WO2006083356A3 - Safety, monitoring and control system for thermal reactor - Google Patents

Safety, monitoring and control system for thermal reactor Download PDF

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Publication number
WO2006083356A3
WO2006083356A3 PCT/US2005/042201 US2005042201W WO2006083356A3 WO 2006083356 A3 WO2006083356 A3 WO 2006083356A3 US 2005042201 W US2005042201 W US 2005042201W WO 2006083356 A3 WO2006083356 A3 WO 2006083356A3
Authority
WO
WIPO (PCT)
Prior art keywords
reaction chamber
conduit
controller
thermal reactor
monitoring
Prior art date
Application number
PCT/US2005/042201
Other languages
French (fr)
Other versions
WO2006083356A2 (en
WO2006083356A9 (en
Inventor
Ho-Man Rodney Chiu
Daniel O Clark
Shaun W Crawford
Jay J Jung
Yousseff A Loldj
Robbert Vermeulen
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to EP05856992A priority Critical patent/EP1825196A2/en
Priority to JP2007543373A priority patent/JP5692955B2/en
Priority to KR1020077013756A priority patent/KR101341529B1/en
Publication of WO2006083356A2 publication Critical patent/WO2006083356A2/en
Priority to IL183266A priority patent/IL183266A0/en
Publication of WO2006083356A3 publication Critical patent/WO2006083356A3/en
Publication of WO2006083356A9 publication Critical patent/WO2006083356A9/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/50Control or safety arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23KFEEDING FUEL TO COMBUSTION APPARATUS
    • F23K5/00Feeding or distributing other fuel to combustion apparatus
    • F23K5/002Gaseous fuel
    • F23K5/005Gaseous fuel from a central source to a plurality of burners
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N5/00Systems for controlling combustion
    • F23N5/24Preventing development of abnormal or undesired conditions, i.e. safety arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N5/00Systems for controlling combustion
    • F23N5/24Preventing development of abnormal or undesired conditions, i.e. safety arrangements
    • F23N5/242Preventing development of abnormal or undesired conditions, i.e. safety arrangements using electronic means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2258/00Sources of waste gases
    • B01D2258/02Other waste gases
    • B01D2258/0216Other waste gases from CVD treatment or semi-conductor manufacturing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00Ignition or checking
    • F23N2227/02Starting or ignition cycles
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00Ignition or checking
    • F23N2227/04Prepurge
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N2229/00Flame sensors
    • F23N2229/02Pilot flame sensors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N2231/00Fail safe
    • F23N2231/06Fail safe for flame failures
    • F23N2231/08Fail safe for flame failures for pilot flame failures
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N2231/00Fail safe
    • F23N2231/18Detecting fluid leaks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23NREGULATING OR CONTROLLING COMBUSTION
    • F23N5/00Systems for controlling combustion
    • F23N5/02Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
    • F23N5/08Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00Capture or disposal of greenhouse gases
    • Y02C20/30Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00Aeronautics or air transport
    • Y02T50/60Efficient propulsion technologies, e.g. for aircraft

Abstract

In one or more aspects, a thermal reactor apparatus is provided that may be used to treat industrial effluent fluids, for example waste effluent produced in semiconductor and liquid crystal display manufacturing processes. Specifically, the present invention may include a system comprising a controller, a reaction chamber adapted to be controlled by the controller, a conduit into the reaction chamber, a pilot disposed at a first end of the conduit within the reaction chamber, a sensor disposed at a second end of the conduit outside of the reaction chamber that is coupled to the controller and adapted to provide an indication to the controller whether the pilot is lit, and an actuator operable to open and close the conduit. Numerous other aspects of the invention are disclosed.
PCT/US2005/042201 2004-11-18 2005-11-17 Safety, monitoring and control system for thermal reactor WO2006083356A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP05856992A EP1825196A2 (en) 2004-11-18 2005-11-17 Safety, monitoring and control system for thermal reactor
JP2007543373A JP5692955B2 (en) 2004-11-18 2005-11-17 Safety, monitoring and control mechanism of thermal abatement reactor
KR1020077013756A KR101341529B1 (en) 2004-11-18 2005-11-17 Thermal abatement reactor system and apparatus
IL183266A IL183266A0 (en) 2004-11-18 2007-05-16 Safety, monitoring and control features for thermal abatement reactor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/991,740 US7682574B2 (en) 2004-11-18 2004-11-18 Safety, monitoring and control features for thermal abatement reactor
US10/991,740 2004-11-18

Publications (3)

Publication Number Publication Date
WO2006083356A2 WO2006083356A2 (en) 2006-08-10
WO2006083356A3 true WO2006083356A3 (en) 2009-01-08
WO2006083356A9 WO2006083356A9 (en) 2009-03-05

Family

ID=36386539

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/042201 WO2006083356A2 (en) 2004-11-18 2005-11-17 Safety, monitoring and control system for thermal reactor

Country Status (8)

Country Link
US (1) US7682574B2 (en)
EP (1) EP1825196A2 (en)
JP (2) JP5692955B2 (en)
KR (1) KR101341529B1 (en)
CN (1) CN101460782A (en)
IL (1) IL183266A0 (en)
TW (1) TWI335406B (en)
WO (1) WO2006083356A2 (en)

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US10029957B2 (en) * 2012-08-21 2018-07-24 Uop Llc Methane conversion apparatus and process using a supersonic flow reactor
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US9689615B2 (en) * 2012-08-21 2017-06-27 Uop Llc Steady state high temperature reactor
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US20040188360A1 (en) * 2003-03-24 2004-09-30 Ingersoll-Rand Energy Systems Corporation Fuel-conditioning skid

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EP1825196A2 (en) 2007-08-29
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JP5692955B2 (en) 2015-04-01
US20060104878A1 (en) 2006-05-18
TWI335406B (en) 2011-01-01
WO2006083356A9 (en) 2009-03-05
US7682574B2 (en) 2010-03-23
IL183266A0 (en) 2007-09-20
CN101460782A (en) 2009-06-17

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