WO2006055363A2

WO2006055363A2 - Modular tool unit for processing microelectronic workpieces

Info

Publication number: WO2006055363A2
Application number: PCT/US2005/040553
Authority: WO
Inventors: Paul Z. Wirth; Jeffry Alan Davis; Randy A. Harris
Original assignee: Semitool, Inc.
Priority date: 2004-11-12
Filing date: 2005-11-10
Publication date: 2006-05-26
Also published as: TW200633057A; WO2006055363A3

Abstract

A modular apparatus for thermally processing a microelectronic workpiece is provided. The modular apparatus comprises a mounting module having a rotatable carousel assembly configured to support at least one workpiece. A driver is coupled to the carousel assembly and rotates the carousel assembly, moving the workpiece between a loading station, a heating station and a cooling station. The thermal processing modular apparatus has a front docking unit for removeably connecting it to a load/unload module and a rear docking unit for removeably connecting it to a wet chemical processing tool, or another tool for otherwise processing a workpiece. A transport system (i.e., robot) services the modular tool units that can be automatically calibrated to work with individual processing components of the tool units.

Description

MODULAR TOOL UNIT FOR PROCESSING MICROELECTRONIC WORKPIECES

DESCRIPTION TECHNICAL FIELD

[0001] The present invention is directed toward apparatus and methods for heat treating microfeature workpieces having a plurality of microdevices integrated in and/or on the workpieces, and particularly for annealing semiconductor substrates onto which copper interconnects have been formed. Particular aspects of the invention relate to a modular tool unit for heat treating microelectronic workpieces that can be combined with other processing units (e.g., wet chemical processing tools) to customize workpiece processing systems.

BACKGROUND OF THE INVENTION

[0002] In the production of semiconductor integrated circuits and other microelectronic articles from microelectronic workpieces, such as semiconductor wafers, it is often necessary to provide multiple metal layers on a substrate to serve as interconnect metallization that electrically connects the various devices on the integrated circuit to one another. The microelectronic fabrication industry has sought to use copper as the interconnect metallization by using a damascene and/or patterned plating where holes (e.g., vias), trenches (e.g., lines) and other recesses are used to produce the desired copper patterns. [0003] In copper electrochemical deposition processes, copper interconnect lines and vias are formed in or on dielectric layers that are applied to a workpiece. The mechanical properties of the copper metallization can be quite important as the metal structures are formed. This is particularly true in connection with the impact of the mechanical properties of the copper metallization during subsequent chemical mechanical polishing. Workpiece-to- workpiece and within-workpiece grain size variability in the copper film can adversely affect the polish rate of the chemical mechanical processing as well as the ultimate uniformity of the surfaces of the polished copper structures. Large grain size and low variations in grain size in the copper film are very desirable.

[0004] The electrical properties of the copper metallization features are also important to the performance of the associated microelectronic device. Such devices may fail if the copper metallization exhibits excessive electromigration that ultimately results in an open or short circuit condition in one or more of the metallization features. One factor that has a very large influence on the electromigration resistance of sub-micron metal lines is the grain size of the deposited metal. This is because grain boundary migration occurs with a much lower activation energy than trans-granular migration.

[0005] To achieve the desired electrical characteristics for the copper metallization, the grain structure of metalization features is altered through an annealing process. This annealing process is traditionally thought to require the performance of a separate processing step at which the semiconductor wafer is subject to an elevated temperature of about 400 degrees Celsius or less so as to not overtax the thermal budget of the workpiece or to deleteriously affect dielectric layers of the workpiece.

[0006] One single workpiece annealing device is disclosed in U.S. Pat. No. 6,136,163 to Cheung. This device includes a chamber that encloses a cold plate and a heater plate beneath the cold plate. The heater plate in turn is spaced apart from and surrounds a heater and a lift plate. One potential drawback with this device is that the chamber encloses a large volume which can be expensive and time consuming to fill with purge gas and/or process gas. Another potential drawback is that the heater may not efficiently transfer heat to the heat plate. Still a further drawback is that the heater plate may continue to heat the wafer after the heating phase of the annealing process is complete, and may limit the efficiency of the cold plate.

[0007] Another single workpiece thermal-treatment device directed to the photolithography field is disclosed in U.S. Pat. No. 5,651,823 to Parodi et al. This device includes heating and cooling units in separate chambers to bake and cool photoresist layers. Accordingly, the device may be inadequate and/or too time consuming for use in an annealing process because the workpiece must be placed in the heating chamber, then removed from the heating chamber and placed in the cooling chamber for each annealing cycle. Furthermore, the transfer arm that moves the workpiece from one chamber to the next will generally not have the same temperature as the workpiece when it contacts the workpiece, creating a temperature gradient on the workpiece that can adversely affect the uniformity of sensitive thermal processes.

[0008] None of the prior workpiece annealing assemblies have been integrated into a modular system for continuous processing of workpieces to improve overall manufacturing effϊciencies. One challenge of integrating different modular tool units (e.g., a load/unload module, a thermal processing unit or a wet chemical processing unit) into a single modular system is accurately calibrating the transport systems to move workpieces to/from the different units and components within the different units. Transport systems are typically calibrated by manually "teaching" the robot the specific positions of each component (e.g., station, chamber or pod). In addition to manually teaching the robot the specific locations within the tool, the arms and end-effectors of the robot are also manually aligned with the reference frame in which the program values are represented as coordinates. Although the process of manually aligning the components of the robot to the reference frame and manually teaching the robot the location of each component in the tool is an accepted method for setting up a tool, it is also out of specifications sooner, which results in taking the tool offline more frequently. Therefore, the downtime associated with calibrating the transport system and repairing/maintaining electrochemical deposition chambers significantly impacts the costs of operating wet chemical processing tools.

[0009] Another challenge of integrating independent processing tools into a system is cost-effectively manufacturing and installing the tools to meet demanding customer specifications. Many microelectronic companies develop proprietary processes that require custom wet chemical processing tools. For example, individual customers may need different combinations and/or different numbers of wet chemical processing chambers, annealing stations, metrology stations, and/or other components to optimize their process lines. Manufacturers of wet chemical and other processing tools accordingly custom build many aspects of each tool to provide the functionality required by the particular customer and to optimize floor space, throughput, and reliability. It is expensive and inefficient to manufacture a large number of different platform configurations to meet the needs of the individual customers. Therefore, there is also a need to improve the cost-effectiveness for manufacturing wet chemical processing tools.

[0010] The present invention is provided to solve the problems discussed above and other problems, and to provide advantages and aspects not provided by prior tools of this type. A full discussion of the features and advantages of the present invention is deferred to the following detailed description, which proceeds with reference to the accompanying drawings. SUMMARY OF THE INVENTION

[0011] The present invention is directed toward a thermal processing unit that can be a stand-alone unit that operates by itself, or connected to one or more modular tool units to customize the configuration of a modular tool system. The thermal processing unit can be connected with other tool units to produce different tool configurations. Accordingly, tool manufacturers can use a universal modular tool unit to produce different tools with different configurations of processing stations in a manner that enhances the efficiency of manufacturing custom integrated tool assemblies.

[0012] The thermal processing unit is particularly suited for annealing a workpiece. The thermal processing unit includes a rotatable carousel assembly that is configured to support at least one, or even a plurality of workpieces. The apparatus includes a loading station, a heating station, a cooling station. A driver is coupled to the carousel assembly for rotation of the carousel assembly, wherein the workpieces are moved between the loading, heating and cooling stations. By separating the stations, heating and cooling elements may remain at relatively constant temperatures significantly improving equipment reliability and reducing the throughput time of the thermal process. Moreover, because the carousel assembly allows multiple workpieces to be processed at the same time, increased manufacturing efficiencies may be achieved.

[0013] The thermal processing unit may be provided as a modular part of an integrated modular tool system. As a modular unit, it may include a load/unload module removeably connected to one end of the thermal processing unit and a wet chemical processing tool unit removeably connected to another end of the theπnal processing tool unit. The integrated modular theπnal processing unit may include a calibration unit associated with an automatically calibrated transport system that moves workpieces between the load/unload module, the thermal processing tool unit and the wet chemical processing tool without the need to manually teach the transport system the precise location of the components of the integrated modular thermal processing unit.

[0014] Other features and advantages of the invention will be apparent from the following specification taken in conjunction with the following drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] To understand the present invention, it will now be described by way of example, with reference to the accompanying drawings.

[0016] FIG. 1 is a top plan view of a schematic diagram illustrating a modular tool unit for heat treating microelectronic workpieces. The modular tool unit includes a holding station, a thermal processing station and a transport system for moving microelectronic workpieces between a load/unload unit, the holding station and the thermal processing station.

[0017] FIG. 2 is a top plan view of a schematic diagram illustrating a modular tool unit for heat treating microelectronic workpieces. The modular tool unit includes a holding station, a thermal processing station and a different of a transport system for moving microelectronic workpieces between a load/unload unit, the holding station and the thermal processing station.

[0018] FIG. 3 is a top plan view of a schematic diagram illustrating a modular tool system for processing workpieces. The modular tool system includes a load/unload unit, a thermal processing unit, a wet chemical processing unit and a transport system for moving the workpieces between the load/unload unit, the thermal processing unit and the wet chemical processing unit.

[0019] FIG. 4 is an alternative embodiment of the modular tool system shown in FIG. 3.

[0020] FIG. 5A is a rear perspective view of a modular tool unit for heat treating microelectronic workpieces according to one embodiment of the present invention.

[0021] FIG. 5B is a front view of the modular tool unit for heat treating microelectronic workpieces shown in FIG. 5A.

[0022] FIG. 6 is an isometric view of a portion of an automatic calibration system in accordance with an embodiment of the present invention.

[0023] FIG. 7 is a perspective view of an apparatus for thermally processing microelectronic workpieces according to the present invention.

[0024] FIG. 8 is a perspective view of the apparatus of FIG. 7, showing a carousel assembly operably connected to a housing of the chamber with the cover of the housing removed. [0025] FIG. 9A is a perspective view of the apparatus of FIG. 7, showing the underside of the housing of the chamber.

[0026] FIG. 9B is a perspective view of the apparatus of FIG. 7, showing a base of the housing of the chamber.

[0027] FIG. 9C is a perspective view of the apparatus of FIG. 7, showing the underside of the base of the housing.

[0028] FIG. 1OA is a perspective view of a cover assembly found in the apparatus of FIG.

7.

[0029] FIG. 1OB is a perspective view of the cover assembly found in the apparatus of

FIG. 7, showing an underside of the cover assembly.

[0030] FIG. 1 IA is a perspective view a frame of the carousel assembly found in the apparatus of FIG. 7.

[0031] FIG. 1 IB is a side view a frame of the carousel assembly found in the apparatus of

FIG. 7.

[0032] FIG. 12A is a perspective view of a driver and process fluid distribution system found in the apparatus of FIG. 7, showing an underside of the system.

[0033] FIG. 12B is a perspective view of the driver and process fluid distribution system found in the apparatus of FIG. 7.

[0034] FIG. 12C is a plan view of the driver and process fluid distribution system found in the apparatus of FIG. 7.

[0035] FIG. 12D is a cross-section of the driver and process fluid distribution system found in the apparatus of FIG. 7, taken along line D-D of FIG. 12C.

[0036] FIG. 13 is an exploded view of the driver and process fluid distribution system found in the apparatus of FIG. 7.

[0037] FIG. 14 is a partial cross-section of the driver and process fluid distribution system found in the annealing chamber of FIG. 7, showing internal components, including a passageway, of the system.

[0038] FIG. 15A is a perspective view of a heating element of the apparatus of FIG. 7.

[0039] FIG. 15B is a perspective view of the heating element of FIG. 15 A, showing an underside of the cooling element.

[0040] FIG. 15C is a plan view of the heating element of FIG. 15 A. [0041] FIG. 15D is a cross-section of the heating element of FIG. 15A taken along line

D-D of FIG. 15C.

[0042] FIG.16A is a plan view of the of the apparatus of FIG. 7.

[0043] FIG. 16B is a cross-section of the apparatus of FIG. 7 taken along line B-B of

FIG. 16A, showing a heating station.

[0044] FIG. 17A is a perspective view of a cooling element of the apparatus of FIG. 7.

[0045] FIG. 17B is a perspective view of the cooling element of FIG. 17A, showing an underside of the cooling element.

[0046] FIG. 17C is a plan view of the cooling element of FIG. 17A.

[0047] FIG. 17D is a cross-section of the cooling element of FIG. 17A taken along line

D-D of FIG. 17C.

[0048] FIG. 18A is a plan view of the apparatus of FIG. 7.

[0049] FIG. 18B is a cross-section of the apparatus of FlG. 7 taken along line B-B of

FIG. 18A, showing a cooling station.

[0050] FIG. 19A is a plan view of the apparatus of Fig. 7.

[0051] FIG. 19B is a cross-section of the apparatus of FIG. 7 taken along line B-B of

FIG. 19A, showing a loading station.

[0052] FIG. 2OA is a perspective view of the annealing chambers of FIGS. 5A, 5B and 7, showing a front portion of the chambers in a stacked configuration.

[0053] FIG. 2OB is a perspective view of the annealing chambers of FIGS. 5A, 5B and 7, showing a rear portion of the chambers in a stacked configuration.

[0054] FIG. 21 is a top plan view of an integrated tool assembly having a plurality of modular tool units in accordance with an embodiment of the invention. Several features of the integrated tool assembly are shown schematically in FIG. 21.

[0055] FIG. 22A is a front isometric view of a modular tool unit with a load/unload module in accordance with another embodiment of the invention.

[0056] FIG. 22B is a rear isometric view of the modular tool unit shown in FIG. 2 IA.

