WO2007015772A3 - Apparatus and method for measuring a glass sheet - Google Patents

Apparatus and method for measuring a glass sheet Download PDF

Info

Publication number
WO2007015772A3
WO2007015772A3 PCT/US2006/027492 US2006027492W WO2007015772A3 WO 2007015772 A3 WO2007015772 A3 WO 2007015772A3 US 2006027492 W US2006027492 W US 2006027492W WO 2007015772 A3 WO2007015772 A3 WO 2007015772A3
Authority
WO
WIPO (PCT)
Prior art keywords
glass sheet
measuring
support members
glass
ranging device
Prior art date
Application number
PCT/US2006/027492
Other languages
French (fr)
Other versions
WO2007015772A2 (en
Inventor
Jesse R Frederick
Jeffrey Clinton Mccreary
John C Morrison
Brian P Strines
James P Trice
Original Assignee
Corning Inc
Jesse R Frederick
Jeffrey Clinton Mccreary
John C Morrison
Brian P Strines
James P Trice
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc, Jesse R Frederick, Jeffrey Clinton Mccreary, John C Morrison, Brian P Strines, James P Trice filed Critical Corning Inc
Priority to KR1020087004569A priority Critical patent/KR101294450B1/en
Priority to CN200680034661XA priority patent/CN101268356B/en
Priority to EP06787404A priority patent/EP1907791A4/en
Priority to JP2008523933A priority patent/JP5469340B2/en
Publication of WO2007015772A2 publication Critical patent/WO2007015772A2/en
Publication of WO2007015772A3 publication Critical patent/WO2007015772A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C5/00—Measuring height; Measuring distances transverse to line of sight; Levelling between separated points; Surveyors' levels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/045—Ball or roller bearings having rolling elements journaled in one of the moving parts
    • F16C29/046—Ball or roller bearings having rolling elements journaled in one of the moving parts with balls journaled in pockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Abstract

An apparatus for measuring a pane of glass. The apparatus includes a stable base having a plurality of repositionable support members arrayed on the base. A glass sheet is placed overtop the support members, and a conventional distance measuring device, such as a laser ranging device coupled to a system for translating the ranging device along the x-y and z axes, is suspended above the glass sheet. A plurality of distance measurements are taken, and the out-of-plane deviation of the glass sheet is thereafter determined. Contact between each support member and the glass sheet to be measured is preferably a point contact.
PCT/US2006/027492 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet WO2007015772A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020087004569A KR101294450B1 (en) 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet
CN200680034661XA CN101268356B (en) 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet
EP06787404A EP1907791A4 (en) 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet
JP2008523933A JP5469340B2 (en) 2005-07-27 2006-07-13 Apparatus and method for measuring sheet glass

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70332305P 2005-07-27 2005-07-27
US60/703,323 2005-07-27

Publications (2)

Publication Number Publication Date
WO2007015772A2 WO2007015772A2 (en) 2007-02-08
WO2007015772A3 true WO2007015772A3 (en) 2007-04-12

Family

ID=37709041

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/027492 WO2007015772A2 (en) 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet

Country Status (6)

Country Link
EP (1) EP1907791A4 (en)
JP (3) JP5469340B2 (en)
KR (1) KR101294450B1 (en)
CN (1) CN101268356B (en)
TW (1) TWI300838B (en)
WO (1) WO2007015772A2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101910782B (en) * 2007-11-30 2013-03-20 康宁股份有限公司 Method of and apparatus for detecting change in shape of a moving substrate
CN104310032A (en) * 2014-11-03 2015-01-28 苏州精创光学仪器有限公司 Conveying device of glass measuring system

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007015772A2 (en) * 2005-07-27 2007-02-08 Corning Incorporated Apparatus and method for measuring a glass sheet
CN102721356A (en) * 2012-06-12 2012-10-10 无锡市麦希恩机械制造有限公司 Inspection device structure for automotive glass skylight
CN103418644B (en) * 2013-09-02 2015-02-18 苏州赛斯德工程设备有限公司 Bending machine with assisted locating jig
JP2017501951A (en) * 2013-11-25 2017-01-19 コーニング インコーポレイテッド Method for determining the shape of a specular reflecting surface that is substantially columnar
CN103673915A (en) * 2013-12-20 2014-03-26 苏州精创光学仪器有限公司 Device for quickly measuring warping degree of touch screen protective glass
CN104006769B (en) * 2014-05-13 2017-01-18 苏州金牛精密机械有限公司 Jig used for detecting planarity of fin tube
CN105783794B (en) * 2016-03-22 2019-03-15 阳谷祥光铜业有限公司 A kind of plane monitoring-network method and apparatus
CN105806247A (en) * 2016-05-23 2016-07-27 南京林业大学 Wood board warping online detection device and detection method
CN109737881A (en) * 2019-03-22 2019-05-10 李兆祥 A kind of gear monitoring device
CN112595281B (en) * 2020-12-31 2022-09-27 域鑫科技（惠州）有限公司 Method and medium for rapidly measuring surface profile of workpiece

