WO2007010041A1

WO2007010041A1 - Ewod interferometer

Info

Publication number: WO2007010041A1
Application number: PCT/EP2006/064516
Authority: WO
Inventors: Jérôme BOUTET
Original assignee: Commissariat A L'energie Atomique
Priority date: 2005-07-22
Filing date: 2006-07-21
Publication date: 2007-01-25
Also published as: FR2888926B1; FR2888926A1

Abstract

The invention relates to an interferometric device comprising means for forming first and second beams (50, 51) to be interfered, a first substrate (1) having a hydrophobic surface, first electrowetting electrodes (53) in the substrate or under the surface in order to form a volume of a first fluid from a first container and second electrowetting electrodes in the substrate or under the surface in order to position said volume, and/or deform same by means of electrowetting, in a direction (63) defined by the path of the first beam.

Description

EWOD INTERFEROMETER

DESCRIPTION

TECHNICAL FIELD AND PRIOR ART

The invention relates to the field of

Interferometry.

Interferometry is a technique used in fields as varied as astronomy, telecommunications, surface control, or even FTIR.

In a conventional Mach type interferometer, light from a coherent source is divided into 2 beams. One of its beams passes through an environment that one wishes to study, and the other beam encounters no obstacle. These 2 beams are then recombined and sent to a detector that measures the interference thus produced. The variations of properties of the medium studied by the first beam result in a modification of the optical path of a beam and thus in a decrease or increase of the signal measured by the detector.

These two beams are then recombined. Depending on the optical path difference of the two beams, constructive or destructive interferences occur, modulating the amplitude of the output signal.

There are various types of interferometers, in particular those of Michelson, Fabry - Perot and Mach - Zehnder. The following paragraphs describe classical use cases of the main types of interferometers.

To achieve distance measurement by interferometry, a Michelson interferometer is used instead. Distance measurements are performed by moving a mirror and counting the number of interference fringes that are scrolling from a reference point. The distance D corresponding to a number m of fringes is: D = m λ / 2, with λ wavelength of the light source.

Interferometry spectrometry is often performed with Fabry-Perot interferometers. A beam of wavelength λ between α incidence incidence in a cavity defined by two very close blades, separated by a distance d. Multiple reflections are made between these two partially reflective blades. At each reflection, part of the light is transmitted. The set of transmitted light beams interfere together or not. The large number of beams involved in the interference makes it possible to achieve very good filtering accuracy.

The condition for constructive interferences is as follows:

2dcos α = mλ

For the study of transparent bodies or fluid flow, we use Mach Zehnder interferometers, which allow to study transparent objects and are particularly useful to see in dynamics of fluid flows in a confined geometry.

Finally, optical modulator systems for telecom have been realized. The technique used to modulate the amplitude of a beam is to pass through a Mach-Zehnder interferometer in which it is possible to control the phase difference between the two arms. One of the two arms passes through an "electro-optical" material whose index can be modified by applying an electrical voltage to it.

The light is coupled in two guides by a Y-branch. The two beams then recombine in a second Y-branch. The refractive index of the electro-optical material, placed on one of the arms of the interferometer, is modified by the application of a voltage, thus causing a phase shift between the two beams. Depending on their difference in path (relative phase), the two beams interfere constructively (all the optical power is available at the output), or destructive (no light is injected into the output guide). Between these two extremes, all the intermediate states are possible and the modulation of the light reproduces that of the applied voltage.

An interferometer based on the displacement, in a capillary, of a volume of fluid by electrowetting has been described by Ben Eggleton in the Laser Focus World document "Optofluidics Enable Compact Tunable Interferometer" (website ennet ^j ^ cc ^ ^ yArtόαle) • This interferometer is based on the principle illustrated in FIG 15.

In this device, interference occurs between a portion 302 that passes through a meniscus 304 and the other portion 306 of the beam that does not cross this meniscus.

A limitation of this device is as follows. The light arrives and leaves again via an optical fiber 310, which limits this apparatus to telecom (modulation) applications and possibly to the detection of a quantity (for example the pressure of a gas). This device is not particularly applicable to the study of the flow of a fluid around the wing of an aircraft or the optical characterization of a mirror (for example its quality defects polishing).

In addition, the curvature of the meniscus traversed by the portion 302 of the beam can lead to deviations from the initial path of this portion 302 of the beam. Another limitation of this device is the following: the dispersion phenomena on the surface of the meniscus prevent working over a wide range of wavelengths. But some interferometers need to work in white light. Another problem is that the possible modulation length, using the drop, is limited to the length 1 of the meniscus.

There is therefore the problem of finding a new interferometric device that does not have the limitations described above. SUMMARY OF THE INVENTION

The invention firstly relates to an interferometric device comprising means for forming a first and a second beam to be interfered with, and means for forming, then moving and / or deforming a first fluid, by electrowetting, according to the path of least one of the two beams.

According to the invention, means are provided for positioning and / or deforming, by electrowetting, on one of the paths, a first fluid, thus making it possible to adjust the optical path of one of the beams, and to increase or decrease a variation or offset (an "offset") of the interference signal obtained. By adapting a fluid volume by electrowetting along the direction of propagation of the beam, the sensitivity of the path of this beam is reduced to the shape of the meniscus or to the variation of this shape during a variation of the length of the fluid volume. on the path of said beam.

For example, the means for forming and then moving a fluid by electrowetting comprise a first hydrophobic surface substrate and fluid displacement electrodes. By addressing a number of electrowetting electrodes to a greater or lesser extent and then possibly varying the addressing voltage of one of the electrodes, it is possible to better adapt the sensitivity range of the detector to the measured sample. . For example, if the measured sample is of high optical index (the optical path Fl of the beam in this sample is then high), the electrowetting cell will increase the optical path F2 of the second beam in order to present the detector with a zero optical path difference. It will be easier to measure small variations in the medium of the measured sample.

