WO2007085015A2 - Acoustic energy system, method and apparatus for processing flat articles - Google Patents

Acoustic energy system, method and apparatus for processing flat articles Download PDF

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Publication number
WO2007085015A2
WO2007085015A2 PCT/US2007/060850 US2007060850W WO2007085015A2 WO 2007085015 A2 WO2007085015 A2 WO 2007085015A2 US 2007060850 W US2007060850 W US 2007060850W WO 2007085015 A2 WO2007085015 A2 WO 2007085015A2
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WO
WIPO (PCT)
Prior art keywords
assembly
article
liquid
flat
transducer
Prior art date
Application number
PCT/US2007/060850
Other languages
French (fr)
Other versions
WO2007085015A3 (en
Inventor
Fani Pejman
John Korbler
Mark Rouillard
James Brown
Chad Hosack
Original Assignee
Akrion Technologies, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akrion Technologies, Inc. filed Critical Akrion Technologies, Inc.
Priority to KR1020087020402A priority Critical patent/KR101369197B1/en
Priority to JP2008551568A priority patent/JP4959721B2/en
Publication of WO2007085015A2 publication Critical patent/WO2007085015A2/en
Publication of WO2007085015A3 publication Critical patent/WO2007085015A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Definitions

  • [0S>02j Tfa& pfss ⁇ n ⁇ ihveation relates ge ⁇ araliy to ⁇ e field of processing flat pli ⁇ ies uiife ⁇ g acoustic enekgy; ' sxid s ⁇ e ⁇ il ⁇ ?lly o isystetms;, methods m ⁇ ⁇ ippatstu$ ⁇ hst utilise acoustic energy, for cleaiimg Hat. articles, such as .sesibanductor wafes;;
  • energy wMeli t ypically comprises a iransdneer which --$--.made of piex ⁇ etecinc c ⁇ j r s ⁇ E5i
  • the t rarisdiscssr is coupieli o.apotwei' BOurceXi.e; a source of e&etrical energy).
  • An e.iectJ.icM energy signs! (!. «. eleeMcity) is. supplied- to he transdutcer..
  • ⁇ H is '' typically ⁇ a s ⁇ atisoidaiwaw ⁇ f ⁇ rm, supplied to he Lramducert from tho .power gouree- dictate he chatracteristics- of the; aeoustieal ⁇ eTgy generated- by he t tra ⁇ s&csr. frequency- m ⁇ fat power of he- eleetricalt energy signal -will Increase the: &ec[u ⁇ cy. " 3pd/or-po*vsr"ofthe:acQ-aSticaI Energy feeing g ⁇ nsrated ' by the-trausdue ⁇ r.
  • a ir&iistittc&r assembly is posifiDiieci adjac ' enti ⁇ one of th6 sarfacqjs of li ⁇ t ⁇ vafet so lmtat ransmtitter pdft ⁇ oii of fc ransdWstrsssetobly is hi cQiiiact ⁇ itlvthe : fil ⁇ - : of liquid by a piernstrus.
  • This transducer- assembly is operated at a siviSckm powei' tevei so -that -the generateci ac ⁇ usstic energy is passes hrough ihs, wi ⁇ &tt itself to l ⁇ osen partitoles Q ⁇ he optposite sii ⁇ faceof & wafer..
  • TtMs basie concept is one " ⁇ i he t sybject inventions of Ui y t ⁇ d- ' States Paieni. ⁇ > s Q39,05 ⁇ TMsj.dual-j*I ⁇ 4 cleamng-coaifepi is also shown a& h ⁇ igMttiz ⁇ and feop ⁇ ed m fee system disclosed in United i ⁇ fat ⁇ s F ⁇ t ⁇ it Application Publication 2006702782:53 ("Verfeaverbefcs ct -a!," ' ) ' with/the ransducer assemblty located adjacent t bhaeckside of ile ' Ratfter.
  • Ano ⁇ her object of ih& pxesent inventlo:n is to provide .
  • a system, apparatus atjd method for si ⁇ ilJitaneously cleaning both surface!; of flat articles, suoh ss- semiconductor wafers, TOth , acoustical energy.
  • Still another object of he pretsent indention is o provMs at system, apparatus. and method for ⁇ im «itaiiett ⁇ siy cieajjing both $ ⁇ irfaee&. ⁇ f flat articles, such as ' .semko ⁇ tfect ⁇ w& ⁇ fers; with ssoust ⁇ bal energy thai improves PKE &n ⁇ (o ⁇ vnta&es damage ⁇ . ⁇ e- IM -aMcfe..t
  • ect of he- pretsent invention is o ptoykia a-tsystem.
  • a yet further object of fee present iftveation is t ⁇ provide a system, ap ⁇ ratus-and- method that achiev:es ih&r ⁇ ase ' d ⁇ i ' q ⁇ d .coup.Iiiag ' between a raSsdacei 1 assemtbly and the bpitQffi surfjsee of a.f ⁇ at s ⁇ & ⁇ e.
  • yetaaothet o ⁇ ject of bet present Invention is o providte a systeaii, appamtus and melk ⁇ i thai particle, ssm ⁇ va ⁇ efficiency in a smgte-wafer. ⁇ ?leanlag systijm located mrthe opside of tthe wafer,
  • Still aoother object of fhe present inventioR. is o provide: at system, apparatus r ⁇ d method for applying megasqnic energy to hd backtside. of a tlatartkle.
  • first raatsducer t tfe ⁇ S-rsttitesducer assembly p ⁇ sitio ⁇ ved so . that when, he first s!i$jp«;it ⁇ iser : , £jp
  • the r ⁇ tatabls support a first meniscus of liquid isTormed behy ⁇ r ⁇ a poaios of ' &e first ranstmitter and -the first surface "of he Hat aiticlet; and a se ⁇ sd ;?ra ⁇ s ⁇ iucer assembly ijo ⁇ prisihg a second ransducert fo ⁇ gexierati ⁇ ig afcpustic eaergy :a ⁇ d.a second im ⁇ smittst acoustically coupled to the second tmnsdut*er * -the second ransducer t assembly positioned so.that • wiseivthfe secontl dispenser applies liquid: o the second surMt ce of :tfe fiat article -oh.
  • a. second small gap exists fcetwe ⁇ - ⁇ a porlion dftfae second ransmittetr and: a second surface of- he fiat atticls oft t the rdtatable . support ' ., a -second meniscus of jiquid bemg forrnedbetween ⁇ he portion, of the. second • rantsmitter and. the second. sui:i%cs:whe ⁇ i ⁇ q ⁇ is applbi to i3 ⁇ # second surface. [0023 j Itx ⁇ tt 6 ⁇ tiot6er.
  • Inventtion can be a system ⁇ br processing fiat articles comprising: a rotatabl ⁇ support for support iag and lOiatissgkiktatlielejn.
  • fCr ⁇ iSj fa a ftttthei*-emb ⁇ di ⁇ n ⁇ ot, fh$ myention ca « fee & laetjhcd of ma» «f ⁇ et ⁇ irihg ⁇ • tg& ⁇ dueer assemikly comprising.: providing. a par-cylin ⁇ 'tcal ⁇ nsmitter-p ⁇ ate: bottdlag oae oj more trausdxicers o t a coxu ⁇ x.ktierrsiirface of he itantsmitter piate; coanecting a housing .! ⁇ .
  • ile ikvtentjon can be a s ⁇ tem £ ⁇ r processing fiat articles com
  • Ihe/nveatton can. be.aine ⁇ liod ⁇ fproc ⁇ ssing Sat articles c ⁇ mpti'siag: . a) sti
  • Figure 2 is a pecspecti ve vj cw of one stract ⁇ al ⁇ nbodimcat of the aco ⁇ s ' fe energy cl ⁇ smng system of HIO, L
  • Figures is a fcross-secti ⁇ na! sid ⁇ view of he acoustict energy cleaai ⁇ g: system of FIGv 2.
  • Figure 6 is a ⁇ x exploded view of he ttanstducer assembly of PICnA
  • FIG. 4 positioned adjacent a bottom sarfsce of a setuiconductor wafer according to mi ambodimerstof the present. of ' ⁇ ;i ⁇ ,.4-is,3hovr ⁇ i ⁇ .ctoss-se ⁇ ion. f ⁇ 038]
  • Figure S Is a.sch ⁇ maiic..representation of one arrangement of the opside r&BSil ⁇ eet* t a ⁇ se ⁇ iiljiy relative ' to -tbhoett ⁇ m-Md ⁇ system of ..FIG ' . 2.
  • HM(IJ Figure 10 is a.sdiematic representatioa of am alternative ⁇ ttapgemesii of helopskfe t :!sa&$d «cer assembly relative o he btottotm-side transducer ass ⁇ i ⁇ My for ile acoustic gsergty cieaiii-xg svstem. of FIO-, 2:, fO041
  • Figure I2 is ; ,sJ?Heroatk of ah. aeoi ⁇ stic energy oleaiiiag.-sj'sSe ⁇ xi uti!iisii3g'a.reJlecth-'s ⁇ svefliijer according to ose embodh ⁇ teftt of itepresent layeiitipn,
  • -liiq jotatable support 10 is designed o contatct &nd engage only a perimeter of file substrate 50 m pprfom ⁇ ng its support femction.
  • iie :es ⁇ ict dettails of the structure of the rpMafole .support: IS are not. limiting of &e ⁇ res ⁇ »t r roventio ⁇ and a wide variety of oiHer st ⁇ port strtt ⁇ tva' ⁇ s can be.
  • t system 100 i ⁇ ohsd&g ih ⁇ ransdtucer assemblies 20Pj 300, can be c ⁇ H'espondi ⁇ gly .repositioned in- h#t system' so as to be capable of perform. ⁇ ng.tliedesir ⁇ dih ⁇ etio ⁇ s and/orthe.- necessary rei&tive-poskimmg with respect, o: other ct&xtfponfeiiis of (he system ss sfecftssed beio.w,
  • the r ⁇ twy support 10 is opemblv coupled o a ra ⁇ jsrt I !. :to; faiiilitate rotation of he t water 50 wjthb the borkontal plane of support
  • Thermotor ' ⁇ l is preferably a variable spieed j ⁇ ofer tfeaf ca» rotate h « stupport 10 at mi ⁇ dusked rotational speed ⁇
  • 'The.motai' 11 is eieGirica% and ⁇ perably coupled o ih.®t conirplier 12.
  • the cleaning -sysiena 1.060 further comprises a top dispeiiser 13 and ; a b&ttons dispenser 14.
  • the components .o:f the liquid -.supply subsystem 16 are bperably c ⁇ ri ⁇ ec-t ⁇ o and cotntrolled by hecoBtroUetr 12.
  • cfeaai ⁇ g system KHiO 5 bperably c ⁇ ri ⁇ ec-t ⁇ o and cotntrolled by hecoBtroUetr 12.
  • he liq ⁇ id reservtoir 15 will hold a cjeaaing liquid, suc& as for sample deio ⁇ zed waster (" ⁇ W M )» sfemdatci cleau T (VSCJ %sim ⁇ fc-&cIeM 2 ("SC2 ff ) s .
  • oz ⁇ Bated dei ⁇ nizesi Water DlO ⁇
  • dilute -or ultea-diluhs chemicals * m ⁇ /ot combinations thereof As used herein, he term "litquid ⁇ includes si least liquids, HquicMiqoid mixture* and liquid-gas, mktores.
  • Ix is also possible for certain other supercritical aml/ ⁇ r dense fluids o quatlify as Isqisicls ⁇ iccnain situations. f ⁇ #52] Faxths ⁇ ors, it Is possible o multiple liqmd ⁇ yjn ⁇ ' ⁇ s.
  • the op distpenser 13 and the bottom dispenser 14 can b ⁇ operabiy &n ⁇ ikucOy coupled o diffterent liquid reseivtr ⁇ . Tills wxnt ⁇ allow the application of different liquids to &e bottom surface 52 and die top surface 51 of the water SO if de ⁇ lr&l
  • the cleaning system W ) OO fitfthef comprises a gas supply subsystem 1? hat JS t operabiy sxi ⁇ fluidly coupled to a gas source 20,
  • the g ⁇ s supply subsystem 19 is operabiy and IMdIy eorm ⁇ oied to thoep ttransducer aEssamblj' 260 via he gas supplyt U «o 21 aaJ io th « bottom ttansducer assembly 300 via he gast supply Ime 22.
  • the gas supply $ «b$»5 sier ⁇ 19, w ⁇ ich is schematically iiliusrated a.v a box for purposes of simplicity, comprises die desired arrangtfment of all of he ntecessary pumps ⁇ ahes. ducts, connectors r ⁇ d&ciiiors for controlling the flow and transmission of he gast throughout ihe cleaning system 1000
  • the ditfXtx ⁇ n of hte gas flow is represented by tbj arrows on he supplyt iiaes 21,22.
  • the gas is supplied to he to he iop ratid t bottom U'sssd ⁇ oct assemblies 2 ⁇ , 300 to provide cooling and/or purging to he rgaaduccrs t t in fee assemblies 200, 300 hat cotnvert ⁇ e electrical energy into the ⁇ coysilc ⁇ aevgy,
  • the gas sjo ⁇ ret; 15 preferably holds an inert gas. sadi as ⁇ ilrogcu, heliuoj, carbon dioxide, etc. tkrwevet, the invention is not limited o thet use of an> specific gas.
  • Tlie cleaning 10110 further comprises a horircaiial actuator 250 that L. operabiy coupled to ⁇ he opt rantsducer assembly 280 and a veiti ⁇ al actifator 35 ⁇ that is opeiably coi ⁇ l ⁇ cito hte bottom ratnsducer &ssemt% 30 ⁇ .
  • the actuators 2SO, 350 are bperably coupled to and contorlled bfthp edntroltet i2: The actuators 250, .
  • the horjgp ⁇ tai actuator 250 can i ⁇ tizontaUy translate..th ⁇ : top tra ⁇ $dt ⁇ j».asssmoly.2 ⁇ O beweeB a retraced js ⁇ sittcn.and a processing jjositi ' oa. Wlie ' & m.the retracted posstiotu the toptransduce?
  • assembly 200 is- w.iti)dmwn ; s ⁇ i
  • a posuion. s «ssor-305 is pftjvkkci in fee cfeankg system l ⁇ .so that the position oi ⁇ t Kunststoff ⁇ ttom tes ⁇ uc «r assembly 300 cau.be ⁇ jE ⁇ qjiitored.a ⁇ d ' contrblJks ⁇ l ⁇ ffe ' ctiveiy • The positiofi/sensof 305 m ⁇ asi ⁇ fea thedista ⁇ ce between ths Bottom .transducer assembly 30Cl aij ⁇ t he bottom sudace 52 of ;$te wafer 50 so.thatthe proper distance between fee wo.esn.
  • position sensor 305 is op ⁇ rably and eoraniaqlcably coupled o Ae cootrtolkr 12-. Mors speci ⁇ csliy; hte posM ⁇ sensor 305 generates-a signal, mtiieative of he measured ditstance a ⁇ d tratisjtlits htis signal iaike coatmlkr J.2 for processing, WMIe ' fhe sensor 305 is illustrated as Wiftg connected o het botttom ransducetr assembly 306. Itt ⁇ a ⁇ be ⁇ tott ⁇ ied almost anywhere Ia te t cleaning system 1 100-so long as it can perform its position, indicating ' fimctiofr.
  • His oieaaiiig sysMii lir ⁇ alsd comprises as electrical .
  • energy signal sottroe 13 ⁇ i&i is ope.rab3y coupled o..&t « ap tratnsducer .assembly 20 ⁇ .aiid the bottom transdiseer ssseimbly 30JI
  • The: ⁇ ) ⁇ eirical energy signal iSOTrce.23 creates he effectricai t signal that is lransiliitted to the transducers (discussed later) in .the iop ransducert assembly.2 ⁇ m ⁇ he bottom.
  • Jh ⁇ conjroll ' er 12 will ' dicfate the &eQuency ; po%verieye.I f aod dumtioii otili ⁇ acoustic energy gesieraie ⁇ by fcstop rs ⁇ sdutcer a3s ⁇ ?sib!y : 2&0 m ⁇ he. bottom.:tfantsduc ⁇ t assembly 300.
  • Prs ; fe ⁇ ablj, t ⁇ ieeiectricai, energy sig ⁇ M source 23 is conMvUeci so hat & ⁇ t acoustic enqf-gy generated by the op ranstducetr assembly 20 ⁇ mi he bottom tantsducer assembly- 3.0 ⁇ has-a freqt ⁇ gncy in the aegasesiict x ⁇ gt.
  • Tiie.coatToIler llniay be a proceasor, which can be.asuitx ⁇ Ie microprocessor based programmable logic controller J: personal computer,, or he Kk. ⁇ ;ibr ptrocess control Hie e ⁇ titvoHer 12 preferably kcludes vaiious.mpt?t/ot%ut ; .ports Hsed a pro ⁇ de coat ⁇ ectlotis to ls ⁇ ; t various.
  • icomj3D.i6nts-of tiie cleaning system 1000 thattised o beiconCroOetd atid/ot GOTXunnBicateUWftu Thc eleclxical. a ⁇ d-'btcoffiinumcatbti connections areindkated fe dotted. Ike in HICi L : t3je cont?oik.r.l2.also p ⁇ eierab.iy comprises suffi ⁇ jienit.'memoxy ' o.- store t process.
  • controller 12 can eaimnumcate with, the various e ⁇ i ⁇ fiO ⁇ ieMs of he cieti ⁇ ing .system.1000 to automatically adjust process conditions, suoh as flowMss s rotatiqnalspeedj moyemsBtof the components of ⁇ ie cleaning t gvstsftv 1.000.
