WO2007103537A2

WO2007103537A2 - Tunable impedance matching networks and tunable diplexer matching systems

Info

Publication number: WO2007103537A2
Application number: PCT/US2007/005995
Authority: WO
Inventors: Arthur S. Morris; Tao Ye; Scott Griffith
Original assignee: Wispry, Inc.
Priority date: 2006-03-08
Filing date: 2007-03-08
Publication date: 2007-09-13
Also published as: EP1999772B1; EP1999772A4; EP2002511A4; WO2007103546A3; CN101438366B; EP1999772A2; US7545622B2; US20080055016A1; US7907033B2; CN102386877A; US20080007888A1; CN102386877B; EP2002511A2; US8891223B2; US20090296309A1; WO2007103537A3; WO2007103546A2; CN101438366A

Abstract

Tunable impedance matching networks and tunable diplexer matching systems are provided A tunable impedance matching network can include an impedance element connected between first and second nodes for communicating signals between the first and second nodes For example, the impedance element can be a transmission line or an inductor Further, the matching network can include a first capacitor connected in parallel with the impedance element, wherein the first capacitor is tunable The matching network can also include a second capacitor compπsing first and second terminals The first terminal of the second capacitor can be connected to the first node The second terminal of the second capacitor can be connected to a local voltage reference for the first node A third capacitor compπses first and second terminals The first terminal of the second capacitor can be connected to the second node The second and third capacitors can also be tunable.

Description

DESCRIPTION

TUNABLE IMPEDANCE MATCHING NETWORKS AND TUNABLE DIPLEXER MATCHING SYSTEMS

RELATED APPLICATIONS

The presently disclosed subject matter claims the benefit of U.S. Provisional Patent Application Serial No. 60/780,544, filed March 8, 2006, and U.S. Provisional Patent Application Serial No. 60/780,565, filed March 8, 2006, the disclosures of which are incorporated herein by reference in their entireties.

TECHNICAL FIELD

The subject matter disclosed herein relates to matching networks, systems, and circuits. More particularly, the subject matter disclosed herein relates to tunable impedance matching networks and tunable diplexer matching systems.

BACKGROUND

Matching circuits are widely used to transform the impedance of various components within a circuit either to a target reference impedance (e.g. a transmission line impedance and/or test port) or to directly match two components with different (possibly complex) impedances for optimum power transfer. A matching circuit typically has two nodes for insertion in-line between the components or between a component and a reference impedance. Both nodes of the matching circuit may be carrying a signal in either or both directions through the matching component. The matching function is particularly advantageous for signals at radio frequencies. The matching circuit may precede or follow a component, which has particular input and output impedances when embedded in the circuit. If the component follows the matching circuit in the signal path, the target impedance of the component is its input impedance. If the component precedes the matching circuit in the signal path, the target impedance of the component is its output impedance.

The matching circuit functions to set the impedance seen by the signal to the target impedance by compensating for the difference between the impedance of interest and the target impedance. The compensation of the impedance is determined by the configuration of the matching circuit and the component values of the matching circuit. A wide range of impedance matching and transfer function circuits can be realized by using lumped element inductors or capacitors or both. At higher frequency (above about 1 GHz), it is often advantageous to replace either lumped element inductors or capacitors or both with distributed transmission line networks. Even lumped elements may take on transmission line characteristics at these high frequencies. The usefulness of this replacement is also dependent on the dielectric constant (DK) of the substrate, as well as area constraints. Different arrangements of matching circuits are known in the art. The selection of the circuit depends on the impedances to be matched. Some examples include series capacitor, shunt capacitor; series capacitor, shunt inductor; series inductor, shunt capacitor; etc. A common configuration for a matching circuit is a sequence of shunt capacitor, series inductor and shunt capacitor known as a pi-network. Transformers, and even resistive networks, can be used, if the insertion loss can be tolerated.

In general, matching circuits should have minimum loss to prevent added degradation in the information signal. Excess loss increases the demands made on other components in an electronic system, especially the active elements such as amplifiers. At the input to a low noise amplifier (LNA), increased signal loss cannot be made up (compensated for) by simply increasing gain of the LNA due to noise considerations. Similarly, signal loss at the output of a power amplifier increases the power consumption of the amplifier to achieve a given output power. The impedances of the components and the matching circuits are frequency dependent. The impedance can only be perfectly matched at a single operating frequency or optimally matched over a limited band of frequencies. If the designer wishes to operate the device at more than one frequency band, compromises must be made in performance or in circuit complexity. Often, separate signal paths and circuits are used for different frequency bands to enable separate performance optimization. This adds to the cost and size of the circuit and requires of use of signal selection circuitry such as switches or diplexers. Tunable impedance matching networks can provide an advantage over fixed impedance matching networks. In particular, tunable impedance matching networks can include controllable elements that can be optimally tuned for desired frequencies. Further, tunable impedance matching networks provide an advantage of being able to adapt to environmental and component variations. For example, antenna impedance can vary when objects are positioned near the antenna. Further, impedance can vary based on temperature and based on component manufacture.

In wireless handsets, tunable matching circuits at frequencies above about 200 MHz have proven difficult to achieve. It will be appreciated that a low loss tunable matching network or a tunable diplexer matching system would be beneficial in many applications, but particularly in a portable wireless communication device.