An interferometric device according to the invention may therefore comprise means for forming a first and a second beam to be interfered with, a first substrate with a hydrophobic surface, first electrowetting electrodes in this substrate or under this surface to form a volume of one first fluid, from a first reservoir, and second electrowetting electrodes in said substrate or under this surface to position said volume, and / or deform by electrowetting, in a first direction, or direction of propagation of a first beam.

A device according to the invention may further comprise means forming at least a second reservoir of at least one second fluid.

The first electrowetting electrodes for forming a volume of fluid are arranged in a direction different from that defined by the second electrowetting electrodes.

Preferably, the second electrodes on the one hand, and the first electrodes on the other hand, are arranged in two substantially perpendicular directions, thus minimizing the necessary volume of fluid. Preferably, the device comprises a second hydrophobic surface substrate arranged facing the first substrate so as to form a closed configuration. It is thus possible to control the shape of the fluid volume disposed in the path of the beam.

A device according to the invention may further comprise means for compensating thermal drifts and / or atmospheric pressure, and / or concentration of the chemical species contained in the test solution (for example due to sedimentation).

For example, it comprises temperature sensor means and servo means for moving electrowetting means to a signal from these temperature sensor means.

At least a portion of the second electrodes each have a length, in the direction of movement of a first fluid, of between 0.1 μm and 50 μm, preferably between 1 μm and 10 μm.

The fluid can therefore be deformed in a pitch less than the wavelength of the beam, for example in a pitch of between 0.1 times and 0.5 times the wavelength of the beam.

A device according to the invention may further comprise a cell for a liquid whose optical properties are to be determined by interferometry. Means may be provided for directing a portion of a beam towards the surface of an optical element, a beam reflected by this optical element forming the second beam, and means for reflecting a beam having passed through the fluid, forming the first beam .

A device according to the invention may comprise means for detecting interference between said first and second beams. These means can be used to control the means for deforming a volume of first liquid along the first beam.

The invention also relates to a method of interferometry in which first and second beams are interfered with, wherein:

a volume of a first fluid is formed, starting from a first reservoir, by electrowetting on a hydrophobic surface of a first substrate, this volume is positioned, and / or it is deformed by electrowetting on said hydrophobic surface, in a direction defined by the path of a first beam,

this first beam and the second beam are interfered with, the first beam passing through said first fluid volume, positioned and / or formed along the path of this first beam.

First and second electrowetting electrodes are located in the first substrate, under the dielectric layer and under the hydrophobic surface to respectively form the first fluid volume from the first reservoir, and to then position and / or deform this volume in the direction defined by the path of the first beam.

The first fluid can be deformed by electrowetting, firstly by electrodes activation of the second electrodes, then variation of a voltage applied to one of these electrodes.

It is also possible to form a volume of a second fluid, from at least a second reservoir, by electrowetting on said hydrophobic surface.

This volume can be positioned and / or deformed by electrowetting on said hydrophobic surface in a direction defined by the path of the first beam.

Third electrowiring electrodes may be located in the first substrate, under the dielectric layer and under the hydrophobic surface, to form the second fluid volume from the second reservoir.

The first fluid may be in a second surrounding fluid, the two fluids having a difference in index of less than 0.2 and preferably less than 0.1. According to one embodiment, the first fluid, and optionally the surrounding fluid, are in contact with the first substrate and a second hydrophobic surface substrate disposed facing the first substrate so as to form a closed or mixed configuration. The first fluid, and optionally the surrounding fluid, preferentially have an angle of contact with the surfaces of the first and second substrates, between 110 ° and 150 ° without activation and between 80 ° and 110 ° with activation.

The first fluid may advantageously be deformed in a pitch less than the wavelength of the first beam, for example in a pitch of between 0.1 times and 0.5 times the wavelength of the first beam.

The second beam passes through a second fluid.

It can also be reflected on an optical device. The positioning and / or deformation of the first fluid volume can be controlled by an interference signal of the first and second beams.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1C show the principle of displacement of drops, by electrowetting,

FIG. 2 represents a closed configuration of a device for moving drops, FIGS. 3A and 3B show a mixed configuration of a device for moving drops,

FIGS. 4 and 5A-5B show a device for displacing drops, in which the upper cover is provided with an electrode, FIG. 6 represents the movement of a drop of a fluid along the path of a beam,

FIGS. 7A and 7B show, in top view, electrowetting electrodes in a device according to the invention, FIG. 8 represents a drop of fluid along the path of a beam,

FIGS. 9A-9C show various embodiments of an interferometric device according to the invention,

FIG. 10 represents another exemplary embodiment of an interferometric device according to the invention, FIGS. HA, HB, 12A and 12B represent examples of electrowetting cells, according to the invention, FIGS. 13A-13E and 14A. 14C represent various embodiments of a well or a liquid reservoir; FIG. 15 represents a device according to the prior art.

DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS

An interferometry device according to the invention implements a device for moving or handling drops or volumes of liquid, by electrowetting, as described below with reference to FIGS. 6-14C. As will be seen, these means can be used to deform a droplet or a volume of liquid, for example by stretching or contracting it in the direction of propagation of a fluid. light beam for interfering with another beam. These drops or these volumes come for example from one or more reservoir (s) located (s) more or less close to the means of displacement or deformation of the drops.

The resulting interferometry device is compact, avoiding any mechanical actuation, inexpensive to achieve and ensuring reproducibility and cleanliness. Such a device may further allow the formation and delivery of drops of liquid to an electrowetting cell.

