WO2007001327A3 - Apparatus and methods for scanning conoscopic holography measurements - Google Patents

Apparatus and methods for scanning conoscopic holography measurements Download PDF

Info

Publication number
WO2007001327A3
WO2007001327A3 PCT/US2005/026601 US2005026601W WO2007001327A3 WO 2007001327 A3 WO2007001327 A3 WO 2007001327A3 US 2005026601 W US2005026601 W US 2005026601W WO 2007001327 A3 WO2007001327 A3 WO 2007001327A3
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
assembly
scanning
methods
workpiece
Prior art date
Application number
PCT/US2005/026601
Other languages
French (fr)
Other versions
WO2007001327A2 (en
Inventor
Stephen J Bennison
Original Assignee
Boeing Co
Stephen J Bennison
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co, Stephen J Bennison filed Critical Boeing Co
Publication of WO2007001327A2 publication Critical patent/WO2007001327A2/en
Publication of WO2007001327A3 publication Critical patent/WO2007001327A3/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/06—Processes or apparatus for producing holograms using incoherent light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0493—Special holograms not otherwise provided for, e.g. conoscopic, referenceless holography

Abstract

Apparatus and methods for scanning conoscopic holography measurements are disclosed. In one embodiment, a system includes a conoscopic holography sensor (112) , a beam directing assembly (118, 122) , and a control assembly. The beam directing assembly is adapted to adjustably direct a laser beam (114, 132) from the sensor toward the workpiece (140) , and to direct a reflected light (135) from the workpiece into the sensor. The control assembly controllably adjusts a direction of the laser beam into a desired position on the workpiece. In one particular embodiment, the beam directing assembly includes first and second mirrors coupled to first and second galvanometers for controllably directing the laser beam along first and second axes, respectively. In one particular embodiment, the system includes a calibration assembly (150) having a three axis state (162, 164, 166) for performing calibrations of the laser beam location.
PCT/US2005/026601 2004-07-30 2005-07-27 Apparatus and methods for scanning conoscopic holography measurements WO2007001327A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/903,332 US7321421B2 (en) 2004-07-30 2004-07-30 Apparatus and methods for scanning conoscopic holography measurements
US10/903,332 2004-07-30

Publications (2)

Publication Number Publication Date
WO2007001327A2 WO2007001327A2 (en) 2007-01-04
WO2007001327A3 true WO2007001327A3 (en) 2007-04-12

Family

ID=35731774

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/026601 WO2007001327A2 (en) 2004-07-30 2005-07-27 Apparatus and methods for scanning conoscopic holography measurements

Country Status (2)

Country Link
US (1) US7321421B2 (en)
WO (1) WO2007001327A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7286218B2 (en) * 2004-12-19 2007-10-23 Kla-Tencor Technologies Corporation System and method for inspecting a workpiece surface using surface structure spatial frequencies
US7593117B2 (en) * 2006-12-14 2009-09-22 The Boeing Company Apparatus and methods for measuring workpieces
DE112009000516T5 (en) * 2008-03-12 2011-02-10 Optimet Optical Metrology Ltd. Intra-oral imaging system and method based on conoscopic holography
US8963949B2 (en) * 2009-04-22 2015-02-24 Qualcomm Incorporated Image selection and combination method and device
US9271572B2 (en) 2009-10-09 2016-03-01 Paul J. Fenelon Lift system
CN103424079A (en) * 2012-05-14 2013-12-04 中国测试技术研究院力学研究所 Large workpiece diameter laser measuring system and method
CN114631014A (en) * 2019-10-30 2022-06-14 雷迪安特视觉系统有限公司 Non-spatial measurement result calibration method and related system and device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20002978U1 (en) * 2000-02-18 2000-05-11 Breitmeier Ulrich Auxiliary device for an optical distance sensor
WO2003105685A2 (en) * 2002-06-14 2003-12-24 Infm Istituto Nazionale Per La Fisica Della Materia An apparatus for determining the internal outline of a duct or cavity, and in particular for determining the internal impression of the auditory canal, a probe for this apparatus, and a reflection device for an optical scanning apparatus