SUMMARY

In accordance with this disclosure, novel tunable impedance matching networks and tunable diplexer matching systems are provided.

It is an object of the present disclosure therefore to provide novel tunable impedance matching networks and tunable diplexer matching systems. This and other objects as may become apparent from the present disclosure are achieved, at least in whole or in part, by the subject matter described herein.

BRIEF DESCRIPTION OF THE DRAWINGS

The subject matter described herein will now be explained with reference to the accompanying drawings of which:

Figure 1A is a schematic diagram of a tunable impedance matching network according to an embodiment of the subject matter described herein; Figure 1 B is a schematic diagram of a tunable impedance matching network according to an embodiment of the subject matter described herein; Figure 1C is a schematic diagram of a tunable matching network according to an embodiment of the subject matter described herein;

Figure 1 D is a schematic diagram of a tunable matching network according to an embodiment of the subject matter described herein; Figure 2A is a schematic diagram of a tunable impedance matching network according to an embodiment of the subject matter described herein;

Figure 2B is a schematic diagram of a tunable diplexer matching system according to an embodiment of the subject matter described herein; Figure 3 is a schematic diagram of a diplexer circuit according to an embodiment of the subject matter described herein;

Figures 4A-4F are different views of a MEMS variable capacitor according to one embodiment of the subject matter described herein;

Figure 5 is a top perspective view of a MEMS variable capacitor according to one embodiment of the subject matter described herein;

Figures 6A-6C are different views of a MEMS variable capacitor according to one embodiment of the subject matter described herein;

Figures 7 and 8 are Smith Charts of simulation results of matching network shown in Figure 1 B; Figures 9-16 are Smith Charts of simulation results of system shown in

Figure 2D;

Figure 17 is one physical implementation of such a tunable matching circuit; and

Figure 18 is a block diagram of a MEMS-based tunable capacitor implementation of the matching circuit shown in Figure 1 B.

DETAILED DESCRIPTION

In accordance with the present disclosure, tunable impedance matching networks and tunable diplexer matching systems are provided. The networks and systems described herein can have particular application for use in impedance matching in radio receiver and transmitter systems, including components such as antennas and amplifiers. The system performance of these components can be very sensitive to impedance mismatching. Improved impedance matching can improve the signal-to-noise ratio, efficiency, stability, linearity and bandwidth of such systems.

A tunable impedance matching network according to the present disclosure can include an impedance element connected between first and second nodes for communicating signals between the first and second nodes. For example, the impedance element can be a transmission line or an inductor. Further, the matching network can include a first capacitor connected in parallel with the impedance element, wherein the first capacitor is tunable. The matching network can also include a second capacitor comprising first and second terminals. The first terminal of the second capacitor can be connected to the first node. The second terminal of the second capacitor can be connected to a third node, which can be a local voltage reference for the first node. A third capacitor comprises first and second terminals. The first terminal of the second capacitor can be connected to the second node. The second terminal of the second capacitor can be connected to a fourth node, which can be a local voltage reference for the second node. One or more of the capacitors can be a micro-electro-mechanical system (MEMS) variable capacitor.

Figures 1A and 1 B are schematic diagrams of tunable impedance matching networks 100 and 102, respectively, according to embodiment of the subject matter described herein. The network of Figure 1B is a series arrangement of two of the networks shown Figure 1 A with the center capacitor of Figure 1B being a combination of two capacitors of Figure 1A. Similarly, three or more of the networks shown in Figure 1 A can be combined in series for achieving desired functionality. Referring to Figure 1 A, network 100 is configured to correct impedance mismatch between a source and a load. Network 100 may include any suitable number and combination of passive and/or controllable components, which are selected depending on the particular application and device requirements.

Network 100 can include an impedance element IE connected between nodes N1 and N2 for communicating signals between nodes N1 and N2. In one example, nodes N1 and N2 can be connected to a source and a load, respectively. Impedance element IE can have high impedance and may be frequency dependent. For example, impedance element IE can have an impedance magnitude in the range of 1/10 to 10 times the reference impedance with most advantageous range being above the reference impedance. The impedance elements should have very low loss. In one example, the impedance element can be two or more elements that collectively have low loss. In one example, impedance element IE can be an inductor. In one example, impedance elements IE can be a transmission line. Transmission lines can be used as matching elements for matching one characteristic impedance to another.

As referred to herein, standing wave ratio (SWR) is the ratio of the amplitude of a partial standing wave at an antinode (maximum) to the amplitude at an adjacent node (minimum). The SWR is usually defined as a voltage ratio called the VSWR (voltage standing wave ratio). It is also possible to define the

SWR in terms of current, resulting in the ISWR, which has the same numerical value. The power standing wave ratio (PSWR) is defined as the square of the SWR. The voltage component of a standing wave in a uniform transmission line consists of the forward wave (with amplitude V_f) superimposed on the reflected wave (with amplitude V_r).

Capacitor C1 can be connected in parallel with impedance element IE.. Capacitor C1 can be a variable capacitor. The nominal capacitance range of capacitor C1 can be between 1 femto-farad and 100 pico-farads for applications using frequencies above 200 MHz. It will be understood by those of skill in the art that the appropriate capacitance range depends on the intended frequency range with larger capacitances required for operation at lower frequencies and vice versa. Further, capacitor C1 can be tuned by application of a control signal, such as by controlling a voltage applied to the capacitors or by actuating a selection of capacitors in a capacitor array. The tuning ratio of the capacitors should be as high as possible with a ratio of greater than 2 required and a ratio greater than 5 preferred.