A first embodiment of an open system type drop moving and handling device is illustrated in FIGS. 1A-1C.

This embodiment implements a device for moving or handling drops of liquid based on the principle of 1 electrowetting on a dielectric.

Examples of such devices are described in the article by G. Pollack, A. D. Shendorov,

R. B. Fair, entitled "Electro-wetting-based actuation of droplets for integrated microfluidics", Lab on Chip 2 (1) (2002) 96-101.

The forces used for the displacement of liquid drops are then electrostatic forces.

The document FR 2 841 063 describes a device implementing, in addition, a catenary facing the electrodes activated for displacement. The principle of this type of displacement is synthesized in FIGS. 1A-1C.

A drop 2 rests on a network 4 of electrodes, from which it is isolated by a dielectric layer 6 and a hydrophobic layer 8 (Figure IA).

The hydrophobic nature of this layer means that the drop has a contact angle, on this layer, greater than 90 °.

The electrodes 4 are themselves formed on the surface of a substrate 1.

When the electrode 4-1 located near the drop 2 is activated, using switching means 14, the closure of which makes contact between this electrode and a voltage source 13 via a common conductor 16, the layer dielectric 6 and the hydrophobic layer 8 between this activated electrode and the drop under voltage act as a capacitance.

The counter-electrode 10 allows a possible displacement by electrowetting on the surface of the hydrophobic surface; it maintains an electrical contact with the drop during such a displacement.

This counter-electrode can be either a catenary as in FR-2 841 063, or a buried wire or a planar electrode in the hood of a confined system (such a confined system is described below).

In open system, if there is no displacement, it is possible to spread the drop on the hydrophobic surface, without counter-electrode. This is the case, for example, if the drop can be brought onto the hydrophobic surface by a conventional dispensing system, the electrodes 4-1, 4-2 serving only to spread or deform the drop where it has been deposited.

The drop may thus be optionally displaced step by step (FIG. 1C) on the hydrophobic surface 8 by successive activation of the electrodes 4-1, 4-2, etc., along the catenary 10.

It is therefore possible to move liquids, but also to mix them (by bringing drops of different liquids near), and to perform complex protocols.

The documents cited above give examples of implementations of adjacent electrode series for the manipulation of a drop in a plane, the electrodes can indeed be arranged in a linear manner, but also in two dimensions, thus defining a plan of displacement of the drops.

FIG. 2 represents another embodiment of a device for moving or handling drops, of the closed or confined system type, that can be implemented in the context of

The invention.

In this figure, reference numerals identical to those of FIGS. 1A-1C denote the same elements. This device further comprises an upper substrate 100, preferably also covered with a hydrophobic layer 108. This set may be optionally transparent, allowing observation from above. FIGS. 3A and 3B, in which numerical references identical to those of FIG. 2 where y denote identical or similar elements, represent a mixed system of displacement or manipulation of drops, in which a drop 2 is initially in an open medium (FIG. 3A), the activation of electrodes 4-1, 4-2, 4-3 allowing a flattening of the drop (FIG. 3B), in a closed system, in an area where the system is provided with a hood, as illustrated above with reference to FIG. 2.

FIG. 4 represents a variant of the closed system, with a conductive cover 100, comprising an electrode or an array of electrodes 112, as well as an insulating layer 106 and a hydrophobic layer 108.

The catenary 10 of the preceding figures is replaced, in this embodiment, by the electrode 112. The activation of this electrode 112 and the electrodes 4 makes it possible to move the droplet into the desired position and then to stretch or deform it , to bring it into the path of a light beam 50. FIGS. 5A and 5B, on which identical reference numerals to those of FIG. 4 denote identical or similar elements, represent a mixed system, in which a droplet 2 is initially in an open medium (FIG. 5A), the activation of electrodes 4-1, 4-2, 4-3 allowing flattening of the droplet (FIG. 5B), in a closed system, in an area where the system is provided with a hood, as illustrated above in connection with Figure 4.

A device according to the invention may further comprise means which will make it possible to control or activate the electrodes 4, for example a PC-type computer and a relay system connected to the device or the chip, such as relays 14 of Figure IA, these relays being controlled by the PC-type means. As will be seen below, a multiplexer can also be used, controlled by control means such as a computer or a microcomputer or a servo loop. In the latter case, the activation of the electrodes 4 is slaved to a characteristic of a signal, such as an interference signal in the example given below.

Typically, the distance between a possible conductor 10 (FIGS. 1A-5B) on the one hand and the hydrophobic surface 8 on the other hand is, for example, between 1 μm and 100 μm or 500 μm. This conductor 10 may be for example in the form of a wire diameter between 10 microns and a few hundred microns, for example 200 microns. This wire may be a gold or aluminum wire or tungsten or other conductive materials. When two substrates 1, 100 are used

(Figures 2-5B), they are spaced a distance between, for example, 10 microns and 100 microns or 500 microns.

Whatever the embodiment considered, a drop of liquid 2 may have a volume between, for example, 1 nanolitre and a few microliters, for example between 1 ni and 5 μl or 10 μl, preferably between 100 ni and 1 μl .

In addition, each of the electrodes 4 will for example have a surface of the order of a few tens of μm ² (for example 10 μm ² ) up to 1 mm ² , depending on the size of the drops to be transported, the spacing between neighboring electrodes being for example between 100 nm and 30 microns, preferably between 1 micron and 10 microns.

The structuring of the electrodes 4 can be obtained by conventional micro-technology methods, for example by photolithography.

