WO2007025199A3 - Multi-level cleanspace fabricator elevator system - Google Patents

Multi-level cleanspace fabricator elevator system Download PDF

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Publication number
WO2007025199A3
WO2007025199A3 PCT/US2006/033344 US2006033344W WO2007025199A3 WO 2007025199 A3 WO2007025199 A3 WO 2007025199A3 US 2006033344 W US2006033344 W US 2006033344W WO 2007025199 A3 WO2007025199 A3 WO 2007025199A3
Authority
WO
WIPO (PCT)
Prior art keywords
tool
fabricator
level
elevator system
cleanspace fabricator
Prior art date
Application number
PCT/US2006/033344
Other languages
French (fr)
Other versions
WO2007025199A2 (en
Inventor
Frederick A Flitsch
Original Assignee
Frederick A Flitsch
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Frederick A Flitsch filed Critical Frederick A Flitsch
Publication of WO2007025199A2 publication Critical patent/WO2007025199A2/en
Publication of WO2007025199A3 publication Critical patent/WO2007025199A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Abstract

The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. In another aspect, the fabricator tool placement and replacement can be accomplished while maintaining a clean space environment about the fabricator tool.
PCT/US2006/033344 2005-08-26 2006-08-26 Multi-level cleanspace fabricator elevator system WO2007025199A2 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US59605305P 2005-08-26 2005-08-26
US60/596,053 2005-08-26
US59609905P 2005-08-31 2005-08-31
US60/596,099 2005-08-31
US59617305P 2005-09-06 2005-09-06
US60/596,173 2005-09-06
US59634305P 2005-09-18 2005-09-18
US60/596,343 2005-09-18

Publications (2)

Publication Number Publication Date
WO2007025199A2 WO2007025199A2 (en) 2007-03-01
WO2007025199A3 true WO2007025199A3 (en) 2009-04-23

Family

ID=37772464

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/033344 WO2007025199A2 (en) 2005-08-26 2006-08-26 Multi-level cleanspace fabricator elevator system

Country Status (2)

