WO2006083356A3 - Safety, monitoring and control system for thermal reactor - Google Patents
Safety, monitoring and control system for thermal reactor Download PDFInfo
- Publication number
- WO2006083356A3 WO2006083356A3 PCT/US2005/042201 US2005042201W WO2006083356A3 WO 2006083356 A3 WO2006083356 A3 WO 2006083356A3 US 2005042201 W US2005042201 W US 2005042201W WO 2006083356 A3 WO2006083356 A3 WO 2006083356A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reaction chamber
- conduit
- controller
- thermal reactor
- monitoring
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/50—Control or safety arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23K—FEEDING FUEL TO COMBUSTION APPARATUS
- F23K5/00—Feeding or distributing other fuel to combustion apparatus
- F23K5/002—Gaseous fuel
- F23K5/005—Gaseous fuel from a central source to a plurality of burners
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N5/00—Systems for controlling combustion
- F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N5/00—Systems for controlling combustion
- F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
- F23N5/242—Preventing development of abnormal or undesired conditions, i.e. safety arrangements using electronic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2227/00—Ignition or checking
- F23N2227/02—Starting or ignition cycles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2227/00—Ignition or checking
- F23N2227/04—Prepurge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2229/00—Flame sensors
- F23N2229/02—Pilot flame sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2231/00—Fail safe
- F23N2231/06—Fail safe for flame failures
- F23N2231/08—Fail safe for flame failures for pilot flame failures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2231/00—Fail safe
- F23N2231/18—Detecting fluid leaks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N5/00—Systems for controlling combustion
- F23N5/02—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
- F23N5/08—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05856992A EP1825196A2 (en) | 2004-11-18 | 2005-11-17 | Safety, monitoring and control system for thermal reactor |
JP2007543373A JP5692955B2 (en) | 2004-11-18 | 2005-11-17 | Safety, monitoring and control mechanism of thermal abatement reactor |
KR1020077013756A KR101341529B1 (en) | 2004-11-18 | 2005-11-17 | Thermal abatement reactor system and apparatus |
IL183266A IL183266A0 (en) | 2004-11-18 | 2007-05-16 | Safety, monitoring and control features for thermal abatement reactor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/991,740 US7682574B2 (en) | 2004-11-18 | 2004-11-18 | Safety, monitoring and control features for thermal abatement reactor |
US10/991,740 | 2004-11-18 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2006083356A2 WO2006083356A2 (en) | 2006-08-10 |
WO2006083356A3 true WO2006083356A3 (en) | 2009-01-08 |
WO2006083356A9 WO2006083356A9 (en) | 2009-03-05 |
Family
ID=36386539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/042201 WO2006083356A2 (en) | 2004-11-18 | 2005-11-17 | Safety, monitoring and control system for thermal reactor |
Country Status (8)
Country | Link |
---|---|
US (1) | US7682574B2 (en) |
EP (1) | EP1825196A2 (en) |
JP (2) | JP5692955B2 (en) |
KR (1) | KR101341529B1 (en) |
CN (1) | CN101460782A (en) |
IL (1) | IL183266A0 (en) |
TW (1) | TWI335406B (en) |
WO (1) | WO2006083356A2 (en) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7771514B1 (en) | 2004-02-03 | 2010-08-10 | Airgard, Inc. | Apparatus and method for providing heated effluent gases to a scrubber |
US8095240B2 (en) * | 2004-11-18 | 2012-01-10 | Applied Materials, Inc. | Methods for starting and operating a thermal abatement system |
US7682574B2 (en) | 2004-11-18 | 2010-03-23 | Applied Materials, Inc. | Safety, monitoring and control features for thermal abatement reactor |