Network 100 can also include capacitors C2 and C3. One terminal of capacitor C2 is connected to node N1. The other terminal of capacitor C2 is connected to a local voltage reference (a ground G) for node N1. One terminal of capacitor C3 is connected to node N2. The other terminal of capacitor C3 is connected to a local voltage reference (ground G) for node N2.

One or more of capacitors C1-C3 can be variable capacitors. In one embodiment, capacitors C1-C3 can be MEMS variable capacitors. Examples of suitable MEMS variable capacitors are provided hereinbelow. The capacitance range of capacitors C1-C3 can be between can be between 1 femto-farad and 100 pico-farads for applications using frequencies above 200 MHz. It will be understood by those of skill in the art that the appropriate capacitance range for a given application depends on the intended frequency range with larger capacitances required for operation at lower frequencies and vice versa. Further, capacitors C1-C3 can be tuned by application of a control signal, such as by controlling a voltage applied to the capacitors or by actuating a selection of capacitors in a capacitor array. The tuning ratio of the capacitors should be as high as possible with a ratio of greater than 2 required and a ratio greater than 5 preferred. In the embodiment of network 100 having tunable capacitors, the single network 100 can be used to cover wide frequency ranges and large VSWR variations. Further, network 100 and/or MEMS can be fabricated in low temperature co-fired ceramic (LTCC) substrate, laminated organic substrate, printed circuit board (PCB), or any other suitable substrate or material. Impedance elements can also be discrete elements, such as inductors mounted on a PCB.

Referring to Figure 1 B, network 102 is configured to correct impedance mismatch between a source and a load. Network 102 may include any suitable number and combination of passive and/or controllable components, which are selected depending on the particular application and device requirements.

Network 102 can include impedance elements IE1 and IE2 connected between nodes N1 and N2 for communicating signals between nodes N1 and N2. In one example, nodes N1 and N2 can be connected to a source and a load, respectively. In one example, impedance elements IE1 and IE2 can be inductors. In one example, impedance elements IE1 and IE2 can be transmission lines of suitable length and characteristic impedance.

Capacitors C1 and C2 can be connected in parallel with impedance elements IE1 and IE2, respectively. Capacitors C1 and C2 can be variable capacitors. In one embodiment, capacitors C1 and C2 can be MEMS variable capacitors. Examples of suitable MEMS variable capacitors are provided hereinbelow. The tuning ratio of the capacitors should be as high as possible with a ratio of greater than 2 required and a ratio greater than 5 preferred. Network 100 can also include capacitors C3, C4, and C5. One terminal of capacitor C3 is connected to node N1. The other terminal of capacitor C3 is connected to a local voltage reference (ground G) for node N1. One terminal of capacitor C4 is connected to a connection node CN between impedance elements IE1 and IE2. The other terminal of capacitor C4 is connected to a local voltage reference (ground G) for connection node CN. One terminal of capacitor C5 is connected to node N2. The other terminal of capacitor C5 is connected to a local voltage reference (ground G) for node N2.

One or more of capacitors C1-C5 can be variable capacitors. In one embodiment, capacitors C1-C5 can be MEMS variable capacitors. Examples of suitable MEMS variable capacitors are provided hereinbelow. Further, capacitors C1-C5 can be tuned by application of a control signal, such as by controlling a voltage applied to the capacitors or by actuating a selection of capacitors in a capacitor array. The tuning ratio of the capacitors should be as high as possible with a ratio of greater than 2 required and a ratio greater than 5 preferred.

In the embodiment of network 102 having tunable capacitors, the single network 102 can be used to cover wide frequency ranges and large VSWR variations. Further, network 100 can be easily fabricated in low temperature co- fired ceramic (LTCC) substrate, laminated organic substrate, printed circuit board (PCB), or any other suitable substrate or material.

One exemplary advantage of networks such as networks 100 and 102 shown in Figures 1A and 1 B, respectively, is that a decrease in mismatch loss between dissimilar impedances is achieved in applications such as radio electronics and antennas in a cell phone. Another exemplary advantage is that such a network can provide variable impedance matching between a power amplifier output and an antenna for providing optimal power transfer and minimizing output intermodulation distortion.

Figures 1C and 1D are schematic diagrams of tunable impedance matching networks 104 and 106 according to an embodiment of the subject matter described herein. The network of Figure 1D is a series arrangement of two of the networks shown in Figure 1 C with the center impedance element and capacitor of Figure 1D being a combined series-connected impedance element and capacitor of Figure 1C. Similarly, three or more of the networks shown in Figure 1C can be combined in series for achieving desired functionality.

Referring to Figure 1C, network 104 can include impedance elements IE1 and IE2 for communicating signals between nodes N1 and N2. In one example, nodes N1 and N2 can be connected to a source and a load, respectively. Impedance elements IE1 and IE2 can be transmission lines or inductors. Further, impedance elements IE1 and IE2 can be connected in parallel with capacitors C1 and C2. Another capacitor C3 can be connected at one terminal to connection node CN and at its other terminal to a local voltage reference (ground G) for connection node CN. One or more of capacitors C1- C3 can be a variable capacitor, such as a suitable MEMS variable capacitor. Network 104 can be configured with components of suitable values for forming a high or low pass filter.