  • Tile fop dispenser .13 is positioned ah ⁇ o ⁇ e ⁇ ted.s ⁇ hat wheii a litquid Is. flowed : t35.ei;e%>ugh,
  • he. liquid is applied o he -top sturftace 51 of he ' substrate 50.t
  • he t Mihstt ate SO is roMirig;, iii ⁇ Hqtiud fomis ft kyeif or film of h ⁇ ? liquid acrtoss the efttiref y of the t ⁇
  • he bottomt dispenser 14 is- positioned a ⁇ i4 oriented .sothat.whea.aligiud is i ⁇ owed.iherethouglij heli ⁇ juldt is applied t ⁇ tht boiloto. siirfece 5.2 ⁇ f the substtatS: 50,
  • the substrate 50 is xotaiiag, tlii&- liqta ⁇ fom ⁇ st&. layer or Sim ofthe liquid across he.etntiretj- of tb.e bottoiti surfede S2 ofli ⁇ substrate ,5t0,
  • This gap 1 is fcufficienfiy small, so hat -whmth ⁇ Hqirfdt-is applied Io the fc ⁇ tt ⁇ ia s ⁇ sf ace 51 of he Wafert Sik ⁇ r ⁇ cr ⁇ sc ⁇ s of ijqii ' id is formed, between lie t boilottt sut ⁇ ace 52 of fte -wafer 50 and Hie portion- of he bottomtransducer asstembly 3jr ⁇ .
  • the meMscys is .not Mali fed .Many spedltc- shape;
  • FIG. 2 a preferred structural embodiment of he cleaning sytstem ! ⁇ l(! ⁇ Is jile&trsuxi. L&e numbers are used in FIGS. 2-14 to indicate he correspontding structural rosiatestaiiun of the seh «u»aucaUy illustrated components of FIG. L
  • he top ratnsducert assembly 200 campuses an elongate tod-like ratnsmitter 2 ⁇ i that is acoustically coupleU to a ransducer 2t03 in PIG 3) that ss located withia housing 202.
  • the tap ransducetr assembly 206 is op ⁇ rabK coupled U) fev asaembly/ac ⁇ iator 250 that can a ⁇ ve thet rod- like ransmitter 2t# ⁇ betwven a retracted poiiuon ami a processing position
  • the iOd-iike ransmt itter 201 Is located outside of he process botwl 203 so that a wafer 58 can b& placed on the roiatablc "support 10 wUho ⁇ t obstruction Mere spocificall>s t ⁇ ic drive assembly 250 withdraws he rod-iitke &aa$n ⁇ rt «r 20 ⁇ lhrougb an ope ⁇ kg in a side -vv ⁇ il of ihe process bowl 253.
  • the od-liks t transmitter 201 When ia he piocessti ⁇ g position, the od-liks t transmitter 201 is position directly above he opt surfatce 51 of a wafer SO on the rotat ⁇ ble support ⁇ 0.
  • the rod-like ratnsmitter 201 is in he protcessing position m FKJ. 2.
  • the bottom transchiccr assembly 300 ⁇ s located at lic bottom otf he process bowtl 203 at a po$ ⁇ ti ⁇ » b ⁇ ow he rt ⁇ *tstablo support 10,
  • the bottom iransdueer assembly 3 ⁇ comprises a 4&m 361.
  • a raBtSBiitS.et' 302 axxl a baso 303 *
  • the bortosi dispenser 14 is in the form of a pJuraliij?
  • the rotstable support 10 supports a wafei 50 m a substautially I3orl/onta1 orienlatfoa in he gtaseous, atr ⁇ ospher ⁇ of he process btowl 203, ⁇ which st.trrott ⁇ ds the periphery of het wafer 58.
  • the rotatable support 10 is npsrab!> connected to the motor assembly Si.
  • the motor assembly rotates the wafer about he central t &sis.
  • 'S he motor assembly l ⁇ can be a dircol drive motor or a bearing with ofl ⁇ sct bell/pulley drive.
  • the roiatable iupport 10 supports the wafer 50 at m elevation sad postUoti between tlie elongate red-like rantsmitter 201 of the op ttsii ⁇ tvf ⁇ csr assembly 200 and he ransmitter t t 302 of the bottom rantsducer assembly 3IJ0.
  • W h&tt he wafer 50t is> so supported, the transmHtcr 201 of the op txtansduccr assembly 200 extends in. a substantially parallel onentatioa os er hetop sturface 51 of he wafetr 50 in a close spaced relation, Si ⁇ nikrfv.
  • assembly 300 extends in a substantially parallel ⁇ dentation below Hie bott ⁇ m-sur&ce 52 of he wafetr SO hx & class spaced, Matioa, T ⁇ sese close spaced, ⁇ relations are- such thai vvtei liquid is applied o &e io
  • Tire: bottom ranstducer assembly 309 is opersbiy connected o the lifier/act ⁇ tsator,35 ⁇ .
  • the litWaetaator 350 ca.it ts ⁇ a :p ⁇ e «aiatic lifter aid c&n also c ⁇ ipd ⁇ e bracfefe TIie lifts? 350 can laov. ⁇ th ⁇ bottom ranstducer 300 assembly bel ⁇ -yee ⁇ a processing positioa &n ⁇ & retracb4. position.
  • FIGSt, 4'7 ' ⁇ oneurfeatlyi. tite ' bdtoin tamducer assemtbly 300 is illustrated remov ⁇ iitom l ⁇ t.. ⁇ leam ⁇ ig syste ⁇ j .1.080 so feat its details are visible- It should & tuidetstodd thafthe .bottom ransctluder-assembly 30 ⁇ , in an ⁇ l of itself,. Is.a Royeldevice ihat cr ⁇ constitute an siabodiment of the invention.
  • the bo ⁇ om.traosduicer .assembly 300 comprises a baso stocmre 303, a housing 304, a tjanssstiitter 302, a faasdtucer .305 and a flam 301.
  • the base structure 3 ⁇ 3. is preferably ⁇ & ⁇ e- ofF.TFE or other nos-c ⁇ ' ntamiRati ⁇ g.matedal that is suitably rigki Tiie.base structure 3.03 ' has a fop convex surface ilmt is a genera! Iy par-spherical shaped.
  • the base structure 303 connects ' Hi and supports ' ' the- remaining ciMparoTits of fiie : bottom ransducer assemtbly 300
  • The.base structure.303 also comprises a plurality of liquid dispensing holes/nobles .14 hat: t are/adapfed o stupply s filttv of liquid o ⁇ e l>tottoto- surface of a wafer dm ⁇ ng proeessmgv
  • the transmitter .362 ' . is -a generally par-cyiindricai shaped plate havi ⁇ ig a convex outer surface 306 ⁇ d a ⁇ ncave fonef .surface 307, The iraa&riilfer 302. ⁇ however, ⁇ a ⁇ ia&e on a wide: variety of o ⁇ r. shapes. a «d sixes. Tlxe ransmittert 302 cart be constructed ofaay materia!
  • One suitable awii ⁇ is . ⁇ aluminum.
  • the transducer 305 ss acoBstlcallv coupled o he ! . tratnsmt itter 302 so baf acoustic Metrgy geneyrated by the tmisducer 3#5 propagates, hrough thet trahsmiite 302 and to he wa&r 50, t More specifically., -the coiwex.ttpper-s ⁇ face 398 of • the.tr ⁇ csducsr 3 ⁇ 5. is b ⁇ ncicti o.ti ⁇ e.
  • ⁇ iM ⁇ & he btbtfom rted ⁇ tcer assembly 380 Ls illy ⁇ trated as utii izmg & single transducer 30S 7 a plmr ⁇ iity of transducers .-can be usecl.if desired b create he acoijstic- t energy, Freie.mb:iy,.the l ⁇ aj ⁇ sduc ⁇ r 305 is. adapted t ⁇ generate ⁇ iegasosic. energy.
  • Tlietran ⁇ mitt«r 302 is connected o:thelioutsiag 304 SQ as ⁇ o foit ⁇ .
  • a substantially enclosed space 310 m wliich tlietfaiisducer 305- is locjtiski. Any s ⁇ it ⁇ lem.eans cm be used to coa.ft ⁇ d : the housing ' MA o ⁇ he:tot msimitt ⁇ r.302 s including- adhesion, h$at. welding, fnsfesn ⁇ s or-a- ⁇ ght-fit ass&nbly.
  • ⁇ plunility of :ope ⁇ mgs3li are- provided is he bottomt pc ⁇ M ⁇ of he t housing 304.
  • ' Hie rpetnmgs 311 are provided ⁇ aHow ' st.gas-.to.Ve Mrodttced ⁇ it ⁇ tsx ⁇ or out ⁇ f . ⁇ e : space 31.0 so. hat .thet p ⁇ sduceit?: ⁇ can bs. pooled *uwl/.ar purged.
  • Tli ⁇ or>onkgs 31.1 are.o ⁇ e ⁇ t>ly €onix$cte4:t ⁇ li « g3t ⁇ ⁇ o ⁇ oe : l ⁇ as des ⁇ .nbed : m F10. -1.
  • Jhe.liQ ⁇ sifig-304 a3so comprises an dpeRMg'3.!2.
  • ibr alknvijhg the electrical cotiQectio ⁇ ss ( ⁇ ,c...wii ⁇ s) l ⁇ &iare t necessary ' o ptowi* ithraensdu ⁇ er, 3 ⁇ S to pass into the space 310.
  • This ⁇ pe ⁇ uig 312 eaa also b&uso-Ho allow het gas o estcape. he. spacte 3.1.0.
  • the housing SM can ske on aivitfe varitety of shapes arid structures aiaHs not limiting of he presentt devison. In some- emb ⁇ dimeats > the. housing may be .merdy s plate p.r. other simple structure.. f 06.79] M: ⁇ rder o futrther protect lie wafetr SO from possible ccntamir ⁇ tion ⁇ once fee transmitter 382 is conae ⁇ tedto tlie.
  • This atlso serves to protect the t ⁇ s ⁇ rsitfer 302 from ⁇ hemJcai .attack.
  • t& ⁇ tonsmilter 302 ia-:so ent?apsa!ated ' .a ⁇ d/ «r coated ⁇ he e ⁇ captsalatioii aiid/ ⁇ r coaling is considered psst ⁇ £ the traQsmltier.302, : ;
  • the dam 361 forms a liqitM. retaining cfeaiJne!-3.i5.on both sit ⁇ sjs of the rantsmitter 302..
  • the d ⁇ 301 is a rectangular Irame-lik ⁇ siructurs ia ⁇ ez& iaks. :on other sJiai3es.
  • the dam 301 also does a ⁇ t have.siifrouiic! the entke pariphei-y of he ransmittert 302t but can surround oo.lv s.small portion if desired.
  • t ⁇ ie materials chos;en is c ⁇ etuicaily resis'tot and nieehamcaUV stable.
  • ⁇ h antmgemeni is illustrated wherein the ransmitter t 2Ot of the otp ⁇ ms.du ⁇ er:assembly;20& Is aligned wife sipd; opposes, he ra ⁇ ss ⁇ tter:30t2-.oft tS.e bottom transducer assembly 300,.
  • a wafer'S ⁇ is illustrated as beiiig 1 « between " he assemblies t 20Qi.300.
  • liquid 70 Is applied o thet op surftace 51 of thewaft'r ; S ⁇ i ⁇ .menis « ⁇ ?s of liquid " 72 is Formed f ⁇ twee ⁇ a bottom portion ' 2 ⁇ fpf the ransmittert 20i of ih ⁇ Hop ransducer t assembly 206 and iretop sturface Sl of the- wafer 50 * Smdlsriy, as liquid VO. is. applied tb he t bottom, surface 52 of the- wafer 50, a me ⁇ ika ⁇ iis of liquid 7 ⁇ is formed: between the.lraasmHter 302 of the.
  • bottotn ti'ai ⁇ s ⁇ eer assembly 300 Md he bottotm surFace.52 of the *-v-a£er 50.
  • it is possible iki he ac ⁇ >usttic etnergy thaih gsaei;afe.d : by he otp mt ⁇ bottom.tia»sdwcer assembli-es ; 2 ⁇ 0 5 300 and raasmitted o die- t t wafer via flte ⁇ temscuss ' ?”.
  • > 72 can k ⁇ tefere with and/or cancel o
  • Tlius 1 ⁇ 8S] Tlius, it may be des ⁇ ⁇ ahie, : m. certain mstsnces, ⁇ o.opei ⁇ te ite.t ⁇ p m ⁇ bottom t ⁇ a ⁇ sducet assemblies 200,300.1 « mt alteraafing and/or coasecutive .mai) ⁇ .er .during a wafer ⁇ leaamg. eyek. IB other ⁇ 5mb ⁇ dimcms . , one ma,y want to.
  • WMIe fee feoimmlal -angle, of sepat-atfei ⁇ etm ⁇ en t ⁇ & top mid botto ⁇ i ' fraiisMitters 2OJ, 302 is : 90 degrees.
  • the .cleaning system 200$ is identical o t U9t pfciearskg-.system 100& except hat het boUotm ⁇ T8»sducer assembly ⁇ s..t ⁇ laee8 by a reflective .member 4 ⁇ O. IJ? fact, in soiae e ⁇ ibodime ⁇ ihe reflective member- 40,0 co «ld>ea transducer assembly, such as he onet describe above* hat Ia not acttivated. Hmvevsr, life rafcdve member 400 is not go: limited andean, takeon ar ⁇ u ⁇ h broader variety of sta#ires.
  • Tho. reflective member 490 could ' he .a aiere plate o.r o&er str ⁇ ct ⁇ re.
  • the i-oilecthe.meitiber 400 sS i ⁇ ade a iiiafeiial thatliiig m afeoxistkallmpsdatice • value (&) hat.is t much greater t&& hatt of -water.. Ih o»e embodiment; it is preferred hat he acoustitcal t impedance value be at least greater .than 5.0 Mray ⁇ ,, suct? as quaiti.
  • ⁇ m be preferred thst-peteiiecth ? ⁇ .msMbef 400 be spaced from ⁇ .e s.ur&cc of the wafer 5ft o which Jt is t .ff ⁇ id ⁇ y eoupM by a distance hat:t is a one-fourth jM ⁇ rval of the wavekngth of 11 & a ⁇ mrsti ⁇ eaergji ' bebg. generated by he otp ⁇ t ⁇ nsdtuc ⁇ f assembly ' 260. Iii.soBig : a .
  • Th&m&tm ⁇ te chosen are based ' upqntfasir respective, acoustical tispedanca ( ⁇ 4).
  • Table 1 (butew) provides a list of materials and he Zm atssociated wtditbar ⁇ .
  • the units for 21s ate Mrayl >f t (Jk-gAn ⁇ S'S 1.0** ⁇ .
  • Ac ⁇ >Usiical e ⁇ rgy : traj ⁇ smission is aJTe.cted by fhe d ⁇ ffere ⁇ ces m if ⁇ 2# of he t ⁇ Mt ⁇ kxU feoiigh which tlie acoustical r ⁇ ergv must pass.
  • i ⁇ s discossad above t sheeilective.mambej 1 400 Is made of &.amterMwith a Za ⁇ iatis. greater t tliaittile. IliiM thx o ⁇ gh. which .tlie actuistieal energy is ransmitted.t
  • the 7M should be g ⁇ satertha ⁇ 5 KfoiyL a ⁇ jd more preferably greater thaa 15 Mtayl, such as qnajt ⁇ .
  • the yei ⁇ ective m «ntber 40 ⁇ may fee hollow m prefer o create aiti addMo ⁇ lal o-aiisitional space that causes hte acoustical energy to be r ⁇ tlected agam 85 it passes tlirpiiglj the reflective r ⁇ ensW 400.
  • hte cleaumg pr ⁇ cess here ' mtay be contiiiuous refiectl ⁇ tV between he ' wafer .50 t and tile refieo ⁇ ve mferiifear 4 ⁇ $0 atid it may continue until he acousticalt energy ⁇ balissesja the. system.
  • This embodiment operates iamuph te same; fasthion as he t embodiment shown Hi flQ> 12 except wilts tbs.i ⁇ fl « ' ciiv ⁇ ' memher 400 and he temsd ⁇ eer t assembly 3Q0 bemg reversed..
  • the ubyt ⁇ t member can be niade ⁇ :f qisatts, plsstic ⁇ m ⁇ s, or ottiet materials, tf ⁇ se t ⁇ ular members 5(WA-F; will havedii ⁇ ere ⁇ i ei ⁇ eots on the t ⁇ smission of hte.sc ⁇ dsticai ⁇ sergy/ Bis tubular jiiembers SOOATE modifleX ⁇ s may be oylmd ⁇ cdly slisped, natngular.
  • K should b& undoistoocl that other shapes may be -used and-ars not limited,o hose shotwnt, the selection of he shape ⁇ ay t vary depending upo ⁇ ' tlie desired results,
  • wtafk- ⁇ O OH thedpposite sidehe gap betwteen he reitecdye ⁇ fet ⁇ iber 4t>0a ⁇ d het wafer ⁇ % may be s ⁇ tm LO -wavelengtH (Le, even) i» orjlero erfaauoehe t t ⁇ ref ⁇ ecii ⁇ n ⁇ toperty so as io. keep ilie.tj-a ⁇ ismission of a ⁇ isl ⁇ cal energy directed, towsrcls he t boifqji? -surface St- ⁇ i the waferSft.

