WO2006078299A3 - Integrated nanotube and field effect switching device - Google Patents

Integrated nanotube and field effect switching device Download PDF

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Publication number
WO2006078299A3
WO2006078299A3 PCT/US2005/018535 US2005018535W WO2006078299A3 WO 2006078299 A3 WO2006078299 A3 WO 2006078299A3 US 2005018535 W US2005018535 W US 2005018535W WO 2006078299 A3 WO2006078299 A3 WO 2006078299A3
Authority
WO
WIPO (PCT)
Prior art keywords
switching device
devices
field effect
nanotube
switching
Prior art date
Application number
PCT/US2005/018535
Other languages
French (fr)
Other versions
WO2006078299A2 (en
Inventor
Claude L Bertin
Original Assignee
Nantero Inc
Claude L Bertin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nantero Inc, Claude L Bertin filed Critical Nantero Inc
Priority to EP05856763A priority Critical patent/EP1776763B1/en
Priority to CA2570486A priority patent/CA2570486C/en
Priority to DE602005012110T priority patent/DE602005012110D1/en
Publication of WO2006078299A2 publication Critical patent/WO2006078299A2/en
Publication of WO2006078299A3 publication Critical patent/WO2006078299A3/en

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/02Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change
    • G11C13/025Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C23/00Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0094Switches making use of nanoelectromechanical systems [NEMS]
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/54Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements of vacuum tubes
    • H03K17/545Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements of vacuum tubes using microengineered devices, e.g. field emission devices
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K19/00Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/02Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components
    • H03K19/08Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using semiconductor devices
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C2213/00Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/10Resistive cells; Technology aspects
    • G11C2213/17Memory cell being a nanowire transistor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/902Specified use of nanostructure
    • Y10S977/932Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/94Specified use of nanostructure for electronic or optoelectronic application in a logic circuit

Abstract

Hybrid switching devices (10) integrate nanotube switching elements (20) with field effect devices (30), such as NFETs and PFETs. A switching device forms and unforms a conductive channel from the signal input to the output subject to the relative state of the control input. In embodiments of the invention, the conductive channel includes a nanotube channel element (20) and a field modulatable semiconductor channel element (30). The switching device may include a nanotube switching element and a field effect device electrically disposed in series. According to one aspect of the invention, an integrated switching device is a four-terminal device with a signal input terminal (25), a control input terminal (40’), a second input terminal (40), and an output terminal (45). The devices may be non-volatile. The devices can form the basis for a hybrid NT-FET logic family and can be used to implement any Boolean logic circuit.
PCT/US2005/018535 2004-06-18 2005-05-26 Integrated nanotube and field effect switching device WO2006078299A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP05856763A EP1776763B1 (en) 2004-06-18 2005-05-26 Integrated nanotube and field effect switching device
CA2570486A CA2570486C (en) 2004-06-18 2005-05-26 Integrated nanotube and field effect switching device
DE602005012110T DE602005012110D1 (en) 2004-06-18 2005-05-26 SWITCHING DEVICE WITH INTEGRATED NANO-EYE AND FIELD EFFECT TECHNOLOGY

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US58101504P 2004-06-18 2004-06-18
US60/581,015 2004-06-18
US11/033,089 US7288970B2 (en) 2004-06-18 2005-01-10 Integrated nanotube and field effect switching device
US11/033,089 2005-01-10

Publications (2)

Publication Number Publication Date
WO2006078299A2 WO2006078299A2 (en) 2006-07-27
WO2006078299A3 true WO2006078299A3 (en) 2006-10-12

Family

ID=36073317

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/018535 WO2006078299A2 (en) 2004-06-18 2005-05-26 Integrated nanotube and field effect switching device

Country Status (6)

