WO2007059249A3 - Interferometer with coherent artifact reduction plus vibration and enviromental compensation - Google Patents

Interferometer with coherent artifact reduction plus vibration and enviromental compensation Download PDF

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Publication number
WO2007059249A3
WO2007059249A3 PCT/US2006/044416 US2006044416W WO2007059249A3 WO 2007059249 A3 WO2007059249 A3 WO 2007059249A3 US 2006044416 W US2006044416 W US 2006044416W WO 2007059249 A3 WO2007059249 A3 WO 2007059249A3
Authority
WO
WIPO (PCT)
Prior art keywords
value
interferometer
omega
angle
enviromental
Prior art date
Application number
PCT/US2006/044416
Other languages
French (fr)
Other versions
WO2007059249A2 (en
Inventor
Henry A Hill
Original Assignee
Zetetic Inst
Henry A Hill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst, Henry A Hill filed Critical Zetetic Inst
Publication of WO2007059249A2 publication Critical patent/WO2007059249A2/en
Publication of WO2007059249A3 publication Critical patent/WO2007059249A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02059—Reducing effect of parasitic reflections, e.g. cyclic errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02076—Caused by motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/65—Spatial scanning object beam

Abstract

An interferometric method including: generating a variable frequency source beam; from the source beam, generating a collimated beam propagating at an angle Ω relative to an optical axis; introducing the collimated beam into an interferometer that includes a reference object and a measurement object, wherein at least a portion of the collimated beam interacts with the reference object to generate a reference beam, at least a portion of the collimated beam interacts with the measurement object to generate a return measurement beam, and the reference beam and the return measurement beam are combined to generate a combined beam; causing the angle Ω to have a first value and at a later time a second value that is different from the first value; and causing the variable frequency F to have a first value that corresponds to the first value of the angle Ω and at the later time to have a second value that corresponds to the first value of the angle Ω.
PCT/US2006/044416 2005-11-15 2006-11-15 Interferometer with coherent artifact reduction plus vibration and enviromental compensation WO2007059249A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US73710205P 2005-11-15 2005-11-15
US60/737,102 2005-11-15

Publications (2)

Publication Number Publication Date
WO2007059249A2 WO2007059249A2 (en) 2007-05-24
WO2007059249A3 true WO2007059249A3 (en) 2007-11-22

Family

ID=38049289

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/044416 WO2007059249A2 (en) 2005-11-15 2006-11-15 Interferometer with coherent artifact reduction plus vibration and enviromental compensation

Country Status (3)

Country Link
US (1) US20070121115A1 (en)
TW (1) TW200728685A (en)
WO (1) WO2007059249A2 (en)

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EP1869399A2 (en) 2005-04-11 2007-12-26 Zetetic Institute Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
US8687204B2 (en) * 2011-03-24 2014-04-01 Canon Kabushiki Kaisha Method and apparatus for measuring refractive index based on a ratio between a number of second fringes divided by a difference of the number of second fringes minus a number of first fringes
US10254252B2 (en) * 2013-07-23 2019-04-09 Ler Technologies, Inc. Surface and subsurface detection sensor
EP3232245A1 (en) * 2016-04-13 2017-10-18 Charité - Universitätsmedizin Berlin Method and arrangement for identifying optical aberrations
WO2020180470A1 (en) * 2019-03-01 2020-09-10 Applied Materials, Inc. Transparent wafer center finder
CN113358324B (en) * 2021-06-11 2022-09-02 中国空气动力研究与发展中心超高速空气动力研究所 Speckle interference ablation measurement system and method based on spatial phase shift

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US6894788B2 (en) * 2000-11-20 2005-05-17 Zygo Corporation Interferometric system for automated radius of curvature measurements

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DE3930632A1 (en) * 1989-09-13 1991-03-14 Steinbichler Hans METHOD FOR DIRECT PHASE MEASUREMENT OF RADIATION, IN PARTICULAR LIGHT RADIATION, AND DEVICE FOR CARRYING OUT THIS METHOD
DE4124223C2 (en) * 1991-07-22 2001-07-26 Zeiss Carl Procedure for evaluating interferograms and interferometers
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JP3295583B2 (en) * 1994-12-19 2002-06-24 シャープ株式会社 Optical device and head-mounted display using the optical device
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Also Published As

Publication number Publication date
US20070121115A1 (en) 2007-05-31
WO2007059249A2 (en) 2007-05-24
TW200728685A (en) 2007-08-01

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