WO2006086114A3 - Method of manufacturing a hermetic chamber with electrical feedthroughs - Google Patents
Method of manufacturing a hermetic chamber with electrical feedthroughs Download PDFInfo
- Publication number
- WO2006086114A3 WO2006086114A3 PCT/US2006/001101 US2006001101W WO2006086114A3 WO 2006086114 A3 WO2006086114 A3 WO 2006086114A3 US 2006001101 W US2006001101 W US 2006001101W WO 2006086114 A3 WO2006086114 A3 WO 2006086114A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- chamber
- passage
- electrode
- substrate
- manufacturing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/007—Interconnections between the MEMS and external electrical signals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00301—Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/0247—Pressure sensors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/03—Detecting, measuring or recording fluid pressure within the body other than blood pressure, e.g. cerebral pressure; Measuring pressure in body tissues or organs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/06—Bio-MEMS
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/09—Packages
- B81B2207/091—Arrangements for connecting external electrical signals to mechanical structures inside the package
- B81B2207/094—Feed-through, via
- B81B2207/096—Feed-through, via through the substrate
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002597289A CA2597289A1 (en) | 2005-02-10 | 2006-01-13 | Method of manufacturing a hermetic chamber with electrical feedthroughs |
AU2006213091A AU2006213091A1 (en) | 2005-02-10 | 2006-01-13 | Method of manufacturing a hermetic chamber with electrical feedthroughs |
EP06718199A EP1851791A2 (en) | 2005-02-10 | 2006-01-13 | Method of manufacturing a hermetic chamber with electrical feedthroughs |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US65167005P | 2005-02-10 | 2005-02-10 | |
US60/651,670 | 2005-02-10 | ||
US65386805P | 2005-02-17 | 2005-02-17 | |
US60/653,868 | 2005-02-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006086114A2 WO2006086114A2 (en) | 2006-08-17 |
WO2006086114A3 true WO2006086114A3 (en) | 2007-05-31 |
Family
ID=36793553
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/001101 WO2006086114A2 (en) | 2005-02-10 | 2006-01-13 | Method of manufacturing a hermetic chamber with electrical feedthroughs |
PCT/US2006/001095 WO2006086113A2 (en) | 2005-02-10 | 2006-01-13 | Hermetic chamber with electrical feedthroughs |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/001095 WO2006086113A2 (en) | 2005-02-10 | 2006-01-13 | Hermetic chamber with electrical feedthroughs |
Country Status (5)
Country | Link |
---|---|
US (3) | US7662653B2 (en) |
EP (2) | EP1851524A4 (en) |
AU (2) | AU2006213091A1 (en) |
CA (2) | CA2597289A1 (en) |
WO (2) | WO2006086114A2 (en) |
Cited By (3)
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US8388553B2 (en) | 2004-11-04 | 2013-03-05 | Smith & Nephew, Inc. | Cycle and load measurement device |
US8570187B2 (en) | 2007-09-06 | 2013-10-29 | Smith & Nephew, Inc. | System and method for communicating with a telemetric implant |
US9445720B2 (en) | 2007-02-23 | 2016-09-20 | Smith & Nephew, Inc. | Processing sensed accelerometer data for determination of bone healing |
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WO2005027998A2 (en) | 2003-09-16 | 2005-03-31 | Cardiomems, Inc. | Implantable wireless sensor |
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US8026729B2 (en) | 2003-09-16 | 2011-09-27 | Cardiomems, Inc. | System and apparatus for in-vivo assessment of relative position of an implant |
CA2554595C (en) | 2004-02-03 | 2016-03-29 | Atria Medical Inc. | Device and method for controlling in-vivo pressure |
US7647836B2 (en) | 2005-02-10 | 2010-01-19 | Cardiomems, Inc. | Hermetic chamber with electrical feedthroughs |
US7662653B2 (en) * | 2005-02-10 | 2010-02-16 | Cardiomems, Inc. | Method of manufacturing a hermetic chamber with electrical feedthroughs |
AU2006235474A1 (en) * | 2005-04-12 | 2006-10-19 | Cardiomems, Inc. | Electromagnetically coupled hermetic chamber |
WO2007002185A2 (en) | 2005-06-21 | 2007-01-04 | Cardiomems, Inc. | Method of manufacturing implantable wireless sensor for in vivo pressure measurement |
US8486070B2 (en) | 2005-08-23 | 2013-07-16 | Smith & Nephew, Inc. | Telemetric orthopaedic implant |
US20070158769A1 (en) * | 2005-10-14 | 2007-07-12 | Cardiomems, Inc. | Integrated CMOS-MEMS technology for wired implantable sensors |
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DE602007013745D1 (en) * | 2006-05-17 | 2011-05-19 | Cardiomems Inc | HERMETIC CHAMBER WITH ELECTRIC IMPLEMENTS |
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US20090145623A1 (en) | 2009-06-11 |
CA2597078A1 (en) | 2006-08-17 |
US20060174712A1 (en) | 2006-08-10 |
AU2006213090A1 (en) | 2006-08-17 |
WO2006086113A3 (en) | 2007-11-15 |
EP1851524A2 (en) | 2007-11-07 |
CA2597289A1 (en) | 2006-08-17 |
US7662653B2 (en) | 2010-02-16 |
EP1851524A4 (en) | 2011-08-03 |
US20060177956A1 (en) | 2006-08-10 |
EP1851791A2 (en) | 2007-11-07 |
WO2006086114A2 (en) | 2006-08-17 |
AU2006213090B2 (en) | 2011-10-06 |
US7854172B2 (en) | 2010-12-21 |
WO2006086113A2 (en) | 2006-08-17 |
AU2006213091A1 (en) | 2006-08-17 |
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