Country Link
US (1) US7467024B2 (en)
WO (1) WO2007025199A2 (en)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9159592B2 (en) * 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
US7513822B2 (en) * 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US20150142161A1 (en) * 2013-11-18 2015-05-21 Futrfab Inc. Method and apparatus for mobile cleanspace fabricators
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US7996174B2 (en) 2007-12-18 2011-08-09 Teradyne, Inc. Disk drive testing
US8549912B2 (en) 2007-12-18 2013-10-08 Teradyne, Inc. Disk drive transport, clamping and testing
US8095234B2 (en) 2008-04-17 2012-01-10 Teradyne, Inc. Transferring disk drives within disk drive testing systems
US8160739B2 (en) 2008-04-17 2012-04-17 Teradyne, Inc. Transferring storage devices within storage device testing systems
US7848106B2 (en) 2008-04-17 2010-12-07 Teradyne, Inc. Temperature control within disk drive testing systems
US20090262455A1 (en) 2008-04-17 2009-10-22 Teradyne, Inc. Temperature Control Within Disk Drive Testing Systems
US8305751B2 (en) 2008-04-17 2012-11-06 Teradyne, Inc. Vibration isolation within disk drive testing systems
US8117480B2 (en) 2008-04-17 2012-02-14 Teradyne, Inc. Dependent temperature control within disk drive testing systems
US8238099B2 (en) 2008-04-17 2012-08-07 Teradyne, Inc. Enclosed operating area for disk drive testing systems
US8041449B2 (en) 2008-04-17 2011-10-18 Teradyne, Inc. Bulk feeding disk drives to disk drive testing systems
US7945424B2 (en) 2008-04-17 2011-05-17 Teradyne, Inc. Disk drive emulator and method of use thereof
US8102173B2 (en) 2008-04-17 2012-01-24 Teradyne, Inc. Thermal control system for test slot of test rack for disk drive testing system with thermoelectric device and a cooling conduit
CN102112887B (en) 2008-06-03 2015-06-10 泰拉丁公司 Processing storage devices
US8687356B2 (en) 2010-02-02 2014-04-01 Teradyne, Inc. Storage device testing system cooling
US8466699B2 (en) 2009-07-15 2013-06-18 Teradyne, Inc. Heating storage devices in a testing system
US7920380B2 (en) 2009-07-15 2011-04-05 Teradyne, Inc. Test slot cooling system for a storage device testing system
US7995349B2 (en) 2009-07-15 2011-08-09 Teradyne, Inc. Storage device temperature sensing
US8628239B2 (en) 2009-07-15 2014-01-14 Teradyne, Inc. Storage device temperature sensing
US8116079B2 (en) 2009-07-15 2012-02-14 Teradyne, Inc. Storage device testing system cooling
US8547123B2 (en) 2009-07-15 2013-10-01 Teradyne, Inc. Storage device testing system with a conductive heating assembly
US9779780B2 (en) 2010-06-17 2017-10-03 Teradyne, Inc. Damping vibrations within storage device testing systems
US8687349B2 (en) 2010-07-21 2014-04-01 Teradyne, Inc. Bulk transfer of storage devices using manual loading
US9001456B2 (en) 2010-08-31 2015-04-07 Teradyne, Inc. Engaging test slots
TWI608980B (en) * 2012-01-11 2017-12-21 富特法公司 Method of producing substrates
TWI573214B (en) * 2012-01-12 2017-03-01 富特法公司 Retrofitting cleanroom fabricators into cleanspace fabricators
US20140011323A1 (en) * 2012-07-06 2014-01-09 Frederick Flitsch Processes relating to cleanspace fabricators
US9459312B2 (en) 2013-04-10 2016-10-04 Teradyne, Inc. Electronic assembly test system
WO2015061451A1 (en) * 2013-10-23 2015-04-30 Applied Materials, Inc Universal component lift apparatus, assemblies, and methods for electronic device manufacturing
DE102016124876A1 (en) 2016-12-19 2018-06-21 Cl Schutzrechtsverwaltungs Gmbh Plant for the additive production of three-dimensional objects
US20180171653A1 (en) * 2016-12-21 2018-06-21 Fluor Technologies Corporation Reconfigurable modular processing facility
US10845410B2 (en) 2017-08-28 2020-11-24 Teradyne, Inc. Automated test system having orthogonal robots
US11226390B2 (en) 2017-08-28 2022-01-18 Teradyne, Inc. Calibration process for an automated test system
US10948534B2 (en) 2017-08-28 2021-03-16 Teradyne, Inc. Automated test system employing robotics
US10725091B2 (en) 2017-08-28 2020-07-28 Teradyne, Inc. Automated test system having multiple stages
JP6955984B2 (en) * 2017-12-05 2021-10-27 東京エレクトロン株式会社 Substrate processing equipment, installation method of substrate processing equipment, and computer storage medium
US10983145B2 (en) 2018-04-24 2021-04-20 Teradyne, Inc. System for testing devices inside of carriers
US10775408B2 (en) 2018-08-20 2020-09-15 Teradyne, Inc. System for testing devices inside of carriers
US11754622B2 (en) 2020-10-22 2023-09-12 Teradyne, Inc. Thermal control system for an automated test system
US11953519B2 (en) 2020-10-22 2024-04-09 Teradyne, Inc. Modular automated test system
US11899042B2 (en) 2020-10-22 2024-02-13 Teradyne, Inc. Automated test system
US11754596B2 (en) 2020-10-22 2023-09-12 Teradyne, Inc. Test site configuration in an automated test system
US11867749B2 (en) 2020-10-22 2024-01-09 Teradyne, Inc. Vision system for an automated test system