Abstract

A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively in one aspect, the invention is a system for processing flat articles comprising: a rotatable support for supporting a flat article; a first dispenser for applying liquid to a first surface of a flat article on the rotatable support; a second dispenser for applying liquid to a second surface of a flat article on the rotatable support; a first transducer assembly comprising a first transducer for generating acoustic energy and a first transmitter acoustically coupled to the first transducer, the first transducer assembly positioned so that when the first dispenser applies liquid to the first surface of a flat article on the rotatable support, a first meniscus of liquid is formed between a portion of the first transmitter and the first surface of the flat article; and a second transducer assembly comprising a second transducer for generating acoustic energy and a second transmitter acoustically coupled to the second transducer, the second transducer assembly positioned so that when the second dispenser applies liquid to the second surface of the flat article on the rotatable support, a second meniscus of liquid is formed between a portion of the second transmitter and the second surface of the flat article.

Description

.ACOUSTICC lNERGΫ SYSTEM, MJ£TH0» 4N'D APPAHATUS...FOR PROCESSING
FEAT ARTICLES-
€røss-IMer&αefi øt Related Patent AppiieafioBs fWMH] The preset patent 'application cMms hp benetfit of United States Provisional.?ate»έ AppIieatκm S£rial No.. (50/760,820, filed January 20, 2006; united -.States Pioylsioiial Patent Application. Send No, 60/837,965., fifeMsgust 1-6, 2006* I Jmted States ProvMoifsalPateat Application Serid'No. 6D/S5.0s930s filed October .11 , 2006; -United .Statøs.'.Ftøvl;ssαaai Patent Application Serki.No. 60/885^7S; filed. January 225.2007; and United States. N*n- Prqyxskmaj Patent Application Serial Mo, ΪI/&2S,5Sόy iled Ja&uatiy;22,.2Q07s the en&tetleg of ytfϊish afe hetrøfe}* ύtcorpprated-b.y rsfejrence.,
Mεsld.of hte lavenliost
[0S>02j Tfa& pfssύnϊ ihveation relates geαaraliy to ώe field of processing flat pliαies uiifeϊήg acoustic enekgy; 'sxid sρeθilϊά?lly o isystetms;, methods mά εippatstu$ εhst utilise acoustic energy, for cleaiimg Hat. articles, such as .sesibanductor wafes;;
Baekgroaad of #e Mve»tfoa
[δøOSj . Iu the ϊve&d of ^emiQonduςtor niaπufacturingj it has be.eh.. r^eόgπized imiea fee t beginning of ifeebdusttythatremoviitg psriicks ϊto.m semiconductor wafers dtmtig he t laanafactøiag. process is & critical reqύirejϊietjt o producting quality ptofitabie wafers. WMIe Many different systems- snϊhnetliøds have bse« developed over the years- iα remove ppticles .fXoiϊvsεaikoπaϊϊctorvvafeκ?, mmγ offliesε systems; and aie&ods arø iuϊdesirabie because hey t .damage the. wafers- Thus> tlie removal of particles ItQiά wafers, which isWferi jneasured: in terms of itie paniøle- removal efficlency:("PRBrt)f must be balanced against he amount of' t damage caused to he wt kf4i$ by the dearaήg mefliod. amϋot systsm.. It is tϋierefore desrøbb fe ■& eiδaniag. πnssthod Of system :to be able to. toδk- particles fee from hfe delkatέ t seniicoftductor wafer without .resulting in damage o: he devitcest- on he WS£QT surfacte, fϊ)OΘ4| Existing ectlinlques.fer ii-eemg lve partitcles from the surface of a semiconductor- Wafer utilize a combinatioii of chemical and mechanical processes. One ypical eicϊsumtg. chemistry nsø&iα the sxt is standard .clean i ("'SCI"}, ΛvKieins a iiii?εt«re αfJUBsionka. hydroxide, B.v.drt)g«n- peroxide, and water. SGΪ oxidizes and etches the -surface, of he wafer. t This etching
Figure imgf000003_0001
as άiidercuttings reduces ;&e physical-contact arcs of he wate.r t Si5rfsce to WMcB. ώe. particle isi)ovui<!S:tiius aciHtating.όatse of removal .Hόwsv&ϊ a piatksniieal proses, is still reqtiirscl to 'actually' rέtHOVe' the parfele ϊjoffi. the- \vaic? surface. |0005| Pot' larger particles atod for larger devices, scrubbers have historically bees used o t physically brush the; particle off he surtface of he wafer.t However,, &s devices sh∑Mfc is size-j. scrubbers and otbsr feiias of physical cleaning became mackquate because heir physics!, t costøct with th§ "wafers began o causet catastopMc-dansage to he s.mailer/mMt aturiκ«d' •devices.
[OOO€] Recatlv, het. applkation.of.somc/acoustipate.ne.rgy o the. waferst during chemical processing has replaced pHysical scrubbing to: effectuate particle removal. TBe. terms "apolitical" and "sonϊq" are. used interchangeably throughout his applicattion. The acoustical energy ϊtseiiin substrate prøeessiβg: is generated via a source βf acoustic^! energy wMeli t ypically comprises a iransdneer which --$--.made of piexόetecinc cτjrsϊE5i In operation,- the t rarisdiscssr is coupieli o.apotwei' BOurceXi.e; a source of e&etrical energy). An e.iectJ.icM energy signs! (!.«. eleeMcity) is. supplied- to he transdutcer.. The-trsns'ducer cottverfe Ibis electrical, esergy ήgnύ mtombtaiioitu .πiecfeatiical energy (i,fe. soBic/ac6usticaI eaet^y) Whiόh is hteft rantsmitted to he subtsuafe^s) being processed. Characteristics of -the dectricai energy s3gnai,Λ-γ|φH is'' typically ψ a sϊatisoidaiwawέfόrm, supplied to he Lramducert from tho .power gouree- dictate he chatracteristics- of the; aeoustieal ώήeTgy generated- by he t traήs&csr.
Figure imgf000004_0001
frequency- mάfat power of he- eleetricalt energy signal -will Increase the: &ec[u©κcy. "3pd/or-po*vsr"ofthe:acQ-aSticaI Energy feeing g^nsrated' by the-trausdueδr.
|0007[ Over iπt.?e, wafer clraiύng utilizing acoustical, energy bkεaraa-thfc mosteffective
Figure imgf000004_0002
Λcousilosl energy lias proven ot b<? ail eiXecth'e wayto xemove particles, but as With any mechanical process, dajtimge Is possible &nά seoBs.tied cleaning is faced wj.tltthe same damage ϊssυes ss iMdiiioϊipl ;physiϋal. cl§ahing-ϊt.ethdds &aά apparatus, .fe the. past, Φtøamϊtg systems utllixmg. a»3ustical«8.e?gy \veρs designed σ procests semicόsdύctor wafers .b batches* typically clεaόiag twenty-Sye mtbstrates at once 'Hie benefits of batch ekaαing bebamε-.iess important as the size of siibsti'ates and ■the-' effectiveness of single-wafer ckamng- systems mcrc^sed. The greater value p.cr semiconductor wafer and five more 'delicate nature -of the. devices resulted in-a ratnsition .lathe Industry toward :singis*vyafer procsssing eςiύpmeni;.
[0ΘO8J .AΏ example of a siugk-wafej oleaniπg. system liat utilizes mtegssbxύc energy is disclosed m.'Uuitea Stag's Patent 6,039,059 ("BtM"), -3Bsued.Matdi 2U X®% aM Unitecl States ϋϋtent 7JD03.504: ("Lαuerhaas et. aL"), issued Sβøtepbw 5, 2006, Ke'emii-cfes of t ■which ate hereby iBcύjpόrafed by reference herein ϊbe -.singles-wafer cleaning system fh»t «• the subject of Uύitecl.SMss !Patent:&039,059 and ttøed; States Pateπl; -7,1003,304 is cojϊϊmei'dafe<jd by Akriøii, foe. ofAiteήtqxvn, Pennsylvania under he name MtGoI8fsnger®'." Other, examples of ■s'isgk-'wafer cleaners hat .utilizet acoustic energy-ate disclosed in 'United State Patent 7?]45S286 ("Eeck-.et al"), issued -December 5, 2006, Uήited.Sia&s Patent 6,539,1952
Figure imgf000005_0001
ls$md April 1, 2003, and Unitea Siates Fateήt. Application Pubircation 2506/D.278253
Figure imgf000005_0002
14,:2OP6. lift single* vva&r acoustic <s!εaniag s γsimns, suck as he bp.es- meitiφQed abbre, a seinlcondactor v^tfer is' suppor^d mύ .rotated HVhorizqmaiorieβtation while a iloi ef Htq«id is. applied o one or botht ud&sfmfuicvs of fheΛvafer, A ir&iistittc&r assembly is posifiDiieci adjac'entiό one of th6 sarfacqjs of liθtΛvafet so lmtat ransmtitter pdftϊoii of fc ransdWstrsssetobly is hi cQiiiact ^itlvthe :filπϊ-: of liquid by a piernstrus. ol'tfø jiqαid Tlmtfaiisducer.asseaibly is activated άxMxiβ, het rotation' of he Wtafer, hereby stubj.aetis)g he vvaler to' hte acoustic eaergty. genraated. by'; the tratisducer assembly..
I'OOOtl Nonetheless, 3i.eintd«stry!s mnsttioή tøt he below 100t .n;ni devices has resulted is :add.Hiooai.cIiaIIøftgea for .maKαfeeiurδrs ofssffiicoπdaciorproeessmg eφiipsϊicπt the deahing process is no different As-'a. result of he devictes becoiniήg. more ψiά more .miaiattufeed/cleaniiixess retiuiriemrøis. have also become uicjreaskgly ϊmportaat-and strit?geκt. When <fijaHϊ3g withiedueed size devices, the -rafiϋ of he size of'ϋ eαtπtjϋniTtant cpmpareci ot het ;§fee of s device is gtøatef, f efeύitύig. in sn increased likelihood that a coniamujaie4 device will not "lunctjojtt propcjriy, Thus, -.increasinglv stringent cleatiliπ^ss and PRB
Figure imgf000005_0003
ate: needed* As a t%sult iϊflpϊόved semki?ftdiκ;tor wafsr. processing tecMϊc|yέs itiatrecluSe l?s t p.φpxiπt.aπd siz« of ke- cqntamtmatits:present during, wafer-- production are highly desired.
I0i Q] As a result of.&se-iBCueasingly-stringeat-pleaniiness .and PRB •requiren'ssαis, .ϊhs- ■ jemάval of p&t ticks fi'om both ddes/stϊrfac'es of &ei..wafer 'have been-disfovsred by the- preseat inventors o bte..ρiaχing an inbreasmgly.importaαt iύle io.acliievmg high yields, In existing single-wafer systøms,. removal of .particles .fi-dm.bαtb surfaces of he ssmlboπcbctotr wafer dtu-nia. s e&aaiήg-cycle are.' achieved by providing a single ransducer' assetmbly adjaoβni'to oαs of th seur&ces of |x? . watfer. This transducer- assembly is operated at a siviSckm powei' tevei so -that -the generateci ac^usstic energy is passes hrough ihs, wiά&tt itself to lόosen partitoles QΆ he optposite siiαfaceof & wafer.. TtMs basie concept is one "όi he t sybject inventions of Uiy tεd-'States Paieni.<>sQ39,05^ TMsj.dual-j*Iφ4 cleamng-coaifepi is also shown a& hύϊigMttizβά and feopϊed m fee system disclosed in United iδfatέs F^tαit Application Publication 2006702782:53 ("Verfeaverbefcs ct -a!,"')' with/the ransducer assemblty located adjacent t bhaeckside of ile ' Ratfter. fόøϊl] Despite litεie adv^mesaieiitS' in mig\$~wφrsy$pø^mιά mQthoUB iøτd&&pmg'hϋϊk sides of the wafer, herte ..-still remams a need for singie~\vafer. systems hat can ;ackievs t • improved F31E with misSϊtJsted'devie'e'dsjϊjage, FurthemiotCi lie, continuedt miniatiti-feation- of .dsviees.co.tttbues to 'render esisHøg cka&Ihg systems iti cφiable.cif .achieving ait acceptable balance between liϊgh PRB and minimi^d . device damage.
SUMMARY m XEE INVENTION'
|($.i2.| Ii is, iiiersCore a« object of .the pt^sentim^nitionlo provide si systesi, apparatus and method &t processing' itatartidssv such as semicoackttor wafers, vάih acoύstjcSJ- energy.
[00i3.| Anoϊher object of ih& pxesent inventlo:n is to provide . a system, apparatus atjd method: for siπilJitaneously cleaning both surface!; of flat articles, suoh ss- semiconductor wafers, TOth , acoustical energy.
100.14} Still another object of he pretsent indention is o provMs at system, apparatus. and method for δim«itaiiettαsiy cieajjing both $ϊirfaee&.øf flat articles, such as'.semkoπtfectø w&ϊfers; with ssoustϊbal energy thai improves PKE &nά(oτ vnta&es damage ό.ώe- IM -aMcfe..t
[90.1 Sj Yδt ^otlser Qb|ect of he- pretsent invention is o ptoykia a-tsystem. apparatus aiid ■jaethodfor applying acoystlosl energy o ihe:btottom surface of a otatmg flat strtacle.
|flθϊ(>| A .fctlher oBjsct of Hie present Invention is to provid.e.a system, appataais-and metltod for simαlt-aieøwsly cleasitig- bolh: s'urfaceέ of iht articles, such as' seπtifcdaliictό? wafers, hat t utilize acoissfic ^3ζrgy rs;fleetiθ5i;
[0OI7J A still Tijrite objee:t:όf te ptresent inveation is to proylde ύh 'zφpnτ&Xxii md metiiod Ite-ailows existing skgle-^^lsr cleaners o bte. retrofitted o ach.ietye..fmproved cleaning of •both surfaces of tits wafer,
(ODIS] A yet further object of fee present iftveation is tø provide a system, ap^ratus-and- method that achiev:es ih&røase'dϊi'qώd .coup.Iiiag 'between a raSsdacei1 assemtbly and the bpitQffi surfjsee of a.fϊat sϊ&ϊe. ψ6l$] yetaaothet o^ject of bet present Invention is o providte a systeaii, appamtus and melkκi thai
Figure imgf000007_0001
particle, ssmøvaϊ efficiency in a smgte-wafer. <?leanlag systijm
Figure imgf000007_0002
located mrthe opside of tthe wafer,
|0U20] Still aoother object of fhe present inventioR. is o provide: at system, apparatus rød method for applying megasqnic energy to hd backtside. of a tlatartkle.
[002.1] These: jmd otfo* objects ate- snei by t&s present mγeπdoiιf -which in. oπέ embodiment of ' the invention can bs a system, for prαcessiαg iat articlets comprising: a rotattible support for supporting .a flat article; a first dispenser for applying liqύύ o a fet .siitrlace of a lϊatartϊeie ■.όii hte røiatablε support; a second di'speiiiser:lbr applying liquid- tcsra 't&ifmύ surface- of a Hat ariicle on ilae rσtatøblε-sxipporf: -a ilrsϊ πinsducetr asserøl1|y.eoτ5i.paiBmg s.Ststivaβsdυe-er fgt generating acoustk- aήerø ami a Bxsi toJisMitter acoustically coαpled o fha. first raatsducer, t tfeø S-rsttitesducer assembly pόsitioϊved so .that when, he first s!i$jp«;itτiser: ,£jp|ϊlies.1iqo1d..to;ih« first -surface of s.fiat article on. the røtatabls support, a first meniscus of liquid isTormed behyørø a poaios of'&e first ranstmitter and -the first surface "of he Hat aiticlet; and a seεόsd ;?raβs<iucer assembly ijoφprisihg a second ransducert foϊ gexieratiϊig afcpustic eaergy :aπd.a second im^smittst acoustically coupled to the second tmnsdut*er*-the second ransducer t assembly positioned so.that •wiseivthfe secontl dispenser applies liquid: o the second surMt ce of :tfe fiat article -oh. the rotatabls sapport, a second meniscus ø£ liquid is fom$ed betwe*js a jκMfo.« of -the second ransmt itter a»tl:ttie second surface oflbe. ϊlatMtc-k-,
|90.22] Irs. aaother atabodihieπt, the' invention. oaa. be a'svstsBxfor .cleamπg flatsjttc&s coffi.3>fisiMg: ϋxotaisl?:te support for supporting a Sat article; a first trøάsφcer ssserή'felf coaiprising a'flrsi-traiϊsditeer and ^a first transmitter acoustically cptipied to.tlie &rsi irsπsdικεr/the first ratnsdiicer assεmtily positiόfted so hat :a -fisstt -'smύl gap exists- betw^ea a pθrtlόrj pfths first rtaiismittβr aiid a. first surface of kflai iMcleoR/feo rotsiablesuppoit. a .first meniscus of liquid.beisg farmed between the portion of lie fir-si iraatssxutteraud he' first t surface of the .flat article when liquid, is applied o he firstt sutrface; &iiά a second trsκisdόcδf' Assembly eomprising a second traiϊsducer and a second ransmitter atcq:astica!lv coupled o the t second mt asducer, .the sβcotϊd-trausdtjfier asseiήblypositiαned so &at. a. second small gap exists fcetweε-π a porlion dftfae second ransmittetr and: a second surface of- he fiat atticls oft t the rdtatable . support'., a -second meniscus of jiquid bemg forrnedbetween ϊhe portion, of the. second • rantsmitter and. the second. sui:i%cs:wheϊi ϊϊqμϊύ is applbi to i3ι# second surface. [0023 j Itxγtt 6ϋtiot6er.:esϊϊbb<iimsM5 he Inventtion can be a system ϊbr processing fiat articles comprising: a rotatabl© support for support iag and lOiatissgkiktatlielejn. a. substantially JiorizohtaiQAWiatiott^^ energy, a ttaupiitter,adόi}stica|Iy c;oupJed o he fitrsttransducert arid & ά&m suπtutrxdmg a? least a portion c?f;a..perimeter of fej jrrøSKϊϊtter- so. as lα farm ajiqiild r^itϊiβg φamie.l hefcsroea the rantsmitter aad the dam;- Md ihε ltaϊisducef a'SxSerøbly positioned so- hat a t portion of the •trarssmitter -is adjacent s bσfckmϊ surface of a flat article oft he ϊoiata&le .suppotrt. so tli&t wbea llqxήά h applied to he botttom- surface of he flat artictle, a.metriseμs of lfcfidd iβ, famsd between .tfae.pprtiόii of he ratnsmittter and iiε bottomt surface of he Sat astick.t
.|pO24] .te still aiiόt!jes"iϋabødiJKJ8iitj be: inventtion caabe a transducer assembly tor moantiag. banisath a bottom -surføφø. of a flat article oαmpmϊng: atrφ3$ducεt.fot.ge.iϊeratmg acoustic energy; a'traπsrnitter acoustically coupled to ύι&. Srst transdueef : tod a.d&m siurouadmgat. kaϋl « 'portloti of &p,enme.tet. of he .f ajfjtsrøϊtter.sό ai> fo.form -a liquid itetamtag cliatmel bstwtxiithe second ratnsmitter and die- dam,
.fCrøiSj fa a ftttthei*-embρdiϊnβot, fh$ myention ca« fee & laetjhcd of ma»«f^etιirihg ^•tg&^dueer assemikly comprising.: providing. a par-cylinώ'tcal ^nsmitter-pϊate: bottdlag oae oj more trausdxicers o t a coxu^x.ktierrsiirface of he itantsmitter piate; coanecting a housing .!ύ. -the ■■transmitter o cretate aa asseiϊibly ■• having a substaiLtlally encipsed cavity in vάikh lie ohe at t mpreitansducets ais'lάάlfcά; mi άicapsulating 'the assembly wπli'ϊm inert iODrreacέfvet plastic.