Methods for producing chips incorporating a device according to the invention may be directly derived from the processes described in document FR-2 841 063. Conductors, and in particular conductors 110 may be made by depositing a conductive layer and etching. this layer following the appropriate pattern of conductors, before deposition of the hydrophobic layer 108. The electrodes can be made by deposition of a metal layer (for example a metal selected from Au, Al, ITO, Pt, Cr, Cu) by photolithography. The substrate is then covered with a dielectric layer, for example Si ₃ N ₄ or SiC> 2. Finally a deposit of a hydrophobic layer is performed, such as a teflon deposit made by spinning.

These methods can be implemented to produce an electrode structure and an interferometric cell according to the invention.

Such a device for moving drops can implement a two-dimensional array of electrodes that will allow, step by step, to move liquids in or on a plane, to mix them, to achieve complex protocols. In the case of the embodiment with catenaries 10 (FIGS. 1A-3B), a two-dimensional set (2D) of these catenaries can be realized above the 2D set of electrodes 4. In the case of the embodiment with counter-electrode 112 incorporated in the cover 100 (Figures 4-5B), this counter electrode can also have a two-dimensional structure.

A device according to one of the embodiments described above makes it possible to deform a drop of liquid 2.

Thus, as illustrated in FIG. 6 (on which the counter-electrode means are not shown), the simultaneous activation of several electrowetting electrodes, designated in this figure by the references 41, 42, 43, will allow lengthening the drop 2 in the desired direction, this direction being in fact determined by the electrodes 41, 42, 43 selected and can be that of a radiation beam 50.

This passes over the substrate or the hydrophobic surface or parallel to the substrate or to this surface, the electrodes 41-43 being disposed beneath this surface or in this substrate. The device is thus very compact.

FIGS. 7A and 7B show a view from above of the system, which comprises a zone 53 that may be called a fluid reservoir (FIG. 7A), and a plurality of electrodes 41, 42, 43, 44. can be selectively activated to bring a drop or a volume 2 of liquid from the reservoir to and onto the electrodes 41-44, then to progressively stretch (FIG. 7B) this drop or this volume of fluid coming from the reservoir zone, in the direction of a beam 50. The size and the pitch of these electrodes may be defined beforehand so as to to define a certain precision in the variations of volume of the fluid.

For example, the electrode 41, located closest to the tank 53, has a surface comparable to that of this reservoir, or to accommodate a significant fraction of the volume stationed in or on this reservoir, and greater than that of the other electrodes 42-44. The latter may have a width L that is substantially identical to that of the electrode 41, but a length d, measured in the direction of propagation of the beam 50, which is smaller than that of the electrode 41, for example, allowing, as it is will see below, a minimum variation of the optical path equal to a fraction of the wavelength of this beam, for example between 0.1 and 0.5 times this wavelength. An optical path variation value of 0.1 times the wavelength is particularly suitable for fine tuning. The activation of the electrode 41 makes it possible to pass a volume 2 of liquid from the tank 53. The device therefore does not require conduit to bring the liquid from the tank. Again, it is particularly compact. This volume 2 then rests on this electrode 41. After activation of one or more of the electrodes 42-44, the drop 2 is stretched and positioned above the electrodes thus activated. FIG. 6 represents the case where only three electrodes 41, 42, 43 are activated, thus stretching the drop on these same 3 electrodes.

The drop is then in a state in which its length L ₀ (see FIG. 6), measured parallel to the hydrophobic surface 8, is greater than its height h, for example in a ratio L ₀ / h of the order of 2 to 4 or more.

The light beam 50 thus sees its path in the drop significantly increased because of the elongation thereof (see Figure 7B), or reduced if some electrodes, for example the electrode 43, are deactivated.

The variation of the optical path imposed on this beam 50 by the fluid of the volume 2 in a surrounding fluid 2 'is given by: δ = Δn x P, where Δn is the variation of index between the two fluids 2, 2' and P the length of the fluid traversed (it can be pxd where p is the number of electrodes addressed and the length of an electrode, in the case where all the electrodes are of the same width d, otherwise, we will have P = (pl) d + d ', where d' is the length of the electrode 41).

This device makes it possible to create small differences in optical path with electrodes of reasonable size. If we take the example of a wavelength λ = 0.633 μm, we can create a path difference Δδ = λ / 10 with optical indices ni = 1, 39 (salt water) and n ₂ = 1, 4 (oil). The necessary electrode size becomes equal to 0.0633 / (1.4 - 1.39) = 6.3 μm, which can be achieved with standard microtechnology processes.

It is therefore possible to produce electrodes with a width d for example between 1 μm or a few μm and 10 μm, for example d = 5 μm or 6 μm.

Positioned in the path of the beam 50, the fluid 2 will thus be able to be modulated by progressive stretching of its volume, so as to present the beam a more or less important path.

It will be understood that this principle will make it possible to benefit from a very large range of variation of the volume of liquid making it possible to participate in the modulation, a range of variation much greater than that afforded by the single meniscus in the known art.

(Length 1 of Figure 15).

This principle can be applied to any structure as illustrated in Figures 1A-5B, both open and closed or mixed.

FIG. 8 represents another embodiment of the invention, in a closed or confined system, with a catenary 10 as an electrode. In this figure, reference numerals identical to those of Figures IA - 5B y designate the same elements.

This device further comprises an upper substrate 100, preferably also covered with a hydrophobic layer 108. This assembly can be possibly transparent, allowing observation from above.

Again, a light beam 50 can be directed between the two substrates, parallel to each other.

The same principle is applicable if the counter-electrode is in the hood (FIG. 4) as well as in the mixed system (FIGS. 3A, 3B, 5A, 5B).