GB0509163D0 (en) * | 2005-05-05 | 2005-06-15 | Boc Group Plc | Gas combustion apparatus |
DE102006027882B4 (en) * | 2005-09-02 | 2009-04-30 | Clean Systems Korea Inc., Seongnam | Scrubber for treating semiconductor waste gas |
KR20080104372A (en) | 2006-03-16 | 2008-12-02 | 어플라이드 머티어리얼스, 인코포레이티드 | Methods and apparatus for pressure control in electronic device manufacturing systems |
US7611684B2 (en) * | 2006-08-09 | 2009-11-03 | Airgard, Inc. | Effluent gas scrubber and method of scrubbing effluent gasses |
WO2008147523A1 (en) * | 2007-05-25 | 2008-12-04 | Applied Materials, Inc. | Cogeneration abatement system for electronic device manufacturing |
CN101681398B (en) * | 2007-05-25 | 2016-08-10 | 应用材料公司 | Assemble and the method and apparatus of operating electronic device manufacturing systems |
WO2008156687A1 (en) * | 2007-06-15 | 2008-12-24 | Applied Materials, Inc. | Methods and systems for designing and validating operation of abatement systems |
WO2009055660A1 (en) * | 2007-10-24 | 2009-04-30 | Applied Materials, Inc. | Methods and apparatus for starting and operating a thermal abatement system |
KR20100084676A (en) * | 2007-10-26 | 2010-07-27 | 어플라이드 머티어리얼스, 인코포레이티드 | Methods and apparatus for smart abatement using an improved fuel circuit |
CN101939713B (en) * | 2008-02-05 | 2013-05-22 | 应用材料公司 | Methods and apparatus for operating an electronic device manufacturing system |
WO2009100162A2 (en) * | 2008-02-05 | 2009-08-13 | Applied Materials, Inc. | Systems and methods for treating flammable effluent gases from manufacturing processes |
WO2010006181A2 (en) * | 2008-07-11 | 2010-01-14 | Applied Materials, Inc. | Methods and apparatus for abating electronic device manufacturing process effluent |
US7854792B2 (en) * | 2008-09-17 | 2010-12-21 | Airgard, Inc. | Reactive gas control |
US20100119984A1 (en) * | 2008-11-10 | 2010-05-13 | Fox Allen G | Abatement system |
US9071046B2 (en) * | 2012-01-10 | 2015-06-30 | Hzo, Inc. | Methods, apparatuses and systems for monitoring for exposure of electronic devices to moisture and reacting to exposure of electronic devices to moisture |
US10160697B2 (en) * | 2012-08-21 | 2018-12-25 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
US10029957B2 (en) * | 2012-08-21 | 2018-07-24 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
US9656229B2 (en) * | 2012-08-21 | 2017-05-23 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
US9689615B2 (en) * | 2012-08-21 | 2017-06-27 | Uop Llc | Steady state high temperature reactor |
US9707530B2 (en) * | 2012-08-21 | 2017-07-18 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
CN102941049B (en) * | 2012-10-31 | 2014-07-23 | 中国石油化工股份有限公司 | Device and method for preventing reactor from losing control by tail gas flow monitoring |
GB2514341B (en) * | 2013-05-20 | 2016-08-24 | Edwards Ltd | Radiant burner combustion monitoring |
GB2516267B (en) * | 2013-07-17 | 2016-08-17 | Edwards Ltd | Head assembly |
WO2016182648A1 (en) * | 2015-05-08 | 2016-11-17 | Applied Materials, Inc. | Method for controlling a processing system |
WO2018037253A1 (en) * | 2016-08-24 | 2018-03-01 | Fuchs Petrolub Se | Test apparatus and method for testing dust suppression systems |
CN110461437B (en) | 2017-01-06 | 2022-09-13 | 阿尔泽塔公司 | Systems and methods for improved exhaust abatement |
CN110392596B (en) * | 2017-02-10 | 2021-05-25 | Eim研发有限公司 | Method and device for gas destruction |
US20180306445A1 (en) * | 2017-04-22 | 2018-10-25 | Emerson Electric Co. | Igniter failure detection assemblies for furnaces, and corresponding methods of detecting igniter failure |
US10690057B2 (en) * | 2017-04-25 | 2020-06-23 | General Electric Company | Turbomachine combustor end cover assembly with flame detector sight tube collinear with a tube of a bundled tube fuel nozzle |