[ββ2έ] [a^>yet.tehtTanb^diji»«nt;ife&Jnv<^tS.c)fi'can'be.^ method, of pr'όccssmg a lk.i as.lick Comprising; a} siφpάftiπg -a ilat article in s:sτihstaiitially horizontal orientation within a.. gaseous- atmosphere, &s flat article imvmg a bottotfl sυήace' and atop surface; b). mfetiiig fe fiat arfick^' while mdntøiπing th<? subskϊittialjy bo«Koa:ml.orie.nmiioa; s) applying a "filπsiof HqIiId to hte otp sur&ce of the .flat ariide; d) applying, a δlm: of liquid on he bottom sutrface ofthe flat article; e) applying acoustic energy to the top surface of he flat artbl&t.vϊa a first transducet assembly comprising aiϊrst transducer and a &st ransmittert, a potlion of he Sr^t t tra∞nύtter in coutaet with t Hhiem of -liquid on tlie op surfatce efthe .flat attlck; aMf) applying acoustic -enargy o het botttom; surface of he fist artictle' via s seco∑id trmisducet assetabty cotaprising a second ransdtucer and a second ransmitter, at poriiqn.of the second ftfaϋsinittδr In. eont^έt with theiiim of Uqalά on.the bottom sur&« of the flat article; [.08271 In s. stiirfuitbor embodiment ile ikvtentjon can be a s}^tem £ør processing fiat articles com|>HSΪ5ϊg: arotataSe support forsυjφortihg a. flat article ih. a substantially horizontal: orientation-.:
Figure imgf000009_0001
transducer for generating acoustic energy aad a transmitter acousticslly coupled o Iie ttanstducttXthe rassducert assembly positioned so that a portion of &t ixans.mitf.er is adjacent a. top. surface o£& flat article on tie supporl so t lϋiat ϋ first meniscus of iiqu?4 isforaied between the portion of ώe ransmitter ant€the top swrjfsce'when liquid unapplied to. the op siiifetce; arid a reflective .member poisitipndd so that a portion of {he reflective fiaerabar Is adjacent a bottom surface of a flat arif ele on he. support t sothat-a. second meniscus ©f liquid k foamed between & portion oF&e-rcHeclive ϊπemϊ>δτ and tlie.foottota siir&cc vAύϊϊ liquid Is applied o tlie btottom surface: aod'tte reflective member positiofied so- thai at least a fraction .o.fthg- acoustic energy that is -generated by thg.fet ttaήsducer assserably kvi.fitasses hrόϋgli the ffet ailttcie is refieέtøά back oward ihe bottomt , surface of Λe tlat:sitick,
J8028| In yet«t»otlier embodisoeat, iie.mvetπtion.can be a system for processing jjat iϊrtidss comprismg: a rotatab' k support far supporting, a fiat artible HI a gaseous atmosphere; ?i- kansdiwer assembly comprising a ^ansdacar and a tajismittert tondec! to he ransducer,t feε1 t t tønsducør ass^nbly positioned' so that a first s.ma!l gap exists bet^eee a poiilou of the fraftStStttar and ■& first stiϊikie of a flat articieόn ϊhe- support so tliat when Hqukt is applied o t the %8f suffece- of he- fltat Mick, a fifsfϊRewscas of liqukHs. ibftasd between the poriipn of ths ttatismittet mid t :.hfϊerst surface of tlie;flat article; a selective .member positioned so that & sεcoiiά smal ! gap exists betw&sii a p'ortion of he refkstltW itsember and & second kuriάce όϊ a .flat artick oiviie support sp that- when UsJMd i;s applied o he seέondtjsutr&oe otihe fiat srlMe, ϊl secoδxi meniscus of liquid Is foϊmed .bet>veefi ώe portion of he reflective mtember aidthe second surface- of the flat aiticb: aπdilie reflsctive member |5ϊ>δitJ0βed so ite-atieast a fiactibn of fe Moustic energy generated. by he; -firstt transducer assestbiy ϊbat passes through the flaJ :' article is reflected back toward the second surface. of lie flat article by t ώe reflector member^
[(J029J .Is mother embodiment, Ihe/nveatton can. be.aineϊliod όfprocεssing Sat articles cβmpti'siag: . a) sti|jpc?rting & flat, article in a siibstiJiilialiy horizontal
Figure imgf000009_0002
gaseous atmϋsρiiere, the-fiat article haying.a bottom sarfacø &nύ atop suifacei b) rotating; he t ftit sdiclevyMIe malMaitiing he -stύbS^tiaJiy hotizoiϊtai orieiitatiόn; c) appljάpg a film of Uφsiά ot.the opt.sinface.qf fhe,flaf -arliclg; d) applying a film of Bqiud on ths bottom svsrtace. of tbe flat srticle^^-dppiyiagfSicofistic-'eaergy.io'fe top-sδrf'ace of iM fiat&rtlcte -via. a :&ati$<iucer ώtoli^ycrøisrisiΩg'a-itaasduc^'aj^-rϊ-Ηπsiπitter;, a portion of the t&msimtter m t-Qtn3.ctwhh.ths film of liquid oa: he (opt surface, of φs flat article: mvS. f) selecting he, t acΘiistic energy, generated by:the first ttω.i$άιiQ&t &$miΛύyikkt$8&$(&s hrough he Mt artticle t back toward the bottom surface -of ihέ ilatariiele vis a reflective meaiber tliat is in contact ■with the fύm of liquid, QΆ he botttom surfiie© of theilat arfictø.
[0030| Thesø.&ϊd venous other 'advantages aisd features of novelty itet φaracbrke he t iaveαtion 8XQ jrøinted oat witli pariiciElatity in he ckijtts annexed' hereto and lormiag a p'M hereof.. However for a better ftnderslandmg pf he §^»#tal echnologyt, ϊϊi -advantages, and'. the objects: obtauisd 'by. its use, .reference should be.made o he drawingst, whtieh form a further, part hereof and o ώt6 accompanying dφscϊφtive tøatter,, In wMcih .thesis Illustrated aad φseribed &.ps®fett&ά embodiment of the invention.
BRIEF BESCRIPtION OF THE DRAWING ffitø.] Figure i ts scfeefflatic of an acoustic energy cleaning. sj-'sύto according- to am eniBotliraent of the. present my∞doa.
[8832| Figure 2 is a pecspecti ve vj cw of one stractøal εϊnbodimcat of the acoπs'fe energy clεsmng system of HIO, L
|0033| .Figures is a fcross-sectiσna! sidδ view of he acoustict energy cleaaiήg: system of FIGv 2.
[flO34f
Figure imgf000010_0001
accoi'diαgto ojie.enibpdimeiit of the presarst iqwntfon. htai is utilised m he atcoαstic eoergy ckatmigisystem of FΪG< 2'as he -boitom-ssάet
|'θθ35| ΨigϋK 5 'is- a cross-secticaa! ^vdew df he transducter assembly of EIG, 4 along, cross- seetioή cut A-A of FJG. 4,
[DQ36] Figure 6 is aαx exploded view of he ttanstducer assembly of PICnA
}0037| Figure- 7is & schematic ofilie traiischictt assembly of. FIG. 4 positioned adjacent a bottom sarfsce of a setuiconductor wafer according to mi ambodimerstof the present.
Figure imgf000010_0002
of 'ϊ;iθ,.4-is,3hovrø iβ .ctoss-seαion. f<ϊ038] Figure S Is a.schεmaiic..representation of one arrangement of the opside r&BSilαeet* t aδseϊiiljiy relative 'to -tbhoettόm-Mdδ
Figure imgf000010_0003
system of ..FIG'. 2. [0039] I-lgαre-91s -v cross-«ectioosl.view of -the schematic representation of he raiisdt&er t t .&^επji%" arrangeπieni of FIG, S along: the cross-sectierecut B-B όfFΪGJ.
[HM(IJ Figure 10 is a.sdiematic representatioa of am alternative ^ttapgemesii of helopskfe t :!sa&$d«cer assembly relative o he btottotm-side transducer assøiϊξMy for ile acoustic gsergty cieaiii-xg svstem. of FIO-, 2:, fO041| 'Figure- V! Is a crδss-seciioaai view ififee Schtematic ÷rejJrέsBRMbii of fee &iier.mstive.- transducer assembly arrangement of FIG. ID along the cross~seetiotι cut C-C βf HChS';
|W42] Figure I2: is;,sJ?Heroatk of ah. aeoiϊstic energy oleaiiiag.-sj'sSeϊxi uti!iisii3g'a.reJlecth-'s ■svefliijer according to ose embodhϊteftt of itepresent layeiitipn,
[0#43I F.tgarc I3- ia'sc'iieojatk of ati acoisstb energy ck-δiii∑ig system αtiϋzing a rdϊεciiYe: tiieiiiber according ot an dteniatl^e' embodiment of bepresetω mveπtion.
|0044| Ffeia"« 14 shoe's .€vealtettϊati^ε-.embodjments of atraiisdacef asstemWy &at can also act a^ axeflectiye jaember for use lathe acoustic energy clesiuBg system of FJG. .12-
DESςRϊFTIQN OF THE INVENTION.
[ϋ&45] Referring first o FtIG. I, & schematic αf ari schistic ..energy cleasing system MW {hgϊύmϊlcr&Biϊzeά to as ?lckajtimg system 1000") is illuslpted accordhigtp one embodiment of the preseM iftventlQα Fox es^se of disct^sioii &e.iϊπ?eπtxve system and aistho«l$ ofsM φ-awiiigs. will Bs discαsseii in reMαaio ihα φsxύng of semiconductor .wafers. However, the: kwentiόn is' not so Hmlted and can be utilized ϊør m$γ. ύzύtzά wet processing of any flat article;.
|Θ(I4(}| Ηie cl&Knmg sj'Stsiiϊ 1000 geneMIy comprises a op ransducter atissembly 200, bottom transducer ps^mbly 3S0 a».d a ϊotatable ?;uppβtt 10 for su|sportis.ig..a sεiBlcoϊiducfor ^afer 50 m a sύbstMtiai.ly boriEontal orie»tatk>xi- Preferably; lie semicotnductor wafer 50 is- supported so its. otp sαπfece 51 is hi? Λføvtice ύih of the wsier 50 while the bottoxs surface S2 Is fafe.non- t dtndce.si.de. .Of coarse, he vvatfe catx be supported so hat Jtstop.stutface Sl is the non-device sideΛyMle &e bottom syriaee 52 is tlie. device, side if desired.
|0047] -liiq jotatable support 10 is designed o contatct &nd engage only a perimeter of file substrate 50 m pprfomϋng its support femction. However, iie :esέict dettails of the structure of the rpMafole .support: IS are not. limiting of &eρresβ»trroventioή and a wide variety of oiHer stφport strttδtva'δs can be. «sedr sueh as:eBuekss.supj3ort plates, dtc, A4'<litional]\\ while ills ptrf^^^sithat th& support sttικtmt: support .arid, rotatq' thessmicoBciuctpf wifer ib: a substantially horizontal orie.iitatiorr,,m ether embodiments of he inventiotn, he. system mavt
Figure imgf000012_0001
fsattthe semiconductor Wifer is supported in other qnεatatipss, suςh as •vertical or tit an angle, Iπ.sach emhodimedfs. tlier&saini&g eompoπeats of he cleaning. t system 100, iαohsd&g ihέ ransdtucer assemblies 20Pj 300, can be cόH'espondiμgly .repositioned in- h#t system' so as to be capable of perform.ϊng.tliedesirβdihπetioπs and/orthe.- necessary rei&tive-poskimmg with respect, o: other ct&xtfponfeiiis of (he system ss sfecftssed beio.w,
[0048 j The rόtwy support 10 is opemblv coupled o a raύjsrt I !. :to; faiiilitate rotation of he t water 50 wjthb the borkontal plane of support Thermotor'ϊl is preferably a variable spieed jβofer tfeaf ca» rotate h« stupport 10 at miΫ dusked rotational speed ω , 'The.motai' 11 is eieGirica% and όperably coupled o ih.®t conirplier 12. Η-je.røήt;oIkr'l:2 contrαlS:t&Q operation of tlϊe πiotar 11, ensuring ϊhat tic. desitred rotational speed ω and desimS άftatitm. of rotation arc achieved..
|004^J. The cleaning -sysiena 1.060 further comprises a top dispeiiser 13 and; a b&ttons dispenser 14.. Bp.th 'be top dbtpetiser ■ 13 aiid he bottoiiϊ ;dtispenser J 4 are qperabiy atid flύidlv teoupϊed øt & liquid supply subsystem 16 via liquid supply lines 17^ 18, Tte liqμxά sopply- subsystem iβ is in .turn fiuitlly connected, o. he liqtuid rteservoir 15» The Hqiύd supply subsystem 16 controls his stupply ofiiquM o both/tffee top di.spesser !3- and ths bottom
ϊβSSβ] TKe '■ Liquid supply subsystem Ϊ6f ϊviiicbis. sciieήYaticslly illuslfated as a Wx-for guxpόses ό.f .simpHcity, cOxnp4ses"tJie dssirεd arrahgsmejit of all 'of he nseessary pάϊtQ'ps, vdyes, ducts, connectors and sensors for controlling he fiow atjid ranssHssaioαtof he Mqaid t thfoaghoat ths cleaiisng system iθ'0.0. The direction of he liquid flt ow Js.repf«sønte<l by ihs. arrowy ό» hte
Figure imgf000012_0002
1.7, 1$. Those.sfciIiδd iB:the;artwiπ.fecogmκ;« ϊhaftliά existeftόe, piacsm&rst 'and t irøctioπiπg: of the. various components of he liquid supplyt s^bsysiem IS will vary -depending .iipoft Hie needs of ώe cleaning system 1000 ami the processes desired o .be t sarπett .out thtteon,. and can bs adjαsted accordingly. The components .o:f the liquid -.supply subsystem 16 are bperably cόriήec-tεά o and cotntrolled by hecoBtroUetr 12. fø'051 J lite liquid reservoir JS,- holds fhedesfecl .liquid o be supplietd: to he wafer- 50.for.t ihe •processing that is Id be oamJed out For cfeaaiήg system KHiO5. he liqμid reservtoir 15 will hold a cjeaaing liquid, suc& as for sample deioώzed waster ("^WM)» sfemdatci cleau T (VSCJ %simκfc-&cIeM 2 ("SC2ff)s. ozόBated deiόnizesi Water ("DlO^), dilute -or ultea-diluhs chemicals* mά/ot combinations thereof. As used herein, he term "litquid^ includes si least liquids, HquicMiqoid mixture* and liquid-gas, mktores. Ix is also possible for certain other supercritical aml/αr dense fluids o quatlify as Isqisicls ύiccnain situations. fθ#52] Faxthsππors, it Is possible o
Figure imgf000013_0001
multiple liqmd ∞yjnø'ϊs. For example, in some embodiments ol het ϊnveimon. the op distpenser 13 and the bottom dispenser 14 can bύ operabiy &nά ikucOy coupled o diffterent liquid reseivtrø. Tills wxntύά allow the application of different liquids to &e bottom surface 52 and die top surface 51 of the water SO if deϋlr&l
|0£53 j The cleaning system W)OO fitfthef comprises a gas supply subsystem 1? hat JS t operabiy sxiά fluidly coupled to a gas source 20, The g^s supply subsystem 19 is operabiy and IMdIy eorm^oied to thoep ttransducer aEssamblj' 260 via he gas supplyt U«o 21 aaJ io th« bottom ttansducer assembly 300 via he gast supply Ime 22. The gas supply $«b$»5 sierø 19, wϊϊich is schematically iiliusrated a.v a box for purposes of simplicity, comprises die desired arrangtfment of all of he ntecessary pumps^ahes. ducts, connectors rød&ciiiors for controlling the flow and transmission of he gast throughout ihe cleaning system 1000 The ditfXtxαn of hte gas flow is represented by tbj arrows on he supplyt iiaes 21,22. Iliϋse skilled n\ the ait will recognize hatt ibe, existence, placement andfiiaciionmg of the vai∑oαs comprmβtits of the gas supply subsystem 19 wάl vwy cfepestdmg upon he neoώ> of het t cleaning system 1S90 tod the processes desired o be carrietd ox& thereon, and cαa be adjusted accordingly The con^pottems of he gtas supplj sαbsysieω 19 arc operabiy connected o and t coπtroHed by ύas eoritrollci 12. Thus, he trantsmission of gas frorα the gas supply .suhsj &tcBi j*> Is based upon signals leceived from he couTiftoller 12
|0Φ54J As will be described in greater detail below, the gas is supplied to he to he iop ratid t bottom U'sssdυoct assemblies 2ΘΘ, 300 to provide cooling and/or purging to he rgaaduccrs t t in fee assemblies 200, 300 hat cotnvert ώe electrical energy into the αcoysilc εaevgy, The gas sjoυret; 15 preferably holds an inert gas. sadi as πilrogcu, heliuoj, carbon dioxide, etc. tkrwevet, the invention is not limited o thet use of an> specific gas. Furfheimon*, as 1W Un he t liquids, it is possible o htave multiple gas sources. For example, m some emboditnents of he t invention-, het opt rantsducer assembly 200 and he bottomt tenstfueer assembly ?00 can be operabi} a?^d ϊlxύdly coapfed to dif(e*»at gas oservoiTSt, This vwrøid allow he applicaltoti otf different gases ύ$ de-sired.