Other examples of electrode structures that can be used in the context of the present invention are illustrated in FIGS. 11A-12B, where, again, reference numerals identical to those of FIGS. same elements. The electrode 41, on which a portion of the liquid is fed over the intended path of a beam 50 from the reservoir 53, is located between two sets of electrodes 42-44 and 42 ', 43', 44 'aligned on the rectilinear path of a beam. This path is itself determined, moreover, by optical means as will be seen later.

In Figures HA (side view) and HB (top view), reservoirs 53 (for a first liquid), 55, 57 (for a second liquid) are provided. Thus, not only can the liquid that will make it possible to vary the optical path of a beam 50, but also a second liquid 2 ', preferably of index close to the first, can be brought by electrowetting. This second liquid is brought from its reservoir by electrowetting electrodes. Third electrowetting electrodes in the substrate or under the hydrophobic surface form a volume of a reservoir of a second fluid 2 '. Preferably, the first electrowetting electrodes for forming a fluid volume 2, and optionally the third electrowetting electrodes, are arranged in a direction different from that defined by the second electrowetting electrodes 41, 42, 42 ',. ..etc. These directions are advantageously substantially perpendicular to each other.

In FIGS. 12A (side view) and 12B (top view), only one tank 53 is provided for the liquid 2 which will make it possible to vary the optical path of a beam 50.

In these two examples, the electrodes are activated by means of computer-controlled multiplexer means 61 or AGC control means operating from, for example, a measurement of an interference signal. A voltage V _τ can thus be applied to the electrodes.

In these embodiments, as in the others, a fine adjustment can be obtained by varying the voltage applied to a single electrowetting electrode: there is then a balance between the surface tension which pushes the drop to adopt the shape of the a sphere and electrowetting which tends to adhere it to the electrode. By changing the voltage, this equilibrium is shifted towards one or the other of these forces. In Figs. 11A-12B, drop 2 is shown spread on the electrodes 41 and 42, 42 '.

A cell according to the invention therefore comprises electrodes, for example designed by conventional microelectronics techniques, a possible upper cover, for example covered with a conductive uniform layer (ITO or metal deposit for example) or a structured layer (electrodes). It comprises a rectilinear zone of electrodes 41-44, which may be bordered by a reservoir 53 or by a series of electrodes bringing a fluid from such a reservoir. This denier may itself be defined by one or more electrowiring electrodes adjacent to the electrodes 41-44 or which adjoin them so as to allow a transfer of fluid by electrowetting directly from the reservoir, or by one or more electrowetting electrodes leading to activation electrodes. The rectilinear zone is that crossed by the light 50. The reservoir zone 53 makes it possible to compensate for the variations of volume 2 of liquid in the rectilinear zone.

All electrowetting electrodes, those relating to the reservoir and those for stretching the volume of fluid in the direction of the beam 50 are preferably under the same substrate, which again makes it possible to produce a compact device.

The reservoir may be located above the cell, that is to say in the hood, or defined by an electrode and a part of the hood, as will be seen later, in connection with Figures 13A-13C. An electrowetting cell according to the invention makes it possible to vary the optical path of one of the two beams, for example in a programmable manner. For example, to increase or decrease the optical path of the beam 50, a potential difference is created between a number of electrodes 41-44, 42 '-44' of the rectilinear zone and the counterelectrode means (the cover or catenary 10). The liquid will move electrowetting on the electrodes thus addressed and modify the optical path.

Another way of obtaining small optical path variations is to vary the voltage between one of the electrodes, in particular the electrode above which the end of the drop 2 is located (the electrode 43 of FIG. and 7B) and the counterelectrode means. Depending on this variation in voltage, the liquid will wet a longer or shorter length of this electrode: in FIG. 6, the successive positions 2-1, 2-2 which can be taken by the end of the drop on the same electrode 43. Small variations in voltage can thus generate, while maintaining the same number of electrodes addressed, small optical path variations.

Thus, to obtain strong optical path variations, it is possible to address a larger or smaller number of electrodes and then to refine the variations by varying the addressing voltage, for example of a single electrowetting electrode. This method is compatible with the method described above, in the case of two immiscible liquids.

Obtaining flat interfaces in electro-optical devices is a problem. In closed or mixed configuration, the interface between the 2 immiscible liquids 2, 2 'can be made almost flat by depositing on the upper and lower surfaces a substance (for example PTFE) allowing the liquids to have, with these surfaces, a contact angle close to 90 ° at the interface. One can then play on the electrowetting voltage of each electrode and on the possible addition of surfactant in one of the liquids 2, 2 ', to reach a contact angle, with the surfaces 8, 108, very close to 90 °, or exactly 90 °.

The other interfaces can be obtained conventionally (transparent wall of glass or transparent plastic, for example).

An interferometry device according to the invention is represented in FIG. 9A.

This device comprises a source of radiation 30. A first semi-transparent mirror 32 makes it possible to separate the beam of this source into two parts, a first portion 50 of which passes through a cell 60 (the walls of which are made of glass (silica) for example). or in a transparent material) comprising an electrowetting device as described above, with a liquid of index n ₀ which is for example initially contained in or on a tank 53. The second part 51 of the beam goes through For example, traverse a cell 54 which contains a liquid 59 whose index is to be measured.

The two beams are then recombined, for example using a second mirror 34 semi transparent. These two beams will interfere and produce an interference signal using a detector 40.

References 33 and 35 designate simple mirrors. The electrowetting cell 60 makes it possible, as explained above, to adjust the optical path so as to generate destructive interference at the detector 40. The signal measured by the detector is then equal to 0. Then, the index variations of the liquid to be measured 59 create constructive interferences measured by the detector.

This allows for differential measurements, much more precise.

The optical path variation in the electrowetting cell 60 can be generated in two different ways.

