WO2007072408A3 - A mems resonator, a method of manufacturing thereof, and a mems oscillator - Google Patents

A mems resonator, a method of manufacturing thereof, and a mems oscillator Download PDF

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Publication number
WO2007072408A3
WO2007072408A3 PCT/IB2006/054930 IB2006054930W WO2007072408A3 WO 2007072408 A3 WO2007072408 A3 WO 2007072408A3 IB 2006054930 W IB2006054930 W IB 2006054930W WO 2007072408 A3 WO2007072408 A3 WO 2007072408A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems
manufacturing
oscillator
resonator
electrode
Prior art date
Application number
PCT/IB2006/054930
Other languages
French (fr)
Other versions
WO2007072408A2 (en
Inventor
Beek Jozef T M Van
Velzen Bart Van
Original Assignee
Nxp Bv
Beek Jozef T M Van
Velzen Bart Van
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv, Beek Jozef T M Van, Velzen Bart Van filed Critical Nxp Bv
Priority to JP2008546789A priority Critical patent/JP2009521175A/en
Priority to EP06842591A priority patent/EP1966886A2/en
Priority to US12/158,986 priority patent/US8058952B2/en
Priority to CN2006800482563A priority patent/CN101395795B/en
Publication of WO2007072408A2 publication Critical patent/WO2007072408A2/en
Publication of WO2007072408A3 publication Critical patent/WO2007072408A3/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane

Abstract

The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movable element (48) being separated by a gap (46, 47) having sidewalls. According to the invention, the MEMS resonator is characterized in that the gap (46, 47) has been provided with a dielectric layer (60) on at least one of the sidewalls.
PCT/IB2006/054930 2005-12-23 2006-12-18 A mems resonator, a method of manufacturing thereof, and a mems oscillator WO2007072408A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008546789A JP2009521175A (en) 2005-12-23 2006-12-18 MEMS resonator, manufacturing method thereof, and MEMS oscillator
EP06842591A EP1966886A2 (en) 2005-12-23 2006-12-18 A mems resonator, a method of manufacturing thereof, and a mems oscillator
US12/158,986 US8058952B2 (en) 2005-12-23 2006-12-18 MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
CN2006800482563A CN101395795B (en) 2005-12-23 2006-12-18 A MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05112943 2005-12-23
EP05112943.5 2005-12-23

Publications (2)

Publication Number Publication Date
WO2007072408A2 WO2007072408A2 (en) 2007-06-28
WO2007072408A3 true WO2007072408A3 (en) 2007-09-27

Family

ID=38050188

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2006/054930 WO2007072408A2 (en) 2005-12-23 2006-12-18 A mems resonator, a method of manufacturing thereof, and a mems oscillator

Country Status (4)