$0551 Tlie cleaning
Figure imgf000013_0002
10110 further comprises a horircaiial actuator 250 that L. operabiy coupled to ϊhe opt rantsducer assembly 280 and a veiti^al actifator 35δ that is opeiably coiφlέcito hte bottom ratnsducer &ssemt% 30β. The actuators 2SO, 350 are bperably coupled to and contorlled bfthp edntroltet i2: The actuators 250,.350 can be pixeumatic actuators, drive-assejtibly actuators, or aay other style desired o efft ectuate^).!© rtsc.essaϊy movement. pβSSJ The horjgpΩtai actuator 250 can iϊøtizontaUy translate..thε: top traβ$dtκj».asssmoly.2øO beweeB a retraced jsαsittcn.and a processing jjositi'oa. Wlie'& m.the retracted posstiotu the toptransduce? assembly 200 is- w.iti)dmwn;sύi|!Λ].e3itIyaway from he i;ota tatble sαpRortJ.0 so feat the wafer SCI eaa.be loaded and unloaded without -obstruction onte aad.fom lie': supptort £0. When ia ώe pfocessmg jposMon, at least a portion of lie otp icatnsducer assembly IiH) is S|?a#d Jk^n byt sitlEςieiiβy close .to ϊhe top sar..fape:51 of Hie uafer'δft so hat when ltiqai^ is suppliedto ilietop §«rfac& 5Ϊ of het -tvafer 5.0, a .meniscus of liqμiά is ϊoxm&ά between the op t surface 51 of the wafer -50 md hatt;poxtipu of he ttop lfausdacfir assembly 288, M EfG, 1, the top frsBsduee*' asssjtϊblj? 200 :is m f he: processing posi ύctx.
[Θ8S?J Smiilarfy-, die -vertical actuator SSO caii v«ϊficaliy mnsϊate thtt bottom irasisducer assembly 306 between a retrafcted position snύ n processing pssltioit. For lie bdtttt>jκ tεrøsduc^r assαϋMy 300» he rettracted posϊtsos is a lo^red positioii where tfe wafijx.50 eso. be safely loaεlgd oωo he sutpport: 58 wi&out contacting, bέj bottomt transducer -assembly 300 and/or iaterifering yiMϊ δ&et|3?ocesses hat mtay be carried out on tlie be-tfoai surface 52 «f tkewfer 56.feat sfepife atkøtiαna! space. \Vh$n liet bottom, ransdtucer-^embly 300 is in its processing pϋ£iiiion,.3t Iδast ■$ 'pαxύoα. of iht bottom τrøsdu«er assetmbly 300 is spkee&fioπi. but suMcienilj clos'f? ot the- febttotii sttrface-52 of he wafter Sδ so that -when, liqώd is supplied, totlie otp sxaface Sl..of het -wafer -Sfrj a meniscus of liquid is formed betweeii fes 'top surt&ca 5Ϊ of fee wa&F SO and hatt portion' of -{he. top ransducter assembly 20Θ, In FIO.. !.s the feoffem ttaiisdttcer sss'etoi^y 390 is in the processing, p&siriim
I'OOSSj White &e a«i«ator« 2®% 300 are exeαipyfied in'systeni 10θ§ as έ»dag honmhial ajid vertical actuators respeetively, in other emhodrøieRts of - the invention,.diifereBi;sjyIes- of actestors can betised mtlfe place of each. Bo? exatnple.the actuator operably .coifed o tiϋet bottom transducer assembly :.3O0 can be a liorizorital,. yertital, ;aagled raiislaHot^.actmϊtot or a pvofable- actuator. The. same Dptiόiαs.exist for ihe actusior tψembly. cotψled o th«. op t t transducer assembly 200.
(0059 i A posuion. s«ssor-305 is pftjvkkci in fee cfeankg system løø.so that the position oi^ tliebόttom tesθuc«r assembly 300 cau.be ■jEβqjiitored.aήd'contrblJksϊl ^ffe'ctiveiy • The positiofi/sensof 305 mβasiϊfea thedista^ce between ths Bottom .transducer assembly 30Cl aijά t he bottom sudace 52 of ;$te wafer 50 so.thatthe proper distance between fee wo.esn. be t achieved ot- effectuate., he protper processing gφ for. formation of fee liquid itieήiscas. The: position sensor 305 is op^rably and eoraniaqlcably coupled o Ae cootrtolkr 12-. Mors speciδcsliy; hte posMøβ sensor 305 generates-a signal, mtiieative of he measured ditstance a^d tratisjtlits htis signal iaike coatmlkr J.2 for processing, WMIe'fhe sensor 305 is illustrated as Wiftg connected o het botttom ransducetr assembly 306. ittøaή beήtottάied almost anywhere Ia te t cleaning system1 100-so long as it can perform its position, indicating ' fimctiofr.
[00601 "His oieaaiiig sysMii lirø alsd comprises as electrical . energy signal sottroe 13 ύi&i is ope.rab3y coupled o..&t« ap tratnsducer .assembly 20β.aiid the bottom transdiseer ssseimbly 30JI, The:<ϊ)εeirical energy signal iSOTrce.23 creates he efectricai t signal that is lransiliitted to the transducers (discussed later) in .the iop ransducert assembly.2θθ mά he bottom. t t ransduc8r,as{5embϊ)r $iiø for corsversiois Into comispofidiog scoitsdx? energy- Hie desired dectiieal sigaais. cart be seat o lhstop midt l>ottem transducer assemblies 28δι 30δ coxicurrently, consecutively' end or in Sii allemating fashion, fepsmdisgotsi the process needs. liiij ϊ'lectrical .energy sϊgaai soiϊrce 23 is opeώϊjly coupled o ahd conttrolled by he- eαdrolkr t Ϊ2. A.*? a re-suit, Jhβ conjroll'er 12 will'dicfate the &eQuency;po%verieye.If aod dumtioii otili^ acoustic energy gesieraie^ by fcstop rs^sdutcer a3s<?sib!y:2&0 mά he. bottom.:tfantsduc≤t assembly 300. Prs;feτablj, tϊieeiectricai, energy sigϊM source 23 is conMvUeci so hat &ε t acoustic enqf-gy generated by the op ranstducetr assembly 20β mi he bottom tantsducer assembly- 3.0θ has-a freqtϊgncy in the aegasesiict xύάgt.
|t86'3| Depending; on system. ϊsquiτemenbs it πsay-not hα desirable o-ϋsfea Sisgk etlectrical energy signal sowdb o odtriitdl both he topt i^bsducter.sssembiy.IOO md ke.bottom t t sransdttcef assembly 5fM). Thus-,- m o&er em.bodiment$O.f the ϊOTeiϊlion; Multiple :eisct;rical εfeergy signal, sotirces inay. be asecl, oneibr.ea^ raπ'sdiscert assembly.
P062] Tiie.coatToIler llniay be a proceasor, which can be.asuitxΛIe microprocessor based programmable logic controller J: personal computer,, or he Kk.β;ibr ptrocess control Hie eαtitvoHer 12 preferably kcludes vaiious.mpt?t/ot%ut;.ports Hsed a pro^de coatøectlotis to lsέ; t various. icomj3D.i6nts-of tiie cleaning system 1000 thattised o beiconCroOetd atid/ot GOTXunnBicateUWftu Thc eleclxical. aήd-'btcoffiinumcatbti connections areindkated fe dotted. Ike in HICi L :t3je cont?oik.r.l2.also pϊeierab.iy comprises suffi<jienit.'memoxy' o.- store t process. recφgs βtxά otfer data, sadi as-Aresholds ijjpui&d by wx opemtor, ørόcessMg hnei^ t T&tadόriϊil speedsj pocessliig conditions, pWccssmgfeiapfttateeSifeW mtesv desired conceptions-; sequesee operations, mά ifee lite; The: controller 12 can eaimnumcate with, the various eφiβfiOϊieMs of he cietiώing .system.1000 to automatically adjust process conditions, suoh as flowMsss rotatiqnalspeedj moyemsBtof the components of ϊie cleaning t gvstsftv 1.000. /efe. as aefcessar y. Tfo ype of gy≤tteni contfolier ivsέά .for any -glyeα system/ w?ili depend OJi the exact needs ofihe system. iawliioh. if isiiiϊcorporated.
|0063| Tile fop dispenser .13 is positioned ahύ oπeήted.sό hat wheii a litquid Is. flowed :t35.ei;e%>ugh, |he. liquid is applied o he -top sturftace 51 of he 'substrate 50.t When, he t Mihstt ate SO is roMirig;, iiiϋ Hqtiud fomis ft kyeif or film of h<? liquid acrtoss the efttiref y of the tθ|> surface 53. iif fe sqtbstMte SO. Siiallarly, he bottomt dispenser 14 is- positioned aιi4 oriented .sothat.whea.aligiud is iϊowed.iherethouglij heliϊjuldt is applied tόtht boiloto. siirfece 5.2 øf the substtatS: 50, When "the substrate 50 is xotaiiag, tlii&- liqtaά fomιst&. layer or Sim ofthe liquid across he.etntiretj- of tb.e bottoiti surfede S2 ofliό substrate ,5t0,
(0064| The iop ttansdi!C«rassejnb.ly 2δO is pqsitioaea so tlistasmaU gap exists- between s. portion of die top .tsraαsducer assembly. MQ' andlic op surfacte ..oftϊie wafer -56. Thist ;gaρ.ϊs. suffktcnidy smsllso hatf wheit he Utqtάά is applied o heopt surftacet Bi of ite mfet Sp5 a tjsensseus:<>f Hquid isfomied bei>vsen tie .top surface 51 of .the wafer SO aadthevportion of the ton -transducer: assembly 2(10.. Smnbrfy, he bόtfomt .tmsducer assembly.3.00 Is positioned, so IBM a small gap, exists -betv^ε^i a j)ørϋo.n..oFihe -bpftom iraasdaoer -assembly 3ΘD srøl he t bottom sur.&o.β; 52 ofhe: watfer' SQ. This gap1 is fcufficienfiy small, so hat -whmthβ Hqirfdt-is applied Io the fcόttøia sύsf ace 51 of he Wafert Sikά rαcrύscάs of ijqii'id is formed, between lie t boilottt sutϊace 52 of fte -wafer 50 and Hie portion- of he bottomtransducer asstembly 3jrø. The meMscys is .not Mali fed .Many spedltc- shape;
{UH)$} As will be-sotsdj theop atnci. bottom ransducetr assemblies 206 j 301 are genetically illustrated as-bo'xes.-. TMs- Is- dose because lij ip broadest- sense,, he lήyentioii is rjoti limited o t zmy particular ?tπjclure»-sli8-p6;aad/or assei-nMy arrangement lor he tτansdι?cer asstemblies 200, 300, For example, any df-tfie-transducer assemblies '-disclosed ia-Umted.'Sføtes Patent 6,0395Q59 CBmCyi Isrød. March 21 ,.20OD,. United .States Patent 7M%2B6{!'Beέk^t.ήJ% issued December 5, 2006; United BtatesPatent 6;539,952.("ltekow3tz")? issued April X], 2QfB, and lfefied Btates.Pateπt Application Publiδatioh 2006/0278253 f Veφavefteb ei al"^ published December .14, 2006,, can.be'us.edss;thc--lop.asd/or'boit03a ransducer assemblyt 2ΘOS 300, 0f,cøurse5
Figure imgf000016_0001
used, suchas hose having' atn elongated Xt mmύtler rod. sxijpjSori'ed at m asgfe-tolte surface ofhe wafer. t |Φ066] Referring now io FIG, 2, a preferred structural embodiment of he cleaning sytstem !{l(!ø Is jile&trsuxi. L&e numbers are used in FIGS. 2-14 to indicate he correspontding structural rosiatestaiiun of the seh«u»aucaUy illustrated components of FIG. L
[0067] Fft het claanisg vjsUsn tθβø of FIG. 2, he top ratnsducert assembly 200 campuses an elongate tod-like ratnsmitter 2ϋi that is acoustically coupleU to a ransducer 2t03
Figure imgf000017_0001
in PIG 3) that ss located withia housing 202. Many of he detailst of his- style oft elongate rαd- like Uansasitar 201 arό disclosed i ft United States, Patcuf 6,684,891 ("Brsm"), issued February 3, 2GCM- and United States 6,892,738 ("Braaet a!."k issued May 17, 2005, the entkeϋes ef which aw hereby iϊieotpøϊstsd by reference. The tap ransducetr assembly 206 is opεrabK coupled U) fev asaembly/acαiator 250 that can aøve thet rod- like ransmitter 2t#ϊ betwven a retracted poiiuon ami a processing position When tho od-liKc transmittert 2βl is in fee retracted position, the iOd-iike ransmt itter 201 Is located outside of he process botwl 203 so that a wafer 58 can b& placed on the roiatablc "support 10 wUhoαt obstruction Mere spocificall>s tϊic drive assembly 250 withdraws he rod-iitke &aa$nύrt«r 20Ϊ lhrougb an opeπkg in a side -vv^il of ihe process bowl 253. When ia he piocesstiπg position, the od-liks t transmitter 201 is position directly above he opt surfatce 51 of a wafer SO on the rotatøble support Ϊ0. The rod-like ratnsmitter 201 is in he protcessing position m FKJ. 2.
[9068] The bottom transchiccr assembly 300 ^s located at lic bottom otf he process bowtl 203 at a po$άtiυ» bøϊow he rt<*tstablo support 10, The bottom iransdueer assembly 3ββ comprises a 4&m 361. a raBtSBiitS.et' 302 axxl a baso 303* The bortosi dispenser 14 is in the form of a pJuraliij? ofspi&yςxs located wUhiα bε baste 14 i?s.clf, iallicr then 8 single noz/h άispct&ct, i$i)0] Referring BOW o FtKl 3> it can be seen hat the rottatehlβ support 10 is. located within HK; process bow! 2Θ3. The rotstable support 10 supports a wafei 50 m a substautially I3orl/onta1 orienlatfoa in he gtaseous, atrøospherø of he process btowl 203, ■which st.trrottβds the periphery of het wafer 58. The rotatable support 10 is npsrab!> connected to the motor assembly Si. The motor assembly rotates the wafer about he central t &sis. 'S he motor assembly lϊ can be a dircol drive motor or a bearing with oflϋsct bell/pulley drive.
|l)070} The roiatable iupport 10 supports the wafer 50 at m elevation sad postUoti between tlie elongate red-like rantsmitter 201 of the op ttsiiδtvføcsr assembly 200 and he ransmitter t t 302 of the bottom rantsducer assembly 3IJ0. W h&tt he wafer 50t is> so supported, the transmHtcr 201 of the op txtansduccr assembly 200 extends in. a substantially parallel onentatioa os er hetop sturface 51 of he wafetr 50 in a close spaced relation, Siπnikrfv. the tømsøuttεr 302 of ifce. bottom ransdutcer, assembly 300 extends in a substantially parallel ϋdentation below Hie bottόm-sur&ce 52 of he wafetr SO hx & class spaced, Matioa, Tϊsese close spaced, ■relations are- such thai vvtei liquid is applied o &e io|> a&d.t bottom, surfaces Sl*, S3 from fee dispensers 13, 14 ϊespectlvefy, xπeniseases of liquid are respectively formed between ύ portion of he.'ttεaasrøiltε!i"2βl aaid ilte lop smiaee 53. of he wafer. $0 -mtά between a portion ς>f het rantsmitter 302 att4&£ bottom, surface 52 of the ..-wafer SO,
[007.1] Tire: bottom ranstducer assembly 309 is opersbiy connected o the lifier/actιtsator,35β. The litWaetaator 350 ca.it tsβ a :p^e«aiatic lifter aid c&n also cόπipd^e bracfefe TIie lifts? 350 can laov.δthε bottom ranstducer 300 assembly belΛ-yeeπ a processing positioa &nά & retracb4. position. IR FI<3.3S the. bottom ransducert assembly SdO. is ui-lhe procøssmg pøsitlbti/wlsetris Stfiised position in which the 'transmitter 3&2 is in the close spaced iekttotl discussed above. When iύ lie yetti-acted position,. ite bottom r^αsdus;<≥r astseMMy 3^Ml is ia a fevered position, to e?»tste hat hts wafet r- 50 is not damaged disri.ng ins&tk>» onto ire, t rotatable support 10.
|0072] The i^tnsέlucers 203, 303 oϊ'flie top and bottom txaBsdueer assemblies 280; 30(1 am scoiϊsfcaHy c^upled to tIieiransmilter'2{H, 302.respectively . This can be done fiϊrougir a direct btmdmgor mt mdir££i bonding ,-ώat utilises uitemiedfary ϊtarismission layers. The tmnsSucers 203, M\5. ate opershiy coupled a sόyrσe of art eϊeetxical energy sigaaL Tfee transducers 203, 305 &i\n be a piezoelectric- ceramic-or crystaUas is weli kS'&vm in ke aft t
[01)73] .RefilTJBg ΏOW o.. FIGSt, 4'7'øoneurfeatlyi. tite' bdtoin tamducer assemtbly 300 is illustrated removαiitom lϊόt..δleamτig systeβj .1.080 so feat its details are visible- It should & tuidetstodd thafthe .bottom ransctluder-assembly 30Θ, in an<l of itself,. Is.a Royeldevice ihat crø constitute an siabodiment of the invention.