[0057] FIG. 22C is a top plan view of the modular tool unit shown in FIGS. 22A and

22B.

[0058] FIG. 23 is a cross-sectional view illustrating a portion of a mounting module for use in a modular tool unit in accordance with an embodiment of the invention. [0059] FIG. 24 is a detailed view of the portion of the mounting module illustrated in

FIG. 23.

[0060] FIG. 25A is a rear isometric view of a door assembly for use with a load/unload module in accordance with an embodiment of the invention.

[0061] FIG. 25B is a front isometric view of the door assembly shown in FIG. 25A.

DETAILED DESCRIPTION

[0062] For purposes of the present application, a microelectronic workpiece is defined to include a workpiece formed from a substrate upon which microelectronic circuits or components, data storage elements or layers, and/or micromechanical elements are formed. Micromachines or micromechanical devices are included within this definition because they are manufactured using much of the same technology that is used in the fabrication of integrated circuits. The workpieces can be semiconductive pieces (e.g., doped silicon wafers or gallium arsenide wafers), dielectric pieces (e.g., various ceramic substrates) or conductive pieces. Although the present invention is applicable to this wide range of products, the invention will be particularly described in connection with its use in the production of interconnect structures formed during the production of integrated circuits on a semiconductor wafer.

[0063] Various embodiments of intermediate mounting modules and modular tool units for thermal treating and wet chemical processing of microfeature workpieces are described herein in the context of depositing metals or electrophoretic resist in and/or on structures of workpieces. The modular tools and modules of the present invention, however, can be used in etching, rinsing, cleaning or other type of surface preparation processes used in the fabrication of microfeatures in and/or on workpieces.

[0064] Still further, although the invention is applicable for use in connection with a wide range of metal and metal alloys as well as in connection with a wide range of elevated temperature processes, the invention will be particularly described in connection with annealing of electroplated copper and copper alloys.

[0065] FIG. 1 is a top plan view of a schematic diagram illustrating a modular tool unit 1000 for heat treating microelectronic workpieces. The modular tool unit 1000 includes a holding station or buffer 1002, a thermal processing station 1004 and a transport system 1006 for moving microelectronic workpieces between a load/unload module 1008, the holding station 1002 and the thermal processing station 1004. The modular tool unit 1000 is fixedly connected to the load/unload module 1008 by a first docking assembly 1010. The modular tool unit 1000 (in this embodiment, an apparatus for heat treating workpieces) and the load/unload module 1008 each have a fixed reference frame. The docking assembly 1010 precisely aligns the fixed reference frame of the modular tool unit 1000 with the fixed reference frame of the load/unload module 1008. As shown in the preferred embodiment of FIG. 3, the modular tool unit 1000 has a second docking assembly 1012 for fixedly connecting the modular tool unit 1000 to another module tool unit 1014 (e.g., a wet chemical processing tool).

[0066] The modular tool unit IOOO includes a front docking unit 1041 with front alignment elements 1042 and a rear docking unit 1043 with rear alignment elements 1044. The docking units 1041, 1043 can be a rigid plate or panel, and the alignment elements 1042, 1044 can be pins or holes at predetermined locations in a fixed reference frame of the modular tool unit 1000. As described more fully below, the front docking unit 1041 aligns the load/unload module 1008 with the fixed reference frame of the modular tool unit 1000, and the rear docking unit 1043 aligns the fixed reference frame of the modular tool unit 1000 with a fixed reference frame of another modular tool unit 1014 (e.g., a main processing tool and especially a wet chemical processing tool). As such, the front and rear (or first and second) docking units 1041 , 1043 accurately position the fixed reference frames of the main modular processing tool 1014, the modular tool unit 1000 and the load/unload module 1008 to each other so that the transport systems 1006 (and robots 1066, 1069) can operate with the corresponding components in a modular, integrated tool system 1100 without having to manually calibrate and/or teach the robots the locations of various components. [0067] The front and rear docking units 1041 , 1043 are designed to mate with corresponding alignment elements (or fasteners) of other modular tool units, e.g., the load/unload module 1008 or the main processing unit 1014. These mating configurations create docking assemblies 1010 (mating between load/unload module 1008 and modular tool unit 1000) and 1012 (mating between modular tool unit 1000 and main processing tool 1014). Utilizing a variety of docking assemblies and modular tools, a tool manufacturer or user can easily provide different system configurations depending on the needs of individual customers.

[0068] The load/unload module 1008 illustrated in FIGS. 1-4 includes workpiece holders 1016 that hold cassettes or pods with wafers. The workpiece holders 1016 are typically arranged so that specific workpiece holders 1016 carry pods having either unfinished workpieces that have not been processed (through a main processing tool, e.g., a wet chemical processing tool 1014) or finished workpieces that have been processed. The load/unload module 1008 includes a docking unit 1018 and alignment elements 1019. The docking unit 1018 can be a rigid plate or panel, and the alignment elements 1019 can be pins or holes that mate with front alignment elements 1042 of the modular tool unit 1000. In operation, the docking unit 1018 is attached to the front docking unit 1041 of the modular tool unit 1000 so that the alignment elements 1019 are engaged with the front alignment elements 1042. The interface between the alignment elements 1019 and the front alignment elements 1042 precisely locates the workpiece holders 1016 at predetermined locations in the fixed reference frame of the modular tool unit 1000. As such, the transport system 1006 can accurately move in and out of cassettes or pods on the workpiece holders 1016 without having to manually teach or calibrate the transport system 1006 the specific locations of the workpiece holders 1016.

[0069] The transport system 1006 shown in FIG. 1 includes a track 1050 positioned at a known location in the fixed reference frame of the modular tool unit 1000. The track 1050 extends laterally along a width-wise direction relative to the front of the modular tool unit 1000. The transport system 1006 can further include a robot 1066 having a dual coaxial end- effector assembly 1068 which moves linearly along the track 1050. Suitable robots and tracks are disclosed in U.S. Patent Nos. 6,752,584 and 6,749,390, and U.S. Publication No. 2003/0159921 , all of which are herein incorporated by reference in their entirety. [0070] Turning to FlG. 2, there is disclosed another embodiment of the transport system 1006. In this embodiment, there is a single stationary robot 1066 mounted to a deck or shelf 1064 of the modular tool unit 1000. The stationary robot 1066 is comprised of an arm 1066a and an end-effector 1066b. The robot 1066 moves workpieces between the workpiece holders 1016 of the load/unload module 1008 and the modular tool unit 1000. [0071] In FIG. 3, the transport system is comprised of first 1066 and second robots 1069. The first robot 1066 can be configured according to the embodiments disclosed in FIG. 1 (i.e., track 1050 and robot 1066 which moves linearly along the track) or FIG. 2 (i.e., the robot 1066 is mounted to a shelf or deck), and moves workpieces between the load/unload module 1008 and the modular tool unit 1000. The second robot 1069 moves linearly along a track 1050 mounted on another modular tool unit 1014 which is fixedly attached to modular tool unit 1000. Preferably, the second robot 1069 has a dual coaxial end-effector assembly 1068. The second robot 1069 moves workpieces between modular tool units 1000, 1014. For example, the first robot 1066 will take unprocessed workpieces from the workpiece holders 1016 and place them in the holding station 1002 of modular tool unit 1000. The second robot 1069 then takes the unprocessed workpieces from the holding station 1002 and places them into one or more processing stations 1070. When the workpieces are processed, robot 1068 removes them from the processing stations 1070 and places them into the thermal processing station 1004 or the holding station 1002. Robot 1066 moves the workpieces between the thermal processing station and the holding station, and ultimately unloads the processed workpieces into the load/unload module 1008. The dual robot configuration illustrated in FIG. 3 increases throughput efficiency and is preferred. In another embodiment illustrated in FIG. 4, the transport system is comprised of a single robot 1067 that moves linearly along track 1050 and services the load/unload module 1008 and modular tool units 1000, 1014.

[0072] FIG. 4 is a top plan view of an integrated tool assembly 1100 in accordance with another embodiment of the present invention. The integrated tool assembly 1100 is similar to the integrated tool assembly 1100 in FIG. 3, but the integrated tool assembly 1100 in FIG. 4 has an intermediate modular tool unit 1000 without a separate transport system. As such the main processing tool unit 1014 and the intermediate modular tool unit 1000 share a common track 1050 and a common robot 1067.

[0073] Turning to FIGS. 1 -3, 5A and 5B, a calibration unit 1005 can be mounted on a deck 1030 or platform (not shown) of the modular tool unit 1000. The calibration unit 1005 is fixed at a known location in the reference frame of the modular tool unit 1000. The calibration unit 1005 automatically determines the position of robot 1066 and the end-effector 1068 relative to the fixed reference frame of the modular tool unit 1000 and corrects any misalignment of the robot 1066 and the end-effector 1068 so that the transport system 1006 can accurately interface with the workpiece holders 1016 and the holding and thermal processing stations 1002, 1004 without having to manually teach the robot 1066 the location of each one of the components in the modular tool unit 1000.

[0074] Referring to FIG. 6, there is disclosed a calibration unit 1005 to be used in a combination with a robot 1066, which is mounted on a track, e.g. as shown in FIGS 1 and 3, in one embodiment of the present invention. Calibration unit 1005 is used in combination with distance measuring devices 1005a, 1005b and 1005c that are mounted perpendicular, parallel and vertical to the track . To initial set the calibration unit, first arm of the robot 1066 touches the distance measuring device that is perpendicular to the track 1005a. The robot 1066 then moves until it is able to touch the other side of the first arm to the distance measuring device that is perpendicular to the track 1005a. At this point a waist zero location is calculated and set. The robot 1066 then moves to touch the first edge of a workpiece gripped in the first end effector 1068 to the distance measuring device that is perpendicular to the track 1005a. The robot 1066 then moves to touch the first edge of a workpiece gripped in the second end effector 1068 to the distance measuring device that is perpendicular to the track 1005a. The robot 1066 then rotates the arm 180 degrees and moves to touch the second edge of the workpiece gripped in the first end effector 1068 to the distance measuring device that is mounted perpendicular to the track 1005a. The robot 1066 then touches the second edge of the workpiece gripped in the second end effector 1068 to the distance measuring device that is mounted perpendicular to the track 1005a. The robot 1066 then moves to touch the bottom of the arm to the distance measuring device mounted vertically 1005c in order to set the zero point for the vertical axis. The last move is to bring the arm to a set angle and then move the track so that the arm will touch the distance measuring device that is parallel to the track 1005b in order to set the zero point of the track axis. In this manner, a fixed reference frame of the modular tool unit 1000 is set.

[0075] The calibration unit 1005 is set or zeroed in a similar manner for the embodiment where the robot 1066 is not mounted on a track, e.g., the embodiment illustrated in FIG. 2, but instead is mounted on a shelf or platform. The layout of the distance measuring devices is different, however, due to the radial nature of the robot 1066 used in such an embodiment. It is necessary not to obstruct the area in which the robot could be operated. Such a layout is disclosed in FIG. 5A. One distance measuring device 1005a is mounted tangent to the arc the first arm travels that is used to zero the first arm. A second distance measuring device 1005b is mounted perpendicular to the arc the first arm travels in order to zero the second arm and the end effector of the robot. And a third distance measuring device 1005c is oriented vertically to zero the vertical axis on the robot. In this manner, a fixed reference frame of the modular tool unit 1000 can be set.

[0076] Suitable calibration units and calibration methods for use with the present invention are disclosed in U.S. Patent Application Nos. 10/860,385 and 10/861,240, which are incorporated herein by reference in their entirety.

[0077] It should be understood that modular tool unit 1000 and load/unload module 1008 can operate as a stand alone system as shown in FIGS. 1 and 2. However, with reference to FIGS. 3 and 4, in a preferred embodiment of the present invention, the modular tool unit 1000 is fixedly attached to another module tool unit 1014, preferably a main processing unit. In one embodiment, the main processing unit 1014 is a wet chemical processing tool that includes a plurality of wet chemical process stations 1070. The process stations 1070 can be electrochemical process stations (such as would include electroless deposition chambers, electroplating deposition chambers or electroetch/electropolish chambers), rinsing/prewetting and/or drying stations (such as would include process chambers for rinsing or prewetting wafers prior to or following processing in the electrochemical process chambers or for drying wafers following processing), chemical etching stations (such as would include process chambers for etching the backside and/or the edge of wafers following processing in the electrochemical process chambers), or other suitable wet chemical processing stations. Suitable wet chemical processing stations 1070 and associated processing chambers are disclosed in: (1) U.S. Patent Nos. 6,749,390, 6,660,137, 6,632,292, 6,565,729, 6,423,642 and 6,413,436, all of which are herein incorporated by reference in their entirety; (2) U.S. Patent Application Publication Nos. 2003/0068837, 2003/0070918, 2002/0125141 , 2003/0127337 and 2004/0013808; and, (3) U.S. Patent Application Serial No. 10/859,749 filed June 3, 2004, all of which are incorporated herein by reference in their entirety.