Country Link
US (3) US7288970B2 (en)
EP (1) EP1776763B1 (en)
AT (1) ATE419676T1 (en)
CA (1) CA2570486C (en)
DE (1) DE602005012110D1 (en)
WO (1) WO2006078299A2 (en)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US6924538B2 (en) * 2001-07-25 2005-08-02 Nantero, Inc. Devices having vertically-disposed nanofabric articles and methods of making the same
US7259410B2 (en) * 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
US6706402B2 (en) * 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US7335395B2 (en) * 2002-04-23 2008-02-26 Nantero, Inc. Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
US7560136B2 (en) * 2003-01-13 2009-07-14 Nantero, Inc. Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
US7858185B2 (en) * 2003-09-08 2010-12-28 Nantero, Inc. High purity nanotube fabrics and films
US7294877B2 (en) * 2003-03-28 2007-11-13 Nantero, Inc. Nanotube-on-gate FET structures and applications
WO2005019793A2 (en) * 2003-05-14 2005-03-03 Nantero, Inc. Sensor platform using a horizontally oriented nanotube element
US7274064B2 (en) * 2003-06-09 2007-09-25 Nanatero, Inc. Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
US7115901B2 (en) * 2003-06-09 2006-10-03 Nantero, Inc. Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
JP3731589B2 (en) * 2003-07-18 2006-01-05 ソニー株式会社 Imaging device and synchronization signal generator
EP1665278A4 (en) * 2003-08-13 2007-11-07 Nantero Inc Nanotube-based switching elements with multiple controls and circuits made from same
US7375369B2 (en) * 2003-09-08 2008-05-20 Nantero, Inc. Spin-coatable liquid for formation of high purity nanotube films
US7556746B2 (en) * 2004-06-03 2009-07-07 Nantero, Inc. Method of making an applicator liquid for electronics fabrication process
US7658869B2 (en) * 2004-06-03 2010-02-09 Nantero, Inc. Applicator liquid containing ethyl lactate for preparation of nanotube films
US7652342B2 (en) * 2004-06-18 2010-01-26 Nantero, Inc. Nanotube-based transfer devices and related circuits
WO2006121461A2 (en) * 2004-09-16 2006-11-16 Nantero, Inc. Light emitters using nanotubes and methods of making same
WO2006137926A2 (en) * 2004-11-02 2006-12-28 Nantero, Inc. Nanotube esd protective devices and corresponding nonvolatile and volatile nanotube switches
US20100147657A1 (en) * 2004-11-02 2010-06-17 Nantero, Inc. Nanotube esd protective devices and corresponding nonvolatile and volatile nanotube switches
CA2590684A1 (en) 2004-12-16 2006-06-22 Nantero, Inc. Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof
US7394687B2 (en) * 2005-05-09 2008-07-01 Nantero, Inc. Non-volatile-shadow latch using a nanotube switch
US7479654B2 (en) * 2005-05-09 2009-01-20 Nantero, Inc. Memory arrays using nanotube articles with reprogrammable resistance
TWI324773B (en) * 2005-05-09 2010-05-11 Nantero Inc Non-volatile shadow latch using a nanotube switch
US7781862B2 (en) * 2005-05-09 2010-08-24 Nantero, Inc. Two-terminal nanotube devices and systems and methods of making same
US7598127B2 (en) * 2005-05-12 2009-10-06 Nantero, Inc. Nanotube fuse structure
US7575693B2 (en) * 2005-05-23 2009-08-18 Nantero, Inc. Method of aligning nanotubes and wires with an etched feature
US7402770B2 (en) 2005-06-10 2008-07-22 Lsi Logic Corporation Nano structure electrode design
US7538040B2 (en) 2005-06-30 2009-05-26 Nantero, Inc. Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers
US7907899B1 (en) * 2005-07-13 2011-03-15 Impinj, Inc. RFID tags having a rectifier circuit including a dual-terminal rectifier device
US7838943B2 (en) * 2005-07-25 2010-11-23 International Business Machines Corporation Shared gate for conventional planar device and horizontal CNT
US7446044B2 (en) * 2005-09-19 2008-11-04 California Institute Of Technology Carbon nanotube switches for memory, RF communications and sensing applications, and methods of making the same
GB0618045D0 (en) * 2006-09-13 2006-10-25 Cavendish Kinetics Ltd Non-volatile memory bitcell
WO2009008929A2 (en) * 2007-04-09 2009-01-15 Northeastern University Bistable nanoswitch
US7701013B2 (en) * 2007-07-10 2010-04-20 International Business Machines Corporation Nanoelectromechanical transistors and methods of forming same
US7550354B2 (en) * 2007-07-11 2009-06-23 International Business Machines Corporation Nanoelectromechanical transistors and methods of forming same
US7911234B1 (en) * 2007-09-28 2011-03-22 The Board Of Trustees Of The Leland Stanford Junior University Nanotube logic circuits
US9019756B2 (en) 2008-02-14 2015-04-28 Cavendish Kinetics, Ltd Architecture for device having cantilever electrode
US8659940B2 (en) * 2008-03-25 2014-02-25 Nantero Inc. Carbon nanotube-based neural networks and methods of making and using same
KR101432037B1 (en) * 2008-04-25 2014-08-20 삼성전자주식회사 Convertible logic circuit comprising carbon natube transistor having ambipolar charateristic
WO2009135017A1 (en) * 2008-04-30 2009-11-05 Cavendish Kinetics Inc. Four-terminal multiple-time programmable memory bitcell and array architecture
US7847588B2 (en) * 2008-08-14 2010-12-07 Nantero, Inc. Nonvolatile nanotube programmable logic devices and a nonvolatile nanotube field programmable gate array using same
KR20100094192A (en) * 2009-02-18 2010-08-26 삼성전자주식회사 Static random access memory using carbon nanotube thin films
US8350360B1 (en) 2009-08-28 2013-01-08 Lockheed Martin Corporation Four-terminal carbon nanotube capacitors
US20110056812A1 (en) * 2009-09-08 2011-03-10 Kaul Anupama B Nano-electro-mechanical switches using three-dimensional sidewall-conductive carbon nanofibers and method for making the same
US8435798B2 (en) * 2010-01-13 2013-05-07 California Institute Of Technology Applications and methods of operating a three-dimensional nano-electro-mechanical resonator and related devices
US8405189B1 (en) 2010-02-08 2013-03-26 Lockheed Martin Corporation Carbon nanotube (CNT) capacitors and devices integrated with CNT capacitors
EP2363958A1 (en) * 2010-03-04 2011-09-07 Thomson Licensing Field programmable gate array
US8125824B1 (en) 2010-09-02 2012-02-28 Lockheed Martin Corporation Nanotube random access memory (NRAM) and transistor integration
KR101871522B1 (en) 2010-09-21 2018-06-26 카벤디시 키네틱스, 인크. Pull up electrode and waffle type microstructure
US8716072B2 (en) 2011-07-25 2014-05-06 International Business Machines Corporation Hybrid CMOS technology with nanowire devices and double gated planar devices
EP2887354B1 (en) * 2013-12-20 2019-08-07 IMEC vzw Nano-electro-mechanical based memory
US9413348B2 (en) * 2014-07-29 2016-08-09 Semiconductor Components Industries, Llc Electronic circuit including a switch having an associated breakdown voltage and a method of using the same
US11831309B2 (en) * 2018-04-20 2023-11-28 Texas Instruments Incorporated Stress reduction on stacked transistor circuits
CN113422595B (en) * 2021-08-24 2021-11-19 成都市易冲半导体有限公司 Electronic switch for processing negative voltage AC signal and control method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050062035A1 (en) * 2003-06-09 2005-03-24 Nantero, Inc. Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
US6990009B2 (en) * 2003-08-13 2006-01-24 Nantero, Inc. Nanotube-based switching elements with multiple controls

