WO2007103546A3 - Micro-electro-mechanical system (mems) variable capacitors and actuation components and related methods - Google Patents

Micro-electro-mechanical system (mems) variable capacitors and actuation components and related methods Download PDF

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Publication number
WO2007103546A3
WO2007103546A3 PCT/US2007/006012 US2007006012W WO2007103546A3 WO 2007103546 A3 WO2007103546 A3 WO 2007103546A3 US 2007006012 W US2007006012 W US 2007006012W WO 2007103546 A3 WO2007103546 A3 WO 2007103546A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems
variable capacitors
electro
micro
mechanical system
Prior art date
Application number
PCT/US2007/006012
Other languages
French (fr)
Other versions
WO2007103546A2 (en
Inventor
Arthur S Morris
John Qiang Huang
Original Assignee
Wispry Inc
Arthur S Morris
John Qiang Huang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wispry Inc, Arthur S Morris, John Qiang Huang filed Critical Wispry Inc
Priority to EP07752694.5A priority Critical patent/EP1999772B1/en
Priority to CN2007800162733A priority patent/CN101438366B/en
Publication of WO2007103546A2 publication Critical patent/WO2007103546A2/en
Publication of WO2007103546A3 publication Critical patent/WO2007103546A3/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/46—Networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H7/463—Duplexers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/38—Multiple capacitors, i.e. structural combinations of fixed capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping

Abstract

Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.
PCT/US2007/006012 2006-03-08 2007-03-08 Micro-electro-mechanical system (mems) variable capacitors and actuation components and related methods WO2007103546A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP07752694.5A EP1999772B1 (en) 2006-03-08 2007-03-08 Micro-electro-mechanical system mems variable capacitor
CN2007800162733A CN101438366B (en) 2006-03-08 2007-03-08 Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US78054406P 2006-03-08 2006-03-08
US78056506P 2006-03-08 2006-03-08
US60/780,565 2006-03-08
US60/780,544 2006-03-08

Publications (2)

Publication Number Publication Date
WO2007103546A2 WO2007103546A2 (en) 2007-09-13
WO2007103546A3 true WO2007103546A3 (en) 2008-05-02

Family

ID=38475583

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2007/005995 WO2007103537A2 (en) 2006-03-08 2007-03-08 Tunable impedance matching networks and tunable diplexer matching systems
PCT/US2007/006012 WO2007103546A2 (en) 2006-03-08 2007-03-08 Micro-electro-mechanical system (mems) variable capacitors and actuation components and related methods

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2007/005995 WO2007103537A2 (en) 2006-03-08 2007-03-08 Tunable impedance matching networks and tunable diplexer matching systems

Country Status (4)

Country Link
US (3) US7545622B2 (en)
EP (2) EP1999772B1 (en)
CN (2) CN101438366B (en)
WO (2) WO2007103537A2 (en)

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EP2002511A4 (en) 2012-02-29
US20090296309A1 (en) 2009-12-03
CN101438366A (en) 2009-05-20
WO2007103537A3 (en) 2008-04-24
US7545622B2 (en) 2009-06-09
EP1999772A4 (en) 2018-03-28
CN101438366B (en) 2011-10-26
CN102386877A (en) 2012-03-21
EP1999772A2 (en) 2008-12-10
US20080055016A1 (en) 2008-03-06
EP1999772B1 (en) 2020-05-06
US8891223B2 (en) 2014-11-18
WO2007103546A2 (en) 2007-09-13
US20080007888A1 (en) 2008-01-10
US7907033B2 (en) 2011-03-15
EP2002511A2 (en) 2008-12-17
CN102386877B (en) 2014-12-10
WO2007103537A2 (en) 2007-09-13

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