A greater or smaller number of electrodes of the device 60 are first activated, which allows a "rough" adjustment of the optical path. Then, a finer adjustment can be achieved by modifying the electrowetting voltage, for example of only one of the electrowetting electrodes, as already explained above.

The modulations of the length or volume of the fluid traversed by the beam 50 are in a direction 63 parallel to that of this beam. It is also possible to control the electrowetting cell to temperature sensors, and / or pressure, so as to correct the measurement of these fluctuations that disturb the measurement. In another configuration, it is possible to bring into measurement position the solution to be measured, as from the electrowetting cell: the fluid 59 can also be brought by electrowetting on a measurement zone, for example to from one or more tanks, each tank may be similar to the tank 53 or to one of those described below in connection with Figures 13A - 14B. This avoids the user to use the tedious system tanks, imprecise positioning and cleanliness often questionable, often limiting the sensitivity of the measure.

The electrowetting thus makes it possible to rinse the tank and to bring a calibration solution, whether on the cell 60 and / or the cell 54.

Examples of use of the electrowetting cell according to the invention will be described.

First, it is possible to perform an offset adjustment, or differential measurements. The electrowetting cell can therefore be used as an offset adjusting device, as shown in FIG. 9B.

For example, if it is desired to measure the index variations of a sample (liquid, solid or gas) from an initial reference value, one can proceed as follows: step n ° 1: the sample 59 to be measured is placed in the beam 51 and the signal obtained by the detector 40 is measured;

Step 2: The electrowetting cell 60 is programmed to vary the optical path of the beam 50 until the interference signal reaches a reference voltage (zero for destructive interference for example). In FIG. 9B, this function is performed by a servo circuit which is activated when the user presses the "reset" button 39. This slaving can be placed before or after means 43 of analog-to-digital conversion (ADC)

(see dotted line); Step 3: This is the measurement phase. The electrowetting cell 60 (button 39 released) is no longer touched and the variations of the sample 59 are recorded. The measurements are now differential, and therefore much more sensitive and precise. They can be visualized on display means 45.

Another example of application is automatic gain control (AGC).

The same cell can indeed also be used as automatic gain control system, as shown in Figure 9C.

It is then possible to compensate for excessive fluctuations of the signal in the case where it leaves the useful dynamics of the detector. It is possible to use a system of

Classical CAG. However, these "conventional" AGC systems adapt in real time the gain of an amplifier 41, located behind the detector 40, to the signal measured by it. If the signal becomes too strong, the AGC changes the gain of the amplifier to compensate for the variation. The disadvantages of these devices are the following: electronic circuit more complex and more noisy than a traditional amplifier. In addition, these AGCs do not protect the detector 40 against the risk of damage (for example, a photomultiplier which is very sensitive to light).

In order to solve this problem, one can proceed as follows with the electrowetting cell according to the invention:

steps 1 to 3: the sample 59 is placed, and the zero is made with the electrowetting cell 60 (same as above);

step 4: during the measurement phase, if a sudden change in the optical index of the sample 59 occurs, the resulting interference signal is recovered by the AGC circuit 47 (before or after the digital conversion) -analogic by the conversion means 43, the 2 variants being possible); it programs the electrowetting cell 60, or the activation of the electrowetting electrodes, to compensate for the optical index variation of the sample, by increasing or decreasing the optical path in the cell 60. in the optimal measuring range of the detector. The detector is also protected by acting directly on the physical signal whereas traditional electronic CAGs act only on the amplifier 41.

In other words, the gain control is a control of the voltage of the activation electrodes of the electrowetting, made from the variations of the interference signal.

Figure 10 depicts a second embodiment. The cell is then used in a Twyman-Green type interferometer, an application of which is for example to measure the deformations of a mirror or a lens, or more generally of a reflective or transparent surface. Compared to a conventional interferometer of the Twyman Green type, the advantage of the device according to the invention is to be able to move the interference fringes on the test mirror in order to perform oversampling. Some industrial devices perform this function using a motorized mirror. However, the nanoscale precision and the travel time required for this type of motorization are not compatible with a compact device, low cost, robust and fast unlike an electrowetting cell.

This device also makes it possible to make interferometry in white light. By replacing the laser source with a broadband source (white), we can measure reliefs or hollows on any object. The light areas of the interferometry figure correspond to the interferences constructive and dark areas with destructive interference. By varying the distance between the object and the lens on a scale of μm, the relief is scanned. The electrowetting cell makes it possible to avoid this type of displacement on a scale of 1 μm. The device is then identical to that of Figure 10, replacing the source by a white light and the mirror by any object.

In the case of the invention illustrated in FIG. 10, the electrowetting cell is designated by the reference 160 and is used in a Twyman-Green type interferometer, whose application is therefore to measure the deformations of a mirror or an optic 70 or, more generally, the surface of an object.

Radiation comes from a source 30, then is directed towards a semi-transparent mirror 42 which makes it possible to separate the beam of this source into two parts, of which a first part 150 which will pass through the cell 160, including an electrowetting device such as described above, with a liquid of index n ₀ for example initially contained in or on a reservoir 153. The second portion 151 of the beam will, for example, be reflected by a mirror 70.

The beam that has passed through the cell 160 crosses it a second time, in the opposite direction, because of a reflector element 71 placed at the output of this cell. The two reflected beams are then recombined, for example using the mirror 42. These two beams will interfere and produce a signal using a detector 40 of the camera type, for example.

Again, a higher or lower number of electrodes of the device 160 may be first activated, for a "rough" adjustment of the optical path.

Then, a finer adjustment can be achieved by changing the electrowetting voltage of the electrodes, as already explained above. Here again, it is also possible to slave the electrowetting cell to temperature and / or pressure sensors so as to correct the measurement of fluctuations of these parameters which disturb the measurement. Again, the modulations of the length or volume of the fluid traversed by the beam 150 are in a direction 163 parallel to that of this beam.