Family Cites Families (113)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51129144A (en) * 1975-05-02 1976-11-10 Toshiba Corp Memory divice of non volatile information
CH670914A5 (en) 1986-09-10 1989-07-14 Landis & Gyr Ag
JP2930168B2 (en) * 1992-10-09 1999-08-03 シャープ株式会社 Driving method of ferroelectric memory device
GB9309327D0 (en) 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
US5578976A (en) 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
US5682345A (en) 1995-07-28 1997-10-28 Micron Quantum Devices, Inc. Non-volatile data storage unit method of controlling same
US6183714B1 (en) * 1995-09-08 2001-02-06 Rice University Method of making ropes of single-wall carbon nanotubes
US5818748A (en) 1995-11-21 1998-10-06 International Business Machines Corporation Chip function separation onto separate stacked chips
US6445006B1 (en) 1995-12-20 2002-09-03 Advanced Technology Materials, Inc. Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making same
US6159620A (en) 1997-03-31 2000-12-12 The Regents Of The University Of California Single-electron solid state electronic device
US6011744A (en) * 1997-07-16 2000-01-04 Altera Corporation Programmable logic device with multi-port memory
US6221330B1 (en) * 1997-08-04 2001-04-24 Hyperion Catalysis International Inc. Process for producing single wall nanotubes using unsupported metal catalysts
DE19738115C1 (en) * 1997-09-01 1999-03-18 Siemens Ag Circuit arrangement with single-electron components, method for their operation and application of the method for adding binary numbers
US5903010A (en) * 1997-10-29 1999-05-11 Hewlett-Packard Company Quantum wire switch and switching method
US6097241A (en) * 1998-07-21 2000-08-01 International Business Machines Corporation ASIC low power activity detector to change threshold voltage
US6097243A (en) * 1998-07-21 2000-08-01 International Business Machines Corporation Device and method to reduce power consumption in integrated semiconductor devices using a low power groggy mode
US7416699B2 (en) 1998-08-14 2008-08-26 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotube devices
US6348700B1 (en) * 1998-10-27 2002-02-19 The Mitre Corporation Monomolecular rectifying wire and logic based thereupon
US6232706B1 (en) * 1998-11-12 2001-05-15 The Board Of Trustees Of The Leland Stanford Junior University Self-oriented bundles of carbon nanotubes and method of making same
US6472705B1 (en) * 1998-11-18 2002-10-29 International Business Machines Corporation Molecular memory & logic
WO2000048195A1 (en) 1999-02-12 2000-08-17 Board Of Trustees Operating Michigan State University Nanocapsules containing charged particles, their uses and methods of forming the same
US6160230A (en) 1999-03-01 2000-12-12 Raytheon Company Method and apparatus for an improved single pole double throw micro-electrical mechanical switch
US7030408B1 (en) * 1999-03-29 2006-04-18 Hewlett-Packard Development Company, L.P. Molecular wire transistor (MWT)
US6256767B1 (en) * 1999-03-29 2001-07-03 Hewlett-Packard Company Demultiplexer for a molecular wire crossbar network (MWCN DEMUX)
US6128214A (en) 1999-03-29 2000-10-03 Hewlett-Packard Molecular wire crossbar memory
US6314019B1 (en) * 1999-03-29 2001-11-06 Hewlett-Packard Company Molecular-wire crossbar interconnect (MWCI) for signal routing and communications
US6518156B1 (en) * 1999-03-29 2003-02-11 Hewlett-Packard Company Configurable nanoscale crossbar electronic circuits made by electrochemical reaction
US6345362B1 (en) * 1999-04-06 2002-02-05 International Business Machines Corporation Managing Vt for reduced power using a status table
EP2239794A3 (en) * 1999-07-02 2011-03-23 President and Fellows of Harvard College Nanoscopic wire-based devices, arrays, and methods of their manufacture