US11517831B2 (en) * | 2019-06-25 | 2022-12-06 | George Andrew Rabroker | Abatement system for pyrophoric chemicals and method of use |
DE102019117331A1 (en) * | 2019-06-27 | 2020-12-31 | Das Environmental Expert Gmbh | Burner for generating a flame for the combustion of process gas and exhaust gas treatment device with a burner |
CN116618190B (en) * | 2023-07-21 | 2023-10-03 | 福建德尔科技股份有限公司 | Centrifugal control system and control method for preparing tungsten hexafluoride |
Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3185846A (en) * | 1961-05-16 | 1965-05-25 | Bailey Meter Co | Ultra-violet radiation flame monitor |
US3276506A (en) * | 1963-12-19 | 1966-10-04 | Apparatcbau Eugen Schrag Komma | Burner control device |
FR2062565A5 (en) * | 1969-09-26 | 1971-06-25 | Electronics Corp America | |
US4087229A (en) * | 1976-06-28 | 1978-05-02 | Robertshaw Controls Company | Automatic fuel ignition system with redundant flame sensing |
GB2028998A (en) * | 1978-08-25 | 1980-03-12 | Satronic Ag | Improvements in or relating to flame monitors |
GB2036384A (en) * | 1978-11-10 | 1980-06-25 | Ferakarn Ltd | Improvements in Waste Gas Recovery Systems |
EP0044670A1 (en) * | 1980-07-21 | 1982-01-27 | Honeywell Inc. | Heating systems |
US4373897A (en) * | 1980-09-15 | 1983-02-15 | Honeywell Inc. | Open draft hood furnace control using induced draft blower and exhaust stack flow rate sensing |
US4443793A (en) * | 1981-11-02 | 1984-04-17 | Calnor Of El Paso | Gas detection system |
GB2183023A (en) * | 1985-11-13 | 1987-05-28 | Michigan Cons Gas | Gaseous fueled torch apparatus and fueling module therefore |
US4828484A (en) * | 1987-09-10 | 1989-05-09 | Hamilton Standard Controls, Inc. | Gas valve relay redundant safety |
US5123836A (en) * | 1988-07-29 | 1992-06-23 | Chiyoda Corporation | Method for the combustion treatment of toxic gas-containing waste gas |
US5419358A (en) * | 1993-08-02 | 1995-05-30 | Francis Myrtil | Gas monitoring system for a boiler |
EP0752557A2 (en) * | 1995-07-07 | 1997-01-08 | Atwood Industries Inc. | Gas fired appliance ignition and combustion monitoring system |
WO1997045677A1 (en) * | 1996-05-29 | 1997-12-04 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and apparatus for optical flame control of combustion burners |
EP0919773A1 (en) * | 1997-05-20 | 1999-06-02 | Mitsubishi Heavy Industries, Ltd. | Flame detector for combustor |
US20030189967A1 (en) * | 2002-04-04 | 2003-10-09 | Volker Rumelin | Method for monitoring a gas appliance, in particular a heat generator, with predominantly flameless oxidation, and monitoring module for performing the method |
US20040188360A1 (en) * | 2003-03-24 | 2004-09-30 | Ingersoll-Rand Energy Systems Corporation | Fuel-conditioning skid |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3299416A (en) | 1964-03-27 | 1967-01-17 | Bailey Meter Co | Fail-safe flame detector |
US3698696A (en) * | 1971-06-14 | 1972-10-17 | Standard Int Corp | Combustion mixture control system for calenders |
US4059386A (en) * | 1976-01-21 | 1977-11-22 | A. O. Smith Corporation | Combustion heating apparatus to improve operation of gas pilot burners |
US4243372A (en) * | 1979-02-05 | 1981-01-06 | Electronics Corporation Of America | Burner control system |
US4482312A (en) * | 1979-06-20 | 1984-11-13 | Electronics Corporation Of America | Burner control system |
US4280184A (en) | 1979-06-26 | 1981-07-21 | Electronic Corporation Of America | Burner flame detection |
CH649274A5 (en) | 1980-10-14 | 1985-05-15 | Maerz Ofenbau | CALCINING OVEN FOR BURNING LIMESTONE AND SIMILAR MINERAL RAW MATERIALS. |
JPS5935197A (en) * | 1982-08-23 | 1984-02-25 | サンポツト株式会社 | Burning device of organic solvent liquid waste |
US4483672A (en) * | 1983-01-19 | 1984-11-20 | Essex Group, Inc. | Gas burner control system |