[0074] The boβom.traosduicer .assembly 300 comprises a baso stocmre 303, a housing 304, a tjanssstiitter 302, a faasdtucer .305 and a flam 301. The base structure 3Θ3. is preferably ϊα&άe- ofF.TFE or other nos-cό'ntamiRatiάg.matedal that is suitably rigki Tiie.base structure 3.03' has a fop convex surface ilmt is a genera! Iy par-spherical shaped. The base structure 303 connects 'Hi and supports' 'the- remaining ciMparoTits of fiie: bottom ransducer assemtbly 300, The.base structure.303 also comprises a plurality of liquid dispensing holes/nobles .14 hat: t are/adapfed o stupply s filttv of liquid o ώe l>tottoto- surface of a wafer dmϊng proeessmgv Tile holes/nozzies 14 ^t iόcafeci oti botli sides ofήif. itkmmlUetWWm wo.§epfetexoxvstlkt exteτκl. ajoβg het length of te 1κrasm1ttor 302'I [9075] The transmitter .362'. is -a generally par-cyiindricai shaped plate haviϊig a convex outer surface 306 ^d a εαncave fonef .surface 307, The iraa&riilfer 302. ■ however, έaήia&e on a wide: variety of oώεr. shapes. a«d sixes. Tlxe ransmittert 302 cart be constructed ofaay materia! htat rstεssmhs aeΘusfsc'em^gy generated bfih& ransd-acer-SOtS. including ^itliόut liniitatloft 'quarts .sapphire* boron nitride,, plastic, and metals*. One suitable awiiύ is .■aluminum.
|08>7$ Υϊύ oatsr convex .surface of lie rantsmittter 302 errmaatesitn an apex.SΪS. Beesuse ■fhe ήtmsmitter 302 is- a paj-cyϊmdricai shape, his apex 31t3 (BIG.7} loans s ' ή elo'ngsϊs edge alcmg 314 aloug he.lteagth ofibe rantsmittlgr 302, Of course, as used herein,, dkterm elotjgate «<ige:is not HiEiled to he gpetx.αf w. elangated crøved.ssurfaεe; hut also inc&ideg, smtsϊg bthsr things, iheimeetltig of wo-'swtrfacfefc FiiTtlientioit, ift dtKef embodiments, th6 t.ransiaitter.3O2 pay b« sphetjca-1 m nature feus, the ap^ «oύld bs a.pokst
(0077J Oie -if aaschi csr S(B Ls a curved, p iate liaylϊig a cp^yssi upper s«rfece.3Q8 aiid concave, knyer suiface.JOP: Th& constmction oftraosdueers -thattwaverf: electrical &ι&g}f: into :aoo«stkalciiξ;rgy ϊs vcr3f well known iirtheait The conyέx surface 3OS of the ransducer hast •a curvature hati. corresponds; to &e curvature. oftϋ<5 ianer opϊicave sjtfface :3li7> The transducer 305 ss acoBstlcallv coupled o he!. tratnsmt itter 302 so baf acoustic Metrgy geneyrated by the tmisducer 3#5 propagates, hrough thet trahsmiite 302 and to he wa&r 50, t More specifically., -the coiwex.ttpper-sωface 398 of •the.trøcsducsr 3Θ5. is bόncicti o.tiϊe. t concave imst siirfac e 3§7 of tlie itaiisMittef 302. This bόitdmg CSB. bs a direct bonding between ilts surface's 3'0^.3'øiS-^r ean.be m indirect fjonding udliκisglatet£βediaty transmission layers. la-other ©.mbodiaients, he ransdtucerts maybe filaf plates or other shapes* Moreover, \iMΪ& he btbtfom rtedμtcer assembly 380 Ls illyδtrated as utii izmg & single transducer 30S7 a plmr^iity of transducers .-can be usecl.if desired b create he acoijstic- t energy, Freie.mb:iy,.the lτajιsducδr 305 is. adapted tø generate ήiegasosic. energy.
{'0978J :Tlietran§mitt«r 302 is connected o:thelioutsiag 304 SQ as ϊo foitπ. a substantially enclosed space 310 m wliich tlietfaiisducer 305- is locjtiski. Any sαitφlem.eans cm be used to coa.ftδd: the housing 'MA o }he:tot msimittør.302s including- adhesion, h$at. welding, fnsfesn^s or-a-ϋght-fit ass&nbly. Λ plunility of :opeήmgs3li are- provided is he bottomt pcϋMάπ of he t housing 304. 'Hie rpetnmgs 311 are provided ό aHow 'st.gas-.to.Ve Mrodttced ύitό tsxøor out αf .ώe: space 31.0 so. hat .thet p^sduceit?:^ can bs. pooled *uwl/.ar purged. Tliε or>onkgs 31.1 are.oρeπιt>ly€onix$cte4:tθ li« g3tø §o^oe:l^as desό.nbed:m F10. -1. Jhe.liQϋsifig-304 a3so comprises an dpeRMg'3.!2. ibr alknvijhg the electrical cotiQectioϊss (ϊ,c...wiiέs) lϊ&iare t necessary' o ptowi* ithraensduøer, 3ΘS to pass into the space 310. This όpeήuig 312 eaa also b&uso-Ho allow het gas o estcape. he. spacte 3.1.0.. The housing SM can ske on aivitfe varitety of shapes arid structures aiaHs not limiting of he presentt investion. In some- embθdimeats> the. housing may be .merdy s plate p.r. other simple structure.. f 06.79] M:αrder o futrther protect lie wafetr SO from possible ccntamirøtion^ once fee transmitter 382 is conaeϋtedto tlie. housing 304* the combmed assembly ittay bp MIy encφsylatcd with an inert ncavfcontaminaiføg plasdc^ such as Teflon or he like. This atlso, serves to protect the tøπsϊrsitfer 302 from βhemJcai .attack. When t&β tonsmilter 302 ia-:so ent?apsa!ated'.aπd/«r coated^ he eπcaptsalatioii aiid/αr coaling is considered psst ø£ the traQsmltier.302,:;
PM389] Re&πiiig exclusively o FIGt S. 4 and..7,.thebbttoin ransmittert assembly 3<1ift ferlher eQtapribas. a dam 301 liat simt -punds he periphtsry/pefiώeϊef of he tratlsmittert 382, The. tiatii 301 forms -m «|>vvardly.;prøtrα<.ling rMge'31'6 having an angled innsr surface: 317, an outer: sqrfece '318 aad a ap etdge:3I9.. The dam 361 forms a liqitM. retaining cfeaiJne!-3.i5.on both sitϊsjs of the rantsmitter 302.. Mote speεiiScaϋy, the. ϊmw s.urface-3-17 of the ridge 3.16 fostiiδ a chaMai/gtoove wllh het raitisϊnitter:3β2, Gi".colεfsef in some embodiments, he dara 301 t could be-.υsedtoibrin th cheaniie-i 315. in. oilier Λvays asd/dr thεqαgh. cooperation with otlier stnsetures.
1] The dδϊα 301 is a rectangular Irame-likε siructurs iaά ez& iaks. :on other sJiai3es. The dam 301. also does aσt have.siifrouiic! the entke pariphei-y of he ransmittert 302t but can surround oo.lv s.small portion if desired. The daπϊ 301: cm mn&tnxcltά of HPPE, FVDHi Ϊ\EPP or any όiber rsateriai. 'Prefe ably, tϊie materials chos;en is cϋetuicaily resis'tot and nieehamcaUV stable.
|()082) X& daήi JtO ϊ is miplemehted into tlie bottom ransducert :assetήbfø 300 o mcrease tliε t size of flio iiaeuiscύs that couples he. rkutsmhtetf 302 o he bottomt Stttrfk<je.S2 of he waier SO. t lliis .f cilitates ati increased amount <?f acoustic energy feeing -fra«srai'tted o he wafer 5$ for t t improved i -cleaning. As Hiusitøted in. FIG. % withόiitthe dam.3'βlytϊie: mεπisc«$ coisples OJfIy area A of lite ratiBraiύer 3&I to he wtaM-50. However, witb. the d^m 301, &e. πiβnϊscαs. coupling, area Is' increased to area B1
|0083| Referring now o-'FtJOS. S-12;, ώe|K)ssUiϊiifes for the- relative .arraegement of 'the bQ,ttom"tπmsducer assembly 300 and. &te fojj ransducer -asts^ibly 2CH) with respect to one ϊtrsqthgr \n tijeciesmltig- system 1000 wiil be discussed. jrø84| •'Refemixg ;ϋrst o FKt3S . 8 and .9, ύh antmgemeni is illustrated wherein the ransmitter t 2Ot of the otp ϊκms.duøer:assembly;20& Is aligned wife sipd; opposes, he raπssπtter:30t2-.oft tS.e bottom transducer assembly 300,. A wafer'Sβ is illustrated as beiiig 1« between" he assemblies t 20Qi.300. As liquid 70 Is applied o thet op surftace 51 of thewaft'r;S^iι.menis«ι?s of liquid" 72 is Formed føtweeπ a bottom portion '2θfpf the ransmittert 20i of ih<Hop ransducer t assembly 206 and iretop sturface Sl of the- wafer 50* Smdlsriy, as liquid VO. is. applied tb he t bottom, surface 52 of the- wafer 50, a meϊikaόiis of liquid 7ϊ is formed: between the.lraasmHter 302 of the. bottotn ti'aiϊs^eer assembly 300 Md he bottotm surFace.52 of the *-v-a£er 50. "As cas.be seeπ,tδe coupled portions :of tlie top tMsmittter-2θl an.dthe boti»i|i;iTansimtter 3&2- oppose i>he 8soth<jr'ϊϊϊ.ϊiτi aligned #.anηe£ As a result, it is possible iki he acς>usttic etnergy thaih gsaei;afe.d :by he otp mtά bottom.tia»sdwcer assembli-es;2θ05300 and raasmitted o die- t t wafer via flte αtemscusss '?!.> 72 can kϊtefere with and/or cancel oπ^atjotHer-est
1ΘΘ8S] Tlius, it may be desπ<ahie,:m. certain mstsnces, ϊo.opei^te ite.tόp mά bottom tϊaύsducet assemblies 200,300.1« mt alteraafing and/or coasecutive .mai)π.er .during a wafer δleaamg. eyek. IB other ξ5mbόdimcms., one ma,y want to. activate, tlie operate fee op and t bόttiϊtn totasducar assrøiblies^øδ* 300 conciα;rently..lf lαteiferehεeis mil aή'mm-.
[<ΪO86] SeterxMg aόw Ib FIGS, IO aod Il cόBCurreϊJtiy, an alternative relative arm^gem^tt of Up h(iti<am tmnsάn^s assembly-300 aiid tlie iop.fransdycer ssse∞bϊy 200 wr% respect o one. t another inthe degmng systeni iOOO.isilksifated in his emtbodiment, he transmtήtεrs.20{f 3G2;αf hte ojts snil.botfoai transducer asseniblies 2:θβj 300 areαictidiglied &vβ do not opj>ose ons tωother. Thus, intei;fer eiice shoyld .aot be a probilein during &tmuitenecOS generation «tβ& iTaiistόissioπ αf acoustic energy o. he wt afetr. • WMIe fee feoimmlal -angle, of sepat-atfei ^etm^en tϋ& top mid bottoπi 'fraiisMitters 2OJ, 302 is:90 degrees. m Hie illustration,. my ϋihss: mghcmibβvsβά, including without iimitatloaJSO degrees, 45 degrees, et&
[0θ$7| It wjϊs.discoyereci.diuiag th«:cιreatioα of fee above -described system that itupir&ved cleanfcg ϊesύlϋs weris achieved by just haviag lhe hόtlpal rsήsducer atssembly 30ft preheat hi the cleaning system 1000 and arranged &<* shcjwn m:F.ICi 8. «ven >vlιen, npt .-activated -^.e., passive). It was discDTfirεd that he ratnsmittter 3.02. of ?δ<j-θf bottom i'aasducer avSseβitMy SOβ ■\vas'.re:ileetiBg at least a irafctraaof he:aώόusttie όύ&tgy that was.geaerMed by the top transducer :assembl5f 200 :back .toward he bottom t sιιrface,51 of he wafer 50. Thterefoi^ a«oliϊ.e?.asρectof li«!,1tiives6oa Is a novel ^tem ϊhatniilig£s ap2iSsivd.reflecl;K'ε meMber coupled ot th« opposite sαt&ce of the wafer thaa the active iraassid.^t assembjj.. 10088} Referring MOW o FIG:t 12,.a cleajiiag systenr2M0 tIiai: utπfees a passive backsKk tstϋective rrieaiber 400 is schematically illustrated! The .cleaning system 200$ is identical o t U9t pfciearskg-.system 100& except hat het boUotm^T8»sducer assembly ϊs..tφlaee8 by a reflective .member 4βO. IJ? fact, in soiae eπibodime^ ihe reflective member- 40,0 co«ld>ea transducer assembly, such as he onet describe above* hat Ia not acttivated. Hmvevsr, life rafcdve member 400 is not go: limited andean, takeon arøuέh broader variety of sta#ires. Thus, a detdfed explanation of he clteaning sysiein .200 will be omjtted.with he t miderstandkg hatt fee. description qf ckaϋiag systeai'lOόft'abøye will suiBce ibr ilfeepaϊts. Like.mimbcrs are-iised. JQ- refereiice like parts.
[008.9] Tho. reflective member 490 could 'he .a aiere plate o.r o&er strύctαre. Preϊ&tablj, the i-oilecthe.meitiber 400 sS iαade a iiiafeiial thatliiig m afeoxistkallmpsdatice • value (&) hat.is t much greater t&& hatt of -water.. Ih o»e embodiment; it is preferred hat he acoustitcal t impedance value be at least greater .than 5.0 Mrayϊ,, suct? as quaiti. It may ύ\m be preferred thst-peteiiecth?δ .msMbef 400 be spaced from ώ.e s.ur&cc of the wafer 5ft o which Jt is t .fføidϊy eoupM by a distance hat:t is a one-fourth jMβrval of the wavekngth of 11 & aδmrstiø eaergji'bebg. generated by he otp πtϊnsdtucεf assembly '260. Iii.soBig:a.Iterøativα embόdiiaeats hte ■.refi.ecii^e member 400 msxy be ^isgd o absorb;the actoitsiicsal δitsfgj mst≤sad o^refleding it
|0([>5>0| Xlts etletctjye member 40δ.aiay be made of a
Figure imgf000022_0001
v&ieh is depettdem- upon Whetli«r or .not it Ls infeiidec! to be used, ^s a reflector ov &tx- φsetbsi- of Ike acoustical *«^g>',. Ia the emboditnent shown m FløS..12 and 13- tho ££fiec$ve' member' 400 is desired io reflsct acoustical energy^ Tlie reflective meniber #00 -may- bs. made of materials such aS'quarte,, sappJlke, silicone cakbine,.or boron nitride-. Should acou§iicai ϋffitgy ψϊύ) to be absorbed &e .member #'(ϋ CM be constected όni όfPoIyVitiylMkie Dlf'IaoTiάe (FVDF). o.t pblyietealluόiOe&ylene (PTFE) (Also cqmasαaly sold andertiie rade. t nmήe- TsflotM). Th&m&tmβte chosen are based 'upqntfasir respective, acoustical tispedanca (Ϊ4). Table 1 (butew) provides a list of materials and he Zm atssociated wtditbarø.
Tabfel
Material
Aiύmlnύ.