[0078] An exemplary integrated tool configuration for forming copper interconnects on microelectronic workpieces would provide several electrochemical copper deposition stations and one or more workpiece edge etching stations, in addition to a workpiece annealing module such as module 1000. In the exemplary tool, the workpiece edge etching station(s) could be located immediately adjacent to the module 1000, such as one such etching station on either side of track 1050. In the exemplary tool, each edge etching station could include the capability to etch the workpiece backside in addition to the workpiece marginal edge. In the exemplary tool, the electrochemical deposition stations could be located on either side of track 1050 beyond the edge etching station. In such a tool, referring to FIG. 3, a workpiece processing sequence could be as follows: the workpiece would be removed from a workpiece holder 1016 by robot 1066 and delivered to the holding station 1002, removed from the holding station 1002 by robot 1069 and delivered first to one of the electrochemical deposition stations at the opposite end of tool 1014 for copper interconnect deposition, and then removed from the deposition station by robot 1069 and delivered to one of the edge and/or edge/backside etching process stations for removal of copper from the marginal edge (and possibly the backside) of the workpiece, and then removed from the edge etching station by robot 1069 and delivered to the annealing station 1004 for thermal annealing of the copper deposits, and finally removed from annealing station 1004 by robot 1066 and delivered to one of the workpiece holders 1016 for removal from the integrated tool. Alternately, a workpiece could be removed from an edge etching station by robot 1069 and delivered to the holding station 1002, and then removed from holding station 1002 by robot 1066 and delivered to the annealing station for thermal annealing, and then removed by robot 1066 from the annealing station and delivered to the workpiece holder 1016.

[0079] Main processing tool 1014 also includes a docking unit 1018 and alignment elements 1019. As discussed above, the docking unit 1018 can be a rigid plate or panel, and the alignment elements 1019 can be pins or holes that mate with rear alignment elements 1044 of the modular tool unit 1000. In operation, the docking unit 1018 is attached to the rear docking unit 1042 of the modular tool unit 1000 so that the alignment elements 1019 are engaged with the front alignment elements 1042. The interface between the alignment elements 1019 of the main processing tool 1014 and the rear alignment elements 1044 of the modular tool unit 1000 precisely locates the components of the main processing tool (e.g., wet chemical deposition stations 1070 or other surface preparation stations) at predetermined locations in the fixed reference frame of the modular tool unit 1000. As such, the transport system 1006 can accurately move workpieces from the modular tool unit 1000 to the process stations 1070 of the main processing tool 1014 without having to manually teach or calibrate the transport system 1006 the specific locations of the process stations 1070. [0080] Turning to FIGS. 7-20A and B, a preferred embodiment of the thermal processing station 1004 of the modular tool unit 1000 of the present invention will now be described . A preferred process for thermally processing microelectronic workpieces W will also be described. With specific reference to FIGS. 7 and 8, the apparatus, hereinafter called a "carousel annealer" 10 includes a housing 20, a carousel assembly 100 positioned within the housing 20, a driver and process fluid distribution system 200, a heating element 300 and a cooling element 400. As explained below, the carousel annealer 10 has multiple stations for thermal processing of workpieces W. Although shown as a stand alone unit in FIG. 7, the carousel annealer 10 can be positioned within a larger tool or module for high-speed processing of workpieces W.

[0081] The housing 20 of the carousel annealer 10 generally comprises a cover 22 that is removeably connected to a base 24. The cover 22 has a side wall component 26 joined with a plurality of fasteners 27 to a top wall component 28. A portion of the base 24 has a stepped outer edge or Hp 25 that facilitates the connection with the side wall 26 and that causes the periphery of the base 24 to have a staggered appearance. The cover 22 has at least one opening or bay 30 that provides access to the internal components of the carousel annealer 10. Preferably, the cover 22 has both a first opening 30 that provides access for loading of the workpiece W and a second opening 32 that provides access for unloading of a processed workpiece W. Alternatively, the carousel annealer 10 has a single opening whereby the workpieces W are loaded in and unloaded from that opening.

[0082] As shown in FIG. 9A, the base 24 of the housing 20 has a number of openings, including a pair of centralized openings 40a, b configured to receive an extent of the drive and process fluid distribution system 200. Specifically, the primary centralized opening 40a receives a portion of the drive components of the system 200 and the secondary centralized opening 40b receives a portion of the process fluid components of the system 200. The base 24 further includes a first opening 42 configured to receive a heating element 300 (see FIG. 16B), and a second opening 44 configured to receive a cooling element or chuck 400 (see FIG. 18B). At least one locating shaft 46 depends from a lower surface 24a of the base 24 to facilitate the installation of the carousel annealer 10 into a larger tool or module. The locating shaft 46 is configured to receive a fastener inserted in an opening 47 in the upper surface of the 24b of the base 24. The base 24 may also include a pair of recessed areas 48 for securement of an actuator 50 that extends from a housing 51 substantially perpendicular to an upper surface 24b of the base 24. An alternate version of the base 24 is shown in FIGS. 9B and C, wherein the drive and process fluid distribution system 200 and two actuators 50 are installed in an alternate base 24. The alternate base 24 lacks the recessed areas 48 that are utilized in the securement of the actuators 50. Each actuator 50, such as an air cylinder, includes a shaft 52 with a pedestal 54 that is raised to engage an extent of a control arm 128 (see FIG. 8) of the cover assemblies 120, 122, 124 during operation of the apparatus 10. Preferably, the carousel annealer 10 includes two air cylinders 50 since the cover assemblies 120, 122, 124 are elevated and the workpieces W are accessed and handled by a separate robot (not shown) at the loading station 505 and the cooling station 405. Alternatively, the carousel annealer 10 includes a single air cylinder 50 whereby the workpieces W are access and handled at a single station 405, 505.

[0083] FIG. 8 shows the base 24 of the housing 20 and the carousel assembly 100, however, the cover 22 has been removed. The carousel assembly 100 rotates above the base 24 and about a central vertical axis extending through a centralized opening 40a of the base 24. Referring to FIGS. 8 and 11A,B, the carousel 100 includes a frame 102 that includes at least one workpiece receiver 104. In one embodiment, the frame 102 includes a first workpiece receiver 104, a second workpiece receiver 106, and a third workpiece receiver 108. The receivers 104, 106, 108 are configured to removeably receive a workpiece W during operation of the apparatus 10. The receivers 104, 106, 108 support the workpieces W in a substantially horizontal arrangement with respect to the frame 102. Preferably, each receiver 104, 106, 108 has a plurality of fingers or tabs 110 that extend radially inward from an inner edge 112 to support a workpiece W. In one embodiment, the tabs 110 are circumferentially spaced along the edge 1 12 of the receivers 104, 106, 108 and engage the lower (non-device) side of the workpiece W. Although shown as having a semi-circular configuration, additional material could be added to the receivers 104, 106, 108 whereby they would have a circular configuration.

[0084] The frame 102 of the carousel 100 also includes a rib arrangement 1 14 that is raised vertically from an upper surface 102a of the frame 102. The frame 102 has external segments 102b and a depending segment 102c (see FlG. 1 IB). The rib arrangement 1 14 is generally configured to increase the rigidity and strength of the frame 102. The rib arrangement 1 14 has three segments 1 14a, b, c wherein each segment extends radially outward from a central opening 116 in the frame 102 and between a pair of receivers 104, 106, 108. The central opening 116 is positioned at the hub 117 of the frame 102 and accommodates an extent of the driver and process fluid distribution system 200, primarily a manifold 210 of the system 200. The receivers 104, 106, 108 are radially positioned about the central opening 116 in an approximately 120 degree relationship. When the carousel assembly 100 is assembled, the central opening 116 is cooperatively positioned with the centralized opening 40a of the base 24 and the central axis that extends there through. [0085] The carousel assembly 100 further includes at least one cover assembly 120 that is movable between a closed position Pc (see FIG. 8)and an open position. Referring to FIG. 8, the carousel assembly 100 includes a first cover assembly 120 operably associated with the first workpiece receiver 104, a second cover assembly 122 operably associated with the second workpiece receiver 106, and a third cover assembly 124 operably associated with the third workpiece receiver 108. For example, the first cover assembly 120 remains positioned over the first receiver 104 and the second cover assembly 122 remains positioned over the second receiver 106 during rotation of the carousel assembly 100. Referring specifically to FIGS. 8 and 1OA, B, each cover assembly 120, 122, 124 includes a cover plate 126, a control arm 128, a mounting bracket 130, and a purge line 131. The cover plate 126 is dimensioned to overlie or cover the receivers 104,106,108 when the cover assembly 120, 122, 124 is in the closed position Pc. In the closed position Pc of FIG. 8, the cover plate 126 is positioned near external segments 102b of the frame 102. In an open position (not shown), the cover assembly 120, 122, 124 is elevated with respect to the frame 102 to permit insertion of a workpiece W into the receiver 104, 106, 108. Upon completion of the thermal processing steps, the cover assembly 120, 122, 124 is elevated in the open position to removal of a workpiece W from the receiver 104, 106, 108. The underside of the cover assembly 120, 122, 124 is shown in FIG. 1OB, wherein the plate 126 has a circumferential lip 125 and a central opening 127 that, as explained below, receives process fluid during the thermal processing of the workpiece W. Therefore, in the closed position Pc, the cover assembly 120, 122, 124, the workpiece W and the frame 102 define an internal cavity that receives process fluid during operation of the carousel annealer 10 to remove impurities from the cavity. [0086] The control arm 128 pivotally connects the cover assembly 120, 122, 124 to an extent of the rib arrangement 114 with a mounting bracket 130, preferably near the terminus of the rib segments 114a, b, c. The control arm 128 is a multi-bar linkage system with a plurality of links 132 extending between the mounting bracket 130 and a distribution block 134. The control arm 128 has a pair of external links 132a, b pivotally connected to outer walls of the bracket 130 and an internal link 132c connected to a short link 132d that is affixed to an intermediate portion of the bracket 130. The distribution block 134 is affixed to an upper surface 126a of the cover plate 126 and is in fluid communication with the central opening 127. The control arm 128 also has a curvilinear segment 136 that extends from the block 134 beyond the periphery of the cover plate 126. A terminal end 138 of the curvilinear segment 136 has a fitting 140 secured by a nut 142 wherein the fitting 140 is adapted to engage the air cylinder 50, preferably the pedestal 54, to move the cover assembly 120, 122, 124 to the open position Po

[0087] A fluid line 131 of the cover assembly 120, 122, 124 extends between the distribution block 134 and the manifold 210 of the driver and process fluid distribution system 200. The driver and process fluid distribution system 200 is affixed to the carousel 100 at the rib arrangement 114 by at least one fastener 115. As explained below, the manifold 210 is in fluid communication with the driver and process fluid distribution system 200. The manifold 210 includes three outlet or discharge ports 212 that are connected to a first end 131a of the purge line 131. A second end 131b of the fluid line 131 is in fluid communication with the distribution block 134. In general terms, process fluid is delivered from the manifold 210, through the fluid lines 131 and to the blocks 134 for further distribution into the opening 127 of the cover plate 126 and then to the workpiece W supported by the receivers 104, 106, 108.

[0088] As briefly explained above, the base 24 of the housing 20 has a number of openings 40a, b configured to receive the driver and process fluid distribution system 200. Referring to FIGS. 9A-C, 12A-D and 13, the driver and process fluid distribution system 200 features a process fluid distribution assembly 205 and a driver assembly 215, wherein the assemblies 205, 215 are connected to a mounting plate 220, which in turn is connected to the base 24. Alternatively, the mounting plate 220 is omitted and the assemblies 205, 215 are fastened directly to the base 24 of the housing 20. In one embodiment, the process fluid distribution assembly 205 and the driver assembly 215 are integrated units. In another embodiment, the process fluid distribution assembly 205 is distinct and separate from the driver assembly 215. The process fluid assembly 205 is designed to supply process fluid to workpieces W at the loading, heating, and/or cooling stations 305, 405, 505. The process fluid distributed by the system 200 can purge the loading, heating, and cooling stations 305, 405, 505 of oxygen or impurities. Also, the process fluid distributed by the system 200 can aid with the thermal processing of the workpiece W in the loading, heating, and cooling stations 305, 405, 505. The process fluid can be an inert gas such as argon or helium, a non- oxidizing gas such as nitrogen, a reducing gas such as hydrogen, an oxidizing gas such as oxygen or ozone, or any combination thereof. Preferably, the process fluid comprises approximately 90-97% by volume argon and approximately 3-10% by volume hydrogen, or approximately 90-98% by volume nitrogen and approximately 2-10% by volume hydrogen. Furthermore, the process fluid can be any fluid that aids with the removal of impurities and/or aids with the thermal processing of workpieces W. The driver assembly 215, through an indexing drive motor 234, precisely rotates the carousel assembly 100 above the base 24 and between thermal processing stations.

[0089] Once installed in the base 24, an extent of the driver and process fluid distribution system 200 is positioned above the base 24 and a remaining extent of the system 200 is positioned below the base 24. A bracket 217 is connected to the lower surface 220a of the mounting plate 220 with fasteners 217a and at least one pin dowel 217b (see FIG. 13). The bracket 217 is adapted to provide support to components of the process fluid assembly 205 during operation of the carousel assembly 100. A cover 219 is removeably connected to the mounting plate 220 by at least one fastener 221 to enclose the lower components ofHhe driver and process fluid distribution system 200, meaning those components positioned below the base 24.

[0090] As shown in FIGS. 12A-D and 13, the process fluid distribution assembly 205 generally includes the manifold 210 with outlet ports 212 that are in fluid communication with the purge lines 131, a base 222 with a flange 224 for connection to the mounting plate 220, and a generally cylindrical input sleeve 226 that receives process fluid from the supply lines 228. In the embodiment shown in FIGS. 9A-C and 13, the manifold 210 and the mounting plate 220 are omitted, however, the flange 224 of the base 222 is directly connected to a recessed mounting region of the centralized opening 40b. While the base 222 and the input sleeve 226 are stationary components of the process fluid assembly 205, the manifold 210 rotates about a substantially vertical axis defined by a shaft 236 during operation of the carousel assembly 100. The manifold 210 has a shoulder 211 that overlies an upper region of the sleeve 226 after the manifold 210 is installed (see FIG. 12D). Furthermore, the manifold has a depending segment 210a that extends into the sleeve 226.

