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Publication numberWO2007008265 A3
Publication typeApplication
Application numberPCT/US2006/013330
Publication date17 Jan 2008
Filing date10 Apr 2006
Priority date11 Apr 2005
Also published asEP1869399A2, US7508527, US20060250620, WO2007008265A2, WO2007008265A8
Publication numberPCT/2006/13330, PCT/US/2006/013330, PCT/US/2006/13330, PCT/US/6/013330, PCT/US/6/13330, PCT/US2006/013330, PCT/US2006/13330, PCT/US2006013330, PCT/US200613330, PCT/US6/013330, PCT/US6/13330, PCT/US6013330, PCT/US613330, WO 2007/008265 A3, WO 2007008265 A3, WO 2007008265A3, WO-A3-2007008265, WO2007/008265A3, WO2007008265 A3, WO2007008265A3
InventorsHenry A Hill
ApplicantZetetic Inst, Henry A Hill
Export CitationBiBTeX, EndNote, RefMan
External Links: Patentscope, Espacenet
Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
WO 2007008265 A3
Abstract
A point diffraction interferometer for measuring properties of a spatial impulse response function, the interferometer including: a source for generating a source beam; an optical system; an optical element including a test object located in an object plane of the optical system, the test object including a diffraction point for generating from the source beam a measurement beam that passes through the optical system, wherein the optical element also generates from the source beam a reference beam that is combined with the measurement beam to generate an interference pattern in an image plane of the optical system, the interference pattern representing the spatial impulse response function of the optical system.
Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
US6239878 *1 Oct 199929 May 2001The Regents Of The University Of CaliforniaFourier-transform and global contrast interferometer alignment methods
Classifications
International ClassificationG01B9/02
Cooperative ClassificationG01B9/02024, G01B9/02057, G01B9/02056, G01B9/02022, G01J9/02, G03F7/706, G01J2009/0223
European ClassificationG03F7/70L6B, G01B9/02, G01J9/02
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