Referring to Figure 1 D, matching network 106 functions as high and low pass filters that together form a bandpass filter for signals communicated between nodes N1 and N2. Network 106 can include impedance elements IE1- IE3 connected together in series between nodes N1 and N2. Impedance elements IE1-IE3 can be connected in parallel with capacitors C1-C3, respectively. Further, a capacitor C4 can be connected to at one terminal to a connection node CN1 and at its other terminal to a local voltage reference (ground G) for connection node CN1. A capacitor C5 can be connected to at one terminal to a connection node CN2 and at its other terminal to a local voltage reference (ground G) for connection node CN2.

Figure 2A is a schematic diagram of a tunable impedance matching network MN according to an embodiment of the subject matter described herein. Referring to Figure 2A, matching network MN can include a high pass filter section HPF and a low pass filter section LPF. High pass filter section HPF and low pass filter section LPF collectively form a bandpass filter. In particular, high pass filter section HPF and low pass filter section LPF of matching network MN form a bandpass filter for signals communicated between nodes N1 and N2 of matching network MN. High pass filter HPF can include capacitors C1 and C2 connected in series between node N1 and low pass filter LPF. In particular, capacitor C1 of matching network MN1 is connected at one terminal to node N1. Further, high pass Filter HPF can include an inductor 11 connected at one terminal to a connection node CN1 between capacitors C1 and C2. The other terminal of inductor 11 can be connected to a local voltage reference (ground G) for connection node CN1.

Low pass filter LPF can include inductors 12 and 13 connected in series between a node and a node N2. In particular, inductor 12 of matching network MN is connected at one terminal to high pass filter HPF of matching network MN. Further, low pass filter HPF can include a capacitor C3 connected at one terminal to a connection node CN2 between inductor I2 and I3. The other terminal of capacitor C3 can be connected to a local voltage reference (ground G) for connection node CN2. One or more of capacitors C1-C3 shown in Figure 2A can be variable capacitors. In one embodiment, capacitors C1-C3 can be MEMS variable capacitors. Examples of suitable MEMS variable capacitors are provided hereinbelow. Further, capacitors C1-C3 can be tuned by application of a control signal, such as by controlling a voltage applied to the capacitors or by actuating a selection of capacitors in a capacitor array.

A tunable impedance matching system according to the present disclosure can include high and low pass filter sections, which can be combined to form tunable impedance matching networks. One or more tunable impedance matching networks can be connected to a port of a diplexer circuit or multi-plexer circuit for achieving a target impedance over different frequency bands. The high pass filter section can include first and second variable capacitors connected in series between a first and second node. Further, the high pass filter section can include a first inductor comprising first and second terminals. The first terminal of the frrst inductor can be connected at a connection node between the first and second variable capacitors. The second terminal of the second capacitor can be connected to a third node. The third node can be a local voltage reference to the connection node between the first and second variable capacitors. The low pass filter can include second and third inductors connected in series between the second node and a fifth node. Further, the low pass filter section can include a third variable capacitor comprising first and second terminals. The first terminal of the third variable capacitor can be connected at a connection node between the first and second inductors. The second terminal of the third variable capacitor can be connected to a sixth node. The sixth node can be a local voltage reference to the connection node between the first and second inductors.

Figure 2B is a schematic diagram of a tunable diplexer (or multi-plexer) matching system 200 according to an embodiment of the subject matter described herein. Referring to Figure 2B, system 200 can include a diplexer circuit DC comprising a first port P1 , a second port P2, and a third port P3. System 200 can also include tunable impedance matching networks MN1 and MN2 connected to ports P1 and P2, respectively. Matching networks MN1 and MN2 can each include a high pass filter section HPF and a low pass filter section LPF as described with respect to Figure 2A. In another example, matching networks MN1 and MN2 can include one or more tunable impedance matching networks, such as shown in Figures 1 A and 1 B. In another example, matching networks MN1 and MN2 can include matching network 104 as shown Figure 1C. In another example, matching networks MN1 and MN2 can include a series combination of two or more of matching network 104 as shown Figure 1C. In yet another example, matching networks MN1 and MN2 can include matching network 106 as shown Figure 1D.

Figure 3 is a schematic diagram of a diplexer (or multi-plexer) circuit generally designated 300 according to an embodiment of the subject matter described herein. Diplexer circuit 300 can be used as the diplexer circuit shown in Figure 2B with ports P1-P3 of Figure 3 being connected to ports P1-P3 of Figure 2B. Referring to Figure 3, diplexer circuit 300 can include high band circuitry HB connected between ports P1 and P3. Further, diplexer circuit 300 can include low band circuitry LB connected between ports P1 and P2. High band circuitry HB can include an inductor 11 and a capacitor C1 connected in series between first port P1 and ground G. Further, circuitry HB can include an inductor 12 connected between port P3 and a node N1. Circuitry HB can include an inductor 13 and a capacitor C2 connected in parallel between node N1 and port P1.

