inc. Method for packing a display device and the device obtained thereof
US8023167B2 (en) * 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7791783B2 (en) * 2008-06-25 2010-09-07 Qualcomm Mems Technologies, Inc. Backlight displays
US7859740B2 (en) * 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US7782522B2 (en) * 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
US7855826B2 (en) 2008-08-12 2010-12-21 Qualcomm Mems Technologies, Inc. Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
US20100045630A1 (en) * 2008-08-19 2010-02-25 Qualcomm Incorporated Capacitive MEMS-Based Display with Touch Position Sensing
US8358266B2 (en) * 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
US20100096006A1 (en) * 2008-10-16 2010-04-22 Qualcomm Mems Technologies, Inc. Monolithic imod color enhanced photovoltaic cell
US20100096011A1 (en) * 2008-10-16 2010-04-22 Qualcomm Mems Technologies, Inc. High efficiency interferometric color filters for photovoltaic modules
US8270056B2 (en) * 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
US7864403B2 (en) * 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
KR20120030460A (en) * 2009-05-29 2012-03-28 퀄컴 엠이엠스 테크놀로지스, 인크. Illumination devices and methods of fabrication thereof
US8093119B2 (en) * 2009-06-24 2012-01-10 Solid State System Co., Ltd. CMOS microelectromechanical system (MEMS) device and fabrication method thereof
US8270062B2 (en) * 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
US8488228B2 (en) * 2009-09-28 2013-07-16 Qualcomm Mems Technologies, Inc. Interferometric display with interferometric reflector
US8384341B2 (en) * 2009-10-28 2013-02-26 Harris Corporation Battery cell for MEMS device and related methods
US8547626B2 (en) * 2010-03-25 2013-10-01 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of shaping the same
JP2013524287A (en) 2010-04-09 2013-06-17 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Mechanical layer of electromechanical device and method for forming the same
CA2796519A1 (en) 2010-04-16 2011-10-20 Flex Lighting Ii, Llc Illumination device comprising a film-based lightguide
CN102918435A (en) 2010-04-16 2013-02-06 弗莱克斯照明第二有限责任公司 Sign comprising a film-based lightguide
KR20130091763A (en) 2010-08-17 2013-08-19 퀄컴 엠이엠에스 테크놀로지스, 인크. Actuation and calibration of a charge neutral electrode in an interferometric display device
JP5640549B2 (en) 2010-08-19 2014-12-17 セイコーエプソン株式会社 Optical filter, optical filter manufacturing method, and optical device
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
JP5640659B2 (en) * 2010-11-02 2014-12-17 セイコーエプソン株式会社 Optical filter, optical filter manufacturing method, and optical device
US20120194496A1 (en) * 2011-02-01 2012-08-02 Qualcomm Mems Technologies, Inc. Apparatus and method for supporting a mechanical layer
US8461655B2 (en) * 2011-03-31 2013-06-11 Infineon Technologies Ag Micromechanical sound transducer having a membrane support with tapered surface
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US20120274602A1 (en) * 2011-04-29 2012-11-01 Qualcomm Mems Technologies, Inc. Wiring and periphery for integrated capacitive touch devices
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
JP6011235B2 (en) 2012-10-17 2016-10-19 セイコーエプソン株式会社 Ultrasonic measuring device, probe head, ultrasonic probe, electronic device and ultrasonic diagnostic device