Ah&tήtmήn rolled. 17.33
Figure imgf000022_0002
SQ2/PS63&pJje 3.52 AraMϊte 502/95650 phe 4.Ϊ4 Araldlte 502/95690 phe 12,81
Beryl! nun 24,10
Bismuth 21,5
Brass 7øcu 30 I ' n 40.6
Brick 7.4
Cadmium 24
Carbon vitreous, sigradur n ~o
Concrete 8.0
Copper rolled 44.6
Dαra!τatiύu«ia Ϊ7S 17.63
Epotek 3Dl 2J5
Fused silica 12.55
GeøttanhiBi 29.6
G!i«s pyrex 13.1
Glass quartz 12,1
Glass siSiea 13
Glucose 5,0
Gold 63.8
Granite 26,S
18.7
Iron 46.4
Iron east 33.2
Lead 24.6
LilMum 33.0
Figure imgf000023_0001
1Oi
Molybdenum 63.1
Kickδl 49.5 Pamfϊin 1.76
Polyeslei casting resin 2 86
Porcelain 13.5
FVDF 4,2
Quart/ K cut 15.3
Rubidium 1.93
Salt crvattalltjac x dkeefiαi 10.37
Sapphire, aluminium
44.3 oxide
Scotch tape 2.5 rails thick 2.08
Silicon wry anisotropic - _ - apprυx ' ' i
Silicon carbide
Siiicoπ nitride 36
S'her 38,0
Steel inild 46.0
Steel stainless 45.7
St)cast 2.04
Tantakmi 54,8
Teiloa 2M
Tin 24.2
Titanium 27,3
'ϊracon 4.82
Tungsten 101.0
Urauium 63.0
Vaκadiunι 36,2
Wood cork 0.12
Wood pine LSI
/Mc 29,6
Zinc oxide 36.4
Zirconium {0091] live .acoustics! Impedance Zs of a material, is defmed- as &e product of he deasliy of t that material imt es th veelocity of sound in hat matterial The units for 21s ate Mrayl >f t (Jk-gAn^S'S 1.0**}. Acς>Usiical e∞rgy:trajβsmission is aJTe.cted by fhe dϊffereΩces m ifø 2# of he t ήMtϊkxU feoiigh which tlie acoustical røergv must pass. More spselϊicdiyv ϊargr differences inilm Z ' a between sujjaeεnt materials through which, he acousticatl energy must, pass, results m increased i∑HpsdaTJCδ of he acoutstical energy.
|0092] Due ot thδ acoustical. Itnpsdaijee vuEuesfef ihc variqas siaiaces c>fsfeefeik.piiγe aiemfer 408, ilte sc-Qfistk-al eήεrg}r is- effectively mmsmitted bacfc oward. hΦ wdtvi 56, Thtis sffsc.tivdy cleans itje bpEons st.ιr&cβ 52 without having o provide at<3djtk>nal tmjjsdue.ej'S. i\s discossad above t sheeilective.mambej1400 Is made of &.amterMwith a Za ϊiatis. greater t tliaittile. IliiM thx o^gh. which .tlie actuistieal energy is ransmitted.t Preferably the 7M should be gϊsaterthaβ 5 KfoiyL aϊjd more preferably greater thaa 15 Mtayl, such as qnajt^ . The yeiϊective m«ntber 40β may fee hollow m prefer o create aiti addMoϋlal o-aiisitional space that causes hte acoustical energy to be r^tlected agam 85 it passes tlirpiiglj the reflective røensW 400. During, hte cleaumg prόcess here'mtay be contiiiuous refiectlβtV between he' wafer .50 t and tile refieoπve mferiifear 4<$0 atid it may continue until he acousticalt energy ^balnistesja the. system.
|βrø3| FΪG. !3 shθi»vs,snaltsraatiγ6,embodiϊii.εαt;{3f he passivet cleaning system 2Θ0O where'ϊfi the reti&cϊiw member 4Q0 is- positioned jid|acet!t.the top surface Si o:f thewafer 50 .laihg? than t'hljeattoxH surface 52. A bottom imisdweetr assembly 3.00 is i?sαi in$t«M of a- top transducer assembly 200. This embodiment operates iamuph te same; fasthion as he t embodiment shown Hi flQ> 12 except wilts tbs.iδfl«'ciivδ' memher 400 and he temsdύeer t assembly 3Q0 bemg reversed..
|00?M] Refcmng BOW to, FKJ. 14,-it has been discovered tl5Si.i>4 κϊay be.pfeferabie o utilisse t hollow tubular structures as ώe reflective sieanbsr 400, Exm^tpte«. ©f'hollow abular t iήe'raberss S00A"E ore exemjplitϊed. 'Flie hollow ubular metmber SCiOA-E can be fitted wlth transducers 305A-E if desired. The ubytøt member can be niade ό:f qisatts, plsstic\ mφϊs, or ottiet materials, tføse tώular members 5(WA-F; will havediiϊereπi eiϊeots on the t^ήsmission of hte.scαdsticai εsergy/ Bis tubular jiiembers SOOATE modifleX^s may be oylmdπcdly slisped, natngular. sfiajjed, and rape^ostdal sliaped, K should b& undoistoocl that other shapes may be -used and-ars not limited,o hose shotwnt, the selection of he shape ώay t vary depending upoϋ'tlie desired results,
{QtøS} The rounded drangleli tobukr members 50ΘA-E. also m§y bo used o directhe t t reflected acoustical energy at; lower angles flian liat whkhtit isatwfeehitis dfebctεd at he t wafer SO. TypkaEy thesfc angles are less han 40°,t By reflecting' the acoustical energy &A UΪ&ΛQW angle, a majority *>f ffe acoustical: energy will be .fqciisecl on he bottom surfacte 52'6f' ■ the' ψ&hx -5ft iτoB3 he-totp ransdutcer assembly 2$β.
JO096J ϋtlias also be« discovered that the placement. 'aftliersfieclive member 4fiδ ftom he. t wafer Sø.afeo pfay≤& rolδ uϊ effectively rsmcn>i»g pattioks. The distance, or.gaps, between the reflective. me;mbετ 460; he. rantsducter assembly 200. Qt- 300 and l^wtvfer 50 is t ilelermmecl so as o actcommodate the frequexiG>! of the wavelength. 'ϊh& siqiμύύntor the
Ϊ ^ wavdenglhis: (1.) i whej'eA-- wavefeigfh of ail acoustical wave, Vj,. is tlie speed of propagation of the. waves asci /■-frequency pf the wave, in l/s»« Hz, Odd.1A %vave!eBgifcs (e,g.l/4/a/«51-1/4} gaps tetitl o act t as mafcfekg isyers'that p&tmit ijssrgy opasst into 'the next mfedia, ajM.eyeτ5 y* wayelengrhs (kg; 0.5; 1.0, 1. S, 2,0) .gaps- between he wsfe^tβ and fee reflective member 480 end o t t sxώaacs hte reβectiye propel at tlie media interface. For exjimple. k Fl G. ] 2?. the. gap beWessii het top tcmi$άκκzr assembly 200aπd iJia \yafer.!S(ϊ may .be sef.ibr 1 ajid 1-M vφYfol&Kgihs us. iθr4sτ o eαhapteeher^røjπitssioDt of ite.aeo^stieaϊ «B.6rgy tøoo'fh &e- t cleajiiβg liquόά nnύ he. wtafk-^O, OH thedpposite sidehe gap betwteen he reitecdye φfetπiber 4t>0aάd het wafer δ% may be sέtm LO -wavelengtH (Le, even) i» orjlero erfaauoehe t t ■refϊeciiόn ^toperty so as io. keep ilie.tj-aιismission of aα^islϊcal energy directed, towsrcls he t boifqji? -surface St- βi the waferSft. laths e^tmijpleprovlcled, when using water and a irequme? of 835 IcHx, iϊe 1t waά 1A. wavelength, ϋe gap betwteen hexansdi^er atssemtbly 280. andthe wafer SO is approximately 0,087". The gap between, the reflective mαnb'sr 400a -nd the wafer '50, th I.eOΛvsveleϊigfe, is approximately 0.070".
|00§?l ϊt is ot be'imdersiQoa, howeve.-, hatevetti .though nuitierόas .eharacteπsfo ixnn advantages of ttδ pi-eseot.kveiitio-t haye bem:setipi€i mthe foregomg description-, ogether t with details ofhet stmctureand function of Uiekvemioή, Hie disclosure ϊs ϋlusti-aiive mύy, and changes. may bέ- made ijv'demi.],. especially iαmsMqβs."'όf shape,.ske and an;ange.»etxt; of :pattgΛvf!hi« die prøciple-s of fee mvfentim-tothe. &U extent rødfeated by the broad geseraf πieatibg ofhte tottβs. m which ttte appended clalmδai-e^XpTeέsε^^

Claims

36
CMms
What is claimed is:
L A system for proce-s^mg flat sitleies φmpήύng:
a rdtst&bie suppαrtfor- supporting- a flat article;
a first dispense*- for applyihg. liquid ό.a. firstt suffke&of .a. flat aftiple on&e rot&t&ble support;.
■a second disposer tor applying Mepdto ϋ second surface of a .flat astieie an -the toiatabis support;
a first- ti*ansdϋce.r assembly comprising. -a "first ran^ucef føt t generating seoustie vxtβtgy mά- a fes.t ranstmitter acoμstically coupled. o the &st txtaπsduceiv ihe %st ransducer- t δssemMy.poshiϋrset! $o hat witses he fet dtϊspemer applies liquid to he fsrst 'surfacte of a flat arfcie oji the rqiaUibb support,' a Srst rneciscus of. liquid ϊ§ formed. between εt.ρorttbn:of fkc firsttransmitter sad t Hhierst surface øϊxhe fiat arficle, &nά
a second lϊsmsdncer assembly eαniprisiiig a second taasducer ftor generaimg ^cousifc energy and. a se-.coιid Ufaiismitter. acoustically φu|>led o he second trantsducer, fee sectond iianstfucerssseinbly positioned m. thai when ths øecc»nd dispemor applies liquid to the second surface of hte IM article -on. he rbMt abl«:Siφρort, & second njenϊsαss-'pf liquid is femisfd. between •a.po.tticwft.of fee &«eond'tr^asmitter aud'.the second, surface .of. he flat artielc. t
2.- llte^ystesB of c-laini.l iφcreia- he rottatabte support. supports and. rotates he. fiat articfe int a stϊbstahjiaily hQmø.ntal.oκenJa?lo«r..the first swfa?e of he. article bsmt g a hp -sHuriiee. and tie second surface of he -atttieie -being a bottom surface.
3,- The system of claim .1 furife. comprising fc aictmtiόr operably coπnepεødtothe second tnms4ucox ^sseasbjy for moving lie..secto.αti.fraj.isdiϊcer assembly between a • processing position and a,.retrai?tedpositiua. 37
4> The systarrj oi claim. 3 further;
wherein &t .mtøtaMe'suppόrt sύppofts 8B&r§fate£:'tfae .flat a_$_efo..«i.;a substantially horizontal orientatips, ϊhβ first surface. qf tfee article being atop sϋεfk&i-'mά iϋhe second surface of ϊbe article hung a bottom sariacs--::aad
wherein hte ppocessrag position is a raised position and he .rstrscte:dt positlos. is s. lowered podtiosn.
5, ITiesysters of claim i further cόBiprismg:
an aciυator operabiy connected to th<s second fβhsciucfer atssembly for mόviϋjg.tfe- seeβnd rtansducer aasemblYbeuyeeii apmcessύtg posi^idn sM a retracted pαsitiαa;
a sensor for indicating Imposition of the second fraπsdαcer assembly;
s e«ftiro!Ite operably ccmp&d o tbfet sensor wά he actuatotr ;. ari.d
UQ controller pr<.>grammed ioMop moyømeϋt of he second transducer assetrnbry ypon ά'ceivfeg a signal from t sheensor Itκlϊcaimg that he secontd ransducer atssembly 'is ύ?. the- processing: pcMliøα.
6, The system -of claim' i farther comprising:
kύ actuator όpsrafoly com^ctesi 'to he secotnd taπsdαcer.assenφly for mo\itϊg lie t second rtansducer asserøbly bctween.a processing: position and. atetracted- positioιn.;-.aΩd'
means for physically prohibiting chs secoM ransteter assembly from moving beyond the processing positioa whea moving' ir-om the reϊracbd position to ibs processing position;.
:7, llie.systεm of claim 1 further:
vyhejrøm &e portion of lbs festtransmitter comprises a fet- elongate edge ih&t extends substantially parallel o ifet '.first sur&e'frof an article oil tberotϋtabip sύpport; said
whfefein the portion- ofthe second. tr«ssmittεr comprises & second elongate αigetbat
Figure imgf000028_0001
o ϊhet second surface of an article αathe-rotatable stlppoit 38
S. The sysieia of claim ] furfhei- comprising asource of cleaiώig liquid opsrabiy connected tolfie firsC dispenser atsd the second dispenser.
'9v The system of claim.! further comprising a bsse:for,sιφporting he. -second tttansducef assembly,; the second dispenser being a plurality of aσjjztøs located in he tø§e mά adtapted !tα 4£piy Hφή& ot het seδoa&sarfaee of a fiat article on the rotatable support;
KL "ϊ!he system- of claim 1 wherein the .second raosducer atsseaibly further coitipώes a housing connected o thte second ir&Bsrøjtrør so as.to fotm a gubshmlisliy eøclosed space h vvhifeh ώe second ftmstdυcer is located,- he lousingt comprising .one <5r mote, openings for fknvibg a ggs-iat'o m&øε out ϋiiht Space;
1 L The systssπ of claim- 10 ftirώer. cpmprϊsihg.a Si>«rc« of gas opemtøy coupled to.the one or.
12. The Sj- stem of ciaias 10 whesein,the second trasstiiitler- and'the'liousmg øfs-encapsulMsid
Figure imgf000029_0001
plastic.
13. The system of claim I wfiareia'the second iransinttter.1ms; ^ conwx oyter surface having m eiurtgat^ edge, ftø .second transducer assembly positioned so that ^hdii he second t dispenser appiiβs. tiqύid o ihet secoiid surface of he flat artitcle: oti the rόiamble support, tfee sectifitl nvόαisops of liqitid b.|camedbetogenfhe elongated gsdg& ofthδ- outer ■ΦtNa'z surface. of &e secoad transmitter ad:tltie secondsmfaoe of the ftafartiέie. '
14. Ωie.-sj-stenϊ of claim 13 fetuer comprising a dam surrounding at least aporiioαof a perimeter of hte second ranstmitter so as o forat at liquid .?etainihg channei? he dong&te edget o£:lh<j
Figure imgf000029_0002
beyond a.tqp oftfaε'dam,
W, The system of claim 1 further comprismg:
a dam suiroundmg at least a. portion d.f.a peπiiiefer of the second raαsmitler so:tιtsto fatm :2 liquid ettaiβihg chaiHiei;.and
the second iransmϊtϊer having a :coΩvex outer sarfece hsviag an ajpes, the apex of he t
Figure imgf000029_0003
39
16. ihe system of claim ϊ furthsu comprising a dam suiroundlng at feast a portion of a perimeter of the second transmitter so as io form & liquid rctaaxuxg channel between the iccond txassmHicr and the dam
17. The system of claim I wherein he potrtion of he firsttransmutet? and the portion of (he second trat&miitor oppose one other.
1 S. The system of claim 1 wherdn the portion of he first irat &sauUer and the portion of he t second transmitter do not oppose one other.,
19, The system of claim 1 further comprising:
a controller cperably coupled o thet first traosdycer assembly axκl o he secondt t transducer assembly;
the controller prograπuned to opemie the first raosducter assembly and he hccotA t transducer as$smbl> coasecuϊively.
20. The system of claim i further comprising:
a controller optaablv coupled to lic firtst ransdutcer assembly and to tbo ssjcosd traBsduccr assktably;
t he coαtioller prograramed o opterate he fitstt ransducter assembly aεad itc sccoed t transducer assembly contemporaneoiisij'.
21, the system of claim 1 featliεr comprising
a controller operably coupled to the first transducer assembij ami o Jhe secondt transducer ass«mbl> ;
the controller programmed o opterate he firstt ransducter assembly and he second t transducer astøβbiy m an altemaiing manner.
22. Hie system of claim i wherein the second transmitter is & par-cyϋndricai plate having a concave inner surface and a convex outer surface. 40
23. Use system of CL&3'B-:22' wherein he second rtansducer Msat convex-surface having a curvaturelitatcoaosposds o.a.cturyatute ofhe epnetave imϊex surface of the second. itsnsmitiat,
24. A systemn ibtf de&rώig flat articles cotiϊpfismg:
s .xαtøtable- support' for supporting a fiat arϊMe;
a first, .transdtϊcer assembly comprising a' .&st ransduce?t mά k fkst^tra»§mitt«r acøusiicdly.coαpkd othet first ranstducer, hε&stt.iransiκiύc€r Assembly positioned so.. fbst a first sήnii! gap exists between a portion .of -the first ransmittert and. a:- first sur&se- of a &f 3j;tidε:oji.hte sOtαtabie ?uppqrt. a fust meniscus of l.iq«!d;'beift.g foπ«ed between he portion t oC&e føst rtsnsmitter aαd the first surface of fee itai aήicfo wten.Ikpid' i$:aρpikd to fee fet surface; %nά
aseeQBci(τaasdiϊccϊ' assembly εomf rising a second ransducer atτ?d a second transaiiitter acs«st!caily coupled o thet second mmsd-ueet, he = second itαtϋϋdι?cør assembly positioned -sohatt a second small g$g> exists, betwεens portion. of te secoβd txansmitfe nnά a second: surface -of he. flatt article on ihe rofstøbk support, a second ϊoeaisαϊs of liquid b«mg loHiied between the portioti <yf the second tommtter mά b© secόMt-δ«rfsc:ε -vsfeeii liqliid is a|>ρits<l αt ti)e second s«riiϊc:e.
