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Publication numberWO2007008265 A8
Publication typeApplication
Application numberPCT/US2006/013330
Publication date22 Mar 2007
Filing date10 Apr 2006
Priority date11 Apr 2005
Also published asEP1869399A2, US7508527, US20060250620, WO2007008265A2, WO2007008265A3
Publication numberPCT/2006/13330, PCT/US/2006/013330, PCT/US/2006/13330, PCT/US/6/013330, PCT/US/6/13330, PCT/US2006/013330, PCT/US2006/13330, PCT/US2006013330, PCT/US200613330, PCT/US6/013330, PCT/US6/13330, PCT/US6013330, PCT/US613330, WO 2007/008265 A8, WO 2007008265 A8, WO 2007008265A8, WO-A8-2007008265, WO2007/008265A8, WO2007008265 A8, WO2007008265A8
InventorsHenry A Hill
ApplicantZetetic Inst, Henry A Hill
Export CitationBiBTeX, EndNote, RefMan
External Links: Patentscope, Espacenet
Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
WO 2007008265 A8
A point diffraction interferometer for measuring properties of a spatial impulse response function, the interferometer including: a source for generating a source beam; an optical system; an optical element including a test object located in an object plane of the optical system, the test object including a diffraction point for generating from the source beam a measurement beam that passes through the optical system, wherein the optical element also generates from the source beam a reference beam that is combined with the measurement beam to generate an interference pattern in an image plane of the optical system, the interference pattern representing the spatial impulse response function of the optical system.
International ClassificationG01B9/02
Cooperative ClassificationG01B9/02024, G01B9/02056, G01B9/02022, G01B9/02057, G01J2009/0223, G03F7/706, G01J9/02
European ClassificationG03F7/70L6B, G01B9/02, G01J9/02
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