Family Cites Families (227)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2534846A (en) 1946-06-20 1950-12-19 Emi Ltd Color filter
DE1288651B (en) 1963-06-28 1969-02-06 Siemens Ag Arrangement of electrical dipoles for wavelengths below 1 mm and method for producing such an arrangement
US3616312A (en) 1966-04-15 1971-10-26 Ionics Hydrazine manufacture
FR1603131A (en) 1968-07-05 1971-03-22
US3813265A (en) 1970-02-16 1974-05-28 A Marks Electro-optical dipolar material
US3653741A (en) 1970-02-16 1972-04-04 Alvin M Marks Electro-optical dipolar material
US3725868A (en) 1970-10-19 1973-04-03 Burroughs Corp Small reconfigurable processor for a variety of data processing applications
DE2336930A1 (en) 1973-07-20 1975-02-06 Battelle Institut E V INFRARED MODULATOR (II.)
US4099854A (en) 1976-10-12 1978-07-11 The Unites States Of America As Represented By The Secretary Of The Navy Optical notch filter utilizing electric dipole resonance absorption
US4196396A (en) 1976-10-15 1980-04-01 Bell Telephone Laboratories, Incorporated Interferometer apparatus using electro-optic material with feedback
US4389096A (en) 1977-12-27 1983-06-21 Matsushita Electric Industrial Co., Ltd. Image display apparatus of liquid crystal valve projection type
US4663083A (en) 1978-05-26 1987-05-05 Marks Alvin M Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics
US4445050A (en) 1981-12-15 1984-04-24 Marks Alvin M Device for conversion of light power to electric power
US4228437A (en) 1979-06-26 1980-10-14 The United States Of America As Represented By The Secretary Of The Navy Wideband polarization-transforming electromagnetic mirror
NL8001281A (en) 1980-03-04 1981-10-01 Philips Nv DISPLAY DEVICE.
DE3012253A1 (en) 1980-03-28 1981-10-15 Hoechst Ag, 6000 Frankfurt METHOD FOR VISIBLE MASKING OF CARGO IMAGES AND A DEVICE SUITABLE FOR THIS
US4377324A (en) 1980-08-04 1983-03-22 Honeywell Inc. Graded index Fabry-Perot optical filter device
US4441791A (en) 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
FR2506026A1 (en) 1981-05-18 1982-11-19 Radant Etudes METHOD AND DEVICE FOR ANALYZING A HYPERFREQUENCY ELECTROMAGNETIC WAVE RADIATION BEAM
US4592628A (en) * 1981-07-01 1986-06-03 International Business Machines Mirror array light valve
NL8103377A (en) 1981-07-16 1983-02-16 Philips Nv DISPLAY DEVICE.
US4571603A (en) 1981-11-03 1986-02-18 Texas Instruments Incorporated Deformable mirror electrostatic printer
NL8200354A (en) 1982-02-01 1983-09-01 Philips Nv PASSIVE DISPLAY.
US4500171A (en) 1982-06-02 1985-02-19 Texas Instruments Incorporated Process for plastic LCD fill hole sealing
US4482213A (en) 1982-11-23 1984-11-13 Texas Instruments Incorporated Perimeter seal reinforcement holes for plastic LCDs
US4566935A (en) 1984-07-31 1986-01-28 Texas Instruments Incorporated Spatial light modulator and method
US4710732A (en) 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5096279A (en) 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US4596992A (en) 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US4615595A (en) 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4617608A (en) 1984-12-28 1986-10-14 At&T Bell Laboratories Variable gap device and method of manufacture
US5172262A (en) 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US4859060A (en) 1985-11-26 1989-08-22 501 Sharp Kabushiki Kaisha Variable interferometric device and a process for the production of the same
US5835255A (en) 1986-04-23 1998-11-10 Etalon, Inc. Visible spectrum modulator arrays
GB8610129D0 (en) 1986-04-25 1986-05-29 Secr Defence Electro-optical device
US4748366A (en) 1986-09-02 1988-05-31 Taylor George W Novel uses of piezoelectric materials for creating optical effects
US4786128A (en) 1986-12-02 1988-11-22 Quantum Diagnostics, Ltd. Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction
NL8701138A (en) 1987-05-13 1988-12-01 Philips Nv ELECTROSCOPIC IMAGE DISPLAY.
DE3716485C1 (en) 1987-05-16 1988-11-24 Heraeus Gmbh W C Xenon short-arc discharge lamp
US4900136A (en) 1987-08-11 1990-02-13 North American Philips Corporation Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel
US4956619A (en) 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US4856863A (en) 1988-06-22 1989-08-15 Texas Instruments Incorporated Optical fiber interconnection network including spatial light modulator
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
JP2700903B2 (en) * 1988-09-30 1998-01-21 シャープ株式会社 Liquid crystal display
US4982184A (en) 1989-01-03 1991-01-01 General Electric Company Electrocrystallochromic display and element
US5272473A (en) 1989-02-27 1993-12-21 Texas Instruments Incorporated Reduced-speckle display system
US5192946A (en) 1989-02-27 1993-03-09 Texas Instruments Incorporated Digitized color video display system
US5214419A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Planarized true three dimensional display
US5214420A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Spatial light modulator projection system with random polarity light
US5162787A (en) 1989-02-27 1992-11-10 Texas Instruments Incorporated Apparatus and method for digitized video system utilizing a moving display surface
US5206629A (en) 1989-02-27 1993-04-27 Texas Instruments Incorporated Spatial light modulator and memory for digitized video display
US5287096A (en) 1989-02-27 1994-02-15 Texas Instruments Incorporated Variable luminosity display system
US5079544A (en) 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
US5170156A (en) 1989-02-27 1992-12-08 Texas Instruments Incorporated Multi-frequency two dimensional display system
US4900395A (en) 1989-04-07 1990-02-13 Fsi International, Inc. HF gas etching of wafers in an acid processor
US5022745A (en) 1989-09-07 1991-06-11 Massachusetts Institute Of Technology Electrostatically deformable single crystal dielectrically coated mirror
US4954789A (en) 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
US5124834A (en) 1989-11-16 1992-06-23 General Electric Company Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same
US5037173A (en) 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
JP2910114B2 (en) * 1990-01-20 1999-06-23 ソニー株式会社 Electronics
CH682523A5 (en) 1990-04-20 1993-09-30 Suisse Electronique Microtech A modulation matrix addressed light.
GB9012099D0 (en) 1990-05-31 1990-07-18 Kodak Ltd Optical article for multicolour imaging
US5142405A (en) 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5083857A (en) 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
EP0467048B1 (en) 1990-06-29 1995-09-20 Texas Instruments Incorporated Field-updated deformable mirror device
US5099353A (en) 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5018256A (en) 1990-06-29 1991-05-28 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5216537A (en) 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5153771A (en) 1990-07-18 1992-10-06 Northrop Corporation Coherent light modulation and detector
US5192395A (en) 1990-10-12 1993-03-09 Texas Instruments Incorporated Method of making a digital flexure beam accelerometer
US5044736A (en) 1990-11-06 1991-09-03 Motorola, Inc. Configurable optical filter or display
US5331454A (en) 1990-11-13 1994-07-19 Texas Instruments Incorporated Low reset voltage process for DMD
FR2669466B1 (en) 1990-11-16 1997-11-07 Michel Haond METHOD FOR ENGRAVING INTEGRATED CIRCUIT LAYERS WITH FIXED DEPTH AND CORRESPONDING INTEGRATED CIRCUIT.
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US5136669A (en) 1991-03-15 1992-08-04 Sperry Marine Inc. Variable ratio fiber optic coupler optical signal processing element
CA2063744C (en) 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5142414A (en) 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
FR2679057B1 (en) 1991-07-11 1995-10-20 Morin Francois LIQUID CRYSTAL, ACTIVE MATRIX AND HIGH DEFINITION SCREEN STRUCTURE.
US5179274A (en) 1991-07-12 1993-01-12 Texas Instruments Incorporated Method for controlling operation of optical systems and devices
US5168406A (en) 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
US5254980A (en) 1991-09-06 1993-10-19 Texas Instruments Incorporated DMD display system controller
US5358601A (en) * 1991-09-24 1994-10-25 Micron Technology, Inc. Process for isotropically etching semiconductor devices
US5233385A (en) 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
US5233456A (en) 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
US5228013A (en) 1992-01-10 1993-07-13 Bik Russell J Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays
US5296950A (en) 1992-01-31 1994-03-22 Texas Instruments Incorporated Optical signal free-space conversion board
US5231532A (en) 1992-02-05 1993-07-27 Texas Instruments Incorporated Switchable resonant filter for optical radiation
US5212582A (en) 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
EP0562424B1 (en) 1992-03-25 1997-05-28 Texas Instruments Incorporated Embedded optical calibration system
US5312513A (en) 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US5347377A (en) * 1992-06-17 1994-09-13 Eastman Kodak Company Planar waveguide liquid crystal variable retarder
US5345328A (en) 1992-08-12 1994-09-06 Sandia Corporation Tandem resonator reflectance modulator
US5293272A (en) 1992-08-24 1994-03-08 Physical Optics Corporation High finesse holographic fabry-perot etalon and method of fabricating
US5327286A (en) 1992-08-31 1994-07-05 Texas Instruments Incorporated Real time optical correlation system