US6198655B1 (en) * 1999-12-10 2001-03-06 The Regents Of The University Of California Electrically addressable volatile non-volatile molecular-based switching devices
US6346846B1 (en) * 1999-12-17 2002-02-12 International Business Machines Corporation Methods and apparatus for blowing and sensing antifuses
JP3572329B2 (en) 1999-12-22 2004-09-29 エルピーダメモリ株式会社 A data latch circuit and an operation method of the data latch circuit.
US6625740B1 (en) 2000-01-13 2003-09-23 Cirrus Logic, Inc. Dynamically activating and deactivating selected circuit blocks of a data processing integrated circuit during execution of instructions according to power code bits appended to selected instructions
US7335603B2 (en) * 2000-02-07 2008-02-26 Vladimir Mancevski System and method for fabricating logic devices comprising carbon nanotube transistors
US7139743B2 (en) * 2000-04-07 2006-11-21 Washington University Associative database scanning and information retrieval using FPGA devices
EP1170799A3 (en) * 2000-07-04 2009-04-01 Infineon Technologies AG Electronic device and method of manufacture of an electronic device
GB2364933B (en) 2000-07-18 2002-12-31 Lg Electronics Inc Method of horizontally growing carbon nanotubes
EP2298968A3 (en) * 2000-08-22 2011-10-05 President and Fellows of Harvard College Method for growing nanowires
US6376787B1 (en) * 2000-08-24 2002-04-23 Texas Instruments Incorporated Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer
US6504118B2 (en) * 2000-10-27 2003-01-07 Daniel J Hyman Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism
US6495905B2 (en) * 2000-11-09 2002-12-17 Texas Instruments Incorporated Nanomechanical switches and circuits
JP3587248B2 (en) 2000-12-20 2004-11-10 日本電気株式会社 Scan flip-flops
US6597048B1 (en) * 2000-12-26 2003-07-22 Cornell Research Foundation Electrostatically charged microstructures
JP2002203768A (en) * 2000-12-28 2002-07-19 Toshiba Corp Exposure method, exposure system and recording medium
US6625047B2 (en) 2000-12-31 2003-09-23 Texas Instruments Incorporated Micromechanical memory element
US6423583B1 (en) * 2001-01-03 2002-07-23 International Business Machines Corporation Methodology for electrically induced selective breakdown of nanotubes
WO2002079514A1 (en) 2001-01-10 2002-10-10 The Trustees Of Boston College Dna-bridged carbon nanotube arrays
US6373771B1 (en) * 2001-01-17 2002-04-16 International Business Machines Corporation Integrated fuse latch and shift register for efficient programming and fuse readout
US6803840B2 (en) 2001-03-30 2004-10-12 California Institute Of Technology Pattern-aligned carbon nanotube growth and tunable resonator apparatus
WO2002082544A2 (en) 2001-04-03 2002-10-17 Carnegie Mellon University Electronic circuit device, system and method
US6426687B1 (en) * 2001-05-22 2002-07-30 The Aerospace Corporation RF MEMS switch
US6673424B1 (en) * 2001-06-19 2004-01-06 Arizona Board Of Regents Devices based on molecular electronics
JP2003017074A (en) * 2001-07-02 2003-01-17 Honda Motor Co Ltd Fuel cell
US6643165B2 (en) * 2001-07-25 2003-11-04 Nantero, Inc. Electromechanical memory having cell selection circuitry constructed with nanotube technology
US6574130B2 (en) * 2001-07-25 2003-06-03 Nantero, Inc. Hybrid circuit having nanotube electromechanical memory
US6919592B2 (en) 2001-07-25 2005-07-19 Nantero, Inc. Electromechanical memory array using nanotube ribbons and method for making same
US6924538B2 (en) * 2001-07-25 2005-08-02 Nantero, Inc. Devices having vertically-disposed nanofabric articles and methods of making the same
US6835591B2 (en) 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US6911682B2 (en) * 2001-12-28 2005-06-28 Nantero, Inc. Electromechanical three-trace junction devices