Low band circuitry LB can include an inductor I4 and a capacitor C3 connected in series between second port P2 and ground G. Further, circuitry LB can include a capacitor C4 connected between port P3 and a node N2.

Circuitry LB can include an inductor I5 and a capacitor C5 connected in parallel between node N2 and port P2.

The capacitors shown in Figure 1-3 can be non-varying capacitors. Alternatively, one or more of the capacitors shown in Figures 1-3 can be variable capacitors. In particular, these capacitors can be MEMS variable capacitors. The MEMS variable capacitors referred to herein can be any suitable combination of continuously variable elements, arrays of switched elements and arrays of two-state binary capacitors. Figures 4A-4E illustrate different views of a MEMS variable capacitor generally designated 400 according to one embodiment of the subject matter described herein. Generally, MEMS variable capacitor 400 is an actuation component. In particular, Figure 4A is a cross-sectional front view of variable capacitor 400 in a closed position. Referring to Figure 4A, switched variable capacitor 400 can include first and second capacitive elements CE1 and CE2 disposed on a surface of a dielectric layer DE. Capacitive elements CE1 and CE2 can be connected to feed lines FL1 and FL2, respectively. Feed lines FL1 and FL2 can be connected to a signal line SL. A first capacitive plate CP1 can be positioned on an opposing side of an air gap AG from capacitive elements CE1 and CE2 to form a capacitance across feed lines FL1 and FL2. First capacitive plate CP1 can be spaced from capacitive elements CE1 and CE2 by a distance d1 in the closed position. The distance between plate CP1 and capacitive elements CE1 and CE2 can be about 0.5 to 4 microns. Figure 4B is a cross- sectional front view of variable capacitor 400 in an open position, wherein first capacitive plate CP1 can be spaced from capacitive elements CE1 and CE2 by a distance d2. Variable capacitor 400 can include bumps B for preventing capacitive plate CP1 from contacting capacitive elements CE1 and/or CE2. Bumps can be in any number and placed in any suitable positioned on a bottom surface of a movable component for preventing the undesired contact of components. In one example, bumps can be located near capacitive plates. In another example, bumps can be located near actuation electrodes.

Figure 4C is a top perspective view of variable capacitor 400. Referring to Figure 4C₁ the capacitance of variable capacitor 400 can be varied by applying varying voltage across actuation electrodes AE1 and AE2. When voltage is applied across actuation electrodes AE1 and AE2, a movable end ME of a movable component MC can deflect towards substrate S while a stationary end SE remains stationary due to its attachment to dielectric DE and substrate S. As a result of the deflection, the distance between capacitive plates CP1 and CP2 and capacitive elements CE1 and CE2 narrows, and therefore, the capacitance changes. Variable capacitor 400 can also include an actuation electrode (not shown) on an opposing side of movable component MC from actuation electrode AE1 and electrically connected to actuation electrode AE1 for deflecting movable end ME towards substrate S on application of the voltage.

In one embodiment, variable capacitor 400 can be fabricated on a substrate S and dielectric DE. In particular, for example, feed lines FL1 and FL2 can be buried within substrate S and/or dielectric DE and include ends that extend to a surface of dielectric DE. A conductive layer can be deposited over the top surface of dielectric DE and the ends of feed lines FL1 and FL2. The conductive layer can be etched to form capacitive elements CE1 and CE2 on the ends of feed lines FL1 and FL2, respectively. Further, the conductive layer can be etched to form actuation electrodes AE2.

A sacrificial layer can be deposited on capacitive elements CE1 and CE2 and dielectric DE. Next, apertures A1 and A2 can be etched in the sacrificial layer through to the surface of dielectric DE. Movable component MC can be formed by depositing a layer of oxide on capacitive plate CP1 , the sacrificial layer, and in apertures A1 and A2 through to the surface of dielectric DE. The sacrificial layer can be removed to form an air gap between capacitive plate CP1 and capacitive elements CE1 and CE2. The air gap can be varied to achieve different capacitances. Further, a conductive layer can be formed on movable component MC and the conductive layer etched to form a second capacitive plate CP2.

Figure 4D is a top view of variable capacitor 400. Stationary end SE includes resilient arms RA1 and RA2, which can bend and resist the deflection of movable end ME towards substrate S when voltage is applied across the actuation electrodes. A notched area generally designated N provides spacing between resilient arms RA1 and RA2. The thickness of resilient arms RA1 and RA2 can be varied for increasing or decreasing their resistance to the deflection of movable end ME. Further, the length of resilient arms RA1 and RA2 can be made longer or shorter for increasing or decreasing, respectively, resistance to the deflection of movable end ME.

Figure 4E is a side view of MEMS variable capacitor 400. Variable capacitor 400 can include an actuation electrode AE3 in electrical communication with actuation AE1. A voltage can be applied across second actuation electrode AE2 and first/third actuation electrodes AE1/AE3 for moving movable component MC.

Figure 4F is another top view of MEMS variable capacitor 400. In this view, actuation electrode AE1 and capacitive plate CP2 are now shown in order to provide a better view of actuation electrode AE3 and capacitive plate CP1 (indicated by broken lines) attached to an underside of movable component MC. Actuation electrode AE3 and capacitive plate CP1 can be electrically connected.