Country Link
EP (1) EP1966886A2 (en)
JP (1) JP2009521175A (en)
CN (1) CN101395795B (en)
WO (1) WO2007072408A2 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009097167A2 (en) * 2008-01-05 2009-08-06 The Regents Of The University Of California Partially-filled electrode-to-resonator gap
JP2009190150A (en) * 2008-02-18 2009-08-27 Sanyo Electric Co Ltd Microelectromechanical device and its manufacturing method
US7990229B2 (en) 2008-04-01 2011-08-02 Sand9, Inc. Methods and devices for compensating a signal using resonators
US8044737B2 (en) 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8476809B2 (en) 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
US8410868B2 (en) 2009-06-04 2013-04-02 Sand 9, Inc. Methods and apparatus for temperature control of devices and mechanical resonating structures
US8044736B2 (en) 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8111108B2 (en) 2008-07-29 2012-02-07 Sand9, Inc. Micromechanical resonating devices and related methods
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
EP2377176B1 (en) 2008-12-17 2016-12-14 Analog Devices, Inc. Mechanical resonating structures including a temperature compensation structure
WO2010077311A1 (en) 2008-12-17 2010-07-08 Sand9, Inc. Multi-port mechanical resonating devices and related methods
US9048811B2 (en) 2009-03-31 2015-06-02 Sand 9, Inc. Integration of piezoelectric materials with substrates
US8736388B2 (en) 2009-12-23 2014-05-27 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8661899B2 (en) 2010-03-01 2014-03-04 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
WO2011133682A1 (en) 2010-04-20 2011-10-27 Guiti Zolfagharkhani Microelectromechanical gyroscopes and related apparatus and methods
WO2012040043A1 (en) 2010-09-20 2012-03-29 Sand9, Inc. Resonant sensing using extensional modes of a plate
EP2512031B1 (en) 2011-04-15 2015-10-07 Nxp B.V. MEMS resonator and method of controlling the same
CN102874736A (en) * 2011-07-14 2013-01-16 中国科学院微电子研究所 Transverse comb tooth type micro-electromechanical vibration energy collector
US9383208B2 (en) 2011-10-13 2016-07-05 Analog Devices, Inc. Electromechanical magnetometer and applications thereof
US10800649B2 (en) 2016-11-28 2020-10-13 Analog Devices International Unlimited Company Planar processing of suspended microelectromechanical systems (MEMS) devices
CN108471297A (en) * 2018-03-21 2018-08-31 东南大学 Low-heat elastic damping both-end fine beam resonator with through-hole structure
US10843920B2 (en) 2019-03-08 2020-11-24 Analog Devices International Unlimited Company Suspended microelectromechanical system (MEMS) devices
CN113572443B (en) * 2021-07-26 2024-02-09 吴江 MEMS resonator preparation method based on electroplating process

Citations (5)

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Publication number Priority date Publication date Assignee Title
US5198390A (en) * 1992-01-16 1993-03-30 Cornell Research Foundation, Inc. RIE process for fabricating submicron, silicon electromechanical structures
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
WO2004027796A2 (en) * 2002-08-07 2004-04-01 Georgia Tech Research Corporation Capacitive resonators and methods of fabrication
US20040080382A1 (en) * 2002-02-01 2004-04-29 Yoshito Nakanishi Filter using micro-mechanical resonator
US20060017523A1 (en) * 2004-06-04 2006-01-26 The Regents Of The University Of California Internal electrostatic transduction structures for bulk-mode micromechanical resonators

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138893B2 (en) * 2002-01-16 2006-11-21 Matsushita Electric Industrial Co., Ltd. Micro device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5198390A (en) * 1992-01-16 1993-03-30 Cornell Research Foundation, Inc. RIE process for fabricating submicron, silicon electromechanical structures
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US20040080382A1 (en) * 2002-02-01 2004-04-29 Yoshito Nakanishi Filter using micro-mechanical resonator
WO2004027796A2 (en) * 2002-08-07 2004-04-01 Georgia Tech Research Corporation Capacitive resonators and methods of fabrication
US20060017523A1 (en) * 2004-06-04 2006-01-26 The Regents Of The University Of California Internal electrostatic transduction structures for bulk-mode micromechanical resonators

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BOUWSTRA S ET AL: "Excitation and detection of vibrations of micromechanical structures using a dielectric thin film", SENSORS AND ACTUATORS, ELSEVIER, vol. 17, no. 1-2, 3 May 1989 (1989-05-03), pages 219 - 223, XP002396154, ISSN: 0250-6874 *
YU-WEI LIN ET AL: "Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps", FREQUENCY CONTROL SYMPOSIUM AND EXPOSITION, 2005. PROCEEDINGS OF THE 2005 IEEE INTERNATIONAL VANCOUVER, BC, CANADA AUG. 29-31, 2005, PISCATAWAY, NJ, USA,IEEE, 29 August 2005 (2005-08-29), pages 128 - 134, XP010877152, ISBN: 0-7803-9053-9 *

Also Published As

Publication number Publication date
JP2009521175A (en) 2009-05-28
WO2007072408A2 (en) 2007-06-28
CN101395795A (en) 2009-03-25
CN101395795B (en) 2011-06-29
EP1966886A2 (en) 2008-09-10

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