[0091] As shown in FIGS. 12B and 13, a plurality of supply lines 228 are connected to the input sleeve 226, wherein the lines 228 provide a quantity of process fluid, primarily a non-oxidizing gas, to the sleeve 226 and the manifold 210 for distribution through the fluid lines 131 to the cover plates 126. The supply lines 228a, b, c are removeably connected to the inlet opening 227a, b, c of the sleeve 226 (see FIG. 12A). The sleeve 226 has a plurality of internal annular or ring-shaped channels 229a, b, c wherein each channel 229 is in fluid communication with an inlet opening 227a, b, c. Preferably, the channels 229a, b, c are flush with an inner wall of the sleeve 226. Referring to FIG. 14, the rotatable manifold 210 has a plurality of internal channels 230a, b, c that extend between upper and lower segments of the manifold 210 and that are in fluid communication with the annular channels 229a, b, c of the sleeve 226. Preferably, the channels 230a, b, c in the manifold 210 include two horizontal runs - - a lower run 23Oi and an upper run 23O₂ and a vertical run 230₃ - - to ensure fluid communication with the annular channels 229a, b, c and the discharge ports 212a, b, c. For example and as shown in FIG. 14, the lower run 230ai of the channel 230a is in fluid communication with the annular channel 229a, and the upper run 23Oa₂ is in fluid communication with the discharge port 212a. The annular channels 229 in the sleeve 226 and the internal channels 230 of the manifold 210 define an air or fluid passageway 231a, b, c for the flow of process fluid delivered by the supply lines 228a, b, c to the inlet openings 227a, b, c. Accordingly, each passageway 23 Ia, b, c extends from the inlet opening 227a, b, c through the annular channel 229a, b, c, then the internal channel 230a, b, c and to discharge port 212a, b, c. The passageways 231a, b, c enable the process fluid distribution system 205 to delivery process fluid to the workpiece W while it is supported by any of the receivers 104, 106, 108 at the loading station 505 (see FIG. 19B) or as the carousel assembly 100 is rotated from the station 505 to the heating station 405. In another embodiment, the passageways 231a, b, c enable the process fluid distribution system 205 to delivery process fluid to the workpiece W while it is supported by any of the receivers 104, 106, 108 at each of the loading, heating and cooling stations 505, 305, 405.

[0092] The process fluid assembly 205 further includes means for sealing the process fluid supplied to the sleeve 226. The sealing means comprises a plurality of gaskets or sealing rings 232, for example, O-rings, positioned about the channels 230 in the sleeve 226 (see FIGS. 12C, 13 and 14). In one embodiment, the process fluid assembly 205 includes three fluid passageways 231a, b, c wherein each passageway 231a, b, c is in fluid communication with a single, distinct discharge port 212a, b, c. This configuration ensures that a precise amount and/or type of process fluid will be delivered by the passageway 231a, b, c to each discharge port 212a, b, c for further distribution to specific components of the carousel assembly 100. As a result, the components of the carousel assembly 100 downstream of the passageway 231a, b, c can be selectively supplied with process fluid for the workpiece W. In another embodiment, the process fluid assembly 205 includes a single passageway 231 through the sleeve 226 and manifold 210 to deliver process fluid to all of the discharge ports 212a, b, c.

[0093] One of skill in the art recognizes that the formation of a passageway 231 a, b, c is not dependent upon the angular position of the manifold 210 with respect to the sleeve 226, since the annular channel 229a, b, c has a continuous, uninterrupted configuration. In another version of the process fluid assembly 205, the channel 229a, b, c has a short, non-annular configuration. Accordingly, a passageway 231a, b, c for process fluid will be only formed when the internal channel 230a, b, c, primarily the lower run 23Oi , is aligned or cooperatively positioned with the channel 229a, b, c. In yet another version, the channel 229a, b, c has a discontinuous or segmented configuration whereby the passageway 231a, b, c will only be formed when the lower run 230₁ is cooperatively positioned with the channel 229a, b, c. [0094] As explained in greater detail below, the driver assembly 215 rotates the carousel assembly 100, including three cover assemblies 120, 122, 124, the control arms 128, and the frame 102, between the loading, heating and cooling stations 305, 405, 505. Alternatively, the loading station 505 is omitted and the driver assembly 215 rotates the carousel assembly 100 between the heating and cooling stations 405, 505. The driver assembly 215 includes an indexing drive motor or driver 234 with a depending shaft 235, the longer shaft 236 extending through an opening in the mounting plate 220, a first pulley 238, a second pulley 239, and a timing belt 240. In general terms, the pulleys 238, 239, the belt 240 and the shaft 236 are operably connected to the indexing motor 234 to drive the manifold 210. The drive mechanism 234 further includes a first bearing 242 positioned within a recess of the mounting plate 220, a second bearing 244 positioned in a recess of the bracket 217, and a pair of ring seals 246 located at opposed ends of the shaft 236. As shown in FIG. 12A, the second bearing 244 has an open face whereby the end wall 236a of the shaft 236 is visible. A plate seal 248 is affixed to an upper wall in a recess 250 of the mounting plate 220 by fasteners 252 and a smaller seal 254 is positioned between the first bearing 242 and the plate seal 248. [0095] As shown in FIGS. 12A and 13, to aid with the operable connection between the pulleys 238, 239 and the timing belt 240, the driver assembly 215 features a tensioner assembly which includes a tensioning arm 256 and a bearing 258 that engages the timing belt 240 during its operation. The tensioner assembly also includes a first fastener 260 that pivotally connects the arm 256 to the lower surface 220a of the mounting plate 220, and a second fastener 262 and washer 264 that rotatably secures the bearing 258 to the arm 256. The tensioner assembly further includes a coil spring 266 for biasing the tensioning arm 256 towards the timing belt 240 whereby the bearing 258 rotatably engages the belt 240. The coil spring 266 is secured at its first end to a retainer 268 affixed to the tensioning arm 256 and at its second end by a pin 270 affixed to the mounting block plate 220. [0096] The driver assembly 215 and the process fluid assembly 205 feature a compact design, which permits a significant portion of the driver and process fluid distribution system 200 to be packaged between the base 24 of the housing 20 and the frame 102 of the carousel assembly 100. Due to the indexing drive motor 234, the driver assembly 215 precisely drives or rotates the manifold 210 and the carousel assembly 100, including the cover assemblies 120, 122, 124, and the frame 102, above the base 24 and between the radially positioned stations 305, 405, 505 for thermal processing of the workpieces W. The remaining components of the process fluid distribution system , including the base 222 and the sleeve 226, are not rotated and remain stationary with respect to the base 24. [0097] Referring to FIGS. 15A-D and 16A, B, the carousel annealer 10 includes an electrically-powered heating element or chuck 300 that transfers a sufficient quantity of heat to the workpiece W during thermal processing. In one embodiment, the workpiece W is rotated by the carousel assembly 100 from a loading position PO at the loading station 505 (see FIG. 19B) to a heating station 305. The heating station 305 is a region of the carousel annealer 10 that is defined by the heating element 300, a portion of the carousel assembly 100 (primarily the extent of the plate 102 positioned above the heater element 300, including the tabs 1 10 that support the workpiece W), and the cover plate 126 of the a cover assembly 120, 122, 124. Described in a different manner, the driver assembly 215 rotates the workpiece W supported in the carousel assembly 100 from the loading position PO to a first position Pl (see FIG. 16B) for thermal processing, wherein in the first position P 1 the workpiece W is positioned directly above the heating element 300. Through rotation of the carousel assembly 100, the workpieces W can be sequentially placed in the first position Pl. In another embodiment, the loading station 505 and the heating station 305 are combined whereby the loading position PO and the first position Pl are consolidated causing the workpiece W to be loaded and heated by the heating element 300 in the same general location. [0098] The heating element 300 has a generally cylindrical configuration and as shown in FIGS. 16A and B, is positioned within the opening 42 in the base 24 of the housing 20 to define an initial position. Furthermore, the heating element 300 is positioned substantially between the base 24 and the frame 102 of the carousel assembly 100, while being positioned radially outward of the driver and process fluid distribution system 200. The heating element 300 generally comprises an upper portion 302 with a heating surface 304 that is placed in thermal contact with the workpiece W, an intermediate portion 306 with a insulated cavity 308, and a lower portion 310 that includes an actuator 312, such as a bellows assembly, that moves or elevates the heating element 300 from the initial position to a use position for thermal processing of the workpiece W. Upon completion of the thermal processing of a particular workpiece W, the actuator 312 returns the heating element 300 to its initial position.

[0099] The upper portion 302 employs an electrically-powered resistive heater 303 and has a circular periphery 314. A recessed annular ledge 316 is positioned radially inward of the periphery 314. In one embodiment the heating surface 304 is located radially inward of the ledge 316, while in another embodiment, the heating surface 304 extends to the periphery 314 of the upper portion 302. The heating surface 304 is cooperatively dimensioned with the workpiece W to permit thermal processing of the workpiece W. The heating surface 304 includes an arrangement of vacuum channels 318 that are positioned about a central opening 320 of the heating surface 304. A passageway 322 extends transverse to the heating surface 304 from the central opening 320 to an internal fitting 324. Vacuum air is supplied through the fitting 324 and the passageway 322 to the vacuum channels 318 wherein the vacuum air helps to maintain a vacuum seal engagement between the heating element 300 and the workpiece W. A vacuum air delivery mechanism, including an external fitting 326, extends through the intermediate and lower portions 306, 310 and is in fluid communication with the internal fitting 324. The vacuum air delivery mechanism is coupled to a vacuum source (not shown) that supplies the vacuum air used during annealing of the workpiece W. [0100] Preferably, the upper portion 302 also includes a plurality of depressions 328 that extend radially inward from the periphery 314. The depressions 328 are cooperatively positioned and dimensioned to receive an extent of the tabs 110 of the frame 102 of the carousel assembly 100 when the heating element 300 is elevated by the bellows assembly 312 to the use position and the heating surface 304 engages the workpiece W. The depressions 328 disengage the tabs 110 when the thermal processing is completed and the bellows assembly 312 lowers the heating element 300 to its initial position. Alternatively, the depressions 328 are omitted and tabs 110 engage a portion of the heating surface 304 when the heating element 300 is elevated. To secure the upper portion 302 to the heating element 300, a plurality of fasteners 330 are inserted through slots 332 in the side wall 334 of the upper portion 302.

[0101] The intermediate portion 306 of the heating element 300 includes a cavity 308 within a side wall 307 wherein the cavity 308 includes conventional insulation. The intermediate portion 306 also includes a bottom wall 336 that is secured to a top wall 338 of the lower portion 310 by fasteners 340 (See FlG. 15D).

[0102] The actuator or bellows assembly 312 is generally positioned in the lower portion 310 of the heater element 300. The bellows assembly 312 moves the upper and intermediate portions 302, 306, including the heating surface 304, from the initial position towards the frame 102 of the carousel assembly 100 and to the use position. In the initial position and as shown in FIG. 16B, there is a clearance C between the heating surface 304 and the workpiece W. In the use position, the heating element 300 is in thermal engagement with the workpiece W to enable heat transfer to the workpiece W. Preferably, in the use position, the heating surface 304 is in direct contact with the non-device side of the workpiece W thereby eliminating the clearance C. Alternatively, in the use position, the heating surface 304 is in close proximity to the non-device side of the workpiece W thereby significantly reducing the clearance C. When the bellows assembly 312 lowers the heating element 300 from the use position to the initial position, the clearance C is present.

[0103] The bellows assembly 312 includes the top wall 338, a bottom wall 344, and a bellow 346. In one embodiment, the bellow 346 has a cylindrical configuration and the bottom wall has a central core 345 that is positioned within the bellow 346. In another embodiment, the bellows assembly 312 includes a number of bellows 346 circumferentially spaced with respect to the bottom wall 336. Referring to FIG. 16B, at least one fastener 345 extends through the bottom wall 344 and the base 24 to secure the heating element 300 to the carousel annealer 10 above the opening 42 in the base 24. The bellows assembly 312 further includes a bushing 348 within a cover 350 affixed to the bottom wall 344 by fasteners 352. A sealing ring 354, preferably an O-ring, configured to seal the cover 350 with respect to the bottom wall 344 is positioned within a cavity of the cover 350. The bushing 348 is affixed to the bottom wall 344 by fasteners 356, and has a central opening with a guide sleeve 358 that sliding engages an extent of a guide shaft 360. A stop portion 360a extends transversely to a main body potion 360b of the shaft 360. The shaft 360 is coupled to the top wall 338 at an upper portion 360c by fasteners 362. In operation of the bellow assembly 312 and while the heating element 300 is moved between the initial and use positions, the guide shaft 360 slides through the sleeve 358 and towards the heating surface 304.

