WO2007106697A3 - Fabry-perot interferometer composite and method of production - Google Patents

Fabry-perot interferometer composite and method of production Download PDF

Info

Publication number
WO2007106697A3
WO2007106697A3 PCT/US2007/063500 US2007063500W WO2007106697A3 WO 2007106697 A3 WO2007106697 A3 WO 2007106697A3 US 2007063500 W US2007063500 W US 2007063500W WO 2007106697 A3 WO2007106697 A3 WO 2007106697A3
Authority
WO
WIPO (PCT)
Prior art keywords
fabry
composite
production
perot interferometer
partially reflecting
Prior art date
Application number
PCT/US2007/063500
Other languages
French (fr)
Other versions
WO2007106697A2 (en
Inventor
Daniel A Kearl
Michael G Monroe
Henry Lewis
Melinda Valencia
James C Mckinnell
James R Przybyla
Arthur Piehl
Stephen J Potochnik
Original Assignee
Hewlett Packard Development Co
Daniel A Kearl
Michael G Monroe
Henry Lewis
Melinda Valencia
James C Mckinnell
James R Przybyla
Arthur Piehl
Stephen J Potochnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co, Daniel A Kearl, Michael G Monroe, Henry Lewis, Melinda Valencia, James C Mckinnell, James R Przybyla, Arthur Piehl, Stephen J Potochnik filed Critical Hewlett Packard Development Co
Publication of WO2007106697A2 publication Critical patent/WO2007106697A2/en
Publication of WO2007106697A3 publication Critical patent/WO2007106697A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Abstract

A composite partially reflecting element of a Fabry-Perot interferometer includes a transparent plate (20) having a surface facing toward the optical gap (25) of the interferometer, a partially reflecting layer (60) disposed on the surface of the transparent plate facing toward the optical gap, and at least one protective layer (70) on at least one side of the partially reflecting layer.
PCT/US2007/063500 2006-03-09 2007-03-07 Fabry-perot interferometer composite and method of production WO2007106697A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/276,676 US20070211257A1 (en) 2006-03-09 2006-03-09 Fabry-Perot Interferometer Composite and Method
US11/276,676 2006-03-09

Publications (2)

Publication Number Publication Date
WO2007106697A2 WO2007106697A2 (en) 2007-09-20
WO2007106697A3 true WO2007106697A3 (en) 2008-09-04

Family

ID=38434481

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/063500 WO2007106697A2 (en) 2006-03-09 2007-03-07 Fabry-perot interferometer composite and method of production

Country Status (2)

Country Link
US (1) US20070211257A1 (en)
WO (1) WO2007106697A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8043950B2 (en) 2005-10-26 2011-10-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US20070291275A1 (en) * 2006-06-16 2007-12-20 Prescient Medical, Inc. Side-viewing optical acoustic sensors and their use in intravascular diagnostic probes
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
FI125817B (en) 2009-01-27 2016-02-29 Teknologian Tutkimuskeskus Vtt Oy Improved electronically controlled Fabry-Perot interferometer, an intermediate product, an electrode system and a method for producing an electronically controlled Fabry-Perot interferometer
US7990604B2 (en) * 2009-06-15 2011-08-02 Qualcomm Mems Technologies, Inc. Analog interferometric modulator
US20120056855A1 (en) * 2010-09-03 2012-03-08 Qualcomm Mems Technologies, Inc. Interferometric display device
US9291740B2 (en) * 2013-06-12 2016-03-22 Halliburton Energy Services, Inc. Systems and methods for downhole electric field measurement
US9201155B2 (en) * 2013-06-12 2015-12-01 Halliburton Energy Services, Inc. Systems and methods for downhole electromagnetic field measurement
US9250350B2 (en) * 2013-06-12 2016-02-02 Halliburton Energy Services, Inc. Systems and methods for downhole magnetic field measurement
WO2018092104A1 (en) * 2016-11-20 2018-05-24 Unispectral Ltd. Tunable mems etalon devices
JP6795165B1 (en) * 2019-05-25 2020-12-02 国立大学法人東北大学 Scanning mirror and manufacturing method of scanning mirror
CN113227874A (en) * 2019-05-25 2021-08-06 国立大学法人东北大学 Scanning mirror and manufacturing method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986796A (en) * 1993-03-17 1999-11-16 Etalon Inc. Visible spectrum modulator arrays
EP1473581A2 (en) * 2003-04-30 2004-11-03 Hewlett-Packard Development Company, L.P. Optical interference pixel display with charge control
US20040217919A1 (en) * 2003-04-30 2004-11-04 Arthur Piehl Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
US20060018348A1 (en) * 2003-04-30 2006-01-26 Przybyla James R Optical electronic device with partial reflector layer