Figure 5 is a top perspective view of a MEMS variable capacitor 500 according to one embodiment of the subject matter described herein. Referring to Figure 5, variable capacitor 500 is similar to variable capacitor 400 shown in Figure 4 except for the arrangement of capacitive elements CE1 and CE2 and capacitive plates CP1 and CP2. In particular, capacitive elements CE1 and CE2 are aligned with one another along the length of movable component. Further, capacitive plates CP1 (not shown) and CP2 are extended in length such that they are positioned over capacitive elements CE1 and CE2.

Figures 6A and 6B illustrate different views of a MEMS variable capacitor generally designated 600 according to one embodiment of the subject matter described herein. In particular, Figure 6A is a cross-sectional side view of variable capacitor 600. Referring to Figure 6A, variable capacitor 600 can include first and second capacitive elements CE1 and CE2 disposed on a surface of a substrate S. Capacitive elements CE1 and CE2 can be connected to feed lines FL1 and FL2, respectively. Feed lines FL1 and FL2 can be connected to signal line SL. First capacitive plate CP1 can be positioned on an opposing side of an air gap AG from capacitive elements CE1 and CE2 to form a capacitance across feed lines FL1 and FL2.

The capacitance of variable capacitor 600 can be varied by applying varying voltage across actuation electrodes. In particular, capacitor 600 can include actuation electrodes AE1 , AE2, AE3, and AE4 positioned on movable component. Further, actuation electrodes AE5 and AE6 can be positioned on a top surface of substrate S. A voltage difference can be applied between actuation electrode AE5 and AE1 and AE2. Further, a voltage difference can be applied between actuation electrode AE6 and AE3 and AE4. At a sufficiently high voltage difference, a center portion of a movable component

MC (the portion at which capacitive plates CP1 and CP2 are attached) can deflect towards substrate S while stationary ends SE1 and SE2 remain stationary due to their attachment to substrate S. As a result of the deflection, the distance between capacitive plates CP1 and CP2 and capacitive elements

CE1 and CE2 narrows, and therefore, the capacitance changes.

In one embodiment, variable capacitor 600 can be fabricated on a substrate S. In particular, for example, feed lines FL1 and FL2 can be buried within substrate S and include ends that extend to a surface of substrate S. A conductive layer can be deposited over the top surface of substrate S and the ends of feed lines FL1 and FL2. The conductive layer can be etched to form capacitive elements CE1 and CE2 on the ends of feed lines FL1 and FL2, respectively. Further, the conductive layer can be etched to form actuation electrodes AE5 and AE6. A sacrificial layer can be deposited on capacitive elements CE1 and

CE2, substrate S, and actuation electrodes AE5 and AE6. Next, apertures can be etched in the sacrificial layer through to the surface of substrate S. Movable component MC can be formed by depositing a layer of oxide on capacitive plates CP1 and CP2, the sacrificial layer, actuation electrode AE5 and AE6, and in the apertures A1 and A2 through to the surface of substrate S. The sacrificial layer can be removed to form an air gap between capacitive plates CP1 and CP2 and capacitive elements CE1 and CE2. The air gap can be varied to achieve different capacitances. Further, a conductive layer can be formed on movable component MC and the conductive layer etched to form a second capacitive plate CP2.

Figure 6B is a top view of variable capacitor 600. Variable capacitor 300 can include station ends SE1 and SE2. Stationary ends SE1 and SE2 can each include resilient arms RA1 and RA2, which can bend and resist the deflection of movable end ME towards substrate S when voltage is applied across the actuation electrodes. A notched area N provides spacing between resilient arms RA1 and RA2. The thickness of resilient arms RA1 and RA2 can be varied for increasing or decreasing their resistance to the deflection of movable end ME. Further, the length of resilient arms RA1 and RA2 can be made longer or shorter for increasing or decreasing, respectively, resistance to the deflection of movable end ME.

Figures 7 and 8 are Smith Charts illustrating simulation results of matching network 100 shown in Figure 1. These charts show the results of the reflection looking into one terminal of matching network 100 while the other terminal end is connected to a perfectly matched load. The resulting reflection coefficient can optimally tune a load having a reflection coefficient that is the complex conjugate of the network coefficient. These are referred to as coverage maps as the tuning of the variable elements in the network are swept at a single frequency to determine what areas of the Smith Chart can be reached. An ideal result is when the chart is uniformly and fairly densely filled with points showing that a match can be obtained anywhere. Figure 7 shows an exemplary result for the circuit shown in Figure 1 B using transmission lines for the impedance element and high ratio tunable capacitors. Figure 8 shows the reduced coverage result for the same circuit but with much lower ratio tunable capacitors. Figures 9-16 are Smith Charts illustrating simulation results of system 204 shown in Figure 2D. The charts of Figures 9-11 show the results of the reflection looking into one terminal of system 204 while the other end is connected to a mismatched load (possibly an antenna). In the Figures 9-11 charts, the simulation is performed over a range of different frequencies. Note that perfect matching reaching the center of the Smith Chart is, at most, achieved at only one frequency.