[0104] When the bellow assembly 312 moves the upper and intermediate portions 302, 304 a sufficient distance to bring the heating element 300 to the use position, vacuum air is supplied to the internal fitting 324 for delivery through the central opening 320 in the heating surface 304. Similarly, when the heating element 300 reaches the use position, the heating element 300 is activated to begin a heating cycle for the annealing of the workpiece W. Referring to FIG. 15B, the bellows assembly 312 includes at least one inductive sensor 364 which extends though a side wall 353 of the cover 350 and that monitors the position of the heater element 300, including the shaft 360. The sensor 364, in connection with the control system 600, prevents rotation of the carousel assembly 100 until the bellows assembly 312 returns the heating element 300 to its initial position (see FIG. 16B). In operation, the sensor 364 and the control system ensure the timely rotation of the carousel assembly 100, the delivery of vacuum air, and the activation of the heating element 300 and the heating cycle. [0105] Referring to FIGS. 17A-D and 18A, B, the carousel annealer 10 includes a cooling element or chuck 400 that cools the workpiece W during a post-heating stage of thermal processing. After the heating stage is completed, the workpiece W is rotated by the carousel assembly 100 from the heating station 305 to a cooling station 405 having the cooling element 400. The cooling station 405 is a region of the carousel annealer 10 that is defined by the cooling element 400, a portion of the carousel assembly 100 (primarily the extent of the plate 102 positioned above the cooling element 400, including the tabs 110 that support the workpiece W), and the cover plate 126 of a cover assembly 120, 122, 124. Described in a different manner, the driver assembly 215 rotates the workpiece W supported in the carousel assembly 100 from the first position Pl to a second position P2 (see FIG. 18B) for thermal processing. In the second position P2 the workpiece W is positioned substantially above the cooling element 400. Through rotation of the carousel assembly 100, the workpieces W are sequentially placed in the second position P2 for thermal processing by the cooling element 400. As shown in FIG. 18B, the workpiece W is supported in the second position P2 by the tabs 110 of the frame 102. Preferably, the workpiece W is removed or unloaded from the carousel assembly 100 at the second position P2 through the second opening 32 upon completion of the cooling cycle. Alternatively, the workpiece W is rotated from the cooling station 405 to the loading station 505 or the loading position PO where it is unloaded prior to the loading of an unprocessed workpiece W.

[0106] The cooling element 400 has a generally cylindrical configuration and as shown in FIGS. 18A and B, is positioned within the opening 44 in the base 24 of the housing 20. Furthermore, the cooling element 400 is positioned substantially between the base 24 and the frame 102 of the carousel assembly 100. Like the heating element 300, the cooling element 400 is positioned radially outward of the driver and process fluid distribution system 200. The cooling element 400 generally comprises an upper portion 402 with a cooling surface 404 that is placed in thermal contact with the workpiece W, an intermediate portion 406, and a lower portion 410 that includes an actuator 412, such as a bellows assembly, that moves the cooling element 400 for thermal processing of the workpiece W. [0107] The upper portion 402 has a circular periphery 414 and a recessed annular ledge 416 positioned radially inward of the periphery 414. In one embodiment the cooling surface 404 is located radially inward of the ledge 416, while in another embodiment, the cooling surface 404 extends to the periphery 414 of the upper portion 402. The cooling surface 404 includes an arrangement of vacuum channels 418 that are positioned about a central opening 420 of the cooling surface 404. A passageway (not shown) extends transverse to the cooling surface 404 from the central opening 420 to an internal fitting (not shown). Vacuum air is supplied through the fitting and the passageway to the vacuum channels 418 wherein the vacuum air helps to maintain a vacuum seal engagement between the cooling element 400 and the workpiece W. A vacuum air delivery mechanism, including an external fitting 426, extends through the intermediate and lower portions 406, 410 and is in fluid communication with the vacuum channels 418. The vacuum air delivery mechanism is coupled to a vacuum source (not shown) that supplies the vacuum air used during annealing of the workpiece W. [0108] Preferably, the upper portion 402 also includes a plurality of depressions 428 that extend radially inward from the periphery 414. The depressions 428 are cooperatively positioned and dimensioned to receive an extent of the tabs 1 10 of the frame 102 of the carousel assembly 100 when the cooling element 400 is elevated by the bellows apparatus 412 to the use position and the cooling surface 404 thermally engages the workpiece W. The depressions 428 disengage the tabs 110 when the theπnal processing is completed and the bellows apparatus 412 lowers the cooling element 400 to its original position. Alternatively, the depressions 428 are omitted and the workpiece W engages an extent of the cooling surface 404 when the cooling element 400 is elevated by the bellows apparatus 412. [0109] The upper portion 402 of the cooling element 400 further includes a cooling system 430 that comprises a plurality of internal channels 432, at least one inlet port 434 and at least one outlet port 436. The internal channels 432, the inlet port 434 and outlet port 436 define a fluid passageway for the cooling medium utilize during operation of the cooling station 405. The cooling medium used in the cooling system 430 and supplied to the channels 432 is a fluid such as water, glycol or a combination thereof. In operation, the cooling medium is supplied through the inlet ports 434 to the channels 432 and discharged by the outlet port 436. Although shown in FIG. 17D as being positioned on one side of the upper portion 402, the channels 432 are arrayed throughout the upper portion 402. Thus, there is an innermost annular channel 432a, an outermost annular channel 432b, and at least one intermediate annular channel 432c. The precise number of channels 432 varies with the design parameters of the cooling element 400 and the cooling system 430. An inner sealing ring 431 is positioned radially inward of the inner-most channel 432a and about a fastener 433 that secures the upper portion 402 to the intermediate portion 406, and an outer sealing ring 435 is positioned radially outward of the outer-most channel 432b. Preferably, the sealing rings 431, 433 are O-rings.

[0110] In one embodiment, the cooling system 430 includes an inlet manifold (not shown) that distributes the cooling media from the inlet ports 434 to the internal channels 432. Similarly, the cooling system 430 includes a discharge manifold (not shown) that distributes cooling medium from the channels 432 to the discharge port 436. In another embodiment, the inlet and outlet manifolds are omitted wherein the internal channels 432 are in fluid communication with each other to define a single, continuous fluid passageway from the inlet port 434, through the internal channels 432 and to the outlet port 436. In yet another embodiment, the internal channels 432 are annular channels arrayed in a concentric manner and are in fluid communication with inlet and discharge manifolds. [0111] The intermediate portion 406 of the cooler element 300 is secured to the upper portion 402 by the fastener 426. Although shown as having a solid, plate-like configuration, the intermediate portion 406 can include an insulated cavity. The intermediate portion 406 is secured to a top wall 438 of the lower portion 410 by fasteners 440 (See FIG. 17D). [0112] The actuator or bellows assembly 412 is generally positioned in the lower portion 410 of the cooling element 400. The bellows assembly 412 moves the upper and intermediate portions 402, 404, including the cooling surface 404, from the initial position towards the frame 102 of the carousel assembly 100 and to the use position. In the initial position and as shown in FIG. 18B, there is a clearance C between the cooling surface 404 and the workpiece W. In the use position, the cooling element 400 is in thermal engagement with the workpiece W to enable heat transfer to the workpiece W. Preferably, in the use position, the cooling surface 404 is in direct contact with the non-device side of the workpiece W thereby eliminating the clearance C. Alternatively, in the use position, the cooling surface 404 is in close proximity to the non-device side of the workpiece W thereby significantly reducing the clearance C. When the bellows assembly 412 lowers the cooling element 400 from the use position to the initial position, the clearance C is present. [0113] The bellows assembly 412 includes the top wall 438, a bottom wall 444, and a bellow 446. In one embodiment, the bellow 446 has a cylindrical configuration and the bottom wall 444 has a central core 448 that is positioned within the bellow 446. In another embodiment, the bellows assembly 412 includes a number of bellows 446 circumferentially spaced with respect to the bottom wall 436. Referring to FIG. 18B, at least one fastener 445 extends through the bottom wall 444 and the base 24 to secure the cooling element 400 to the carousel annealer 10 above the opening 44 in the base 24.

[0114] As shown in FIGS. 17B and D, a mounting ring 449 depends from the bottom wall 444. A cover 450 of the bellows assembly 412 is positioned within the central region of the ring 449, wherein the cover 450 affixed to the bottom wall 444 by fasteners 451. A bushing 452 is positioned within the cover 450 and is affixed to the bottom wall 444 by at least one fastener 454. A sealing ring 456, preferably an O-ring, is positioned within a cavity of the cover 450. The bushing 452 has a central opening with a guide sleeve 458 that sliding engages an extent of a guide shaft 460. A stop portion 460a extends transversely to a main body potion 460b of the shaft 460. The shaft 460 is coupled to the top wall 438 at an upper portion 460c by at least one fastener 462.

[0115] In operation of the bellow assembly 412, the guide shaft 460 slides through the sleeve 458 and towards the cooling surface 404. When the bellow assembly 412 moves the cooling element 400 to the use position, vacuum air is supplied for delivery through the central opening 420 in the cooling surface 404. Similarly, when the cooling element 400 is raised to the use position, the cooling system 430 is activated to begin a cooling cycle for the workpiece W. Referring to FIGS. 17B and D, the bellows assembly 412 includes at least one inductive sensor 464 that extends through a side wall 453 of the cover 450 and that monitors the position of the cooling element 400, including the shaft 460. The sensor 464, in connection with the control system 600, prevents rotation of the carousel assembly 100 until the bellows assembly 412 returns the cooling element 400 to its initial position, as shown in FIG. 18B. In operation, the sensor 464 and the control system ensure the timely rotation of the carousel assembly 100, the delivery of vacuum air, and the activation of the cooling mechanism and the cooling cycle. [0116] Referring to FIGS. 19A, B, the carousel annealer 10 includes a loading station 505 where the workpiece W is inserted into the carousel assembly 100 to begin the thermal processing. The loading station 505 is a region of the carousel annealer 10 that is defined by a portion of the carousel assembly 100, primarily the inner portion of the plate 102 including the tabs 110 that support the workpiece W, and the cover plate 126 of a cover assembly 120, 122, 124. Preferably, the workpiece W is placed in the loading station 505 through the first opening 30. Since the loading station 505 lacks a heating element 300 or a cooling element 400, the supply lines 229a-c are positioned near the loading station 505. In another embodiment, the loading station 505 is omitted from the carousel annealer 10 whereby the workpieces W are loaded directly into the heating station 305.

[0117] The loading, heating and cooling stations 305, 405, 505 are positioned radially outward of the driver and process fluid distribution system 200. Although the loading, heating and cooling stations 305, 405, 505 are shown to be positioned approximately 120 degrees apart, the angular positioning can vary with the design parameters of the assembly 10 and the carousel 100. In yet another embodiment, the carousel annealer 10 includes a loading station 505 and a distinct unloading station (not shown) wherein the thermally processed workpiece W is rotated to from the cooling station 405 for unloading. In this embodiment, the carousel annealer 10 is enlarged to accommodate the unloading station, as well as the loading, heating and cooling stations 305, 405, 505.

[0118] As mentioned above, the carousel annealer 10 includes two inductive sensors 364, 464 that indicate and communicate the position of the heater and cooling elements 300, 400. The sensors 364, 464 comprise a portion of a control system that monitors and controls a number of functions of the carousel annealer 10, including the operation of the air cylinders 50, the cover assemblies 120, 122, 124, the process fluid assembly 205, the driver assembly 215, the bellows apparatus 312, 412. Furthermore, the control system directs the operation and cycle times of the heating element 300 and the cooling element 400. For example, the control system utilizes a closed-loop temperature sensor to ensure the proper operation of the heating element 300 at a process temperature. The feedback control can be a proportional integral control, a proportional integral derivative control or a multi-variable temperature control. [0119] Referring to FIGS. 20A,B, two annealing carousel annealers 10 are positioned in a stacked configuration within a stand 600. The stand 600 includes a bottom plate 602, a top plate 604 and a plurality of vertical legs 606, 608, 610. A first carousel annealer 10a is positioned above a second carousel annealer 10b, wherein both carousel annealers 10a, b are supported by cross-members 612. To ensure the loading and unloading of workpieces W, the first opening 30 and the second opening 32 of the carousel annealers 10a, b are positioned between legs 606, 608, 610. Similarly, the side wall component 26 of the cover 22 of the carousel annealers 10a, b are positioned between legs 608, 610. When the annealing carousel annealers 10a, b are stacked as shown in FIGS. 2OA, B, the throughput of processed workpieces W is increased while maintaining the same footprint as a single annealing carousel annealer 10. A further advantage of the configuration shown in FIGS. 2OA, B is a reduction in the number of couplings needed to supply electrical power, process fluid and vacuum air.

[0120] In other embodiments, the carousel annealer 10 can have other configurations. For example, the cooling element 400 can utilize another medium to cool the workpiece, such as cold air. The cylinders 50 that actuate the cover assembly 120, 122, 124 can be replaced by an actuator that is non-pneumatic. The carousel annealer 10 can be configured to perform thermal processes other than annealing the workpiece W. For example, the heating element 300 can heat a microelectronic workpiece W to reflow solder on the workpiece W, cure or bake photoresist on the workpiece W, and/or perform other processes that benefit from and/or require an elevated temperature. The heating element 300 can heat the microelectronic workpiece W conductively by contacting the workpiece W directly, and/or conductively via an intermediate gas or liquid, and/or convectively via an intermediate gas or liquid, and/or radiatively. Similarly, the cooling element 300 can cool the workpiece W conductively by contacting the workpiece W directly, and/or conductively via an intermediate gas or liquid, and/or convectively via an intermediate gas or liquid, and/or radiatively. [0121] The operation and thermal processing of a workpiece W in the carousel annealer 10 is explained with reference to above FIGS. 7-19. The method to thermally process microelectronic workpieces W in the carousel annealer 10 commences with the step of placing a workpiece W into the loading position PO at the loading station 505 of the carousel assembly 100 with the device side facing away from the base 24. In the loading position PO, the workpiece W is positioned over a loading area 24c of the base 24 (see FIG. 19B). Referring to FIG. 8, in a preferred embodiment the frame 102 has three receivers 104,106, 108; thus three workpieces W can be sequentially loaded into the carousel assembly 100 for thermal processing. To reach the loading position PO, the cover assembly 120, 122, 124 is moved from its closed position to the open position by engagement of the pedestal 54 of the air cylinder 50 with the cover control arm 128. Specifically, the air cylinder 50 raises the shaft 52 in a substantially vertical direction which causes the pedestal 54 to engage and elevate the terminal end 138 of the control arm 128 thereby raising the cover plate 126. When the pedestal 54 engages the terminal end 138, the links 132 cause the control arm 128 to pivot about the mounting bracket 130 and thereby raise the cover plate 126 a distance sufficient to permit insertion of the workpiece W. After the workpiece W has been placed in the receiver 104, 106, 108, the cover plate 126 is lowered to the closed position by the air cylinder 50.