According to the invention, the beam 50, 150 passes through the meniscus of the fluid of the cell 60, 160 in a frontal manner, and not in a lateral manner as in the technique described in the Eggleton document cited in the introduction to the present application. . The shape encountered by the beam 50, 150 therefore tends to be more stable than the shape of the meniscus in this prior art, and has much less influence on the path of this same beam.

In the embodiments described above, the configuration of the fluid deformation means of the cell is preferably a closed or mixed configuration, of the type described above. in connection with Figures 2-5B. Such a configuration allows a very good control of the shape of the volume of liquid, regardless of the number of electrodes activated, so regardless of the length of the fluid disposed in the path of the beam. This volume of liquid is in fact in contact with the hydrophobic surfaces of the two substrates 1, 100.

Embodiments of a tank 53 will be given below in connection with Figs. 13A-13D and 14A-14C.

A liquid 200 to be dispensed is deposited in a well 120 of this device (FIGS. 13A and 14A). This well is for example made in the upper cover 100 of the device. The lower part, shown schematically in FIGS. 13A-13D and 14A-14C, is for example similar to the structure of FIGS. 1A-1C.

3 electrodes 53, 153, 41, similar to the electrodes 4 for the displacement of liquid drops already described, are shown in FIGS. 13A-13D. In Figs. 14A-14C, there are only two electrodes 53, 41, as in Figs. 7A and 7B.

The activation of this series of electrodes leads to the spreading of a droplet from the well 120, and thus to a liquid segment 201 as illustrated in FIGS. 13B and 14B.

In the embodiment of FIGS. 13A-13B, this liquid segment is then cut off by deactivating one of the activated electrodes (electrode 153 in FIG. 13C). A drop 2 is thus obtained, as illustrated in FIG. 13C. A series of electrodes is thus used to stretch liquid from reservoir 120 into a finger 201 (FIG. 13B) and then to cut this finger 201 of liquid (FIG. 13C) and form a droplet 2 which can be taken to any measuring site. as described above.

The volume of liquid 2 can then be stretched or deformed on the electrodes 41-43 as already explained above and further illustrated in FIG. 13D.

This method can be applied by inserting electrodes such as the electrode 53 between the reservoir 120 and one or more electrode 153 called the breaking electrode. A variant is illustrated in FIG. 13E, in which three electrodes 53, 153, 153-1 are disposed between the reservoir and the electrodes 41-43 for deforming the volume of liquid in the path of a beam. The electrode 153 makes it possible to cut the liquid finger formed as already described above. The volume of liquid thus formed is then positioned above the electrode 153-1 and then electrowetting on or above the electrode 41 in the path of one of the beams to be interfered with.

In the embodiment of Figs. 14A-14C, the liquid segment 201 is, after its formation, then stretched or deformed into a volume 2 on or above the electrodes 41-43 as already illustrated in Figs. 9A-10. Both embodiments of Figures 13A-13E and 14A-14C may be used in combination with an interferometry device according to the invention.

The electrodes 41, 53, 153, 153-1 for forming a volume of fluid can be controlled, like the other electrodes, by an electronic device, as mentioned above for example a PC type computer.

The formation of a volume of fluid above the electrodes 41-43 therefore does not require complex means such as flow conduits. A minimum volume of fluid can therefore be used.

A device according to the invention thus makes it possible to integrate, on or in the same substrate, means for moving fluid volumes by electrowetting, both for moving or deforming volumes along a path of a beam, or for supply of fluid from a reservoir.

One or more second reservoirs, such as the reservoirs 55, 57 of FIG. HB, can be made according to one of the configurations explained above in connection with FIGS. 13A-14C. A series of liquid volume forming electrodes may be provided for each other reservoir, also in a different direction of the beam path, preferably in a direction perpendicular to this path.

The volume of liquid supplied from each reservoir is thus deformed or displaced by electrowetting, in a direction different from the path of the beam, preferably in a direction perpendicular to this path. A volume of liquid is fed into the path of a beam from a reservoir located on the side with respect to the path of a beam, and thus with respect to a direction of extension or deformation of a volume of liquid on the path of this beam.

This volume moves on the same surface, firstly during its formation from this reservoir, and then during its stretching along the path of a beam, but in different directions, preferably perpendicular to each other, during of these two steps, (see Figures 13D, E and 14C).

Whatever the embodiment of the invention envisaged, it differs from the device described in the article by Ben Eggleton, in particular by the following elements.

In the known device, the electrowetting takes place in a capillary and not on a system of several adjacent electrodes.

The advantage of an electrode system according to the present invention is that it allows an infinite range of variation of the optical path, whereas in a capillary it is limited by the breakdown voltage.

The electrode system according to the invention also makes it easier to move the liquid so as to change it. It can be changed by the same liquid, but cleaner (new or recycled by a filtering system). It can also be replaced by a different liquid to access another range of optical indices. Another difference is this. In the already known technique (FIG. 15), the light encounters the liquid interface in parallel with it while, in the case of the invention, it meets it perpendicularly. This results in several consequences:

the parallel incidence induces effects of diffusion, reflection, refraction, etc., which limit the transmission of the device (loss of -5 dB in the best case). Perpendicular incidence, as in the invention, does not pose this problem. ,

- In the case of the parallel incidence, the dispersion of the wavelengths at the interface has the consequence that this device can not be used with several wavelengths. For example, it is not possible to perform white light interferometry. This problem does not arise in perpendicular incidence, in the case of the present invention. In addition, in parallel incidence the wavefront is very deformed. The system can not therefore be applied to the mirror control device, or surface topography measurement, or fluid dynamics study for which the wavefront must remain very flat. The invention, on the contrary, makes it possible to produce a control device, as illustrated above in connection with FIG. 10, or a device for measuring surface topography, or for studying fluid dynamics.