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139459A (en) * 1990-10-22 1992-08-18 Tdk Corporation Clean transfer method and system therefor
US5425793A (en) * 1992-02-13 1995-06-20 Matsushita Electric Industrial Co., Ltd. Coupling-type clean space apparatus
US5562539A (en) * 1991-04-17 1996-10-08 Matsushita Electric Industrial Co., Ltd. Clean space system
US5570990A (en) * 1993-11-05 1996-11-05 Asyst Technologies, Inc. Human guided mobile loader stocker
US5848933A (en) * 1995-07-18 1998-12-15 Semifab, Incorporated Docking and environmental purging system for integrated circuit wafer transport assemblies
US6082949A (en) * 1996-10-11 2000-07-04 Asyst Technologies, Inc. Load port opener
US6138721A (en) * 1997-09-03 2000-10-31 Asyst Technologies, Inc. Tilt and go load port interface alignment system
US6183358B1 (en) * 1997-11-17 2001-02-06 Texas Instruments Incorporated Isolated multilevel fabricating facility with two way clean tunnel transport system with each tool having adjacent support skid
US6220808B1 (en) * 1998-07-13 2001-04-24 Asyst Technologies, Inc. Ergonomic, variable size, bottom opening system compatible with a vertical interface
US6238283B1 (en) * 1999-03-17 2001-05-29 Fujitsu Limited Double-sealed work conveying and transferring apparatus and container inspecting method
US20020025244A1 (en) * 2000-04-12 2002-02-28 Kim Ki-Sang Transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same
US20020129707A1 (en) * 1999-07-06 2002-09-19 Ebara Corporation Substrate transport container
US20040047714A1 (en) * 2002-09-06 2004-03-11 Recif, Societe Anonyme System for the conveying and storage of containers of semiconductor wafers, and transfer mechanism
US6736582B1 (en) * 1999-04-09 2004-05-18 Brooks Automation, Inc. Device for manipulating an object for loading and unloading a clean room
US20040187451A1 (en) * 2000-12-04 2004-09-30 Yoko Suzuki Substrate transport apparatus, pod and method
US6875282B2 (en) * 2001-05-17 2005-04-05 Ebara Corporation Substrate transport container
US7014672B2 (en) * 2002-07-01 2006-03-21 Advanced Display Inc. Carrying vehicle, manufacturing apparatus, and carrying system
US20080089765A1 (en) * 2006-09-13 2008-04-17 Daifuku Co., Ltd. Method for processing substrates