Figures 12-16 show the results of the reflection looking into one terminal of system 200 while the other terminal end is connected to a perfectly matched load. Further, the charts of Figures 12-16 include two circles, an outer circle and an inner circle. The outer circle is a particular reflection specification limit where the network should ideally fill the circle with coverage so it can match any load with reflection smaller than the specification limit. The inner circle is the reflection specification limit for sufficient match. Figures 14-16 illustrate the tuning capability of this network for multiple operational frequencies (1.7, 1.9 and 2.1 GHz respectively).

Figure 17 is a cross-sectional side view of a tuner implementation using MEMS tunable capacitors C on a die according to an embodiment of the subject matter described herein. Referring to Figure 17, capacitors C can be on a die that is flip-chipped onto an LTCC substrate LS. Substrate LS can contain the high-impedance elements and input/output IO connections to a circuit board. Control CMOS CS may be monolithically integrated with capacitors C. An underfill U can be disposed between capacitors C and substrate LS. Further, a shield cover SC can be positioned on substrate LS and over underfill U, capacitors C, and CMOS CS.

Figure 18 is a block diagram of a tuner generally designated 2500 according to an embodiment of the subject matter described herein. Referring to Figure 18, tuner 1800 can include high impedance elements (transmission lines in this example) IE. Further, tuner 1800 includes MEMS and their control lines CL. Control lines CL can be used to set the tunable capacitor states. Control lines CL can correspond to impedance elements, such as the impedance elements described with respect to Figure 1 B. It will be understood that various details of the presently disclosed subject matter may be changed without departing from the scope of the presently disclosed subject matter. Furthermore, the foregoing description is for the purpose of illustration only, and not for the purpose of limitation.

Claims

CLAIMSWhat is claimed is:

1. A tunable impedance matching network comprising:

(a) an impedance element connected between first and second nodes for communicating signals between the first and second nodes;

(b) a first capacitor connected in parallel with the impedance element, wherein the first capacitor is tunable;

(c) a second capacitor comprising first and second terminals, wherein the first terminal of the second capacitor is connected to the first node, wherein the second terminal of the second capacitor is connected to a third node, and wherein the third node is a local voltage reference for the first node; and

(d) a third capacitor comprising first and second terminals, wherein the first terminal of the second capacitor is connected to the second node, wherein the second terminal of the second capacitor is connected to a fourth node, and wherein the fourth node is a local voltage reference for the second node.

2. The tunable impedance matching network of claim 1 wherein the impedance element comprises a transmission line.

3. The tunable impedance matching network of claim 1 wherein the impedance element comprises an inductor.

4. The tunable impedance matching network of claim 1 wherein at least one of the second and third capacitors is tunable.

5. The tunable impedance matching network of claim 1 wherein the second and third capacitors are tunable.

6. The tunable impedance matching network of claim 1 wherein at least one of the first, second, and third capacitors comprises a micro-electromechanical system (MEMS) variable capacitor.

7. The tunable impedance matching network of claim 1 wherein the first, second, and third capacitors comprise micro-electro-mechanical system (MEMS) variable capacitors.

8. The tunable impedance matching network of claim 7 wherein the first, second, and third capacitors are flip-chipped onto a low temperature co- fired ceramic (LTCC) substrate comprising the impedance element.

9. The tunable impedance matching network of claim 7 wherein at least one of the first, second, and third capacitors is flip-chipped onto a low temperature co-fired ceramic (LTCC) substrate comprising the - impedance element.

10. The tunable impedance matching network of claim 1 wherein the second terminal of the second capacitor is connected to a ground.

11. The tunable impedance matching network of claim 1 wherein the second terminal of the third capacitor is connected to a ground.

12. A plurality of the tunable impedance matching networks of claim 1 connected in an in-line series combination, wherein adjacent networks in the series are connected at the first node of one network and the second node of the other network.

13. The tunable impedance matching network of claim 12 wherein parallel shunt capacitors from each adjacent network are combined into single capacitors.

14. A tunable impedance matching network comprising: (a) first and second impedance elements connected in series between first and second nodes for communicating signals between the first and second nodes; (b) first and second capacitors connected in parallel with the first and second impedance elements, respectively; (c) a third capacitor comprising first and second terminals, wherein the first terminal is connected at a connection node between the first and second impedance elements, wherein the second terminal is connected to a third node, and wherein the third node is a local voltage reference for the connection node.

15. The tunable impedance matching network of claim 14 wherein the first and second impedance elements comprise a transmission line.

16. The tunable impedance matching network of claim 14 wherein the first and second impedance elements comprise an inductor.

17. The tunable impedance matching network of claim 14 wherein at least one of the first, second, and third capacitors is tunable.

18. The tunable impedance matching network of claim 14 wherein the first, second, and third capacitors are tunable.

19. The tunable impedance matching network of claim 14 wherein at least one of the first, second, and third capacitors comprises a micro-electromechanical system (MEMS) variable capacitor.

20. The tunable impedance matching network of claim 14 wherein the first, second, and third capacitors comprise micro-electro-mechanical system (MEMS) variable capacitors.

21. The tunable impedance matching network of claim 20 wherein the first, second, and third capacitors are flip-chipped onto a low temperature co- fired ceramic (LTCC) substrate comprising the first and second impedance elements.

22. The tunable impedance matching network of claim 20 wherein at least one of the first, second, and third capacitors is flip-chipped onto a low temperature co-fired ceramic (LTCC) substrate comprising the first and second impedance elements.

