WO2007123820A3 - Non-planar surface structures and process for microelectromechanical systems - Google Patents

Non-planar surface structures and process for microelectromechanical systems Download PDF

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Publication number
WO2007123820A3
WO2007123820A3 PCT/US2007/008564 US2007008564W WO2007123820A3 WO 2007123820 A3 WO2007123820 A3 WO 2007123820A3 US 2007008564 W US2007008564 W US 2007008564W WO 2007123820 A3 WO2007123820 A3 WO 2007123820A3
Authority
WO
WIPO (PCT)
Prior art keywords
layers
planar surface
movable
sacrificial
mems device
Prior art date
Application number
PCT/US2007/008564
Other languages
French (fr)
Other versions
WO2007123820A2 (en
Inventor
Teruo Sasagawa
Lior Kogut
Ming-Hau Tung
Original Assignee
Qualcomm Inc
Teruo Sasagawa
Lior Kogut
Ming-Hau Tung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc, Teruo Sasagawa, Lior Kogut, Ming-Hau Tung filed Critical Qualcomm Inc
Publication of WO2007123820A2 publication Critical patent/WO2007123820A2/en
Publication of WO2007123820A3 publication Critical patent/WO2007123820A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Abstract

Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. A non-planar surface is formed on one or more layers by flowing an etchant through a permeable layer. In one embodiment the non-planar surface is formed on a sacrificial layer. A movable layer formed over the non-planar surface of the sacrificial layer results in a non-planar interface between the sacrificial and movable layers. Removal of the sacrificial layer results in a released MEMS device having reduced contact area between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.
PCT/US2007/008564 2006-04-19 2007-04-05 Non-planar surface structures and process for microelectromechanical systems WO2007123820A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/406,866 2006-04-19
US11/406,866 US7623287B2 (en) 2006-04-19 2006-04-19 Non-planar surface structures and process for microelectromechanical systems

Publications (2)

Publication Number Publication Date
WO2007123820A2 WO2007123820A2 (en) 2007-11-01
WO2007123820A3 true WO2007123820A3 (en) 2008-01-03

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/008564 WO2007123820A2 (en) 2006-04-19 2007-04-05 Non-planar surface structures and process for microelectromechanical systems

Country Status (3)

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US (1) US7623287B2 (en)
TW (1) TW200744940A (en)
WO (1) WO2007123820A2 (en)

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