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291269A (en) * 1991-12-06 1994-03-01 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
WO2000012961A1 (en) * 1998-08-31 2000-03-09 Therma-Wave, Inc. Combination thin-film stress and thickness measurement device
US20020036774A1 (en) * 2000-08-08 2002-03-28 Emil Kamieniecki Apparatus and method for handling and testing of wafers
US6367159B1 (en) * 1998-06-08 2002-04-09 Kuroda Precision Industries, Ltd. Method and apparatus for measuring surface shape of thin element
US6567169B1 (en) * 1999-08-31 2003-05-20 Koninklijke Philips Electronics N.V. Method of and device for determining the warpage of a wafer
US6710857B2 (en) * 2000-03-13 2004-03-23 Nikon Corporation Substrate holding apparatus and exposure apparatus including substrate holding apparatus
US20050039342A1 (en) * 2003-08-18 2005-02-24 Kirstine Rodney L. Method and apparatus for measurement of thickness and warpage of substrates

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
GB1277576A (en) * 1968-06-27 1972-06-14 Ernest James Price Conveyors or supports
JPS60146807U (en) * 1984-03-12 1985-09-30 河口湖精密株式会社 Dustproof structure of digital caliper
JPH057532Y2 (en) * 1986-07-07 1993-02-25
JPH06331339A (en) * 1993-05-21 1994-12-02 Hitachi Cable Ltd Method and device for measuring deformation of thin plate
JP2991932B2 (en) * 1994-07-12 1999-12-20 新日本製鐵株式会社 Steel plate flatness measurement method
JPH08166226A (en) * 1994-12-14 1996-06-25 Casio Comput Co Ltd Flatness measuring device and flatness measuring method using the same
JPH1070179A (en) * 1996-08-28 1998-03-10 Canon Inc Substrate holding apparatus and aligner using the same
JP2000065506A (en) * 1998-08-24 2000-03-03 Ngk Insulators Ltd Thickness measurement jig
JP2000314613A (en) * 1999-05-06 2000-11-14 Kobe Steel Ltd Surface shape measurement device
JP4218916B2 (en) * 1999-07-27 2009-02-04 フジノン株式会社 Method of manufacturing support device for object to be measured
JP2001330430A (en) * 2000-05-22 2001-11-30 Daido Steel Co Ltd Method and apparatus for measurement of flatness
JP2004087593A (en) * 2002-08-23 2004-03-18 Nikon Corp Stage device and exposure device
JP2004303923A (en) * 2003-03-31 2004-10-28 Shimadzu Corp Substrate alignment arrangement and substrate inspection apparatus using the same
US7225665B2 (en) * 2005-07-27 2007-06-05 Corning Incorporated Process and apparatus for measuring the shape of an article
WO2007015772A2 (en) * 2005-07-27 2007-02-08 Corning Incorporated Apparatus and method for measuring a glass sheet

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291269A (en) * 1991-12-06 1994-03-01 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
US6367159B1 (en) * 1998-06-08 2002-04-09 Kuroda Precision Industries, Ltd. Method and apparatus for measuring surface shape of thin element
WO2000012961A1 (en) * 1998-08-31 2000-03-09 Therma-Wave, Inc. Combination thin-film stress and thickness measurement device
US6567169B1 (en) * 1999-08-31 2003-05-20 Koninklijke Philips Electronics N.V. Method of and device for determining the warpage of a wafer
US6710857B2 (en) * 2000-03-13 2004-03-23 Nikon Corporation Substrate holding apparatus and exposure apparatus including substrate holding apparatus
US20020036774A1 (en) * 2000-08-08 2002-03-28 Emil Kamieniecki Apparatus and method for handling and testing of wafers
US20050039342A1 (en) * 2003-08-18 2005-02-24 Kirstine Rodney L. Method and apparatus for measurement of thickness and warpage of substrates

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1907791A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101910782B (en) * 2007-11-30 2013-03-20 康宁股份有限公司 Method of and apparatus for detecting change in shape of a moving substrate
CN104310032A (en) * 2014-11-03 2015-01-28 苏州精创光学仪器有限公司 Conveying device of glass measuring system

Also Published As

Publication number Publication date
JP2015062023A (en) 2015-04-02
EP1907791A4 (en) 2009-12-23
JP5469340B2 (en) 2014-04-16
TW200722705A (en) 2007-06-16
JP6169063B2 (en) 2017-07-26
EP1907791A2 (en) 2008-04-09
CN101268356A (en) 2008-09-17
WO2007015772A2 (en) 2007-02-08
JP2009503504A (en) 2009-01-29
JP5676726B2 (en) 2015-02-25
KR20080036118A (en) 2008-04-24
CN101268356B (en) 2012-07-25
KR101294450B1 (en) 2013-08-07
TWI300838B (en) 2008-09-11
JP2014066721A (en) 2014-04-17

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