Family Cites Families (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3158457A (en) 1962-05-14 1964-11-24 Willis J Whitfield Ultra-clean room
US3588176A (en) 1968-11-13 1971-06-28 Ibm Article transport system and method
US3812947A (en) 1969-07-29 1974-05-28 Texas Instruments Inc Automatic slice processing
US3603646A (en) 1970-01-26 1971-09-07 Ibm Semiconductor wafer air slide with controlled wafer motion
US3930684A (en) 1971-06-22 1976-01-06 Lasch Jr Cecil A Automatic wafer feeding and pre-alignment apparatus and method
US3976330A (en) 1975-10-01 1976-08-24 International Business Machines Corporation Transport system for semiconductor wafer multiprocessing station system
US4081201A (en) 1976-12-27 1978-03-28 International Business Machines Corporation Wafer air film transportation system
US4165132A (en) 1977-02-28 1979-08-21 International Business Machines Corporation Pneumatic control of the motion of objects suspended on an air film
US4315705A (en) 1977-03-18 1982-02-16 Gca Corporation Apparatus for handling and treating wafers
US4278366A (en) 1977-03-18 1981-07-14 Gca Corporation Automatic wafer processing system and method
US4299518A (en) 1980-03-03 1981-11-10 Texas Instruments Incorporated Manufacturing work station
US4348139A (en) 1980-04-30 1982-09-07 International Business Machines Corp. Gas film wafer transportation system
US4409889A (en) 1981-11-02 1983-10-18 Burleson Maurice L Modular clean room
DE3219502C2 (en) 1982-05-25 1990-04-19 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Device for the automatic transport of disc-shaped objects
US4682927A (en) 1982-09-17 1987-07-28 Nacom Industries, Incorporated Conveyor system
DE3330536C2 (en) 1983-08-24 1985-08-22 Fläkt AB, Nacka Ceiling construction for clean rooms
US4861222A (en) 1984-03-09 1989-08-29 Tegal Corporation Cassette elevator for use in a modular article processing machine
US4667580A (en) 1984-07-19 1987-05-26 Wetzel Lawrence E Clean room module
JPS6162739A (en) 1984-09-03 1986-03-31 Sanki Eng Co Ltd Clean tunnel
GB2165936B (en) 1984-10-23 1989-07-12 Shimizu Construction Co Ltd Clean room
US4875825A (en) 1985-07-24 1989-10-24 Hewlett-Packard Company Method for automated cassette handling
US4667579A (en) 1985-10-03 1987-05-26 Daw, Incorporated Cleanroom structure
US4826360A (en) 1986-03-10 1989-05-02 Shimizu Construction Co., Ltd. Transfer system in a clean room
US4722659A (en) 1986-05-16 1988-02-02 Thermco Systems, Inc. Semiconductor wafer carrier transport apparatus
DE3637880C2 (en) 1986-11-06 1994-09-01 Meissner & Wurst Transportable container for handling semiconductor elements during their manufacture as well as methods for the particle-free delivery of products
KR930002562B1 (en) 1986-11-20 1993-04-03 시미즈 겐세쯔 가부시끼가이샤 Dust tight storage cabinet apparatus for use in clean rooms
FR2620049B2 (en) 1986-11-28 1989-11-24 Commissariat Energie Atomique PROCESS FOR PROCESSING, STORING AND / OR TRANSFERRING AN OBJECT INTO A HIGHLY CLEAN ATMOSPHERE, AND CONTAINER FOR CARRYING OUT SAID METHOD
US4804392A (en) 1987-09-17 1989-02-14 Spengler Charles W Clean air facility
US4964776A (en) 1987-12-01 1990-10-23 Tsubakimoto Chain Co. Article transfer and storage system
JPH0756879B2 (en) 1988-03-31 1995-06-14 日鉄セミコンダクター株式会社 Semiconductor dust-free manufacturing equipment
US4840530A (en) 1988-05-23 1989-06-20 Nguyen Loc H Transfer apparatus for semiconductor wafers
DE3923405A1 (en) 1989-07-14 1991-01-24 Wacker Chemitronic DEVICE FOR TRANSPORTING AND POSITIONING DISC-SHAPED WORKPIECES, IN PARTICULAR SEMICONDUCTOR DISC, AND METHOD FOR THE WET-CHEMICAL TREATMENT OF THE SAME
US5167575A (en) 1989-08-23 1992-12-01 Macdonald Ross P Clean room including an internal partition system
US5029518A (en) 1989-10-16 1991-07-09 Clean Air Technology, Inc. Modular clean room structure
JPH03291436A (en) 1990-04-05 1991-12-20 N M B Semiconductor:Kk Clean room of semiconductor manufacturing factory
US5058491A (en) 1990-08-27 1991-10-22 Taiwan Semiconductor Manufacturing Company, Ltd. Building and method for manufacture of integrated circuits
US5145303A (en) 1991-02-28 1992-09-08 Mcnc Method and apparatus for reducing particulate contamination in processing chambers
DE4328995C2 (en) 1993-08-28 1997-01-23 Meissner & Wurst Clean room system
US5344365A (en) 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
US6099599A (en) 1996-05-08 2000-08-08 Industrial Technology Research Institute Semiconductor device fabrication system
US5795356A (en) 1996-05-31 1998-08-18 Slsp Partners, Inc. Microelectronic component fabrication facility, and process for making and using the facility
JP2853677B2 (en) 1996-10-28 1999-02-03 日本電気株式会社 Semiconductor device manufacturing line
US5860258A (en) 1997-06-09 1999-01-19 Faith; William C. Modular building
JP3196719B2 (en) 1998-03-31 2001-08-06 日本電気株式会社 Semiconductor manufacturing line having contamination prevention isolation line, wafer transfer mechanism, and semiconductor manufacturing method
DE19835538A1 (en) 1998-08-06 2000-02-10 Meissner & Wurst Clean room
US6598279B1 (en) 1998-08-21 2003-07-29 Micron Technology, Inc. Multiple connection socket assembly for semiconductor fabrication equipment and methods employing same
US7083515B2 (en) 1999-09-07 2006-08-01 Speedfam-Ipec Corporation Clean room facility and construction method
US6574937B1 (en) 1999-09-07 2003-06-10 Speedfam-Ipec Corporation Clean room and method
US6582178B2 (en) 2000-08-14 2003-06-24 Daniel G. Petruccelli Mini-modual manufacturing environmental
JP2002147811A (en) 2000-11-08 2002-05-22 Sharp Corp Cleanroom
US6854583B1 (en) 2001-02-06 2005-02-15 Middlesex General Industries, Inc. Conveyorized storage and transportation system
US7039999B2 (en) 2002-04-25 2006-05-09 Tarr Adam L Method for installation of semiconductor fabrication tools
US7269925B2 (en) 2002-06-14 2007-09-18 Wei Chak Joseph Lam Layout of production facility
KR100524875B1 (en) 2003-06-28 2005-10-31 엘지.필립스 엘시디 주식회사 Clean room system
US7257458B1 (en) 2005-12-20 2007-08-14 Advanced Micro Devices, Inc. Automated integrated circuit device manufacturing facility using central control