US5325116A (en) 1992-09-18 1994-06-28 Texas Instruments Incorporated Device for writing to and reading from optical storage media
US5296775A (en) 1992-09-24 1994-03-22 International Business Machines Corporation Cooling microfan arrangements and process
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5324683A (en) 1993-06-02 1994-06-28 Motorola, Inc. Method of forming a semiconductor structure having an air region
WO1995012774A1 (en) * 1993-11-05 1995-05-11 Mitsubishi Jidosha Kogyo Kabushiki Kaisha Speed change control method for an automatic transmission
US5583688A (en) 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
JPH07253594A (en) * 1994-03-15 1995-10-03 Fujitsu Ltd Display device
US6710908B2 (en) * 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US20010003487A1 (en) 1996-11-05 2001-06-14 Mark W. Miles Visible spectrum modulator arrays
US6040937A (en) 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US5454906A (en) 1994-06-21 1995-10-03 Texas Instruments Inc. Method of providing sacrificial spacer for micro-mechanical devices
JPH0822024A (en) * 1994-07-05 1996-01-23 Mitsubishi Electric Corp Active matrix substrate and its production
US5485304A (en) 1994-07-29 1996-01-16 Texas Instruments, Inc. Support posts for micro-mechanical devices
PT778982E (en) 1994-09-02 2000-12-29 Dabbaj Rad Hassan REFLECTOR LIGHT VALVE MODULATOR
US5650881A (en) 1994-11-02 1997-07-22 Texas Instruments Incorporated Support post architecture for micromechanical devices
US5474865A (en) * 1994-11-21 1995-12-12 Sematech, Inc. Globally planarized binary optical mask using buried absorbers
US5726480A (en) 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
JP3489273B2 (en) * 1995-06-27 2004-01-19 株式会社デンソー Manufacturing method of semiconductor dynamic quantity sensor
US6324192B1 (en) * 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
GB9522135D0 (en) * 1995-10-30 1996-01-03 John Mcgavigan Holdings Limite Display panels
US5825528A (en) 1995-12-26 1998-10-20 Lucent Technologies Inc. Phase-mismatched fabry-perot cavity micromechanical modulator
US5967163A (en) 1996-01-30 1999-10-19 Abbott Laboratories Actuator and method
KR100243190B1 (en) * 1996-06-10 2000-02-01 윤종용 Movable mirror array and its fabrication method
US5838484A (en) * 1996-08-19 1998-11-17 Lucent Technologies Inc. Micromechanical optical modulator with linear operating characteristic
US5884083A (en) * 1996-09-20 1999-03-16 Royce; Robert Computer system to compile non-incremental computer source code to execute within an incremental type computer system
JP4535303B2 (en) 1997-01-21 2010-09-01 ザ ビー．エフ． グッドリッチ カンパニー Fabrication of semiconductor devices with air gaps for ultra-low capacitance wiring
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6031653A (en) 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
US5822170A (en) * 1997-10-09 1998-10-13 Honeywell Inc. Hydrophobic coating for reducing humidity effect in electrostatic actuators
WO1999023832A1 (en) * 1997-10-31 1999-05-14 Daewoo Electronics Co., Ltd. Method for manufacturing thin film actuated mirror array in an optical projection system
KR100253378B1 (en) * 1997-12-15 2000-04-15 김영환 Apparatus for displaying output data in asic(application specific ic)
US6016693A (en) * 1998-02-09 2000-01-25 The Regents Of The University Of California Microfabrication of cantilevers using sacrificial templates
US6610440B1 (en) * 1998-03-10 2003-08-26 Bipolar Technologies, Inc Microscopic batteries for MEMS systems
EP0951068A1 (en) 1998-04-17 1999-10-20 Interuniversitair Micro-Elektronica Centrum Vzw Method of fabrication of a microstructure having an inside cavity
US6166422A (en) * 1998-05-13 2000-12-26 Lsi Logic Corporation Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor
US6057903A (en) * 1998-08-18 2000-05-02 International Business Machines Corporation Liquid crystal display device employing a guard plane between a layer for measuring touch position and common electrode layer
US6710539B2 (en) 1998-09-02 2004-03-23 Micron Technology, Inc. Field emission devices having structure for reduced emitter tip to gate spacing
US6249039B1 (en) * 1998-09-10 2001-06-19 Bourns, Inc. Integrated inductive components and method of fabricating such components
US6323834B1 (en) 1998-10-08 2001-11-27 International Business Machines Corporation Micromechanical displays and fabrication method
JP3919954B2 (en) * 1998-10-16 2007-05-30 富士フイルム株式会社 Array type light modulation element and flat display driving method
WO2000023279A1 (en) * 1998-10-16 2000-04-27 Silverbrook Research Pty. Limited Improvements relating to inkjet printers