[0122] While the workpiece W is the loaded position PO, the process fluid distribution assembly 205 distributes a measured quantity of process air, such as nitrogen, through the passageway 231 , the cover assembly 120, 122, 124 and the distribution block 134 to the workpiece W to purge impurities. The cycle time for the process fluid is approximately 15- 25 seconds. Once a sufficient quantity of process fluid is provided, the process fluid distribution assembly 205 can deliver a second process fluid, for example, 1 to 30 liters per minute of a non-oxidizing gas, e.g., nitrogen, argon, hydrogen or helium, through the passageway 231 to aid with the subsequent thermal processing of the workpiece W. When the process fluid is supplied at more than one flow rate, the carousel annealer 10 can include a mass flow controller and/or a multi-port manifold with a valve to selectively control the flow of fluid into the carousel annealer 10. After a sufficient amount of process fluid is delivered by the process fluid distribution assembly 205 through the passageway 231 to the workpiece W in the loading station 505, the driver assembly 215 rotates the carousel assembly 100 to the first position Pl , wherein the workpiece W is positioned above the heating element 300 in the heating station 305. Rotation of the carousel assembly 100 to move the workpiece W from the loaded position PO to the first position Pl consumes approximately 1-3 seconds. As the carousel annealer 10 is configured in FIGS. 7-19, the carousel assembly 100 rotates in a counter-clockwise direction. However, the carousel annealer 10 can be configured to permit clockwise rotation of the carousel assembly 100. [0123] In one embodiment, to maintain a controlled processing environment, the cover plate 126 remains in the closed position as the workpiece W is rotated between the loaded position PO, the first position Pl where the heating element 300 is engaged, and the second position P2 where the cooling element 400 is engaged and the workpiece W is subsequently unloaded from the carousel annealer 10. In another embodiment, the process fluid assembly 205 delivers a quantity of process fluid through the passageways 231 at each of the loaded position PO, the first position Pl and the second position P2. In yet another embodiment, the process fluid assembly 205 selectively delivers a quantity of process fluid through the passageways 231 at the loaded position PO, the first position Pl or the second position P2. [0124] In the first position Pl, the bellows assembly 312 raises or moves the heating element 300 from the base 24 of the housing 20 into the use position, wherein the heating element 300 is in thermal engagement with the workpiece W. The bellows assembly 312 takes approximately 1-3 seconds to raise and then subsequently lower the heater element 300. Preferably, in the use position, the heating surface 304 is in direct contact with the non-device side of the workpiece W thereby eliminating the clearance C. Alternatively, in the use position, the heating surface 304 is in close proximity to the non-device side of the workpiece W thereby significantly reducing the clearance C. To maintain a vacuum seal engagement between the workpiece W and the heating surface 304 of the heater element 300, a vacuum is applied via the vacuum channels 318.

[0125] To thermally process components of the workpiece W, such as copper micro- structures, the heating element 300 operates at a selected process temperature for a specific period of time to define a heating cycle. Because the carousel annealer 10 has distinct heating and cooling elements 300, 400, the heating element 300 does not need to be ramped- up or increased from an idle temperature to the process temperature. In contrast to conventional processing devices in which a heat source requires a temperature ramp-up, the heating element 300 can be maintained at or near the process temperature which increases the operating efficiency and life of the heating element 300. Since the heating element 300 is in thermal engagement with the workpiece W, the process temperature of the heating element 300 and the process temperature of the workpiece W are substantially similar. For example, when the workpiece W includes a copper layer, the heater element 300, with a process temperature ranging between 150 to 450 degrees Celsius, heats the workpiece W to a temperature in the range of 150 to 450 degrees Celsius for a cycle time ranging between 15 to 300 seconds. In one specific example, the workpiece W, including the copper layer therein, is heated to approximately 250 degrees Celsius for a cycle time of roughly 60 seconds. Accordingly, the copper layer can be annealed such that the grain structure of the layer changes (e.g., the size of the grains forming the layer can increase). In other embodiments, the workpiece W can be heated to a different temperature for another cycle time depending on the chemical composition of the workpiece W material to be thermally processed. The process temperature of the heater element 300 is controlled using a closed-loop temperature sensor feedback control incorporated into the carousel annealer control system 600, such as a proportional integral control, a proportional integral derivative control or a multi-variable temperature control.

[0126] Upon expiration of the heating cycle time, the bellows assembly 312 lowers the heating element 300 to its original position with respect to the base 24. The inductive sensor 364 monitors the position of the heating element 300 and communicates this information to the carousel annealer control system 600. The sensor 364 and the control system 600 prevent further rotation of the carousel assembly 100 until the bellows assembly 312 has returned the heating element 300 to its original position. Therefore, once the sensor 364 detects that the heating element 300 has been lowered to its original position and the clearance C has been achieved, the driver assembly 215 rotates the carousel assembly 100 to the second position P2, wherein the workpiece W is positioned above the cooling element 400 in the heating station 405. Rotation of the carousel assembly 100 to move the workpiece W from the first position Pl to the second position P2 consumes approximately 1-3 seconds. While a first workpiece W is in the first position Pl and the heating element 300 is in the heating cycle, a second workpiece W can be placed in the loaded position PO in a manner consistent with that explained above.

[0127] In the second position P2, the bellows apparatus 412 raises or moves the cooling element 400 from the base 24 of the housing 20 into thermal engagement with the workpiece W. In the second position P2, the bellows apparatus 412 raises or moves the cooling element 400 from the base 24 of the housing 20 into the use position, wherein the cooling element 400 is in thermal engagement with the workpiece W. Preferably, in the use position, the cooling surface 404 is direct contact with the non-device side of the workpiece W thereby eliminating the clearance C. Alternatively, in the use position, the cooling surface 404 is in close proximity to the non-device side of the workpiece W thereby significantly reducing the clearance C. To maintain the thermal engagement between the workpiece W and the cooling surface 404 of the cooling element 400, a vacuum is applied via the vacuum channels 418. [0128] The cooling system 430 of the cooling element 400 is then activated to cool the workpiece W to a selected temperature for a specific period of time, the cooling cycle time. For example, when the workpiece W includes a copper layer, the workpiece W can be cooled to a temperature below 70 degrees Celsius with a cycle time ranging between 15-25 seconds. During the cooling cycle, the cooling system 430 circulates the cooling medium through the fluid passageway defined by the internal annular channels 432 of the cooling element 400. Compared to the heater element 300, the cooling element 400 has a reduced cycle time. Because the process fluid cycle time and the cycle time of the cooling element 400 are less than the cycle time of the heating element 300, there is sufficient time for an unprocessed workpiece W to be loaded into the loading station 505 and for a processed workpiece W to be unloaded from the cooling station 405. Consequently, the throughput of the carousel annealer 10 is only dependent upon the cycle time of the heater element 300. [0129] Upon expiration of the cooling cycle, the bellows assembly 412 lowers the cooling element 400 to its original position with respect to the base 24. The inductive sensor 464 monitors the position of the cooling element 400 and communicates this information to the carousel annealer control system 600. The sensor 464 and the control system 600 prevent further rotation of the carousel assembly 100 until the bellows assembly 412 has returned the cooling element 400 to its original position. After the cooling cycle time is complete, the process fluid assembly 205 can replace the process gas with a flow of purge gas. In one embodiment, once the sensor 464 detects that the cooling element 400 has been lowered to its original position, the cover assembly 120, 122, 124 is moved from its closed position to the open position by engagement of the pedestal 54 of the air cylinder 50 with the cover control arm 128 as explained above. After the cover assembly 120, 122, 124 reaches the open position, the workpiece W is removed from the receiver 104, 106, 108, preferably by a robot. In another embodiment, the driver assembly 215 rotates the carousel assembly 100 to the loaded position PO, wherein the cover assembly 120, 122, 124 is moved to the open position and the workpiece W is removed from the receiver 104, 106,108. While a first workpiece W is in the second position P2 and the cooling element 400 is in the cooling cycle, a second workpiece W is in the first position Pl and a third workpiece W is in the loaded position PO. [0130] As explained above, the carousel annealer 10 provides for the sequential thermal processing of a number of workpieces W_N. In one embodiment, the frame 102 of the carousel annealer 10 has three receivers 104, 106, 108 and as a result, the carousel annealer 10 has the capacity to process three distinct workpieces W at one time. As an example of the processing sequence, the first cover assembly 120 is moved to the open position and a first workpiece Wl is inserted in the first receiver 104 and placed in the loading position PO at the loading station 505. There, the process fluid assembly 205 distributes process fluid through the passageway 231 to the workpiece Wl to remove impurities. After a sufficient amount of process gas is delivered to the first workpiece W 1 , the driver assembly 215 rotates the carousel assembly 100 approximately 120 degrees to move the first workpiece Wl from the loading position PO to the first position Pl .

[0131] When the first workpiece Wl reaches the first position Pl, the second cover assembly 122 is moved to the open position and a second workpiece W2 is inserted in the second receiver 106 and placed in the loading position PO at the loading station 505. In the loading position PO, the process fluid assembly 205 distributes process fluid to the second workpiece W2 to remove impurities and the second workpiece W2 is readied for further processing. In the first position Pl, the bellows assembly 312 raises the heating element 300 to the use position, wherein the heating element 300 is in thermal engagement with the first workpiece Wl . To maintain the thermal engagement between the first workpiece Wl and the heating surface 304 of the heater element 300, a vacuum is applied via the vacuum channels 318. The heating element 300 is then activated to the process temperature to thermally process components of the first workpiece Wl . Upon expiration of the heating cycle time, the bellows assembly 312 lowers the heating element 300 to its original position with respect to the base 24. Once the inductive sensor 364 detects that the heating element 300 has been lowered to its original position, the driver assembly 215 rotates the carousel assembly approximately 120 degrees which moves the first workpiece Wl to the second position P2 and the second workpiece W2 to the first position Pl . [0132] When the first workpiece Wl reaches the second position P2 and the second workpiece W2 reaches the first position Pl, the third cover assembly 124 is moved to the open position and a third workpiece W3 is inserted in the third receiver 108 and placed in the loading position PO at the loading station 505. In the loading position PO, the process fluid assembly 205 distributes process fluid through the passageway 231 to the third workpiece W3 to remove impurities and the third workpiece W3 is readied for further processing. In the first position Pl, the bellows assembly 312 raises or moves the heating element 300 to the heater use position, wherein the heating element 300 is in thermal engagement with the second workpiece W2. To maintain the thermal engagement between the second workpiece W2 and the heating surface 304 of the heater element 300, a vacuum is applied via the vacuum channels 318. The heating element 300 is then activated to the process temperature to thermally process components of the first workpiece W2. Upon expiration of the heating cycle time, the bellows assembly 312 lowers the heating element 300 to its original position with respect to the base 24. In the second position P2, the bellows apparatus 412 moves the cooling element 400 to the use position, wherein the cooling element 400 is in thermal engagement with the first workpiece Wl . The cooling system 400 of the cooling element 400 is then activated to cool the first workpiece Wl to the desired temperature. During the cooling cycle, the cooling system 400 circulates the cooling medium through the fluid passageway defined by the internal annular channels 432 of the cooling element 400. Upon expiration of the cooling cycle, the bellows assembly 412 lowers the cooling element 400 to its original position with respect to the base 24. The inductive sensor 464 monitors the position of the cooling element 400 and communicates this information to the carousel annealer control system 600. After the inductive sensor 464 detects that the cooling element 400 has been lowered to its original position the first cover assembly 120 is moved from its closed position to the open position and the first workpiece Wl is removed from the first receiver 104. Next, the first cover assembly 120 is moved to the closed position and the driver assembly 215 rotates the carousel assembly approximately 120 degrees whereby the second workpiece W2 is moved to the second position P2 and the third workpiece W3 is moved to the first position Pl .

[0133] After the first workpiece Wl is removed from the carousel annealer 10 and when the second workpiece W2 reaches the second position P2 and the third workpiece W3 reaches the first position Pl, the first cover assembly 120 is moved to the open position and a fourth workpiece W4 is inserted in the first receiver 104 and placed in the loading position PO at the loading station 505. In the loading position PO, the process fluid assembly 205 distributes process fluid through the passageway 231 to the fourth workpiece W4 to remove impurities and the fourth workpiece W4 is readied for further processing. In the first position Pl, the bellows assembly 312 raises or moves the heating element 300 to the heater use position, wherein the heating element 300 is in thermal engagement with the third workpiece W3. To maintain the thermal engagement between the third workpiece W3 and the heating surface 304 of the heater element 300, a vacuum is applied via the vacuum channels 318. The heating element 300 is then activated to the process temperature to thermally process components thereof. Upon expiration of the heating cycle, the bellows assembly 312 lowers the heating element 300 to its original position with respect to the base 24. In the second position P2, the bellows apparatus 412 moves the cooling element 400 to the use position, wherein the cooling element 400 is in thermal engagement with the second workpiece W2. The cooling system 400 of the cooling element 400 is then activated to cool the second workpiece W2 to the desired temperature. During the cooling cycle, the cooling system 400 circulates the cooling medium through the fluid passageway defined by the internal annular channels 432 of the cooling element 400. Upon expiration of the cooling cycle, the bellows assembly 412 lowers the cooling element 400 to its original position with respect to the base 24. The inductive sensor 464 monitors the position of the cooling element 400 and communicates this information to the carousel annealer control system 600. After the inductive sensor 464 detects that the cooling element 400 has been lowered to its original position, the second cover assembly 122 is moved from its closed position to the open position and the second workpiece W2 is removed from the second receiver 106. Next, the second cover assembly 122 is moved to the closed position and the driver assembly 215 rotates the carousel assembly approximately 120 degrees whereby the third workpiece W3 is moved to the second position P2 and the fourth workpiece W4 is moved to the first position Pl .

