WO2006093693A3 - Method and apparatus for euv plasma source target delivery - Google Patents
Method and apparatus for euv plasma source target delivery Download PDFInfo
- Publication number
- WO2006093693A3 WO2006093693A3 PCT/US2006/005647 US2006005647W WO2006093693A3 WO 2006093693 A3 WO2006093693 A3 WO 2006093693A3 US 2006005647 W US2006005647 W US 2006005647W WO 2006093693 A3 WO2006093693 A3 WO 2006093693A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- output orifice
- liquid
- droplet
- delivery
- liquid target
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/006—X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
Abstract
An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007557068A JP5455308B2 (en) | 2005-02-25 | 2006-02-17 | EUV plasma source target supply method and apparatus |
KR1020077021532A KR101235023B1 (en) | 2005-02-25 | 2006-02-17 | Method and apparatus for euv plasma source target delivery |
EP06720851.2A EP1867218B1 (en) | 2005-02-25 | 2006-02-17 | Apparatus for euv plasma source target delivery |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/067,124 | 2005-02-25 | ||
US11/067,124 US7405416B2 (en) | 2005-02-25 | 2005-02-25 | Method and apparatus for EUV plasma source target delivery |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006093693A2 WO2006093693A2 (en) | 2006-09-08 |
WO2006093693A3 true WO2006093693A3 (en) | 2009-04-16 |
Family
ID=36931245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/005647 WO2006093693A2 (en) | 2005-02-25 | 2006-02-17 | Method and apparatus for euv plasma source target delivery |
Country Status (5)
Country | Link |
---|---|
US (3) | US7405416B2 (en) |
EP (1) | EP1867218B1 (en) |
JP (3) | JP5455308B2 (en) |
KR (1) | KR101235023B1 (en) |
WO (1) | WO2006093693A2 (en) |
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US7122816B2 (en) | 2006-10-17 |
JP2012138364A (en) | 2012-07-19 |
JP5455308B2 (en) | 2014-03-26 |
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EP1867218B1 (en) | 2018-08-22 |
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WO2006093693A2 (en) | 2006-09-08 |
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US7838854B2 (en) | 2010-11-23 |
KR101235023B1 (en) | 2013-02-21 |
JP5643779B2 (en) | 2014-12-17 |
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