WO2007098187A2 - Active electrode and method for manufacturing it using flex circuit technology - Google Patents

Active electrode and method for manufacturing it using flex circuit technology Download PDF

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Publication number
WO2007098187A2
WO2007098187A2 PCT/US2007/004472 US2007004472W WO2007098187A2 WO 2007098187 A2 WO2007098187 A2 WO 2007098187A2 US 2007004472 W US2007004472 W US 2007004472W WO 2007098187 A2 WO2007098187 A2 WO 2007098187A2
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WO
WIPO (PCT)
Prior art keywords
opening
mask
over
interest
electrode
Prior art date
Application number
PCT/US2007/004472
Other languages
French (fr)
Other versions
WO2007098187A3 (en
Inventor
Kenneth M. Curry
Original Assignee
Edwards Lifesciences Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Lifesciences Corporation filed Critical Edwards Lifesciences Corporation
Priority to CA2630535A priority Critical patent/CA2630535C/en
Priority to DE602007006433T priority patent/DE602007006433D1/en
Priority to AT07751245T priority patent/ATE468006T1/en
Priority to EP07751245A priority patent/EP1989930B1/en
Priority to JP2008556402A priority patent/JP5207387B2/en
Priority to CN200780001459.1A priority patent/CN101356865B/en
Priority to AU2007217768A priority patent/AU2007217768A1/en
Publication of WO2007098187A2 publication Critical patent/WO2007098187A2/en
Publication of WO2007098187A3 publication Critical patent/WO2007098187A3/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/245Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
    • H05K3/247Finish coating of conductors by using conductive pastes, inks or powders
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/1486Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using enzyme electrodes, e.g. with immobilised oxidase
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12Manufacturing methods specially adapted for producing sensors for in-vivo measurements
    • A61B2562/125Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/02Details
    • A61N1/04Electrodes
    • A61N1/05Electrodes for implantation or insertion into the body, e.g. heart electrode
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3271Amperometric enzyme electrodes for analytes in body fluids, e.g. glucose in blood
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/118Printed elements for providing electric connections to or between printed circuits specially for flexible printed circuits, e.g. using folded portions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/035Paste overlayer, i.e. conductive paste or solder paste over conductive layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09372Pads and lands
    • H05K2201/09436Pads or lands on permanent coating which covers the other conductors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0562Details of resist
    • H05K2203/0574Stacked resist layers used for different processes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4664Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49158Manufacturing circuit on or in base with molding of insulated base
    • Y10T29/4916Simultaneous circuit manufacturing

Definitions

  • the invention relates generally to flex circuit technology. More specifically, the invention relates to using flex circuit technology to create an electrode.
  • Flex circuits have been used in the micro-electronics industry for many years. In recent years, flex circuits have been used to design microelectrodes for in vivo applications.
  • One flex circuit design involves a laminate of a conductive foil (e.g., copper) on a flexible dielectric substrate (e.g., polyimide). The flex circuit is formed on the conductive foil using masking and photolithography techniques. Flex circuits are desirable due to their low manufacturing cost, ease in design integration, and flexibility in motion applications.
  • the invention relates to a method of creating an active electrode that may include providing a flex circuit having an electrode made of a first material and providing a first mask over the flex circuit, the first mask having an offset region and
  • the method may also include depositing a second material over the offset region and the opening, the second material being different from the first material and providing a second mask over the second material, the second mask having an opening over a portion of the second material that is over the offset region.
  • the invention relates to an electrode that may include a substrate having a conductive trace made of a first material, and a first mask positioned over the conductive trace, the first mask having a first opening over a portion of the conductive trace.
  • the electrode may also include a material of interest made of a second material and positioned over a portion of the conductive trace and over a portion of the first mask and a second mask over the material of interest, the second mask having a second opening over a portion of the material of interest, the second opening being offset from the first opening.
  • Figure 1 is a cross-section view of an active electrode that is created using a flex circuit according to an embodiment of the invention.
  • Figure 2 is a top view of a flex circuit according to an embodiment of the invention.
  • Figure 3 is a top view of a mask that is used to cover the flex circuit of figure 1 according to an embodiment of the invention.
  • Figure 4 is a top view showing one or more materials of interest deposited into and above the openings in the mask according to an embodiment of the invention.
  • Figure 5 is a top view of a mask that is used to cover the material of interest shown in figure 4 according to an embodiment of the invention.
  • Figures 6A and 6B are top views showing vertical and horizontal offsets according to various embodiments of the invention.
  • Figure 7 is a flow chart showing a method of creating the electrode of figure 1 according to an embodiment of the invention.
  • the invention is directed toward using a flex circuit to create an active electrode.
  • the flex circuit has a copper trace that is masked and imaged onto a polyimide substrate. Flex circuits with copper traces have a low manufacturing cost
  • the end of the copper trace may be plated with a first material of interest (e.g., gold).
  • a first mask is used to create an opening for an active electrode.
  • a second material of interest e.g., graphite and/or platinum
  • a second mask is used to cover the second material of interest that is over the opening.
  • a membrane may be placed over the offset region to form the active electrode.
  • the second material of interest over the offset region acts as a diffusion barrier to prevent, for example, electrolytes from coming into contact with the copper trace.
  • the offset region prevents the copper trace from oxidizing at a positive potential, such as would be the case for a glucose electrode measuring peroxide vs. silver-silver chloride for example.
  • FIG. 1 is a cross-section view of an active electrode 10 that is created using a flex circuit 100 according to an embodiment of the invention.
  • the flex circuit 100 may include a substrate 105, one or more contacts 110, one or more traces 115, and one or more electrodes 120 (705).
  • the contacts 110, the traces 115, and the electrodes 120 are shown as different elements; however, the contacts 110, the traces 115, and the electrodes 120 may be collectively referred to as traces and may be formed using the same material (e.g., copper).
  • the contacts 1 10, traces 115 and electrodes 120 are masked and imaged onto the substrate 105.
  • a mask 200 is placed over the flex circuit 100 (710).
  • the mask 200 may have an opening 220 that expose the electrodes 120 and that receive a material of interest 300, which is used to form the active electrode 10 (715).
  • the material of interest 300 is also deposited over the mask 200 in an offset region 305.
  • the offset region 305 is shown to be adjacent to the opening 220.
  • a mask 400 having an opening 405 is deposited over the material of interest 300 (720).
  • the opening 405 is located above the offset region 305 and is used for placement of a membrane 500 (725).