US6115326A (en) * 1998-10-22 2000-09-05 Integrated Medical Systems, Inc. Ultrasonic micro-machined selectable transducer array
US6391675B1 (en) * 1998-11-25 2002-05-21 Raytheon Company Method and apparatus for switching high frequency signals
US6194323B1 (en) * 1998-12-16 2001-02-27 Lucent Technologies Inc. Deep sub-micron metal etch with in-situ hard mask etch
US6335831B2 (en) * 1998-12-18 2002-01-01 Eastman Kodak Company Multilevel mechanical grating device
US6215221B1 (en) 1998-12-29 2001-04-10 Honeywell International Inc. Electrostatic/pneumatic actuators for active surfaces
JP4511739B2 (en) 1999-01-15 2010-07-28 ザ リージェンツ オブ ザ ユニヴァーシティ オブ カリフォルニア Polycrystalline silicon germanium films for forming microelectromechanical systems
JP2000214804A (en) * 1999-01-20 2000-08-04 Fuji Photo Film Co Ltd Light modulation element, aligner, and planar display
US6537427B1 (en) * 1999-02-04 2003-03-25 Micron Technology, Inc. Deposition of smooth aluminum films
US6713235B1 (en) 1999-03-30 2004-03-30 Citizen Watch Co., Ltd. Method for fabricating thin-film substrate and thin-film substrate fabricated by the method
US6358854B1 (en) 1999-04-21 2002-03-19 Sandia Corporation Method to fabricate layered material compositions
US6359673B1 (en) 1999-06-21 2002-03-19 Eastman Kodak Company Sheet having a layer with different light modulating materials
US6525310B2 (en) 1999-08-05 2003-02-25 Microvision, Inc. Frequency tunable resonant scanner
KR100333482B1 (en) * 1999-09-15 2002-04-25 오길록 High speed semiconductor optical modulator and its fabrication method
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6351329B1 (en) * 1999-10-08 2002-02-26 Lucent Technologies Inc. Optical attenuator
US7041224B2 (en) 1999-10-26 2006-05-09 Reflectivity, Inc. Method for vapor phase etching of silicon
US6960305B2 (en) 1999-10-26 2005-11-01 Reflectivity, Inc Methods for forming and releasing microelectromechanical structures
US6674090B1 (en) 1999-12-27 2004-01-06 Xerox Corporation Structure and method for planar lateral oxidation in active
US6407851B1 (en) 2000-08-01 2002-06-18 Mohammed N. Islam Micromechanical optical switch
US6531945B1 (en) * 2000-03-10 2003-03-11 Micron Technology, Inc. Integrated circuit inductor with a magnetic core
US6329297B1 (en) * 2000-04-21 2001-12-11 Applied Materials, Inc. Dilute remote plasma clean
US7008812B1 (en) 2000-05-30 2006-03-07 Ic Mechanics, Inc. Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation
CA2352729A1 (en) * 2000-07-13 2002-01-13 Creoscitex Corporation Ltd. Blazed micro-mechanical light modulator and array thereof
US7083997B2 (en) 2000-08-03 2006-08-01 Analog Devices, Inc. Bonded wafer optical MEMS process
US6635919B1 (en) 2000-08-17 2003-10-21 Texas Instruments Incorporated High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications
MY128644A (en) 2000-08-31 2007-02-28 Georgia Tech Res Inst Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same
JP4304852B2 (en) 2000-09-04 2009-07-29 コニカミノルタホールディングス株式会社 Non-flat liquid crystal display element and method for manufacturing the same
US6522801B1 (en) * 2000-10-10 2003-02-18 Agere Systems Inc. Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
DE10055421A1 (en) 2000-11-09 2002-05-29 Bosch Gmbh Robert Method for producing a micromechanical structure and micromechanical structure
DE10063991B4 (en) * 2000-12-21 2005-06-02 Infineon Technologies Ag Process for the production of micromechanical components
CN100504496C (en) * 2001-01-30 2009-06-24 松下电器产业株式会社 Deformable mirror and information apparatus comprising the deformable mirror
FR2820513B1 (en) * 2001-02-05 2004-05-21 Centre Nat Rech Scient OPTOELECTRONIC DEVICE WITH WAVELENGTH FILTERING BY CAVITY COUPLING
US6480320B2 (en) * 2001-02-07 2002-11-12 Transparent Optical, Inc. Microelectromechanical mirror and mirror array
US6620712B2 (en) 2001-02-14 2003-09-16 Intpax, Inc. Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications
US6600587B2 (en) 2001-04-23 2003-07-29 Memx, Inc. Surface micromachined optical system with reinforced mirror microstructure
US6756317B2 (en) 2001-04-23 2004-06-29 Memx, Inc. Method for making a microstructure by surface micromachining
US6602791B2 (en) 2001-04-27 2003-08-05 Dalsa Semiconductor Inc. Manufacture of integrated fluidic devices
AU2002303842A1 (en) * 2001-05-22 2002-12-03 Reflectivity, Inc. A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
US7005314B2 (en) 2001-06-27 2006-02-28 Intel Corporation Sacrificial layer technique to make gaps in MEMS applications
US6577785B1 (en) * 2001-08-09 2003-06-10 Sandia Corporation Compound semiconductor optical waveguide switch
US6717488B2 (en) * 2001-09-13 2004-04-06 Nth Tech Corporation Resonator with a member having an embedded charge and a method of making thereof