US4555389A (en) | 1984-04-27 | 1985-11-26 | Toyo Sanso Co., Ltd. | Method of and apparatus for burning exhaust gases containing gaseous silane |
JP2688655B2 (en) * | 1988-09-02 | 1997-12-10 | 千代田化工建設株式会社 | Combustion treatment method and equipment for toxic gas |
DD274830A1 (en) | 1988-08-12 | 1990-01-03 | Elektromat Veb | DEVICE FOR GAS PHASE PROCESSING OF DISK MULTIPLE WORKPIECES |
JP2664984B2 (en) | 1989-02-28 | 1997-10-22 | 三菱重工業株式会社 | Flame retardant low calorific value gas combustion device |
JP3255442B2 (en) | 1992-01-31 | 2002-02-12 | 横河電子機器株式会社 | Flame detector |
US5362458A (en) | 1993-03-22 | 1994-11-08 | General Electric Environmental Services, Incorporated | Process for the simultaneous absorption of sulfur oxides and production of ammonium sulfate |
JP2774918B2 (en) | 1993-04-30 | 1998-07-09 | 品川白煉瓦株式会社 | Incinerator sidewall structure |
US5510093A (en) | 1994-07-25 | 1996-04-23 | Alzeta Corporation | Combustive destruction of halogenated compounds |
JP3404981B2 (en) | 1995-04-21 | 2003-05-12 | 日本鋼管株式会社 | Gas heating device |
US5520536A (en) | 1995-05-05 | 1996-05-28 | Burner Systems International, Inc. | Premixed gas burner |
JPH09133333A (en) | 1995-11-08 | 1997-05-20 | Maroo Zokei Kk | Incinerator |
US5649985A (en) | 1995-11-29 | 1997-07-22 | Kanken Techno Co., Ltd. | Apparatus for removing harmful substances of exhaust gas discharged from semiconductor manufacturing process |
GB9608061D0 (en) | 1996-04-16 | 1996-06-19 | Boc Group Plc | Removal of noxious substances from gas streams |
US6676913B2 (en) | 1996-06-12 | 2004-01-13 | Guild Associates, Inc. | Catalyst composition and method of controlling PFC and HFC emissions |
JPH10110926A (en) | 1996-08-14 | 1998-04-28 | Nippon Sanso Kk | Combustion type harm removal apparatus |
TW342436B (en) | 1996-08-14 | 1998-10-11 | Nippon Oxygen Co Ltd | Combustion type harm removal apparatus (1) |
US6638424B2 (en) | 2000-01-19 | 2003-10-28 | Jensen Enterprises | Stormwater treatment apparatus |
US6322756B1 (en) | 1996-12-31 | 2001-11-27 | Advanced Technology And Materials, Inc. | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
US5935283A (en) | 1996-12-31 | 1999-08-10 | Atmi Ecosys Corporation | Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system |
US5833888A (en) | 1996-12-31 | 1998-11-10 | Atmi Ecosys Corporation | Weeping weir gas/liquid interface structure |
JP3648539B2 (en) | 1996-12-31 | 2005-05-18 | アドバンスド.テクノロジー.マテリアルス.インコーポレイテッド | Exhaust flow treatment system for oxidation treatment of semiconductor manufacturing exhaust |
US5955037A (en) | 1996-12-31 | 1999-09-21 | Atmi Ecosys Corporation | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
US6759018B1 (en) | 1997-05-16 | 2004-07-06 | Advanced Technology Materials, Inc. | Method for point-of-use treatment of effluent gas streams |
TW550112B (en) | 1997-11-14 | 2003-09-01 | Hitachi Ltd | Method for processing perfluorocarbon, and apparatus therefor |
US6261524B1 (en) | 1999-01-12 | 2001-07-17 | Advanced Technology Materials, Inc. | Advanced apparatus for abatement of gaseous pollutants |
US6010576A (en) | 1998-08-27 | 2000-01-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method for cleaning an exhaust gas reactor |
KR100694903B1 (en) | 1998-12-01 | 2007-03-13 | 가부시키가이샤 에바라 세이사꾸쇼 | Waste gas treating device |
US6419455B1 (en) | 1999-04-07 | 2002-07-16 | Alcatel | System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same |
JP4203183B2 (en) * | 1999-06-03 | 2008-12-24 | パロマ工業株式会社 | Control valve for hot water boiler |
JP3460122B2 (en) | 1999-07-14 | 2003-10-27 | 日本酸素株式会社 | Combustion type abatement system and burner for combustion abatement system |
US6187080B1 (en) | 1999-08-09 | 2001-02-13 | United Microelectronics Inc. | Exhaust gas treatment apparatus including a water vortex means and a discharge pipe |
CN1186700C (en) | 2000-09-15 | 2005-01-26 | 先进微装置公司 | Adaptive sampling method for improved control in semiconductor manufacturing |