Claims

An interferometric device comprising means for forming a first and a second beam (50, 51, 150, 151) to interfering, a first hydrophobic surface substrate (1), first electrowetting electrodes (53, 153) in that region. substrate or under this surface to form a volume

(2) a first fluid, from a first reservoir, and second electrowetting electrodes (41-44, 42 '-44') in this substrate or under this surface to position this volume, and / or deforming it by electrowetting, in a direction (63, 163) defined by the path of the first beam, and further comprising control means (31, 37, 47), driven by an interference signal of the first and second beams, second electrowetting electrodes.

2. Device according to claim 1, the first electrodes comprising at least a first electrode (53, 153) for forming said volume of fluid from the reservoir, and the second electrodes comprising at least two other electrodes arranged in a direction (63, 163) defined by the path of the first beam.

3. Device according to claim 2, the first electrodes having two or three electrodes (53, 153, 153-1) to form the first fluid volume.

4. Device according to one of claims 1 to 3, further comprising means (55, 57) forming at least a second reservoir of at least a second fluid.

5. Device according to one of claims 1 to 4, further comprising at least third electrowetting electrodes in the substrate or under the hydrophobic surface, to form a volume of a reservoir of a second fluid.

6. Device according to one of claims 1 to 5, the first electrowetting electrodes to form a volume of fluid, and optionally the third electrowetting electrodes, being arranged in a direction different from that defined by the second electrodes of electrowetting.

7. Device according to one of claims 1 to 6, the second electrodes on the one hand, and the first, and optionally the third, electrodes on the other hand, being arranged in two substantially perpendicular directions.

8. Device according to one of claims 1 to 7, further comprising a second substrate (100) hydrophobic surface arranged facing the first substrate so as to form a closed configuration.

9. Device according to one of claims 1 to 8, at least a portion of the second electrodes (41-44, 42 ', 44') each having a length, in the direction of movement of a first fluid, between 1 μm and 10 μm.

10. Device according to one of claims 1 to 9, further comprising means for compensating thermal drift and / or atmospheric pressure, and / or concentration of chemical species contained in a solution to be measured, disposed on the path the second beam (51).

11. Device according to claim 10, comprising temperature sensor means and means for controlling the electrowetting displacement means to a signal from these temperature sensor means.

12. Device according to one of claims 1 to 11, further comprising a cell (54) for a liquid (59) whose optical properties are to be determined by interferometry.

13. Device according to one of claims 1 to 12, further comprising means (42) for directing a portion of a beam towards the surface of an object (70), a beam reflected by the surface of this object forming the second beam, and means for reflecting a beam having passed through the fluid, forming the first beam.

14. Device according to one of claims 1 to 13, further comprising means (40) for detecting interference between said first and second beams.

15. Device according to one of claims 1 to 14, further comprising means (30) for forming a white light, from which a first and a second beam are formed.

16. Interferometry method, in which first and second beams (50, 51, 150, 151) are interfered with, in which: - a volume (2) of a first fluid is formed from a first reservoir, by electrowetting (53, 153) on a hydrophobic surface of a first substrate, this volume is positioned, and / or deformed by electrowetting on said hydrophobic surface, in a direction (63, 163) defined by the path (63, 163) of a first beam,

the first beam and the second beam are interfered with (51, 151), the first beam (50, 150) passing through said first fluid volume (2), positioned and / or formed along the path of this first beam (50). ,

the positioning and / or deformation of the first fluid volume is controlled by means of an interference signal of the first and second beams.

The method of claim 16, wherein first and second electrowetting electrodes (53, 153, 153-1, 41-44, 42 '-44') are located in the first substrate or under the hydrophobic surface to, respectively, forming the first fluid volume from the first reservoir, and then position and / or deform this volume in the direction defined by the path of the first beam.

18. The method of claim 17, the first fluid being deformed by electrowetting, firstly by electrodes activation of the second electrodes, and then variation of a voltage applied to one of these electrodes.

19. Method according to one of claims 17 to 18, wherein forming a volume (2) of a second fluid, from at least a second reservoir, by electrowetting on said hydrophobic surface, this volume is positioned, and / or deformed by electrowetting on said hydrophobic surface, in a direction (63, 163) defined by the path (63, 163) of the first beam.

The method of claim 19, wherein third electrowool electrodes, located in the first substrate or beneath the hydrophobic surface, form the second fluid volume from the second reservoir.

21. Method according to one of claims 16 to 20, the first fluid being in a second surrounding fluid (2 '), the two fluids having an optical index difference of less than 0.2.

22. Method according to one of claims 16 to 21, the first fluid, and optionally the surrounding fluid, being in contact with the first substrate and a second substrate (100) with a hydrophobic surface, arranged opposite the first substrate so as to form a closed or mixed configuration.

23. The method of claim 22, the first fluid, and optionally the surrounding fluid, having an angle of contact with the surfaces of the first and second substrates close to 90 °, for example between 85 ° and 90 °.

24. Method according to one of claims 16 to 23, the first fluid can be deformed in a step less than the wavelength of the first beam (50).

25. The method of claim 24, the first fluid can be deformed in a step between 0.1 times and 0.5 times the wavelength of the first beam (50).

26. Method according to one of claims 16 to 25, the second beam (51) passing through a second fluid (59).

27. Method according to one of claims 16 to 25, the second beam being reflected on the surface of an object (70).

The method of one of claims 16 to 27, wherein the first and second beams are formed from a white light source.