  • the opening 220 is positioned along a first axis or plane and the opening 405 is positioned along a second axis or plane.
  • the first axis or plane is not coincident with the second axis or plane.
  • the first axis or plane is vertically and/or horizontally offset from the second axis or plane.
  • Figures 1 and 6B show a horizontal offset and figure 6A shows a vertical offset.
  • the horizontal offset may be along the length of the substrate 105 and the vertical offset may be along the width of the substrate 105.
  • FIG. 2 is a top view of a flex circuit 100 according to an embodiment of the invention.
  • the contacts 110, the traces 115, and the electrodes 120 are made of a copper material and are formed on the substrate 105 using masking and photolithography techniques.
  • the substrate 105 may be a flexible dielectric substrate such as a polyimide.
  • the contacts 110 are used to connect to measurement devices such as a potentiostat.
  • the traces 115 are used to carry voltage or current from the electrodes 120 to the contacts 110.
  • figure 1 shows the flex circuit 100 having the substrate 105, three contacts 110a-c, three traces 115a-c, and three electrodes 120a-c.
  • Figure 3 is a top view of a mask 200 that is used to cover the flex circuit 100 shown in figure 2 according to an embodiment of the invention.
  • the mask 200 may be made of a dielectric material such as a photoimagable epoxy or an ultraviolet curable epoxy material.
  • the mask 200 has openings 210a-c and 220a-c.
  • the mask 200 covers the entire top surface of the flex circuit 100 except for areas that are above the contacts 110 and/or the electrodes 120.
  • the openings 210a-c are positioned directly above the contacts 1 lOa-c so that the contacts 11 Oa-c are exposed through the openings 210a-c of the mask 200.
  • the openings 220a-c are located directly above the electrodes 120a-c so that the electrodes 120a-c are exposed through the openings 220a-c of the mask 200.
  • Conventional lithography techniques may be used to deposit or place the mask 200 on the flex circuit 100.
  • Figure 4 is a top view showing one or more materials of interest 300a-c deposited into and above the openings 220a-c in the mask 200 according to an embodiment of the invention.
  • the materials of interest 300a-c provide a working surface for the electrodes 120a-c.
  • the same material of interest 300 or different materials of interest 300 may be deposited over each of the openings 220a-c.
  • the materials of interest 300 may be an ink or material made of carbon, gold, graphite, platinum, silver-silver chloride, rodium, palladium, other metals, and other materials having specific electrochemical properties.
  • a platinum ink or material may be deposited over the openings 220a and 220c and a silver-silver chloride ink or material may be deposited over the opening 220b.
  • the one or more materials of interest 300 may also be deposited over offset regions 3O5a-c that are adjacent to the openings 220a-c but are not directly over the openings 220a-c.
  • the size of the offset regions 305a-c may vary depending on the particular application and the arrangement and configuration of the electrodes 120a-c. In one embodiment, the sizes of the offset regions 305a-c are about 0.010 inches, 0.003 inches and 0.050 inches, respectively.
  • Figure 5 is a top view of the mask 400 that is used to cover the material of interest 300 shown in figure 4 according to an embodiment of the invention.
  • the mask 400 may be made of a dielectric material such as a photoimagable epoxy or an ultraviolet curable epoxy material.
  • the mask 400 has an opening 405 located above the offset region 305.
  • the mask 400 covers the entire top surface of the materials of interest 300 except for an area that is above the offset region 305.
  • the opening 405 may be positioned directly above the material of interest 300, which is directly above the offset region 305.
  • Conventional lithography techniques may be used to deposit or place the mask 400 on the material of interest 300.
  • a membrane 500 is deposited in the opening 405 and on the material of interest 300 (i.e., a working surface) to act as a sensing region.
  • the membrane 500 may contain, for example, a glucose oxidase enzyme.
  • the membrane 500 may allow molecules to pass at a certain rate so the material of interest 300 can accurately measure, for example, the glucose level in blood. That is, molecules in the blood can pass through the membrane 500 at a certain rate to the material of interest 300 for a specific measurement of the glucose in the blood.
  • the membrane 500 and/or the material of interest 300 may be suitable for immersion into a fluid or solution containing species of interest (e.g., blood) and/or electrolyte.
  • the contacts 110, the traces 115, and/or the electrodes 120 may not be suitable for immersion into a fluid or solution containing species of interest and therefore should be protected by a suitable encapsulant with appropriate dielectric properties.

Abstract

A method of creating an active electrode (10) that includes providing a flex circuit (100) having an electrode (120) made of a first material and providin a first mask (200) over the flex circuit, the first mask having an offset region (305) and an opening (220) that exposes the electrode. The method also includes depositing a second material (300) over the offset region and the opening, the second material being different from the first material an providing a second mask (400) over the second material, the second mask havin a opening (405) over a portion of the second material that is over the offset region.

Description

METHOD AlND APPARATUS FOR USING FLEX CIRCUIT TECHNOLOGY TO CREATE AN ELECTRODE
Claim of Priority under 35 U.S.C. §119
[0001] The present Application for Patent claims priority to Provisional Application No. 60/777,135 filed February 27, 2006, and assigned to the assignee hereof and hereby expressly incorporated by reference herein.
Field of the Invention
[0002] The invention relates generally to flex circuit technology. More specifically, the invention relates to using flex circuit technology to create an electrode.
BACKGROUND
[0003] Flex circuits have been used in the micro-electronics industry for many years. In recent years, flex circuits have been used to design microelectrodes for in vivo applications. One flex circuit design involves a laminate of a conductive foil (e.g., copper) on a flexible dielectric substrate (e.g., polyimide). The flex circuit is formed on the conductive foil using masking and photolithography techniques. Flex circuits are desirable due to their low manufacturing cost, ease in design integration, and flexibility in motion applications.
SUMMARY
[0004] The invention relates to a method of creating an active electrode that may include providing a flex circuit having an electrode made of a first material and providing a first mask over the flex circuit, the first mask having an offset region and
7183 1.DOC ECC-5884 PCT an opening that exposes the electrode. The method may also include depositing a second material over the offset region and the opening, the second material being different from the first material and providing a second mask over the second material, the second mask having an opening over a portion of the second material that is over the offset region.
[0005] The invention relates to an electrode that may include a substrate having a conductive trace made of a first material, and a first mask positioned over the conductive trace, the first mask having a first opening over a portion of the conductive trace. The electrode may also include a material of interest made of a second material and positioned over a portion of the conductive trace and over a portion of the first mask and a second mask over the material of interest, the second mask having a second opening over a portion of the material of interest, the second opening being offset from the first opening.
BRIEF DESCRIPTION OF THE DRAWINGS
[0006] The features, objects, and advantages of the invention will become more apparent from the detailed description set forth below when taken in conjunction with the drawings, wherein: [0007] Figure 1 is a cross-section view of an active electrode that is created using a flex circuit according to an embodiment of the invention.
[0008] Figure 2 is a top view of a flex circuit according to an embodiment of the invention. [0009] Figure 3 is a top view of a mask that is used to cover the flex circuit of figure 1 according to an embodiment of the invention.
[0010] Figure 4 is a top view showing one or more materials of interest deposited into and above the openings in the mask according to an embodiment of the invention. [0011] Figure 5 is a top view of a mask that is used to cover the material of interest shown in figure 4 according to an embodiment of the invention. [0012] Figures 6A and 6B are top views showing vertical and horizontal offsets according to various embodiments of the invention.
[0013] Figure 7 is a flow chart showing a method of creating the electrode of figure 1 according to an embodiment of the invention.
DETAILED DESCRIPTION
[0014] The invention is directed toward using a flex circuit to create an active electrode. The flex circuit has a copper trace that is masked and imaged onto a polyimide substrate. Flex circuits with copper traces have a low manufacturing cost The end of the copper trace may be plated with a first material of interest (e.g., gold). A first mask is used to create an opening for an active electrode. A second material of interest (e.g., graphite and/or platinum) may be deposited or screen-printed into the opening and on an offset region. A second mask is used to cover the second material of interest that is over the opening. A membrane may be placed over the offset region to form the active electrode. The second material of interest over the offset region acts as a diffusion barrier to prevent, for example, electrolytes from coming into contact with the copper trace. The offset region prevents the copper trace from oxidizing at a positive potential, such as would be the case for a glucose electrode measuring peroxide vs. silver-silver chloride for example.
[0015] Figure 1 is a cross-section view of an active electrode 10 that is created using a flex circuit 100 according to an embodiment of the invention. The flex circuit 100 may include a substrate 105, one or more contacts 110, one or more traces 115, and one or more electrodes 120 (705). For illustrative purposes, the contacts 110, the traces 115, and the electrodes 120 are shown as different elements; however, the contacts 110, the traces 115, and the electrodes 120 may be collectively referred to as traces and may be formed using the same material (e.g., copper). The contacts 1 10, traces 115 and electrodes 120 are masked and imaged onto the substrate 105. A mask 200 is placed over the flex circuit 100 (710). The mask 200 may have an opening 220 that expose the electrodes 120 and that receive a material of interest 300, which is used to form the active electrode 10 (715). The material of interest 300 is also deposited over the mask 200 in an offset region 305. The offset region 305 is shown to be adjacent to the opening 220. A mask 400 having an opening 405 is deposited over the material of interest 300 (720). The opening 405 is located above the offset region 305 and is used for placement of a membrane 500 (725). The opening 220 is positioned along a first axis or plane and the opening 405 is positioned along a second axis or plane. The first axis or plane is not coincident with the second axis or plane. Hence, the first axis or plane is vertically and/or horizontally offset from the second axis or plane. Figures 1 and 6B show a horizontal offset and figure 6A shows a vertical offset. The horizontal offset may be along the length of the substrate 105 and the vertical offset may be along the width of the substrate 105. The mask 200 and/or - S -
