WO2007044028A3 - Applications and fabrication techniques for large scale wire grid polarizers - Google Patents

Applications and fabrication techniques for large scale wire grid polarizers Download PDF

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Publication number
WO2007044028A3
WO2007044028A3 PCT/US2005/043031 US2005043031W WO2007044028A3 WO 2007044028 A3 WO2007044028 A3 WO 2007044028A3 US 2005043031 W US2005043031 W US 2005043031W WO 2007044028 A3 WO2007044028 A3 WO 2007044028A3
Authority
WO
WIPO (PCT)
Prior art keywords
centimeters
wire grid
applications
large scale
fabrication techniques
Prior art date
Application number
PCT/US2005/043031
Other languages
French (fr)
Other versions
WO2007044028A2 (en
Inventor
Michael J Little
Charles W Mclaughlin
Original Assignee
Agoura Technologies Inc
Michael J Little
Charles W Mclaughlin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/001,449 external-priority patent/US7351346B2/en
Application filed by Agoura Technologies Inc, Michael J Little, Charles W Mclaughlin filed Critical Agoura Technologies Inc
Priority to JP2007543582A priority Critical patent/JP2008522226A/en
Priority to EP05858570A priority patent/EP1838899A2/en
Publication of WO2007044028A2 publication Critical patent/WO2007044028A2/en
Publication of WO2007044028A3 publication Critical patent/WO2007044028A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Abstract

A wire grid polarizer may be fabricated by forming plurality of substantially-straight metallic lines of predetermined periodicity Λ on a thin film substrate. A plurality of substantially straight nanometer-scale periodic surface relief structures is created on a surface of the substrate. The periodic surface relief structures cover a region greater than about 4 centimeters in length and greater than about 4 centimeters in width, wherein the periodicity Λ is between about 10 nanometers and about 500 nanometers. One or more layers of material are formed on the periodic relief structures. The one or more layers include one or more conductor materials that form the plurality of substantially straight metallic lines over a region of the substrate greater than about 4 centimeters in length and greater than about 4 centimeters in width.
PCT/US2005/043031 2004-11-30 2005-11-28 Applications and fabrication techniques for large scale wire grid polarizers WO2007044028A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007543582A JP2008522226A (en) 2004-11-30 2005-11-28 Application and fabrication technology of large-scale wire grid polarizer
EP05858570A EP1838899A2 (en) 2004-11-30 2005-11-28 Applications and fabrication techniques for large scale wire grid polarizers

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US11/001,449 2004-11-30
US11/001,449 US7351346B2 (en) 2004-11-30 2004-11-30 Non-photolithographic method for forming a wire grid polarizer for optical and infrared wavelengths
US67731005P 2005-05-04 2005-05-04
US67730905P 2005-05-04 2005-05-04
US60/677,309 2005-05-04
US60/677,310 2005-05-04

Publications (2)

Publication Number Publication Date
WO2007044028A2 WO2007044028A2 (en) 2007-04-19
WO2007044028A3 true WO2007044028A3 (en) 2009-04-09

Family

ID=36573034

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/043031 WO2007044028A2 (en) 2004-11-30 2005-11-28 Applications and fabrication techniques for large scale wire grid polarizers

Country Status (5)

Country Link
US (1) US7561332B2 (en)
EP (1) EP1838899A2 (en)
JP (1) JP2008522226A (en)
KR (1) KR20070091314A (en)
WO (1) WO2007044028A2 (en)

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Publication number Publication date
US20060118514A1 (en) 2006-06-08
EP1838899A2 (en) 2007-10-03
WO2007044028A2 (en) 2007-04-19
JP2008522226A (en) 2008-06-26
KR20070091314A (en) 2007-09-10
US7561332B2 (en) 2009-07-14

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