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5076663A (en) * 1989-10-04 1991-12-31 The United States Of America As Represented By The United States Department Of Energy Corrosion protection for silver reflectors
US5144498A (en) * 1990-02-14 1992-09-01 Hewlett-Packard Company Variable wavelength light filter and sensor system
US5272518A (en) * 1990-12-17 1993-12-21 Hewlett-Packard Company Colorimeter and calibration system
US6381022B1 (en) * 1992-01-22 2002-04-30 Northeastern University Light modulating device
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US6404127B2 (en) * 1993-07-20 2002-06-11 University Of Georgia Research Foundation, Inc. Multi-color microcavity resonant display
US5500761A (en) * 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
US6710908B2 (en) * 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US20010003487A1 (en) * 1996-11-05 2001-06-14 Mark W. Miles Visible spectrum modulator arrays
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
EP0729051A3 (en) * 1995-02-21 1998-06-17 Ascom Tech Ag Optical reflection modulator
US5584117A (en) * 1995-12-11 1996-12-17 Industrial Technology Research Institute Method of making an interferometer-based bolometer
US6025951A (en) * 1996-11-27 2000-02-15 National Optics Institute Light modulating microdevice and method
US5969848A (en) * 1997-07-03 1999-10-19 The Regents Of The University Of California Micromachined electrostatic vertical actuator
RU2124746C1 (en) * 1997-08-11 1999-01-10 Закрытое акционерное общество "Кванта Инвест" Dichroic polarizer
US6031653A (en) * 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
US6154591A (en) * 1998-04-20 2000-11-28 British Telecommunications Public Limited Company Tunable optical device
US6231992B1 (en) * 1998-09-04 2001-05-15 Yazaki Corporation Partial reflector
US6498682B2 (en) * 1998-12-28 2002-12-24 At&T Corp. Tunable add/drop filter
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6798550B1 (en) * 1999-11-18 2004-09-28 Corning Applied Technologies Corporation Spatial light modulator
US6407851B1 (en) * 2000-08-01 2002-06-18 Mohammed N. Islam Micromechanical optical switch
US6373632B1 (en) * 2000-03-03 2002-04-16 Axsun Technologies, Inc. Tunable Fabry-Perot filter
US6341039B1 (en) * 2000-03-03 2002-01-22 Axsun Technologies, Inc. Flexible membrane for tunable fabry-perot filter
JP3702416B2 (en) * 2000-03-16 2005-10-05 株式会社日立製作所 Hydraulic buffer
US6400738B1 (en) * 2000-04-14 2002-06-04 Agilent Technologies, Inc. Tunable Fabry-Perot filters and lasers
US6724785B1 (en) * 2000-04-14 2004-04-20 Agilent Technologies, Inc. Tunable fabry-perot filters and lasers with reduced frequency noise
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch
US6433917B1 (en) * 2000-11-22 2002-08-13 Ball Semiconductor, Inc. Light modulation device and system
US6647171B1 (en) * 2000-12-01 2003-11-11 Corning Incorporated MEMS optical switch actuator
US6721098B2 (en) * 2000-12-22 2004-04-13 Axsun Technologies, Inc. Triple electrode MOEMS tunable filter and fabrication process therefor
US20030025981A1 (en) * 2001-07-31 2003-02-06 Ball Semiconductor, Inc. Micromachined optical phase shift device
NO315177B1 (en) * 2001-11-29 2003-07-21 Sinvent As Optical offset sensor
US6822798B2 (en) * 2002-08-09 2004-11-23 Optron Systems, Inc. Tunable optical filter
KR20040072406A (en) * 2003-02-12 2004-08-18 엘지전자 주식회사 Tunable optical resonator and tunable optical filter using the same
US7447891B2 (en) * 2003-04-30 2008-11-04 Hewlett-Packard Development Company, L.P. Light modulator with concentric control-electrode structure

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986796A (en) * 1993-03-17 1999-11-16 Etalon Inc. Visible spectrum modulator arrays
EP1473581A2 (en) * 2003-04-30 2004-11-03 Hewlett-Packard Development Company, L.P. Optical interference pixel display with charge control
US20040217919A1 (en) * 2003-04-30 2004-11-04 Arthur Piehl Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
US20060018348A1 (en) * 2003-04-30 2006-01-26 Przybyla James R Optical electronic device with partial reflector layer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
S. VAN GILS ET AL.: "Colour properties of barrier anodic oxide films on aluminium and titanium studied with total reflectance and spectroscopic ellipsometry", SURFACE & COATINGS TECHNOLOGY, vol. 185, 2004, pages 303 - 310, XP002455963 *

Also Published As

Publication number Publication date
US20070211257A1 (en) 2007-09-13
WO2007106697A2 (en) 2007-09-20

Similar Documents

Publication Publication Date Title
WO2007106697A3 (en) Fabry-perot interferometer composite and method of production
WO2008085385A3 (en) Plasmonic fabry-perot filter
WO2006076320A3 (en) Retroreflective film
WO2007149170A3 (en) Wire grid polarizers with prismatic layer
WO2007120949A3 (en) Optical microstructures for light extraction and control
WO2007016199A3 (en) Polarizing beam splitter with lens function
TW200704988A (en) Manufacturing of optical waveguides
WO2007111984A3 (en) Improved vision system
AU2002329130A1 (en) Optical displacement sensor
TW200642526A (en) Light-emitting device
TW200639378A (en) A sensor
WO2008061636A3 (en) Security element with metallisation
EP1715366B8 (en) Optical package, optical lens and backlight assembly having the same
TW200702750A (en) Polarizing beam splitter assembly having reduced stress
WO2009121944A3 (en) Method for assembling two surfaces, or one surface, with a molecule of interest
TW200712804A (en) Device for assembling a touch-type crystal on a case
WO2007075516A3 (en) Method of making a polarizer plate
WO2009092794A3 (en) Object provided with a graphics element transferred onto a support wafer and method of producing such an object
TW200730989A (en) Method and apparatus for reducing back-glass deflection in an interferometric modulator display device
WO2007080389A3 (en) Optically variable magnetic stripe assembly
TW200717012A (en) Visible light reflector having high reflectance, LCD backlight unit using the same, and method of producing visible light reflector having high reflectance
WO2008005894A3 (en) Wafer-level alignment of optical elements
TW200702736A (en) Optical filter
EP1995120A3 (en) Structural component, in particular heat shield
TW200717169A (en) Reflector

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07758087

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
122 Ep: pct application non-entry in european phase

Ref document number: 07758087

Country of ref document: EP

Kind code of ref document: A2