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139459A (en) * 1990-10-22 1992-08-18 Tdk Corporation Clean transfer method and system therefor
US5562539A (en) * 1991-04-17 1996-10-08 Matsushita Electric Industrial Co., Ltd. Clean space system
US5425793A (en) * 1992-02-13 1995-06-20 Matsushita Electric Industrial Co., Ltd. Coupling-type clean space apparatus
US5570990A (en) * 1993-11-05 1996-11-05 Asyst Technologies, Inc. Human guided mobile loader stocker
US5848933A (en) * 1995-07-18 1998-12-15 Semifab, Incorporated Docking and environmental purging system for integrated circuit wafer transport assemblies
US6082949A (en) * 1996-10-11 2000-07-04 Asyst Technologies, Inc. Load port opener
US6138721A (en) * 1997-09-03 2000-10-31 Asyst Technologies, Inc. Tilt and go load port interface alignment system
US6183358B1 (en) * 1997-11-17 2001-02-06 Texas Instruments Incorporated Isolated multilevel fabricating facility with two way clean tunnel transport system with each tool having adjacent support skid
US6220808B1 (en) * 1998-07-13 2001-04-24 Asyst Technologies, Inc. Ergonomic, variable size, bottom opening system compatible with a vertical interface
US6238283B1 (en) * 1999-03-17 2001-05-29 Fujitsu Limited Double-sealed work conveying and transferring apparatus and container inspecting method
US6736582B1 (en) * 1999-04-09 2004-05-18 Brooks Automation, Inc. Device for manipulating an object for loading and unloading a clean room
US20020129707A1 (en) * 1999-07-06 2002-09-19 Ebara Corporation Substrate transport container
US20020025244A1 (en) * 2000-04-12 2002-02-28 Kim Ki-Sang Transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same
US20040187451A1 (en) * 2000-12-04 2004-09-30 Yoko Suzuki Substrate transport apparatus, pod and method
US6875282B2 (en) * 2001-05-17 2005-04-05 Ebara Corporation Substrate transport container
US7014672B2 (en) * 2002-07-01 2006-03-21 Advanced Display Inc. Carrying vehicle, manufacturing apparatus, and carrying system
US20040047714A1 (en) * 2002-09-06 2004-03-11 Recif, Societe Anonyme System for the conveying and storage of containers of semiconductor wafers, and transfer mechanism
US20080089765A1 (en) * 2006-09-13 2008-04-17 Daifuku Co., Ltd. Method for processing substrates

Also Published As

Publication number Publication date
US7467024B2 (en) 2008-12-16
US20070055404A1 (en) 2007-03-08
WO2007025199A2 (en) 2007-03-01

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