the material of interest 300 may act as a diffusion barrier to prevent electrolytes coming in from the membrane 500 from contacting the electrodes 120. The offset region 305 prevents the electrodes 120 from undesirable electrochemical activity. [0016] Figure 2 is a top view of a flex circuit 100 according to an embodiment of the invention. The contacts 110, the traces 115, and the electrodes 120 are made of a copper material and are formed on the substrate 105 using masking and photolithography techniques. The substrate 105 may be a flexible dielectric substrate such as a polyimide. The contacts 110 are used to connect to measurement devices such as a potentiostat. The traces 115 are used to carry voltage or current from the electrodes 120 to the contacts 110. As an example, figure 1 shows the flex circuit 100 having the substrate 105, three contacts 110a-c, three traces 115a-c, and three electrodes 120a-c.
[0017] Figure 3 is a top view of a mask 200 that is used to cover the flex circuit 100 shown in figure 2 according to an embodiment of the invention. The mask 200 may be made of a dielectric material such as a photoimagable epoxy or an ultraviolet curable epoxy material. The mask 200 has openings 210a-c and 220a-c. In one embodiment, the mask 200 covers the entire top surface of the flex circuit 100 except for areas that are above the contacts 110 and/or the electrodes 120. Hence, the openings 210a-c are positioned directly above the contacts 1 lOa-c so that the contacts 11 Oa-c are exposed through the openings 210a-c of the mask 200. Similarly, the openings 220a-c are located directly above the electrodes 120a-c so that the electrodes 120a-c are exposed through the openings 220a-c of the mask 200. Conventional lithography techniques may be used to deposit or place the mask 200 on the flex circuit 100.
[0018] Figure 4 is a top view showing one or more materials of interest 300a-c deposited into and above the openings 220a-c in the mask 200 according to an embodiment of the invention. The materials of interest 300a-c provide a working surface for the electrodes 120a-c. The same material of interest 300 or different materials of interest 300 may be deposited over each of the openings 220a-c. The materials of interest 300 may be an ink or material made of carbon, gold, graphite, platinum, silver-silver chloride, rodium, palladium, other metals, and other materials having specific electrochemical properties. As an example, a platinum ink or material may be deposited over the openings 220a and 220c and a silver-silver chloride ink or material may be deposited over the opening 220b. The one or more materials of interest 300 may also be deposited over offset regions 3O5a-c that are adjacent to the openings 220a-c but are not directly over the openings 220a-c. The size of the offset regions 305a-c may vary depending on the particular application and the arrangement and configuration of the electrodes 120a-c. In one embodiment, the sizes of the offset regions 305a-c are about 0.010 inches, 0.003 inches and 0.050 inches, respectively. [0019] Figure 5 is a top view of the mask 400 that is used to cover the material of interest 300 shown in figure 4 according to an embodiment of the invention. The mask 400 may be made of a dielectric material such as a photoimagable epoxy or an ultraviolet curable epoxy material. The mask 400 has an opening 405 located above the offset region 305. In one embodiment, the mask 400 covers the entire top surface of the materials of interest 300 except for an area that is above the offset region 305. Hence, the opening 405 may be positioned directly above the material of interest 300, which is directly above the offset region 305. Conventional lithography techniques may be used to deposit or place the mask 400 on the material of interest 300. [0020] Referring back to figure 1, a membrane 500 is deposited in the opening 405 and on the material of interest 300 (i.e., a working surface) to act as a sensing region. The membrane 500 may contain, for example, a glucose oxidase enzyme. The membrane 500 may allow molecules to pass at a certain rate so the material of interest 300 can accurately measure, for example, the glucose level in blood. That is, molecules in the blood can pass through the membrane 500 at a certain rate to the material of interest 300 for a specific measurement of the glucose in the blood. The membrane 500 and/or the material of interest 300 may be suitable for immersion into a fluid or solution containing species of interest (e.g., blood) and/or electrolyte. The contacts 110, the traces 115, and/or the electrodes 120 may not be suitable for immersion into a fluid or solution containing species of interest and therefore should be protected by a suitable encapsulant with appropriate dielectric properties.
{0021] While certain exemplary embodiments have been described and shown in the accompanying drawings, it is to be understood that such embodiments are merely illustrative of and not restrictive on the broad invention, and that this invention not be limited to the specific constructions and arrangements shown and described, since various other changes, combinations, omissions, modifications and substitutions, in addition to those set forth in the above paragraphs, are possible. Those skilled in the art will appreciate that various adaptations and modifications of the just described embodiments can be configured without departing from the scope and spirit of the invention. Therefore, it is to be understood that, within the scope of the appended claims, the invention may be practiced other than as specifically described herein.

