WO2006073874A3 - Release layer comprising diamond-like carbon (dlc) or doped dlc with tunable composition - Google Patents

Release layer comprising diamond-like carbon (dlc) or doped dlc with tunable composition Download PDF

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Publication number
WO2006073874A3
WO2006073874A3 PCT/US2005/046638 US2005046638W WO2006073874A3 WO 2006073874 A3 WO2006073874 A3 WO 2006073874A3 US 2005046638 W US2005046638 W US 2005046638W WO 2006073874 A3 WO2006073874 A3 WO 2006073874A3
Authority
WO
WIPO (PCT)
Prior art keywords
diamond
dlc
composition
release layer
carbon
Prior art date
Application number
PCT/US2005/046638
Other languages
French (fr)
Other versions
WO2006073874A2 (en
Inventor
Todd C Bailey
Nicholas A Stacey
John G Ekerd
Edward R Engbrecht
Original Assignee
Regents The Uinversity Of Texa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Regents The Uinversity Of Texa filed Critical Regents The Uinversity Of Texa
Publication of WO2006073874A2 publication Critical patent/WO2006073874A2/en
Publication of WO2006073874A3 publication Critical patent/WO2006073874A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/58—Applying the releasing agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/60—Releasing, lubricating or separating agents

Abstract

The present invention pertains to disposing a diamond-like composition on a template, wherein the diamond-like composition acts as a release layer. The diamond-like composition is substantially transparent to actinic radiation, e.g., ultraviolet (UV) light, and will also have a desired surface energy, wherein the desired surface energy minimizes adhesion between the template and an underlying material disposed on a substrate. The diamond-like composition is characterized with a low surface energy that exhibits desirable release characteristics
PCT/US2005/046638 2004-12-30 2005-12-21 Release layer comprising diamond-like carbon (dlc) or doped dlc with tunable composition WO2006073874A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/027,473 2004-12-30
US11/027,473 US20060145398A1 (en) 2004-12-30 2004-12-30 Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masks

Publications (2)

Publication Number Publication Date
WO2006073874A2 WO2006073874A2 (en) 2006-07-13
WO2006073874A3 true WO2006073874A3 (en) 2006-10-26

Family

ID=36639509

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/046638 WO2006073874A2 (en) 2004-12-30 2005-12-21 Release layer comprising diamond-like carbon (dlc) or doped dlc with tunable composition

Country Status (3)

Country Link
US (1) US20060145398A1 (en)
TW (1) TW200641558A (en)
WO (1) WO2006073874A2 (en)

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Also Published As

Publication number Publication date
US20060145398A1 (en) 2006-07-06
TW200641558A (en) 2006-12-01
WO2006073874A2 (en) 2006-07-13

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