[0134] After the second workpiece W2 is removed from the carousel annealer 10 and when the third workpiece W3 reaches the second position P2 and the fourth workpiece W4 reaches the first position P 1 , the second cover assembly 122 is moved to the open position and a fifth workpiece W5 is inserted in the second receiver 106 and placed in the loading position PO at the loading station 505. The thermal processing sequence of the third, fourth and fifth workpieces W3, 4, 5 is consistent with that explained in the foregoing paragraphs. Consequently, the carousel annealer 10 provides for the sequential thermal processing of multiple workpieces, from the first workpiece Wl to a number of workpieces W_N. [0135] Turning now to FIG. 21, there is a top plan view of an integrated tool assembly 2011 including a first modular tool unit 2010a and a second modular tool unit 2010b. The first and second modular tool units 2010a-b can be substantially similar to the modular tool unit 1000 described above with reference to FIGS. 1 -5, but the modular tool units 2010a and 2010b are connected together in an integrated arrangement. Tn this embodiment, the first modular tool unit 2010a has a first side docking unit 2044a with first alignment elements, and the second modular tool unit 2010b has a second side docking unit 2044b with second alignment elements engaged with the first alignment elements. The first and second alignment elements can be pin/hole arrangements that accurately align the first and second modular tool units 2010a-b with each other so that they have a common fixed reference frame. The integrated tool assembly 2011 further includes a transport system 2060 having a track 2062 extending along the platforms 2032 of both the first and second modular tool units 2010a-b. The embodiment of the transport system 2060 illustrated in FIG. 21 includes a single robot 2066 having dual, coaxial end-effectors 2068a-b (shown superimposed with each other), but the integrated tool assembly 201 1 can include two or more robots 2066 on the track 2062. Alternatively, each modular tool unit 2010a and 201 Ob can have a separate track 2062 and a separate robot 2066.

[0136] The integrated tool assembly 2011 can further include a load/unload module 2014 attached to the first modular tool unit 2010a as described above and identified by reference numeral 1008 in FIGS. 1-4. Alternatively, the integrated tool assembly 201 1 can include a second load/unload module (not shown) attached to the second modular tool unit 2010b for additional capacity.

[0137] The first modular tool unit 2010a can include first processing stations 2050a, and the second modular tool unit 2010b can include second processing stations 2050b. The processing stations 2050a and 2050b can be identical stations that perform identical functions. Alternatively, the first processing stations 2050a can be different than the second processing stations 2050b. For example, the first processing stations 2050a can be electrochemical deposition chambers having an alkaline bath for electrochemically repairing, enhancing, or otherwise manipulating a seed layer, or directly plating onto a barrier layer, as disclosed in U.S. Patent Nos. 6,197,181, 6,290,833 and 6,565,729, which are herein incorporated by reference. The first processing stations 2050a can accordingly be electroplating chambers and/or electroless plating chambers. The second processing stations 2050b can be electrochemical deposition chambers having an acid processing solution. Such an integrated tool assembly 201 1 could accordingly perform seed layer enhancement or direct barrier plating procedures in the first modular tool unit 2010a, and then perform bulk plating procedures in the second modular tool unit 2010b as described in U.S. Patent Nos. 6,197,181, 6,290,833 and 6,565,729. The first processing stations 2050a and/or the second processing stations 2050b can alternatively be any combination of one or more annealing stations, metrology stations, rinse stations, etch stations, electroplating chambers, and/or electroless plating chambers. The processing sections of modular tool units 2010a and 2010b can be separated by a dividing wall between the first and second side docking units 2044a and 2044b to maintain generally separate cells between the alkaline chemistry in the first modular tool unit 2010a and the acidic chemistry in the second modular tool unit 2010b. It will be appreciated that many other configurations of tool assemblies can be constructed using two more modular tool units 2010 with the desired combination of processing stations and robots to provide the desired functionality and capacity for individual customers. [0138] In one preferred embodiment, one processing station 2050a is an annealing station (as shown in FIGS. 1 and 2 and identified by reference number 1004) and described in detail above with reference to FIGS. 7-20A-B above, and another processing station 2050a is a holding station (as shown in FIGS. 1 and 2 and identified reference number 1004) and described above. Process stations 2050b are any one of electrochemical deposition chambers, cleaning capsules, metrology stations, cleaning/etching capsules, and/or other types of processing stations

[0139] FIG. 22A is a front isometric view, FIG. 22B is a rear isometric view, and FIG. 22C is a top plan view of a modular tool unit 2100 in accordance with a specific embodiment of the invention that relates to the modular tool unit 1000 in FIG. 1. The modular tool unit 2100 illustrated in FIGS. 22A-C includes a frame 2112 to carry the mounting module 2020. The frame 2112 can further include leveling jacks to adjust the plane of the mounting module 2020.

[0140] As shown in FIGS. 22A-C, the load/unload module 2014 is fixedly attached to the processing module 2012 at the docking stations (not shown in Figures 4A-C) as described above. The load/unload module 2014 can include two workpiece holders 2016 that carry cassettes or pods 2115. The workpiece holders 2016 can move to a lowered position for manually loading/unloading the pods 21 15 onto the workpiece holders 2016. The workpiece holders 2016 accordingly provide an ergonomic elevation for manual loading/unloading of the pods 2115. The workpiece holders 2016 also lift the pods 2115 to a raised position for positioning the pods 21 15 at access openings 2117 (shown in FIG. 22B only). [0141] The mounting module 2020 shown in FIGS. 22A-B includes the deck 2030 and the platform 2032. In this embodiment, the deck 2030 is elevated with respect to the platform 2032, and the track 2062 extends in a width-wise direction W (see FIG. 4C) along the platform 2032. The robot 2066 accordingly moves laterally with respect to a depth-wise direction D (FIG. 22C).

[0142] Referring to FIG. 22C, the deck 2030 and the platform 2032 include several positioning elements 2034 and attachment elements 2036 that accurately position the processing stations 2050 and the track 2062 at known locations within the reference frame of the mounting module 2020. More specifically, the embodiment of the modular tool unit 2100 illustrated in FIG. 22C includes two positioning elements 2034 on opposing sides of each processing station 2050 and a plurality of attachment elements 2036 around each of the processing stations 2050. The platform 2032 also includes several positioning elements 2034 and attachment elements 2036. The positioning elements 2034 are engaged with interface elements of the processing stations 2050 and the track 2062 to position these components in the fixed reference frame of the mounting module 2020 with a high degree of accuracy as described above.

[0143] The mounting module 2020 illustrated in FIGS. 22A-B further includes side panels 2131 and a front panel 2133 (FIG. 22A only). The deck 2030, platform 2032, side panels 2131 and front panel 2133 are made from rigid, dimensionally stable materials, and these components are fixed together to define the fixed reference frame of the modular tool unit 2100. The deck 2030, platform 2032, side panels 2131 and front panel 2133, can be made from stainless steel, other metal alloys, solid cast materials, or fiber-reinforced composites. For example, these components can be made from a Nitronic 50 stainless steel, Hastelloy 625 steel alloys, or a solid cast epoxy filled with mica. The fiber-reinforced composites can include a carbon-fiber or Kevlar© mesh in a hardened resin. The materials for these components should also be compatible with the chemicals used in the wet chemical processes. Stainless steel is well suited for many applications because it is strong, but not affected by many of the electrolytic solutions or cleaning solutions used in wet chemical processes. In one embodiment, these components are 0.125-0.375 inch thick stainless steel members, and more specifically, they can be 0.25 inch thick stainless steel members. These components, however, can have different thicknesses in other embodiments. [0144] FIG. 23 is a cross-sectional view taken along line 23-23 of FIG. 22C illustrating one suitable embodiment of the integral structure for the deck 2030, and FIG. 24 is a detailed view of a portion of the deck shown in FIG. 23. In this embodiment, the deck 2030 includes bracing 2140, such as joists, extending laterally between the side panels 2131. The deck 2030 further includes a first panel 2135 attached to the upper side of the bracing 2140, and a second panel 2137 attached to the lower side of the bracing 2140. The deck 2130 can further include a plurality of through bolts 2142 and nuts 2144 that secure the first and second panels 2135 and 2137 to the bracing 2140. As best shown in FIG. 24, the bracing 2140 has a plurality of holes 2145 that receive the through bolts 2142. The nuts 2144 can be welded to the bolts 2142 to enhance the connection between these components. [0145] Referring again to FIGS. 22A-C, the processing stations 2050 can be electrochemical deposition chambers, cleaning capsules, annealing stations, metrology stations, cleaning/etching capsules, and/or other types of processing stations. Depending on the processing station 2050, it may further include a head 2151 having a workpiece holder (not shown) that positions the workpiece relative to the vessels (not shown). The heads 2151 are typically raised and lowered relative to the deck 2030 for loading/unloading workpieces into the processing stations 2050. As such, the modular tool unit 2100 can further include a plurality of lift units 2170 fixedly attached to the deck 2030. The lift units 2170 can be lift- rotate units that not only raise and lower the heads 2151 , but also rotate the heads about horizontal axes between a faceup and a facedown position. Each lift unit 2170 further includes a flange with interface members and fasteners for fixedly attaching the lift unit 2170 at a known location relative to the deck 2030. The interface between the lift units 2170 and the deck 2030 can be substantially similar to that of the interface between the processing stations 2050 and the deck 2030 such that the positions of the heads 2151 are at known locations in the fixed reference frame of the mounting module 2020.

[0146] Referring to FIG. 22B, the robot 2066 of the transport system 2060 can include a waist member 2165 and a single-link arm 2167 fixedly attached to the waist member 2165. The single-link arm 2167 has only one link that is fixedly attached to the waist member 2165 such that the single-link arm 2167 rotates with the waist member 2165. The robot 2066 further includes first and second end-effectors 2068a-b rotatably attached to the single-link arm 2167 to rotate coaxially about a common rotation axis. The robot 2066 with the single- link arm 2167 and the dual coaxial end-effectors 2068a-b are described in more detail in U.S. Patent Nos. 6,752,584 and 6,749,390, and U.S. Patent Application No. 60/586,514, entitled Transfer Devices And Methods For Handling Microfeature Workpieces Within An Environment Of A Processing Machine, filed on July 9, 2004, all of which are herein incorporated by reference.

[0147] The modular tool unit 2100 can further include door assemblies 2180a and 2180b for closing the openings 2117 (shown in FIG. 22B only) and scanning the wafers within the pods 2115 (FIGS. 22A and 22C). The door assemblies 2180a and 2180b further include scanners 2182a and 2182b (FIGS. 22A and 22C) for optically and/or electronically scanning the workpieces within the pods 2115 as the door assemblies 2180a-b move between a closed position and an open position. More specifically, after a pod 21 15 (FIG. 22A) has been engaged with the outer wall around an opening 21 17 (FIG. 22B), the corresponding door assembly opens a door of the pod 2115 and moves downwardly into an interior pocket (not shown) so that the pod door is protected and the interior of the pod 21 15 is opened to the interior of the modular tool unit 2100. The door assemblies 2180a-b maintain the environments in both the modular tool unit 2100 and the pods 21 15 at clean standards. An example of a pod for 300 mm workpieces and the interface between the pod 2115 and similar door assemblies are described in U.S. Patent No. 6,717,171 , which is herein incorporated by reference. The transport system 2060 can then control the end-effector 2068 for ingress/egress through the opening 2117 to the pod 2115. [0148] FIG. 25 A is a rear isometric view and FIG. 25B is a front isometric view of one of the door assemblies 2180 described above with reference to FIGS. 22A-C. The door assembly 2180 includes the scanner 2182, a guide track 2183, and a door panel 2184 that moves relative to the guide track 2183. The guide track 2183 is fixed to the load/unload module 2014 (FIG. 22C). The door assembly 2180 further includes a carriage 2185 slidably attached to the guide track 2183, and an actuator assembly 2190 attached to the carriage 2185. The actuator assembly 2190 includes a motor (not shown) that moves the door panel 2184 vertically with respect to the carriage 2185. The actuator assembly 2190 further includes a cam follower 2192 having an angled slot 2194 and a cam 2196 received within the slot 2194. The motor 2190 moves the cam follower 2192 and the door panel 2184 so that the cam follower 2192 rides along the cam 2196.

[0149] The door assembly 2180 operates to raise/lower the door panel 2184 and move the door panel 2184 laterally in a depth-wise direction "d" with respect to the guide track 2183. More specifically, the carriage 2185 moves vertically (arrow Mi) along the guide track 2183 until the door panel 2184 is raised to approximately the level of the opening 2117 (FIG. 22B). At this point, the actuator assembly 2190 raises the cam follower 2192 and the door panel 2184 such that the cam 2196 moves the door laterally along a second movement (arrow M₂) and then a third movement (arrow M₃). The slot 2194 is configured with two different segments at different angles to accordingly drive the door panel 2184 along the second movement M₂ and the third movement M₃. This process is reversed to lower the door panel 2104 and open the opening 2117.