Claims

CLAIMSWhat is claimed is:
1. A method of creating an active electrode, comprising: providing a flex circuit having an electrode made of a first material; providing a first mask over the flex circuit, the first mask having an offset region and an opening that exposes the electrode; depositing a second material over the offset region and the opening, the second material being different from the first material; and providing a second mask over the second material, the second mask having an opening over a portion of the second material that is over the offset region.
2. The method of claim 1, further comprising providing a membrane in the opening of the second mask.
3. The method of claim 1, wherein the offset region is adjacent to the opening of the first mask.
4. The method of claim 1, wherein the first material is a copper material and the second material is selected from a group consisting of a carbon, gold, graphite, platinum, silver-silver chloride, rodium, and palladium material.
5. The method of claim 1, wherein one of the plurality of electrodes is positioned along a first axis and the offset region is positioned along a second axis that is not coincident with the first axis.
6. The method of claim 1, wherein one of the plurality of electrodes is positioned along a first plane and the offset region is positioned along a second plane that is not coincident with the first plane.
7. The method of claim 1, wherein the first material is copper and the second material is not copper.
8. A method of creating an electrode, comprising: providing a substrate having a conductive trace thereon; applying a first mask over the conductive trace, the first mask having a first opening over a portion of the conductive trace; applying a material of interest over a portion of the conductive trace and over a portion of the first mask; and applying a second mask over the material of interest, the second mask having a second opening over a portion of the material of interest, the second opening being offset from the first opening.
9. The method of claim 8, wherein the conductive trace is made of a copper material and the material of interest is made of a material that is not copper.
10. The method of claim 8, wherein the first opening is positioned along a first axis and the second opening is positioned along a second axis that is not coincident with the first axis.
11. The method of claim 8, wherein the first opening is positioned along a first plane and the second opening is positioned along a second plane that is not coincident with the first plane.
12. The method of claim 8, wherein the offset is in a direction that is along a length of the substrate.
13. The method of claim 8, wherein the offset is in a direction that is along a width of the substrate.
14. The method of claim 8, wherein the conductive trace is made of a copper material and the material of interest is selected from a group consisting of a carbon, gold, graphite, platinum, silver-silver chloride, rodium, and palladium material.
15. An electrode, comprising: a substrate having a conductive trace made of a first material; a first mask positioned over the conductive trace, the first mask having a first opening over a portion of the conductive trace; a material of interest made of a second material and positioned over a portion of the conductive trace and over a portion of the first mask; and a second mask over the material of interest, the second mask having a second opening over a portion of the material of interest, the second opening being offset from the first opening.
16. The electrode of claim 15, wherein the first opening is positioned along a first axis and the second opening is positioned along a second axis that is not coincident with the first axis.
17. The electrode of claim 15, wherein the first opening is positioned along a first plane and the second opening is positioned along a second plane that is not coincident with the first plane.
18. The electrode of claim 15, wherein the offset is in a direction that is along a length of the substrate.
19. The electrode of claim 15, wherein the offset is in a direction that is along a width of the substrate.
20. The electrode of claim 15, wherein the conductive trace is made of a copper material and the material of interest is made of a material that is not copper.
PCT/US2007/004472 2006-02-27 2007-02-22 Active electrode and method for manufacturing it using flex circuit technology WO2007098187A2 (en)

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CA2630535A CA2630535C (en) 2006-02-27 2007-02-22 Method and apparatus for using flex circuit technology to create an electrode
DE602007006433T DE602007006433D1 (en) 2006-02-27 2007-02-22 METHOD FOR PRODUCING AN ACTIVE ELECTRODE USING FLEXIBLE CIRCUIT TECHNOLOGY AND FLEXIBLE CIRCUIT COMPRISING SUCH ELECTRODE
AT07751245T ATE468006T1 (en) 2006-02-27 2007-02-22 METHOD FOR PRODUCING AN ACTIVE ELECTRODE USING FLEXIBLE CIRCUIT TECHNOLOGY AND FLEXIBLE CIRCUIT COMPRISING SUCH AN ELECTRODE
EP07751245A EP1989930B1 (en) 2006-02-27 2007-02-22 Method for manufacturing an active electrode using flex circuit technology and flex circuit having such an electrode
JP2008556402A JP5207387B2 (en) 2006-02-27 2007-02-22 Method for producing electrode and electrode
CN200780001459.1A CN101356865B (en) 2006-02-27 2007-02-22 Active electrode, and method for using flex circuit technology to create the active electrode
AU2007217768A AU2007217768A1 (en) 2006-02-27 2007-02-22 Active electrode and method for manufacturing it using flex circuit technology

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US8065796B2 (en) 2011-11-29
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DE602007006433D1 (en) 2010-06-24
EP2131635A1 (en) 2009-12-09
CA2630535C (en) 2014-12-23
ATE468006T1 (en) 2010-05-15
US20070200254A1 (en) 2007-08-30
US20120037406A1 (en) 2012-02-16
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AU2007217768A1 (en) 2007-08-30
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JP5207387B2 (en) 2013-06-12
US8546701B2 (en) 2013-10-01
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WO2007098187A3 (en) 2008-04-10
CN101356865B (en) 2012-06-06

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