US6706402B2 (en) * 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US7259410B2 (en) 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
US6884734B2 (en) * 2001-11-20 2005-04-26 International Business Machines Corporation Vapor phase etch trim structure with top etch blocking layer
US6835613B2 (en) 2001-12-06 2004-12-28 University Of South Florida Method of producing an integrated circuit with a carbon nanotube
US6784028B2 (en) 2001-12-28 2004-08-31 Nantero, Inc. Methods of making electromechanical three-trace junction devices
US7176505B2 (en) * 2001-12-28 2007-02-13 Nantero, Inc. Electromechanical three-trace junction devices
WO2003063208A2 (en) 2002-01-18 2003-07-31 California Institute Of Technology Array-based architecture for molecular electronics
EP1341184B1 (en) * 2002-02-09 2005-09-14 Samsung Electronics Co., Ltd. Memory device utilizing carbon nanotubes and method of fabricating the memory device
US6889216B2 (en) 2002-03-12 2005-05-03 Knowm Tech, Llc Physical neural network design incorporating nanotechnology
US7049625B2 (en) * 2002-03-18 2006-05-23 Max-Planck-Gesellschaft Zur Fonderung Der Wissenschaften E.V. Field effect transistor memory cell, memory device and method for manufacturing a field effect transistor memory cell
US6946410B2 (en) 2002-04-05 2005-09-20 E. I. Du Pont De Nemours And Company Method for providing nano-structures of uniform length
US6760245B2 (en) * 2002-05-01 2004-07-06 Hewlett-Packard Development Company, L.P. Molecular wire crossbar flash memory
US6988925B2 (en) * 2002-05-21 2006-01-24 Eikos, Inc. Method for patterning carbon nanotube coating and carbon nanotube wiring
US6794914B2 (en) 2002-05-24 2004-09-21 Qualcomm Incorporated Non-volatile multi-threshold CMOS latch with leakage control
US6759693B2 (en) * 2002-06-19 2004-07-06 Nantero, Inc. Nanotube permeable base transistor
US6774052B2 (en) * 2002-06-19 2004-08-10 Nantero, Inc. Method of making nanotube permeable base transistor
TWI282092B (en) * 2002-06-28 2007-06-01 Brilliance Semiconductor Inc Nonvolatile static random access memory cell
JP4338948B2 (en) * 2002-08-01 2009-10-07 株式会社半導体エネルギー研究所 Method for producing carbon nanotube semiconductor device
US6809465B2 (en) 2002-08-23 2004-10-26 Samsung Electronics Co., Ltd. Article comprising MEMS-based two-dimensional e-beam sources and method for making the same
US7051945B2 (en) * 2002-09-30 2006-05-30 Nanosys, Inc Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites
JP3906139B2 (en) * 2002-10-16 2007-04-18 株式会社東芝 Magnetic random access memory
US20040075159A1 (en) * 2002-10-17 2004-04-22 Nantero, Inc. Nanoscopic tunnel
US20040087162A1 (en) * 2002-10-17 2004-05-06 Nantero, Inc. Metal sacrificial layer
US20040077107A1 (en) * 2002-10-17 2004-04-22 Nantero, Inc. Method of making nanoscopic tunnel
JP5025132B2 (en) * 2002-10-29 2012-09-12 プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ Manufacture of carbon nanotube devices
US7858185B2 (en) * 2003-09-08 2010-12-28 Nantero, Inc. High purity nanotube fabrics and films
US6919740B2 (en) * 2003-01-31 2005-07-19 Hewlett-Packard Development Company, Lp. Molecular-junction-nanowire-crossbar-based inverter, latch, and flip-flop circuits, and more complex circuits composed, in part, from molecular-junction-nanowire-crossbar-based inverter, latch, and flip-flop circuits
US6918284B2 (en) * 2003-03-24 2005-07-19 The United States Of America As Represented By The Secretary Of The Navy Interconnected networks of single-walled carbon nanotubes
US7113426B2 (en) * 2003-03-28 2006-09-26 Nantero, Inc. Non-volatile RAM cell and array using nanotube switch position for information state