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4707128A (en) * 1984-12-31 1987-11-17 Subsea Engineering Associates, Inc. Turbid media viewing system
US5111513A (en) * 1989-03-03 1992-05-05 Greyhawk Systems, Inc. Projected image linewidth correction apparatus and method
FR2665270B1 (en) 1990-07-27 1994-05-13 Etat Francais Cnet LIGHT SPACE MODULATOR DEVICE AND HIGH DYNAMIC CONOSCOPIC HOLOGRAPHY SYSTEM COMPRISING SUCH A MODULATOR DEVICE.
FR2684202B1 (en) 1991-11-27 1994-03-04 Conoscope Sa IMPROVED HOLOGRAPHIC METHOD AND DEVICE IN INCOHERENT LIGHT.
US5453969A (en) 1994-05-04 1995-09-26 California Institute Of Technology Optical memory with pit depth encoding
US5615013A (en) * 1995-06-27 1997-03-25 Virtek Vision Corp. Galvanometer and camera system
AU3124297A (en) 1996-05-10 1997-12-05 California Institute Of Technology Conoscopic system for real-time corneal topography
US5953137A (en) * 1996-10-09 1999-09-14 Optimet, Optical Metrology Ltd. Linear conoscopic holography
US6678078B1 (en) 1999-01-07 2004-01-13 Digilens, Inc. Optical filter employing holographic optical elements and image generating system incorporating the optical filter
WO2001011895A1 (en) 1999-08-04 2001-02-15 Digilens, Inc. Apparatus for producing a three-dimensional image
US6424437B1 (en) 2000-10-10 2002-07-23 Digilens, Inc. Projection display employing switchable holographic optical elements
US6720567B2 (en) * 2001-01-30 2004-04-13 Gsi Lumonics Corporation Apparatus and method for focal point control for laser machining

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20002978U1 (en) * 2000-02-18 2000-05-11 Breitmeier Ulrich Auxiliary device for an optical distance sensor
WO2003105685A2 (en) * 2002-06-14 2003-12-24 Infm Istituto Nazionale Per La Fisica Della Materia An apparatus for determining the internal outline of a duct or cavity, and in particular for determining the internal impression of the auditory canal, a probe for this apparatus, and a reflection device for an optical scanning apparatus

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
GAVA D ET AL: "3D CONOSCOPIC VISION", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 3167, 31 July 1997 (1997-07-31), pages 196 - 209, XP008014890, ISSN: 0277-786X *
LASO E ET AL: "OMEGA: novel optical sensor 3D measuring system for complex geometry in adverse environment'", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE-INT. SOC. OPT. ENG USA, vol. 2406, 1995, pages 235 - 245, XP002418744, ISSN: 0277-786X *
MALET Y ET AL: "Conoscopic holography application: multipurpose rangefinders", JOURNAL OF OPTICS IOP PUBLISHING UK, vol. 29, no. 3, June 1998 (1998-06-01), pages 183 - 187, XP002418746, ISSN: 0150-536X *
SIRAT G Y ET AL: "ConoProbe and ConoLine, two new 3-dimensional measurement systems", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE-INT. SOC. OPT. ENG USA, vol. 4830, 2003, pages 319 - 324, XP002418745, ISSN: 0277-786X *
WEBER T: "Conoscopic 3D measurement system", SENSOR REVIEW MCB UNIVERSITY PRESS UK, vol. 20, no. 3, 2000, pages 202 - 205, XP002418743, ISSN: 0260-2288 *

Also Published As

Publication number Publication date
US20060023223A1 (en) 2006-02-02
US7321421B2 (en) 2008-01-22
WO2007001327A2 (en) 2007-01-04

Similar Documents

Publication Publication Date Title
WO2007001327A3 (en) Apparatus and methods for scanning conoscopic holography measurements
EP2800945B1 (en) Non-contact sensor having improved laser spot
CN105829828B (en) Method for measuring penetration depth of laser beam into workpiece and laser processing equipment
EP1166948A3 (en) Laser processing apparatus and method
CN101041204B (en) Apparatus and method for performing laser welding
TW550867B (en) Laser beam delivery system with trepanning module
US20020190040A1 (en) Programmable phase plate for tool modification in laser machining applications
AU5800000A (en) Method and device for determining spatial positions and orientations
WO2006057856A3 (en) Active beam delivery system for laser peening and laser peening method
WO2006065437A3 (en) Laser triangulation method for measurement of highly reflective solder balls
CN101267787A (en) A system and method for the treatment of a patient's eye working at high speed
US10272521B2 (en) Laser machining apparatus comprising a parallel displacement unit
US20190064324A1 (en) Laser radar projector
ES2807595T3 (en) System and method for laser processing
AU4580499A (en) Hole-coupled laser scanning system
EP0886352A4 (en) Lens, semiconductor laser element, device for machining the lens and element, process for producing semiconductor laser element, optical element, and device and method for machining optical element
CN109341518B (en) OCT detection device and micro-carving equipment
KR101554389B1 (en) Laser processing apparatus
KR100337011B1 (en) Lidar scanning apparatus for inspecting dust-exhaust
EP1031852A3 (en) Method and device for adjusting a distance measuring apparatus
WO2004029540A3 (en) Determination of the angular position of a laser beam
EP1015164B1 (en) Laser processing device
JP3198830B2 (en) Laser processing machine
KR100241974B1 (en) Vision system using laser
WO2001086762A3 (en) Reflector for laser interrogation of three-dimensional objects

Legal Events

Date Code Title Description
NENP Non-entry into the national phase

Ref country code: DE

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase