WO2007019548A3 - Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry - Google Patents

Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry Download PDF

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Publication number
WO2007019548A3
WO2007019548A3 PCT/US2006/031066 US2006031066W WO2007019548A3 WO 2007019548 A3 WO2007019548 A3 WO 2007019548A3 US 2006031066 W US2006031066 W US 2006031066W WO 2007019548 A3 WO2007019548 A3 WO 2007019548A3
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WO
WIPO (PCT)
Prior art keywords
effects
wavefront
measurement
vibrations
compensation
Prior art date
Application number
PCT/US2006/031066
Other languages
French (fr)
Other versions
WO2007019548A2 (en
Inventor
Henry A Hill
Original Assignee
Zetetic Inst
Henry A Hill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst, Henry A Hill filed Critical Zetetic Inst
Publication of WO2007019548A2 publication Critical patent/WO2007019548A2/en
Publication of WO2007019548A3 publication Critical patent/WO2007019548A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068—Auto-alignment of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02076—Caused by motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Abstract

A wavefront interferometry system including: a wavefront interferometer that during operation combines a reference beam from a reference object and a measurement beam from a measurement object to generate a combined beam; and a processor system programmed to processes the combined beam to concurrently generate therefrom a control signal and information about the difference in wavefront profiles of the reference and measurement objects, wherein the control signal controls a system parameter so as to maintain an optical path length difference between a spot on the reference object and a corresponding spot on the measurement object at a constant value mod 2π.
PCT/US2006/031066 2005-08-08 2006-08-08 Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry WO2007019548A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70626805P 2005-08-08 2005-08-08
US60/706,268 2005-08-08

Publications (2)

Publication Number Publication Date
WO2007019548A2 WO2007019548A2 (en) 2007-02-15
WO2007019548A3 true WO2007019548A3 (en) 2008-01-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/031066 WO2007019548A2 (en) 2005-08-08 2006-08-08 Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry

Country Status (3)

Country Link
US (1) US7405832B2 (en)
TW (1) TW200706831A (en)
WO (1) WO2007019548A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007008265A2 (en) * 2005-04-11 2007-01-18 Zetetic Institute Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
US7428058B2 (en) * 2005-05-18 2008-09-23 Zetetic Institute Apparatus and method for in situ and ex situ measurements of optical system flare
WO2007025147A2 (en) * 2005-08-26 2007-03-01 Zetetic Institute Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry
TW200728685A (en) * 2005-11-15 2007-08-01 Zetetic Inst Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometry
WO2009009081A2 (en) 2007-07-10 2009-01-15 Massachusetts Institute Of Technology Tomographic phase microscopy
EP2954309B1 (en) 2013-02-05 2019-08-28 Massachusetts Institute of Technology 3-d holographic imaging flow cytometry
CN110793440B (en) * 2019-11-01 2021-05-18 中国计量大学 Optical deflection transient measurement method
US11237059B1 (en) * 2020-12-14 2022-02-01 Gerchberg Ophthalmic Dispensing, PLLC Totagraphy: Coherent diffractive/digital information reconstruction by iterative phase recovery using special masks

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US6940602B2 (en) * 2000-11-17 2005-09-06 Centre National De La Recherche Scientific (C.N.R.S.) Method and device for high-speed interferential microscopic imaging of an object

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DE3930632A1 (en) 1989-09-13 1991-03-14 Steinbichler Hans METHOD FOR DIRECT PHASE MEASUREMENT OF RADIATION, IN PARTICULAR LIGHT RADIATION, AND DEVICE FOR CARRYING OUT THIS METHOD
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US5412474A (en) 1992-05-08 1995-05-02 Smithsonian Institution System for measuring distance between two points using a variable frequency coherent source
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US5589938A (en) 1995-07-10 1996-12-31 Zygo Corporation Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration
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US5883717A (en) 1996-06-04 1999-03-16 Northeastern University Optical quadrature interferometry utilizing polarization to obtain in-phase and quadrature information
US5915048A (en) 1996-06-05 1999-06-22 Zetetic Institute Method and apparatus for discriminating in-focus images from out-of-focus light signals from background and foreground light sources
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Also Published As

Publication number Publication date
TW200706831A (en) 2007-02-16
WO2007019548A2 (en) 2007-02-15
US20070058174A1 (en) 2007-03-15
US7405832B2 (en) 2008-07-29

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