US7160521B2 (en) | 2001-07-11 | 2007-01-09 | Applied Materials, Inc. | Treatment of effluent from a substrate processing chamber |
US7194369B2 (en) | 2001-07-23 | 2007-03-20 | Cognis Corporation | On-site analysis system with central processor and method of analyzing |
US6616759B2 (en) | 2001-09-06 | 2003-09-09 | Hitachi, Ltd. | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor |
US6752974B2 (en) | 2002-04-10 | 2004-06-22 | Corning Incorporated | Halocarbon abatement system for a glass manufacturing facility |
US6712603B2 (en) | 2002-08-07 | 2004-03-30 | General Motors Corporation | Multiple port catalytic combustion device and method of operating same |
JP2004138373A (en) * | 2002-10-18 | 2004-05-13 | Mateeku Kk | Waste oil combustion furnace |
GB2396402B (en) | 2002-12-21 | 2006-01-11 | Aeromatix Ltd | Gas burner |
US7316721B1 (en) | 2004-02-09 | 2008-01-08 | Porvair, Plc | Ceramic foam insulator with thermal expansion joint |
US7057182B2 (en) | 2004-03-12 | 2006-06-06 | Hewlett-Packard Development Company, L.P. | Method and system for determining distortion in a circuit image |
US7736599B2 (en) | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
US7682574B2 (en) | 2004-11-18 | 2010-03-23 | Applied Materials, Inc. | Safety, monitoring and control features for thermal abatement reactor |
-
2004
- 2004-11-18 US US10/991,740 patent/US7682574B2/en not_active Expired - Fee Related
-
2005
- 2005-11-17 WO PCT/US2005/042201 patent/WO2006083356A2/en active Application Filing
- 2005-11-17 CN CNA2005800394784A patent/CN101460782A/en active Pending
- 2005-11-17 JP JP2007543373A patent/JP5692955B2/en not_active Expired - Fee Related
- 2005-11-17 EP EP05856992A patent/EP1825196A2/en not_active Withdrawn
- 2005-11-17 KR KR1020077013756A patent/KR101341529B1/en not_active IP Right Cessation
- 2005-11-18 TW TW094140667A patent/TWI335406B/en not_active IP Right Cessation
-
2007
- 2007-05-16 IL IL183266A patent/IL183266A0/en unknown
-
2011
- 2011-02-03 JP JP2011022179A patent/JP2011173117A/en active Pending
Patent Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3185846A (en) * | 1961-05-16 | 1965-05-25 | Bailey Meter Co | Ultra-violet radiation flame monitor |
US3276506A (en) * | 1963-12-19 | 1966-10-04 | Apparatcbau Eugen Schrag Komma | Burner control device |
FR2062565A5 (en) * | 1969-09-26 | 1971-06-25 | Electronics Corp America | |
US4087229A (en) * | 1976-06-28 | 1978-05-02 | Robertshaw Controls Company | Automatic fuel ignition system with redundant flame sensing |
GB2028998A (en) * | 1978-08-25 | 1980-03-12 | Satronic Ag | Improvements in or relating to flame monitors |
GB2036384A (en) * | 1978-11-10 | 1980-06-25 | Ferakarn Ltd | Improvements in Waste Gas Recovery Systems |
EP0044670A1 (en) * | 1980-07-21 | 1982-01-27 | Honeywell Inc. | Heating systems |
US4373897A (en) * | 1980-09-15 | 1983-02-15 | Honeywell Inc. | Open draft hood furnace control using induced draft blower and exhaust stack flow rate sensing |
US4443793A (en) * | 1981-11-02 | 1984-04-17 | Calnor Of El Paso | Gas detection system |
GB2183023A (en) * | 1985-11-13 | 1987-05-28 | Michigan Cons Gas | Gaseous fueled torch apparatus and fueling module therefore |
US4828484A (en) * | 1987-09-10 | 1989-05-09 | Hamilton Standard Controls, Inc. | Gas valve relay redundant safety |
US5123836A (en) * | 1988-07-29 | 1992-06-23 | Chiyoda Corporation | Method for the combustion treatment of toxic gas-containing waste gas |
US5419358A (en) * | 1993-08-02 | 1995-05-30 | Francis Myrtil | Gas monitoring system for a boiler |
EP0752557A2 (en) * | 1995-07-07 | 1997-01-08 | Atwood Industries Inc. | Gas fired appliance ignition and combustion monitoring system |
WO1997045677A1 (en) * | 1996-05-29 | 1997-12-04 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and apparatus for optical flame control of combustion burners |