25. A- systέM for p'rόcδs&iiig flat articl&s c&Jύpr isktg:
arolatabte -support for siφportmg and rotating a il&i $ήkh- in g mh^&niMly hoxhotiύl orientation;-
a traasdϊiqβr'.as≤emb'ly comprlskg a ϊaύsiluet-øf .for geiierstiftg acoustic e«e«g>p f & trajisaiitter acoife'tkally coupled o liet. futst transducer aod;a dam.sun'oundmg at leasts portion of a perimeter øf lietrφitstimtter so as o form at liquid retaining .channel betwesB he t tønsmjttcr and. ihfi dam; and
t hetmsduc«y assembly positioned so tot . a pcsiion of feύassmittex is adjacent a. bottom surface of a flat artsele osite rotattable Support so hat "when liqtuid is applied' o the t bottom surlacs of xhv. flat article;a.nieaisrøs..of liquid is' foiimedfeetweestheporiiouofthe tτ<3Bsai2tieraτid tlis bøUcJm sur&ce oftie- -flϋfcaύrtitele. 41
26, The system mf claim 25 fiiriber comprising a dispecser for applying -liquid. o a bottom t surface, of a flat article, on the ro&tabLe support.
2?;. The system of chkix 25 wfeeift fe ratnsmt itter has a cόnvex outer surface -βavjng an apex.that pfotmdes above a op otf ihø darø.
2& The system ctfckim W wføreiii&e: transmitter is apar-cyiifidriosl •pktfca&ciffc ape^ fovtn.5 M elongated edge <
29, The system of c!aim-2S wherek.the trMϊisdυeør . jsserabϊy Hirther compriss.s δ Itoιι«iitg connected ot het rantsmitter so as o formt a substantially enclosed space .in vvMcht&e trsitsducer is Iqcated,
30, The έysUm..øf. claim 29 wherein ώe trassmittef and tfee housing are encapsulated In an. inβri ..nofi-reaciive plastic .
31 , The systesi øf claim.3δ forite eαmprismg one or more :openiag» for flowing; a, gas kto and/or oαt of the. space.
32; The system of dsiift 25- furtliefcufflpffeitig a bass for' supporting fee ransducer t assembly, one Or morβllqαld dispeύssr located in the b&sø for applying &. liquid to he bottom t surface of aϋat article OE.th& rotataMδ support.
33. A traπsiϊuør assembly- fe>r mouatittg iven&Stk a Bottom surface of a fiat ariicle comprising:
a feϊϊsdueer fer geseratiiig:acox»tic:ener|y;
& teiϊsmitt^ acpusticaily coupled o hte fitrst ransdutcer; mid
a dam surrousidmg at least a portion of a perimeter of he transmittter so as. o form a t liquidtbtatmBg diajiiid between fc. Second rrøsmtiiter ^d he άkmt.
34. The transducer assembly of claim: 33 whetόin he tomsmititcos a.pir-cylmdrlcai :phte: havitjg. a 'coδcaye inner1 stance and a convex' otter surfkcfc.
35. The txansdμcer assembly ofc!a$m.34 Λyhereϊn tlie.ttaasiiacer lias a convex :sjt?rfkee having a otirviatøe htat -.co.sresponds o a curvtature αftte ccaicay^ injϊer surges of -tha s-aπsmitter. t 42
36, THe irsasitufeer assteijibly όfciaiin 33 farther comprising means fox moimtiftg be t
Figure imgf000033_0001
ςlαse-to but spaced1 from a bottom sitfϊMee of a list article..
37* 'Hie rtansducer assembly of .elaiϊri 33 wherein he ransmittter. ltias & convex out£r surface Jiaviϊϊg as apex:prøiϊ&diϊig sbovs -aiσpd: he dmt .
38. The iraiisitacer assembly of claim 33 fαrtlier coøsprtses a.housmg c<.>miected Io the t taissmitfer so ss IO form a substantially etic.lo.se4 space isa which 'the llrahaducer Is located..
39. The t-aϋsdwcei: assembly of.ciayn 38 wliereiB iheitransmitter mid the hopslng axe dieapsiilaied in m iheri iKm^rfiactive plastic.
4Q>- The rantsducer asseøibly of claim 38:feth<it ςojaprisiιig.θH.ft or .more.opesϊkgs.iβr flowing a |BS into imd/or out of (he space.
41. The transducer assembly of.claim 33 farther comprispg:
a base fόrsιψpo.τt3Bg tiie transducer aad th& uasffiiitert; and
øneoj; ^.ote liquid dispensers .looted inihe base aiid adapted o apply liqtuid o he t t bottom sur&εe of a flat article..
43. Ainpthod. of majtofacturiag a traiisdi&er assembly sojHprisiπg:
prtmdiiig; a par-cylindrical raatsimttet pkte;
boϊtSJHg.one &χ.tnόϊ&
Figure imgf000033_0002
to a COUYSX irtBer sαtfedβ'of Lhs tritosmiiter;piatd; .
O0ftJ3«HJtmg a Itoi5slxig:.to thΦ teismite to create an assembly' having a substantially "ajxcjoscd cavity fa. wMbh.tfee -oije or more'iTtosducers are located; and
encapsulating het as?en?bly v/iύ an inert noϋ-teactive plasϋc.
A3-. The method of ciaiπι'42 fuitlier comprising 'connecting a claai o the assemblty so as to suϊϊoiuid at.least a-pprHαn of a perimeter . of hg'ass&ηhtly aiid ibxm,& liquid- retainmg .charωel' &!SSsveen tfae'assestb'iv and the dam.
44. The nrethαct of thim 42 Jurther. eooiprising ■ providing 6ne: or itϊόre openings in fee assembly for. prov?cHbg;8 gas mto amϊ/of out of hs cavity. t 43
45; Aiϊiefhod σf processing a fiat article crøprxsing;
i) supixutksg s.fkt article. In a sifefenfeEy IiQrkotϊbl orkatatjon within a gaseous attaospkeris.the flat sxfcle having & hόitom surface aad a op surfacest
l?).rotatiHg the ϋaf article. while maintaining the sufestaclially horizontal oϊieήtatioB.;
c) applying aJSIm of liquid to he otp surtface ό£the flat article;
d). applying a:Sm. of liqiμ'd ori he botttom.
Figure imgf000034_0001
of lte.fiat artticle*
e) applying acoustietϋtorgy o Uste op surftace of the fiat -article via a føtiraisducer
Figure imgf000034_0002
a.&stu:aiisducer;aiid a'fe§t
Figure imgf000034_0003
txatnsjBitter hi eøntsct with ύit Mm ®f lϊqiάά on be topt surfsce of ls.efl.at a*ttle!$;:#nd
t ) applying acoϋstfc snεrgy o het botttom syriϊtc^ of its flat article via & -siecoM
Figure imgf000034_0004
a second ransducetr and a second teaiisxmttei?, a-pαrdon of ttie sciέoijd ήtmsmittef in coήtaϋt. wϊifa ftε film of liquid dn ώe bottom siufaεe of beiftat t ariiclev
4C The metkjci of όl£m 45 vvherem steps e) and i) are performed iβ-slta.
47. The :mefhod.iδf claim 4S\yherein step f) ftihhex coniptises nusing the-sjecOBd raitsdticea- t assenibly itojti arβftacϊώd position o a ptrocessing -position- wteethe
Figure imgf000034_0005
of ϊlie seeoxϊ.ςl trsasmiiter contacts lse-tfilm of liquid on he botttosϊ s«r&ce of he fet ariktk..
48< Tte.Jitefeoi! of ckim 45 wherem step e) comprises αtoying he first iraήtsducer jtsseaibly ϊtσtii a reltactsd position o atprocessiπg po'sitiøn where 1he poilloO of he • first rassttaitter t coBtøcfs ilw.fi.1m of liquid oti be opt surtface of he flat aMtele>
50, Tlje iϊietiiod oϊ claim 45 Λvherein lie Hqαtid is a deaniήg liquid, selected from, s group consϊsliϊig.of; SDJ , SP2j deioaixed. wafer arid ossbnoated derøϊϊized water,
5.1. 'rhe meihpd of cjφn.45 wherein the. portion of the.-£tr_4.trausiuittar hat coatacte het fύm t of liquid, on Hie opt-syrfaes of the- flat article opposes he.potliotϊ otf tfo<5,secorid eransmiiter that dGHfecis.the filψ of liquid on he opt. smftace of lite flat'imicie,
52, lie. method of:;daiπϊ S 1 Wheieiα steps e) mid fj a?e performed Ia m altema&g øϊshiøa, Oøncurrøitiy MάJoϊ φήsmitϊvely. •53; The juefkxi of claim 45 wherein,he pΩrttkm of he. first rtaftsinltlei:that contacts hte Sm t of liquid on fee S;op; surface pf the flat articie dpes^ not oppose φe portion of he second t transmitter htai contactsheiltiϊn of liquid on heopt surftace oi£-.fhe ilat article,.
54. The method of chύm 53 wherein step? e:) aήcTl) m perfύtRied *fi mialtematmg fashion^, concurrently s&ύhf eønseeαth?ely.
55. The method of cfouas 45 vvherδin..a <fcύii sxιrfo«Ω.d«at least a portion of a perimetsr of the. sseσαd transinHtgr:so as k> fomi a liquid retaining chaaael between flfee secondransmitter and t tije-daiaij ■tliεi'aby.iήcreasiβg he portlien of lk secontd ∞ismϊttδft in :c-oπtaot wifli tϋe Mm ϋϊ liquid OΏ i^tε .bptfemt suffece of .the.fiat srfiole'.
56. Tϊte metltod of ©laM 45 vvherem he acoutstical energy a|>pli.«d in steps e). anil ø is: m tile pega^cmic feqύsacy range ,
57. Tlie method of claim 45 wkersin ihe -second ransmittetr has. a. convex, outer- surface-, having an ape>:. that is iϊl contact with die ISM of he liquid it>h tijefoottό.rø siiϊfaco of heiaf t t article.
SS,. The aiclhod pf claim 57 v^fesinlhesecondttaiismitterisapar-cyliiidrical plate,. the apex'ionani^ss. elongate edge;
59. Tfee methdd of claim 5.7 w3ieιvein he first . trt&nsmϊ lifer, hszs. an elongate edge' that is m oφiq&t -with lite βlϊft. of lthiqemφoϊi thb-toj? suj-faee;.of he fiat /artictle,
60; The method of cblm.45 -whe-reiαthe .secondtraiisducer^sseaiblyiurther. comprises s hpiisin^ cotisfeeted o hte stecon4 ransoititfer so si? to form a substantially ■φieløsβd space in whichtlϊe ^ecQnd.tøϊisducer is loeated, fce .geoottd ÷ransducer ^sateialjly further .c'ompri^ϊfig one-øtmoxe.ϋifSsaiings for flowing a gas mlα ajid/oxoαt of i$e spaceΛ het -method iluthetr comprising: flowing aaϊiierl g3S Itvto he catvity Sϊ>d in όonfeict i\11h he- second trfc_ti$dt?ber:
6L I'he i-ftetheά of claim δό wherein he sectcmd ransmittert -and ine- housing aret encapsulated. in aά inert noii-i^active |?iasiiϊ; >
62. The method of claim 45' wherein he secotnd i-ansmlttertis-.a .{^-cylindrical pkf«j. having a cόήcavs Inner surface and a convex outer surface and the sεeoac.1 ,t$aisducer has a-.cosveχ.. 45
surface, liavύig.a c«π?ature4batcoiτespθMs o a curvatture of he concave htmsiτ surface of ite second rtansmitter.
63. T&e msthof! of claim 45 wherein ώe. IM article is a semiconductor mfe, the top. sill-Face being a device-sideof it*e wafer atsdthe bottom sitr&ce bethg:a fioti-de%4ceside of. he wafer.. t
64.. A.syste.m'.fer ptooessmg Sat articles comprising:
a:rotatahle support for supporling a flat aiticle in ,& substantially hoπzosta! orientation
δ traftsiføcer assemδljt oompnsiiag a-traiisducer for geneiating.scpygtic energy mά a ixausmitter
Figure imgf000036_0001
eospled o hetrέήtsdiicter, he.fejisdtacer assembly positk>t.e<i ϋsό hat t a pcstiδis of th ireaiisraltter is adjacent a- op surfacte of a flat article on φ&sapp&Α so ϊhύ a fmx meitiscύs of Hqoidis;.fo.fmsd bet»feeπ tbe portion «f Hie raasπiitter ■&&t& lic &p surfeee- t t whεa ligniά is applied to ltet.top surface^ and
a reilec-iϊve member pόsiiibned m thai a portion of fee r^l&ctive.ffiemberis.adjaceEtta bottom surface of a fiat article o.π ke suptpόitso ώaia secoaclmeabcαs of ikjiuciis ibimed between a. portion of the; reilscfϊveMerøl?er and he bottom t surface whe^liqαid ts applied o t the bottom sut&pε; sjϊd
tfie reSeetive :mcmbsr positioned so hai at i.etas| a fraction of ilie aetvustk etiδtgy hat t is generated by t fhitest:transducer asssπibly UM passes hrough Ae .fltat srfeb is reflected back tcnvasd. t bhoettom sαrface oi- φe flat article-.
65., The syste.rø of claim 64 wiisrein &e reflective member Is constructed of a. material having six acoxisfical Impedanee that. is greatothan 5,0.
661 The system, of ekkα 64 wherein he fefiteetive member is atuWkv merttber, a' par- cylindrical inembe*; a- fist plate or a curved plate.
66. ilis system, of claim 64 wherein the transcbeer assembly is a#pte«.!i.d create acoustic energy having a wsveie&gth. and wherein ϊie portiotn of the refiectivs meffiber is spaced ironi- the bottom surface of &e iiat artiela at a distance that is- a o«e~.tburtb interval of ie t of &e:aεøustle. eaergy.
'0. 11>e.,isystfem o:f αkim 64 wheitsits life reficciάte Bifembei- is constructed of.<|yattz, sapphire, boroa altiicle, silicon carbide. vitreous eairbide or a cόϊnSimtϊioa h&πsoE. t 46
$L The system -..of claim 64 fether eomprisirvg;
a &st dispenser for applying ■liquid'.o. a op sturfacet of a flat -article on he f qtafable t supfxM; and
a "second dispenser for appϊyiag liqιύ.3 to a bottom surface of a fl£i kvScϊe on the jotataBϊe support,
<$> The sysϊem of claim 64 wherøin the. reflective sieiμberis a second transduce? assembly capable, of generating. acoustic hπetgy.
70. A sysfem for pxocosδisg flat articles comprising;
Figure imgf000037_0001
atransducer assembly comprising a.muisducer and a.ransmitter btondsd o &s t transducer, ϊϊw ratnsducer assembly posMonεd so hat a firstt .small/gap exists Mwes»a ■poitioniof theiraismitter and a &st surface of a lat:aitictle OB' &e:su|3port sd-tbat whώn. iiqusd is: appHedot the Srst sur&ee of iie Satt article, a first mersiseαs ofSqiikt i§ fόtaied between the portion of foeratiismitter anil he.føtst surface ofhe flat atttkls;
a reflective meiϊϊbst positiose-d so.tliat a secoMsisjili gap exists
Figure imgf000037_0002
tb$- reflt-ctive aembef and a second surface -of a Sat article on he. support, sothat when Kqiύd t is.appli^tothe secoadsurfsce of he fitat article, a second meαisftus of liquid is formed beiweeathe-portio.n of hsrteileotive mexaber and he se«oritc! surface øf hό ;flat article; .atiϊd
the refiectiyemgmBei1 positioned so that at least a fiactioa of the acoustic energy genefcatfedby lk'tltrsttraπschtcer assembly 'that passes hrough the fiatt article is rellected h&άs. toward tte second: syrfaδέ oflie:iiatt amcfe by he relletetor niessber.
7L A method of pocessitiglatt articles comprising:
^supporting a.flat article m a substantially horizontal orientation within a .gaseous &taiosp3xej:e6 tϋΦ 'flat article having a bottom Surface and a op sxitlice; t
b) -fotatlngtteffet; article while mamiamiøg ϊlie substantially ihόt&onføl ortentatbδ;
c) sppl yipg a .film oCliquid a bettotjj' surBee ofhe Sat artticle.; 47
d). applying a Wm αf liquid, on the bottom, surface of -the ilat article;.
e) applytϋg acoustic energy to ifee op surftace of liei&t artitcle x?ra.a.ttansduoer asae:mbly comprising a ransdtuce? and a transmitter, a portion, of the ratssitύiter in conttact wMiihe film, of liquid αn thoep stiaikce of ϊhs- Q&t artϊcle; siid
i) rejecting the. acoustic energy gøκetated by te first Ittansdtjcer assembly -that passes $raugh,the flat, srtick back owati-d he botttom, sixrfac-e of he flat articlet γlξt a reiϊfective rftfifiϊber that is ύi Goatactwith he' Mtm of liquid on the bottom surface of the flatailiele.
72. The method of claim 7.1.whεrømttie.χeflective member fs'CGiistrucM o'f a material feaviag. sn acoustical impectøϊice that is. greater &an 5.δ<
73- The:piefe9d..of ela&i 7Ϊ wherein the refϊectiw meraber is atubftkf m'ember, apac- øylindήcal matiberj a .flat .plate Qr %. cυxveά plate. -
74, The;me&sjd of sMsim ?1 wherem fc acoustic energy has -a waveleagth/lhe miectiy© meiriber spaδecl'.from the feoitom surface of ϋs flat artitcle &f a dlsisήce tet: ts s ows-louith interval of the W&vefengtfi of he acotustic energy.
PCT/US2007/060850 2006-01-20 2007-01-22 Acoustic energy system, method and apparatus for processing flat articles WO2007085015A2 (en)

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US20130333723A1 (en) 2013-12-19
WO2007085015A3 (en) 2008-01-24
US8316869B2 (en) 2012-11-27
US9305768B2 (en) 2016-04-05
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US20100326464A1 (en) 2010-12-30
KR20080107381A (en) 2008-12-10

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