23. The tunable impedance matching network of claim 14 wherein the third terminal of the second capacitor is connected to a ground.

24. The tunable impedance matching network of claim 14 wherein the second terminal of the third capacitor is connected to a ground.

25. A plurality of the tunable impedance matching networks of claim 14 connected in an in-line series combination, wherein adjacent networks in the series are connected at the first node of one network and the second node of the other network.

26. The tunable impedance matching network of claim 25 wherein the parallel impedance elements and capacitors from each adjacent network are combined into single parallel impedance element and capacitor.

27. A tunable impedance matching network comprising: (a) a high pass filter section comprising:

(i) first and second variable capacitors connected in series between a first and second node; and (ii) a first inductor comprising first and second terminals, wherein the first terminal of the first inductor is connected at a connection node between the first and second variable capacitors, wherein the second terminal of the inductor is connected to a third node, and wherein the third node is a local voltage reference for the connection node between the first and second variable capacitors; and

(b) a low pass filter section comprising: (i) second and third inductors connected in series between the second node and a fourth node;

(ii) a third variable capacitor comprising first and second terminals, wherein the first terminal of the third variable capacitor is connected at a connection node between the second and third inductors, wherein the second terminal of the third variable capacitor is connected to a fifth node, and wherein the fifth node is a local voltage reference for the connection node between the second and third inductors; and (c) the in-line series combination of the high pass and low pass filter sections.

28. The tunable impedance matching network of claim 27 wherein at least one of the first, second, and third capacitors comprises a micro-electromechanical system (MEMS) variable capacitor.

29. The tunable impedance matching network of claim 27 wherein the first, second, and third capacitors comprise micro-electro-mechanical system (MEMS) variable capacitors.

30. The tunable impedance matching network of claim 29 wherein the first, second, and third capacitors are flip-chipped onto a low temperature co- fired ceramic (LTCC) substrate.

31. The tunable impedance matching network of claim 29 wherein at least one of the first, second, and third capacitors is flip-chipped onto a low temperature co-fired ceramic (LTCC) substrate.

32. A tunable diplexer matching system comprising:

(a) a diplexer circuit comprising first, second, and third ports;

(b) first and second tunable impedance matching networks connected to the first and second input ports, respectively, wherein each of the first and second tunable impedance matching networks comprise a high pass filter section and a low pass filter section, wherein the high pass filter section comprises: (i) first and second variable capacitors connected in series between a first and second node; and (ii) a first inductor comprising first and second terminals, wherein the first terminal of the first inductor is connected at a connection node between the first and second variable capacitors, wherein the second terminal of the second capacitor is connected to a third node, and wherein the third node is a local voltage reference to the connection node between the first and second variable capacitors; and wherein the low pass filter section comprises: (i) second and third inductors connected in series between the second node and a fifth node; and

(ii) a third variable capacitor comprising first and second terminals, wherein the first terminal of the third variable capacitor is connected at a connection node between the first and second inductors, wherein the second terminal of the third variable capacitor is connected to a sixth node, and wherein the sixth node is a local voltage reference to the connection node between the first and second inductors.

33. The tunable diplexer matching system of claim 32 wherein at least one of the first, second, and third capacitors comprises a micro-electromechanical system (MEMS) variable capacitor.

34. The diplexer system of claim 32 wherein the first, second, and third capacitors comprise micro-electro-mechanical system (MEMS) variable capacitors.

35. The tunable impedance matching network of claim 34 wherein the first, second, and third capacitors are flip-chipped onto a low temperature co- fired ceramic (LTCC) substrate.

36. The tunable impedance matching network of claim 34 wherein at least one of the first, second, and third capacitors is flip-chipped onto a low temperature co-fired ceramic (LTCC) substrate.

37. A tunable diplexer matching system comprising:

(a) a diplexer circuit comprising first, second, and third ports;

(b) first and second tunable impedance matching networks connected to the first and second input ports, respectively, wherein each of the first and second tunable impedance matching networks comprise:

(i) an impedance element connected between first and second nodes for communicating signals between the first and second nodes;

(ii) a first capacitor connected in parallel with the impedance element, wherein the first capacitor is tunable;

(iii) a second capacitor comprising first and second terminals, wherein the first terminal of the second capacitor is connected to the first node, wherein the second terminal of the second capacitor is connected to a third node, and wherein the third node is a local voltage reference for the first node; and

(iv) a third capacitor comprising first and second terminals, wherein the first terminal of the second capacitor is connected to the second node, wherein the second terminal of the second capacitor is connected to a fourth node, and wherein the fourth node is a local voltage reference for the second node.

38. The tunable diplexer matching system of claim 37 wherein at least one of the first, second, and third capacitors comprises a micro-electromechanical system (MEMS) variable capacitor.

39. The tunable impedance matching system of claim 38 wherein the at least one of the first, second, and third capacitors is flip-chipped onto a low temperature co-fired ceramic (LTCC) substrate comprising the impedance element.

40. The tunable diplexer matching system of claim 37 wherein the first, second, and third capacitors comprise micro-electro-mechanical system (MEMS) variable capacitors.

41. The tunable impedance matching system of claim 38 wherein the first, second, and third capacitors are flip-chipped onto a low temperature co- fired ceramic (LTCC) substrate comprising the impedance element.