EP0919773A1 (en) * | 1997-05-20 | 1999-06-02 | Mitsubishi Heavy Industries, Ltd. | Flame detector for combustor |
US20030189967A1 (en) * | 2002-04-04 | 2003-10-09 | Volker Rumelin | Method for monitoring a gas appliance, in particular a heat generator, with predominantly flameless oxidation, and monitoring module for performing the method |
US20040188360A1 (en) * | 2003-03-24 | 2004-09-30 | Ingersoll-Rand Energy Systems Corporation | Fuel-conditioning skid |
Also Published As
Publication number | Publication date |
---|---|
TW200624721A (en) | 2006-07-16 |
WO2006083356A2 (en) | 2006-08-10 |
KR101341529B1 (en) | 2014-01-02 |
EP1825196A2 (en) | 2007-08-29 |
JP2011173117A (en) | 2011-09-08 |
KR20070088709A (en) | 2007-08-29 |
JP2008520435A (en) | 2008-06-19 |
JP5692955B2 (en) | 2015-04-01 |
US20060104878A1 (en) | 2006-05-18 |
TWI335406B (en) | 2011-01-01 |
WO2006083356A9 (en) | 2009-03-05 |
US7682574B2 (en) | 2010-03-23 |
IL183266A0 (en) | 2007-09-20 |
CN101460782A (en) | 2009-06-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2006083356A3 (en) | Safety, monitoring and control system for thermal reactor | |
WO2007061816A3 (en) | Controlling the pressure within an annular volume of a wellbore | |
WO2006014372A3 (en) | Pipeline flow control optimization software, and methods | |
WO2008005883A3 (en) | Multi-mode control algorithm | |
IN2012DN01607A (en) | ||
WO2009100162A3 (en) | Systems and methods for treating flammable effluent gases from manufacturing processes | |
CA2533008A1 (en) | Corrosion inhibitor systems for low, moderate and high temperature fluids and methods for making and using same | |
WO2008081407A3 (en) | Material and/or fuel produced from biomass | |
WO2007104468A3 (en) | Vehicle security control system | |
UA95466C2 (en) | Method for controlling the cooling of an industrial plant | |
TW200734149A (en) | Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control | |
SG135168A1 (en) | System and method for monitoring drilling process parameters and controlling drilling operation | |
WO2007130408A3 (en) | System and method for gas treatment comprising biological and chemic oxidation scrubbing stages | |
WO2008077622A3 (en) | Water filter device with control unit for setting a cutting ratio | |
TW200700806A (en) | Liquid crystal display panel cutting system and method and liquid crystal display device fabricating method using the same | |
CA2508413A1 (en) | Backup control for welding-type device remote control and method of use | |
WO2009153755A3 (en) | Cryosurgical instrument insulating system | |
GB2429995B (en) | Method for signalling a downhole device in a flowing well | |
WO2008090438A3 (en) | Apparatus for light control and method for light control | |
WO2007007003A3 (en) | Method for plasma treatment of gas effluents | |
WO2010106155A3 (en) | Remediation of polluted materials or sites | |
WO2010045468A3 (en) | Methods and apparatus for recovering heat from processing systems | |
WO2010006181A3 (en) | Methods and apparatus for abating electronic device manufacturing process effluent | |
WO2010090803A3 (en) | Condenser system | |
WO2007083999A3 (en) | Method for chemical reduction of an oxidized contamination material, or reducing oxidation of a contamination material and a conditioning system for doing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200580039478.4 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 183266 Country of ref document: IL |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2007543373 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2005856992 Country of ref document: EP Ref document number: 2151/CHENP/2007 Country of ref document: IN |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020077013756 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 2005856992 Country of ref document: EP |