US7075141B2 (en) * 2003-03-28 2006-07-11 Nantero, Inc. Four terminal non-volatile transistor device
US6944054B2 (en) * 2003-03-28 2005-09-13 Nantero, Inc. NRAM bit selectable two-device nanotube array
US7294877B2 (en) * 2003-03-28 2007-11-13 Nantero, Inc. Nanotube-on-gate FET structures and applications
US7045421B2 (en) * 2003-04-22 2006-05-16 Nantero, Inc. Process for making bit selectable devices having elements made with nanotubes
US6995046B2 (en) * 2003-04-22 2006-02-07 Nantero, Inc. Process for making byte erasable devices having elements made with nanotubes
WO2005019793A2 (en) * 2003-05-14 2005-03-03 Nantero, Inc. Sensor platform using a horizontally oriented nanotube element
US20040238907A1 (en) 2003-06-02 2004-12-02 Pinkerton Joseph F. Nanoelectromechanical transistors and switch systems
US6882256B1 (en) * 2003-06-20 2005-04-19 Northrop Grumman Corporation Anchorless electrostatically activated micro electromechanical system switch
WO2005084164A2 (en) * 2003-08-13 2005-09-15 Nantero, Inc. Nanotube-based switching elements and logic circuits
US7115960B2 (en) * 2003-08-13 2006-10-03 Nantero, Inc. Nanotube-based switching elements
WO2005017967A2 (en) * 2003-08-13 2005-02-24 Nantero, Inc. Nanotube device structure and methods of fabrication
US7289357B2 (en) * 2003-08-13 2007-10-30 Nantero, Inc. Isolation structure for deflectable nanotube elements
US7416993B2 (en) * 2003-09-08 2008-08-26 Nantero, Inc. Patterned nanowire articles on a substrate and methods of making the same
US7375369B2 (en) * 2003-09-08 2008-05-20 Nantero, Inc. Spin-coatable liquid for formation of high purity nanotube films
US20050052894A1 (en) * 2003-09-09 2005-03-10 Nantero, Inc. Uses of nanofabric-based electro-mechanical switches
KR100545212B1 (en) * 2003-12-26 2006-01-24 동부아남반도체 주식회사 Non-volatile memory device with oxide stack and non-volatile SRAM using the same
KR100599106B1 (en) * 2003-12-31 2006-07-12 동부일렉트로닉스 주식회사 Non-volatile memory device and method for fabricating the same
KR100620218B1 (en) * 2003-12-31 2006-09-11 동부일렉트로닉스 주식회사 Semiconductor device
KR100580292B1 (en) * 2003-12-31 2006-05-15 동부일렉트로닉스 주식회사 Non-volatile memory device
US7528437B2 (en) * 2004-02-11 2009-05-05 Nantero, Inc. EEPROMS using carbon nanotubes for cell storage
US6969651B1 (en) 2004-03-26 2005-11-29 Lsi Logic Corporation Layout design and process to form nanotube cell for nanotube memory applications
US7161403B2 (en) * 2004-06-18 2007-01-09 Nantero, Inc. Storage elements using nanotube switching elements
US6955937B1 (en) 2004-08-12 2005-10-18 Lsi Logic Corporation Carbon nanotube memory cell for integrated circuit structure with removable side spacers to permit access to memory cell and process for forming such memory cell
WO2006137926A2 (en) * 2004-11-02 2006-12-28 Nantero, Inc. Nanotube esd protective devices and corresponding nonvolatile and volatile nanotube switches
US8362525B2 (en) * 2005-01-14 2013-01-29 Nantero Inc. Field effect device having a channel of nanofabric and methods of making same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050062035A1 (en) * 2003-06-09 2005-03-24 Nantero, Inc. Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
US6990009B2 (en) * 2003-08-13 2006-01-24 Nantero, Inc. Nanotube-based switching elements with multiple controls

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US7564269B2 (en) 2009-07-21
CA2570486A1 (en) 2006-07-27
WO2006078299A2 (en) 2006-07-27
US7859311B2 (en) 2010-12-28
US20090295431A1 (en) 2009-12-03
EP1776763A4 (en) 2007-10-17
US20080218210A1 (en) 2008-09-11
US7288970B2 (en) 2007-10-30
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US20060061389A1 (en) 2006-03-23
EP1776763B1 (en) 2008-12-31

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