[0150] The door assembly 2180 illustrated in FIGS. 25A and 25B opens and closes the door panel 2184 in a limited lateral stroke. As such, the door assembly 2180 only requires a slight depth in the depth-wise direction "d" to operate between open and closed positions. This is advantageous because it reduces the overall depth D (FIG. 22C) of the modular tool unit. One modular tool unit manufactured by Semitool, Inc., for example, reduces the overall depth D of the modular tool unit by approximately 5 inches with the door assembly 2180 illustrated in FIGS. 25A and 25B. ^'

[0151] From the foregoing, it will be appreciated that specific embodiments of the invention have been described herein for purposes of illustration, but that various modifications may be made without deviating from the spirit and scope of the invention, including, but not limited to, variations in size, materials, shape, form, function and manner of operation, assembly and use.

Claims

CLAIMSWhat is claimed is:

1. A tool unit for heat treating microelectronic workpieces, comprising: a holding station; a thermal processing station; a transport system for moving the microelectronic workpieces between the holding station and the thermal processing station; and wherein the tool unit has a docking unit for connecting the tool unit to a load/unload module.

2. The tool unit of claim 1 , wherein the transport system comprises a robot having an arm and an end-effector.

3. The tool unit of claim 1 , wherein the transport system comprises a linear track and a robot, which moves linearly along the track.

4. The tool unit of claim 1 further comprising a load/unload module connected at one end of the tool unit.

5. The tool unit of claim 1 , wherein the thermal processing station comprises a thermally conductive heating member and a cooling member.

6. The tool unit of claim 1, wherein the thermal processing station comprises: a carousel assembly having a frame for holding at least one microelectronic workpiece; a base having a heating member and a cooling member mounted thereto; a motor coupled to the carousel assembly, wherein the motor rotates the carousel assembly to a first position so that the at least one microelectronic workpiece is in thermal contact with the heating member and subsequently to a second position so that the microelectronic workpiece is in thermal contact with the cooling member.

7. The tool unit of claim 1, wherein the thermal processing station comprises: a first thermal processing chamber having a heating member; a second thermal processing chamber having a cooling member; a carousel having a frame adapted to receive and hold a microelectronic workpiece; a motor coupled to the carousel; and wherein the motor rotates the carousel and moves the microelectronic workpiece from the first thermal processing chamber to the second thermal processing chamber.

8. The tool unit of claim 1 further comprising a calibration unit for setting a fixed reference frame of the tool unit.

9. The tool unit of claim 8, wherein the calibration unit comprises a distance measuring device for measuring distances in three dimensions.

10. The tool unit of claim 8, wherein the calibration unit comprises a first distance measuring device positioned perpendicular to the transport system, a second distance measuring device positioned parallel to the transport system and a third distance measuring device positioned vertically to the ^'transport system.

11. An intermediate module of an integrated tool system for use in processing microelectronic workpieces, comprising: a dimensionally stable mounting module having a first docking unit with alignment elements for connecting the mounting module to a load/unload module and a second docking unit with alignment elements for connecting the mounting module to a main processing unit; and a thermal processing station connected to the mounting module between the front and second docking units.

12. The intermediate module of claim 11 , wherein the thermal processing station comprises: a heating member; a cooling member; and wherein the thermal processing station has a first position in which the heating member is in thermal contact with a microelectronic workpiece and a second position in which the cooling member is in thermal contact with the microelectronic workpiece.

13. The intermediate module of claim 11, wherein the thermal processing station comprises: a rotatable carousel assembly configured to support one of the microelectronic workpieces, wherein the carousel assembly rotates the supported microelectronic workpiece between a loading station, a heating station, and a cooling station; and, a process fluid distribution system coupled to the carousel assembly and having a passageway for delivering process fluid to the microelectronic workpiece.

14. The intermediate module of claim 11 , wherein the thermal processing station comprises: a rotatable carousel assembly configured to support at least one microelectronic workpiece; a loading station; a heating station; a cooling station; and, a driver coupled to the carousel assembly for rotation of the carousel assembly, wherein the at least one microelectronic workpiece is rotated between the loading, heating and cooling stations.

15. The intermediate module of claim 11, wherein the thermal processing station comprises: a rotatable carousel assembly having a frame configured to support a plurality of workpieces; a heating station; a cooling station, wherein the heating and cooling stations are positioned radially outwardly from a central axis of the carousel assembly; and, a driver coupled to the carousel assembly to selectively rotate the plurality of workpieces between the heating station and the cooling station.

16. The intermediate module of claim 11 , wherein the thermal processing station comprises: a base having a heating member and a cooling member; a rotatable carousel assembly having a frame configured to support a plurality of microelectronic workpieces; and, a driver coupled to the carousel assembly for rotation of the carousel assembly between a first position, wherein one of the plurality of workpieces is in thermal contact with the heating element and a second position, wherein the one of the plurality of workpieces is in thermal contact with the cooling element.

17. A modular tool system for processing a workpiece, comprising: a load/unload unit; a thermal processing unit removeably connected to the load/unload unit; a wet chemical processing unit removeably connected to the thermal processing station, the wet chemical processing unit having at least one wet chemical processing chamber; and a transport system for moving the workpiece between the load/unload unit, the thermal processing unit and the wet chemical processing unit.

18. The modular tool system of claim 17, wherein the thermal processing unit comprises: a holding station; a thermal processing station; and a transport system for moving the microelectronic workpieces between the load/unload unit and the thermal processing unit.

19. The modular tool system of claim 17, wherein the transport system comprises a track mounted to the wet chemical processing unit and a first robot mounted to the track to translate linearly along the track.

20. The modular tool system of claim 19, wherein the transport system further comprises a track mounted to the thermal processing unit and a second robot mounted to the track to translate linearly along the track.

21. The modular tool system of claim 19, wherein the transport system further comprises a second robot mounted to the thermal processing unit, the second robot dedicated to moving workpieces between the load/unload unit and the thermal processing unit.

22. The modular tool system of claim 17, wherein: the thermal processing unit has a first fixed reference frame having first attachment elements at predetermined locations and a second fixed reference frame having second attachment elements at predetermined locations; the load/unload unit has first fasteners engaged with the first attachment elements of the thermal processing unit; and the wet chemical processing unit has second fasteners engaged with the second attachment elements of the thermal processing unit.

23. The modular tool system of claim 18 wherein the thermal processing unit comprises: a first rotatable carousel assembly configured to support one of the microelectronic workpieces, wherein the first carousel assembly rotates the one of the microelectronic workpieces between a first heating station and a first cooling station; and a second rotatable carousel assembly configured to support a second one of the microelectronic workpieces, wherein the second carousel assembly rotates the second one of the microelectronic workpieces between a second heating station and a second cooling station.

24. A modular tool system comprising: a load/unload unit; a carousel annealing station connected to the load/unload unit; a wet chemical processing unit removeably connected to the thermal processing station, the wet chemical processing unit having at least one electrochemical process station and at least one chemical etching station; and a transport system for moving the workpiece between the load/unload unit, the thermal processing unit and the wet chemical processing unit.

25. The modular tool system of claim 24, wherein the electrochemical process station comprises a process chamber for carrying out electroless deposition of a metal on the workpiece.

26. The modular tool system of claim 25, wherein the metal is copper.

27. The modular tool system of claim 24, wherein the electrochemical process station comprises a process chamber for electroplating a metal on the workpiece.

28. The modular tool system of claim 27, wherein the metal is copper.

29. The modular tool system of claim 24, wherein the electrochemical process station comprises a process chamber for electropolishing the workpiece.

30. The modular tool system of claim 24, wherein the chemical etching station comprises a process chamber for etching a backside of the workpiece.

31. The modular tool system of claim 24, wherein the chemical etching station comprises a process chamber for etching an edge of the workpiece.

32. A modular tool unit for processing of microfeature workpieces, comprising: a dimensionally stable mounting module defining a fixed reference frame, the mounting module having front alignment elements at predetermined locations for referencing a load/unload module with the fixed reference frame, positioning elements at predetermined locations in the fixed reference frame, and attachment elements; a processing station having a chamber interface member engaged with one of the positioning elements to position the station at a predetermined location in the reference frame and a chamber fastener engaged with one of the attachment elements to secure the station to the mounting module; and a transport system having a transport interface member engaged with one of the positioning elements to position the transport system at a predetermined location in the reference frame and a transport fastener engaged with one of the attachment elements to secure the transport system to the mounting module, wherein the mounting module is configured to maintain relative positions between the front alignment elements and the positioning elements in the fixed reference frame such that the transport system can be automatically calibrated to the processing station.

33. The modular tool unit of claim 32, further comprising a dimensionally stable load/unload module having a first docking unit with first alignment elements arranged in a pattern of the predetermined locations of the front alignment elements and engaged with the front alignment elements.

34. The modular tool unit of claim 32 wherein the processing station comprises a first wet chemical processing chamber, and wherein the modular tool unit further comprises a second wet chemical processing chamber attached to the mounting module, the second wet chemical processing chamber having a chamber interface member engaged with one of the positioning elements and a chamber fastener engaged with one of the attachment elements.

35. The modular tool unit of claim 34 wherein the first and second wet chemical processing chambers comprise electrochemical deposition chambers for electrochemically depositing material onto microfeature workpieces.

36. The modular tool unit of claim 34 wherein the first and second wet chemical processing chambers comprise surface cleaning chambers for cleaning a surface of microfeature workpieces.

37. The modular tool unit of claim 34 wherein the first and second wet chemical processing chambers are the only wet chemical processing chambers mounted to the mounting module.

38. The modular tool unit of claim 32 wherein: the mounting module has a front section, a width laterally across the front section, a processing section, and a depth from the front section to a backside of the processing section; the front section of the mounting module further comprises a platform extending laterally in a widthwise direction, the platform having a plurality of the positioning elements and a plurality of the attachment elements; the processing section further comprises a deck having a plurality of the positioning elements, a plurality of the attachment elements, and apertures through which a portion of the wet chemical processing chambers extend; and the processing station comprises a first wet chemical processing chamber attached to the deck and the tool further comprises a second wet chemical processing chamber attached to the deck, the second wet chemical processing chamber having a chamber interface member engaged with one of the positioning elements at the deck and a chamber fastener engaged with one of the attachment elements at the deck.

39. The modular tool unit of claim 38 wherein the deck comprises a rigid first panel having positioning elements and attachment elements, a rigid second panel juxtaposed to the first panel, and braces between the first and second panels, wherein the first panel, the second panel and the braces are fastened together.

40. The modular tool unit of claim 38 wherein the transport system further comprises: a linear track having track interface members engaged with positioning elements at the platform and track fasteners engaged with attachment elements at the platform, the track extending laterally in the widthwise direction; and a robot moveably carried by the track to move laterally in the width-wise direction, the robot having a rotatable waist member, an arm attached to the waist member, a first end- effector rotatably attached to the arm to rotate about a rotation axis, and a second end-effector carried by the arm to coaxially rotate about the rotation axis.

41. The modular tool unit of claim 40 wherein the arm has a single link and the single link is fixedly attached to the waist member.

42. The modular tool unit of claim 40 wherein the transport system further comprises a robot attached to the platform, the robot having a waist member, an arm including a first link fixedly attached to the waist member and a second link rotatably attached to the first link, and an end-effector rotatably attached to the second link.

43. A modular tool unit for processing of micro feature workpieces, comprising: a dimensionally stable mounting module defining a fixed reference frame and including front alignment elements at predetermined locations, a platform extending laterally in a width-wise direction, a deck behind the platform, positioning elements at the platform and the deck, and attachment elements at the platform and the deck; a processing station attached to the deck, the processing station having a chamber interface member engaged with one of the positioning elements at the deck and a chamber fastener engaged with one of the attachment elements at the deck; a transport system having a track attached to the platform and a robot mounted to the track to translate linearly along the track, wherein the track extends width-wise relative to the mounting module and includes a track interface member engaged with one of the positioning elements at the platform and a track fastener engaged with one of the attachment elements at the platform, wherein the mounting module is configured to maintain relative positions between the front alignment elements and the positioning elements in the reference frame such that the transport robot can be automatically calibrated to the processing station.

44. The modular tool unit of claim 43, further comprising a dimensionally stable load/unload module having a first docking unit with first alignment elements arranged in a pattern of the predetermined locations of the front alignment elements and engaged with the front alignment elements.

45. The modular tool unit of claim 43 wherein the processing station comprises a first wet chemical processing chamber, and wherein the modular tool unit further comprises a second wet chemical processing chamber attached to the deck, the second wet chemical processing chamber having a chamber interface member engaged with one of the positioning elements and a chamber fastener engaged with one of the attachment elements.

46. The modular tool unit of claim 45 wherein the first and second wet chemical processing chambers comprise electrochemical deposition chambers for electrochemically depositing material onto microfeature workpieces.

47. The modular tool unit of claim 45 wherein the first and second wet chemical processing chambers comprise surface cleaning chambers for cleaning a surface of microfeature workpieces.

48. The modular tool unit of claim 45 wherein the first and second wet chemical processing chambers are the only wet chemical processing chambers mounted to the mounting module.

49. The modular tool unit of claim 43 wherein the deck comprises a rigid first panel having positioning elements and attachment elements, a rigid second panel juxtaposed to the first panel, and braces between the first and second panels, wherein the first panel, the second panel and the braces are fastened together.

50. The modular tool unit of claim 43 wherein the robot further comprises a waist member, an arm fixedly attached to the waist member, a first end-effector attached directly to the arm without an intervening link pivotally attached between the arm and the first end- effector, and a second end-effector attached to the arm to rotate coaxially with the first end- effector.

51. The modular tool unit of claim 43 wherein the robot further comprises a waist member, an arm including a first link fixedly attached to the waist member and a second link rotatably attached to the first link, and an end-effector rotatably attached to the second link.