US6930364B2 (en) 2001-09-13 2005-08-16 Silicon Light Machines Corporation Microelectronic mechanical system and methods
US6866669B2 (en) * 2001-10-12 2005-03-15 Cordis Corporation Locking handle deployment mechanism for medical device and method
US6782166B1 (en) 2001-12-21 2004-08-24 United States Of America As Represented By The Secretary Of The Air Force Optically transparent electrically conductive charge sheet poling electrodes to maximize performance of electro-optic devices
US6915046B2 (en) * 2002-01-22 2005-07-05 Agere Sysems, Inc. Optical systems comprising curved MEMs mirrors and methods for making same
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) * 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US6965468B2 (en) 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US7029829B2 (en) 2002-04-18 2006-04-18 The Regents Of The University Of Michigan Low temperature method for forming a microcavity on a substrate and article having same
US6954297B2 (en) 2002-04-30 2005-10-11 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic liquid
US20030202264A1 (en) 2002-04-30 2003-10-30 Weber Timothy L. Micro-mirror device
US6953702B2 (en) 2002-05-16 2005-10-11 Agilent Technologies, Inc. Fixed wavelength vertical cavity optical devices and method of manufacture therefor
US6806110B2 (en) 2002-05-16 2004-10-19 Agilent Technologies, Inc. Monolithic multi-wavelength vertical-cavity surface emitting laser array and method of manufacture therefor
US6678085B2 (en) * 2002-06-12 2004-01-13 Eastman Kodak Company High-contrast display system with scanned conformal grating device
US20040001258A1 (en) 2002-06-28 2004-01-01 Mandeep Singh Solid state etalons with low thermally-induced optical path length change
US20040058531A1 (en) * 2002-08-08 2004-03-25 United Microelectronics Corp. Method for preventing metal extrusion in a semiconductor structure.
US6674033B1 (en) * 2002-08-21 2004-01-06 Ming-Shan Wang Press button type safety switch
KR100454136B1 (en) * 2002-10-23 2004-10-26 삼성전자주식회사 Non-volatile memory device to protect floating gate from charge loss and method for fabricating the same
US6944008B2 (en) * 2002-12-18 2005-09-13 Lucent Technologies Inc. Charge dissipation in electrostatically driven devices
US6872654B2 (en) 2002-12-26 2005-03-29 Intel Corporation Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric
TW559686B (en) 2002-12-27 2003-11-01 Prime View Int Co Ltd Optical interference type panel and the manufacturing method thereof
US6808953B2 (en) 2002-12-31 2004-10-26 Robert Bosch Gmbh Gap tuning for surface micromachined structures in an epitaxial reactor
TW557395B (en) 2003-01-29 2003-10-11 Yen Sun Technology Corp Optical interference type reflection panel and the manufacturing method thereof
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
US7027202B1 (en) 2003-02-28 2006-04-11 Silicon Light Machines Corp Silicon substrate as a light modulator sacrificial layer
US7289404B2 (en) * 2003-03-13 2007-10-30 Lg Electronics Inc. Write-once recording medium and defective area management method and apparatus for write-once recording medium
US6720267B1 (en) 2003-03-19 2004-04-13 United Microelectronics Corp. Method for forming a cantilever beam model micro-electromechanical system
TW567355B (en) 2003-04-21 2003-12-21 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
TW591716B (en) 2003-05-26 2004-06-11 Prime View Int Co Ltd A structure of a structure release and manufacturing the same
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
TWI305599B (en) 2003-08-15 2009-01-21 Qualcomm Mems Technologies Inc Interference display panel and method thereof
TWI231865B (en) * 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
US6982820B2 (en) 2003-09-26 2006-01-03 Prime View International Co., Ltd. Color changeable pixel
US6861277B1 (en) 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
US7041571B2 (en) 2004-03-01 2006-05-09 International Business Machines Corporation Air gap interconnect structure and method of manufacture
US7119945B2 (en) * 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7256107B2 (en) 2004-05-04 2007-08-14 The Regents Of The University Of California Damascene process for use in fabricating semiconductor structures having micro/nano gaps
EP2246726B1 (en) * 2004-07-29 2013-04-03 QUALCOMM MEMS Technologies, Inc. System and method for micro-electromechanical operating of an interferometric modulator
US20060066932A1 (en) * 2004-09-27 2006-03-30 Clarence Chui Method of selective etching using etch stop layer
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7527995B2 (en) * 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts

Also Published As

Publication number Publication date
US20070279730A1 (en) 2007-12-06
US7321457B2 (en) 2008-01-22
US7561321B2 (en) 2009-07-14
US20080094687A1 (en) 2008-04-24
WO2007142737A1 (en) 2007-12-13
EP2021859A1 (en) 2009-02-11

Similar Documents

Publication Publication Date Title
WO2007142737A8 (en) Process and structure for fabrication of mems device having isolated edge posts
WO2009011185A1 (en) Solar cell manufacturing method
WO2008089401A3 (en) Flexible transparent electrodes via nanowires and sacrificial conductive layer
WO2006066261A3 (en) Ferroelectric capacitor stack etch cleaning
EP2040521A3 (en) Method of manufacturing substrate
WO2005101111A3 (en) Patterned electrodes for electroactive liquid-crystal ophthalmic devices
TW200508659A (en) An interference display cell and fabrication method thereof
TW200627037A (en) Thin film transistor array panel and manufacturing method thereof
WO2006023019A3 (en) Method of making a double gate semiconductor device with self-aligned gates and structure thereof
TW200605376A (en) Air gap interconnect structure and method thereof
DE60140379D1 (en) SOI / GLASS PROCESS FOR THE PRODUCTION OF THIN MICROPRODUCTED STRUCTURES
JP2008244460A5 (en)
EP1632954A3 (en) Semiconductor probe with resistive tip and method of fabricating the same
TW200620415A (en) Method of forming semiconductor structures
DE102013212173B4 (en) MEMS device with a deflectable membrane and a fixed counter element and method for its preparation
CA2481619A1 (en) Micro-optic device and method of manufacturing same
WO2008139745A1 (en) Manufacturing method for display device and display device
TW200735189A (en) Method for fabricating semiconductor device with dual poly-recess gate
WO2004071153A3 (en) Method of forming sub-micron-size structures over a substrate
WO2010136986A3 (en) Mems element
KR101079855B1 (en) Pressure sensor and method for manufacturing the same
WO2009002389A3 (en) Method for selectively forming symmetrical or asymmetrical features using a symmetrical photomask during fabrication of a semiconductor device and electronic systems including the semiconductor device
CN103137385A (en) Electric device and method of manufacturing the same
WO2008057814A3 (en) Device with patterned semiconductor electrode structure and manufacturing method thereof
CN106338845B (en) The production method of liquid crystal display panel

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 2007755243

Country of ref document: EP

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07755243

Country of ref document: EP

Kind code of ref document: A1

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
NENP Non-entry into the national phase

Ref country code: DE

NENP Non-entry into the national phase

Ref country code: RU